CN103572233B - 一种贵金属陶瓷薄膜及其制备方法 - Google Patents
一种贵金属陶瓷薄膜及其制备方法 Download PDFInfo
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- CN103572233B CN103572233B CN201310486551.9A CN201310486551A CN103572233B CN 103572233 B CN103572233 B CN 103572233B CN 201310486551 A CN201310486551 A CN 201310486551A CN 103572233 B CN103572233 B CN 103572233B
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- ceramic
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- precious metal
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- 239000000919 ceramic Substances 0.000 title claims abstract description 94
- 229910000510 noble metal Inorganic materials 0.000 title claims abstract description 52
- 238000002360 preparation method Methods 0.000 title claims abstract description 25
- 239000010408 film Substances 0.000 claims abstract description 85
- 229910052751 metal Inorganic materials 0.000 claims abstract description 36
- 239000002184 metal Substances 0.000 claims abstract description 36
- 239000002245 particle Substances 0.000 claims abstract description 33
- 229910000923 precious metal alloy Inorganic materials 0.000 claims abstract description 33
- 238000004544 sputter deposition Methods 0.000 claims abstract description 33
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 32
- 239000002131 composite material Substances 0.000 claims abstract description 32
- 238000002161 passivation Methods 0.000 claims abstract description 29
- 238000010521 absorption reaction Methods 0.000 claims abstract description 28
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 24
- 229910004298 SiO 2 Inorganic materials 0.000 claims abstract description 20
- 239000010409 thin film Substances 0.000 claims abstract description 12
- 239000011159 matrix material Substances 0.000 claims abstract description 11
- 150000002739 metals Chemical class 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims description 54
- 229910045601 alloy Inorganic materials 0.000 claims description 36
- 239000000956 alloy Substances 0.000 claims description 36
- 239000007789 gas Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 238000000151 deposition Methods 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 14
- 238000004140 cleaning Methods 0.000 claims description 13
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- 238000003795 desorption Methods 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- 239000008367 deionised water Substances 0.000 claims description 6
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 6
- 229910021641 deionized water Inorganic materials 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000002294 plasma sputter deposition Methods 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 238000001659 ion-beam spectroscopy Methods 0.000 claims description 3
- 239000003795 chemical substances by application Substances 0.000 claims description 2
- 238000005202 decontamination Methods 0.000 claims description 2
- 230000003588 decontaminative effect Effects 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims 1
- 238000000197 pyrolysis Methods 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 6
- 239000000203 mixture Substances 0.000 abstract description 4
- 230000033228 biological regulation Effects 0.000 abstract description 2
- 239000010936 titanium Substances 0.000 description 29
- 239000013049 sediment Substances 0.000 description 19
- 239000011195 cermet Substances 0.000 description 18
- 230000003287 optical effect Effects 0.000 description 15
- 239000010453 quartz Substances 0.000 description 12
- 239000002082 metal nanoparticle Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 9
- 238000005275 alloying Methods 0.000 description 8
- 239000002105 nanoparticle Substances 0.000 description 8
- 230000009286 beneficial effect Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 239000012535 impurity Substances 0.000 description 6
- 238000007669 thermal treatment Methods 0.000 description 6
- 230000006399 behavior Effects 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 239000000356 contaminant Substances 0.000 description 5
- 238000007599 discharging Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 5
- 238000004804 winding Methods 0.000 description 5
- 239000004411 aluminium Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910001316 Ag alloy Inorganic materials 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000002923 metal particle Substances 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- 239000005864 Sulphur Substances 0.000 description 2
- 229910001069 Ti alloy Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 241000186216 Corynebacterium Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910000905 alloy phase Inorganic materials 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 230000003115 biocidal effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004567 concrete Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006356 dehydrogenation reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000035772 mutation Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000011236 particulate material Substances 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910001392 phosphorus oxide Inorganic materials 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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CN103572233B true CN103572233B (zh) | 2015-09-23 |
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CN106167892B (zh) * | 2016-08-15 | 2018-12-18 | 中国科学院宁波材料技术与工程研究所 | 一种双金属/陶瓷复合薄膜及其制备方法 |
CN108588796B (zh) * | 2018-04-09 | 2020-01-10 | 浙江工业大学 | 一种弥散贵金属微粒的陶瓷涂层及其制备工艺 |
CN110983270B (zh) * | 2019-12-03 | 2021-12-03 | 天津大学 | 氧化物-金属复合纳米玻璃材料 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1475596A (zh) * | 2002-08-12 | 2004-02-18 | 光洋应用材料科技股份有限公司 | 用于反射型平面显示器的反射膜及溅镀靶材的合金材料 |
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EP1548525B2 (fr) * | 2003-12-23 | 2017-08-16 | Rolex Sa | Elément en céramique pour boîte de montre et procédé de fabrication de cet élément |
DE102005016244A1 (de) * | 2005-04-08 | 2006-10-19 | Infineon Technologies Ag | Speicherzelle, Speichereinrichtung und Verfahren zu deren Herstellung |
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CN1475596A (zh) * | 2002-08-12 | 2004-02-18 | 光洋应用材料科技股份有限公司 | 用于反射型平面显示器的反射膜及溅镀靶材的合金材料 |
Non-Patent Citations (1)
Title |
---|
"Ag- Al2O3太阳能选择性吸收涂层的研制";王泉河 等;《太阳能学报》;20111231;第32卷(第12期);第1页右栏第2-3段,第2页左上栏第1段、右上栏第1段、右下栏第1段 * |
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