CN103506340A - 一种喷淋装置 - Google Patents
一种喷淋装置 Download PDFInfo
- Publication number
- CN103506340A CN103506340A CN201210226886.2A CN201210226886A CN103506340A CN 103506340 A CN103506340 A CN 103506340A CN 201210226886 A CN201210226886 A CN 201210226886A CN 103506340 A CN103506340 A CN 103506340A
- Authority
- CN
- China
- Prior art keywords
- spray
- spray head
- spray equipment
- apertures
- equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/60—Arrangements for mounting, supporting or holding spraying apparatus
- B05B15/68—Arrangements for adjusting the position of spray heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/0217—Use of a detergent in high pressure cleaners; arrangements for supplying the same
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/0288—Ultra or megasonic jets
Landscapes
- Nozzles (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210226886.2A CN103506340B (zh) | 2012-06-29 | 2012-06-29 | 一种喷淋装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210226886.2A CN103506340B (zh) | 2012-06-29 | 2012-06-29 | 一种喷淋装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103506340A true CN103506340A (zh) | 2014-01-15 |
CN103506340B CN103506340B (zh) | 2016-12-21 |
Family
ID=49890070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210226886.2A Active CN103506340B (zh) | 2012-06-29 | 2012-06-29 | 一种喷淋装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103506340B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106345720A (zh) * | 2015-07-17 | 2017-01-25 | 沈阳芯源微电子设备有限公司 | 一种喷涂用喷嘴自动清洗装置及其清洗方法 |
CN112742775A (zh) * | 2020-12-14 | 2021-05-04 | 安徽华铂再生资源科技有限公司 | 一种便于取料拆装的废铅蓄电池清洗设备及其清洗方法 |
WO2021143578A1 (zh) * | 2020-01-19 | 2021-07-22 | 北京北方华创微电子装备有限公司 | 清洗装置 |
CN114369876A (zh) * | 2021-12-31 | 2022-04-19 | 至微半导体(上海)有限公司 | 一种实现梯度结构的蚀刻反应的喷淋方法 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0839014A (ja) * | 1994-07-29 | 1996-02-13 | Hitachi Ltd | 洗浄装置 |
JPH10144648A (ja) * | 1996-11-05 | 1998-05-29 | Shibaura Eng Works Co Ltd | スピン処理装置 |
US5846335A (en) * | 1994-06-28 | 1998-12-08 | Ebara Corporation | Method for cleaning workpiece |
US5947136A (en) * | 1996-09-10 | 1999-09-07 | Silicon Valley Group Inc. | Catch cup cleaning system |
JP2001007069A (ja) * | 1999-06-17 | 2001-01-12 | Ebara Corp | 基板洗浄装置 |
JP2006294856A (ja) * | 2005-04-11 | 2006-10-26 | Sansha Electric Mfg Co Ltd | 半導体ウエハ洗浄用ノズル装置 |
CN101276739A (zh) * | 2007-03-29 | 2008-10-01 | 东京毅力科创株式会社 | 基板处理系统和基板清洗装置 |
US20110083703A1 (en) * | 2006-05-23 | 2011-04-14 | Tokyo Electron Limited | Nozzle cleaning apparatus, nozzle cleaning method and a computer-readable storage medium storing nozzle cleaning program |
CN102148131A (zh) * | 2010-02-09 | 2011-08-10 | 联华电子股份有限公司 | 晶片清洗方法与清洗装置 |
CN202700862U (zh) * | 2012-06-29 | 2013-01-30 | 北京七星华创电子股份有限公司 | 一种喷淋装置 |
-
2012
- 2012-06-29 CN CN201210226886.2A patent/CN103506340B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5846335A (en) * | 1994-06-28 | 1998-12-08 | Ebara Corporation | Method for cleaning workpiece |
JPH0839014A (ja) * | 1994-07-29 | 1996-02-13 | Hitachi Ltd | 洗浄装置 |
US5947136A (en) * | 1996-09-10 | 1999-09-07 | Silicon Valley Group Inc. | Catch cup cleaning system |
JPH10144648A (ja) * | 1996-11-05 | 1998-05-29 | Shibaura Eng Works Co Ltd | スピン処理装置 |
JP2001007069A (ja) * | 1999-06-17 | 2001-01-12 | Ebara Corp | 基板洗浄装置 |
JP2006294856A (ja) * | 2005-04-11 | 2006-10-26 | Sansha Electric Mfg Co Ltd | 半導体ウエハ洗浄用ノズル装置 |
US20110083703A1 (en) * | 2006-05-23 | 2011-04-14 | Tokyo Electron Limited | Nozzle cleaning apparatus, nozzle cleaning method and a computer-readable storage medium storing nozzle cleaning program |
CN101276739A (zh) * | 2007-03-29 | 2008-10-01 | 东京毅力科创株式会社 | 基板处理系统和基板清洗装置 |
CN102148131A (zh) * | 2010-02-09 | 2011-08-10 | 联华电子股份有限公司 | 晶片清洗方法与清洗装置 |
CN202700862U (zh) * | 2012-06-29 | 2013-01-30 | 北京七星华创电子股份有限公司 | 一种喷淋装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106345720A (zh) * | 2015-07-17 | 2017-01-25 | 沈阳芯源微电子设备有限公司 | 一种喷涂用喷嘴自动清洗装置及其清洗方法 |
CN106345720B (zh) * | 2015-07-17 | 2019-04-30 | 沈阳芯源微电子设备有限公司 | 一种喷涂用喷嘴自动清洗装置及其清洗方法 |
WO2021143578A1 (zh) * | 2020-01-19 | 2021-07-22 | 北京北方华创微电子装备有限公司 | 清洗装置 |
CN112742775A (zh) * | 2020-12-14 | 2021-05-04 | 安徽华铂再生资源科技有限公司 | 一种便于取料拆装的废铅蓄电池清洗设备及其清洗方法 |
CN114369876A (zh) * | 2021-12-31 | 2022-04-19 | 至微半导体(上海)有限公司 | 一种实现梯度结构的蚀刻反应的喷淋方法 |
Also Published As
Publication number | Publication date |
---|---|
CN103506340B (zh) | 2016-12-21 |
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Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180316 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: North China Science and technology group Limited by Share Ltd. |
|
TR01 | Transfer of patent right |