CN103533739B - Cover fixing device of induction coupling plasma processing apparatus - Google Patents

Cover fixing device of induction coupling plasma processing apparatus Download PDF

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Publication number
CN103533739B
CN103533739B CN201310390661.5A CN201310390661A CN103533739B CN 103533739 B CN103533739 B CN 103533739B CN 201310390661 A CN201310390661 A CN 201310390661A CN 103533739 B CN103533739 B CN 103533739B
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cover
fixed
dielectric
dielectric cover
support
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CN103533739A (en
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佐藤亮
齐藤均
天野健次
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority claimed from CN201010141151.0A external-priority patent/CN101848596B/en
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Abstract

The invention provides a cover fixture and a cover fixing device of an induction coupling plasma processing apparatus, which can suppress breakage of a cover which covers the lower surface of a window member and production of particles and to easily attach and detach the cover to/from an induction coupling plasma processing apparatus. The dielectric cover of the induction coupling plasma processing apparatus includes portions to be supported which each have a lower surface and a side end connected with the lower surface. A dielectric cover fixture includes support portions which abut against the lower surfaces of the portions to be supported of the dielectric cover to support the portions to be supported with at least one of a support beam and a dielectric wall as a support member for supporting the dielectric wall with the portions sandwiched, and a portion to be fixed which is connected to the support portions, partially arranged by side ends of the portions to be supported, and fixed without change in positional relation with the support beam.

Description

The cover fixing device of device for inductively coupled plasma processing
It is on March 25th, 2010, Application No. 2010101411510, entitled " inductance coupling the applying date that the application is The divisional application of the application of the cover fixed appliance and cover fixing device of conjunction plasma treatment appts ".
Technical field
The present invention relates to be used in device for inductively coupled plasma processing to the window structure by chamber top plate part is constituted The cover fixing device that the cover that the lower surface of part is covered is fixed.
Background technology
In the manufacturing process of FPD (flat-panel monitor), to FPD with glass substrate carry out plasma etching, plasma The various plasma treatments such as ashing, plasma film forming.Used as the device for carrying out such plasma treatment, being known to produce Inductively coupled plasma (ICP) processing meanss of high-density plasma.
Device for inductively coupled plasma processing includes：Process chamber, it is airtightly kept, and can be to as being of target objects by Substrate carries out plasma treatment；The high frequency antenna being configured in outside process chamber.Process chamber has the top plate portion for constituting process chamber , the window member being made up of materials such as dielectrics, high frequency antenna is configured in the top of window member.In the inductively coupled plasma In processing meanss, by applying RF power to high frequency antenna, indoor formation induction field is being processed across window member, utilizing should Induction field will be directed to the indoor processing gas of process and be converted into plasma, and substrate is carried out using the plasma The plasma treatment of regulation.
In device for inductively coupled plasma processing, when the lower surface of window member is exposed in process chamber, the window member Lower surface by damaging that plasma is caused.Because window member cannot be loaded and unloaded easily, therefore, even if sustaining damage, Cannot easily change or clean.Therefore, as described in patent document 1, window member is covered using the cover that can easily load and unload Lower surface.Thereby, it is possible to protect the lower surface of window member, and, can easily change or clean the cover for sustaining damage.
Patent document 1：Japanese Unexamined Patent Publication 2001-28299 publications
As described in patent document 1, in the past, cover is fixed in the supporting member of window member by multiple screws.In more detail It is bright, in conventional cover fixing means, be partly respectively formed near the circumference of cover for the bar portion of screw run through it is multiple Through hole, is inserted into the bar portion of screw in each through hole from the lower face side of cover, and the bar portion is screwed into into the supporting member of window member In and cover is fixed.But, in the conventional cover fixing means following problem is generated.
When carrying out plasma treatment in the process chamber, the lower surface of cover is continuously exposed in plasma, therefore, cover Lower surface temperature rise.During the underlaying surface temperature of cover rises, in the lower surface of cover uneven temperature is produced Distribution, as a result, the small deformations such as stretching, bending are produced in cover.Now, due to the material of cover（Such as ceramics）With supporting structure The material of part（Such as aluminium）Between thermal coefficient of expansion difference, therefore cover deflection and supporting member deflection produce it is poor It is different.Therefore, in order that partly not moving completely near the through hole of cover and cover being fixed on into supporting member using screw In the case of, to partly applying excessive stress near the through hole of cover, being covered with may be from the parts against wear.
It is therefore also considered that being sufficiently above the gauge diameter of screw by making the through-hole diameter of cover, also, cover and screw are set The mechanism that can relatively move, will not be to partly applying excessive stress near the through hole of cover.However, deform in cover When, the stress that cover applies is also easy to concentrate on through hole part nearby, thus, it is easy to because of the crackle produced as starting point with through hole Cause the breakage of cover.
In addition, in conventional cover fixing means, being formed with what is formed by the head of multiple screws in the top surface of process chamber Multiple convex portions.The secondary product produced during plasma treatment is easy to be attached on the convex portion.Therefore, in plasma treatment process In, once the secondary product for being attached to screw head is peeled off from the head of screw and produces particulate（Particles floating）, the particulate is just It is likely to result in etching bad.In addition, screw head produces particulate by plasma consumption, the particulate is also possible to cause erosion Carve bad.
Also, in conventional cover fixing means, cover is fixed using multiple screws, therefore there is the handling operation of cover Poor such problem points.In addition, tackling the maximization of FPD, the process chamber of device for inductively coupled plasma processing is also large-scale Change.In the device for inductively coupled plasma processing with large-scale process chamber, sometimes window member and cover are respectively by being divided into Some constitute.In this case, more screws are used to fix cover, therefore, the handling operation of cover is entered One step is reduced.
The content of the invention
The present invention be in view of the problem points and make, its object is to provide and a kind of fill in inductively coupled plasma process Can suppress in putting the damaged and particulate of cover for being covered to the lower surface of window member generation and also can be easily The cover fixed appliance and cover fixing device of the device for inductively coupled plasma processing of handling cover.
The cover fixed appliance of the device for inductively coupled plasma processing of the present invention is used for inductively coupled plasma and processes dress Put.The device for inductively coupled plasma processing includes：Process chamber, it has the window member for constituting top plate portion, for carrying out etc. Ion processing；High frequency antenna, it is configured in the top of above-mentioned window member, in above-mentioned process interior formation induction field； Supporting member, it is used to support above-mentioned window member；Cover, it is used to cover the lower surface of above-mentioned window member.The present invention's Cover fixed appliance is used to fix above-mentioned cover.
The cover fixed appliance of the present invention includes：Support, it is used for the lower surface with the part as above-mentioned cover Supported portion supported；By fixed part, it is fixed in above-mentioned supporting member.
The cover fixed appliance of the present invention can also also have the above-mentioned screw that above-mentioned supporting member is fixed on by fixed part. In this case, the head of above-mentioned screw can also be configured in the top of above-mentioned supporting member, and the bar portion of above-mentioned screw is passed through Put on and state supporting member and combined by fixed part with above-mentioned.
In addition, in the cover fixed appliance of the present invention, above-mentioned support can also include：Upper surface, it is propped up with above-mentioned The lower surface of bearing portion is abutted；Lower surface, it with the distance of above-mentioned upper surface by fixed part away from above-mentioned with being diminished.
In addition, in the cover fixed appliance of the present invention, the lower surface of above-mentioned supported portion can also be the following table of above-mentioned cover The part in face, in the lower surface of above-mentioned cover, with the lower surface of above-mentioned supported portion the portion in addition to above-mentioned supported portion is located at The mode of the top of the lower surface for dividing is formed with stage portion, and above-mentioned support is configured in above-mentioned on the lower surface of above-mentioned cover Rank portion.In this case, above-mentioned support can also have the thickness equal with the step of above-mentioned stage portion.
In addition, the cover fixed appliance of the present invention can also be additionally included in 2 cover fixed appliances and being adjacent to match somebody with somebody in the horizontal direction When putting, the sidepiece of shape that is engaged with each other of the sidepiece of 2 cover fixed appliances.
In addition, in the cover fixed appliance of the present invention, above-mentioned cover can also be included with lower surface and upper surface, composition The cover main body of the major part of cover, above-mentioned supported portion is configured in the top of the upper surface of above-mentioned cover main body, above-mentioned support It is configured between the upper surface of the lower surface of above-mentioned supported portion and above-mentioned cover main body.
The cover fixing device of the device for inductively coupled plasma processing of the present invention is used to fix above-mentioned cover, including：The present invention Cover fixed appliance；And by the above-mentioned fixed mechanism that above-mentioned supporting member is fixed on by fixed part of the cover fixed appliance.
In the cover fixing device of the present invention, above-mentioned fixed mechanism can also lift the above-mentioned mechanism by fixed part.Or Person, above-mentioned fixed mechanism can also be the mechanism limited the movement of the above-mentioned above-below direction by fixed part.
Using the present invention, can use includes the support of the supported portion for supporting cover and is fixed on supporting member By the cover fixed appliance of fixed part fixing cover.Thus, using the present invention, do not formed on cover for inserting for the bar portion of screw The multiple through holes for entering can just fix cover.As a result, using the present invention, play can suppress the generation of the breakage of cover and particulate and And can easily load and unload effect as cover.
Description of the drawings
Fig. 1 is the device for inductively coupled plasma processing of the cover fixed appliance for representing the 1st embodiment including the present invention Sectional view.
Fig. 2 is the stereogram for representing dielectric wall and hanger in Fig. 1.
Fig. 3 is the stereogram for representing dielectric wall and high frequency antenna in Fig. 1.
Fig. 4 is the upward view for representing cover and cover fixed appliance in Fig. 1.
Fig. 5 is the sectional view in the section for representing the position shown in the 5-5 in Fig. 4.
Fig. 6 is the sectional view shown in a 6-6 example, in Fig. 4 for illustrating cover fixed appliance fixing means.
Fig. 7 is the sectional view of another example of the fixing means for representing cover fixed appliance.
Fig. 8 is the upward view of the cover for representing comparative example.
Fig. 9 is the cover and the sectional view of cover fixed appliance of the 1st variation of the 1st embodiment for representing the present invention.
Figure 10 is the cover and the upward view of cover fixed appliance of the 2nd variation of the 1st embodiment for representing the present invention.
Figure 11 is the cover and the upward view of cover fixed appliance of the 3rd variation of the 1st embodiment for representing the present invention.
Figure 12 is the sectional view of an example of the shape of the sidepiece of the cover fixed appliance for representing the 3rd variation.
Figure 13 is the stereogram of another example of the shape of the sidepiece of the cover fixed appliance for representing the 3rd variation.
Figure 14 is the cover and the upward view of cover fixed appliance of the 4th variation of the 1st embodiment for representing the present invention.
Figure 15 is the cover and the sectional view of cover fixed appliance of the 5th variation of the 1st embodiment for representing the present invention.
Figure 16 is the cover and the upward view of cover fixed appliance of the 6th variation of the 1st embodiment for representing the present invention.
Figure 17 is the sectional view shown in the cover and cover fixed appliance, 17-17 in Figure 16 for illustrating the 6th variation.
Figure 18 is the sectional view of another example of the fixing means for representing cover fixed appliance.
Figure 19 is the sectional view of the another example of the fixing means for representing cover fixed appliance.
Figure 20 is the sectional view of the another example of the fixing means for representing cover fixed appliance.
Figure 21 is the sectional view of the cover fixing device of the 2nd embodiment for representing the present invention.
Figure 22 is the sectional view of another state for representing the cover fixing device shown in Figure 21.
Figure 23 is the sectional view of the cover fixing device of the 3rd embodiment for representing the present invention.
Figure 24 is the sectional view of the cover fixing device of the variation of the 3rd embodiment for representing the present invention.
Figure 25 is the sectional view of the cover fixing device of the 4th embodiment for representing the present invention.
Figure 26 is the sectional view of the cover fixing device of the variation of the 4th embodiment for representing the present invention.
Figure 27 is the sectional view of the cover fixing device of the 5th embodiment for representing the present invention.
Figure 28 is the stereogram for the part for representing the cover fixing device in Figure 27.
Figure 29 is the sectional view of the cover fixing device of the 6th embodiment for representing the present invention.
Figure 30 is the sectional view of the cover fixing device of the 7th embodiment for representing the present invention.
Specific embodiment
1st embodiment
Below, embodiments of the present invention are described in detail referring to the drawings.First, with reference to Fig. 1～Fig. 4 to including The construction of the device for inductively coupled plasma processing of the cover fixed appliance of the 1st embodiment of the present invention is illustrated.Fig. 1 is table Show the sectional view of device for inductively coupled plasma processing.Fig. 2 is to represent the dielectric wall as " window member " and the suspension in Fig. 1 The stereogram of device.Fig. 3 is the stereogram for representing dielectric wall and high frequency antenna in Fig. 1.Fig. 4 is to represent the conduct in Fig. 1 The upward view of the dielectric cover of " cover " and the dielectric cover fixed appliance as " cover fixed appliance ".
Device for inductively coupled plasma processing 1 shown in Fig. 1 is for example for the glass substrate to FPD（Hereinafter only it is denoted as " substrate "）S carries out plasma treatment.As FPD, liquid crystal display can be included（LCD）, electroluminescent（Electro Luminescence；EL）Display, Plasmia indicating panel（PDP）Deng.
Device for inductively coupled plasma processing 1 includes antenna chamber 4 and process chamber 5, and the antenna chamber 4 and process chamber 5 are by leading Body container 2 and be configured in the main body container 2 and the space in main body container 2 is divided into upper and lower 2 spaces as " window What component " dielectric wall 6 was constituted.Antenna chamber 4 marks off the upside space of the dielectric wall 6 in main body container 2,5 strokes of process chamber Separate the lower side space of the dielectric wall 6 in main body container 2.Thus, dielectric wall 6 constitutes the bottom of antenna chamber 4, and at composition The top plate portion of reason room 5.Process chamber 5 is airtightly kept, and plasma treatment is carried out to substrate in process chamber 5.
Main body container 2 is the container of the square tube shape with top, bottom and 4 sidepieces.In addition, main body container 2 also may be used Being the container of the drum with top, bottom and cylindrical portion.As the material of main body container 2, aluminium, aluminium alloy can be adopted Deng conductive material.In the case where aluminium to be used as the material of main body container 2, in order to not from the internal face generation of main body container 2 Pollutant, to the internal face of main body container 2 alumite is implemented.In addition, main body container 2 is grounded.
Dielectric wall 6 forms the approximately parallelepiped body shape of upper surface, bottom surface and 4 sides with generally square shape Shape.The thickness of dielectric wall 6 is, for example, 30mm.Dielectric wall 6 is formed by dielectric material.As the material of dielectric wall 6, example Al can such as be adopted2O3Deng ceramics, quartz.Used as an example, dielectric wall 6 is divided into 4 parts.That is, dielectric wall 6 has There are part 1 wall 6A, part 2 wall 6B, third portion wall 6C and the 4th part of wall 6D.In addition, dielectric wall 6 can not also be divided It is cut into 4 parts.
Device for inductively coupled plasma processing 1 also includes the bearing support 7 of the supporting member as supporting dielectric wall 6 and props up Bolster 16.Bearing support 7 is installed on the side wall of main body container 2.As shown in Fig. 2 backbar 16 is in cross shape.Dielectric wall 64 part of wall 6A, 6B, 6C, 6D are supported by frame 7 and backbar 16 is supported.
The hanger 8B of hanger 8A and cylindrical shape of the device for inductively coupled plasma processing 1 also including drum, 8C, 8D, 8E, the hanger 8A, 8B, 8C, 8D, 8E have respectively the upper end being connected with the top plate portion of main body container 2.Supporting The middle body on the surface thereon of beam 16（Cruciform section）It is connected to the bottom of hanger 8A.In addition, backbar 16 exists The lower end of hanger 8B, 8C, 8D, 8E is connected at the 4 of the centre of the middle body of its upper surface and the 4 of cross tip portions Portion.So, backbar 16 is configured to be hung down using the top plate portion of 5 hanger 8A～8E autonomous agents container 2, holds in main body The substantial middle position maintenance level state of the above-below direction inside device 2.
Although not shown, but in backbar 16 it is formed with gas flow path, the Yi Jiyong for supplying processing gas described later In the multiple opening portions for releasing the processing gas being fed in the gas flow path.As the material of backbar 16, can adopt and lead Electric material.As the conductive material, it is preferred to use the metal material such as aluminium.In the situation of the material that aluminium is used as backbar 16 Under, in order to from surface generation pollutant, to the surfaces externally and internally of backbar 16 alumite not implemented.
Device for inductively coupled plasma processing 1 also includes high frequency antenna（Hereinafter brief note makees antenna）13, the high frequency antenna 13 Inside, the i.e. outside of process chamber 5 for being configured in antenna chamber 4 and the top for being configured in dielectric wall 6.As shown in figure 3, antenna The generally square vertical view of 13 formation is square spiral-shaped.Antenna 13 is configured on the upper surface of dielectric wall 6.In main body The outside of container 2 is provided with adaptation 14 and high frequency electric source 15.One end of antenna 13 is connected to high frequency electric source by adaptation 14 15.The other end of antenna 13 is connected to the inwall of main body container 2, is grounded by main body container 2.
Device for inductively coupled plasma processing 1 also include covering the lower surface of dielectric wall 6 as " cover " Dielectric cover 12.Dielectric cover 12 forms the upper surface with generally square shape and bottom surface, the tabular of 4 sides.Electricity is situated between Body cover 12 is formed by dielectric material.As the material of dielectric cover 12, for example, can adopt Al2O3Deng ceramics, quartz.
Used as an example, dielectric cover 12 is divided into 4 parts in the same manner as dielectric wall 6.That is, as shown in figure 4, Dielectric cover 12 has part 1 cover 12A, part 2 cover 12B, third portion cover 12C and the 4th part cover 12D.1st～4th Cover 12A, 12B, 12C, 12D is divided to cover to the lower surface of the 1st～the 4th part of wall 6A, 6B, 6C, 6D of dielectric wall 6 respectively Lid.In addition, dielectric cover 12 can also be not fragmented into 4 parts.
As shown in figure 4, device for inductively coupled plasma processing 1 also include for fix dielectric cover 12, as this reality Apply dielectric cover fixed appliance 18A, 18B1,18B2,18B3, the 18B4 of " the cover fixed appliance " of mode.Describe in detail afterwards, electricity Amboceptor cover 12 is fixed by dielectric cover fixed appliance 18A, 18B1,18B2,18B3,18B4.In addition, although not shown, but in electricity Jie The multiple opening portions corresponding with the opening portion of backbar 16 are formed with body cover 12.
When plasma treatment is carried out to substrate S, the height of induction field formation is supplied from high frequency electric source 15 to antenna 13 Frequency electric power（The RF power of such as 13.56MHz）.Thereby, it is possible to induction field is formed in process chamber 5 using antenna 13.Should Processing gas described later are converted into plasma by induction field.
Gas supply device 20 is additionally provided with the outside of main body container 2.Gas supply device 20 is by being inserted into suspension Gas supply pipe 21 in the hollow bulb of device 8A is connected to the gas flow path of backbar 16.Gas supply device 20 is used for supply etc. The processing gas that ion processing is adopted.When plasma treatment is carried out, processing gas pass through gas supply pipe 21, backbar 16 The opening portion of interior gas flow path, opening portion and dielectric cover 12 is fed in process chamber 5.As processing gas, for example SF can be adopted6Gas.
Device for inductively coupled plasma processing 1 also includes pedestal 22, insulator frame 24, pillar 25, bellows 26 and gate valve 27.Pillar 25 is connected with the lowering or hoisting gear (not shown) for being arranged on the lower section of main body container 2, by being formed in the bottom of main body container 2 The opening portion in portion and be projected in process chamber 5.In addition, pillar 25 has hollow bulb.Insulator frame 24 is arranged on pillar 25.Should Insulator frame 24 forms the box like of upper opening.It is formed with the bottom of insulator frame 24 and is continuously opened with the hollow bulb of pillar 25 Oral area.Bellows 26 is airtightly connected to the bottom interior wall of insulator frame 24 and main body container 2 round pillar 25.Thereby, it is possible to Maintain the air-tightness of process chamber 5.
Pedestal 22 is housed in insulator frame 24.Pedestal 22 has mounting surface 22A for loading substrate S.Mounting surface 22A It is relative with dielectric cover 12.As the material of pedestal 22, for example can be using conductive materials such as aluminium.Aluminium is being used as into pedestal 22 In the case of material, in order to from surface generation pollutant, to the surface of pedestal 22 alumite not implemented.
Adaptation 28 and high frequency electric source 29 are additionally provided with the outside of main body container 2.Pedestal 22 is by through insulator The energization rod of the opening portion of frame 24 and the hollow bulb of pillar 25 is connected to adaptation 28, also, is connected to by the adaptation 28 High frequency electric source 29.When plasma treatment is carried out to substrate S, the RF power of bias is supplied from high frequency electric source 29 to pedestal 22 （The RF power of such as 380kHz）.The RF power is used to be efficiently introduced in the ion in plasma to be positioned in pedestal Substrate S on 22.
Gate valve 27 is arranged at the side wall of main body container 2.Gate valve 27 has opening and closing function, lower in off position to maintain process chamber 5 air-tightness, also, in the on-state can between process chamber 5 and outside conveying substrate S.
Vacuum plant 30 is additionally provided with the outside of main body container 2.Vacuum plant 30 connects via the bottom with main body container 2 The blast pipe 31 for connecing is connected to process chamber 5.When plasma treatment is carried out to substrate S, vacuum plant 30 is discharged in process chamber 5 Air, will maintain vacuum atmosphere in process chamber 5.
Then, the dielectric cover fixed appliance of present embodiment is described in detail with reference to Fig. 4～Fig. 6.Fig. 4 represents dielectric cover 12 and dielectric cover fixed appliance 18A, 18B1,18B2,18B3,18B4.Fig. 5 is to represent the position shown in the 5-5 in Fig. 4 The sectional view in section.Fig. 6 is the sectional view in the section for representing the position shown in the 6-6 in Fig. 4.In the diagram, circle mark is represented Screw.
As described above, there is dielectric cover 12 the 1st～the 4th part to cover 12A～12D.In the diagram, part 1 cover 12A quilts The top left region being configured in the configuring area of whole dielectric cover 12, part 2 cover 12B is configured in whole dielectric cover 12 Configuring area in right regions, third portion cover 12C is configured in the lower-left area in the configuring area of whole dielectric cover 12 Domain, the 4th part cover 12D is configured in the lower right area in the configuring area of whole dielectric cover 12.
In the central portion of dielectric cover 12, it is respectively formed with the 1st～the 4 part cover 12A, 12B, 12C, 12D and is inciting somebody to action Become notch part 12Aa, 12Ba, 12Ca, 12Da of the L-shaped of the opening portion of cross shape when they are combined.
The shape of dielectric cover fixed appliance 18A seen from the side of process chamber 5 be than the central portion in dielectric cover 12 by The slightly larger cross shape in opening portion of the cross shape that notch part 12Aa, 12Ba, 12Ca, 12Da are formed.And, dielectric cover is consolidated Determine the opening portion of the cross shape that utensil 18A is configured to cover dielectric cover 12.In addition, in dielectric cover fixed appliance 18A On can also be formed with the opening portion corresponding with the opening portion of backbar 16.
The shape of the dielectric cover fixed appliance 18B1～18B4 seen from the side of process chamber 5 is rectangle.Dielectric cover Fixed appliance 18B1 its clip between bearing support 7 the 1st and third portion cover 12A, 12C each while to support the 1st and the Cover 12A, 12C in 3 parts.In addition, dielectric cover fixed appliance 18B2 clips the 2nd and the 4th part cover at it between bearing support 7 12B, 12D's is respective while to support the 2nd and the 4th part cover 12B, 12D.In addition, dielectric cover fixed appliance 18B3 its with Clip between bearing support 7 the 1st and part 2 cover 12A, 12B each while to support the 1st and part 2 cover 12A, 12B.Separately Outward, dielectric cover fixed appliance 18B4 clips respective one side ground of the 3rd and the 4th part cover 12C, 12D at it between bearing support 7 Supported.
Describe in detail afterwards, dielectric cover fixed appliance 18A, 18B1,18B2,18B3,18B4 are including more than 1 supporting Portion and 1 are by fixed part.Support is the downside of the supported portion for being configured in the part as dielectric cover 12 supporting The part of the supported portion.Dielectric cover 12 has and dielectric cover fixed appliance 18A, 18B1,18B2,18B3,18B4 bag The supported portion of all support equal numbers for including.
Hereinafter, described in detail shown in Fig. 6 as representative with dielectric cover fixed appliance 18A, 18B1,18B2,18B3,18B4 Dielectric cover fixed appliance 18A construction and effect.As shown in fig. 6, dielectric cover fixed appliance 18A includes supporting the 1st Divide the 1st support 18A1, the 2nd support 18A2 of a part of supporting part 2 cover 12B and the quilt of a part of cover 12A Fixed part 18A3.Although not shown, but dielectric cover fixed appliance 18A also include supporting third portion cover 12C a part the 3rd 4th support of a part of support and the 4th part of supporting cover 12D.1st and the 2nd support 18A1,18A2 is configured to It is connected to by fixed part 18A3, and certainly by fixed part 18A3 to side extension.3rd and the 4th support also with the 1st and the 2nd Bearing portion 18A1,18A2 is identical.
On the other hand, part 1 cover 12A has supported portion 12A1.Supported portion 12A1 there is lower surface 12A1a with And side 12A1b continuous with lower surface 12A1a.Side 12A1b is also the ora terminalis of notch part 12Aa.Supported portion 12A1 Upper surface abuts with the lower surface of at least one of backbar 16 and part 1 wall 6A.In the example shown in Fig. 6, propped up The upper surface of bearing portion 12A1 abuts with the lower surface of both backbar 16 and part 1 wall 6A, but supported portion 12A1 is upper Surface can also be connected to the lower surface of the only one in backbar 16 and part 1 wall 6A.
Equally, part 2 cover 12B has supported portion 12B1.Supported portion 12B1 have lower surface 12B1a and with this The continuous side 12B1b of lower surface 12B1a.In the upper surface of supported portion 12B1 and backbar 16 and part 2 wall 6B extremely Few one lower surface is abutted.In the example shown in Fig. 6, upper surface and backbar 16 and the part 2 of supported portion 12B1 The lower surface of both wall 6B is abutted, but the upper surface of supported portion 12B1 can also be connected to backbar 16 and part 2 wall The lower surface of the only one in 6B.
Cover 12C, 12D also have respectively the supported portion same with above-mentioned supported portion 12A1,12B1 for 3rd and the 4th part.
The upper surface that 1st support 18A1 has lower surface and abuts with the lower surface 12A1a of supported portion 12A1.The The upper surface that 2 support 18A2 have lower surface and abut with the lower surface 12B1a of supported portion 12B1.Equally, the 3rd supporting The upper surface that portion has lower surface and abuts with the lower surface of the supported portion of third portion cover 12C, under the 4th support has The upper surface that surface and the lower surface for covering the supported portion of 12D with the 4th part are abutted.Each lower surface of the 1st～the 4th support Become with away from the taper surface diminished with the distance of the upper surface of each support by fixed part 18A3.
The shape by fixed part 18A3 seen from the side of process chamber 5 is the shape with the cross shape opening portion of dielectric cover 12 Equal or more smaller than its shape of shape.The cross of dielectric cover 12 is inserted into by a part of fixed part 18A3 In shape opening portion.This is configured in side 12A1b, the supported portion of supported portion 12A1 by a part of fixed part 18A3 The side of the side of the side 12B1b, the side of the 3rd support and the 4th support of 12B1.
The side not changed with the position relationship between the backbar 16 as supporting member using it by fixed part 18A3 Formula is fixed.Specifically, backbar 16 is fixed on as follows by fixed part 18A3.First, by the upper table of fixed part 18A3 Face is connected to the lower surface of backbar 16.Dielectric cover fixed appliance 18A also includes being propped up for being fixed on by fixed part 18A3 Multiple screws of bolster 16.The quantity of the screw is for example as shown in Figure 48.Fig. 6 represents wherein 2 screws 19A1,19A2. In the example shown in Fig. 6, the head of screw 19A1,19A2 is configured in by the lower section of fixed part 18A3, screw 19A1,19A2 Bar portion run through by fixed part 18A3 in combination with backbar 16.Screw in addition to screw 19A1,19A2 also with screw 19A1,19A2 are identical.
Fig. 7 is the sectional view of another example of the fixing means for representing dielectric cover fixed appliance 18A.In this example embodiment, The head of screw 19A1,19A2 is configured in the top of backbar 16, the bar portion of screw 19A1,19A2 through backbar 16 and with Combined by fixed part 18A3.Screw in addition to screw 19A1,19A2 is also identical with screw 19A1,19A2.
By the way that the support 18A1 of backbar the 16, the 1st will be fixed in itself and backbar 16 and part 1 by fixed part 18A3 Clip supported portion 12A1 between at least one of wall 6A to support supported portion 12A1, the 2nd support 18A2 its with Clip supported portion 12B1 to support supported portion 12B1 between at least one of bolster 16 and part 2 wall 6B.Equally, 3 supports clip the supported portion of third portion cover 12C at it between at least one of backbar 16 and third portion wall 6C To support the supported portion of third portion cover 12C, the 4th support is at it at least one of with the part of wall 6D of backbar 16 and the 4th Between clip the 4th part cover 12D supported portion come support the 4th part cover 12D supported portion.
Dielectric cover fixed appliance 18B1～18B4 is respectively including 1 support and 1 by fixed part.Dielectric cover is fixed The shape of each support of utensil 18B1～18B4 is identical with the shape of each support of dielectric cover fixed appliance 18A.Electricity is situated between Body cover fixed appliance 18B1～18B4 is configured in respectively being propped up for the dielectric cover 12 in the position corresponding with support The downside of bearing portion.The each of dielectric cover fixed appliance 18B1～18B4 uses multiple screws by fixed part（For example as shown in Figure 4 For 2 screws）It is fixed on the bearing support 7 as supporting member.Thus, each supporting of dielectric cover fixed appliance 18B1～18B4 Portion clips in the position corresponding with support respectively at it between at least one of bearing support 7 and dielectric wall 6 The supported portion of dielectric cover 12 is supporting the supported portion of dielectric cover 12.
As shown in figure 4, part 1 cover 12A is fixed by dielectric cover fixed appliance 18A, 18B1,18B3.Part 2 cover 12B is fixed by dielectric cover fixed appliance 18A, 18B2,18B3.Third portion cover 12C by dielectric cover fixed appliance 18A, 18B1,18B4 are fixed.4th part cover 12D is fixed by dielectric cover fixed appliance 18A, 18B2,18B4.
As described above, dielectric cover fixed appliance 18A, 18B1,18B2,18B3,18B4 of present embodiment Include support（Such as 18A1,18A2 in Fig. 6）With by fixed part（Such as 18A3 in Fig. 6）；Above-mentioned support with it is rear The supported portion stated（Such as 12A1,12B1 in Fig. 6）Lower surface abut, in above-mentioned support and supporting member（Backbar 16th, bearing support 7）Supported portion, above-mentioned supported portion are supported and at least one of dielectric wall 6 between with clipping supported portion A part for dielectric cover 12, with lower surface and with the continuous side of the lower surface；It is above-mentioned that this is connected to by fixed part Support, one part is configured in the side of the side of supported portion, is not become with the position relationship of supporting member with it The mode of change is fixed.
Dielectric cover fixed appliance 18A, 18B1, each support of 18B2,18B3,18B4 and supporting member and dielectric wall At least one of 6 play the supported portion that clips corresponding dielectric cover 12 between them and fixed dielectric cover 12 The effect of fixture.
Using present embodiment, the multiple through holes for running through for the bar portion of screw are not formed on dielectric cover 12 with regard to energy Enough fix dielectric cover 12.Therefore, using present embodiment, it is prevented from defining the feelings of multiple through holes on dielectric cover 12 Cause dielectric cover 12 damaged under condition, because partly applying excessive stress near to through hole.
In addition, in the present embodiment, dielectric is connected to by the upper surface of the support of dielectric cover fixed appliance The lower surface of the supported portion of cover 12, can support and fixed dielectric cover 12.Therefore, using present embodiment, in dielectric It is difficult to produce the stress concentration of local in cover 12.From this respect, using present embodiment, prevented also from dielectric cover 12 It is damaged.
In the present embodiment, it is not that dielectric cover 12 is directly fixed on into supporting member using multiple screws, but Dielectric cover fixed appliance is fixed on into supporting member by fixed part using multiple screws.Using present embodiment, and use Multiple screws compare the situation that dielectric cover 12 is directly fixed on supporting member, can reduce the screw radical for using.With Fig. 8 Shown comparative example is compared and illustrates.
Fig. 8 is the upward view of the dielectric cover for representing comparative example.In fig. 8, circle mark represents screw.In a comparative example, Dielectric cover 222 have in the same manner as the dielectric cover 12 of present embodiment be divided to form 4 part cover 222A, 222B, 222C、222D.This 4 part cover 222A～222D are directly fixed on supporting member by 12 screws respectively.Thus, whole electricity is situated between Body cover 222 is fixed on supporting member by 48 screws.So, in a comparative example, because dielectric cover 222 is consolidated by many screws It is fixed, therefore, the handling operation of dielectric cover 222 is poor when changing or cleaning dielectric cover 222.
In contrast, in the present embodiment, as shown in figure 4, dielectric cover 12 is utilized is summed 16 screws are fixed 5 Individual dielectric cover fixed appliance 18A, 18B1,18B2,18B3,18B4 are fixed on supporting member indirectly.Therefore, using this reality Mode is applied, compared with the comparative example shown in Fig. 8, the screw radical for using can be greatly reduced, as a result, can easily load and unload Dielectric cover 12.
In addition, present embodiment is adopted, even if as shown in fig. 6, in the way of being exposed in process chamber 5 by the head of screw Fixed dielectric cover fixed appliance by fixed part in the case of, compared with the comparative example shown in Fig. 8, screw radical is also significantly Reduce, therefore, the quantity of the screw head being exposed in process chamber 5 is also greatly reduced.Therefore, using present embodiment, energy It is enough to suppress the secondary product for being attached to screw head to peel off from the head of screw and produce particulate or screw head by plasma Body is consumed and produces particulate.In addition, in the present embodiment, as shown in fig. 7, not being exposed to process chamber 5 with the head of screw Interior mode fix dielectric cover fixed appliance by fixed part in the case of, will not produce because of the head of screw completely micro- Grain.
But, dielectric cover fixed appliance support thickness in any part it is all constant in the case of, supporting The corner at the right angle being exposed in process chamber 5 is formed between the lower surface in portion and side.Secondary product is easy to be attached to the angle In portion.Therefore, in this case, it is easy to produce particulate because of corner.In contrast, in the present embodiment, dielectric cover The lower surface of the support of fixed appliance becomes with the taper diminished with the distance of support upper surface away from supported portion Face.In this case, compared with the thickness of support is in all constant situation of any part, it is exposed to propping up in process chamber 5 The face of bearing portion is be close to smooth face.Therefore, using present embodiment, can suppress because of the support of dielectric cover fixed appliance Produce particulate.
Variation
Below, to present embodiment dielectric cover and the 1st～the 6th variation of dielectric cover fixed appliance is said It is bright.Fig. 9 is the sectional view of the dielectric cover and dielectric cover fixed appliance for representing the 1st variation.Fig. 9 represents corresponding with Fig. 7 Section.The dielectric cover 12 of the 1st variation substitutes part 1 cover 12A, the part 2 cover 12B in Fig. 7 and has shown in Fig. 9 Part 1 cover 32A, part 2 cover 32B.
Part 1 cover 32A has supported portion 32A1.Supported portion 32A1 have lower surface 32A1a and with the following table The continuous side 32A1b of face 32A1a.The lower surface of supported portion 32A1 is a part for the lower surface of part 1 cover 32A, The lower surface of part 1 cover 32A, with the following table that the lower surface of supported portion 32A1 is located at the part in addition to supported portion 32A1 Mode above face is formed with stage portion.
Equally, part 2 cover 32B has supported portion 32B1.Supported portion 32B1 have lower surface 32B1a and with this The continuous side 32B1b of lower surface 32B1a.
Dielectric cover fixed appliance 38A of the 1st variation is used to substitute dielectric cover fixed appliance 18A shown in Fig. 7.Electricity Amboceptor cover fixed appliance 38A has the 1st support 38A1, the 2nd support 38A2, by fixed part 38A3, the (not shown) 3rd and the 4 supports.
1st support 38A1 is configured in the above-mentioned stage portion on the lower surface of part 1 cover 32A, the 1st support 38A1 Upper surface be connected to the lower surface 32A1a of supported portion 32A1.1st support 38A1 has the step phase with above-mentioned stage portion Deng thickness.Therefore, the portion in addition to supported portion 32A1 on the lower surface and part 1 cover 32A of the 1st support 38A1 Without step between the lower surface for dividing.
Equally, the 2nd support 38A2 is configured in the above-mentioned stage portion on the lower surface of part 2 cover 32B, the 2nd supporting The upper surface of portion 38A2 is connected to the lower surface 32B1a of supported portion 32B1.
Screw 19A1,19A2 are included in 8 interior spiral shells in the same manner as fixed part 18A3 with Fig. 7 by fixed part 38A3 Nail is fixed on backbar 16.
Although not shown, but in the 1st variation, the 3rd and the 4th support and their institutes of dielectric cover fixed appliance 38A The support of relation and other dielectric cover fixed appliances between corresponding supported portion and being supported by corresponding to them Relation between portion is identical with the relation between above-mentioned support 38A1 and supported portion 32A1.
Using the 1st variation, dielectric cover fixed appliance support lower surface and dielectric cover 12 except being propped up Step is not produced between the lower surface of the part outside bearing portion.Therefore, it is possible to suppress because of the support of dielectric cover fixed appliance And produce particulate.Electricity Jie shown in other construction, functions and effects and Fig. 7 of dielectric cover fixed appliance in 1st variation Body cover fixed appliance is identical.
Figure 10 is figure corresponding with Fig. 4, is to represent the 2nd dielectric cover of variation and looking up for dielectric cover fixed appliance Figure.Dielectric cover fixed appliance 48B1,48B2 of the 2nd variation, 48B3,48B4,48B5,48B6,48B7,48B8,48C1, 48C2,48C3,48C4 are used to substitute dielectric cover fixed appliance 18A, 18B1,18B2,18B3, the 18B4 shown in Fig. 4.
Dielectric cover fixed appliance 48B1,48B5 clips 2 sides of part 1 cover 12A to support at it between bearing support 7 Part 1 cover 12A.Dielectric cover fixed appliance 48B2,48B7 clips 2 sides of third portion cover 12C at it between bearing support 7 To support third portion cover 12C.Dielectric cover fixed appliance 48B3,48B6 clips part 2 cover 12B at it between bearing support 7 2 sides supporting part 2 cover 12B.Dielectric cover fixed appliance 48B4,48B8 clips the 4th part at it between bearing support 7 Cover 12D 2 sides come support the 4th part cover 12D.
Border configuration of dielectric cover fixed appliance 48C1 along between part 1 cover 12A and third portion cover 12C, is used for One side of supporting part cover 12A, 12C.Dielectric cover fixed appliance 48C2 along part 2 cover 12B and the 4th part cover 12D it Between border configuration, for one side of supporting part cover 12B, 12D.Dielectric cover fixed appliance 48C3 is along part 1 cover 12A Configure with the border between part 2 cover 12B, for one side of supporting part cover 12A, 12B.Dielectric cover fixed appliance 48C4 Border configuration along between third portion cover 12C and the 4th part cover 12D, for one side of supporting part cover 12C, 12D.
Although not shown, but dielectric cover fixed appliance 48B1～48B8 is fixed on bearing support 7, dielectric cover fixed appliance 48C1～48C4 is fixed on backbar 16.Can also be formed with dielectric cover fixed appliance 48C1～48C4 and backbar 16 The corresponding opening portion in opening portion.
Part 1 cover 12A is fixed by dielectric cover fixed appliance 48B1,48B5,48C1,48C3.Part 2 cover 12B quilts Dielectric cover fixed appliance 48B3,48B6,48C2,48C3 are fixed.Third portion cover 12C by dielectric cover fixed appliance 48B2, 48B7,48C1,48C4 are fixed.4th part cover 12D is fixed by dielectric cover fixed appliance 48B4,48B8,48C2,48C4.
Electricity Jie shown in other construction, functions and effects and Fig. 6 or Fig. 7 of the dielectric cover fixed appliance of the 2nd variation Body cover fixed appliance is identical.
Figure 11 is figure corresponding with Fig. 4, is to represent the 3rd dielectric cover of variation and looking up for dielectric cover fixed appliance Figure.Dielectric cover fixed appliance 58A, 58B1 of the 3rd variation, 58B2,58B3,58B4,58B5,58B6,58B7,58B8, 58C1,58C2,58C3,58C4,58D1,58D2,58D3,58D4,58E1,58E2,58E3,58E4 are used to substitute shown in Fig. 4 Dielectric cover fixed appliance 18A, 18B1,18B2,18B3,18B4.
Dielectric cover fixed appliance 58A seen from the side of process chamber 5 is shaped as cross shape.See from the side of process chamber 5 The shape of dielectric cover fixed appliance 58B1～58B8,58C1～58C4 be rectangle.The electricity seen from the side of process chamber 5 is situated between The shape of body cover fixed appliance 58D1～58D4 is L-shaped shape.From dielectric cover fixed appliance 58E1 that the side of process chamber 5 is seen The shape of～58E4 is T-shaped.
Dielectric cover fixed appliance 58A to cover the cross shape opening portion of central portion of dielectric cover 12 in the way of match somebody with somebody Put.Alternatively, it is also possible to form the opening portion corresponding with the opening portion of backbar 16 in dielectric cover fixed appliance 58A.
Dielectric cover fixed appliance 58B1～58B8,58C1～58C4 is arranged respectively at and consolidates with the dielectric cover shown in Figure 10 Determine utensil 48B1～48B8,48C1～48C4 identicals position, a part for the lower surface of dielectric cover 12 is supported.
Dielectric cover fixed appliance 58D1 is configured in the way of dielectric cover fixed appliance 58B1,58B5 is linked up. Dielectric cover fixed appliance 58D2 is configured in the way of dielectric cover fixed appliance 58B3,58B6 is linked up.Dielectric cover Fixed appliance 58D3 is configured in the way of dielectric cover fixed appliance 58B2,58B7 is linked up.Dielectric cover fixed appliance 58D4 is configured in the way of dielectric cover fixed appliance 58B4,58B8 is linked up.Dielectric cover fixed appliance 58D1～ 58D4 is supported respectively to a part for the lower surface of dielectric cover 12.
Dielectric cover fixed appliance 58E1 is in the way of dielectric cover fixed appliance 58B1,58B2,58C1 to be linked up Configuration.Dielectric cover fixed appliance 58E2 is matched somebody with somebody in the way of dielectric cover fixed appliance 58B3,58B4,58C2 are linked up Put.Dielectric cover fixed appliance 58E3 is configured in the way of dielectric cover fixed appliance 58B5,58B6,58C3 are linked up. Dielectric cover fixed appliance 58E4 is configured in the way of dielectric cover fixed appliance 58B7,58B8,58C4 are linked up.Electricity is situated between Body cover fixed appliance 58E1～58E4 is supported respectively to a part for the lower surface of dielectric cover 12.
Although not shown, but dielectric cover fixed appliance 58A, 58C1～58C4 is fixed in backbar 16, dielectric cover is consolidated Determine utensil 58B1～58B8,58D1～58D4 and be fixed in bearing support 7, dielectric cover fixed appliance 58E1～58E4 to be fixed in Bearing support 7 and backbar 16.The opening with backbar 16 can also be formed with dielectric cover fixed appliance 58C1～58C4 The corresponding opening portion in portion.
In the 3rd variation, 2 dielectric cover fixed appliances that configuration is adjacent in the horizontal direction are connected.Each electricity Amboceptor cover fixed appliance is included in 2 dielectric cover fixed appliances when being adjacent to configuration in the horizontal direction, 2 dielectric covers and consolidates Determine the sidepiece of the intermeshing shape of sidepiece of utensil.
Figure 12 represents an example of the shape of the intermeshing sidepiece of dielectric cover fixed appliance 58A, 58C2.Figure 12 Represent the section of 2 dielectric cover fixed appliances on the position shown in the 12-12 in Figure 11.In this example embodiment, dielectric cover The respective sidepiece of fixed appliance 58A, 58C2 has respectively neighbouring convex portion and recess.In dielectric cover fixed appliance 58A In dielectric cover fixed appliance 58C2, convex portion is contrary mutually with the position relationship of recess.Then, dielectric cover fixed appliance The convex portion of 58A enters into the recess of dielectric cover fixed appliance 58C2, and the convex portion of dielectric cover fixed appliance 58C2 enters into electricity The recess of amboceptor cover fixed appliance 58A, so as to the sidepiece of dielectric cover fixed appliance 58A, 58C2 is intermeshed.
Figure 13 represents another example of the intermeshing sidepiece shape of dielectric cover fixed appliance 58A, 58C2.In the example Same with the example shown in Figure 12 in son, the respective sidepiece of dielectric cover fixed appliance 58A, 58C2 is respectively with neighbouring Convex portion and recess.In this example embodiment, the convex portion of dielectric cover fixed appliance 58C2 includes convex portion adjacent in the horizontal direction Divide and recess point, the recess of dielectric cover fixed appliance 58A includes the convex portion in the convex portion with dielectric cover fixed appliance 58C2 Divide and the recess of recess split-phase engagement divides and convex portion.
In the 3rd variation, the construction of the coupling part of other 2 adjacent dielectric cover fixed appliances also with Figure 12 or Figure 13 is identical.
In the 3rd variation, from the point of view of the side of process chamber 5, the whole outer rim of the lower surface of dielectric cover 12 and adjacent 2 The whole border that the lower surface of part cover is mutual is covered by multiple dielectric cover fixed appliances.Therefore, using the 3rd deformation Example, from the point of view of the side of process chamber 5, can be completely covered between the peripheral part of dielectric cover 12 and bearing support 7 produce gap, The gap that 2 adjacent parts produce between covering.Thereby, it is possible to suppress plasma to enter into above-mentioned gap.As a result, it is possible to press down Because plasma enters into above-mentioned gap, backbar 16, bearing support 7 produce damage, paradoxical discharge to system.Particularly, each electricity is situated between Body cover fixed appliance is included in 2 dielectric cover fixed appliances when being adjacent to configuration in the horizontal direction, 2 dielectric covers and fixes The sidepiece of the intermeshing shape of sidepiece of utensil, therefore, it is possible to significantly play the effect.
Electricity Jie shown in other construction, functions and effects and Fig. 6 or Fig. 7 of the dielectric cover fixed appliance of the 3rd variation Body cover fixed appliance is identical.
Figure 14 is figure corresponding with Fig. 4, is to represent the 4th dielectric cover of variation and looking up for dielectric cover fixed appliance Figure.The dielectric cover 72 of the 4th variation substitutes the dielectric cover 12 shown in Fig. 4.Dielectric cover 72 is not divided into 4.
Dielectric cover fixed appliance 78B1,78B2 of the 4th variation, 78B3,78B4 are used to substitute electricity Jie shown in Fig. 4 Body cover fixed appliance 18A, 18B1,18B2,18B3,18B4.Dielectric cover fixed appliance 78B1,78B2,78B3,78B4 edge respectively The middle body configuration on each side of the lower surface of dielectric cover 72, for supporting each side of dielectric cover 72.From in terms of the side of process chamber 5 To dielectric cover fixed appliance 78B1,78B2, the shape of 78B3,78B4 be rectangle.
Electricity Jie shown in other construction, functions and effects and Fig. 6 or Fig. 7 of the dielectric cover fixed appliance of the 4th variation Body cover fixed appliance is identical.
Figure 15 is the sectional view of the dielectric cover and dielectric cover fixed appliance for representing the 5th variation.Figure 15 is represented and Fig. 6 Or the section that Fig. 7 is corresponding（Wherein, screw 19A1,19A2 omits diagram）.In the 5th variation, the shape of backbar 16A with Backbar 16 in Fig. 6 or Fig. 7 is different.Specifically, backbar 16A has convex portion 16A1 in its lower end.
Dielectric cover fixed appliance 79A is used to substitute dielectric cover fixed appliance 18A shown in Fig. 6 or Fig. 7.Dielectric cover Fixed appliance 79A has the 1st support 79A1 of a part of supporting part 1 cover 12A, supports one of part 2 cover 12B Point the 2nd support 79A2, by fixed part 79A3, the 3rd and the 4th support (not shown).1st and the 2nd support 79A1,79A2 It is connected to by fixed part 79A3, also, is configured to be extended to side by fixed part 79A3 certainly.3rd and the 4th support is also with 1 is identical with the 2nd support 79A1,79A2.In the 5th variation, and make to be consolidated according to the shape of the convex portion 16A1 of backbar 16A Determine the thickness of portion 79A3（Highly）The thickness of the dielectric cover fixed appliance being formed smaller than shown in Fig. 6 or Fig. 7（Highly）.
The part 1 cover 12A and part 2 cover 12B of dielectric cover 12 is and Fig. 6 or Fig. 7 identicals construction, with being propped up Bearing portion 12A1,12B1.3rd and the 4th part cover 12C, 12D (not shown) also have respectively supported portion same as described above.
The upper surface that 1st support 79A1 has lower surface and abuts with the lower surface 12A1a of supported portion 12A1.The The upper surface that 2 support 79A2 have lower surface and abut with the lower surface 12B1a of supported portion 12B1.Equally, the 3rd supporting The upper surface that portion has lower surface and abuts with the lower surface of the supported portion of third portion cover 12C, under the 4th support has The upper surface that surface and the lower surface for covering the supported portion of 12D with the 4th part are abutted.Each lower surface of the 1st～the 4th support Become with away from the taper surface diminished with the distance of the upper surface of each support by fixed part 79A3.
As shown in the 5th variation, the dielectric cover fixed appliance of the present invention can be according to the backbar as supporting member 16th, the shape of bearing support 7 and be formed as variously-shaped.
Electricity Jie shown in other construction, functions and effects and Fig. 6 or Fig. 7 of the dielectric cover fixed appliance of the 5th variation Body cover fixed appliance is identical.
Figure 16 is figure corresponding with Fig. 4, is to represent the 6th dielectric cover of variation and looking up for dielectric cover fixed appliance Figure.Figure 17 is the sectional view of the dielectric cover and dielectric cover fixed appliance for representing the 6th variation.The dielectric of the 6th variation Cover 80 is used to substitute the dielectric cover 12 shown in Fig. 4.Dielectric cover 80 is divided into 4 parts in the same manner as dielectric wall 6. I.e., as shown in figure 16, dielectric cover 80 has part 1 cover 80A, part 2 cover 80B, third portion cover 80C and part 1 cover 80D.1st～the 4th part cover 80A, 80B, 80C, 80D are respectively to the 1st～the 4th part of wall 6A, 6B, 6C, 6D's of dielectric wall 6 Lower surface is covered.In addition, dielectric cover 80 can also be not fragmented into 4 parts.
In figure 16, part 1 cover 80A is configured in the top left region in the configuring area of whole dielectric cover 80, and the 2nd Part cover 80B is configured in the right regions in the configuring area of whole dielectric cover 80, and third portion cover 80C is configured in whole Lower left region in the configuring area of individual dielectric cover 80, the 4th part cover 80D is configured in the configuring area of whole dielectric cover 80 Lower right area in domain.
In the central portion of dielectric cover 80, it is respectively formed with the 1st～the 4 part cover 80A, 80B, 80C, 80D and is inciting somebody to action Become notch part 80Aa, 80Ba, 80Ca, 80Da of the arc of circular opening portion when they are combined.
The shape of dielectric cover fixed appliance 81A seen from the side of process chamber 5 be than the central portion in dielectric cover 80 by Slightly larger round-shaped in circular opening portion that notch part 80Aa, 80Ba, 80Ca, 80Da are formed.And, dielectric cover fixator Tool 81A is configured to cover the circular opening portion of dielectric cover 80.
Dielectric cover fixed appliance 81B1 seen from the side of process chamber 5～81B4 dielectric cover fixed appliances 81B1 its with Clip between bearing support 7 the 1st and third portion cover 80A, 80C each while to support the 1st and third portion cover 80A, 80C.Separately Outward, dielectric cover fixed appliance 81B2 clips the respective while coming of the 2nd and the 4th part cover 80B, 80D at it between bearing support 7 Support the 2nd and the 4th part cover 80B, 80D.In addition, dielectric cover fixed appliance 81B3 its clip between bearing support 7 the 1st and Part 2 cover 80A, 80B's is respective while to support the 1st and part 2 cover 80A, 80B.In addition, dielectric cover fixed appliance 81B4 clips the respective of the 3rd and the 4th part cover 80C, 80D while to support the 3rd and the 4th part cover at it between bearing support 7 80C、80D。
Dielectric cover fixed appliance 81A, 81B1,81B2,81B3,81B4 are fixed including 1 with upper support portion and 1 Portion.Support is the downside of the supported portion for being configured in the part as dielectric cover 80 and for supporting the supported portion Part.Dielectric cover 80 has and all included by dielectric cover fixed appliance 81A, 81B1,81B2,81B3,81B4 The corresponding supported portion of bearing portion.
Then, construction and the effect of dielectric cover fixed appliance 81A are described in detail.As shown in figure 17, dielectric cover is fixed Utensil 81A includes the supporting supported by fixed part 81A3 and to a part of part 1 cover 80A and part 2 cover 80B Portion 81A1.Although not shown, but dielectric cover fixed appliance 81A support 81A1 it is annular in shape, also to the one of third portion cover 80C Part and the 4th part are covered a part of 80D and are supported.Support 81A1 is connected to by fixed part 81A3, also, is configured to Round by fixed part 81A3 and to the side extension by fixed part 81A3.
On the other hand, part 1 cover 80A has supported portion 80A1.Supported portion 80A1 have lower surface 80A1a and Side 80A1b continuous with lower surface 80A1a.Side 80A1b is also the ora terminalis of notch part 80Aa.Supported portion 80A1 Upper surface abuts with the lower surface of at least one of backbar 16B and part 1 wall 6A.In the example shown in Figure 17, quilt The upper surface of support 80A1 abuts with the lower surface of both backbar 16B and part 1 wall 6A, but supported portion 80A1 Upper surface can also be connected to the lower surface of the only one in backbar 16B and part 1 wall 6A.Equally, part 2 cover 80B With supported portion 80B1.Supported portion 80B1 have lower surface 80B1a and with the continuous sides of lower surface 80B1a 80B1b.The upper surface of supported portion 80B1 abuts with the lower surface of at least one of backbar 16B and part 2 wall 6B. In example shown in Figure 17, upper surface and the lower surface of both backbar 16B and part 2 wall 6B of supported portion 80B1 are supported Connect, but the upper surface of supported portion 80B1 can also be connected to the following table of the only one in backbar 16B and part 2 wall 6B Face.
3rd and the 4th part cover 80C, 80D also have respectively and are propped up with above-mentioned part 1 cover 80A and part 2 cover 80B The same supported portion of bearing portion 80A1,80B1.
The support 81A1 of dielectric cover fixed appliance 81A has lower surface and the lower surface with supported portion 80A1 The upper surface that 80A1a is abutted.The lower surface of support 81A1 becomes with away from by fixed part 81A3（That is, with towards supporting The circumference of portion 81A1）And the taper surface diminished with the distance of the upper surface of support 81A1.From being fixed that process chamber 5 is seen The shape of portion 81A3 is slightly smaller round-shaped of shape in the circular open portion than dielectric cover 80.By one of fixed part 81A3 Divide and be inserted in the circular open portion of dielectric cover 80.This is configured in supported portion 80A1 by a part of fixed part 81A3 Side 80A1b, the side of the side of the side 80B1b, the side of the 3rd support and the 4th support of supported portion 80B1.
Dielectric cover fixed appliance 81A by fixed part 81A3 using its position with the backbar 16B as supporting member The mode that relation does not change is fixed.Specifically, backbar 16B is fixed on as described as follows by fixed part 81A3. First, backbar 16B has recess 16B1, and in the inner circumferential of the recess 16B1 thread groove is formed with（Or ridge）16B2.Separately Outward, had by the top of fixed part 81A3 and protrude columned convex portion 81A3a, the periphery of 81A3a is formed with spiral shell in the convex portion Line tooth（Or thread groove）81A3b.Then, dielectric cover fixed appliance 81A by the convex portion 81A3a of fixed part 81A3 by will be twisted Enter in the recess 16B1 of backbar 16B and be fixed on backbar 16B.So, dielectric cover fixed appliance 81A of the 6th variation Not adopting the fixed component of the other component such as screw can just be fixed on backbar 16B, therefore, it is possible to cut down part number of packages, and And also can solve the problem that being exposed to the head of the screw of plasma certainly produces problem as particulate.
Electricity shown in other construction, functions and effects and Fig. 6 or Fig. 7 of dielectric cover fixed appliance 81A of the 6th variation Amboceptor cover fixed appliance is identical.
Then, the another example of the fixing means of the dielectric cover fixed appliance of present embodiment is illustrated with reference to Figure 18～20 Son.Here, illustrate by taking dielectric cover fixed appliance 18A shown in Fig. 6 or Fig. 7 as an example, but the fixing means of following explanation Also other dielectric cover fixed appliances that can be enumerated suitable for above-mentioned variation.
Figure 18 represents an example of the fixing means of dielectric cover fixed appliance 18A.In this example embodiment, intermediate member 201a, 201b are respectively interposed in the supported portion of the 1st support 18A1 and part 1 cover 12A of dielectric cover fixed appliance 18A Between 12A1 and dielectric cover fixed appliance 18A the 2nd support 18A2 and part 2 cover 12B supported portion 12B1 it Between.That is, dielectric cover fixed appliance 18A clips intermediate member 201a, 201b and indirectly to dielectric cover 12（Part 1 cover 12A, part 2 cover 12B）It is fixed.Dielectric cover fixed appliance 18A adopts screw for example in the same manner as Fig. 6 or Fig. 7 19A1、19A2（Here omits diagram）To fix.Intermediate member 201a is clamped by the 1st support 18A1 and supported portion 12A1, Intermediate member 201b is clamped between the 2nd support 18A2 and supported portion 12B1.Third portion cover 12C (not shown) with Also there is respectively intermediate member same as described above, but this between 3rd support, between the 4th part cover 12D and the 4th support A little intermediate members can also be integral piece.
Figure 19 represents the another example of the fixing means of dielectric cover fixed appliance 18A.In this example embodiment, intermediate member 202 between dielectric cover fixed appliance 18A by between fixed part 18A3 and backbar 16.That is, backbar 16 clips middle structure Part 202 and indirectly by dielectric cover 12（Part 1 cover 12A, part 2 cover 12B）It is clipped in backbar 16 to consolidate with dielectric cover Determine between utensil 18A.Dielectric cover fixed appliance 18A adopts screw 19A1,19A2 for example in the same manner as Fig. 6 or Fig. 7（Here is saved Sketch map shows）To fix.The upper surface of intermediate member 202 and the lower end in contact of backbar 16.The lower surface of intermediate member 202 and Cover upper surface, the upper surface of supported portion 12B1 of part 2 cover 12B and the dielectric cover of supported portion 12A1 of 12A in 1 part The upper surface by fixed part 18A3 of fixed appliance 18A.
Figure 20 represents the another example of the fixing means of dielectric cover fixed appliance 18A.In this example embodiment, intermediate member 203a, 203b are respectively interposed in dielectric cover fixed appliance 18A（By fixed part 18A3 and the 1st support 18A1）With part 1 cover Between supported portion 32A1 of 32A and dielectric cover fixed appliance 18A（By fixed part 18A3 and the 2nd support 18A2）With Between supported portion 32B1 of part 2 cover 32B.That is, dielectric cover fixed appliance 18A clip intermediate member 203a, 203b and Indirectly to dielectric cover 12（Part 1 cover 32A, part 2 cover 32B）It is fixed.
Part 1 cover 32A and part 2 cover 32B has and above-mentioned 1st variation（Fig. 9）Identical shape.That is, the 1st Point cover 32A has supported portion 32A1, and supported portion 32A1 has lower surface 32A1a and continuous with lower surface 32A1a Side 32A1b.The lower surface of supported portion 32A1 is a part for the lower surface of part 1 cover 32A, in part 1 cover 32A Lower surface, the side of the top of the lower surface of part in addition to supported portion 32A1 is located at the lower surface of supported portion 32A1 Formula is formed with stage portion.Intermediate member 203a forms the shape engaged with the stage portion.
Equally, part 2 cover 32B has supported portion 32B1, supported portion 32B1 have lower surface 32B1a and with this The continuous side 32B1b of lower surface 32B1a.The lower surface of supported portion 32B1 is of the lower surface of part 2 cover 32B Point, in the lower surface of part 2 cover 32B, the part in addition to supported portion 32B1 is located at the lower surface of supported portion 32B1 The mode of top of lower surface be formed with stage portion.Intermediate member 203b forms the shape engaged with the stage portion.
Dielectric cover fixed appliance 18A adopts screw 19A1,19A2 for example in the same manner as Fig. 6 or Fig. 7（Here saves sketch map Show）To fix.Intermediate member 203a is clamped by the 1st support 18A1 and supported portion 32A1, and intermediate member 203b is clamped in Between 2nd support 18A2 and supported portion 32B1.
Also have respectively between third portion cover (not shown) and the 3rd support, between the 4th part cover and the 4th support Intermediate member same as described above, but these intermediate members can also be integral piece.
Intermediate member 201a, 201b shown in Figure 18,19,20,202,203a, 203b for example can be by with plasma resistant Property the material such as ceramics constitute.By insert intermediate member 201a, 201b, 202,203a, 203b, even if the chi of dielectric cover 12 Very little change, will not also change size, the shape of dielectric cover fixed appliance 18A itself, can utilize dielectric cover fixed appliance 18A is securely fixed.For example, even if as part 1 cover（12A、32A）With part 2 cover（12B、32B）And adopt it thick In the case of the length material shorter than Fig. 6, Fig. 7 spent on relatively thin, face direction, by insert intermediate member 201a, 201b, 202, 203a, 203b, it is also possible to not in part 1 cover（12A、32A）, part 2 cover（12B、32B）With dielectric cover fixed appliance Gap is produced between 18A, is fixed clearance.
In addition, intermediate member 201a, 201b, 202,203a, 203b for example can also be by fluororesin, silica gel elastomeric materials Constitute.In this case, even if dielectric cover 12 produces the deformations such as flexible, strain because of heat, it is also possible to absorb the deformation, Therefore, it is possible to prevent the breakage of dielectric cover 12, also, gap, clearance will not be produced, can be securely maintained by dielectric cover Fixed appliance 18A fixes the state of dielectric cover 12.
As described above, by inserting intermediate member, electric Jie can be securely fixed using dielectric cover fixed appliance 18A Body cover 12, thus, it is also possible to prevent the plasma produced in process chamber 5 right from the fixed position entrance of dielectric cover 12 Backbar 16 causes to damage or occur paradoxical discharge.Other constructions of dielectric cover fixed appliance shown in Figure 18,19,20, Functions and effects are identical with the dielectric cover fixed appliance shown in Fig. 6 or Fig. 7.
2nd embodiment
Then, the dielectric of " the cover fixing device " of the 2nd embodiment as the present invention is illustrated with reference to Figure 21 and Figure 22 Cover fixing device.Figure 21 is the sectional view of the dielectric cover fixing device for representing present embodiment.Figure 22 is represented shown in Figure 21 Dielectric cover fixing device another state sectional view.
The device for inductively coupled plasma processing of present embodiment substitutes the backbar 16 of the 1st embodiment and has supporting Beam 86, and the dielectric cover 12 for substituting the 1st embodiment has dielectric cover 82, and the dielectric cover for substituting the 1st embodiment is consolidated Determine utensil 18A and there is dielectric cover fixing device 87A as " cover fixing device ".In addition, dielectric described further below Cover fixing device 87A, but in the present embodiment, substitute in the 1st embodiment in addition to dielectric cover fixed appliance 18A Dielectric cover fixed appliance, and be provided with and dielectric cover fixing device 87A identical dielectric cover fixing device.
It is formed with backbar 86 from upper surface and extends through 1 through hole of lower surface.Through hole is included from backbar 86 Inner peripheral portion 86a, 86b, 86c, 86d that upper surface configures in order to lower surface.The internal diameter of inner peripheral portion 86a, 86c is roughly equal. The internal diameter of inner peripheral portion 86b, 86d is roughly equal and internal diameter more than inner peripheral portion 86a, 86c.On the border of 2 adjacent inner peripheral portion Position is formed with the step of the ring-type for linking up 2 inner peripheral portion and forms face.
Dielectric cover 82 is divided into 4 parts in the same manner as the dielectric cover 12 of the 1st embodiment.That is, dielectric cover 82 have part 1 cover 82A, part 2 cover 82B, the 3rd and the 4th part (not shown) cover.
Part 1 cover 82A has supported portion 82A1.Supported portion 82A1 has lower surface and continuous with the lower surface Side.The lower surface of supported portion 82A1 is a part for the lower surface of part 1 cover 82A, under part 1 cover 82A Surface, the shape in the way of the lower surface of supported portion 82A1 is located at the top of the lower surface of the part in addition to supported portion 82A1 Into there is stage portion.Equally, part 2 cover 82B has supported portion 82B1.
Dielectric cover fixing device 87A includes dielectric cover fixed appliance 88A and fixed mechanism 90.Dielectric cover fixator Tool 88A has the 1st support 88A1, the 2nd support 88A2 in the same manner as dielectric cover fixed appliance 38A shown in Fig. 9, is consolidated Determine portion 88A3, the 3rd and the 4th support (not shown).
1st support 88A1 is configured in the above-mentioned stage portion on the lower surface of part 1 cover 82A, the 1st support 88A1 Upper surface be connected to the lower surface of supported portion 82A1.1st support 88A1 has equal with the step of above-mentioned stage portion Thickness.Therefore, the part in addition to supported portion 82A1 in lower surface and the part 1 cover 82A of the 1st support 88A1 Without step between lower surface.Equally, the upper surface of the 2nd support 88A2 is connected to the lower surface of supported portion 82B1.
The quilt of relation and the 4th support and the 4th part cover between the 3rd support and the supported portion of third portion cover Relation between support is with the relation phase between supported portion 82A1 of above-mentioned 1st support 88A1 and part 1 cover 82A Together.The side of the side of the supported portion of the 1st～the 4th part cover is configured in by a part of fixed part 88A3.
Each support of dielectric cover fixed appliance 88A respectively in it is with backbar 86 and dielectric wall 6 at least one Clip the supported portion of the dielectric cover 82 positioned at the position corresponding with support between individual to support the quilt of dielectric cover 82 Support.In addition, Figure 21 and Figure 22 represent support 88A1,88A2 of dielectric cover fixed appliance 88A respectively in itself and supporting Clip supported portion 82A1,82B1 between beam 86 to support the example of supported portion 82A1,82B1.But, support 88A1, 88A2 can also respectively it is between dielectric wall 6 or clips between both backbar 86 and dielectric wall 6 and is propped up Bearing portion 82A1,82B1 is supporting supported portion 82A1,82B1.
In addition, being had the hook 89 of the top of the upper surface for being configured in dielectric cover 82 by fixed part 88A3.Hook 89 is received In inner peripheral portion 86d.Hook 89 forms general cylindrical shape of the internal diameter less than the internal diameter of other parts of the part near its upper end Shape.A part near the upper end of hook 89 becomes the holding section that a part for fastened component described later 94 is engaged.
Fixed mechanism 90 is the position relationship by fixed part 88A3 and backbar 86 so that dielectric cover fixed appliance 88A The mode not changed is by the mechanism fixed by fixed part 88A3 of dielectric cover fixed appliance 88A.In the present embodiment, Particularly, fixed mechanism 90 is lifted by the mechanism of fixed part 88A3 using cylinder.
Fixed mechanism 90 has the bar 91 and cylinder body 92 for constituting cylinder.Cylinder body 92 is direct or is fixed on master by other components Body container 2.Fixed mechanism 90 also has spring 93 and fastened component 94.A part for fixed mechanism 90 is inserted into backbar 86 Through hole in.
Bar 91 include part 1 91a being housed in cylinder body 92, be sequentially connected downward from part 1 91a the 2 part 91b, third portion 91c, the 4th part 91d, the 5th part 91e and the 6th part 91f.1st～the 5th part 91a～91e is equal With cylindrical shape.6th part 91f has cone shape.
Part 2 91b is inserted into inner peripheral portion 86a through the bottom of cylinder body 92.The external diameter of part 2 91b is less than the 1st The external diameter of part 91a.Third portion 91c is configured in inner peripheral portion 86c.The external diameter of third portion 91c is more than part 2 91b External diameter, and less than the internal diameter of inner peripheral portion 86a, 86c.
4th part 91d is configured in inner peripheral portion 86b.External diameter of the external diameter of the 4th part 91d less than third portion 91c.The 5 part 91e are inserted in the holding section of inner peripheral portion 86c and hook 89, and its lower end part is in the lower section of holding section.5th part 91e External diameter less than the 4th part 91d external diameter.
6th part 91f is housed in hook 89.External diameter of the basal diameter of the 6th part 91f more than the 5th part 91e, and Less than the internal diameter of the holding section of hook 89.
In the inside of cylinder body 92, space is formed by the inwall of cylinder body 92 and the upper surface of part 1 91a.On cylinder body 92 It is connected with for supplying air to above-mentioned space and discharging the pipe arrangement 95 of air from the space.
Spring 93 is configured in the border of third portion 91c of bar 91 and inner peripheral portion 86b, 86c in inner peripheral portion 86d Between step formation face.4th part 91d can be configured up or down in the inner side of spring 93.Bar 91 is applied upward by spring Plus active force.
Fastened component 94 has flange 94a, is connected to the multiple of flange 94a lower ends（Such as 3）Flat part 94b, with And respectively from the bottom of each flat part 94b be projected into outside multiple holding section 94c.It is formed with from upper table in flange 94a Face extends through 1 through hole of lower surface.The 5th part 91e is inserted with the through hole.The external diameter of flange 94a and inner peripheral portion 86c Internal diameter is roughly equal.The movement upward of flange 94a is limited by spring 93 or backbar 86.Flat part 94b has flexibility. The bottom of flat part 94b contacts with the 6th part 91f.
Then, the effect of dielectric cover fixing device 87A of present embodiment is illustrated.Figure 21 represents that fixed mechanism 90 will not The state fixed by fixed part 88A3 of dielectric cover fixed appliance 88A, Figure 22 represents that fixed mechanism 90 is fixed to dielectric cover The state being fixed by fixed part 88A3 of utensil 88A.
State shown in Figure 21 is realized by supplying air from pipe arrangement 95 to the inner space of cylinder body 92.In the shape Under state, bar 91 is located at the lower end of movable range.In this condition, the bottom of multiple flat part 94b of fastened component 94 is not opened up Open, multiple holding section 94c are not sticked in the holding section of hook 89.Thus, in this condition, dielectric cover fixed appliance 88A is not solid Due to backbar 86, dielectric cover fixed appliance 88A and dielectric cover 82 can be dismantled.
Stop supplying air from pipe arrangement 95 to the inner space of cylinder body 92, when discharging air from the inner space of cylinder body 92, The state being transferred to shown in Figure 22.Now, bar 91 pushes top, multiple flat parts of fastened component 94 to by the active force of spring 93 Launched laterally using the 6th part 91f the bottom of 94b.As a result, multiple holding section 94c are sticked in the holding section of hook 89, pass through Lift by fixed part 88A3, dielectric cover fixed appliance 88A is not in the way of it changes with the position relationship of backbar 86 It is fixed on backbar 86.Thus, dielectric cover 82 is fixed by dielectric cover fixed appliance 88A.
As described above, in the present embodiment, by lifting dielectric cover fixed appliance by fixed mechanism 90 88A by fixed part 88A3, will be by fixed part 88A3 with itself and supporting member（Backbar 86）Position relationship do not change Mode fix.Therefore, using present embodiment, the handling operation of dielectric cover fixed appliance 88A and dielectric cover 82 becomes Easily.
In addition, in the present embodiment, the bar 91 of fixed mechanism 90 applies upward active force by spring 93.Therefore, adopt With present embodiment, even if occurring in the handling operation of dielectric cover 82 in the case of the failure of the gas leakage of cylinder body 92, electricity is situated between Body cover fixed appliance 88A and dielectric cover 82 do not fall out yet.
Other constructions of present embodiment, functions and effects are identical with the 1st embodiment.
3rd embodiment
Then, the dielectric cover fixing device of " the cover fixing device " as the 3rd embodiment of the invention is illustrated.Figure 23 It is the sectional view of the dielectric cover fixing device for representing present embodiment.The device for inductively coupled plasma processing of present embodiment Substitute the backbar 86 of the 2nd embodiment and there is backbar 96, substitute the dielectric cover 82 of the 2nd embodiment and there is electric Jie Body cover 112, substitutes dielectric cover fixing device 87A of the 2nd embodiment and has dielectric cover fixing device 120.In addition, with Lower detailed description dielectric cover fixing device 120, but in the present embodiment, substitute in the 2nd embodiment except dielectric cover Dielectric cover fixing device outside fixing device 87A, and it is provided with solid with the identical dielectric cover of dielectric cover fixing device 120 Determine device.
It is formed with backbar 96 from upper surface and extends through 1 through hole 96a of lower surface.Dielectric cover 112 and the 1st The dielectric cover 12 of embodiment is similarly divided into 4 parts.That is, dielectric cover 112 have part 1 cover 112A, the 2nd Part cover 112B, the 3rd and the 4th part (not shown) cover.
Part 1 cover 112A has supported portion 112A1.Supported portion 112A1 have lower surface and with the lower surface Continuous side.The lower surface of supported portion 112A1 is a part for the lower surface of part 1 cover 112A, in part 1 cover The lower surface of 112A, with the lower surface of supported portion 112A1 positioned at the upper of the lower surface of the part in addition to supported portion 112A1 The mode of side is formed with stage portion.Equally, part 2 cover 112B has supported portion 112B1.
Dielectric cover fixing device 120 is included as the bar 121 of dielectric cover fixed appliance and as fixed mechanism Cylinder body 122.Bar 121 and cylinder body 122 constitute cylinder.Cylinder body 122 is configured in the top of backbar 96, directly or by other structures Part is fixed on main body container 2.Bar 121 is inserted in through hole 96a.
Bar 121 be housed in upper end the shaft-like in cylinder body 122 by fixed part 121a, respectively from by fixed part The 1st support 121b1, the 2nd support 121b2, the 3rd and the 4th support (not shown) that the bottom of 121a extends to side.
1st support 121b1 is configured in the above-mentioned stage portion on the lower surface of part 1 cover 112A, the 1st support The upper surface of 121b1 is connected to the lower surface of supported portion 112A1.1st support 121b1 has the step with above-mentioned stage portion Equal thickness.Therefore, in lower surface and the part 1 cover 112A of the 1st support 121b1 except supported portion 112A1 it Without step between the lower surface of outer part.Equally, the upper surface of the 2nd support 121b2 is connected to supported portion 112B1 Lower surface.
The quilt of relation and the 4th support and the 4th part cover between the 3rd support and the supported portion of third portion cover Relation between support is with the relation between above-mentioned 1st support 121b1 and supported portion 112A1 of part 1 cover 112A It is identical.The side of the side of the supported portion of the 1st～the 4th part cover is configured in by a part of fixed part 121a.
Above-mentioned each support clips respectively between at least one of backbar 96 and dielectric wall 6 at it and is located at and props up The supported portion of the dielectric cover 112 of the corresponding position of bearing portion is supporting dielectric cover 112.In addition, Figure 23 represents support 121b1,121b2 respectively supported portion 112A1,112B1 is clipped between backbar 96 at it support supported portion 112A1, The example of 112B1.But, support 121b1,121b2 can also respectively its between dielectric wall 6 or with backbar 96 And both dielectric wall 6 between clip supported portion 112A1,112B1 to support supported portion 112A1,112B1.
Pipe arrangement 123,124 is connected with cylinder body 122.In from pipe arrangement 124 to cylinder body 122 supply air, from pipe arrangement 123 During exhaust, bar 121 moves to the upper end of movable range.Conversely, in from pipe arrangement 123 to cylinder body 122 supply air, from pipe arrangement During 124 exhaust, bar 121 moves to the lower end of movable range.
In the dielectric cover fixing device 120 of present embodiment, when making bar 121 move to the upper end of movable range, lead to Cross and lift by fixed part 121a, the upper surface of support 121b1,121b2 is connected to respectively under supported portion 112A1,112B1 Surface.Thus, as dielectric cover fixed appliance bar 121 in the way of it does not change with the position relationship of backbar 96 It is fixed on backbar 96.Thus, dielectric cover 112 is fixed by bar 121.
In addition, when making bar 121 move to the lower end of movable range, the upper surface of support 121b1,121b2 is remote respectively From the lower surface of supported portion 112A1,112B1, the fixation of dielectric cover 112 is released.
Figure 24 is the sectional view of the dielectric cover fixing device 130 for representing modified embodiment of the present embodiment.The variation Dielectric cover fixing device 130 substitute Figure 23 in bar 121 and cylinder body 122 and including the tooth bar as dielectric cover fixed appliance 131 and as the little gear 132 of fixed mechanism.Tooth bar 131 includes：The shaft-like being inserted in through hole 96a by fixed part 131a；Respectively from the 1st support 131b1 extended to side by the bottom of fixed part 131a, the 2nd support 131b2, do not scheme The the 3rd and the 4th support for showing.The shape of the 1st～the 4th support and effect are supported with the 1st～the 4th of the bar 121 shown in Figure 23 the Portion is identical.Little gear 132 is configured in the top of backbar 96, and it is direct or can hold relative to main body by other components Device 2 is rotationally mounted on main body container 2.The top of backbar 96 is configured in by a part of fixed part 131a, this one Partial side is formed with the tooth 131c for the engagement of little gear 132.
In the dielectric cover fixing device 130 of the variation shown in Figure 24, rotated and tooth bar by making little gear 132 131 move along the vertical direction, thereby, it is possible to release dielectric cover in the same manner as the dielectric cover fixing device 120 shown in Figure 23 112 fixation.
Other constructions of present embodiment, functions and effects are identical with the 2nd embodiment.
4th embodiment
Then, the dielectric cover fixing device of " the cover fixing device " as the 4th embodiment of the invention is illustrated.Figure 25 It is the sectional view of the dielectric cover fixing device for representing present embodiment.The device for inductively coupled plasma processing of present embodiment Substitute the dielectric cover fixing device 120 of the 3rd embodiment and there is dielectric cover fixing device 135.
Dielectric cover fixing device 135 includes dielectric cover fixed appliance 148 and fixed mechanism 140.Dielectric cover is consolidated Determine the supporting to the side extends the 1st by fixed part 148a, respectively certainly by the bottom of fixed part 148a with shaft-like of utensil 148 Portion 148b1, the 2nd support 148b2, the 3rd and the 4th support (not shown).The shape of the 1st～the 4th support and effect and figure 1st～the 4th support of the bar 121 shown in 23 is identical.It is inserted in through hole 96a by fixed part 148a.By fixed part 148a A part be configured in the top of backbar 96, the hole 148c for running through in the horizontal direction is formed with the part.Dielectric Cover fixing device 135 also includes cover 149, and the cover 149 is installed on backbar 96, for being configured in the top of backbar 96 Covered by a part of fixed part 148a.
Fixed mechanism 140 is the mechanism to being limited by the movement of the above-below direction of fixed part 148a.The fixed mechanism 140 have bar 141 and cylinder body 142.Bar 141 and cylinder body 142 constitute cylinder.Cylinder body 142 is for example fixed in dielectric wall 6.Bar 141 configure in the horizontal direction, can be inserted in the 148c of hole through cover 149.
Pipe arrangement 143,144 is connected with cylinder body 142.In from pipe arrangement 144 to cylinder body 142 supply air, from pipe arrangement 143 During exhaust, bar 141 is projected and is inserted in the 148c of hole.Thus, limited by the movement of the above-below direction of fixed part 148a, electricity is situated between Body cover 112 is fixed by dielectric cover fixed appliance 148.Conversely, in from pipe arrangement 143 to cylinder body 142 supply air, from pipe arrangement During 144 exhaust, bar 141 is exited from hole 148c.Thus, can along the vertical direction be moved by fixed part 148a, release dielectric cover 112 fixation.
Figure 26 is the sectional view of the dielectric cover fixing device 136 for representing modified embodiment of the present embodiment.The variation Dielectric cover fixing device 136 substitutes fixed mechanism 140 in Figure 25 and has fixed mechanism 150.Fixed mechanism 150 has replacement The tooth bar 151 of bar 141 and make the little gear 152 that the tooth bar 151 moves in the horizontal direction.Tooth bar 151 is configured in the horizontal direction, Can be inserted in the 148c of hole through cover 149.
In the variation, by making that little gear 152 rotates and tooth bar 151 is moved in the horizontal direction, thereby, it is possible to figure Dielectric cover fixing device 135 shown in 25 similarly releases the fixation of dielectric cover 112.
Other constructions of present embodiment, functions and effects are identical with the 3rd embodiment.
5th embodiment
Then, the dielectric cover fixing device of " the cover fixing device " as the 5th embodiment of the invention is illustrated.Figure 27 It is the sectional view of the dielectric cover fixing device for representing present embodiment.Figure 28 is to represent the dielectric cover fixing device in Figure 27 A part stereogram.
The device for inductively coupled plasma processing of present embodiment substitutes the backbar 86 of the 2nd embodiment and has supporting Beam 186, substitutes the dielectric cover 82 of the 2nd embodiment and has dielectric cover 182, substitutes the dielectric cover of the 2nd embodiment Fixing device 87A and there is dielectric cover fixing device 187A.
It is formed with backbar 186 from upper surface and extends through 1 through hole of lower surface.Through hole is included from backbar 86 Inner peripheral portion 186a, 186b that upper surface configures in order to lower surface.The internal diameter of inner peripheral portion 186b is interior more than inner peripheral portion 186a Footpath.
Dielectric cover 182 is divided into 4 parts in the same manner as the dielectric cover 82 of the 2nd embodiment.That is, dielectric cover 182 have part 1 cover 182A, part 2 cover 182B, the 3rd and the 4th part (not shown) cover.
Part 1 cover 182A has supported portion 182A1.Supported portion 182A1 have lower surface and with the lower surface Continuous side.The lower surface of supported portion 182A1 is a part for the lower surface of part 1 cover 182A, in part 1 cover The lower surface of 182A, with the lower surface of supported portion 182A1 positioned at the upper of the lower surface of the part in addition to supported portion 182A1 The mode of side is formed with stage portion.Equally, part 2 cover 182B has supported portion 182B1.
Dielectric cover fixing device 187A includes dielectric cover fixed appliance 188A and fixed mechanism 190.Dielectric cover is consolidated Determine utensil 188A and there is the 1st support 188A1, the 2nd supporting in the same manner as dielectric cover fixed appliance 88A of the 2nd embodiment Portion 188A2, by fixed part 188A3, the 3rd and the 4th support (not shown).The shape of the 1st～the 4th support and effect and the 2nd Embodiment is identical.
The hook 189 of the top for being configured in the upper surface of cover 182 is had by fixed part 188A3.Hook 189 is housed in inner peripheral portion In 186b.On hook 189, from it surface is shaped as rectangular slit 189a to be internally formed vertical view.In hook 189 Inside, is also formed with blank part 189b continuous with slit 189a below above-mentioned slit 189a.The blank part 189b of vertical view Shape be have the diameter equal with the length dimension of slit 189a circle.On the border of slit 189a and blank part 189b Position is formed with the step for linking up slit 189a and blank part 189b and forms face.
Fixed mechanism 190 has retainer 191, motor 192, links the rotary shaft of motor 192 and retainer 191 The connector 193 for getting up.As shown in figure 28, retainer 191 has the plectane of the upper end connection of bar portion 191b and bar portion 191b The key portion 191c of the lower end connection of portion 191a and bar portion 191b.Plectane portion 191a is configured in the upper of the upper surface of backbar 186 Side, is connected to connector 193.Bar portion 191b is inserted in inner peripheral portion 186a and slit 189a.Key portion 191c has can be led to Cross the rectangular shape of the size of slit 189a.Key portion 191c can be rotatably housed in blank part 189b.In addition, key portion The above-below direction size of 191c is roughly equal with the above-below direction size of blank part 189b.
In dielectric cover fixing device 187A of present embodiment, when rotating the rotary shaft of motor 192, retainer 191 key portion 191c rotates in blank part 189b.Make key portion 191c stop at except can by the position of slit 189a it During outer position, the upper surface of key portion 191c be connected to the step for linking up slit 189a and blank part 189b form face and Fix dielectric cover fixed appliance 188A, thus, dielectric cover 182 is fixed by dielectric cover fixed appliance 188A.
When making key portion 191c stop at the position that can pass through slit 189a, key portion 191c passes through slit 189a, so as to, Dielectric cover fixed appliance 188A can move to lower section.Thus, the fixation of dielectric cover 182 is released from.
Other constructions of present embodiment, functions and effects are identical with the 2nd embodiment.
6th embodiment
Then, the dielectric cover fixing device of " the cover fixing device " as the 6th embodiment of the invention is illustrated.Figure 29 It is the sectional view of the dielectric cover fixing device for representing present embodiment.The device for inductively coupled plasma processing of present embodiment Substitute the dielectric cover 82 of the 2nd embodiment and there is dielectric cover 162, the dielectric cover for substituting the 2nd embodiment fixes dress Put 87A and there is dielectric cover fixing device 290.Dielectric cover 162 can both be divided into some, it is also possible to not divided Cut.The construction of dielectric cover fixing device 290 is identical with the fixed mechanism 90 of the 2nd embodiment.Therefore, dielectric cover is fixed The constitutive requirements mark of device 290 and the constitutive requirements identical reference of fixed mechanism 90.
Dielectric cover 162 includes cover main body 162A and hook 162B, and cover main body 162A has upper and lower surface, uses In the major part for constituting dielectric cover 162, hook 162B is installed in the upper surface of cover main body 162A.Hook 162B is received In inner peripheral portion 86d of backbar 86.Hook 162B forms internal diameter of the internal diameter less than other parts of the part near its upper end Substantially cylindrical shape.A part near the upper end of hook 162B becomes what is engaged for multiple holding section 94c of fastened component 94 Holding section 162B1.Holding section 162B1 is corresponding with the supported portion of the dielectric cover of the present invention.Thus, in present embodiment In, as supported portion holding section 162B1 be configured in cover main body 162A upper surface top.Holding section 162B1 has Lower surface and with the continuous side of the lower surface（The end of the inner circumferential side of holding section 162B1）.
In dielectric cover fixing device 290, the 6th part 91f of bar 91 and the holding section 94c of fastened component 94 are received In hook 162B.Fastened component 94 is corresponding with the dielectric cover fixed appliance of the present invention, electricity Jie in addition to fastened component 94 The constitutive requirements of body cover fixing device 290 are consolidated with lifting as the fastened component 94, the present invention of dielectric cover fixed appliance Determine mechanism corresponding.In addition, holding section 94c with the present invention support it is corresponding, in fastened component 94 except holding section 94c it Outer part is corresponding by fixed part with the present invention's.It is configured in as supported portion as the holding section 94c of support Between the lower surface of holding section 162B1 and the upper surface of cover main body 162A.Constitute by the part quilt of the flat part 94b of fixed part It is configured in the side of the side of holding section 162B1.
In the present embodiment, when air is supplied to the inner space of cylinder body 92 from pipe arrangement 95, bar 91 is located at movable model The lower end enclosed.In this condition, the bottom of multiple flat part 94b of fastened component 94 is not deployed, multiple holding section 94c cards Together in the holding section 162B1 of hook 162B.Thus, it is in this condition, not solid as the fastened component 94 of dielectric cover fixed appliance Due to backbar 86, dielectric cover 162 can be dismantled.
When stopping supplying air, discharging air from the inner space of cylinder body 92 to the inner space of cylinder body 92 from pipe arrangement 95, Bar 91 pushes top to by the active force of spring 93, the bottom of multiple flat part 94b of fastened component 94 by the 6th part 91f to Launch in outside.As a result, multiple holding section 94c are sticked in the holding section 162B1 of hook 162B, used as dielectric cover fixed appliance Fastened component 94 is fixed on backbar 86 in the way of it does not change with the position relationship of backbar 86.Thus, dielectric Cover 162 is fixed in the way of it does not change with the position relationship of backbar 86.
Other constructions of present embodiment, functions and effects are identical with the 2nd embodiment.
7th embodiment
Then, the dielectric cover fixing device of " the cover fixing device " as the 7th embodiment of the invention is illustrated.Figure 30 It is the sectional view of the dielectric cover fixing device for representing present embodiment.The device for inductively coupled plasma processing of present embodiment Substitute the dielectric cover 182 of the 5th embodiment and there is dielectric cover 382, the dielectric cover for substituting the 5th embodiment fixes dress Put 187A and there is dielectric cover fixing device 390.Dielectric cover 382 can both be divided into some, it is also possible to not by Segmentation.The construction of dielectric cover fixing device 390 is identical with the fixed mechanism 190 of the 5th embodiment.Therefore, to dielectric cover The constitutive requirements mark of fixing device 390 and the constitutive requirements identical reference of fixed mechanism 190.
Dielectric cover 382 includes cover main body 382A and hook 382B, and cover main body 382A has upper and lower surface, is used for The major part of dielectric cover 382 is constituted, hook 382B is installed in the upper surface of cover main body 382A.Hook 382B is housed in In inner peripheral portion 186b of backbar 186.Hook 382B forms internal diameter of the internal diameter less than other parts of the part near its upper end Substantially cylindrical shape.
The construction of hook 382B is identical with the hook 189 of the 5th embodiment.That is, in hook 382B, from it surface is to internal shape Rectangular slit 382Ba is shaped as into have a vertical view.In the inside of hook 382B, also formed in the lower section of above-mentioned slit 382Ba There is blank part 382Bb continuous with slit 382Ba.The shape of the blank part 382Bb of vertical view is that have the length with slit 382Ba The circle of equal sized diameter.It is formed with slit 382Ba and sky in the boundary position of slit 382Ba and blank part 382Bb The step that hole portion 382Bb is linked up forms face.
In addition, hook 382B has supported portion 382B1 of the periphery for being formed in slit 382Ba.Thus, in present embodiment In, supported portion 382B1 is configured in the top of the upper surface of cover main body 382A.Supported portion 382B1 have lower surface and With the continuous side of the lower surface（The end of slit 382Ba）.
In the retainer 191 of dielectric cover fixing device 390, bar portion 191b is inserted into inner peripheral portion 186a and slit In 382Ba.Key portion 191c has the rectangular shape that can pass through size as slit 382Ba.Key portion 191c can rotate Be housed in blank part 382Bb.In addition, the above-below direction size of the above-below direction size of key portion 191c and blank part 382Bb It is roughly equal.
Retainer 191 is corresponding with the dielectric cover fixed appliance of the present invention, and the dielectric cover in addition to retainer 191 is consolidated The constitutive requirements for determining device 390 are corresponding with the fixed mechanism of the present invention.The key portion 191c of retainer 191 includes being connected to 2 supports 191c1,191c2 of the lower surface of supported portion 382B1.It is in retainer 191, except support 191c1,191c2 Outside part with the present invention it is corresponding by fixed part.Support 191c1,191c2 are configured under supported portion 382B1 Between the upper surface of surface and cover main body 382A.Composition is configured in supported portion by a part for bar portion 191b of fixed part The side of the side of 382B1.
In the dielectric cover fixing device 390 of present embodiment, when rotating the rotary shaft of motor 192, retainer 191 key portion 191c rotates in blank part 382Bb.Stop at except the position that can pass through slit 382Ba key portion 191c is made Outside position when, the upper surface of support 191c1,191c2 is connected to the lower surface of supported portion 382B1 and dielectric cover 382 are fixed.
When making key portion 191c stop at the position that can pass through slit 382Ba, key portion 191c passes through slit 382Ba, from And, dielectric cover 382 can move to lower section.Thus, the fixation of dielectric cover 382 is released.
Other constructions of present embodiment, functions and effects are identical with the 5th embodiment.
In addition, the present invention is not limited to the respective embodiments described above, various changes can be carried out.For example, in the present invention, Part shown in each embodiment is not limited to the part that cover fixed appliance is fixed.

Claims (2)

1. a kind of cover fixing device of device for inductively coupled plasma processing, the device for inductively coupled plasma processing includes：Place Reason room, it has the window member for constituting top plate portion, for carrying out plasma treatment；High frequency antenna, it is configured in above-mentioned window The top of component, in above-mentioned process interior formation induction field；Supporting member, for supporting above-mentioned window member；Cover, is used for Cover the lower surface of above-mentioned window member and the lower surface of above-mentioned supporting member except the position that there are above-mentioned cover fixing device Part in addition, above-mentioned cover fixing device is used for above-mentioned device for inductively coupled plasma processing, for fixing above-mentioned cover, its feature It is,
Above-mentioned cover fixing device includes cover fixed appliance and fixed mechanism,
Above-mentioned cover fixed appliance includes：
Support, it is used to support a part, the supported portion with lower surface as above-mentioned cover；
By fixed part, it is fixed in above-mentioned supporting member,
Above-mentioned fixed mechanism includes cylinder body or little gear,
By lifting the above-mentioned by fixed part of above-mentioned cover fixed appliance by fixed mechanism, by it is above-mentioned by fixed part with its with above-mentioned The mode that the position relationship of bearing member does not change is fixed.
2. the cover fixing device of device for inductively coupled plasma processing according to claim 1, it is characterised in that
Above-mentioned fixed mechanism is the mechanism limited the movement of the above-mentioned above-below direction by fixed part.
CN201310390661.5A 2009-03-25 2010-03-25 Cover fixing device of induction coupling plasma processing apparatus Active CN103533739B (en)

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JP2009073023 2009-03-25
JP2009-073023 2009-03-25
JP2010010711A JP5578865B2 (en) 2009-03-25 2010-01-21 Cover fixing tool and cover fixing device for inductively coupled plasma processing apparatus
JP2010-010711 2010-01-21
CN201010141151.0A CN101848596B (en) 2009-03-25 2010-03-25 The cover fixer of device for inductively coupled plasma processing and cover fixture

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JP5578865B2 (en) 2014-08-27

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