CN103397311B - Pecvd flexible solar battery manufacturing equipment - Google Patents
Pecvd flexible solar battery manufacturing equipment Download PDFInfo
- Publication number
- CN103397311B CN103397311B CN201310356751.2A CN201310356751A CN103397311B CN 103397311 B CN103397311 B CN 103397311B CN 201310356751 A CN201310356751 A CN 201310356751A CN 103397311 B CN103397311 B CN 103397311B
- Authority
- CN
- China
- Prior art keywords
- inner tube
- tube
- pecvd
- solar battery
- manufacturing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of PECVD flexible solar battery manufacturing equipment, described equipment comprises at least one vacuum chamber, in each vacuum chamber, be provided with at least one electrode chamber, described electrode chamber from inside to outside comprises inner tube, the tube and the outer tube successively, described inner tube, the tube and the outer tube two ends are fixed by end cap, and the distance between inner tube and middle pipe is equal everywhere, and described inner tube is connected with radio-frequency signal generator with external electrode as interior electrode respectively with middle pipe. Inner tube of the present invention and middle pipe are made plasma discharge electrode, and the precision of electrode spacing is ensured automatically, has ensured the quality of forming film in pecvd process process.
Description
Technical field
The present invention relates to solar cell filming equipment technical field, particularly relate to a kind of PECVD flexibilitySolar cell manufacturing equipment.
Background technology
At present, the solar module of extensively manufacturing is in the world all that employing silicon chip or glass are base material,Inflexible rigid structure, Heavy Weight, volume is large, not shock-resistant, thereby is not suitable for mobile application. OrderOn former world, only have several companies to grasp with stainless steel foil (StainlessSteel) or polyimidesEtc. (Kepton) polymeric membrane is that base material is manufactured solar module, and product possesses flexibility or half flexible,Flexible, lightweight, volume is little, shock-resistant waits excellent properties, is applicable to mobile application.
Available technology adopting " volume to volume " sample delivery technology carry out semiconductor vacuum plated film, needSuccessively carry out layering plated film through different vacuum chambers, representational coating process is PECVD(PlasmaEnhancedChemicalVaporDeposition, plasma auxiliary chemical vapor deposition) plated film, generationThe thin film solar device of table property is thin film amorphous silicon (a-Si) and microcrystal silicon (uc-Si) solar cell,Representational base material is that stainless steel foil (StainlessSteelFoil) or polyimides (Kepton) are contourMolecular film. Due to the base material conveying mechanism of volume to volume, base material will be through multiple true under drawing tension stateEmpty coating chamber, this tension force has determined that foil can not be excessively thin. Taking stainless steel substrate as example, typical thickness is0.125 millimeter, and equipment is very complicated and huge, thus equipment manufacturing cost is high, and product flexibility is bad, belongs toIn half flexibility, typical bending radius is about 200 millimeters, and the weight per unit area of product is also higher.
Therefore,, for above-mentioned technical problem, be necessary to provide a kind of new PECVD flexible solar batteryManufacturing equipment.
Summary of the invention
In view of this, the object of the present invention is to provide a kind of simple in structure, PECVD that equipment cost is lowFlexible solar battery manufacturing equipment.
To achieve these goals, the technical scheme that the embodiment of the present invention provides is as follows:
A kind of PECVD flexible solar battery manufacturing equipment, described equipment comprises at least one vacuum chamber,In each vacuum chamber, be provided with at least one electrode chamber, described electrode chamber from inside to outside comprise successively inner tube, inPipe and outer tube, described inner tube, the tube and the outer tube two ends are fixed by end cap, and between inner tube and middle pipeDistance everywhere equate, described inner tube and middle pipe are respectively as interior electrode and external electrode and radio-frequency signal generator phaseConnect.
As a further improvement on the present invention, described inner tube, the tube and the outer tube are the cylinder arranging with one heart,Described outer tube and middle pipe are close to setting.
As a further improvement on the present invention, on described outer tube, be evenly distributed with heater.
As a further improvement on the present invention, described heater is spiral electric heating tube or some circlesShape electric heating tube or some linear pattern electric heating tubes.
As a further improvement on the present invention, described outer tube is provided with for accommodating the spiral of electric heating tubeAccepting groove or circular accepting groove or linear pattern accepting groove.
As a further improvement on the present invention, described at least one end cap is provided with for passing into gas to inner tubeInner air inlet, described inner tube be provided with some for gas is passed into from inner tube inside to inner tube withThrough hole between pipe, described at least one end cap is provided with the exhaust for discharging gas between inner tube and pipeMouthful.
As a further improvement on the present invention, described air inlet is located on the end cap corresponding to inner tube inside,Exhaust outlet is located at corresponding on the end cap between inner tube and middle pipe.
As a further improvement on the present invention, described middle inside pipe wall is used for accommodating diameter and equates with inside pipe wallFlexible substrate, described flexible substrate comprise stainless steel flexible substrate.
As a further improvement on the present invention, described outer wall of inner tube is used for accommodating diameter and equates with outer wall of inner tubeHalf flexible substrate, described half flexible substrate comprises polyimides polymeric membrane.
As a further improvement on the present invention, described gas comprises reacting gas and purge gas.
The present invention has following beneficial effect:
Reacting gas and through hole with electrode surface vertical spray of purge gas through inner tube or the distribution of middle tube-surfaceDrench, can obtain uniform air-flow and gas component and distribute;
The internal tension (middle inside pipe wall) of foil itself or outer tension force (outer wall of inner tube) and high resiliency foil orThe ingenious combination of low elasticity foil, realizes foil and precisely coordinates with the automatic of electrode surface, has ensured membranousAmount;
Many cover electrode chambers can be installed in same vacuum chamber, realize high production capacity;
Each electrode chamber has an inner vacuum chamber of one's own, and the high cleaning in realization response region further ensuresQuality of forming film.
Brief description of the drawings
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, below will be to realityThe accompanying drawing of executing required use in example or description of the Prior Art is briefly described, apparently, belowAccompanying drawing in description is only some embodiment that record in the present invention, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 be in the present invention's one preferred embodiment in PECVD flexible solar battery manufacturing equipment inThe cross section structure schematic diagram of pipe, middle pipe and outer tube;
Fig. 2 is the principle of PECVD flexible solar battery manufacturing equipment in the present invention's one preferred embodimentFigure;
Fig. 3 is the principle of PECVD flexible solar battery manufacturing equipment in another embodiment of the present inventionFigure.
Detailed description of the invention
In order to make those skilled in the art person understand better the technical scheme in the present invention, below in conjunction withAccompanying drawing in the embodiment of the present invention, retouches clearly and completely to the technical scheme in the embodiment of the present inventionState, obviously, described embodiment is only the present invention's part embodiment, instead of whole enforcementExample. Based on the embodiment in the present invention, those of ordinary skill in the art are not making before creative workPut obtained every other embodiment, all should belong to the scope of protection of the invention.
PECVD flexible solar battery manufacturing equipment in the present invention comprises at least one vacuum chamber, eachIn vacuum chamber, be provided with at least one electrode chamber, in the multireel PECVD flexible solar battery manufacturing equipment of multiple chamberSame vacuum indoor location overlaps electrode chamber more, can realize high production capacity.
In a preferred embodiment of the present invention, shown in ginseng Fig. 1, Fig. 2, electrode chamber 100 from inside to outsideComprise successively inner tube 10, middle pipe 20 and outer tube 30, between the tube wall of inner tube 10 and middle pipe 20, be provided with certainDistance, preferably in present embodiment the distance between inner tube 10 and middle pipe 20 everywhere equate, in this realityExecute inner tube 10 in mode, middle pipe 20 and the cylinder of outer tube 30 for arranging with one heart. Inner tube 10, middle pipe 20Be fixed by end cap 40 with outer tube 30 two ends, inner tube 10 and middle pipe 20 respectively as interior electrode andExternal electrode, and be connected with radio-frequency signal generator 50. Middle pipe 20 and outward appearance 30 installation bonded to each other.
On end cap 40, be respectively equipped with air inlet 41 and exhaust outlet 42. Air inlet is arranged at the end of 10 of inner tubesCover, reacting gas or purge gas can be delivered to inner tube 10 inside by air inlet 41; Exhaust outletOn 42 end caps that are arranged between inner tube 10 and middle pipe 20, can or purge reaction by exhaust outlet 42The gas of rear inner tube 10 and middle pipe 20 is discharged electrode chamber 100 outsides by pipeline. Air inlet 41 and exhaustMouth 42 can be located at respectively on two end caps, also can be located on same end cap. Further, air inletWhen mouth 41 is located on an end cap, pass into gas from one end, air inlet also can be all set in two end cap41, realize two ends and pass into gas simultaneously; Preferably, shown in ginseng Fig. 2, two end caps in present embodimentOn be equipped with exhaust outlet 42, reacting gas is discharged respectively from both sides after reacting in reaction zone, reacting gasFlow process shorter, can keep reactive gas species relatively even, certainly, the row of setting on an end capGas port equally also can complete coating process, shown in ginseng Fig. 3.
In other embodiments, exhaust outlet also can be set, and leave in the end of inner tube and middle pipeCertain space, when exhaust, gas is discharged from two ends through space.
In inner tube 10, be provided with some equally distributed through holes 11, can be by inner tube 10 by this through hole 11Reacting gas or purge gas pass between inner tube 10 and middle pipe 20. Reacting gas and purge gasThrough the through hole 11 and the vertical spray in external electrode surface of inner tube 10 surface distributed, obtain uniform air-flow andGas component distributes.
On outer tube 30, be evenly distributed with heater (not shown), heater is generally electric heater unit,As by heating tube spiral winding on outer tube, after energising, can realize the homogeneous heating of outer tube 30. Preferably,On outer tube 30, also can be provided with the spiral accepting groove for accommodating heating tube, can be further to heaterLocation is installed effectively.
Certainly in other embodiments, electric heating tube can also be for other structures, as some circular electrics addHeat pipe or some linear pattern electric heating tubes etc., accordingly, outer tube be provided with some or circular accepting groove,Or linear pattern accepting groove etc.
In the present embodiment, middle pipe 20 inwalls are for installing the flexibility that diameter equates with pipe 20 inwallsSubstrate, as the contour elasticity foil of ultra-thin stainless steel is installed, concrete technology flow process is as follows:
Flexible substrate is wound into diameter and equals the cylindrical shape of middle inside pipe wall diameter, and use glue in jointBand is fixed;
Cylindrical shape flexible substrate is carried out to a certain amount of deformation, put it into middle pipe inside, then by flexibilitySubstrate resets to cylindrical shape, and after resetting, flexible substrate is close on middle inside pipe wall;
By purge gas, flexible substrate is purged, ensure the high cleaning of conversion zone;
Heating outer tube, and open radio-frequency signal generator, pass into reacting gas, put by means of reacting gas auraThe low temperature plasma that produces between inner tube and middle pipe of electricity, has strengthened the chemism of reactive material, shortEnter the chemical reaction between gas, thereby at low temperatures flexible substrate has been carried out to plated film.
Further, the PECVD flexible solar battery manufacturing equipment in the first embodiment also can beHalf flexible substrate of reeling on outer wall of inner tube is carried out plated film, by half flexible substrate be installed on need after outer wall of inner tube intoRow drilling technology, carries out laser boring in half flexible substrate corresponding to the position of interior pipe through-hole, ensures reactionGas or purge gas can from inner tube inside enter inner tube and between pipe.
Flexible solar battery in the present invention can be divided into according to flexible degree:
Half flexible thin-film solar cell: solar cell that can be bending, base material is that thickness is greater than 0.1mmStainless steel foil, battery functi on structural material is all by films such as the semiconductors of micron or submicron thicknessThe solar cell that material forms, encapsulating material is 0.2 millimeter of above polymeric membrane material, such battery is curvedBilge radius is generally greater than 50mm, and weight per unit area is greater than 2000 grams/square meter, and power density is generally less than25W/ kilogram.
High flexibility thin-film solar cells: base material is the stainless steel foil that thickness is less than 0.1mm, battery meritThe solar-electricity can structural material all being formed by thin-film materials such as the semiconductors of micron or submicron thicknessPond, cell base and encapsulating material are 0.2 millimeter of following polymeric membrane material. Such battery bending radius is aobviousWork little (bending radius can be less than 15mm), and weight per unit area can be less than 1000 grams/square meter, meritRate density can be greater than 50W/ kilogram.
Super flexible thin-film solar cell: base material is the polymeric membrane material that thickness is less than 0.1mm, battery meritThe solar-electricity can structural material all being formed by thin-film materials such as the semiconductors of micron or submicron thicknessPond, encapsulating material is 0.1 millimeter of following ultrathin polymeric membrane material. Such battery bending radius is significantly little (curvedBilge radius can be less than 5mm), and weight per unit area can be less than 350 grams/square meter, and power density can be largeIn 150W/ kilogram.
Preferably, PECVD flexible solar battery manufacturing equipment of the present invention is not limited to manufacture non-crystalline silicon-micro-Polycrystal silicon film battery, also can be used for CIGS battery, DSSC, organic solar batteriesOr three or five family's batteries such as GaAs etc.
Taking flexible amorphous silicon-microcrystalline silicon film solar cell as example, need in flexible substrate, pass through successivelyEquipment in the present invention is prepared AL layer, antireflection layer (as ZnO layer), N layer, I layer (intrinsic layer), PLayer and nesa coating etc.
In sum, the present invention using concentric cylindrical shape inner tube and middle pipe respectively as interior electrode and external electrode,Outer tube is as heating tube, and middle inside pipe wall is particularly suitable for installing the contour elasticity foil of ultra-thin stainless steel, outside inner tubeWall is particularly suitable for installing the polymer base material of the low elasticities such as polyimides. Inner tube and middle pipe are made plasmaSparking electrode, the precision of electrode spacing is ensured automatically, has ensured the one-tenth in pecvd process processFilm quality.
As can be seen from the above technical solutions, the present invention has following beneficial effect:
Reacting gas and through hole with electrode surface vertical spray of purge gas through inner tube or the distribution of middle tube-surfaceDrench, can obtain uniform air-flow and gas component and distribute;
The internal tension (middle inside pipe wall) of foil itself or outer tension force (outer wall of inner tube) and high resiliency foil orThe ingenious combination of low elasticity foil, realizes foil and precisely coordinates with the automatic of electrode surface, has ensured membranousAmount;
In the multireel PECVD flexible solar battery manufacturing equipment of multiple chamber, same vacuum indoor location overlaps electricity moreUtmost point chamber, realizes high production capacity;
Each electrode chamber has an inner vacuum chamber of one's own, and the high cleaning in realization response region further ensuresQuality of forming film.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned example embodiment,And in the situation that not deviating from spirit of the present invention or essential characteristic, can be real with other concrete formExisting the present invention. Therefore, no matter from which point, all should regard embodiment as exemplary, andBe nonrestrictive, scope of the present invention is limited by claims instead of above-mentioned explanation, therefore purportThe all changes that drop in the implication and the scope that are equal to important document of claim are included in the present invention.Any Reference numeral in claim should be considered as limiting related claim.
In addition although should be appreciated that this description is described according to embodiment, be not each reality,The mode of executing only comprises an independently technical scheme, and this narrating mode of description is only for knowingSee, those skilled in the art should make description as a whole, and the technical scheme in each embodiment alsoCan, through appropriately combined, form other embodiments that it will be appreciated by those skilled in the art that.
Claims (8)
1. a PECVD flexible solar battery manufacturing equipment, described equipment comprises at least one vacuumChamber, is provided with at least one electrode chamber in each vacuum chamber, it is characterized in that, described electrode chamber from inside to outsideComprise successively inner tube, the tube and the outer tube, described inner tube, the tube and the outer tube two ends are fixed by end cap,And the distance between inner tube and middle pipe is equal everywhere, and described inner tube and middle pipe are respectively as interior electrode and external electrodeBe connected with radio-frequency signal generator, in described two end cap, be equipped with for passing into the air inlet of gas to inner tube inside,Described inner tube is provided with some for gas is passed into the through hole between inner tube and pipe from inner tube inside,In described two end cap, be equipped with the exhaust outlet for discharging gas between inner tube and pipe, described gas comprisesReacting gas and purge gas.
2. PECVD flexible solar battery manufacturing equipment according to claim 1, its feature existsIn, described inner tube, the tube and the outer tube are the cylinder arranging with one heart, described outer tube and middle pipe are close to setting.
3. PECVD flexible solar battery manufacturing equipment according to claim 1, its feature existsIn, on described outer tube, be evenly distributed with heater.
4. PECVD flexible solar battery manufacturing equipment according to claim 3, its feature existsIn, described heater is spiral electric heating tube or some circular electric heating tubes or some linear patternsElectric heating tube.
5. PECVD flexible solar battery manufacturing equipment according to claim 4, its feature existsIn, described outer tube be provided with spiral accepting groove for accommodating electric heating tube or circular accepting groove orLinear pattern accepting groove.
6. PECVD flexible solar battery manufacturing equipment according to claim 1, its feature existsIn, described air inlet is located on the end cap corresponding to inner tube inside, exhaust outlet be located at corresponding to inner tube with inOn end cap between pipe.
7. PECVD flexible solar battery manufacturing equipment according to claim 1, its feature existsIn, described middle inside pipe wall is for accommodating the flexible substrate that diameter equates with inside pipe wall, described flexible substrateComprise stainless steel flexible substrate.
8. PECVD flexible solar battery manufacturing equipment according to claim 1, its feature existsIn, described outer wall of inner tube is for accommodating half flexible substrate that diameter equates with outer wall of inner tube, described partly flexibleSubstrate comprises polyimides polymeric membrane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310356751.2A CN103397311B (en) | 2013-08-15 | 2013-08-15 | Pecvd flexible solar battery manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310356751.2A CN103397311B (en) | 2013-08-15 | 2013-08-15 | Pecvd flexible solar battery manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103397311A CN103397311A (en) | 2013-11-20 |
| CN103397311B true CN103397311B (en) | 2016-05-18 |
Family
ID=49561006
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310356751.2A Active CN103397311B (en) | 2013-08-15 | 2013-08-15 | Pecvd flexible solar battery manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103397311B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102174691A (en) * | 2011-03-17 | 2011-09-07 | 苏州思博露光伏能源科技有限公司 | Quick base material temperature raising and reducing technology in large-scale production of thin film photovoltaic battery |
| CN102394255A (en) * | 2011-11-15 | 2012-03-28 | 苏州思博露光伏能源科技有限公司 | Technology of spraying electrodes while depositing film in manufacture of flexible film photovoltaic battery |
| CN203429247U (en) * | 2013-08-15 | 2014-02-12 | 苏州思博露光伏能源科技有限公司 | Manufacturing device of PECVD (plasma enhanced chemical vapor deposition) flexible solar cells |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60141871A (en) * | 1983-12-28 | 1985-07-26 | Fujitsu Ltd | Plasma cvd device |
| JPH03211726A (en) * | 1990-01-16 | 1991-09-17 | Plasma Syst:Kk | Plasma processor |
| JP3049932B2 (en) * | 1992-03-31 | 2000-06-05 | 株式会社島津製作所 | Plasma CVD equipment |
| JP2003347221A (en) * | 2002-05-29 | 2003-12-05 | Kyocera Corp | Cat-PECVD METHOD, FILM FORMED BY THE SAME AND THIN FILM DEVICE HAVING THE FILM |
-
2013
- 2013-08-15 CN CN201310356751.2A patent/CN103397311B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102174691A (en) * | 2011-03-17 | 2011-09-07 | 苏州思博露光伏能源科技有限公司 | Quick base material temperature raising and reducing technology in large-scale production of thin film photovoltaic battery |
| CN102394255A (en) * | 2011-11-15 | 2012-03-28 | 苏州思博露光伏能源科技有限公司 | Technology of spraying electrodes while depositing film in manufacture of flexible film photovoltaic battery |
| CN203429247U (en) * | 2013-08-15 | 2014-02-12 | 苏州思博露光伏能源科技有限公司 | Manufacturing device of PECVD (plasma enhanced chemical vapor deposition) flexible solar cells |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103397311A (en) | 2013-11-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AU2017314804B2 (en) | Perovskite thin film low-pressure chemical deposition equipment and using method thereof, and application | |
| CN201183822Y (en) | Thin film deposition apparatus | |
| CN101962759B (en) | PECVD system with internal heater | |
| CN101319309A (en) | Methods and apparatus for depositing a uniform silicon film with flow gradient designs | |
| CN203429247U (en) | Manufacturing device of PECVD (plasma enhanced chemical vapor deposition) flexible solar cells | |
| CN101899652B (en) | Gas supply system and method | |
| CN101930889A (en) | Gas input device and plasma processing equipment | |
| CN209778993U (en) | PECVD equipment for producing heterojunction solar cell coating film | |
| CN103397311B (en) | Pecvd flexible solar battery manufacturing equipment | |
| CN201495314U (en) | Gas distribution device for thin film deposition device | |
| CN101245450A (en) | Method for film coating in enormous quantities with movable plasma case single-chamber | |
| CN206188931U (en) | Diffusion furnace | |
| CN102021537A (en) | Thin film deposition equipment | |
| CN102517564A (en) | Gas purging system and method in LPCVD technique cavity | |
| CN202380085U (en) | Gas purge system in LPCVD (low-pressure chemical vapor deposition) process chambers | |
| CN106756884A (en) | A kind of PECVD coating apparatus | |
| CN210560740U (en) | PECVD special gas pipeline | |
| CN201326014Y (en) | Air intake device for plasma-enhanced chemical vapor deposition (PECVD) | |
| CN203741411U (en) | PECVD (Plasma Enhanced Chemical Vapor Deposition) gas inlet structure | |
| CN214244606U (en) | Reticular radio frequency PECVD electrode structure | |
| CN202610326U (en) | On-line blowing device of plate type plasma enhanced chemical vapor deposition (PECVD) coating of crystalline silicon solar cell | |
| CN102277562B (en) | Multi-stage plasma enhanced chemical vapor deposition (PECVD) equipment for thin-film solar batteries | |
| CN210657127U (en) | Gas distribution device of chemical vapor deposition coating equipment | |
| CN203284462U (en) | Air supply system for plasma chemical vapor deposition coating equipment | |
| CN103132054A (en) | Plasma processing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20181220 Address after: 225000 21 storeys, Block A, Zhigu Building, 186 Yangtze River Middle Road, Yangzhou Development Zone, Jiangsu Province Patentee after: Jiangsu Shunda New Energy Technology Co., Ltd. Address before: 215153 No. 260 Luliangshan Road, Suzhou High-tech Zone, Jiangsu Province Patentee before: Suzhou Spruce Photovoltaic Energy Technologies, Inc. |
|
| TR01 | Transfer of patent right |