CN103397311A - PECVD (Plasma Enhanced Chemical Vapor Deposition) flexible solar battery manufacturing equipment - Google Patents
PECVD (Plasma Enhanced Chemical Vapor Deposition) flexible solar battery manufacturing equipment Download PDFInfo
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- CN103397311A CN103397311A CN2013103567512A CN201310356751A CN103397311A CN 103397311 A CN103397311 A CN 103397311A CN 2013103567512 A CN2013103567512 A CN 2013103567512A CN 201310356751 A CN201310356751 A CN 201310356751A CN 103397311 A CN103397311 A CN 103397311A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention discloses PECVD (Plasma Enhanced Chemical Vapor Deposition) flexible solar battery manufacturing equipment. The equipment comprises at least one vacuum chamber, wherein at least one electrode chamber is arranged in each vacuum chamber and sequentially comprises an inner tube, a middle tube and an outer tube from inside to outside; the two ends of the inner tube, the middle tube and the outer tube are fixed through end closures; the distance between the inner tube and the middle tube is equal everywhere; and the inner tube and the middle tube respectively serve as an inner electrode and an outer electrode and are connected with a radio frequency generator. The PECVD flexible solar battery manufacturing equipment has the advantages that the inner tube and the middle tube are made into plasma discharge electrodes, the accuracy of space between the electrodes is automatically ensured, and the film formation quality in a PECVD technological process is ensured.
Description
Technical field
The present invention relates to solar cell filming equipment technical field, particularly relate to a kind of PECVD flexible solar battery producing apparatus.
Background technology
At present, the solar module of extensively manufacturing in the world is all that employing silicon chip or glass are base material, inflexible rigid structure, and Heavy Weight, volume is large, and is not shock-resistant, thereby is not suitable for mobile application.Only have in the world at present several companies to grasp and take polymeric membranes such as stainless steel foil (Stainless Steel) or polyimide (Kepton) as base material, manufacture solar module, product possesses flexibility or half flexibility, flexible, lightweight, volume is little, the shock-resistant excellent properties that waits, be suitable for mobile application.
Available technology adopting " volume to volume " the sample delivery technology carry out the semiconductor vacuum plated film, need successively through different vacuum chambers, to carry out the layering plated film, representational coating process is PECVD(Plasma Enhanced Chemical Vapor Deposition, plasma auxiliary chemical vapor deposition) plated film, representational thin film solar device is thin film amorphous silicon (a-Si) and microcrystal silicon (uc-Si) solar cell, and representational base material is the polymeric membranes such as stainless steel foil (Stainless Steel Foil) or polyimide (Kepton).Due to the base material transfer mechanism of volume to volume, base material will be through a plurality of vacuum film coating chambers under the drawing tension state, and this tension force has determined that foil can not be excessively thin.Take stainless steel substrate as example, typical thickness is 0.125 millimeter, and equipment is very complicated and huge, thereby equipment manufacturing cost is high, and product flexibility is bad, belongs to half flexibility, and typical bending radius is about 200 millimeters, and the weight per unit area of product is also higher.
Therefore, for above-mentioned technical problem, be necessary to provide a kind of new PECVD flexible solar battery producing apparatus.
Summary of the invention
In view of this, the object of the present invention is to provide a kind of simple in structure, PECVD flexible solar battery producing apparatus that equipment cost is low.
To achieve these goals, the technical scheme that provides of the embodiment of the present invention is as follows:
A kind of PECVD flexible solar battery producing apparatus, described equipment comprises at least one vacuum chamber, in each vacuum chamber, be provided with at least one electrode vessel, described electrode vessel from inside to outside comprises inner tube, the tube and the outer tube successively, described inner tube, the tube and the outer tube two ends are fixed by end cap, and the distance between inner tube and middle pipe is equal everywhere, and described inner tube is connected with radio frequency generators with outer electrode as interior electrode respectively with middle pipe.
As a further improvement on the present invention, described inner tube, the tube and the outer tube are the right cylinder that arranges with one heart, and described outer tube and middle pipe are close to setting.
As a further improvement on the present invention, on described outer tube, be evenly distributed with heating unit.
As a further improvement on the present invention, described heating unit is spiral electric heating tube or some circular electric heating tubes or some linear pattern electric heating tubes.
As a further improvement on the present invention, described outer tube is provided with spiral accepting groove or circular accepting groove or the linear pattern accepting groove be used to accommodating electric heating tube.
As a further improvement on the present invention, described at least one end cap is provided be used to passing into the inlet mouth of gas to inner tube inside, described inner tube is provided with some for gas is passed into to the through hole between inner tube and pipe from inner tube inside, and described at least one end cap is provided with for discharging the venting port of gas between inner tube and pipe.
As a further improvement on the present invention, described inlet mouth is located on the end cap corresponding to inner tube inside, and venting port is located at corresponding on the end cap between inner tube and middle pipe.
As a further improvement on the present invention, described middle inside pipe wall is for accommodating the flexible substrate that diameter equates with inside pipe wall, described flexible substrate comprise the stainless steel flexible substrate.
As a further improvement on the present invention, described outer wall of inner tube is for accommodating half flexible substrate that diameter equates with outer wall of inner tube, and described half flexible substrate comprises the polyimide polymeric membrane.
As a further improvement on the present invention, described gas comprises reactant gases and sweeping gas.
The present invention has following beneficial effect:
Reactant gases and through hole with electrode surface vertical spray of sweeping gas through inner tube or the distribution of middle tube-surface, can obtain uniform air-flow and gaseous fraction and distribute;
The internal tension of foil itself (middle inside pipe wall) or outer tension force (outer wall of inner tube) and snappiness foil or the ingenious combination of low elasticity foil, realize that foil precisely coordinates with the automatic of electrode surface, has guaranteed quality of forming film;
Many cover electrode vessels can be installed in same vacuum chamber, realize high production capacity;
Each electrode vessel has an inner vacuum chamber of one's own, and the high cleaning in realization response zone has further guaranteed quality of forming film.
The accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, below will the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described, apparently, the accompanying drawing that the following describes is only some embodiment that put down in writing in the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the cross section structure schematic diagram of inner tube, the tube and the outer tube in PECVD flexible solar battery producing apparatus in the present invention's one preferred implementation;
Fig. 2 is the schematic diagram of PECVD flexible solar battery producing apparatus in the present invention's one preferred implementation;
Fig. 3 is the schematic diagram of PECVD flexible solar battery producing apparatus in another embodiment of the present invention.
Embodiment
In order to make those skilled in the art person understand better the technical scheme in the present invention, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Based on the embodiment in the present invention, those of ordinary skills, not making under the creative work prerequisite the every other embodiment that obtains, should belong to the scope of protection of the invention.
PECVD flexible solar battery producing apparatus in the present invention comprises at least one vacuum chamber, in each vacuum chamber, be provided with at least one electrode vessel, in the multireel PECVD flexible solar battery producing apparatus of multiple chamber, same vacuum indoor location overlaps electrode vessel more, can realize high production capacity.
In a preferred implementation of the present invention, ginseng Fig. 1, shown in Figure 2, electrode vessel 100 from inside to outside comprises inner tube 10, middle pipe 20 and outer tube 30 successively, between the tube wall of inner tube 10 and middle pipe 20, be provided with certain distance, preferably in present embodiment, the distance of 20 of inner tube 10 and middle pipes equates everywhere, and inner tube 10, middle pipe 20 and outer tube 30 be the right cylinder of setting with one heart in the present embodiment.Inner tube 10, middle pipe 20 and outer tube 30 two ends are fixed by end cap 40, and inner tube 10 and middle pipe 20 be respectively as interior electrode and outer electrode, and are connected with radio frequency generators 50.Middle pipe 20 and outward appearance 30 installation bonded to each other.
On end cap 40, be respectively equipped with inlet mouth 41 and venting port 42.Inlet mouth is arranged on the end cap of 10 of inner tubes, by inlet mouth 41, reactant gases or sweeping gas can be delivered to inner tube 10 inside; Venting port 42 is arranged on the end cap between inner tube 10 and middle pipe 20, by venting port 42, the gas of inner tube 10 and middle pipe 20 after reaction or purging can be discharged to electrode vessel 100 outsides by pipeline.Inlet mouth 41 and venting port 42 can be located at respectively on two end caps, also can be located on same end cap.Further, when inlet mouth 41 is located on an end cap, from an end, pass into gas, also can inlet mouth 41 be set all on two end cap, realize that two ends pass into gas simultaneously; Preferably, join shown in Figure 2, in present embodiment, on two end caps, be equipped with venting port 42, reactant gases is discharged respectively from both sides after in reaction zone, reacting, the flow process of reactant gases is shorter, can keep reactive gas species relatively even, certainly, on an end cap, venting port is set and equally also can completes coating process, join shown in Figure 3.
In other embodiments, also venting port can be set, and in the end of inner tube and middle pipe, leave certain space, during exhaust, gas is discharged from two ends through space.
On inner tube 10, be provided with some equally distributed through holes 11, by this through hole 11, the reactant gases in inner tube 10 or sweeping gas can be passed into between inner tube 10 and middle pipe 20.Reactant gases and sweeping gas, through the through hole 11 and outer electrode Surface Vertical spray of inner tube 10 surface arrangement, obtain uniform air-flow and gaseous fraction and distribute.
On outer tube 30, be evenly distributed with heating unit (not shown), heating unit is generally electric heater unit, as by the heating tube spiral winding on outer tube, after energising, can realize the homogeneous heating of outer tube 30.Preferably, on outer tube 30, also can be provided be used to accommodating the spiral accepting groove of heating tube, can further to heating unit, location be installed effectively.
Certainly in other embodiments, electric heating tube can also be constructed for other, and as some circular electric heating tubes or some linear pattern electric heating tubes etc., accordingly, outer tube is provided with some or circular accepting groove or linear pattern accepting groove etc.
In the present embodiment, middle pipe 20 inwalls are for the flexible substrate that diameter equates with pipe 20 inwalls is installed, and as the contour elasticity foil of ultra-thin stainless steel is installed, the concrete technology flow process is as follows:
Flexible substrate is wound into to the round shape that diameter equals middle inside pipe wall diameter, and in joint, uses adhesive tape to be fixed;
The round shape flexible substrate is carried out to a certain amount of deformation, put it into middle pipe inside, then flexible substrate is reset to round shape, the rear flexible substrate that resets is close on middle inside pipe wall;
By sweeping gas, flexible substrate is purged, guarantee the high cleaning of conversion zone;
The heating outer tube, and open radio frequency generators, pass into reactant gases, the low-temperature plasma that produces between inner tube and middle pipe by means of reactant gases glow discharge, strengthened the chemically reactive of reactive material, promoted the chemical reaction between gas, thereby at low temperatures flexible substrate has been carried out to plated film.
Further, PECVD flexible solar battery producing apparatus in the first embodiment half flexible substrate of also can reeling on outer wall of inner tube is carried out plated film, after being installed on to outer wall of inner tube, half flexible substrate needs to carry out drilling technology, in half flexible substrate, corresponding to the position of interior pipe through-hole, carry out laser boring, guarantee reactant gases or sweeping gas can from inner tube inside enter inner tube and between pipe.
Flexible solar battery in the present invention can be divided into according to flexible degree:
Half flexible thin-film solar cell: solar cell that can be crooked, base material is the stainless steel foil of thickness greater than 0.1mm, the solar cell that the battery functi on structured material all consists of the thin-film materials such as semi-conductor of micron or submicron thickness, packaged material is the polymeric membrane material more than 0.2 millimeter, such battery bending radius is generally greater than 50mm, weight per unit area is greater than 2000 grams/square meter, and power density is generally less than the 25W/ kilogram.
The high flexibility thin-film solar cells: base material is the stainless steel foil of thickness less than 0.1mm, the solar cell that the battery functi on structured material all consists of the thin-film materials such as semi-conductor of micron or submicron thickness, cell base and packaged material are the polymeric membrane material below 0.2 millimeter.Such battery bending radius significantly little (bending radius can less than 15mm), and weight per unit area can be less than 1000 grams/square meter, and power density can be greater than the 50W/ kilogram.
Super flexible thin-film solar cell: base material is the polymeric membrane material of thickness less than 0.1mm, the solar cell that the battery functi on structured material all consists of the thin-film materials such as semi-conductor of micron or submicron thickness, packaged material is the ultrathin polymeric membrane material below 0.1 millimeter.Such battery bending radius significantly little (bending radius can less than 5mm), and weight per unit area can be less than 350 grams/square meter, and power density can be greater than the 150W/ kilogram.
Preferably, PECVD flexible solar battery producing apparatus of the present invention is not limited to manufacture non-crystalline silicon-microcrystalline silicon film battery, also can be used for three or five family's batteries such as CIGS battery, dye sensitization solar battery, organic solar batteries or gallium arsenide etc.
Take flexible amorphous silicon-microcrystalline silicon film solar cell as example, need on flexible substrate, by the equipment in the present invention, prepare AL layer, antireflection layer (as the ZnO layer), N layer, I layer (intrinsic layer), P layer and nesa coating etc. successively.
In sum, the present invention using concentric round shape inner tube and middle pipe respectively as interior electrode and outer electrode, outer tube is as heating tube, and middle inside pipe wall is particularly suitable for installing the contour elasticity foil of ultra-thin stainless steel, and outer wall of inner tube is particularly suitable for installing the polymer base material of the low elasticities such as polyimide.Inner tube and middle pipe are made the plasma discharge electrode, and the precision of interelectrode distance is guaranteed automatically, has guaranteed the quality of forming film in the pecvd process process.
As can be seen from the above technical solutions, the present invention has following beneficial effect:
Reactant gases and through hole with electrode surface vertical spray of sweeping gas through inner tube or the distribution of middle tube-surface, can obtain uniform air-flow and gaseous fraction and distribute;
The internal tension of foil itself (middle inside pipe wall) or outer tension force (outer wall of inner tube) and snappiness foil or the ingenious combination of low elasticity foil, realize that foil precisely coordinates with the automatic of electrode surface, has guaranteed quality of forming film;
In the multireel PECVD flexible solar battery producing apparatus of multiple chamber, same vacuum indoor location overlaps electrode vessel more, realizes high production capacity;
Each electrode vessel has an inner vacuum chamber of one's own, and the high cleaning in realization response zone has further guaranteed quality of forming film.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned example embodiment, and in the situation that do not deviate from spirit of the present invention or essential characteristic, can realize the present invention with other specific form.Therefore, no matter from which point, all should regard embodiment as exemplary, and be nonrestrictive, scope of the present invention is limited by claims rather than above-mentioned explanation, therefore is intended to include in the present invention dropping on the implication that is equal to important document of claim and all changes in scope.Should not be considered as any Reference numeral in claim to limit related claim.
In addition, be to be understood that, although this specification sheets is described according to embodiment, but not each embodiment only comprises an independently technical scheme, this narrating mode of specification sheets is only for clarity sake, those skilled in the art should make specification sheets as a whole, and the technical scheme in each embodiment also can, through appropriate combination, form other embodiments that it will be appreciated by those skilled in the art that.
Claims (10)
1. PECVD flexible solar battery producing apparatus, described equipment comprises at least one vacuum chamber, in each vacuum chamber, be provided with at least one electrode vessel, it is characterized in that, described electrode vessel from inside to outside comprises inner tube, the tube and the outer tube successively, described inner tube, the tube and the outer tube two ends are fixed by end cap, and the distance between inner tube and middle pipe is equal everywhere, and described inner tube is connected with radio frequency generators with outer electrode as interior electrode respectively with middle pipe.
2. PECVD flexible solar battery producing apparatus according to claim 1, is characterized in that, described inner tube, the tube and the outer tube are the right cylinder that arranges with one heart, and described outer tube and middle pipe are close to setting.
3. PECVD flexible solar battery producing apparatus according to claim 1, is characterized in that, on described outer tube, is evenly distributed with heating unit.
4. PECVD flexible solar battery producing apparatus according to claim 3, is characterized in that, described heating unit is spiral electric heating tube or some circular electric heating tubes or some linear pattern electric heating tubes.
5. PECVD flexible solar battery producing apparatus according to claim 4, is characterized in that, described outer tube is provided be used to the spiral accepting groove of accommodating electric heating tube or circular accepting groove or linear pattern accepting groove.
6. PECVD flexible solar battery producing apparatus according to claim 1, it is characterized in that, described at least one end cap is provided be used to passing into the inlet mouth of gas to inner tube inside, described inner tube is provided with some for gas is passed into to the through hole between inner tube and pipe from inner tube inside, and described at least one end cap is provided with for discharging the venting port of gas between inner tube and pipe.
7. PECVD flexible solar battery producing apparatus according to claim 6, is characterized in that, described inlet mouth is located on the end cap corresponding to inner tube inside, and venting port is located at corresponding on the end cap between inner tube and middle pipe.
8. PECVD flexible solar battery producing apparatus according to claim 6, is characterized in that, described middle inside pipe wall is for accommodating the flexible substrate that diameter equates with inside pipe wall, described flexible substrate comprise the stainless steel flexible substrate.
9. PECVD flexible solar battery producing apparatus according to claim 6, is characterized in that, described outer wall of inner tube is for accommodating half flexible substrate that diameter equates with outer wall of inner tube, and described half flexible substrate comprises the polyimide polymeric membrane.
10. PECVD flexible solar battery producing apparatus according to claim 6, is characterized in that, described gas comprises reactant gases and sweeping gas.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60141871A (en) * | 1983-12-28 | 1985-07-26 | Fujitsu Ltd | Plasma cvd device |
| JPH03211726A (en) * | 1990-01-16 | 1991-09-17 | Plasma Syst:Kk | Plasma processor |
| JP3049932B2 (en) * | 1992-03-31 | 2000-06-05 | 株式会社島津製作所 | Plasma CVD equipment |
| JP2003347221A (en) * | 2002-05-29 | 2003-12-05 | Kyocera Corp | Cat-PECVD METHOD, FILM FORMED BY THE SAME AND THIN FILM DEVICE HAVING THE FILM |
| CN102174691A (en) * | 2011-03-17 | 2011-09-07 | 苏州思博露光伏能源科技有限公司 | Quick base material temperature raising and reducing technology in large-scale production of thin film photovoltaic battery |
| CN102394255A (en) * | 2011-11-15 | 2012-03-28 | 苏州思博露光伏能源科技有限公司 | Technology of spraying electrodes while depositing film in manufacture of flexible film photovoltaic battery |
| CN203429247U (en) * | 2013-08-15 | 2014-02-12 | 苏州思博露光伏能源科技有限公司 | Manufacturing device of PECVD (plasma enhanced chemical vapor deposition) flexible solar cells |
-
2013
- 2013-08-15 CN CN201310356751.2A patent/CN103397311B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60141871A (en) * | 1983-12-28 | 1985-07-26 | Fujitsu Ltd | Plasma cvd device |
| JPH03211726A (en) * | 1990-01-16 | 1991-09-17 | Plasma Syst:Kk | Plasma processor |
| JP3049932B2 (en) * | 1992-03-31 | 2000-06-05 | 株式会社島津製作所 | Plasma CVD equipment |
| JP2003347221A (en) * | 2002-05-29 | 2003-12-05 | Kyocera Corp | Cat-PECVD METHOD, FILM FORMED BY THE SAME AND THIN FILM DEVICE HAVING THE FILM |
| CN102174691A (en) * | 2011-03-17 | 2011-09-07 | 苏州思博露光伏能源科技有限公司 | Quick base material temperature raising and reducing technology in large-scale production of thin film photovoltaic battery |
| CN102394255A (en) * | 2011-11-15 | 2012-03-28 | 苏州思博露光伏能源科技有限公司 | Technology of spraying electrodes while depositing film in manufacture of flexible film photovoltaic battery |
| CN203429247U (en) * | 2013-08-15 | 2014-02-12 | 苏州思博露光伏能源科技有限公司 | Manufacturing device of PECVD (plasma enhanced chemical vapor deposition) flexible solar cells |
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Effective date of registration: 20181220 Address after: 225000 21 storeys, Block A, Zhigu Building, 186 Yangtze River Middle Road, Yangzhou Development Zone, Jiangsu Province Patentee after: Jiangsu Shunda New Energy Technology Co., Ltd. Address before: 215153 No. 260 Luliangshan Road, Suzhou High-tech Zone, Jiangsu Province Patentee before: Suzhou Spruce Photovoltaic Energy Technologies, Inc. |
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