201127220 六、發明說明： 【發明所屬之技術領域】 本發明關於一種於感應賴I合電聚處理裝_复中，將覆 i住構成處理室頂部之窗組件下方面的蓋板固定用的 蓋板固定具及蓋板固定裝置。 【先前技術】 於 FPD(Flat Panel Display)製程中，係針對 FpD 用 坡璃基板進行電漿蝕刻、電漿灰化、電漿成膦等各種電 漿處理。作為進行該電漿處理的裝置，已知有一種可產 生高密度電漿的感應耦合電漿(ICp)處理裝置。 ^感應耦合電漿處理裝置具備有：處理室，係保持氣 雄、並針對料被處㈣縣缺行f $冑 :r系設置於處理室外部。處理室具有構二Ξ ===人的窗組件，且高頻天線係丄於 功率施加至高頻天線，經由==將高頻電 應電場’藉由減應電場來讓導厂形成感 漿處理。料漿來針對基板進行特定之電 至處電漿處理裝置如窗組材之下方面·出 主處理至内時，該窗組件 卜方面路出 由於窗組件I法輕易地p自會因電漿而受到損傷。 輕易地進行交換4絮進:，即使受到損傷也無法 、疋’如專利文獻（日本專利 201127220 ㈣·1·28299號公報)所記載般，可藉由能輕易拆裝 的盍板來覆盍该窗組件的下方面。藉此，可保護窗組件 下方面’且’可輕易地交換或清潔受到損傷之蓋板。 如專利文獻所記載般，習知，蓋板係相對於窗組件 之支樓組件而以複數_絲來加以固定。更詳細說明， 習知之蓋板之固定方法係在蓋板之周緣部之附近部 份，各自形成有能讓螺絲之軸部插入之複數個貫通孔， 並從盍板下面娜螺絲之㈣插人各貫通孔，而將該轴 部螺鎖至該件之切組件處來固定蓋板。但是，該習 知之蓋板的固定方法會產生下述問題。 於處理室進行電I處理時，由於蓋板之下方面會連 續地曝露於巾’蚊得其溫度上昇。於蓋板之下方 面的昇溫過程中’於蓋板之τ方面會產生不均勻之溫度 分佈，其結果，蓋板會產生拉伸輪曲等微小變形。此 時，因為蓋板材料(例如陶曼)與支撐組件材料(例如紹) 之間的熱膨脹係數不同，故蓋板之變形量與支撑組件之 變形量會產生差異。因此’藉由螺絲來將蓋板固定於支 撐組件而使得蓋板之貫通孔附近部份完全無法產生位 移之情況’蓋板之貫通錢近部份會受料度之應力作 用，而會有從該部份造成蓋板破損之虞。 於是，亦考量一種讓蓋板之貫通孔的直徑較螺絲之 軸部的直徑更大，且同時設置有能讓蓋板與螺絲產生相 對位移的機構，藉此讓蓋板之貫通孔附近部份不會受到 過度之應力作用。但是，即使如此，蓋板變形時施加於 4 201127220 蓋板之應力容易集中於貫通孔附近部份，故容易以該貫 通孔為起點發生裂痕而使得蓋板破損。 又，習知之蓋板固定方法中，於處理室之頂面處， 會由於複數個螺絲之頭部而形成了複數個凸部。於該凸 部處，容易附著有電漿處理所產生之副生成物。因此， 於電漿處理中，萬一，附著於螺絲頭部的副生成物從螺 絲頭部剝落而產生微粒（浮遊粒子），該微粒會有引發蝕 刻不良之虞。又，會因電漿使得螺絲頭部受磨耗而產生 微粒，該微粒亦會有引發蝕刻不良之虞。 再者，習知之蓋板固定方法中，由於係使用多個螺 絲來固定蓋板，故會有拆裝蓋板之作業性不良的問題。 又，近年來，對應於FPD之大型化，感應辆合電漿處 理裝置之處理室亦大型化。於具有大型處理室之感應耦 合電漿處理裝置中，有時窗組件與蓋板會以各自分割成 複數個部份的方式所構成。該情況下，為了固定蓋板， 便需使用更多的螺絲，使得拆裝蓋板之作業性更下降。 本發明有鑑於該問題點，目的係提供一種於感應耦 合電漿處理裝置中，可抑制覆蓋於窗組件下方面之蓋板 的破損與微粒的發生，且，能輕易地拆裝該蓋板的感應 耦合電漿處理裝置之蓋板固定具及蓋板固定裝置。 【發明内容】 本發明之感應耦合電漿處理裝置之蓋板固定具，係 應用在感應耦合電漿處理裝置。該感應耦合電漿處理裝 201127220 置具備有：具有構成頂部之窗組件而進行電漿處理的處 理室、設置於該窗組件上方而於該處理室⑽成感應電 =的高頻天線、支撐該窗組件的支稽奴件、以及覆蓋該 窗組件下方面的蓋板。本發明之蓋板固定具係用以固定 該蓋板。 本發明之蓋板固定具具備有：支撐部，係支撐作為 該蓋板一部份的具下方面之被支撐部；以及被固定部， 係固定於該支撐組件。 本發明之蓋板固定具，亦可具備有對應該支撐組件 來固疋該被固定部的螺絲。此時，該螺絲的頭部可設置 於該支撐組件上方，讓該螺絲之軸部貫穿該支撐組件而 結合至該被固定部。 又，本發明之蓋板固定具，其中該支撐部亦可具 有.上方面，係抵接至該被支撑部的下方面；以及下方 面，係隨著遠離該被固定部而與該上方面之距離逐漸變 /J、〇 又，本發明之蓋板固定具，其中該被支撐部下方面 亦可為該蓋板下方面之一部份’該蓋板下方面形成有段 差部，以使得該被支撐部下方面位在該被支撐部以外之 部份之下方面的上方位置；該支撐部亦可設置於該蓋板 下方面之該段差部處。此時，該支樓部亦可具有與該段 差部之段差相等的厚度。 又，本發明之蓋板固定具，其亦可更具備有侧部， 將2個蓋板固定具於水平方向鄰接設置時，該側部之形 201127220 狀會使得2個蓋板固定具之側部相互嚅合。 又，本發明之蓋板固定具，其中該蓋板亦可具備了 具有下方面及上方面以構成蓋板主要部份的蓋板本 體；該被支撑部可設置於該蓋板本體上方面的上方；該 支撐部則可設置於該被支撐部下方面與該蓋 方面夕。 ^ 本發明感應耦合電漿處理裝置之蓋板固定 = 並具備有：本發明之蓋板固定具；以及 固定固定具之該被固定部蚊在該支撐組件處的 被固ΪΓ明之蓋板固定裝置，其中該蚊機構可為將該 固定；St起的機構。抑或，該固定機構可為限制該被 口疋。卩之上下方向移動的機構。 撐部依本發明，㈣具備有支制蓋板之被支撐部之支 二二ΐ固定於支撐組件之被固定部的蓋板固定具， 螺絲之Γί板。藉此’依本發明，無需於蓋板處形成讓 果，依3插入的複數個貫通孔，便可固定蓋板。其結 能造二發明，可抑制蓋板的破損與微粒的發生，且， 可輕易地拆裝蓋板的效果。 【貫施方式】 [第1實施形態] 參考圖下參考圖式來詳細說明本發明之實施形態。首先， 乂 θ1至圖4來說明包含有本發明第1實施形態之蓋板固 201127220 感馳合處理裝置的結構。圖1為顯示感餘合 電體之剖面圖。圖2係圖1中作為「窗組件」的介 ==及懸掛具的立體圖。圖3係圖丨中介電體壁及高頻天 為卜=圖。圖4係圖1中作為「蓋板」的介電體蓋板及作 為盖板固定具」的介電體蓋板固定具之底面圖。 圖1所不感應輕合電毁處理褒置】係用以針對例如卿 :玻，以下稱作「基板」)S進行電聚處理。作為FPD =牛出液晶顯示器(LCD)、電發光(E1_ Lumin_ce ; L)顯不器、電漿顯示面板(PDP)等。 合賴處理裝置〗係赌有錢室4與處理室 写2 體容^ 2、以設置_本體容11 2邮將本體容 壁二:間劃Γ上下2空間之作為「窗組件」的介電體 冓成。天線室4係本體容器2内之介電體壁6的上側 =室5則為本體容器2内之介賴腔6的下側空間。 室5二:體Γ !、構成天線室4的底部，同時亦構成處理 電毁處理:。处理室5係可保持氣密，並於該處對基板進行 圓汽=1/ 亦可為具有上部與底部與筒狀部的 等為本體容112的材料，可使_、銘合金 於太_料。使用紹作為本體容器2之材料的情況，係對 二體:器2之内壁面進行氧化峨 本體容器2之内壁面處產生污染物。 = 係呈接地狀態。 ♦“盗2 8 201127220 個側面的約略長有約略正方形之上面與底面與4 可使卿成:Γ物壁6的材料， 係錢成4塊。即，介電體壁6係具有 ，份壁6B、第3部份壁6C及第4部份壁；A第2 壁6亦可無需分割成4個部份。 "電體 感應搞合電漿處理裝置1係更且 16,以作為支撐介電體壁6之=有與支撐樑 本體容器2的側壁處。支㈣w同+ °支撐术7係安裝於 八雷雕射/樑如圖2所示般係呈十字型。 ”電脰壁6之4個雜壁6A、6B、叱、仍係 支撐樑16來加以支撐。 、支牙条7舁 感應耦合電聚處理裳置！更具備有圓筒形 8A及圓柱形狀之懸掛具8β、8c、奶、犯， =遠 接至本體雜2之頂部的上 份(十字交差部份)係連接5矜_1 上方面之中央部 ^ 接懸掛具8A的下端部。又，支撐拇 ^面在中央部份與十字之4個前端部份 門 點位置係連接至雖掛呈抓〇ΤΛ 間 卿i6犯的下端部。如此， _ 8Α〜8Ε，财_ 2的頂 處，維持呈水平狀態而設置。 .置 雖然圖中未顯示，但支撐樑16係形成有：氣體 給有後述之處理氣體；以及複數個開口部，;: 氣體流道的處理氣體噴出。作為支撐樑16的材料:以 9 201127220 電性材料。作為該導電性材料，較佳係使用紹等金屬材料者。 f用紐來作為支麯16_之情況，應對於支_ 16内外 氧輪膜(Ah，處理，以使得不會從該表面處產 感應搞合《•里裝置i更具備有高頻天線(以下簡稱為 天線)13 ’其係設置於天線室4内部(即處理室5外部之介電 體壁6的上方）。如圖3所示，天線13係捲繞呈約略正方形 的平面四角形。天線13係設置於介電體壁6上方面之上。本 體容器2外部則設置有整合器M與高頻電源ls。天線G之 一端係經由整合器14連接至義電源…天線13之另一端 則連接至本體容器2的内壁，且經由本體容器2而形成接地。 感應耗合賴處理裝置1更具備有介電體蓋板12，其係 作為覆蓋介f體壁「蓋板」。介紐蓋板u為具 有約略正方形形狀之上方面及底面、與4個側面的板狀體。 ”電體蓋板12係由介電體材料所形成。作為介電體蓋板 之材料，可使用例如Al2〇3等陶瓷或石英。 舉例說明，介電體蓋板12係與介電體壁6相同地分割成 4個部份。即，如圖4所示，介電體蓋板12具有第！部份蓋 ，12A、第2部份蓋板12B、第3部份蓋板12C及第4部份 蓋板12D。第1至第4部份蓋板12八、12B、12(：、12〇各自 覆蓋於介電體壁6的第1至第4部份壁6A、6B、6C、6D之 下方面。另外，介電體蓋板12亦可無需分割成4個部份。 —如圖4所示，感應耦合電漿處理裝置丨更具備有介電體 蓋板固定具18A、18B1、18B2、18B3、18B4，係作為固定 201127220 施形態的「蓋板固定具」。如後詳述 麻肿、土板S進仃電漿處理時，會從高頻電源15將形成感 ;天::的_電功率(例如13.5_之高頻電功率)供給 ^ *此’藉由天、線13而於處理室5内形成感應電 琢。該感應電場可將後述處理氣體轉化為電裝。… 本= 容器2外部更設置有氣體供給裝置，氣體供給裝 L插人懸掛具8A之中空部的氣體供給管21而連 ^至支撐樑16的氣體流道。氣體供給裝置2G _以供給電 j處，處理。進行賴纽時，處理氣體會經由氣體 :、··ά ΐ 21支撐樑16内之氣體流道及開口部、以及介電體 盍板12的開口部，而供給至處理室5内。作為處理氣體，可 使用例如SF6氣體。 感應輕合«賴裝置丨更频有载置台Μ、絕緣體框 24、支柱25、蛇腹管26、以及閘閥27。支柱乃係連接至設 ίϋ本體容112下方之昇降裝置(®巾未顯示），且通過本體 容器2底部所形成之開口部而突出至處理室5内。又，支柱 25具有中空部。絕緣體框24係設置於支柱25上方。該絕緣 體框24係於上部形成有開口的箱狀體。絕緣體框24之底部 則形成有連接至支柱25之中空部的開口部。蛇腹管26係包 圍支柱25，而氣密地連接於絕緣體框24及本體容器2之底 部内壁。藉此，可維持處理室5的氣密性。 201127220 載置台22係收納於絕緣體框24内。載置台22具有載置 基板S用的載置面22A。載置面22A係面向介電體蓋板12。 作為載置台22之材料，可使用例如紹等導電性材料。使用紹 作為載置台22之材料的情況，係對於載置台22表面進行氧 化鋁膜(Alumite)處理，以使得不會從該表面處產生污染物。 本體容器2外部更設置有整合n 28、與高頻電源29。載 置台22係經由貫穿絕緣體框24之開口部及支柱乃之中空部 的通電棒而連接至整合器28，再者，經由該整合器28 =連 接至高頻電源29。針聽板S進行賴處辦，係從高頻電 源29將偏壓用高頻電功率(例如38〇kHz之高頻電功率)供給 至載置台I該高頻電功率伽以將電針的離子，有效地 吸引至載置於載置台22上的基板S。 閉閥27係設置於本體容器2之側壁。間闊27且有開關 功能’於關閉狀態可維持處理室5之氣密性，於開啟狀 可於處理室5與外部之間進行基板s的搬送。 -本體容器2外部更設置有真空裝置3〇。真空裝置3〇係 經由連接至本體容器2底部的排氣管31❿連接至處理室5。 針對基板Sit行賴纽時，真空裝置％會將處理室$内 空氣排出，讓處理室5内部維持於真空環境。 、 其次，參考圖4至圖6來詳細朗本實施職之介 蓋板固定具。圖4係顯示介電體蓋板12及介電體蓋板固定具 18A、腦、18B2、18B3、18B4。圖 5 係圖 4 中 5·5 線所; 位置的剖_ ’圖6係圖4中6·6線所示位置的剖面圖。於 圖4中’圓形記號係代表螺絲。 、 201127220 如前述般，介電體苔扨 mm , 板具有第1至第4部份蓋板 板12敕雕W巾’第1部份蓋板12A係設置於介電體蓋 心入 =域中的左上區域’第2部份蓋板迦係設 置=「纽盍板丨2整體設域中的右上區域，第3部份蓋 5 J係°又置於介電體蓋板12整體設置區域中的左下區 =第4部份蓋板12D係設置於介電體蓋板〗2整體設置區 域中的右下區域。 介電體蓋板12之中央部處，第丨至第4部份蓋板12八、 12B 12C、12D係、各自形成有L型切除部ι2α&、ι2β。^、 l2Da ’且將該敎合時卿成十字型的開口部。 仗處理至5侧觀之，介電體蓋板固定具i8A❸形狀為十 字型’且較介電板12中央部之姆部12Μ、咖、 12Ca、12Da所形成的十字型開口部略大。接著，設置介電體 蓋板固定具18Α並使其覆蓋介電體蓋板12之十字型開口 部。另外’介電體蓋板固定具18Α亦可形成有對應支撐樑Μ 閉口部的開口部。 從處理室5彻懷之，介電體蓋板固定具18m〜18B4的形 狀皆為長方形。介電體蓋板固定具_能與支樓架7之間 夾持般地支樓第1及第3部份蓋板12Α、12C之各自的-側 邊。又’介電體錢固定具丨犯2能與支撐架7之間失持般 地支撐第2及第4部份蓋板12B、12D之各自的一側邊。又， 介電體盍板固定具18Β3能與支撐架7之間夾持般地支撐第i 及第2部份蓋板12A、12B之各自的一側邊。又，介電體蓋 板固定具18B4能與支樓架7之間夾持般地支撐第3及第4 13 201127220 部份蓋板12C、12D之各自的一側邊。 如後詳述般’介電體蓋板固定具18Α、18Βι、ι8Β2、 18B3、18B4皆具備有1個以上之支撐部、以及2個被固定部。 支樓部係設置於作為介電贿板U之—雜的被支標部下 側’而為支樓該被支樓部的部份。介電體蓋板12係具有與支 撐部（包含介電體蓋板固定具18A、18B卜18B2、18B3、18B4) 相同數量的被支撐部。 以下，詳細說明如圖6所示介電體蓋板固定具18A的結 構及作用，來代表介電體蓋板固定具18A、18m、18B2、 1犯3、18B4。如圖6所示’介電體蓋板固定具18A係具備有： 支撐第1部份蓋板12A之-部份的第j支樓部18A卜支撐 第2部份蓋板12B之一部份的第2支撐部18A2、以及被固 定部18A3。雖然圖中未顯示’但介電體蓋板固定具18八更 具備有：支撐第3部份蓋板12C之一部份的第3支撐部、以 及支撐第4部份蓋板12D之一部份的第4支撐部。第丨及第 2支撐部18A卜18A2係連接至被固定部18A3，且從被固定 部18A3朝側方延伸般地設置。第3及第4支撐部亦與第i 及第2支撐部18A1、18A2相同。 ' 另一方面，第1部份蓋板12A具有被支撐部12A1。被 支撐部12A1具有下方面12Ala、以及連續形成至該下方面 12Ala的側端12Alb。側端12Alb同時也是切除部12Aa的 端緣。被支樓部12A1的上方面會抵接至支撐樑π與第工部 份壁6A中至少任一者的下方面。圖6所示範例中，被支撐 部12A1的上方面係抵接至支撐樑16與第1部份壁6A等兩 201127220 者的下方面，但是，被支撐部12A1之上方面亦可僅抵接至 支撐樑16與第1部份壁6A之其中一者的下方面。 同樣地，第2部份蓋板12B係具有被支撐部12B1。被支 撐部12B1具有下方面12Bla、以及連續形成至該下方面 12Bla的側端12Blb。被支撐部12B1的上方面會抵接至支撐 樑16與第2部份壁6B中至少任一者的下方面。圖6所示範 例中’被支撐部12B1的上方面係抵接至支樓樑μ與第2部 份壁6B等兩者的下方面，但是，被支撐部12B1之上方面亦 可僅抵接至支撐樑16與第2部份壁6B之其中一者的下方面。 第3及第4部份蓋板12C、12D亦各自具有與該被支撐 部12A卜12B1相同的被支撐部。 第1支撐部18A1係具有抵接至被支撐部12A1下方面 12Ala的上方面、以及下方面。第2支撐部18八2係具有抵 接至被支撐部12B1下方面l2Bla的上方面、以及下方面。 同樣地，第3支撐部具有抵接至第3部份蓋板12C之被支樓 邛下方面的上方面、以及下方面。第4支撐部具有抵接至第 4部份蓋板12D之被支撐部下方面的上方面、以及下方面。 第1至第4支撐部的各個下方面係形成錐狀面，且隨著遠離 被固疋部18A3而與各支撐部上方面之距離逐漸變小。 *從處理室5側所見’被支撐部18A3的形狀係與介電體 ，板12之十字型開口部形狀相等，抑或較該形狀略小。被固 定部18A3之一部份會插入至介電體蓋板12之十字型開口部 内。該被固定部18A3之-部份係設置於被支樓部12Ai側端 12Alb、被支撐部服側端聰b、第3支撐部側端、以及 15 201127220 第4支撐部側端的旁邊。 被固定部脱3錢朗u使其與切摔 之間的位Μ係不會產生變化。具體說明， 牙、， _行_，，顧固定部 18Α3之上方面抵接至支樓樑16之下方面。介 具戰具備有將被固定部18Α3相對於支撐樑％進:= 用的複數個螺絲。該螺絲之個數例如圖4所示為8個。圖6 顯示出其中2個螺絲19Α1 ’ 19Α2。圖6所示範例中，螺絲 19Α卜19Α2之頭部被設置於被固定部18八3下方，螺絲 19Α卜19Α2之軸部則貫穿被固定部18Α3而結合至支撐樑 16。除了螺絲19Α卜19Α2以外，其餘螺絲亦與螺絲19八卜 19Α2相同。 圖7係介電體蓋板固定具18Α的固定方法之其他範例的 剖面圖。該範例中’螺絲19Α卜19Α2之頭部係設置於支樓 樑16上方，螺絲19Α1、19Α2之軸部則貫穿支撐樑16而結 合至被固定部18Α3。除了螺絲19Α卜19Α2以外，其餘螺絲 亦與螺絲19Α卜19Α2相同。 相對於支撐樑16來固定被固定部18Α3，則第1支撐部 18Α1會與支撐樑16及第1部份壁6Α中至少任一者之間處 夾設被支樓部12Α1般地來支樓被支樓部12Α1，第2支撐部 18Α2則會與支撐樑16及第2部份壁6Β中至少任一者之間 處夾設支撐部12Β1般地來支撐被支撐部12Β1。同樣地，第 3支撐部會與支撐樑16及第3部份壁6C中至少任一者之間 處夾設第3部份蓋板12C之被支撐部般地支撐該被支撐部， 201127220 第4支撐部會與支撐樑16及第4部份壁6E)中至少任一者之 間處夾設第4部份蓋板12D之被支撐部般地支稽該被支撐 部。 介電體蓋板固定具18B1〜18B4各自具備有丨個支樓部與 1個被固定部。介電體蓋板固定具18B1〜18B4之各支撐部的 形狀與介電體蓋板固定具18A之各支撐部的形狀相同。介電 體蓋板固定具18B1〜18B4之各支撐部係各自設置於介電體 蓋板12(位於對應支撐部之位置)之被支撐部下方。介電體蓋 板固定具18B1〜18B4之各被固定部係相對於作為支撐組件 之支撐架7，而使用複數個螺絲(例如圖4所示的2個螺絲） 來加以固定。藉此，介電體蓋板固定具18B1〜18B4之各支撐 部可與支翻7及介㈣壁6中至少任—者之間處各自夹^ 支撐介電體蓋板12(位於對應支撐部之位置)之被支撐部。 如圖4所示，第1部份蓋板12A係由介電體蓋板固定具 18A、188卜18B3所加以固定。第2部份蓋板12B係由介^ 體蓋板_具18A、18B2、18B3所加以狀。第3部份蓋板 係由介電體蓋板固定具18A、麵、18β4所加以固定。 第4部份蓋板12D係由介電體蓋板固定具18A、18B2、18恥 所加以固定。 如以上說明，本實施形態之介電體蓋板固定具18八、 麵' 18B2、刪、觀皆具備有：支撐部(例如圖6中的 舰、18A2)，係抵接至具有作為介電體蓋板12之一部份的 下方面以及連細该至该下方_侧端之被支撐部(例如圖6 中的12A1、12B1)之下方面’來與支撑組件(支撐樑π、支撐 201127220 架7)及介電體壁6令至少任一者之間處夹設被支撐部般地支 樓被支撐部；以及棚定部(例如® 6巾的I8A3)，係連接至 ，支撐部’其一部份係設置於被支撐部側端的旁邊，受到固 定以使其與支撐組件之間的位置關係不會產生變化。 介電體蓋板固定具18A、腦、18B2、聰3、18m之 各支撐部、與支敎件及介電_ 6 ψ至少任—者能發揮央 具之功能，可將對應之介電體紐12之社撐 之間，以固定介電體蓋板12。 、等 *依本實施形態，無需於介電體蓋板12處形成讓螺絲轴部 貫穿的複數個貫通孔，便可固定介電體蓋板12。因此，依本 實施=態’骑電鮮板12形棘_貫财讀況，可防 止於貫通孔附近部份施加過度應力所造狀介f體蓋板Η 的破損。 又，本實施形態中，藉由將介電體蓋板固定具之支撑部 的上方面減騎紐12讀支撐部的下杨，來支撐 並固定介電體蓋板12。因此’依本實施縣，於介電體 12處不易產生局部之應力集中。就該觀點，依本實 可防止介電體蓋板12的破損。 、 〜 本實施形態中’並非是使用複數個螺絲來將介電體蓋板 U直接地固定於支撐組件’而是使用複數個螺絲來將介電體 蓋板固定具之被固定部相對支撑組件來加以固定。相較於使 用複數個_來將介電體蓋板12直接地自定於支輕件之 情況，依本實施雜可減少所使用之_的個數。比較圖8 所示之比較例來說明此點。 201127220 圖8係比較例之介電體蓋板的底面圖。圖8中，圓形記 號代表螺絲。比較例之介電體蓋板222，與本實施形態二 電體蓋板12姻，具有4個分紅部份蓋板222A、2細、 222C、222D。該4個部份蓋板222α〜222〇係各自藉由12 個螺絲直接地相對支撐崎*加明^。0此，介電體蓋 222整體係藉由48個螺絲來相對支擇組件而加以固定。如此 -來，比較例中，介電體蓋板222係藉由多數個螺絲來加以 固定’因此在交換介電體蓋板222或進行清潔時，會 體蓋板222拆裝的作業性惡化。 电 對此，本實施形態如圖4所示，介電體蓋板12係藉由她 計16個螺絲所固定之5個介電體蓋板固定具18八、⑽厂 聰、刪、腦錢躺姉支撐崎而加明定。因 此，相較於圖8所雜較例，依本實施形態所侧之螺 個數可大幅減少，其結果，可更容易地將介電體蓋板12拆裝。 又，本實施形態中，如圖6所示，即便是使螺絲頭部露 出至處理室5内般地來@定介電體蓋板固定具之被固定 情況’相較於圖8所示比較例，由於可大幅減少螺絲之個數， 故可大幅減少露出至處理室5 _螺絲頭部之個數。因此， 依本實施職便可抑綱著於螺_部之副生成物從螺_ 部剝落而產生雜、抑或因顧使螺_部受磨耗而、 粒。又’本實施形態中，如圖7所示，在不讓螺絲頭部露^ 至處理室5内般地來固定介電體i板固定具之被固定 況’便完全不會因螺絲頭部而產生微粒。 月 然而’當介電體蓋板蚊具之支撐部的厚度不論所在位 201127220 置皆為-定之情ί兄’則於支撐部下方面與側面之間處，便會 形成露出至處理室5内的直角狀角部。該角部會容易附著副 生成物。因此’於此情況，容易會因角部而產生微粒。對此， 本實施形態巾，介f體蓋板gj定具之支撐部的下方面係形成 有錐狀面，且隨著遠離被固定部而與支撐部上方面之距離逐 漸變小。此時，相較於當支撐部的厚度不論所在位置皆為一 疋之情況，露出至處理室5内的支撐部表面較接近平滑面。 因此，依本實施形態，便可抑制因介電體蓋板固定具之支撐 部所產生的微粒。 [變形例] 以下，說明本實施形態之介電體蓋板及介電體蓋板固定 具之第1至第6變形例。圖9係第1變形例之介電體蓋板及 介電體蓋板固定具的剖面圖。圖9係顯示對應圖7部份的剖 面。第1變形例之介電體蓋板12具有圖9所示之第1部份蓋 板32A、第2部份蓋板32B ’以取代圖7所示第1部份蓋板 12A、第2部份蓋板12B。 苐1部伤盍板32A具有被支撑部32A1。被支撑部32A1 具有下方面32Ala以及連續形成至該下方面32Ala的側端 32Alb。被支撐部32A1的下方面係第1部份蓋板32A下方 面的一部份，第1部份蓋板32A之下方面則形成有段差部， 以使得被支撐部32A1下方面位在被支撐部32A1以外之部份 之下方面的上方位置。 同樣地’第2部份蓋板32B具有被支撐部32B1。被支撐 201127220 部32B1具有下方面％妬以及連續形成至該下方面3加& 的側端32Blb。 第^變形例之介電體蓋_定具38A可取烟7所示之 介電體蓋板固定具18A。介電體蓋板固定具38A具有第！支 撐邛38A卜第2支撐部38A2、被固定部38A3、以及圖中 顯示的第3與第4支撐部。 仰Ϊ 1支撐部38A1被設置於第1部份蓋板32A下方面的 =差部’㈣i支撐部购的上方面會祕至被支 32A!的下方面32Ala。第丨支撐部38a 段差相等的厚度。因m細侧之下；面= =^之被糊3心外之部份之下方面之、^ 同樣地，第2支撐部徽2被設置於第2部份蓋 該段差部處，而第2支撐部购上方面會抵接至 被支撐部32B1的下方面32Bla。 s 與圖7之被固定部18A3相同地，被 雖然圖中未顯不，於箆1變 38A之第3及第4支撐部、與該等所=)丨電體蓋板固定具 關係、以及其他介電體蓋板蚊 被支撐部之間的 之被_之卩_係，係二所對應 32A1之間的關係相同。 * A1與被支撐部 依第1變形例，介電體蓋板固定 與介電體蓋板12之被支料卜f切相下方面、 皮支拉相外之部份的下方面之間不會 21 201127220 產生段差。因此’可抑制因介電體蓋板固定具之支撐部所造 成之微粒的產生。第1變形例之介電體蓋板蚊具之其他結 構、作用及效果皆與@ 7所示介電體蓋板固定具相同。 圖10係對應於圖4之圖式，為第2魏例之介電體蓋板 及介電體蓋板固定具的底面圖。以第2變形例之介電體蓋板 固定具娜卜48B2、備3、備4、48B5、備6'彻7、48B8、 48a、48C2、48C3、48C4來取代圖4所示之介電體蓋板固 定具 18Α、18Β1、18Β2、18Β3、18Β4。 介電體蓋板固定具48Β1、48Β5能與支撐架7之間處來 夾持並支撐第1部份蓋板12Α的2邊緣。介電體蓋板固定具 48Β2、48Β7能與支撐架7之間處來夾持並支樓第3部份蓋板 12C的2邊緣。介電體盖板固定具48Β3、48Β6能與支樓竿7 之間處來夾持並支樓第2部份蓋板12Β的2邊緣。介電體蓋 板固定具48Β4、48Β8能與支撐架7之間處來夾持並支撐第4 部份蓋板12D的2邊緣。 介電體蓋板固定具48C1會沿著第1部份蓋板12Α與第 3部份蓋板12C之邊界而設置’以支撐部份蓋板i2A、12C 的一侧邊。介電體蓋板固定具48C2會沿著第2部份蓋板12Β 與第4部份蓋板12D之邊界而設置，以支撐部份蓋板12]Β、 12D的一側邊。介電體盍板固定具48C3會沿著第1部份蓋 板12Α與第2部份蓋板12Β之邊界而設置，以支撐部份蓋板 12Α、12Β的一側邊。介電體蓋板固定具48C4會沿著第3部 份蓋板12C與第4部份蓋板12D之邊界而設置，以支撐部份 蓋板12C、12D的一側邊。 22 201127220 盤j細中未顯7^ ’但介電體蓋板固定具備1〜48B8係相 /支撐架7而加以固定，介電體蓋板固定具淵 〜C4則相 '撺樑16而加以gj定。介電體蓋板固定具 48C1-48C4 亦可形成有對應於支樓樑！ 6開口部的開口部。 第1部份蓋板m藉由介電體蓋板固定具備j、備5、 =、48C3而加以_。第2部份蓋板创藉由介電體蓋 ，固疋具侧、娜、48C2、48C3而加以岐。第3部份 盖板12C藉由介電體蓋板固定具彻2、伽7、48C1、48C4 而加以固定。第4部份蓋板12D藉由介電體蓋板固定且 48B4、48B8、48C2、48C4 而加以固定。 第2變神丨之介電體蓋板固定具之其他結構、作用及效 果皆與圖6或® 7所示之介電體蓋板固定具相同。 圖11係對應於圖4之圖式，為第3變形例之介電體蓋板 及介電體蓋板固定具的底面圖。以第3變_之介電體蓋板 固定具58A、纖、腦、細、職、娜、鳩、獅、 58B8、58C1、58C2、勵、⑽、湖、細細、顺、 通、避、細、遞緣倾4所紅介電體蓋板固 疋具 18A、18m、18B2、18B3、18B4，。 從處理室5侧觀之’介電體蓋板固定具58八的形狀為十 字型。從處理室5側觀之’介電體蓋板固定具58Βι〜5咖、 58C1〜58C4的形狀皆為長方形。從處理室5側觀之，介電體 蓋板岐具58D1〜綱_狀料L形。從處理室$側觀 之’介電體盍板固定具5犯1〜观4的形狀皆為τ字形。 介電體蓋板固定具58A係設置以覆蓋介電體蓋板12中 23 201127220 央部之十字狀開口部。另外，介電體蓋板固定具58A亦可形 成有對應於支撐樑16開口部的開口部。 介電體蓋板固定具58B1〜58B8、58C1〜58C4各自設置於 如圖10所示介電體蓋板固定具48B1〜48B8、48C1〜48C4之 相同位置處，以支撐介電體蓋板12下方面的一部份。 介電體蓋板固定具58D1係設置來連接介電體蓋板固定 具58B1、58B5。介電體蓋板固定具58D2係設置來連接介電 體蓋板固定具58B3、58B6。介電體蓋板固定具58D3係設置 來連接介電體蓋板固定具58B2、58B7。介電體蓋板固定具 58D4係設置來連接介電體蓋板固定具58B4、58B8。介電體 蓋板固定具58D1〜58D4則各自支撐介電體蓋板12下方面的 一部份。 介電體蓋板固定具58E1係設置來連接介電體蓋板固定 具58B1、58B2、58C1。介電體蓋板固定具58E2係設置來連 接介電體盍板固定具58B3、58B4、58C2。介電體蓋板固定 具58E3係設置來連接介電體蓋板固定具58B5、58B6、58C3。 介電體蓋板固定具58E4係設置來連接介電體蓋板固定具 58B7、58B8、58C4。介電體蓋板固定具58m〜58E4係各自 支撑介電體盍板12下方面的一部份。 雖然圖中未顯示，介電體蓋板固定具58八、58(：1〜〇：4係 相對於支撐樑16而加以固定，介電體蓋板固定具 58B1〜58B8、58D1〜58D4係相對於支撐架7而加以固定，介 電體蓋板S1定具58E1〜5㈣附目對於支撙架7及支樓樑16 而加以固定。介電體蓋板固定具58C1〜58C4亦可形成有對應 24 201127220 於支樓樑16開口部的開口部。 固定ί係二H水平方向鄰接而設置的2個介電體蓋板 介電體蓋板固定星蓋板固定具係具備有在當2個 體蓋板固側!^t鄰接而設置時，能讓2個介電 八之側。卩相互嚅合之形狀的側部。 圖12顯示介電體蓋板财具58a、58(：2之用以相 "中_所示位置 板固定且％ 疋八的剖面圖。錄例中，介電體蓋 部。介希H58C2之各側邊部具有上下相鄰接的凸部與凹 =二㈣盘板以具58與介電體蓋板固定具5奶之 的=^置_係相互顛倒。然後，介電體蓋板固定具5U 固定二=介電體蓋板固定具现2的凹部，介電體蓋板 部則能嵌入介電體蓋板固定具58A的凹 4以使仔介電體蓋板固定具58A、58C2之側邊部相互墙合。 圖13係顯示介電體蓋板固定具观、S8C2之相人 ^側^杨狀的其他範例。該範例中，與圖i2所示範例相 :凸:ΓΪ板固定，58A、奶之各側邊部具有上下鄰接 勺’、凹。卜錄例中’介電體蓋板固定具58C2之凸部 水平方向相鄰接之凸部份與凹部份，介電體蓋板固定 之凹部亦包含能與介電體蓋板ϋ定具58C2之凸部的 凸部份與，部份相互韻合之凹部份與凸部份。 、鱼垃i數肩巾’其他相雜之2個介電體蓋板固定具的 連接挪之結構亦如圖12或圖13所示相同。 第3變形例中，從處理室5側觀之，介電體蓋板12下方 25 201127220 :之外緣整體、以及相鄰接之2個部份蓋板下方面之邊界整 組皆由複數個介電體蓋板固定具所覆蓋。因此，依第3 _ 例’從處理室5側觀之，可完全覆蓋介電體蓋板12之外周部 與支撐架7之晰產生的_、叹相鄰接之2個部份蓋板 之間所產生的間隙。藉此，可抑制賴侵入該間隙處。其結 果，可抑制因電雜人該間隙而造成之支撐架7與支撐襟Μ 的損傷或異常放電。_是’在t各介㈣蓋板固定且且備 有在將2個介電體蓋板固定具沿水平方向婦接岐置時， 可讓2個介f體蓋板固定具之側邊部相互墙合職的側邊部 之情況’其效果特別顯著。 第3變形例之介電體蓋板固定具之其他結構、作用及效 果皆與圖6或ffl 7所示之介紐紐狀具相同。 圖Μ係對應於圖4之圖式，為第4變形例之介電體蓋板 及介電體蓋板固定具的底©®。第4變形例之介電體蓋板72 可取代® 4所示之介電驗板12。介電體紐72並未被分 割成4塊。 第4變形例之介電體蓋板固定具78B1、78B2、、 78B4可取代圖4所示之介電體蓋板固定具18八、丨咖、 18B2、18B3、18B4。介電體蓋板固定具78B1、78B2、7啦、 78B4係各自沿介電體蓋板72下方面之各邊緣的中央部份而 設置，以支撐介電體蓋板72之各邊緣。從處理室5側觀之， 介電體蓋板固定具78B1、78B2、78B3、78B4之形狀皆為長 方形。 第4變形例之介電體蓋板固定具之其他結構、作用及效 26 201127220 果皆與圖圖7所示之介電體蓋板固定具相同。 圖15係第5變形例之介電體蓋板及介電體蓋板固定且的 "'Jlf ^g5 6 7 ，201127220 VI. Description of the Invention: [Technical Field] The present invention relates to a cover for fixing a cover plate which covers a lower portion of a window assembly constituting a top portion of a processing chamber in an inductive electro-polymerization processing apparatus Plate fixtures and cover fixtures. [Prior Art] In the FPD (Flat Panel Display) process, various plasma treatments such as plasma etching, plasma ashing, and plasma phosphine treatment are applied to the FpD glass substrate. As an apparatus for performing the plasma treatment, an inductively coupled plasma (ICp) processing apparatus which can produce high-density plasma is known. ^Inductively coupled plasma processing equipment is equipped with: a processing chamber, which is kept in a sturdy manner, and is placed in the outside of the treatment room. The processing chamber has a window assembly with a Ξ === human, and the high-frequency antenna is applied to the high-frequency antenna with power, and the high-frequency electric field is passed through == to reduce the electric field to make the factory feel the sensation deal with. The slurry is used to perform specific electric power on the substrate. When the plasma processing device is under the window material, the main component is processed, and the window component is out of the way. And suffered damage. It is easy to carry out the exchange of 4 smears: even if it is damaged, it can be covered by the slab which can be easily attached and detached as described in the patent document (Japanese Patent No. 201127220 (4).1.28299). The lower aspect of the window assembly. Thereby, the lower side of the window assembly can be protected and the damaged cover can be easily exchanged or cleaned. As described in the patent literature, it is known that the cover is fixed by a plurality of wires relative to the branch assembly of the window assembly. In more detail, the fixing method of the conventional cover plate is in the vicinity of the peripheral portion of the cover plate, and each of the plurality of through holes for inserting the shaft portion of the screw is formed, and the screw is inserted from the bottom of the seesaw (four) Each through hole is screwed to the cutting assembly of the piece to fix the cover. However, the fixing method of the conventional cover plate causes the following problems. When the treatment room is subjected to the electric treatment, the temperature rises due to the continuous exposure of the underside of the cover to the towel. During the temperature rise process on the lower surface of the cover plate, uneven temperature distribution occurs in the τ of the cover plate, and as a result, the cover plate generates minute deformation such as tensile buckling. At this time, since the coefficient of thermal expansion between the cover material (e.g., Tauman) and the material of the support member (e.g., Sauer) is different, the amount of deformation of the cover plate and the amount of deformation of the support member may differ. Therefore, 'the screw is used to fix the cover plate to the support assembly so that the vicinity of the through hole of the cover plate is completely unable to be displaced. The near part of the cover plate will be subjected to the stress of the material, and there will be a This part causes the cover to be damaged. Therefore, it is also considered that the diameter of the through hole of the cover plate is larger than the diameter of the shaft portion of the screw, and at the same time, a mechanism for allowing relative displacement of the cover plate and the screw is provided, thereby allowing the vicinity of the through hole of the cover plate Not subject to excessive stress. However, even if the cover is deformed, the stress applied to the cover plate of 4 201127220 tends to concentrate on the portion near the through hole, so that it is easy to cause cracks from the through hole as a starting point, and the cover plate is broken. Further, in the conventional cover fixing method, a plurality of convex portions are formed on the top surface of the processing chamber due to the heads of the plurality of screws. At the convex portion, by-products generated by the plasma treatment are easily adhered. Therefore, in the plasma treatment, if the by-product attached to the screw head is peeled off from the screw head to generate fine particles (floating particles), the particles may cause etch defects. In addition, particles may be generated by abrasion of the screw head due to the plasma, and the particles may also cause etching defects. Further, in the conventional cover fixing method, since a plurality of screws are used to fix the cover, there is a problem that the workability of attaching and detaching the cover is poor. Further, in recent years, in response to the increase in the size of the FPD, the processing chamber of the induction combined plasma processing apparatus has also been enlarged. In an inductively coupled plasma processing apparatus having a large processing chamber, sometimes the window assembly and the cover are formed by dividing into a plurality of portions. In this case, in order to fix the cover, more screws are required, which makes the workability of the cover plate lower. The present invention has been made in view of the above problems, and an object of the present invention is to provide an inductively coupled plasma processing apparatus capable of suppressing damage of a cover plate covering the underside of a window assembly and occurrence of particles, and the cover can be easily attached and detached. The cover fixture and the cover fixing device of the inductively coupled plasma processing device. SUMMARY OF THE INVENTION A cover fixture for an inductively coupled plasma processing apparatus of the present invention is applied to an inductively coupled plasma processing apparatus. The inductively coupled plasma processing apparatus 201127220 is provided with a processing chamber having a window assembly constituting a top portion and performing plasma processing, a high frequency antenna disposed above the window assembly and inductively being electrically discharged in the processing chamber (10), and supporting the antenna a slave member of the window assembly and a cover covering the underside of the window assembly. The cover fixture of the present invention is for fixing the cover. The cover fixture of the present invention is provided with: a support portion that supports a supported portion as a part of the cover; and a fixed portion that is fixed to the support assembly. The cover fixture of the present invention may also be provided with a screw corresponding to the support assembly for fixing the fixed portion. At this time, the head of the screw may be disposed above the support assembly, and the shaft portion of the screw is coupled to the fixed portion through the support assembly. Moreover, the cover fixture of the present invention, wherein the support portion can also have. The upper aspect is abutting to the lower side of the supported portion; and the lower aspect, the distance from the upper portion is gradually changed away from the fixed portion, and the cover fixture of the present invention is The underside of the supported portion may also be a part of the lower part of the cover plate. The lower portion of the cover plate is formed with a step portion so that the lower portion of the supported portion is below the portion to be supported. The upper position; the support portion may also be disposed at the step of the lower portion of the cover plate. At this time, the branch portion may have a thickness equal to the step difference of the step portion. Moreover, the cover fixture of the present invention may further have a side portion, and when the two cover fixtures are disposed adjacent to each other in the horizontal direction, the shape of the side portion 201127220 may make the sides of the two cover fixtures The departments are mutually compatible. Moreover, in the cover fixture of the present invention, the cover may also have a cover body having a lower aspect and an upper aspect to form a main portion of the cover; the supported portion may be disposed on the cover body. The support portion can be disposed under the support portion and the cover. The cover plate fixing device of the inductively coupled plasma processing device of the present invention is provided with: a cover fixture of the present invention; and a fixed cover device for securing the fixed portion of the mosquito at the support assembly , wherein the mosquito mechanism can be a mechanism that will be fixed; St. Or, the fixing mechanism can limit the mouth. The mechanism that moves up and down. According to the invention, the support portion (4) is provided with a support member having a support cover and a cover member fixed to the fixed portion of the support assembly, and a screw plate. According to the present invention, the cover can be fixed without forming a plurality of through holes inserted in the cover plate at the cover. The junction can be made into two inventions, and the damage of the cover plate and the occurrence of fine particles can be suppressed, and the effect of the cover plate can be easily removed. [First Embodiment] [First Embodiment] An embodiment of the present invention will be described in detail with reference to the drawings. First, from 乂 θ1 to Fig. 4, a configuration including a cover-solid 201127220 kinetic processing apparatus according to the first embodiment of the present invention will be described. Fig. 1 is a cross-sectional view showing a residual inductor. Figure 2 is a perspective view of the "window assembly" of Fig. 1 and the suspension. Figure 3 is a diagram showing the dielectric wall of the dielectric and the high frequency days. Fig. 4 is a bottom plan view showing a dielectric cover of a "cover" as a "cover" and a dielectric cover fixture as a cover fixture. In Fig. 1, the non-inductive light-and-electricity destruction process is used to perform electropolymerization treatment for, for example, "Silver: glass, hereinafter referred to as "substrate"). As FPD = cow liquid crystal display (LCD), electroluminescence (E1_ Lumin_ce; L) display, plasma display panel (PDP) and so on.合 处理 处理 〗 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 2、 2、 2、 2、 2、 2、 2、 2、 2、 2、 Body formation. The antenna chamber 4 is the upper side of the dielectric body wall 6 in the body container 2 = the chamber 5 is the lower space in the body container 2 that houses the cavity 6. Room 5: Body Γ!, constitutes the bottom of the antenna room 4, and also constitutes the treatment of electrical destruction: The processing chamber 5 can be kept airtight, and the substrate is subjected to round steam=1/ or the material having the upper portion and the bottom portion and the cylindrical portion as the body capacity 112, so that the _, the alloy can be too _ material. In the case where the material of the main body container 2 is used, the inner wall surface of the body 2 is oxidized. Contaminants are generated at the inner wall surface of the body container 2. = is grounded. ♦ “Pirates 2 8 201127220 The sides of the approximation are roughly square and the bottom and the bottom surface and 4 can make the sacred material: the material of the sac material wall 6 is tied into 4 pieces. That is, the dielectric body wall 6 has, the wall 6B, the third part of the wall 6C and the fourth part of the wall; A second wall 6 can also be divided into four parts. "Electrical induction combined with the plasma processing device 1 series and 16 as a support The wall of the dielectric body 6 is provided with the side wall of the support beam body container 2. The support (four) w and the + support 7 series are installed in the eight-ray eagle/beam as shown in Fig. 2, which is a cross type. The four of the 6 walls 6A, 6B, and 叱 are still supported by the support beam 16. 7, 7 bars, inductively coupled to the electrospinning treatment! It is also equipped with a cylindrical 8A and cylindrical shape suspensions 8β, 8c, milk, guilty, = the upper part of the top of the main body 2 (cross intersection) is connected to the central part of the 5矜_1 ^ Attach the lower end of the suspension 8A. In addition, the support lug face is connected to the lower end of the four front end portions of the cross at the central portion and the four ends of the cross. Thus, _ 8 Α ~ 8 Ε, the top of the _ _ 2, is maintained in a horizontal state and set. . Although not shown in the drawing, the support beam 16 is formed by: a gas to be supplied with a processing gas to be described later; and a plurality of openings; and: the processing gas of the gas flow path is ejected. As the material of the support beam 16: 9 201127220 electrical material. As the conductive material, a metal material such as a metal material is preferably used. f When New Zealand is used as the support 16_, it should be used for the inner and outer oxygen wheel membranes (Ah, so that it will not be produced from the surface). Hereinafter, the antenna 13' is disposed inside the antenna chamber 4 (i.e., above the dielectric body wall 6 outside the processing chamber 5.) As shown in Fig. 3, the antenna 13 is wound into a planar square shape of an approximately square shape. The 13 series is disposed on the upper surface of the dielectric body 6. The outside of the main body container 2 is provided with an integrator M and a high frequency power supply ls. One end of the antenna G is connected to the power supply via the integrator 14 ... the other end of the antenna 13 It is connected to the inner wall of the main body container 2, and is grounded via the main body container 2. The induction consuming treatment device 1 further includes a dielectric cover 12 which serves as a cover plate for the cover body wall. The plate u is a plate-like body having an approximately square shape and a bottom surface and four side faces. The electric body cover 12 is formed of a dielectric material. As a material of the dielectric cover, for example, Al2 can be used. 〇3 or other ceramic or quartz. For example, the dielectric cover 12 is connected to the dielectric The wall 6 is equally divided into four parts. That is, as shown in FIG. 4, the dielectric cover 12 has a first partial cover, 12A, a second partial cover 12B, and a third partial cover 12C. The fourth partial cover plate 12D. The first to fourth partial cover plates 12, 12B, 12 (:, 12) each cover the first to fourth partial walls 6A, 6B, 6C of the dielectric body wall 6. In addition, the dielectric cover 12 may not be divided into four parts. - As shown in FIG. 4, the inductively coupled plasma processing apparatus further includes a dielectric cover fixture 18A, 18B1, 18B2, 18B3, and 18B4 are used as the "cover fixing device" for fixing the 201127220. When the microsurgery and the soil S are processed in the plasma, the feeling will be formed from the high-frequency power source 15; :: _ electric power (for example 13. 5_ high frequency electric power) supply ^ * This is formed by the day and line 13 in the processing chamber 5 to form an inductive power. The induced electric field converts the processing gas described later into electrical equipment. The present invention is further provided with a gas supply means outside the container 2, and the gas supply means L is inserted into the gas supply pipe 21 of the hollow portion of the hanger 8A to be connected to the gas flow path of the support beam 16. The gas supply device 2G_ is supplied at the power supply j. When the lining is performed, the processing gas is supplied to the processing chamber 5 through the gas passages and openings in the support beam 16 and the opening of the dielectric raft 12 through the gas:, ά ΐ 21 . As the processing gas, for example, SF6 gas can be used. The induction light-fitting device is more frequently placed on the table, the insulator frame 24, the pillar 25, the bellows pipe 26, and the gate valve 27. The struts are connected to a lifting device (not shown) below the body 112, and protrude into the processing chamber 5 through an opening formed at the bottom of the body container 2. Further, the pillar 25 has a hollow portion. The insulator frame 24 is disposed above the pillars 25. The insulator frame 24 is a box-shaped body in which an opening is formed in the upper portion. An opening portion connected to the hollow portion of the pillar 25 is formed at the bottom of the insulator frame 24. The bellows 26 is wrapped around the post 25 and is hermetically connected to the insulator frame 24 and the bottom inner wall of the body container 2. Thereby, the airtightness of the processing chamber 5 can be maintained. 201127220 The mounting table 22 is housed in the insulator frame 24. The mounting table 22 has a mounting surface 22A on which the substrate S is placed. The mounting surface 22A faces the dielectric cover 12 . As a material of the mounting table 22, a conductive material such as a conductive material can be used. In the case where the material of the stage 22 is used, the surface of the stage 22 is subjected to an Alumite treatment so that no contaminants are generated from the surface. The external body container 2 is further provided with an integrated n 28 and a high frequency power source 29. The mounting table 22 is connected to the integrator 28 via an energizing rod penetrating the opening of the insulator frame 24 and the hollow portion of the pillar, and is connected to the high-frequency power source 29 via the integrator 28 =. The needle listening board S performs the operation of supplying the bias high-frequency electric power (for example, high-frequency electric power of 38 kHz) from the high-frequency power source 29 to the mounting table 1. The high-frequency electric power is applied to the ions of the electro-acupuncture. The ground is attracted to the substrate S placed on the mounting table 22. The closing valve 27 is disposed on the side wall of the body container 2. The width 27 and the switching function are maintained in the closed state to maintain the airtightness of the processing chamber 5, and the substrate s can be transported between the processing chamber 5 and the outside in the open state. The outside of the main body container 2 is further provided with a vacuum device 3〇. The vacuum unit 3 is connected to the processing chamber 5 via an exhaust pipe 31 connected to the bottom of the body container 2. When the substrate Sit is operated, the vacuum device % discharges the air in the processing chamber, and the inside of the processing chamber 5 is maintained in a vacuum environment. Next, referring to Figures 4 to 6, the Langben implementation of the cover fixture will be described in detail. Fig. 4 shows a dielectric cover 12 and a dielectric cover fixture 18A, brain, 18B2, 18B3, and 18B4. Fig. 5 is a sectional view of the 5·5 line in Fig. 4; Fig. 6 is a sectional view showing the position shown by the line 6·6 in Fig. 4. In Figure 4, the 'circular mark' represents the screw. , 201127220 As described above, the dielectric moss mm, the plate has the first to the fourth partial cover plate 12 敕 W W towel 'the first partial cover 12A is placed in the dielectric cover into the = domain The upper left area 'the second part of the cover plate setting = "the upper right area of the overall plate 2, the third part cover 5 J system ° is placed in the overall setting area of the dielectric cover 12 The lower left area = the fourth partial cover 12D is disposed in the lower right area of the dielectric cover panel 2. The central portion of the dielectric cover 12, the second to the fourth partial cover 128, 12B 12C, 12D system, each formed with an L-shaped cut-out part ι2α &, ι2β.^, l2Da ' and the merging is formed into a cross-shaped opening. 仗Processing to 5 side view, dielectric body The cover fixture i8A has a cross shape and is slightly larger than the cross-shaped opening formed by the central portion 12, the coffee, 12Ca, and 12Da of the central portion of the dielectric panel 12. Next, the dielectric cover fixture 18 is disposed and This covers the cross-shaped opening of the dielectric cover 12. The dielectric cover fixture 18 can also be formed with an opening corresponding to the closed portion of the support beam. From the processing chamber 5, the shape of the dielectric cover fixtures 18m to 18B4 is rectangular. The dielectric cover fixtures can be clamped between the support and the support frame 7 and the third and third The respective side edges of the partial covers 12Α, 12C. The 'dielectric body fixing fixture 2 can support the second and fourth partial covers 12B, 12D with the support frame 7 missing. Further, one side of the first and second partial cover plates 12A, 12B can be supported by the dielectric body yoke holder 18 Β 3 and the support frame 7 . The electric body cover fixture 18B4 can support the side of each of the third and fourth 13th 201127220 partial covers 12C, 12D in a manner similar to the support of the support frame 7. As will be described later, the dielectric body The cover fixtures 18Α, 18Βι, ι8Β2, 18B3, and 18B4 each have one or more support portions and two fixed portions. The branch portion is disposed under the branch portion as a dielectric bribe U The side is the part of the branch that is the portion of the branch. The dielectric cover 12 has the same number of branches as the support (including the dielectric cover fixtures 18A, 18B, 18B2, 18B3, and 18B4). Hereinafter, the structure and function of the dielectric cover fixture 18A shown in FIG. 6 will be described in detail to represent the dielectric cover fixtures 18A, 18m, 18B2, 1 and 3, 18B4. The dielectric cover fixing fixture 18A is provided with: a j-branch portion 18A supporting a portion of the first partial cover 12A, and a second support supporting a portion of the second partial cover 12B The portion 18A2 and the fixed portion 18A3. Although not shown in the drawing, the dielectric cover fixture 18 is further provided with a third support portion supporting a portion of the third partial cover 12C, and a support portion. 4 part of the fourth support portion of the cover 12D. The second and second support portions 18A, 18A2 are connected to the fixed portion 18A3, and are provided to extend laterally from the fixed portion 18A3. The third and fourth support portions are also the same as the i-th and second support portions 18A1 and 18A2. On the other hand, the first partial cover 12A has the supported portion 12A1. The supported portion 12A1 has a lower side 12A1a and a side end 12Alb continuously formed to the lower side 12Ala. The side end 12Alb is also the end edge of the cut-away portion 12Aa. The upper side of the branch portion 12A1 abuts on the lower side of at least either of the support beam π and the work portion wall 6A. In the example shown in FIG. 6, the upper side of the supported portion 12A1 is in contact with the lower side of the support beam 16 and the first partial wall 6A, etc., but the upper portion of the supported portion 12A1 may only abut. The lower aspect to one of the support beam 16 and the first partial wall 6A. Similarly, the second partial cover 12B has the supported portion 12B1. The supported portion 12B1 has a lower side 12B1a and a side end 12B1b that is continuously formed to the lower side 12Bla. The upper side of the supported portion 12B1 abuts on the lower side of at least either of the support beam 16 and the second partial wall 6B. In the example shown in Fig. 6, the upper side of the supported portion 12B1 is in contact with both the branch beam μ and the second partial wall 6B, but the upper portion of the supported portion 12B1 may only abut. The lower aspect to one of the support beam 16 and the second partial wall 6B. The third and fourth partial cover plates 12C, 12D also each have the same supported portion as the supported portion 12A 12B1. The first support portion 18A1 has an upper aspect that abuts on the lower side 12A1a of the supported portion 12A1, and the following aspects. The second support portion 18 has an upper aspect that abuts against the lower side of the supported portion 12B1, and the following. Similarly, the third support portion has the above aspect in which the abutment of the third partial cover 12C is abutted, and the following aspects. The fourth support portion has the above aspect of abutting against the supported portion of the fourth partial cover 12D, and the following aspects. Each of the first to fourth support portions forms a tapered surface, and the distance from the upper portion of each of the support portions gradually decreases as it moves away from the fixed portion 18A3. * Seen from the side of the processing chamber 5, the shape of the supported portion 18A3 is equal to the shape of the dielectric body, the cross-shaped opening of the plate 12, or slightly smaller than the shape. A portion of the fixed portion 18A3 is inserted into the cross-shaped opening of the dielectric cover 12. A portion of the fixed portion 18A3 is provided beside the side portion 12Ai of the branch portion 12Ai, the side of the support portion, the side of the third support portion, and the side of the side of the fourth support portion of the 201172220. There is no change in the position between the fixed part and the cut. Specifically, the teeth, the _ row _, and the upper portion of the fixing portion 18Α3 abut against the underside of the branch beam 16. The media warfare is provided with a plurality of screws to be used by the fixed portion 18Α3 with respect to the support beam. The number of the screws is, for example, eight as shown in FIG. Figure 6 shows two of the screws 19Α1 ’ 19Α2. In the example shown in Fig. 6, the head of the screw 19Α19Α2 is disposed below the fixed portion 183, and the shaft portion of the screw 19Α19Α2 is coupled to the support beam 16 through the fixed portion 18Α3. Except for the screw 19Α19Α2, the other screws are the same as the screws 19Bab 19Α2. Fig. 7 is a cross-sectional view showing another example of a method of fixing the dielectric cover fixture 18'. In this example, the head portion of the 'screw 19 Α 19 Α 2 is placed above the branch beam 16 , and the shaft portions of the screws 19 Α 1, 19 Α 2 are passed through the support beam 16 to be joined to the fixed portion 18 Α 3 . Except for the screw 19Α19Α2, the other screws are the same as the screws 19Α19Α2. When the fixed portion 18Α3 is fixed to the support beam 16, the first support portion 18Α1 is sandwiched between the support beam 16 and the first partial wall 6Α by the branch portion 12Α1 In the branch portion 12Α1, the second support portion 18Α2 supports the supported portion 12Β1 so as to sandwich the support portion 12Β between at least one of the support beam 16 and the second partial wall 6Β. Similarly, the third support portion supports the supported portion like the supported portion of the third partial cover 12C between at least one of the support beam 16 and the third partial wall 6C, 201127220 The support portion supports the supported portion in such a manner that at least one of the support beam 16 and the fourth partial wall 6E) is interposed between the support portion of the fourth partial cover 12D. Each of the dielectric cover fixtures 18B1 to 18B4 is provided with one branch portion and one fixed portion. The shape of each of the support portions of the dielectric cover fixtures 18B1 to 18B4 is the same as the shape of each of the support portions of the dielectric cover fixture 18A. Each of the support portions of the dielectric cover fixtures 18B1 to 18B4 is disposed below the supported portion of the dielectric cover 12 (located at the position corresponding to the support portion). Each of the fixed portions of the dielectric cover panel fixtures 18B1 to 18B4 is fixed to the support frame 7 as a support member by using a plurality of screws (for example, two screws shown in Fig. 4). Thereby, the support portions of the dielectric cover fixtures 18B1 to 18B4 can be respectively supported between the support 7 and the at least one of the walls 4 (supporting the dielectric cover 12 (located in the corresponding support portion) The position of the supported part. As shown in Fig. 4, the first partial cover 12A is fixed by the dielectric cover fixing members 18A, 188, and 18B3. The second partial cover 12B is formed by the dielectric cover plates 18A, 18B2, and 18B3. The third partial cover is fixed by the dielectric cover fixture 18A, the surface, and the 18β4. The fourth partial cover 12D is fixed by the dielectric cover fixtures 18A, 18B2, and 18 shame. As described above, the dielectric cover fixture 18 of the present embodiment, the surface '18B2, and the view are all provided with a support portion (for example, the ship in FIG. 6 and 18A2), which is abutted to have a dielectric The lower aspect of one portion of the body cover 12 and the support portion (for example, 12A1, 12B1 in FIG. 6) that is thinned to the lower_side end are combined with the support assembly (support beam π, support 201127220) The frame 7) and the dielectric body wall 6 are such that at least one of the support portions is supported by the support portion; and the shed portion (for example, I8A3 of the 6 towel) is connected to the support portion A portion is disposed beside the side end of the supported portion and is fixed so that the positional relationship with the support member does not change. The dielectric cover plate fixture 18A, the brain, the 18B2, the Cong 3, 18m support parts, and the support member and the dielectric _ 6 ψ at least can function as a central device, and the corresponding dielectric body can be Between the clubs of the New 12, the dielectric cover 12 is fixed. According to the present embodiment, the dielectric cover 12 can be fixed without forming a plurality of through holes for allowing the screw shaft portion to pass through the dielectric cover 12. Therefore, according to the implementation of the state of the state, it is possible to prevent the damage of the body cover plate 造 which is formed by applying excessive stress to the vicinity of the through hole. Further, in the present embodiment, the dielectric cover 12 is supported and fixed by reducing the upper portion of the support portion of the dielectric cover fixture to the lower portion of the support portion. Therefore, it is not easy to generate local stress concentration at the dielectric body 12 according to the implementation of the county. From this point of view, damage to the dielectric cover 12 can be prevented. ~ In this embodiment, 'not a plurality of screws are used to directly fix the dielectric cover U to the support assembly', but a plurality of screws are used to fix the fixed portion of the dielectric cover fixture relative to the support assembly Come and fix it. Compared with the case where a plurality of _ are used to directly customize the dielectric cover 12 to the light-weight member, the number of _ used can be reduced according to the present embodiment. Compare this with the comparative example shown in Figure 8. 201127220 FIG. 8 is a bottom view of a dielectric cover of a comparative example. In Fig. 8, the circular symbol represents a screw. The dielectric cover 222 of the comparative example has four red-part partial covers 222A and 2, 222C and 222D, in addition to the electric cover 12 of the second embodiment. The four partial cover plates 222α to 222 are each directly supported by 12 screws. Thus, the dielectric cover 222 is integrally fixed by means of 48 screws relative to the component. As described above, in the comparative example, the dielectric cover 222 is fixed by a plurality of screws. Therefore, when the dielectric cover 222 is exchanged or cleaned, the workability of the cover 222 is deteriorated. In this embodiment, as shown in FIG. 4, the dielectric cover 12 is a five-layer dielectric cover fixture fixed by her 16 screws. 18 (10) Factory Cong, delete, brain money Lying on the squat supports the Qia and adds it. Therefore, compared with the example of Fig. 8, the number of screws on the side according to this embodiment can be greatly reduced, and as a result, the dielectric cover 12 can be detachably attached. Further, in the present embodiment, as shown in Fig. 6, even if the screw head is exposed to the processing chamber 5, the fixing of the dielectric cover fixing member is compared with that shown in Fig. 8. For example, since the number of screws can be greatly reduced, the number of exposed to the processing chamber 5_screw head can be greatly reduced. Therefore, according to this implementation, it is possible to suppress the occurrence of impurities in the by-products of the snails from the snails, or to cause the snails to be worn. Further, in the present embodiment, as shown in Fig. 7, the fixing state of the dielectric member i-plate fixing member is fixed without the screw head being exposed to the processing chamber 5. And produce particles. However, when the thickness of the support portion of the dielectric cover mosquito device is set to be the same as the location of the 201127220, it will be formed between the lower side of the support portion and the side surface, and will be exposed to the processing chamber 5. Right angled corners. The corners tend to adhere to the by-products. Therefore, in this case, it is easy to generate particles due to the corners. On the other hand, in the present embodiment, the lower surface of the support portion of the f-shaped cover gj is formed with a tapered surface, and the distance from the upper portion of the support portion is gradually smaller as it goes away from the fixed portion. At this time, the surface of the support portion exposed to the processing chamber 5 is closer to the smooth surface than when the thickness of the support portion is one of the positions. Therefore, according to this embodiment, it is possible to suppress the generation of particles generated by the support portion of the dielectric cover fixture. [Modification] Hereinafter, first to sixth modifications of the dielectric cover and the dielectric cover fixture of the present embodiment will be described. Fig. 9 is a cross-sectional view showing a dielectric cover and a dielectric cover fixture of a first modification. Fig. 9 is a cross-sectional view showing a portion corresponding to Fig. 7. The dielectric cover 12 of the first modification has the first partial cover 32A and the second partial cover 32B' shown in FIG. 9 instead of the first partial cover 12A and the second portion shown in FIG. Part cover 12B. The one scar board 32A has a supported portion 32A1. The supported portion 32A1 has a lower face 32A1a and a side end 32Alb continuously formed to the lower face 32Ala. The lower side of the supported portion 32A1 is a part of the lower side of the first partial cover 32A, and the lower portion of the first partial cover 32A is formed with a step portion so that the lower portion of the supported portion 32A1 is supported. The upper position of the part below the part other than 32A1. Similarly, the second partial cover 32B has a supported portion 32B1. Supported 201127220 The portion 32B1 has the lower aspect %妒 and the side end 32Blb continuously formed to the lower side 3 plus & The dielectric cover _ fixture 38A of the second modification can take the dielectric cover fixture 18A shown by the cigarette 7. The dielectric cover fixture 38A has the first! The support 邛 38A includes the second support portion 38A2, the fixed portion 38A3, and the third and fourth support portions shown in the drawing. The support portion 38A1 is provided in the lower portion of the first partial cover 32A. The fourth support portion is purchased to the lower side 32Ala of the support 32A! The second support portion 38a has a difference in thickness. The lower part of the lower side of the m; the surface ==^ is the lower part of the outer part of the paste 3, and the second support part 2 is placed in the second part to cover the step, and the 2 The support portion is purchased to abut the lower side 32B1 of the supported portion 32B1. s is the same as the fixed portion 18A3 of Fig. 7, and is not shown in the drawings, the third and fourth support portions of the 箆1 to 38A, the relationship with the 丨 electric body cover fixture, and The other dielectric body cover mosquitoes are supported by the support portion, and the relationship between the two corresponding 32A1 is the same. * A1 and the supported portion are in accordance with the first modification, the dielectric cover is fixed and the dielectric cover 12 is not cut, and the lower portion of the outer portion is not Will 21 201127220 produce a step difference. Therefore, generation of particles caused by the support portion of the dielectric cover fixture can be suppressed. The other structure, function and effect of the dielectric cover mosquito of the first modification are the same as those of the dielectric cover fixture shown in @7. Fig. 10 is a bottom plan view of the dielectric cover and the dielectric cover fixture of the second embodiment, corresponding to the diagram of Fig. 4. The dielectric body cover of the second modification is used to fix the dielectric body shown in FIG. 4 by fixing the Nab 48B2, the preparation 3, the preparation 4, 48B5, and the preparation 6's 7, 48B8, 48a, 48C2, 48C3, and 48C4. The cover fixtures are 18Α, 18Β1, 18Β2, 18Β3, 18Β4. The dielectric cover fixtures 48Β1, 48Β5 can be held between the support frame 7 and support the edges of the first partial cover 12A. The dielectric cover fixtures 48Β2, 48Β7 can be placed between the support frame 7 and the 2nd edge of the third partial cover 12C of the support. The dielectric cover fixtures 48Β3, 48Β6 can be placed between the support 竿7 and the 2nd edge of the second partial cover 12Β of the fulfilment. The dielectric cover panel fixtures 48Β4, 48Β8 can be held between the support frame 7 and support the 2 edges of the fourth partial cover 12D. The dielectric cover fixture 48C1 is disposed along the boundary between the first partial cover 12A and the third partial cover 12C to support one side of the partial covers i2A, 12C. The dielectric cover fixture 48C2 is disposed along the boundary between the second partial cover 12A and the fourth partial cover 12D to support one side of the partial cover 12] Β, 12D. The dielectric jaw holder 48C3 is disposed along the boundary between the first partial cover 12A and the second partial cover 12b to support one side of the partial cover 12Α, 12Β. The dielectric cover fixture 48C4 is disposed along the boundary between the third partial cover 12C and the fourth partial cover 12D to support one side of the partial cover 12C, 12D. 22 201127220 The thickness of the disk j is not shown in the 7^' but the dielectric cover is fixed with the 1~48B8 phase/support frame 7 and fixed, and the dielectric cover is fixed with the 渊~C4 phase 撺 beam 16 Gj fixed. The dielectric cover fixture 48C1-48C4 can also be formed to correspond to the beam! 6 The opening of the opening. The first partial cover m is fixed by providing a j, a backup 5, a =, and a 48C3 by a dielectric cover. The second part of the cover is made of a dielectric cover, a solid side, a na, a 48C2, a 48C3. The third part of the cover 12C is fixed by the dielectric cover fixing means 2, gamma 7, 48C1, 48C4. The fourth partial cover 12D is fixed by a dielectric cover and 48B4, 48B8, 48C2, 48C4. The other structure, function, and effect of the second dielectric insulator cover fixture are the same as those of the dielectric cover fixture shown in Fig. 6 or 7. Fig. 11 is a bottom plan view showing a dielectric cover and a dielectric cover fixture according to a third modification, corresponding to Fig. 4; The third change _ dielectric cover plate fixture 58A, fiber, brain, fine, vocational, Na, 鸠, lion, 58B8, 58C1, 58C2, Li, (10), lake, fine, smooth, pass, avoid, 4, red dielectric cover plate solid cookers 18A, 18m, 18B2, 18B3, 18B4. The shape of the dielectric cover fixture 58 is viewed from the side of the processing chamber 5 in a zigzag shape. The dielectric cover fixing members 58Β1 to 5C and 58C1 to 58C4 are all rectangular in shape from the side of the processing chamber 5. Viewed from the side of the processing chamber 5, the dielectric cover member 58D1 is in the form of an L-shaped material. From the side of the processing chamber, the shape of the dielectric jaw plate fixture 5 is 1 to 4 and is τ-shaped. The dielectric cover fixture 58A is disposed to cover the cross-shaped opening of the central portion of the dielectric cover 12 23 201127220. Further, the dielectric cover fixture 58A may be formed with an opening corresponding to the opening of the support beam 16. The dielectric cover fixtures 58B1 to 58B8 and 58C1 to 58C4 are respectively disposed at the same positions of the dielectric cover fixtures 48B1 to 48B8 and 48C1 to 48C4 as shown in FIG. 10 to support the dielectric cover 12 under the cover. Part of the aspect. A dielectric cover fixture 58D1 is provided to connect the dielectric cover fixtures 58B1, 58B5. A dielectric cover fixture 58D2 is provided to connect the dielectric cover fixtures 58B3, 58B6. A dielectric cover fixture 58D3 is provided to connect the dielectric cover fixtures 58B2, 58B7. A dielectric cover fixture 58D4 is provided to connect the dielectric cover fixtures 58B4, 58B8. The dielectric cover fixtures 58D1 to 58D4 each support a portion of the underside of the dielectric cover 12. A dielectric cover fixture 58E1 is provided to connect the dielectric cover fixtures 58B1, 58B2, 58C1. A dielectric cover fixture 58E2 is provided to connect the dielectric jaw fixtures 58B3, 58B4, 58C2. A dielectric cover fixture 58E3 is provided to connect the dielectric cover fixtures 58B5, 58B6, 58C3. A dielectric cover fixture 58E4 is provided to connect the dielectric cover fixtures 58B7, 58B8, 58C4. The dielectric cover fixtures 58m to 58E4 are each supporting a portion of the underside of the dielectric laminate 12. Although not shown in the drawing, the dielectric cover fixtures 58 and 58 (:1~〇:4 are fixed relative to the support beam 16, and the dielectric cover fixtures 58B1 to 58B8 and 58D1 to 58D4 are relatively The support frame 7 is fixed, and the dielectric cover S1 is fixed 58E1 to 5 (4). The attachment is fixed to the support frame 7 and the branch beam 16. The dielectric cover fixtures 58C1 to 58C4 can also be formed. 24 201127220 The opening of the opening of the branch beam 16 is fixed. The two dielectric covers of the two H-directions are placed adjacent to each other. The cover plate is fixed with a cover plate. When the board is placed adjacent to each other, it can be placed on the side of the two dielectrics. The sides of the shape that are mutually joined together. Figure 12 shows the dielectric cover fixtures 58a, 58 (for 2) The cross-section of the position plate shown in Figure _ is fixed and % 疋. In the example, the dielectric cover part. Each side of the hexa H58C2 has a convex portion and a concave=two (four) disk adjacent to each other. The board is reversed by the yoke with the cover 5 of the dielectric cover fixture. Then, the dielectric cover fixture 5U is fixed 2 = the dielectric cover is fixed The concave portion of the present invention, the dielectric cover portion can be embedded in the recess 4 of the dielectric cover fixture 58A so that the side portions of the dielectric cover fixtures 58A, 58C2 are wall-to-wall. Figure 13 shows Other examples of the dielectric cover cover fixture, the S8C2 phase, the side, and the poplar shape. In this example, the example shown in Figure i2: convex: ΓΪ plate fixed, 58A, each side of the milk has upper and lower sides Adjacent spoon ', concave. In the example of the dielectric cover cover fixture 58C2, the convex portion of the dielectric cover fixture 58C2 is adjacent to the convex portion and the concave portion, and the recess of the dielectric cover plate also contains the dielectric and dielectric The body cover is fixed with a convex portion of the convex portion of the 58C2 and a concave portion and a convex portion which are partially fused with each other. The fisherman's shoulder towel 'other mixed two dielectric cover plates are fixed The structure of the connection is also the same as that shown in Fig. 12 or Fig. 13. In the third modification, viewed from the side of the processing chamber 5, the lower portion of the dielectric cover 12 is 25 201127220: the outer edge is integral, and adjacent The boundary of the lower part of the two partial covers is covered by a plurality of dielectric cover fixtures. Therefore, according to the third example, from the side of the processing chamber 5, it can be completely A gap formed between the outer peripheral portion of the cover dielectric cover 12 and the two partial covers adjacent to the support frame 7 is formed, thereby preventing the intrusion into the gap. As a result, it is possible to suppress the damage or abnormal discharge of the support frame 7 and the support raft due to the gap of the electric motor. The _ is 'received in each of the four (four) cover plates and is provided with two dielectric cover plates When the fixing device is placed in the horizontal direction, the side portions of the two side walls of the fixing member can be joined to each other. The effect is particularly remarkable. The dielectric of the third modification The other structure, function and effect of the cover fixture are the same as those shown in Fig. 6 or ffl. The figure corresponds to the diagram of Fig. 4 and is the bottom of the dielectric cover and the dielectric cover fixture of the fourth modification. The dielectric cover 72 of the fourth modification can be substituted for the dielectric inspection board 12 shown in FIG. The dielectric body 72 is not divided into four pieces. The dielectric cover fixtures 78B1, 78B2, and 78B4 of the fourth modification can be substituted for the dielectric cover fixtures 18, 18, 18B3, and 18B4 shown in FIG. The dielectric cover fixtures 78B1, 78B2, 7B, 78B4 are each disposed along a central portion of each of the lower sides of the dielectric cover 72 to support the edges of the dielectric cover 72. Viewed from the side of the processing chamber 5, the dielectric cover fixtures 78B1, 78B2, 78B3, and 78B4 are all rectangular in shape. Other structures, functions, and effects of the dielectric cover fixture of the fourth modification are the same as those of the dielectric cover fixture shown in FIG. Figure 15 is a sectional view of a dielectric cover and a dielectric cover of a fifth modification, "' Jlf ^g5 6 7 ,
4略累4 19A1、19A2之圖示）。第5變形例中，支撐襟i6A 之形狀與圖6或圖7之描樑16相異。具體說明，支 16A於其下端具有凸部16A1。 ” “介^體蓋板固定具79A取代了圖6或圖7所示之介電體 反固定具ISA。介電體蓋板固定具μ具有：支稽第工部 份蓋板12A之-部份的第！支撐部79A1 ;支撐第2部份蓋 板12B之一部份的第2支撐部79A2 ;被固定部79A3 ;以及 圖中未顯示之第3與第4支撐部。第i及第2支撐部79A卜 79A2會連接至被固定部79A3，且從被固定部79A3延伸至 1 則邊般地加以設置。第3及第4支撐部亦與第丨及第2支撐 部79A1、79A2相同。第5變形例中’配合支擇樑16A之凸 部16A1形狀，使得被固定部糧3之厚度(高度)形成較圖6 或圖7所示之介電體蓋板固定具更薄。 介電體蓋板12之第1部份蓋板12A及第2部份蓋板12B 與圖ό或圖7所示結構相同，具有被支撐部12A1、12B1。 且圖中未顯示之第3及第4部份蓋板12C、12D亦各自具有 與前述相同之被支樓部。 第1支撐部79A1具有：抵接至被支撐部12A1之下方面 12Ala的上方面；以及下方面。第2支撐部79A2具有：抵 接至被支撐部12B1之下方面12Bla的上方面；以及下方面。 同樣地’第3支撐部具有：抵接至第3部份蓋板12C之被支 27 201127220 撐部之下方面的上方面；以及下方面。第4支撐部具有：抵 接至第4部份蓋板12D之被支撐部之下方面的上方面；以及 下方面。第1至第4支撐部之各下方面呈錐狀面，且隨著遠 離被固定部79A3而與各支撐部上方面之距離逐漸變小。< 如第5變形例所示，本發明之介電體蓋板固定具可對應 於作為支撐組件之支撐樑16與支撐架7形狀而形成各種升^ 狀。 第5變形例之介電體蓋板固定具之其他結構、作用及效 果與圖6或圖7所示之介電體蓋板固定具相同。 圖16係對應於圖4之圖式’為第6變形例之介電體蓋板 及介電體蓋板固定具的底面圖。圖17係第6變形例之介電體 蓋板及介電體蓋板固定具的剖面圖。第6變形例之介電體蓋 板80取代了圖4所示之介電體蓋板12 ^介電體蓋板8〇與介 電體壁6同樣地被分割成4個部份。即，如圖16所示般，介 電體蓋板80具有第1部份蓋板80A、第2部份蓋板8〇B、第 3部份蓋板80C以及第4部份蓋板80D。第1至第4部份蓋 板80A、80B、80C、80D各自覆蓋住介電體壁6之第i至第 4部份壁6A、6B、6C、6D的下方面。另外，介電體蓋板8〇 亦可無需被分割成4個部份。 圖16中，第1部份蓋板80A係設置於介電體蓋板8〇整 體設置區域中的左上區域，第2部份蓋板80B係設置於介電 體蓋板80整體設置區域中的右上區域，第3部份蓋板 係設置於介電體蓋板80整體設置區域中的左下區域，第斗 部份蓋板80D係設置於介電體蓋板80整體設置區域中的右 28 201127220 下區域。 80B於二電2板8°之中央部，第1至第4部份蓋板8〇A、 形成魏狀切除部8GAa、8GBa、80Ca、 8〇Da，且該等可結合呈圓形開口部。 # =處理至5側觀之’介電體蓋板111定具81A的形狀為圓 _狀，且較介電體蓋板8〇中央部之切除部 80Aa、80Ba、 開口部稍大。接著，介電體蓋板固 疋-…U來覆蓋介電體蓋板8G的圓形開口部。 ^處理室5側觀之，介電體蓋板固定具讓〜麵的形 長方形。介電體蓋板狀具贿係與支辟7之間 地"Α 4寺支撐第1及第3部份蓋板8〇A、8〇c各自的一側邊。 二)丨電體蓋板蚊具81B2係與支撐架7之間處來央持支 =2及第4部份蓋板聰，D各自的—側邊。又，介電 固定具81B3係與支撐架7之間處來夾持支撐第i及 f 2。阶蓋板80A、麵各自的一側邊。又，介電體蓋板固 ^具_4係與支撐架7之間處來夾持支撐第3及第*部份 盖板80C、80D各自的一側邊。 介電體蓋板固定具81A、81B1、81B2、81B3、81B4皆 ^備有1個以上的支撐部以及1個被固定部。支撐部係設置 ^作，介電體蓋板8G之—部份職支#部下側，為支撐該被 撐。卩的。卩份。介電體蓋板80具有對應於所有支撐部 介電體蓋板固定具81Α、81Β1、81Β2、81Β3、81Β4之去产 部)的被支撐部。 牙 其次，詳細說明介電體蓋板固定具81Α之結構及作用。 29 201127220 所示’介電體蓋板岐具81A具備有韻部8iai， 係支標第1部份蓋板80A及第2部份蓋板_之一部份；以 及被固定部81八3。軸®中未顯示，介電體蓋板固定具81八 之支撐部81A1係形成環狀，亦支撐著第3部份蓋板8〇c之 -部份與第4部份蓋板㈣之—部份。讀部8iai連接至 被固定部81A3 ’且包圍被固定部81A3而沿其側邊延 設置。 。另一方面，第1部份蓋板8〇A具有被支撐部80A1。被 支撐部8GA1 $有下方面8GAla、卩及連續形成至該下方面 80Α1=的侧端80A1M則端8〇Alb亦為切除部8〇&的端緣。 被支撲部80A1之上方面會抵接至支撐部16B與第i部份壁 6A中至少任一者的下方面。圖17所示範例中，被支撐部 之上方面會抵接至支撐樑16B與第丨部份壁6A兩者之下方 面，但被支撐部80A1之上方面亦可僅抵接至支撐樑16B與 第1部份壁6A中任一者的下方面。同樣地，第2部份蓋板 80B具有被支撐都80B1。被支撐部8〇B1具有下方面8〇Βΐ&、 以及連續形成至該下方面g〇Bla的側端8〇Blb。被支樓部 80B1之上方面會抵接至支撐部16B與第2部份壁6B中至少 任一者的下方面。圖17所示範例中’被支樓部8〇bi之上方 面會抵接至支撐樑16B與第2部份壁6B兩者之下方面，但 被支撐部80B1之上方面亦可僅抵接至支撐樑16B與第2部 份壁6B中任一者的下方面。 第3及第4部份蓋板8〇C、80D亦各自具有與該第1部 份蓋板80A及第2部份蓋板80B之被支撐部80A卜80B1相 201127220 同的被支撐部。 介電體蓋板m定具8M之支撐部81A1具械接至被支 撐部圓之下方面咖a的上方面、以及下方面。支擇部 81A1之下方面係形成錐狀，且隨著遠離被固定部即， 隨著朝向支撐部81A1之周緣部)而與支#部81A1上方面之 距離逐漸變小。從處理室5纖之，觀定部⑽之形狀 為較介電體蓋板8G之卿開口部形狀稍小賴形。被固定部 81A3之-部份會插入至介電體蓋板8〇之圓形開口部内。該 被固定部81A3之-部份會設置於被支撐部觀丨之側端 糧lb、被支撐部麵之側端麵lb、第3支撐部之側端以 及第4支撐部之側端的側邊。 介電體蓋板IU定具81A之被©定部81A3係受到固定以 使其與支撐樑16BU撐轉⑷⑽位置㈣^會產生變 化。具體說明’被固定部81A3係如下述般地 而進行固定。首先，鳩16B具有凹部刪== 刪内周形成有螺紋溝(或螺牙)搬。又，被固定部81八3 上部具有突出呈圓柱狀的凸部81A3a，t玄凸部81他之外周 形成有螺牙(或螺紋溝)81A3b。織，藉由將被固定部MM =凸部8lA；3a螺合至支撐樑16B之凹部16m，來讓介電體 蓋板固定具81A固定於支撐樑16B。如此，第6變形例之^ 電體蓋板固定具S1A無需使關_其他部品之固定機構便 可固定於支撐樑，可減少部品個數，且雜解決因露出 至電漿中而從螺絲頭部產生微粒的問題。 第6變形例之介電體蓋板固定具8U之其他結構、作用 ύ 31 201127220 及效果皆與圖6或圖7所示介電體蓋板固定具相同。 其次’參考圖18〜20來說明本實施形態之介電體蓋板固 定具之固定方法的其它範例《此處，舉出圖6或圖7所示介 電體蓋板固定具18A為例加以說明，但以下所述固定方法亦 可適用於前述變形例以外的其他介電體蓋板固定具。 圖18係顯示介電體蓋板固定具IgA之固定方法的一範 例。該範例中，在介電體蓋板固定具18A之第丨支撐部18A1 與第1部份蓋板12A之被支撐部12A1之間處、以及在介電 體蓋板固定具18A之第2支撐部18A2與第2部份蓋板ι2Β 之被支撐部12B1之間處，各自介設有中間組件2〇1&、2〇1卜 即，介電體蓋板固定具18A係經由中間組件2〇ia、2〇ib而 間接地將介電體蓋板12(第1部份蓋板12A、第2部份蓋板 12B)力σ以固疋介電體蓋板gj定具IgA與例如圖6或圖7相 同地係使用螺絲19Α1、19Α2(省略圖示)加以固定。中間組件 2〇la係由第1支撐部18Α1與被支撐部12Α1所夾持，中間 組件201b被夾持於第2支撐部ι8Α2與被支撐部12β1之間。 圖中未顯示之第3部份蓋板12C與第3支撐部之間、以及第 4部份蓋板12D與第4支撐部之間，亦各自具有與前述相同 之_間組件，但该等中間組件亦可形成一體。 圖19顯示介電體蓋板固定具18A之固定方法的其他範 $。該範例中，介電體蓋板固定具脱之被固定部觀盥 支撐樑16之間處介設有中間組件2〇2。即，狀襟16婉由 =植件搬而間接地與介電體蓋板固定具18a之間^ 持介電體蓋板12(第】部份蓋板12A、第2部 32 201127220 電體蓋板欧具18A與例如圖6或圖7相同地係使用螺絲 19A1、19A2(省略圖示)被固定至支撐樑16。中間組件2〇2之 上方面係抵接至支撐樑16下端。中間組件202之下方面則抵 接至第1部份蓋板12A之被支撐部12A1的上方面、第2部 份蓋板12B之被支卿12B1的上方面以及介電體蓋板固^ 具18A之被固定部18A3的上方面。 圖20係顯示介電體蓋板固定具18A之固定方法的再一 其他範例。該範例中，在介電體蓋板固定具18A(被固定部 18A3及第1支樓部18A1)與第丨部份蓋板32A之被支樓部 32A1之間處、以及在介電體蓋板固定具18A(被固定部18八3 及第2支撙部18A2)與第2部份蓋板32B之被支撐部32B1 之間處，各自介設有中間組件203a、2〇3b而加以固定。即， 介電體蓋板固定具18A經由中間組件2〇3a、2〇3b而間接地 將介電體蓋板1¾第1部份蓋板ΜΑ、第2部份蓋板32B)加 以固定。 第1部份蓋板32A及第2部份蓋板32B具有與該第1變 形例(圖9)相同的形狀。即，第〗部份蓋板32八具有被支撐 部32A卜該被支撑部32A1具有下方面32Ala、以及連續形 成至該下方面32Ala的側端32Alb。被支撐部32A1之下方 面為第1部份蓋板32A下方面的一部份，第丨部份蓋板32A 之下方面係形成有段差部，以使得被支撐部32A1下方面位 在被支撐部3 2 A1以外之部份之下方面的上方位置。中間組 件203a形成有能與該段差部嚅合的形狀。 同樣地，第2部份蓋板32B具有被支撐部32B1，被支撐 201127220 部32B1具有下方面32Bla、以及連續形成至該下方面32Bla 的側端32Blb。被支撐部32B1之下方面^ 下方面的-部份，第2部份蓋板32Β之下方面係形成有段差 部’以使得被支撐部32Β1下方面位在被支撐部32Β1以外之 部份之下方面的上方位置。中間組件2〇3b形成有能與該段差 部嚅合的形狀。 介電體盍板固定具18A與例如圖6或圖7相同地係使用 螺絲19A卜19A2(省略圖示)來加以固定。中間組件2〇3a係 由第1支撐部18A1與被支撐部32A1所炎持，中間組件2議 則被夾持於第2支撐部18A2與被支撐部32B1之間處。 在圖中未顯示之第3部份蓋板與第3支撐部之間處、以 及第4部份盍板與第4支撐部之間處，亦各自具有與前述相 同的中間組件，但該等中間組件亦可形成一體。 圖 18、19、20所示之中間組件2〇1&、2〇11)、2〇2、2〇3&、 203b可由例如具有電漿耐性之陶瓷等材質所構成。藉由介設 有中間組件201a、201b、202、203a、203b，即使介電體蓋 板12之大小改變，亦無需改變介電體蓋板固定具18A本身 的大小與形狀，便可藉由介電體蓋板固定具18A來確實地加 以固定。例如，作為第丄部份蓋板(12A、32A)及第2部份蓋 板(12B、32B) ’使用厚度較薄者抑或面方向長度較圖6或圖 7更紐者之情況，藉由介設有中間組件2〇la、2〇比、2〇2、 203a、203b，便可加以固定且使其與介電體蓋板固定具18八 之間不會產生間隙或餘隙。 又，中間組件201a、201b、202、203a、203b亦可由例 34 201127220 ====。此時，即使因介電體 …、里而k成伸知、雁桃 形，因此可防止介電體蓋板12^=t挪時’亦可吸收該變 之此At # 之破損，在不產生間隙或餘隙 蓋板^ 蓋板81枝18Α树實轉持介電體 來確實地進1ΐίϋϋΐ ’可藉由介電體蓋板固定具18Α ϊ 16，亦能防止發生異常放電。如圖tr::， 示之介電體蓋板嶋相同㈣及賴與圖6或圖7所 [第2實施形態] 態「蓋二21 1圖21來說明作為本發明第2實施形 疋彳置」之介電體蓋板固定裝置。 形態之介電體蓋板 電體蓋板固定裳置之其他狀態的剖面圖係圖21所不介 態之感軸合電⑽縣置具備有支龍 趣2 2 _態之支撐標16)、介電體蓋板82(取代第1 :體蓋:固： = 為「蓋板固定裝置」之介 ^ =定具鮮另外，以下，詳細說明介電體蓋板 定但本實施形態中，亦可設置與介電體蓋板固 裝置87A相同的介電體蓋板固定裝置，來取代第！實施形 35 201127220 態之介電體蓋板同定具18A以外之介電體蓋板固定具。 支撐樑86形成有從上方面貫穿至下方面的1個貫通孔。 貝通孔包含有從支撐樑86上方面至下方面依序設置的内周 部86a、86b，86c、86d。内周部86a、86c之内徑約略相等。 内周部86b、86d之内徑約略相等，且較内周部8^、8&之 内徑更大。鄰接之2個内周部之邊界位置處，則形成有連結 2個内周部之環狀段差形成面。 '° 介電體蓋板82係與第1實施形態之介電體蓋板12相同 地被分割成4個部份。即，介電體蓋板82具有第i部份蓋板 82A、第2部份蓋板82B、以及圖中未顯示之第3與第4部 份蓋板。 第1部份蓋板82A具有被支撐部82A1。被支撐部82A1 具有下方面、以及連續形成至該下方面的侧端。被支揮部 82A1之下方面為第1部份蓋板82A下方面的一部份，第1 部份蓋板82A之下方面形成有段差部，以使得被支撐部82ai 下方面位在被支撐部82A1以外之部份之下方面的上方位 置。同樣地，第2部份蓋板82B具有被支撐部82B1。 介電體蓋板固定裝置87A具備有介電體蓋板固定具88八 與固定機構90。介電體蓋板固定具88A與圖9所示介電體蓋 板固定具38A相同，係具有第1支撐部88A1、第2支撐部 88A2、被支樓部88A3、以及圖中未顯示之第3與第4支撐 部。 … 第1支#部88A1係设置於第1部份蓋板82A下方面之 該段差部處，而第1支撐部88A1之上方面會抵接至被支撐 36 201127220 部82A1之下方面。第1支撐部88A1具有與該段差部之段差 相4的厚度。因此，第1支撐部88A1之下方面、與第i部 份蓋板82A之被支撐部82A1以外之部份的下方面之間並無 段差。同樣地，第2支撐部88A2之上方面會抵接至被支撐 部82B1之下方面。 第3支撐部與第3部份蓋板之被支撐部之間的關係、以 及第4支撐部與第4部份蓋板之被支撐部之間的關係，係與 該第1支撐部88A1與第1部份蓋板82A之被支撐部82A1 之間的關係相同。被固定部88A3之一部份係設置於第i至 第4部份蓋板之被支樓部之側端的側邊。 介電體蓋板固定具88A之各支撐部係與支撐樑86及介 電體壁6中至少任-者之間處來各自夾持支禮著位於支樓部 之對應位置的介電體蓋板82讀支齡卩。另外，目21及圖 22所示範例中’介電體蓋板固定具88A之支撑部88A1、88A2 係與支擇樑86之間處來各自鱗支㈣被描部_、 82B1。但疋’支撐部88AJ、88A2亦可與介電體壁6之間處， 抑或其與支撐樑86及介電體壁6兩者之間處來各自夾持支撐 著被支撐部82A1、„ 一 · 3又罝於敉汴電體蓋板幻上方运 更上方位置的鉤部89。鉤部89係收納於内周部_内。^ 部89係形成約略圓筒形狀，且上端附近之—部份的内徑會賴 ^也部份之内徑更小。鉤部89之上_近之—部份如後所述 曰形成有卡合至卡合組件94之-部份的卡合部。 固定機構90制定介賴藏_具之被固定部 37 201127220 ’的機構’能讓其與支撐樑86之間的位置關係不會改 變。本實施形態中，特別是，固定機構9〇係使用氣壓缸來將 被固定部88A3昇起的機構。 固定機構90具有構成氣壓缸之壓桿91與缸體92。缸r 92係相對於本體容器2而以直接或經由其他組件之方式加: 固定。固定機構90更具有彈簧93與卡合組件94。固定機構 90之一部份會插入至支撐樑86的貫通孔内。 壓桿91包含：第1部份9ia，係收納於缸體％内；以 及第2部份91b、帛3部分91c、帛4部份91d、帛5部份9le 與第6部份91f ’係從該第i部份91a往下方依序連續設置。 第1至第5部份91a〜91e皆為圓柱形狀。第6部份9 錐形狀。 ， 第2部份91b係貫穿紅體92底部，而插入至内周部8如。 第2部份91b之外徑較第！部份91a之外徑更小。第3部份 91c係設置於内周部86b内。第3部份91c之外徑係較第2 部份91b之外徑更大，且較内周部86a、86c之内徑更大。 第4部份91d係設置於内周部86b内。第4部分灿之 外徑絲第3部份91e之外徑更小。第5部份91e係插入内 周部86c與鉤部89之卡合部内，且其下端部係位於較卡合部 更下方位置。第5部份9le之外徑係較第4部份9M之外徑 更小。 第6部份91f係收納於鉤部89内。第6部分9if底面之 直徑係較第5部份91e之外徑更大，且較釣部89之卡合部的 内徑更小。 38 201127220 缸體92内部由缸體％内壁與第1部份91a之上方面而 構成有空間。缸體92連接有配管95，以將氣體供給至該空 間，抑或從#亥空間將氣體排出。 彈簧93係於内周部86b内，設置在壓桿91之第3部份 Wc與内周部86b、86c之邊界處的段差形成面之間。第*部 伤係设置於彈簧93内側，且可上下移動。壓桿91係藉 由彈簧93而被施加有朝向上方之彈力。 ^卡合組件94具有：凸緣94a;數個(例如3個)平板部94b， 係連接至該凸緣94a下端；以及複數個卡合部94c，係各自 較各平，部94b之下端部更朝外側突出。凸緣地形成有從 方面貝穿至7方_ 1個貫通孔。該貫通赌人有第5部 份91e。凸緣94a之外徑約略等於内周部86c之内徑。凸緣 彈簧93或支撐樑86而使朝上方向之移動受到限 具有可挽性。平板部94b之下端部係接觸至 其次’制本實施形態之介電體蓋板固定裝置似的作 用。圖係顯示固定機構90尚未將介電 之被固定部·3峡驗態，S22 構、2 將介電體蓋板固定具88A之被固定部88A 已 ==狀_可齡從崎95將氣體供給纽體92 能下’壓桿91位於可動範圍的下端 f。5亥紅、中，卡合組件94之複數個平板部94b之下端2 會擴張，複數個卡合部他並未卡合於釣部 此，於該狀態下，介電體蓋板财具88A不會槪= 39 201127220 86而被加以固定’可將介電體蓋板固定具88A及介電體蓋板 82取下。 停止從配管95將氣體供給至缸體92内部空間，且從缸 體92内部空間將氣體排出，便會成為圖22所示狀態。此時， 壓杯91會因為彈簧93之彈力而朝上方推壓，卡合組件94 之複數個平板部94b下端部會因第6部份9lf而朝外側擴張。 其結果，複數個卡合部94c會卡合至鉤部89之卡合部，藉由 將被固定部88A3昇起，使得介電體蓋板固定具88八不會改 邊與支撐樑86之間的位置關係，便可相對於支撐樑86來加 以固定。藉此，介電體蓋板82可藉由介電體蓋板固定具似 來加以固定。 如以上說明’本實施形態中，係藉由使用固定機構90 讓介電體蓋板固定具88A之被固定部88A3昇起，來固定被 固定部觀’使其與支撐組件(支撐樑岣之間的位置關係不 會改變。因此，依本實施賴，可料地進行介電體蓋板固 定具88A及介電體蓋板82的拆裝。 又，本貫把形態中，固定機構9〇之壓桿9丨 93而被施加有朝向上方的彈力。因此，依本實施形^，於^ 電體蓋板82之敏作#巾，即使發生了氣歡缸體％域 之問題’介電體蓋板S1定具88A及介電體蓋板82亦不會落 下。 本實施形態之其他結構、作用及效料與第丨實施形態 相同。 201127220 [第3實施形態] 其次，說明作為本發明第3實施形態之「蓋板固 蓋板固定^圖23係本實施_之介電體蓋板固 ^置的剖_。本實施形態之感_合處顆置^ 帛2魏象細86)、介電體蓋板 定梦形態之介電體蓋板吻、以及介電體蓋板固 疋破置120(取代第2實施形態之介電體蓋板固定裂置 另^卜下詳細說明介電體蓋板岐裝置⑵，但本實施形 〜與介電體蓋油定裝置m侧的介電體蓋 口疋裳置|取代第2貫施形態之介電體蓋板固定 87A以外的介電體蓋板固定裝置。 、 支樑96形成有從上方面貫穿至下方面的i個貫 96a。介電體蓋板112料丨實施形態之介電體蓋板η相同 地分割成4個部份。即，介電體蓋板112具有第〗部份 112A」帛2部份蓋板112B、以及圖中未顯示之第3與第4 部份蓋板。 ' 第1部份蓋板U2A具有被支撐部112A卜被支撐部 1題具有下方面、以及連續形成至該下方面的側端。被支 撐部Π2Α1之下方面為第1部份蓋板112A下方面的一部4 slightly tired 4 19A1, 19A2 icon). In the fifth modification, the shape of the support 襟i6A is different from that of the beam 16 of Fig. 6 or Fig. 7. Specifically, the branch 16A has a convex portion 16A1 at its lower end. The dielectric cover fixture 79A replaces the dielectric counter fixture ISA shown in Fig. 6 or Fig. 7. The dielectric cover fixing member μ has the part of the cover portion 12A of the branching portion 12A! The support portion 79A1; the second support portion 79A2 that supports one of the second partial cover plates 12B; the fixed portion 79A3; and the third and fourth support portions not shown. The i-th and second support portions 79A, 79A2 are connected to the fixed portion 79A3, and are provided to extend from the fixed portion 79A3 to one. The third and fourth support portions are also the same as the second and second support portions 79A1 and 79A2. In the fifth modification, the shape of the convex portion 16A1 of the supporting beam 16A is made such that the thickness (height) of the fixed portion 3 is formed thinner than the dielectric cover fixing member shown in Fig. 6 or Fig. 7. The first partial cover 12A and the second partial cover 12B of the dielectric cover 12 have the same structure as that shown in Fig. 7 and have supported portions 12A1 and 12B1. Further, the third and fourth partial cover plates 12C and 12D which are not shown in the drawings each have the same branch portion as the above. The first support portion 79A1 has an upper aspect of abutting to the lower side 12A1a of the supported portion 12A1; and the following. The second support portion 79A2 has an upper aspect of the contact 12Bla to the underside of the supported portion 12B1; and the following. Similarly, the third support portion has the above aspect of abutting to the underside of the support portion 27 201127220 of the third partial cover 12C; and the following. The fourth support portion has the above aspect of abutting to the underside of the supported portion of the fourth partial cover 12D; and the following. Each of the first to fourth support portions has a tapered surface, and the distance from the upper portion of each of the support portions gradually decreases as it goes away from the fixed portion 79A3. < As shown in the fifth modification, the dielectric cover fixture of the present invention can be formed in various shapes corresponding to the shape of the support beam 16 and the support frame 7 as the support assembly. The other structure, function and effect of the dielectric cover fixture of the fifth modification are the same as those of the dielectric cover fixture shown in Fig. 6 or Fig. 7. Fig. 16 is a bottom plan view showing a dielectric cover and a dielectric cover fixture according to a sixth modification, corresponding to Fig. 4; Figure 17 is a cross-sectional view showing a dielectric cover and a dielectric cover fixture of a sixth modification. The dielectric cover 80 of the sixth modification is replaced with the dielectric cover 12 shown in Fig. 4, and the dielectric cover 8 is divided into four portions in the same manner as the dielectric wall 6. That is, as shown in Fig. 16, the dielectric cover 80 has a first partial cover 80A, a second partial cover 8B, a third partial cover 80C, and a fourth partial cover 80D. The first to fourth partial cover plates 80A, 80B, 80C, and 80D each cover the lower side of the i-th to fourth partial walls 6A, 6B, 6C, and 6D of the dielectric body wall 6. In addition, the dielectric cover 8〇 may not need to be divided into four parts. In FIG. 16, the first partial cover 80A is disposed in the upper left area of the dielectric cover 8〇, and the second partial cover 80B is disposed in the overall installation area of the dielectric cover 80. In the upper right area, the third partial cover is disposed in the lower left area of the overall installation area of the dielectric cover 80, and the third partial cover 80D is disposed on the right side of the overall arrangement area of the dielectric cover 80. Lower area. 80B is at the central portion of 8° of the second plate 2, and the first to fourth partial covers 8A, forming the cut-away portions 8GAa, 8GBa, 80Ca, 8〇Da, and the combined openings are circular openings. . #=Processing to 5 Side View The dielectric cover 111 has a shape of a rounded shape 81A, and is slightly larger than the cut portions 80Aa and 80Ba of the central portion of the dielectric cover 8〇. Next, the dielectric cover is fixed to cover the circular opening of the dielectric cover 8G. ^The processing chamber 5 is viewed from the side, and the dielectric cover is fixed to have a rectangular shape. The dielectric cover plate is between the bribe and the support 7 and the other side of the first and third partial covers 8A, 8〇c. 2) 丨Electrical cover plate between the 81B2 system and the support frame 7 at the central end of the support = 2 and the fourth part of the cover Cong, D each side - side. Further, between the dielectric fixture 81B3 and the support frame 7, the i-th and f-2 are supported and supported. The step cover 80A and one side of each side of the surface. Further, a side between the dielectric cover panel fixing member 4 and the support frame 7 is supported to support the respective sides of the third and *th portion cover plates 80C, 80D. Each of the dielectric cover fixtures 81A, 81B1, 81B2, 81B3, and 81B4 has one or more support portions and one fixed portion. The support portion is provided, and the lower side of the portion of the dielectric cover 8G is supported to support the support. Oh. Backup. The dielectric cover 80 has a supported portion corresponding to all of the support portions of the dielectric cover fixtures 81Α, 81Β1, 81Β2, 81Β3, 81Β4. Teeth Next, the structure and function of the dielectric cover fixture 81 are described in detail. 29 201127220 The dielectric insulator cover 81A is provided with a rhyme 8iai, a portion of the first partial cover 80A and the second partial cover _, and a fixed portion 81 8.3. Not shown in the shaft®, the support portion 81A1 of the dielectric cover fixture 81 is formed in a ring shape, and also supports the portion of the third partial cover 8〇c and the fourth partial cover (four). Part. The reading portion 8iai is connected to the fixed portion 81A3' and surrounds the fixed portion 81A3 and is extended along the side thereof. . On the other hand, the first partial cover 8A has a supported portion 80A1. The supported portion 8GA1 $ has the lower side 8GAla, the crucible and the side end 80A1M which is continuously formed to the lower side 80Α1=, and the end 8〇Alb is also the end edge of the cutout portion 8〇&. The upper side of the baffle portion 80A1 abuts on the lower side of at least either of the support portion 16B and the i-th portion wall 6A. In the example shown in FIG. 17, the upper portion of the supported portion abuts against both the support beam 16B and the second partial wall 6A, but the upper portion of the support portion 80A1 may only abut against the support beam 16B. The lower aspect with any of the first partial wall 6A. Similarly, the second partial cover 80B has a supported portion 80B1. The supported portion 8B1 has the lower side 8〇Βΐ&, and the side end 8〇Blb continuously formed to the lower side g〇Bla. The upper side of the branch portion 80B1 abuts on the lower side of at least either of the support portion 16B and the second partial wall 6B. In the example shown in Fig. 17, the upper side of the branch portion 8〇bi will abut against the support beam 16B and the second partial wall 6B, but the upper portion of the support portion 80B1 may only abut. To the lower side of either of the support beam 16B and the second partial wall 6B. Each of the third and fourth partial covers 8C, 80D also has a supported portion which is the same as the supported portion 80Ab of the first partial cover 80A and the second partial cover 80B, 201127220. The dielectric cover m is fixed to the upper side of the support portion 81A1 of the 8M to be attached to the underside of the support portion, and the following aspects. The lower portion of the support portion 81A1 is tapered, and the distance from the upper portion of the support portion 81A1 gradually decreases as it goes away from the fixed portion, that is, toward the peripheral edge portion of the support portion 81A1. From the processing chamber 5, the shape of the viewing portion (10) is slightly smaller than the shape of the opening of the dielectric cover 8G. A portion of the fixed portion 81A3 is inserted into the circular opening portion of the dielectric cover 8''. A portion of the fixed portion 81A3 is disposed on the side end of the supported portion, the side end lb of the support portion, the side end of the third support portion, and the side of the side end of the fourth support portion. . The position of the dielectric cover IU fixture 81A is fixed so that it is fixed to the support beam 16BU (4) (10) position (4). Specifically, the fixed portion 81A3 is fixed as follows. First, the crucible 16B has a concave portion. == The internal circumference is formed with a thread groove (or a screw). Further, the upper portion of the fixed portion 81 VIII has a convex portion 81A3a projecting in a columnar shape, and the t-shaped convex portion 81 has a screw (or thread groove) 81A3b formed on the outer periphery thereof. The dielectric cover fixture 81A is fixed to the support beam 16B by screwing the fixed portion MM = convex portion 8lA; 3a to the concave portion 16m of the support beam 16B. In this way, the electric-shield cover fixture S1A of the sixth modification can be fixed to the support beam without the fixing mechanism of the other parts, and the number of parts can be reduced, and the miscellaneous solution can be removed from the screw head due to exposure to the plasma. The problem of producing particles. The other structure and function of the dielectric cover fixture 8U of the sixth modification are the same as those of the dielectric cover fixture shown in Fig. 6 or Fig. 7. Next, another example of the method of fixing the dielectric cover fixture of the present embodiment will be described with reference to FIGS. 18 to 20. Here, the dielectric cover fixture 18A shown in FIG. 6 or FIG. 7 is taken as an example. Note that the fixing method described below can also be applied to other dielectric cover fixtures other than the above-described modifications. Fig. 18 is a view showing an example of a method of fixing the dielectric cover fixture IgA. In this example, between the second support portion 18A1 of the dielectric cover fixture 18A and the supported portion 12A1 of the first partial cover 12A, and the second support of the dielectric cover fixture 18A. Between the portion 18A2 and the supported portion 12B1 of the second partial cover ι2, each of the intermediate members 2〇1&, 2〇1, ie, the dielectric cover fixture 18A is connected via the intermediate assembly 2 Ia, 2 〇 ib and indirectly the dielectric cover 12 (the first partial cover 12A, the second partial cover 12B) force σ to fix the IgA with the solid dielectric cover gj and, for example, Figure 6 Similarly to Fig. 7, the screws 19Α1, 19Α2 (not shown) are used for fixing. The intermediate unit 2〇1 is sandwiched between the first support portion 18Α1 and the supported portion 12Α1, and the intermediate unit 201b is sandwiched between the second support unit ι8Α2 and the supported portion 12β1. Between the third partial cover 12C and the third support portion not shown, and between the fourth partial cover 12D and the fourth support portion, each has the same component as described above, but these The intermediate components can also be integrated. Fig. 19 shows other specifications of the fixing method of the dielectric cover fixture 18A. In this example, the dielectric cover fixture is removed from the fixed portion. The intermediate member 2〇2 is interposed between the support beams 16. That is, the state of the crucible 16婉 is indirectly connected to the dielectric cover member 18a by the implant member, and the dielectric cover 12 (the first partial cover 12A, the second portion 32 201127220) is covered. The plate member 18A is fixed to the support beam 16 using screws 19A1, 19A2 (not shown), for example, as in Fig. 6 or Fig. 7. The upper portion of the intermediate member 2A2 abuts against the lower end of the support beam 16. Intermediate assembly The lower side of 202 abuts on the upper side of the supported portion 12A1 of the first partial cover 12A, the upper side of the second partial cover 12B, and the dielectric cover member 18A. Fig. 20 shows still another example of the method of fixing the dielectric cover fixture 18A. In this example, the dielectric cover fixture 18A (fixed portion 18A3 and first) Between the branch portion 18A1) and the portion 32A1 of the second partial cover 32A, and the dielectric cover fixture 18A (the fixed portion 18 VIII and the second support portion 18A2) Between the supported portions 32B1 of the partial cover plates 32B, the intermediate members 203a, 2〇3b are respectively fixed and fixed. That is, the dielectric cover fixture 18A is connected via the intermediate assembly 2 3a, 2〇3b, indirectly, the dielectric cover plate 126, the first partial cover ΜΑ, and the second partial cover 32B) are fixed. The first partial cover 32A and the second partial cover 32B have the same shape as the first modified example (Fig. 9). That is, the first partial cover 32 has a supported portion 32A having the lower portion 32A1a and a side end 32Alb continuously formed to the lower portion 32A1a. The underside of the supported portion 32A1 is a portion of the lower portion of the first partial cover 32A, and the lower portion of the second partial cover 32A is formed with a stepped portion so that the lower portion of the supported portion 32A1 is supported. The upper position of the part below the part other than 3 A1. The intermediate member 203a is formed in a shape that can be coupled to the step portion. Similarly, the second partial cover 32B has the supported portion 32B1 and is supported. The 201127220 portion 32B1 has a lower portion 32B1a and a side end 32B1b that is continuously formed to the lower portion 32Bla. In the lower part of the lower portion of the support portion 32B1, the second portion of the cover plate 32 is formed with a step portion ′ so that the lower portion of the supported portion 32Β1 is located outside the supported portion 32Β1. The upper position of the lower aspect. The intermediate member 2〇3b is formed in a shape that can be coupled to the step portion. The dielectric jaw holder 18A is fixed by using a screw 19A, 19A2 (not shown), similarly to Fig. 6 or Fig. 7, for example. The intermediate unit 2〇3a is held by the first support portion 18A1 and the supported portion 32A1, and the intermediate unit 2 is sandwiched between the second support portion 18A2 and the supported portion 32B1. Between the third partial cover and the third support, not shown, and between the fourth partial yoke and the fourth support, each has the same intermediate assembly as described above, but these The intermediate components can also be integrated. The intermediate members 2〇1&, 2〇11), 2〇2, 2〇3&, 203b shown in Figs. 18, 19, and 20 can be made of a material such as ceramic having plasma resistance. By interposing the intermediate components 201a, 201b, 202, 203a, 203b, even if the size of the dielectric cover 12 is changed, the size and shape of the dielectric cover fixture 18A itself need not be changed, and the dielectric can be dielectrically The body cover fixture 18A is securely fixed. For example, as the second partial cover (12A, 32A) and the second partial cover (12B, 32B), the case where the thickness is thinner or the length of the face is larger than that of FIG. 6 or FIG. The intermediate components 2〇la, 2〇 ratio, 2〇2, 203a, 203b can be fixed and can be free from gaps or clearances between the dielectric cover fixtures 18 and 8 . Further, the intermediate components 201a, 201b, 202, 203a, 203b can also be exemplified by the example 34 201127220 ====. At this time, even if the dielectric body ..., the inside is k-extended, the goose-shaped shape, it is possible to prevent the dielectric cover 12^=t from moving, and it is also possible to absorb the damage of the At # A gap or clearance cover is generated. ^ The cover plate 81 is 18 Α 实 实 实 介 介 介 介 介 确实 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 。 。 。 。 。 。 。 。 。 As shown in Fig. tr::, the dielectric cover plate 嶋 is the same as (4) and the same as in Fig. 6 or Fig. 7 (second embodiment), the cover 2 21 1 and Fig. 21 are described as the second embodiment of the present invention. A dielectric cover fixing device. The cross-sectional view of the other state in which the dielectric cover of the dielectric cover is fixed and placed is shown in Fig. 21. The sense of the shaft is not interposed (10) The county has a supporting support for the dragon 2 2 _ state 16), Dielectric cover plate 82 (instead of the first: body cover: solid: = is the "cover fixing device") = is set to be fresh, the following describes the dielectric cover in detail, but in this embodiment, A dielectric cover fixing device similar to the dielectric cover fixing device 87A may be provided instead of the dielectric cover plate of the third embodiment of the present invention. The beam 86 is formed with one through hole penetrating from the upper side to the lower side. The beacon hole includes inner peripheral portions 86a, 86b, 86c, 86d which are sequentially disposed from the upper side to the lower side of the support beam 86. The inner peripheral portion 86a The inner diameters of the inner peripheral portions 86b, 86d are approximately equal, and are larger than the inner diameters of the inner peripheral portions 8^, 8 & the boundary positions of the adjacent two inner peripheral portions are formed. There is an annular step forming surface that connects the two inner peripheral portions. The '° dielectric cover 82 is the same as the dielectric cover 12 of the first embodiment. Divided into four parts, that is, the dielectric cover 82 has an i-th partial cover 82A, a second partial cover 82B, and third and fourth partial cover plates not shown. The partial cover plate 82A has a supported portion 82A1. The supported portion 82A1 has a lower side and a side end continuously formed to the lower side. The lower portion of the supported portion 82A1 is the lower side of the first partial cover 82A. In part, the lower portion of the first cover plate 82A is formed with a stepped portion such that the lower portion of the supported portion 82ai is positioned above the portion other than the support portion 82A1. Similarly, the second portion The cover plate 82B has a supported portion 82B1. The dielectric cover fixing device 87A is provided with a dielectric cover fixture 88 and a fixing mechanism 90. The dielectric cover fixture 88A and the dielectric cover shown in FIG. Similarly to the plate fixture 38A, the first support portion 88A1, the second support portion 88A2, the branch portion 88A3, and the third and fourth support portions (not shown) are provided. The first branch portion 88A1 is provided in The first portion of the cover plate 82A is at the lower portion of the lower portion, and the upper portion of the first support portion 88A1 is abutted to the supported portion 36 201127220 portion 82A 1. The first support portion 88A1 has a thickness that is different from the step of the step portion 4. Therefore, the portion below the first support portion 88A1 and the portion of the support portion 82A1 of the i-th portion cover 82A are not included. There is no step between the lower side. Similarly, the upper side of the second support portion 88A2 abuts against the underside of the supported portion 82B1. Between the third support portion and the supported portion of the third partial cover The relationship between the fourth support portion and the supported portion of the fourth partial cover is the same as the relationship between the first support portion 88A1 and the supported portion 82A1 of the first partial cover 82A. A part of the fixed portion 88A3 is provided on the side of the side end of the ith to fourth partial cover portion. Each of the support portions of the dielectric cover fixture 88A is disposed between at least one of the support beam 86 and the dielectric wall 6 to respectively sandwich a dielectric cover at a corresponding position of the branch portion. Board 82 reads the age of 卩. Further, in the examples shown in Fig. 21 and Fig. 22, the support portions 88A1, 88A2 of the dielectric cover member fixture 88A and the support beam 86 are provided with respective scales (four) of the portions _, 82B1. However, the support portion 88AJ, 88A2 may also be interposed between the dielectric body wall 6 or the support beam 86 and the dielectric body wall 6 to support the supported portion 82A1, „ 3. The hook portion 89 is placed on the upper side of the upper cover of the electric body cover. The hook portion 89 is housed in the inner peripheral portion _. The portion 89 is formed into a substantially cylindrical shape and is near the upper end. The inner diameter of the portion may be smaller, and the inner diameter of the portion may be smaller. The upper portion of the hook portion 89 is formed to have a engaging portion that is engaged with the portion of the engaging member 94 as will be described later. The fixing mechanism 90 establishes a mechanism that is independent of the fixed portion 37 201127220 ', and the positional relationship between the fixing mechanism and the support beam 86 is not changed. In the present embodiment, in particular, the fixing mechanism 9 uses the air pressure. The cylinder is a mechanism for raising the fixed portion 88A3. The fixing mechanism 90 has a pressing rod 91 constituting a pneumatic cylinder and a cylinder 92. The cylinder r 92 is fixed with respect to the main body container 2 either directly or via other components. The fixing mechanism 90 further has a spring 93 and a snap assembly 94. One of the fixing mechanisms 90 is inserted into the through hole of the support beam 86. The pressing rod 91 includes: a first portion 9ia, which is housed in the cylinder body %; and a second portion 91b, a 帛3 portion 91c, a 帛4 portion 91d, a 帛5 portion 9le, and a sixth portion 91f' The first portion to the fifth portion 91a to 91e are all in a cylindrical shape. The sixth portion has a tapered shape. The second portion 91b extends through the bottom of the red body 92. The outer portion of the second portion 91b is smaller than the outer diameter of the first portion 91a. The third portion 91c is disposed in the inner peripheral portion 86b. The third portion 91c is The outer diameter is larger than the outer diameter of the second portion 91b and larger than the inner diameter of the inner peripheral portions 86a, 86c. The fourth portion 91d is disposed in the inner peripheral portion 86b. The third portion 91e of the wire has a smaller outer diameter. The fifth portion 91e is inserted into the engaging portion of the inner peripheral portion 86c and the hook portion 89, and the lower end portion is located below the engaging portion. The outer diameter of the 9le is smaller than the outer diameter of the fourth portion 9M. The sixth portion 91f is housed in the hook portion 89. The diameter of the bottom surface of the sixth portion 9if is larger than the outer diameter of the fifth portion 91e. And the inner diameter of the engaging portion of the fishing portion 89 is smaller. 38 201127220 The inside of the body 92 has a space formed by the inner wall of the cylinder and the first portion 91a. The cylinder 92 is connected to the pipe 95 to supply gas to the space, or to discharge the gas from the space. The inner peripheral portion 86b is disposed between the step forming surfaces at the boundary between the third portion Wc of the pressing rod 91 and the inner peripheral portions 86b and 86c. The first portion of the wound is disposed inside the spring 93 and is movable up and down. The pressing rod 91 is biased upward by the spring 93. The engaging assembly 94 has a flange 94a, a plurality of (for example, three) flat portions 94b connected to the lower end of the flange 94a, and a plurality of engaging portions 94c each being flatter and lower than the lower end of the portion 94b. More prominently to the outside. The flange is formed to penetrate from the side to the seven sides - one through hole. The through gambler has a fifth part 91e. The outer diameter of the flange 94a is approximately equal to the inner diameter of the inner peripheral portion 86c. The flange spring 93 or the support beam 86 limits the movement in the upward direction to be manageable. The lower end portion of the flat plate portion 94b is in contact with the next function of the dielectric cover fixing device of the present embodiment. The figure shows that the fixing mechanism 90 has not yet verified the dielectric portion of the dielectric, the S22 structure, and the fixed portion 88A of the dielectric cover plate fixture 88A has been replaced by the gas. The supply button 92 can be placed under the lower end f of the movable range. 5 ha, red, middle, the lower end 2 of the plurality of flat portions 94b of the engaging assembly 94 will expand, and the plurality of engaging portions are not engaged with the fishing portion. In this state, the dielectric cover cover 88A It is not fixed 39 = 39 201127220 86 and can be fixed 'the dielectric cover fixture 88A and the dielectric cover 82 can be removed. When the gas is supplied from the pipe 95 to the internal space of the cylinder block 92, and the gas is discharged from the internal space of the cylinder block 92, the state shown in Fig. 22 is obtained. At this time, the pressing cup 91 is pushed upward by the elastic force of the spring 93, and the lower end portions of the plurality of flat plate portions 94b of the engaging unit 94 are expanded outward by the sixth portion 9lf. As a result, the plurality of engaging portions 94c are engaged with the engaging portions of the hook portions 89, and by lifting the fixed portions 88A3, the dielectric cover fixing members 88 are not changed to the supporting beam 86. The positional relationship between the two can be fixed relative to the support beam 86. Thereby, the dielectric cover 82 can be fixed by the dielectric cover fixture. As described above, in the present embodiment, the fixed portion 88A3 of the dielectric cover fixture 88A is lifted by using the fixing mechanism 90 to fix the fixed portion to be supported with the support member (support beam) The positional relationship between the two does not change. Therefore, according to the present embodiment, the dielectric cover fixture 88A and the dielectric cover 82 can be detachably attached. Further, in the present embodiment, the fixing mechanism 9〇 The pressing rod 9丨93 is applied with an elastic force toward the upper side. Therefore, according to the present embodiment, the sensitive cover of the electric body cover 82 is even if the problem of the % of the cylinder is generated. The body cover S1 fixing member 88A and the dielectric cover plate 82 are not dropped. Other configurations, operations, and effects of the present embodiment are the same as those of the third embodiment. 201127220 [Embodiment 3] Next, a description will be given of the present invention. In the third embodiment, the cover plate fixing cover is shown in Fig. 23, which is a sectional view of the dielectric cover of the present embodiment. The sense of the present embodiment is the same as that of the case. The electric body cover is fixed in the shape of the dielectric cover kiss, and the dielectric cover is fixed to the ground 120 (replaces the second real The dielectric cover plate of the form is fixed and ruptured. The dielectric cover plate device (2) is described in detail below, but the dielectric cover of the present embodiment is placed with the dielectric cover of the dielectric cover oil setting device. The dielectric cover plate fixing device other than the dielectric cover plate fixing 87A is replaced by the second embodiment. The support beam 96 is formed with one through 96a extending from the upper side to the lower side. The dielectric cover plate 112 The dielectric cover η of the embodiment is equally divided into four parts. That is, the dielectric cover 112 has a portion 112A"2 partial cover 112B, and a third portion not shown in the drawing. And the fourth partial cover. 'The first partial cover U2A has the support portion 112A, the support portion 1 has the lower side, and the side end is continuously formed to the lower side. The support portion Π2Α1 is Part 1 of the first part of the cover 112A
份，第1部份蓋板112A下方面形成有段差部，以使得被支 撐部112A1下方祕在被支#部mA 的上方位置哪地，第2部罐⑽=== 112B1 ° 介電體蓋板固定裝置120係具備有作為介電體蓋板固定 201127220 ,及作為固定機構的缸體122。壓桿121及缸 恤域了氣塵紅。紅體⑵係設置於支撐樑96上方 相對於器2以直接或經由其他組件之方式加以固定。 廢桿121財：轴狀翻定部ma，其上端部係收納於 U内；以及第1支撐部12⑻、第2支樓部121b2、圖 顯不之第3與第4支樓部，係各自從被固定部121a下端 部延伸至側邊。 』第1支撐部121M係設置於第丨部份蓋板U2A下方面 之办又差。[5處，第1支撐部db!上方面會抵接至被支撐部 A1下方面。第1支撐部〗2ibl係具有與該段差部之段差 相^的厚度。因此，第1支撐部1雇之下方面、與第i部 份蓋板112A之被支撐部112A1以外之部份的下方面之間不 會形成段差。同樣地，第2支撐部121b2之上方面會抵接至 被支撐部112B1之下方面。 第3支撐部與第3部份蓋板之被支撐部之間的關係、以 及第4支撐部與第4部份蓋板之被支撐部之間的關係，係與 5亥第1支撐部112bl與第1部份蓋板112A之被支撐部112A1 之間的關係相同。被固定部121a之一部份係設置於第1至第 4部份蓋板之被支撐部之側端的側邊。 該各支撐部係與支撐樑96及介電體壁6中至少任一者之 間處來各自夾持支撐著位於支撐部之對應位置的介電體蓋板 112之被支撐部。另外，圖23所示範例中，支撐部i2ibl、 121b2係與支撐樑96之間處來各自夾持支撐著被支撐部 112A1、112B1。但是’支撐部121bl、121b2亦可與介電體 42 201127220 =，間處’抑或其與支撐樑96及物壁6兩者之間處來 各自夾持支撐著被支撐部112A1、112B1。In the lower portion of the first partial cover 112A, a step portion is formed so that the lower portion of the supported portion 112A1 is located above the supported portion mA, and the second portion can (10) === 112B1 ° dielectric cover The plate fixing device 120 is provided with a cylinder 122 that is fixed as a dielectric cover plate 201127220 and as a fixing mechanism. The pressure bar 121 and the cylinder field are dusty red. The red body (2) is placed above the support beam 96 and fixed relative to the device 2 either directly or via other components. The scrap rod 121: the shaft-shaped turning portion ma, the upper end portion of which is housed in the U; and the first support portion 12 (8), the second branch portion 121b2, and the third and fourth branch portions of the map are respectively It extends from the lower end portion of the fixed portion 121a to the side. The first support portion 121M is disposed under the second partial cover U2A. [5, the first support portion db! will abut on the lower side of the supported portion A1. The first support portion 2ibl has a thickness that is different from the step of the step portion. Therefore, there is no step between the lower side of the first support portion 1 and the lower portion of the portion of the i-th portion cover 112A except the supported portion 112A1. Similarly, the upper side of the second support portion 121b2 abuts against the lower portion of the supported portion 112B1. The relationship between the third support portion and the supported portion of the third partial cover, and the relationship between the fourth support portion and the supported portion of the fourth partial cover are connected to the first support portion 112bl The relationship with the supported portion 112A1 of the first partial cover 112A is the same. A part of the fixed portion 121a is provided on the side of the side end of the supported portion of the first to fourth partial cover plates. Each of the support portions is sandwiched between at least one of the support beam 96 and the dielectric body wall 6 to support the supported portion of the dielectric cover 112 at a corresponding position of the support portion. Further, in the example shown in Fig. 23, the support portions i2ib1, 121b2 and the support beam 96 are sandwiched and supported by the support portions 112A1, 112B1, respectively. However, the support portions 121b1, 121b2 may also sandwich and support the supported portions 112A1, 112B1 with the dielectric member 42 201127220 =, or between the support beam 96 and the object wall 6.
认紅體122連接有配管123、124。藉由配管m將氣體供 122内，並藉由配管123來進行排氣時，便可_ 移動至可動細之上端。相反地，藉她管123將氣 ，、給至缸體122内，並藉由配管124來進行 讓壓桿121移動至可動範圍之下端。 、j J 本實施形態之介電體蓋板固定裝置12〇中，讓墨桿⑵ 移動至可絲圍之上端時，便可將被固定部⑵&昇起 將支撐部删、⑵b2之上方面各自抵接至被支撐曰部 112A卜112B1之下方面。藉此，能相對於支撐襟％將作 介電體蓋板固定具之壓桿121加關定，使得其與支撐襟％ 之間的位置_不會改變。藉此，能勤_ 121來 電體蓋板112。 1 又，讓壓桿121移動至可動範圍之下端時，便可讓支ρ 部121b卜121b2之上方面各自從被支撐部112八卜之 下方面處脫離，以解除介電體蓋板112之固定。 圖24係本實施形態變形例之介電體蓋板固定裝置⑽ 的剖面圖。該變形例之介電體蓋板固定裝置13Q具備有齒條 131(作為體蓋板固定具)、以及齒輪作為固定機構），以取 代圖23之壓桿m及缸體122。錢131具有：軸狀被固定 部131a ’係插入貫通孔96a ;以及第i支撐部131M、第2 支樓部131b2、圖中未顯示之第3與第4支樓部，係各自從 被固定部131a下端部延伸至側邊。第}至第4支撐部之形狀 43 201127220 及作用係與圖23所示之壓桿121的第丨至第4支撐部相同。 齒輪(pinicm)132係設置於支撐樑96上方，且相對於本體容器 2以直接或經由其他組件之方式可旋轉地加以固定。被固定 部131a之一部份係設置於支禮樑96上方，該一部份之側面 係形成有與齒輪132嚆合的齒131c。 圖24所示變形例之介電體蓋板固定農置13〇中，藉由齒 輪132之迴轉而讓齒條131沿上下方向移動，藉此盘圖幻 所示介電體蓋板固定置12〇相同地，可進行介電體蓋板ιΐ2 之固定與解除。 本實施形態之其他結構、作狀效果皆與第2實施形態 相同。 “ [第4實施形態] 其次’說明作為本發明第4實施形態之「蓋板固定裝 疋裝置。圖25係本實施形態之介電體蓋板固 疋裝置的咖圖。本實施形態之感軸 置1—一二 m 有介電體蓋板固定具 二：第係各自從被固定部_下端部 ==第 =之形狀及作用皆與_ 通孔*被_18^部=皮_14_入貫 之一。卩伤係設置於支撐樑％上方， 201127220 違-部份形成有以水平方向貫穿的孔148e。介電體蓋板固定 裝置135更具備有蓋板149，係安裝於支樓樑％上方，以覆 蓋a又置於支樓樑96上方之被固定部148a的一部份。 固定機構140係限制被固定部148a之上下方向移動的機 構。該固定機構M0具有壓桿141與缸體142。壓桿141與 紅體142職成氣壓缸。缸體142可例如相對於介電體壁6 =到固定。壓桿141係沿水平方向設置，且貫穿蓋板149， 而可插入至孔148c。 : 142連接有配管143、144。藉由配管144將氣體供 内，並藉由配管143來進行排氣時，壓桿⑷ :犬“插人至孔M8e内。||此，可關麵定部购 =方_雜，以藉由介電體驗峡具i48來固定介 減地’藉由配管143將氣體供給至缸體142 、’稭由配官M4來進行排氣時，壓桿⑷會從孔嫌 固=148a便可沿上下方向移動，以解除 圖26係本實施形態變形例之介電體蓋板固定裝置⑼ 定變侧之介電體蓋板固定裝置136係具備有固 有：50 ’以取代圖25之固定機構Η。。固定機構二 ^^51(取代壓桿141)、以及讓該齒條⑸沿水平方向移 :的細2。齒條151係沿水平方向設 多 而插入至孔148c。 貝芽蓋板149 之迴轉來讓齒條151沿水平 電體蓋板固定|置135相同 該變形例中，藉由齒輪152 方向移動’藉此與圖25所示之介 201127220 地’可進行介電體蓋板112之固定與解除。 本實施形態之其他結構.、作用及效果轉第3實施 相同。 〜 [第5實施形態] 其次，說明作為本發明第5實施形態之「蓋板固定裝置 的介電體蓋板固定裝置。圖27係本實施形態之介電體蓋板固』 定裝置的剖面圖。圖28係圖27之介電體蓋板固定步 部份的立體圖。 < 本實施形態之感應耦合電漿處理裝置係具備有支撐樑 186(取代第2實施形態之支撐樑86)、介電體蓋板182(取代第 2實施形態之介電體蓋板82)、以及介電體蓋板固定裝置 187A(取代第2實施形態之介電體蓋板固定裝置87A)。 支撐架186形成有從上方面貫穿至下方面的丨個貫通 孔。貫通孔包含有從支撐樑86上方面至下方面依序設置之内 周部186a、186b。内周部186b之内徑係較内周部186a之内 徑更大。 介電體蓋板182係與第2實施形態之介電體蓋板82相同 地分割成4個部份。即，介電體蓋板M2具有第1部份蓋板 182A、第2部份蓋板182B、以及圖中未顯示之第3與第4 部份盖板。 第1部分蓋板182A係具有被支撐部182A卜被支撐部 182A1具有下方面、以及連續形成至該下方面的側端。被支 樓部182A1下方面為第1部份蓋板182A下方面之一部份’ 第1部份蓋板182A之下方面形成有段差部，以使得被支撐 46 201127220 部 182A1 的上方位 182B1。 下方面位在被支撑部182A1以外之部份之下方面 置。同樣地’第2部份蓋板刪係具有被支撐部 ，丨電體蓋板固定裝置1似係具備有介電體蓋板固定且 188A與固定麵190。介電體蓋板固定具188八*第2每施 形態之介電體蓋板固定具88A相同，係具有第丨支^部 188A1、第2支樓部188A2、被固定部188A3、以及圖中未 與第；^支撐部。第1至第4支揮部之形狀及作用 白與苐2貫施形態相同。 被固定部188A3係具有設置於蓋板182上 鉤部189。鉤部189係收納於内周部18价内。釣部⑽护成 有從上方觀之呈長方形的槽縫189a，且從該上方面連續形成 至内部。再者，鉤部189之内部於該槽縫_下方形成有斑 槽縫189a賴形·空洞部18%。從±方觀之，空洞部腿 之形狀為具有與槽縫職碰相等之直徑的圓形。槽縫驗 與空洞部職之邊界㈣軸有辆魏_ 189b的段差形成面。 '、 1 固定機構190係具有保持器191、馬達192、以及連接焉 達192之迴轉軸與保持器191的_ 193。圖28所示，保持 fQ1191 觸、連接至__上_板部 施、以及連接至該㈣職下端的鍵部We。圓板部胸 =言^=撐標186上方面的上方，並連接至接頭⑼。軸 ㈣㈣插人關部_與槽縫⑽a。鍵部胸具有能通 過槽縫職之大小的長方體形狀。鍵部抓係可自由迴轉 47 201127220 地收納於空洞部189b内。又，鍵部191c之上下方向的尺寸 約略等於空洞部189b之上下方向的尺寸。 、 本實施形態之介f體蓋板m定裝置係藉由旋轉馬 達192之迴轉轴，讓保持器191之鍵部191c於空洞部以外 内進行迴轉。當鍵部191c停止於能通過槽縫189a之位置以 外的位置時’鍵部191e之上方面便會抵接至連結槽縫_ 與空洞部18%的段絲成面，㈣介電體蓋板蚊具⑽a 固定，藉此’可藉由介電體蓋板固定具188A來固定介 蓋板182。 當鍵部191c停止於能通過槽縫·之位置時，鍵部⑼。 可通過槽縫189a’介電體蓋板固定具18认便可朝下方移動， 藉此’便可解除介電體蓋板182之固定。 本實施形態之其他結構、侧及絲皆與第2實施形態 相同。 少心 [第6實施形態] 其次’說明作為本發明第6實施形態之「蓋板固定裂置 的介電體紐g]絲置egj 29係本實細彡態之介電體蓋板固 定裝置的圖。本實施形態之感應柄合賴處縣置係具 備有介電體蓋板162(取代第2實施形態之介電體蓋板呦了 以及^電體蓋板g]絲置29〇(取似2實卿紅介電體蓋 板口疋m7A)。介電體蓋板162亦可分割成複數個部份， 亦可科行分割。介電體蓋板固定裝置29G之結構與第2實 把U固疋機構9〇相同。因此，於介電體蓋板固定裝置 48 201127220 四〇之構成要件則賦予與固定機構9〇之構成要件相同 號。 介電體蓋板162係具有：蓋板本體祕，係具有下方面 及上方面，且構成介電體蓋板162之主要部份；以及釣部 獅’係安裝於該蓋板本體級上方面。釣部刪係收納 於支撐樑86之内周部_内。鉤部咖形成約略圓筒形狀， 且上罐近之-部份_徑聽其他部份之陳更小。 162B之上_近之—部耗職與卡合組件％之複數 2 9和相互卡合的卡合部翻。卡合部咖係對應於 =明之介電體蓋板之被支撺部。因此，本實施形態中，作 為被支撐部之卡合部162B1係設置於蓋板本體腿上方面 ^方。卡合部162B1具有下方面、以及連續形成至 面的側端(卡合部⑹抝之内周側的端部）。 介電體蓋板固定農置中，壓桿91之第6部份9 口組件94之卡合部94c係收納於鉤部162β内。卡 94係對應於本發明之介電體蓋板固定具，卡合級件^以外 严⑽的構成要件，係對應於提升作為 電體盍板固疋具之卡合組件94(即本發明之固定機構 2，卡合部他係對應於本發明之支撐部，卡合組件& 5部94e以外之部份則對應於本發明之被 部之卡合雜係設置於作為被支撐部之卡合部 =與盍板本體162A上方面之間處。構成被固定部之平板部 之二部份係設置於卡合部腿】之側端的側邊。 本實施形態中，從配管％職體供給施體92内部空 201127220 間時，_ 9〗便會移動至可 ，複數個平板部94b之下 合蝴16㈣卡 此狀態下，作為介電體蓋_定 w於 於支撐樑86而受到_叮^卡^且件94便不會相對 &，可將介電體蓋板162取下。 知止攸配官95將氣體供給至 體92内部空間將細 2内&間’並攸紅 而h推Ρ上Γ 時昼桿91便會因彈簧93之彈力 第6部t組件％之複數個平板部她之下端部藉由 卡合^部162B月張。其結果’複數個卡合部⑽會 ,"之卡合部162B1’作為介電體蓋板固定具之 卡σ '、且件94則會相對於支撐樑86而受到固定，使其與支撐 樑86之位置關係不會改變。藉此，能固定介電體蓋板162 而使其，支撐樑86之間的位置_不會改變。 本貫施形紅其他結構、作用及效果皆與第2實施形態 相同。 “ [第7實施形態] 其次，說明作為本發明第7實施形態之「蓋板固定裝置」 的介電體蓋板S]定裝置。圖3〇係本實郷態之介電體蓋板固 定裝置的剖面圖。本實施形態之感應耦合電漿處理裝置具 有：介電體蓋板382(取代第5實施形態之介電體蓋板182)、 以及介電體蓋板固定裝置390(取代第5實施形態之介電體蓋 板固定裝置187Α)。介電體蓋板382亦可分割成複數個部份， 亦可不進行分割。介電體蓋板固定裝置390之結構與第5實 201127220 疋機構190相同。因此’於介電體蓋板固定裝置 之構成要件則賦予與固定機構⑽之構成要件相同的符 唬0 介電體蓋板382具有··蓋板本體職，係具有下方面及 且構成Μ電體蓋板382之主要部份；以及釣部382Β， 係安裝於該蓋板本體382Α上方面。釣部難係收納於支撐 標J86之内周部内。鉤部382Β形成約略圓筒形狀，且 上端附近之-部份的内徑係較其他部份之内徑更小。 鉤。卩382Β之構造與第5實施形態之鉤部189相同。即， 釣部382Β形成有從上方觀之呈長方形的槽縫麗&，且從該 上方面連續形成至内部。再者，鉤部382β之内部於該槽縫 ^2Ba下方形成有與槽縫38犯a連續形成的空洞部382Bb。 仗方觀之’空洞部382Bb之形狀為具有與槽縫3幻Ba長徑 相等之直徑的圓形。槽縫382Ba與空洞部38·之邊界位置 形成有連結槽縫382Ba與空洞部382Bb的段差形成面。 立又，鉤部382B係具有形成於槽縫382Ba周邊的被支標 j 382B卜因此，本實施形態中，被支撐部382B1係設置於 盖板本體382A上方面的上方。被支撐部382B1具有下方面、 以及連縯形成至該下方面的側端(槽縫382Ba的端部）。 /介電體蓋板固定裝置390之保持器191中，軸部19ib 係插入内周部186a與槽縫382Ba。鍵部I91e則具有能.通過 槽縫382Ba之大小的長方體形狀。鍵部19化係可迴轉地收納 於工洞部382Bb内。又’鍵部191e之上下方向的尺寸係與 空洞部382Bb之上下方向尺寸約略相等。 51 201127220 保持器191係對應於本發明之介電體蓋板固定具，保持 器191以外之介電體蓋板固定裝置39〇之構成要件係對應於 本發明之固定機構。保持器191之鍵部191c包含有可抵接至 被支撐部382B1下方面的2個支撐部191cl、191c2。保持器 191中，支撐部191cl、191c2以外之部份則對應於本發明之 被固定部。支卿191ca、191e2係設置於被支料382B1 下方面與蓋板本體382A上方面之間處。構成被固定部之軸 部191b的一部份係設置於被支撐部382B1之側端的側邊。 本貫加形態之介電體蓋板固定裝置390中，讓馬達192 之迴轉軸進行迴轉時’保持器191之鍵部191c便會於空洞部 82Bb内進行迴轉。當鍵部191c停止於可通過槽縫 位置以外之彳m 部191。卜191e2上方面便會抵接於 被支撐部382B1下方面’以固定介電體蓋板382。 當鍵部191c停止於可通過槽縫382加之位置時，藉由讓 鍵部19lc通過槽縫382Ba，便可讓介電體蓋板如朝下方移 動。藉此，可解除介電體蓋板382之固定。 本貫施_之其他結構、作肢效果皆與第5實施形態 種撤^卜彳丨^月亚^限定於前述各實施形態’亦可進行各 =。列”本發明中，固定蓋板固定具 於各實施形態所示者。 得丄个π心 【圖式簡單說明】 圖1係s有本發明第！實施形態之蓋板固定具的感 52 201127220 應輕合電漿處理裝置的剖面圖。 圖2係圖1中介電體壁及懸掛具的立體圖。 圖3係圖1中介電體壁及高頻天線的立體圖。 圖4係圖1中蓋板及蓋板固定具的底面圖。 圖5係圖4中5-5線所示位置的剖面圖。 圖6係說明蓋板固定具之固定方法一範例的圖4中 6-6線所示的剖面圖。 圖7係蓋板固定具之固定方法之其他範例的剖面 圖。 圖8係比較例之蓋板的底面圖。 —圖9係本發明第1實施形態之第1變形例的蓋板及 蓋板固定具的剖面圖。 圖10係本發明第1實施形態之第2變形例的蓋板 及蓋板固定具的底面圖。 圖11係本發明第1實施形態之第3變形例的蓋板 及盍板固定具的底面圖。 圖12係第3變形例之蓋板固定具中側部的形狀之 一範例的剖面圖。 圖13係第3變形例之蓋板固定具中側部的形狀之 其他範例的立體圖。 圖14係本發明第丨實施形態之第4變形例的蓋板 及盍板固定具的底面圖。 —圖15係本發明第丨實施形態之第5變形例的蓋板 及蓋板固定具的剖面圖。 53 201127220 圖16係本發明第1實施形態之第6變形例的蓋板 及蓋板固定具的底面圖。 圖17係說明第6變形例之蓋板及蓋板固定具的圖 16中17 -17線所示的剖面圖。 圖18係蓋板固定具之固定方法的其他範例之剖面 圖。 圖19係蓋板固定具之固定方法的又一範例之剖面 圖。 圖20係蓋板固定具之固定方法的再一範例之剖面 圖。 圖21係本發明第2實施形態之蓋板固定裝置的剖 面圖。 圖22係圖21所示蓋板固定裝置之其他狀態的剖面 圖。 圖23係本發明第3實施形態之蓋板固定裝置的剖 面圖。 圖24係本發明第3實施形態之變形例的蓋板固定 裝置之剖面圖。 圖25係本發明第4實施形態之蓋板固定裝置的剖 面圖。 圖26係本發明第4實施形態之變形例的蓋板固定 裝置之剖面圖。 圖27係本發明第5實施形態之蓋板固定裝置的剖 面圖。 54 201127220 圖28係圖27中蓋板固定裝置之部份立體圖。 圖29係本發明第6實施形態之蓋板固定裝置的剖 面圖。 圖30係本發明第7實施形態之蓋板固定裝置的剖 面圖。 【主要元件符號說明】 2 本體容器 4 天線室 5 處理室 6 介電體壁 6A 第1部份壁 6B 第2部份壁 6C 第3部份壁 6D 第4部份壁 7 支撐架 8A〜8E懸掛具 12 介電體蓋板 12A 第1部份蓋板 12Aa 切除部 12A1 、12B1被支撐部 12Ala下方面 12Alb側端 12B 第2部份蓋板 12Ba 切除部 12Bla下方面 12Blb侧端 12C 第3部份蓋板 12Ca 切除部 12D 第4部份蓋板 12Da 切除部 13 天線 14 整合器 15 1¾頻電源 16 支撐樑 18A、 18B1、18B2、18B3、 18B4介電體蓋板固定具 18A1 、18A2支撐部 18 A3 被固定部 19A1 、19A2螺絲 20 氣體供給裝置 55 201127220 21 氣體供給管 22 載置台 22A 載置面 24 絕緣體框 25 支柱 26 蛇腹管 27 閘閥 28 整合器 29 南頻電源 30 真空裝置 31 排氣管 32A 第1部份蓋板 32A1 被支樓部 32Ala下方面 32Alb側端 32B 第2部份蓋板 32B1 被支撐部 32Bla下方面 32Blb側端 38A 介電體蓋板固定具 38A1、 • 38A2 支撐部 3 8 A3 被固定部 48B1 〜48B8、48C1 〜48C4、 58A 介電體蓋板固定具 58B1 〜58B8、58C1〜58C4、 58D1〜58D4 介電體蓋板固定具 58E1~58E4、79A、78B1 〜78B4 介電體蓋板固定具 79 A1、 •79A2支撐部 79A3 被固定部 80 介電體蓋板 80A 第1部份蓋板 80 A1 被支撐部 80Ala下方面 80Alb側端 80Aa 切除部 80B 第2部份蓋板 80B1 被支撐部 80Bla 下方面 80Blb 側端 80Ba 切除部 80C 第3部份蓋板 80Ca 切除部 80D 第4部份蓋板 80Da 切除部 81A 介電體蓋板固定具 81A1 支撐部 81A3 被固定部 56 201127220 81A3a凸部 81A3b螺牙 81B1〜81B4介電體蓋板固定82介電體蓋板 具 82A 第1部份蓋板 82B 第2部份蓋板 86 支撐樑 87A 介電體蓋板固定製 88A1 、88A2 支撐部 89 釣部 91 壓桿 91b 第2部份 91d 第4部份 91f 第6部份 93 彈簧 94a 凸緣 94c 卡合部 112 介電體蓋板 112A1被支撐部 112B1被支撐部 121 壓桿 121bl 、121b2支攆邹 123、 124 配管 131 齒條 131bl 、131b2 支撐部 82A1被支撐部 82B1被支撐部 86a〜86d 内周部 88A介電體蓋板固定具 88A3被支撐部 90 固定機構 91a 第1部份 91c 第3部份 91e 第5部份 92 缸體 94 卡合組件 94b 平板部 95 配管 112A第1部份蓋板 112B第2部份蓋板 120 介電體蓋板固定裝置 121a被固定部 122 缸體 130介電體蓋板固定裝置 131a被固定部 131c 齒 57 201127220 132 齒輪 136 介電體盍板固定1置 141 壓桿 143、144 配管 148a 固定部 148c 孔 150 固定機構 152 齒輪 162 A 蓋板本體 162B1卡合部 182 A 第1部份蓋板 182B 第1部份蓋板 186 支撐樑 187A 介電體蓋板固定裝置 188A1 、188A2支撐部 189 釣部 189b 空洞部 191 保持器 191b 軸部 192 馬達 201a、 2〇lb中間組件 203a、 203b中間組件 222夂〜；2220部份蓋板 382 介電體蓋板 135 介電體蓋板固定裳置 140 固定機構 142 缸體 148 介電體蓋板固定具 148bl 、148b2 支撐部 149 蓋板 151 齒條 162 介電體蓋板 162B 鉤部 182 介電體蓋板 182A1被支撐部 182B1被支撐部 186a、 186b 内周部 188 A 介電體蓋板固定具 188A3被固定部 189a 槽縫 190 固定機構 191a 圓板部 191c 鍵部 193 接頭 202 中間組件 222 介電體蓋板 290 介電體蓋板固定裝置 382A 蓋板本體 58 201127220 382B鉤部 382B1被支撐部 382Ba槽缝 382Bb空洞部 390 介電體蓋板固定裝置 S 基板 59The red body 122 is connected to the pipes 123 and 124. When the gas is supplied to the inside of the 122 by the pipe m and is exhausted by the pipe 123, it can be moved to the upper end of the movable fine. Conversely, the gas is supplied to the cylinder 122 by the tube 123, and the pressure rod 121 is moved to the lower end of the movable range by the pipe 124. In the dielectric cover fixing device 12 of the present embodiment, when the ink rod (2) is moved to the upper end of the wire, the fixed portion (2) & can be lifted to remove the support portion, and (2) b2 Each abuts to the underside of the supported jaw 112A 112B1. Thereby, the pressing rod 121 serving as the dielectric cover fixture can be locked relative to the support ,% so that the position _ between it and the support 襟% does not change. Thereby, the electric body cover 112 can be used. 1 Further, when the pressing rod 121 is moved to the lower end of the movable range, the upper portion of the supporting portion 121b 121b2 is detached from the side of the supported portion 112 to release the dielectric cover 112. fixed. Fig. 24 is a cross-sectional view showing a dielectric cover fixing device (10) according to a modification of the embodiment. The dielectric cover fixing device 13Q of this modification is provided with a rack 131 (as a body cover fixture) and a gear as a fixing mechanism) to replace the pressing rod m and the cylinder 122 of Fig. 23 . The money 131 has a shaft-shaped fixed portion 131a' inserted into the through hole 96a, and an i-th support portion 131M, a second branch portion 131b2, and third and fourth branch portions not shown, which are fixed from each other. The lower end of the portion 131a extends to the side. The shape of the fourth to fourth support portions 43 201127220 and the action system are the same as the fourth to fourth support portions of the presser bar 121 shown in Fig. 23 . A pinion 132 is disposed above the support beam 96 and is rotatably fixed relative to the body container 2 either directly or via other components. A portion of the fixed portion 131a is disposed above the support beam 96, and a side portion of the portion is formed with a tooth 131c that is coupled to the gear 132. In the dielectric cover plate of the modified example shown in FIG. 24, the rack 131 is moved in the up and down direction by the rotation of the gear 132, whereby the dielectric cover is fixed by the disk. Similarly, the fixing and releasing of the dielectric cover ι 2 can be performed. The other configurations and effects of the embodiment are the same as those of the second embodiment. [Fourth Embodiment] Next, a description will be given of a "cover fixing device" according to a fourth embodiment of the present invention. Fig. 25 is a diagram showing a dielectric cover fixing device of the present embodiment. The shaft is set to 1 to 2 m. There is a dielectric cover fixture 2: the first line is fixed from the fixed part _ lower end == the shape and function of the = _ through hole * is _18 ^ part = skin _14 One of the _ entrances. The smash system is placed above the support beam %, and the 201127220 is partially formed with a hole 148e penetrating in the horizontal direction. The dielectric cover fixing device 135 is further provided with a cover 149 which is installed in the branch Above the beam %, to cover a portion of the fixed portion 148a which is placed above the branch beam 96. The fixing mechanism 140 is a mechanism for restricting the movement of the fixing portion 148a in the upper and lower directions. The fixing mechanism M0 has a pressing rod 141 and The cylinder 142. The pressing rod 141 and the red body 142 serve as pneumatic cylinders. The cylinder 142 can be fixed, for example, relative to the dielectric wall 6 =. The pressing rod 141 is disposed in the horizontal direction and penetrates through the cover 149, and can be inserted. To the hole 148c.: 142 is connected to the pipes 143, 144. The gas is supplied to the inside by the pipe 144, and the pipe 1 is provided. When the 43 is exhausted, the pressure bar (4): the dog "inserts into the hole M8e. ||This can be used to supply the gas to the cylinder 142 by the pipe 143 by means of the dielectric experience gable i48, and the straw is supplied by the officer M4. When exhausting, the pressure bar (4) can be moved in the up and down direction from the hole sufficiency = 148a to release the dielectric cover plate fixing device of the dielectric cover fixing device (9) of the modification of the embodiment of the present embodiment. The device 136 is provided with an inherent: 50' instead of the fixing mechanism of FIG. . The fixing mechanism 2^51 (instead of the pressing rod 141) and the thinning 2 for moving the rack (5) in the horizontal direction. The rack 151 is inserted in the horizontal direction and inserted into the hole 148c. The rotation of the shell bud cover 149 causes the rack 151 to be fixed along the horizontal electric body cover plate. The same applies to the 135. In this modification, the gear 152 is moved in the direction of the gear 152. The electric body cover 112 is fixed and released. The other configurations, operations, and effects of the present embodiment are the same as those of the third embodiment. [Fifth Embodiment] Next, a dielectric cover fixing device for a cover fixing device according to a fifth embodiment of the present invention will be described. Fig. 27 is a cross section of the dielectric cover fixing device of the embodiment. Fig. 28 is a perspective view showing a portion of the step of fixing the dielectric cover of Fig. 27. <Inductively coupled plasma processing apparatus according to the present embodiment is provided with a support beam 186 (instead of the support beam 86 of the second embodiment), The dielectric cover 182 (instead of the dielectric cover 82 of the second embodiment) and the dielectric cover fixing device 187A (instead of the dielectric cover fixing device 87A of the second embodiment). One through hole is formed from the above aspect to the next aspect. The through hole includes inner peripheral portions 186a and 186b which are sequentially disposed from the upper side to the lower side of the support beam 86. The inner peripheral portion 186b has an inner diameter which is smaller than the inner circumference. The inner diameter of the portion 186a is larger. The dielectric cover 182 is divided into four portions in the same manner as the dielectric cover 82 of the second embodiment. That is, the dielectric cover M2 has the first partial cover. The plate 182A, the second partial cover plate 182B, and the third and fourth partial cover plates not shown in the drawings. The cover plate 182A has a supported portion 182A having the lower side of the supported portion 182A1 and a side end continuously formed to the lower side. The underside of the branch portion 182A1 is a part of the lower portion of the first partial cover 182A. The lower portion of the first partial cover plate 182A is formed with a step portion so as to be supported by the upper direction 182B1 of the portion 201182220 portion 182A1. The lower position is placed below the portion other than the support portion 182A1. Similarly 2 Part of the cover plate has a supported portion, and the electric body cover fixing device 1 is similarly provided with a dielectric cover plate fixed 188A and a fixing surface 190. The dielectric cover plate fixing device 188 8* 2nd The dielectric cover panel fixture 88A has the same configuration, and has a second support portion 188A1, a second branch portion 188A2, a fixed portion 188A3, and a support portion. The first to fourth portions are provided. The shape and function of the fulcrum are the same as those of the 白2. The fixed portion 188A3 has a hook portion 189 provided on the cover plate 182. The hook portion 189 is housed in the inner peripheral portion 18. The fishing portion (10) is protected by the fishing portion (10). The rectangular slit 189a is viewed from above and continuously formed from the upper side to the inside. The inside of the hook portion 189 is formed with a groove portion 189a and a hollow portion 18% below the slot _. From the square view, the shape of the cavity portion is a circle having a diameter equal to the slot collision. The groove is inspected with the boundary of the hollow part (4) The shaft has a step forming surface of Wei _ 189b. ', 1 The fixing mechanism 190 has a retainer 191, a motor 192, and a rotary shaft and holder 191 connected to the 192. _ 193. As shown in Fig. 28, the fQ1191 is touched, connected to the __upper plate, and the key We are connected to the lower end of the (four) position. The round plate chest = the word ^ = the top of the upper part of the 186, and connected to the joint (9). Axis (4) (4) Insert the door _ with the slot (10) a. The key chest has a rectangular parallelepiped shape that can pass through the slot. The key gripping system can be freely swung 47 201127220 and stored in the hollow portion 189b. Further, the dimension of the upper portion of the key portion 191c is approximately equal to the dimension of the upper and lower sides of the cavity portion 189b. In the embodiment of the present invention, the key portion 191c of the retainer 191 is rotated in the outside of the cavity by rotating the rotary shaft of the motor 192. When the key portion 191c is stopped at a position other than the position at which the slit 189a can pass, the upper portion of the key portion 191e abuts against the joint slot _ with the segment wire of the hollow portion 18%, and (4) the dielectric cover The mosquito (10)a is fixed, whereby the dielectric cover 182 can be fixed by the dielectric cover fixture 188A. When the key portion 191c is stopped at a position where it can pass through the slot, the key portion (9). The fixing of the dielectric cover 182 can be released by the slot 189a' dielectric cover fixture 18 being moved downward. The other structures, sides and wires of this embodiment are the same as those of the second embodiment. [Embodiment 6] Next, a dielectric insulator cover fixing device which is a dielectric insulator of a cover plate which is fixedly ruptured in a sixth embodiment of the present invention will be described. The sensor handle of the present embodiment is provided with a dielectric cover 162 (instead of the dielectric cover of the second embodiment and the electrical cover g). The dielectric cover 162 can be divided into a plurality of parts, and can also be divided into sections. The structure of the dielectric cover fixing device 29G and the second Therefore, the U-solid structure 9 is the same. Therefore, the constituent elements of the dielectric cover fixing device 48 201127220 are given the same number as the constituent elements of the fixing mechanism 9 . The dielectric cover 162 has: a cover The board body has the following aspects and the above aspects, and constitutes a main part of the dielectric cover 162; and the fishing lion ' is attached to the cover body level. The fishing part is stored in the support beam 86 In the inner part of the inner part, the hook part is formed into a roughly cylindrical shape, and the upper part of the can is closer to the other part. Above the 162B, the occupant part of the occupant and the engaging component % 2 9 and the engaging portion of the mutual engagement are turned over. The engaging part is corresponding to the supported portion of the dielectric cover of the Ming. In the present embodiment, the engaging portion 162B1 as the supported portion is provided on the leg of the cover body. The engaging portion 162B1 has the lower side and the side end continuously formed to the face (the engaging portion (6) The inner peripheral side end portion). The dielectric cover plate is fixed in the agricultural device, and the engaging portion 94c of the sixth partial 9-port assembly 94 of the pressing rod 91 is housed in the hook portion 162β. The card 94 corresponds to the present invention. The dielectric cover fixing device and the component of the clamping member (10) are corresponding to the clamping assembly 94 for lifting the electric raft fixing device (ie, the fixing mechanism 2 of the present invention, the engaging portion) It corresponds to the support portion of the present invention, and the portion other than the engaging member & 5 portion 94e is provided in the engaging portion of the portion corresponding to the present invention in the engaging portion as the supported portion = with the seesaw body Between the upper sides of the 162A, the two portions of the flat portion constituting the fixed portion are provided on the side of the side end of the engaging portion leg. In the form, when the internal body of the pipe is supplied to the interior of the body 92, the space is 201127220, the _ 9〗 will move to the state, and the plurality of flat plate portions 94b will be closed under the 16 (four) card state, as the dielectric cover _ fixed w The support beam 86 is subjected to the _ 叮 ^ card ^ and the member 94 will not be opposite & the dielectric cover 162 can be removed. The 攸 攸 攸 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 95 Inside & ' 攸 攸 而 而 而 而 而 而 而 而 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 91 As a result, the plurality of engaging portions (10) will have the engaging portion 162B1' as the card σ ' of the dielectric cover fixture, and the member 94 will be fixed relative to the support beam 86 to support it. The positional relationship of the beam 86 does not change. Thereby, the dielectric cover 162 can be fixed such that the position_ between the support beams 86 does not change. The other structures, operations, and effects of the present embodiment are the same as those of the second embodiment. [Embodiment 7] Next, a dielectric cover S] fixing device which is a "cover fixing device" according to a seventh embodiment of the present invention will be described. Fig. 3 is a cross-sectional view showing the dielectric cover fixing device of the present embodiment. The inductively coupled plasma processing apparatus of the present embodiment includes a dielectric cover 382 (instead of the dielectric cover 182 of the fifth embodiment) and a dielectric cover fixing device 390 (instead of the fifth embodiment) The electric body cover fixing device 187Α). The dielectric cover 382 can also be divided into a plurality of portions or not divided. The structure of the dielectric cover fixing device 390 is the same as that of the fifth embodiment 201127220 疋 mechanism 190. Therefore, the components of the dielectric cover fixing device are given the same components as the fixing mechanism (10). The dielectric cover 382 has a cover body, which has the following aspects and constitutes a power supply. The main portion of the body cover 382; and the fishing portion 382Β are mounted on the cover body 382. It is difficult for the fishing section to be stored in the inner circumference of the support J86. The hook portion 382 is formed into a substantially cylindrical shape, and the inner diameter of the portion near the upper end is smaller than the inner diameter of the other portion. hook. The structure of the 卩382Β is the same as that of the hook 189 of the fifth embodiment. That is, the fishing portion 382 is formed with a rectangular slit groove & as viewed from above, and is continuously formed to the inside from the above. Further, inside the hook portion 382β, a hollow portion 382Bb formed continuously with the slit 38 is formed below the slit ^2Ba. The shape of the hollow portion 382Bb of the square side is a circle having a diameter equal to the long diameter of the slot 3. A step forming surface that connects the slit 382Ba and the cavity portion 382Bb is formed at a boundary position between the slit 382Ba and the cavity portion 38. Further, the hook portion 382B has the supported j 382B formed around the slit 382Ba. Therefore, in the present embodiment, the supported portion 382B1 is provided above the cover body 382A. The supported portion 382B1 has the lower side and the side end (the end of the slit 382Ba) that is continuously formed to the lower side. In the holder 191 of the dielectric cover fixing device 390, the shaft portion 19ib is inserted into the inner peripheral portion 186a and the slit 382Ba. The key portion I91e has a rectangular parallelepiped shape that can pass through the slit 382Ba. The key portion 19 is rotatably housed in the working portion 382Bb. Further, the size of the upper portion of the key portion 191e is approximately equal to the size of the upper and lower portions of the cavity portion 382Bb. 51 201127220 The holder 191 corresponds to the dielectric cover fixture of the present invention, and the constituent elements of the dielectric cover fixing device 39 other than the holder 191 correspond to the fixing mechanism of the present invention. The key portion 191c of the holder 191 includes two support portions 191cl and 191c2 that can abut against the lower portion of the supported portion 382B1. In the holder 191, portions other than the support portions 191c1, 191c2 correspond to the fixed portion of the present invention. The branch 191ca, 191e2 is disposed between the lower side of the material to be supported 382B1 and the upper side of the cover body 382A. A part of the shaft portion 191b constituting the fixed portion is provided on the side of the side end of the supported portion 382B1. In the dielectric cover panel fixing device 390 of the present embodiment, when the rotary shaft of the motor 192 is rotated, the key portion 191c of the retainer 191 is rotated in the hollow portion 82Bb. When the key portion 191c is stopped at the 彳m portion 191 which is beyond the slot position. The upper surface of the 191e2 abuts against the lower side of the supported portion 382B1 to fix the dielectric cover 382. When the key portion 191c is stopped at a position which can be applied through the slit 382, the dielectric cover can be moved downward by allowing the key portion 19lc to pass through the slit 382Ba. Thereby, the fixing of the dielectric cover 382 can be released. The other structures and limb effects of the present embodiment are different from those of the fifth embodiment, and are limited to the above embodiments. In the present invention, the fixed cover fixing device is shown in each embodiment. A π heart is obtained [a brief description of the drawings] Fig. 1 is a sizing of a cover fixture according to the embodiment of the present invention 52 201127220 Fig. 2 is a perspective view of the dielectric wall and the suspension of Fig. 1. Fig. 3 is a perspective view of the dielectric wall and the high frequency antenna of Fig. 1. Fig. 4 is a cover of Fig. 1. Fig. 5 is a cross-sectional view showing the position shown by the line 5-5 in Fig. 4. Fig. 6 is a view showing the fixing method of the cover fixing device, which is shown by the line 6-6 in Fig. 4. Fig. 7 is a cross-sectional view showing another example of a method of fixing a cover fixture. Fig. 8 is a bottom view of a cover plate of a comparative example. Fig. 9 is a cover plate according to a first modification of the first embodiment of the present invention. Fig. 10 is a bottom view of a cover plate and a cover fixture according to a second modification of the first embodiment of the present invention. Fig. 11 is a third modification of the first embodiment of the present invention. Fig. 12 is a bottom view showing the shape of the side portion of the cover fixture of the third modification. Fig. 13 is a perspective view showing another example of the shape of a side portion of a cover fixture according to a third modification. Fig. 14 is a bottom view of a cover plate and a seesaw fixture according to a fourth modification of the third embodiment of the present invention. Fig. 15 is a cross-sectional view showing a cover plate and a cover fixture according to a fifth modification of the embodiment of the present invention. Fig. 16 is a cover and a cover according to a sixth modification of the first embodiment of the present invention. Fig. 17 is a cross-sectional view showing the cover plate and the cover fixture of the sixth modification, taken along line 17-17 of Fig. 16. Fig. 18 is another example of the method of fixing the cover fixture. Fig. 19 is a cross-sectional view showing still another example of a method of fixing a cover fixture. Fig. 20 is a cross-sectional view showing still another example of a method of fixing a cover fixture. Fig. 21 is a second embodiment of the present invention. Fig. 22 is a cross-sectional view showing another embodiment of the cover fixing device shown in Fig. 21. Fig. 23 is a cross-sectional view showing a cover fixing device according to a third embodiment of the present invention. 3 is a sectional view of a cover fixing device according to a modification of the embodiment Figure 25 is a cross-sectional view of a cover fixing device according to a fourth embodiment of the present invention. Figure 26 is a cross-sectional view of a cover fixing device according to a modification of the fourth embodiment of the present invention. Fig. 28 is a partial perspective view of the cover fixing device of Fig. 27. Fig. 29 is a sectional view showing a cover fixing device according to a sixth embodiment of the present invention. Fig. 30 is a seventh embodiment of the present invention. Sectional view of the cover plate fixing device. [Main component symbol description] 2 Main body container 4 Antenna chamber 5 Processing chamber 6 Dielectric body wall 6A Part 1 wall 6B Part 2 wall 6C Part 3 wall 6D 4 partial wall 7 support frame 8A to 8E suspension device 12 dielectric cover plate 12A first partial cover plate 12Aa cutout portion 12A1, 12B1 supported portion 12Ala lower side 12Alb side end 12B second partial cover plate 12Ba cutout portion 12Bla lower side 12Blb side end 12C third part cover 12Ca cut-out part 12D fourth part cover 12Da cut-out part 13 antenna 14 integrator 15 13⁄4 frequency power supply 16 support beam 18A, 18B1, 18B2, 18B3, 18B4 dielectric Cover fixture 18A1, 18A2 Supporting portion 18 A3 Fixing portion 19A1, 19A2 Screw 20 Gas supply device 55 201127220 21 Gas supply pipe 22 Mounting table 22A Mounting surface 24 Insulator frame 25 Pillar 26 Snake tube 27 Gate valve 28 Integrator 29 Southern power supply 30 Vacuum device 31 Row Air pipe 32A Part 1 cover plate 32A1 Bottom portion 32Ala Lower side 32Alb side end 32B Second part cover plate 32B1 Supported portion 32Bla Lower side 32Blb Side end 38A Dielectric cover plate fixture 38A1, • 38A2 Support Portion 3 8 A3 Fixing portions 48B1 to 48B8, 48C1 to 48C4, 58A Dielectric cover fixing members 58B1 to 58B8, 58C1 to 58C4, 58D1 to 58D4 Dielectric cover fixing members 58E1 to 58E4, 79A, 78B1 to 78B4 Dielectric cover fixture 79 A1, 79A2 support portion 79A3 Fixing portion 80 Dielectric cover 80A First partial cover 80 A1 Supported portion 80Ala Lower side 80Alb side end 80Aa Cut-away portion 80B Part 2 Cover plate 80B1 Supported portion 80Bla Underside 80Blb Side end 80Ba Cut-away portion 80C Third partial cover 80Ca Cut-out portion 80D Fourth-part cover 80Da Cut-out portion 81A Dielectric cover plate holder 81A1 Support portion 81A3 Fixed portion 56 201127220 81A3a convex portion 81A3b screw 81B1 to 81B4 dielectric cover fixing 82 dielectric cover 82A first partial cover 82B second partial cover 86 support beam 87A dielectric cover Fixed 88A1, 88A2 support portion 89 Fishing portion 91 Pressure bar 91b Second portion 91d Fourth portion 91f Part 6 93 Spring 94a Flange 94c Engagement portion 112 The dielectric cover plate 112A1 is supported by the support portion 112B1 Portion 121 pressure bar 121b1, 121b2 support 123, 124 pipe 131 rack 131bl, 131b2 support portion 82A1 by support portion 82B1 by support portion 86a to 86d inner peripheral portion 88A dielectric cover fixture 88A3 is fixed by support portion 90 Mechanism 91a Part 1 91c Part 3 91e Part 5 92 Cylinder 94 Engagement Assembly 94b Flat Section 95 Piping 112A Part 1 Cover 112B Part 2 Cover 120 Dielectric Cover Fixing Device 121a fixed portion 122 cylinder 130 dielectric cover fixing device 131a fixed portion 131c tooth 57 201127220 132 gear 136 dielectric body plate fixing 1 set 141 pressing rod 143, 144 pipe 148a fixing portion 148c hole 150 fixing mechanism 152 Gear 162 A cover Body 162B1 Engagement portion 182 A First partial cover plate 182B First partial cover plate 186 Support beam 187A Dielectric cover plate fixing device 188A1, 188A2 Support portion 189 Fishing portion 189b Hollow portion 191 Holder 191b Shaft portion 192 Motor 201a, 2〇 lb intermediate assembly 203a, 203b intermediate assembly 222 夂 〜 2220 partial cover 382 dielectric cover 135 dielectric cover fixed skirt 140 fixing mechanism 142 cylinder 148 dielectric cover fixture 148b1, 148b2 support portion 149 cover plate 151 rack 162 dielectric cover plate 162B hook portion 182 dielectric cover plate 182A1 by support portion 182B1 by support portion 186a, 186b inner peripheral portion 188 A dielectric cover plate fixture 188A3 Fixed portion 189a Slot 190 Fixing mechanism 191a Disc portion 191c Key portion 193 Joint 202 Intermediate assembly 222 Dielectric cover 290 Dielectric cover fixing device 382A Cover plate body 58 201127220 382B Hook portion 382B1 is supported portion 382Ba groove Seam 382Bb cavity portion 390 dielectric cover fixing device S substrate 59