CN103302978A - 直接在膜片上切割的打印头换能器 - Google Patents
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- 238000000034 method Methods 0.000 claims abstract description 28
- 238000005520 cutting process Methods 0.000 claims description 24
- 238000003825 pressing Methods 0.000 abstract description 7
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 239000000976 ink Substances 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 239000004821 Contact adhesive Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000013383 initial experiment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- PICXIOQBANWBIZ-UHFFFAOYSA-N zinc;1-oxidopyridine-2-thione Chemical class [Zn+2].[O-]N1C=CC=CC1=S.[O-]N1C=CC=CC1=S PICXIOQBANWBIZ-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49764—Method of mechanical manufacture with testing or indicating
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49764—Method of mechanical manufacture with testing or indicating
- Y10T29/49778—Method of mechanical manufacture with testing or indicating with aligning, guiding, or instruction
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- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
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Abstract
一种把打印头换能器安装到膜片的方法,其包括:把换能器板块与膜片合并;把该膜片按压到该板块以形成组件;及在该膜片按压到该板块之后,切割该板块以把板块分割成换能器阵列,其中,所述换能器阵列与体腔阵列对齐。
Description
技术领域
本发明总体上涉及打印头领域,更具体地涉及安装打印头换能器的方法。
背景技术
许多类型的喷墨打印机使用换能器(transducer),以选择性地把墨从成阵列的孔中的单个孔(也称喷嘴或喷口)中排出。在打印基片上所形成的图案构成了打印图像。换能器一般与压力室相邻。成组的信号通常会导致换能器对膜(membrane)起作用。单个信号使换能器朝偏离孔的方向移动膜,导致压力室填充墨。第二个信号,通常与第一信号极性相反,会导致膜向另一个方向移动,使墨通过孔从压力室中排出。
一般情况下,每个孔和压力室都有一个换能器,且换能器阵列与压力室阵列相对齐。受打印图像高分辨率需求的驱使,孔阵列的密度越来越大。换能器阵列必须与更高的密度相匹配。孔的数目对应于体腔的数量,而体腔的数量又对应于换能器的数目。高密度导致打印头制造过程中极严格的公差。
在现有的产品中,体腔和孔已经对齐和粘合。体腔和中间具有膜的经切割的换能器之间进行校准会产生问题。此过程通常涉及换能器板块(如压电式换能器(PZT))的脱机切割,以及切割后换能器转移校准的方法。这种传统的方法主要有三个方面导致换能器校准的变化。
首先,切割操作提供了不能对齐的第一根源。如果切割图案不能对齐,经切割的换能器很难与体腔对齐。其次,在经切割的换能器基片与膜片合并的合并操作中,需要极其精确的公差,以确保经切割的换能器准确地与体腔对齐。第三,按压操作通过施加压力和热把膜片粘合到膜上,压力和热可能会导致两者之间的移位。这三者中,切割操作具有最高的精度。
发明内容
为解决上述问题,本发明提供了一种把打印头换能器安装到膜片的方法,其包括:把换能器板块与膜片合并;把该膜片按压到该板块以形成组件;及在将该膜片按压到该板块之后,切割该板块以把该板块分割成换能器阵列,其中,该换能器阵列与体腔阵列对齐。在一种优选的实施方式中,所述膜片具有形成体腔的半蚀刻线,且切割该板块包括把切割刀的切割深度设置成与所述体腔内的深度相对应的深度。
附图说明
图1示出了膜片和换能器对齐以及粘合方法的实施例的流程图。
图2示出了具有与换能器对齐的体腔的主体板。
图3示出了改进的膜片和换能器对齐以及粘合的方法的实施例的流程图。
图4示出了粘合后的换能器板块的例子。
图5-7示出了切割操作参数的替代实施例。
图8示出了挤出的粘合剂的实施例。
具体实施方式
图1示出了把换能器安装到喷嘴层叠(jet stack)的现有方法的实施例。喷嘴层叠通常由成堆的板或膜组成,该板或膜形成让墨从储墨器(ink reservoir)流至喷嘴阵列或孔阵列的流体通道。墨选择性从孔出来,以在打印基片上形成打印的图像。喷嘴层叠可以具有多个板以形成通道。通常情况下,其中的一个板形成体腔或压力室,被称为主体板。换能器在其上运作以通过一个喷嘴引起流入和流出体腔的膜片通常安装在主体板上。换能器进而安装在膜片上。
在图1中,换能器板块由夹在两个导电层之间的压电材料构成。这里的讨论可能把板块称为PZT板,应理解,该板块可以包含任何在板块切割时分开的换能器阵列。
在10处的板块切割标记了换能器和喷嘴层叠之间第一个可能出现的不对齐。切割后,板块已成为单个换能器的阵列,并在16处进行检验。一般在18处的检验之后进行测量,以确保切割线对齐是准确的。
在板块上进行这些操作的过程中,粘合剂在20处施加到喷嘴层叠。之后,这两者在22处进行对齐和合并。这提供了换能器和喷嘴层叠中体腔之间不对齐的另一种可能的根源。然后,在24处,在板块上的换能器被对着喷嘴层叠按压,其压力可能导致板块打滑或滑动造成进一步的错位。然后,在26处对该组件进行第二次检验,以及在28处进行第二测量。如将进一步讨论的,导致进一步延迟和成本增加的第二测量可以被消除。
图2示出了位于膜片23上被切割的换能器板块(21)的侧视图。膜片通过粘合剂29粘接到喷嘴层叠,在此处是主体板27。因为换能器必须与体腔对齐,否则喷嘴层叠可能无法正常工作,因此会发生与对齐相关的问题。正如图中所示,换能器的中心线33与体腔25的中心对齐。单个的换能器由切割的切口(例如31)所限定。
图3示出了能让板块在连接到喷嘴层叠或者其中的一部分后进行切割的方法的实施例。与图1的方法类似,图3的方法始于喷嘴层叠30,然后该换能器板块在32处合并到该喷嘴层叠,通常涉及粘合剂的使用。粘合剂的表面张力会使板块保持在原位,直到在38处的按压操作。然后,在38处向喷嘴层叠按压未切割的板块,或者至少向包含膜片的喷嘴层叠的一部分按压未切割的板块。这实际上可能仅仅由膜、附着到某种形式的固定装置的膜、附着到主体板的膜,等等组成。
在这里所讨论的实施方式中,板块的尺寸可以比最终切割成的状态更大,所以板块与膜片的对齐不必具有高精度。在合并和按操作之后,组件然后在40处经历检验。
然后在42处开始切割操作。该切割操作可能会导致使膜片具有开口的轻微变化,所以切割设备的观侧工具可以更准确地对齐在体腔上。这是本实施例的方法中的未对齐的唯一可能来源。在44处进行单次检验,在46处进行单次测量。
在实验中,对如图1中的现有方法的对齐和如图3的方法的对齐之间进行比较。关键测量值是,在X(水平)和Y(垂直)方向上,标称的换能器中心点与实际测量换能器的中心点之间的平均德尔塔(delta)。在图3方法中的X和Y测量值的标准偏差小到在图1的现有方法中的三分之一至七分之一之间。标准偏差越低越好。
图4示出了按压操作后的板块。在最初的实验中,板块发生开裂现象。对于许多材料的配置,板块材料和其所附着的膜片之间的膨胀系数不同。如果按压在两种材料分别膨胀之前进行,就产生裂纹。现在进行调整以确保直到这两个材料都已达到固化温度才进行按压操作且确保板块不开裂。应该注意,在这些实验的任何一个中,不存在有关块板切割的问题。
切割操作具有几种变化。图5-7展示其中的一些。例如,在图5中,隔膜64经历沿最终会成为锯线的地方形成体腔的半蚀刻。切割刀60具有深度68,深度68设置成切断整个板块62,但不会越过体腔,例如66。半蚀刻可远远超出阵列末端,以避免可能会影响未来的层和墨路径的划痕。
在图6中,膜片保持未蚀刻。膜片具有这样的尺寸,该尺寸导致超越换能器阵列边缘的材料最少。把具有板块尺寸的膜片连接到一个较大的薄板可以使这一目的实现,这将把具有板块尺寸的膜片直接附着到主体板。切割刀60具有设置成刚好稍微刻划膜片64顶部的深度70。如果该方法不使用两层的膜片或具有板块尺寸的膜片,则设计必须考虑到划痕,并避免在这些区域形成墨道。该方法可包括使用聚合物或粘合剂填充或以其他方式平坦化的阵列之外的划痕,以避免与墨道相关的问题。
图7示出了另一种变化。在本实施方式中,一旦板块顶层被切割之后,换能器阵列变成单片的或分离的。例如,板块可以由锆钛酸铅(PZT)板块组成,该锆钛酸铅(PZT)板块具有整个顶部和底部的用于电平面的板块镍镀层。一旦刀穿透顶层,单个片(tile)之间成为电隔离的。可能需要进行一些评估,以确定片与片之间会发生的串扰的程度。在图7中,刀具有深度72,使得刀穿透板块62的顶层,但完全不会穿透底层。
以这种方式,换能器阵列和体腔阵列对齐的方法变得简单,并且精度更高。通过对喷嘴层叠上板块或其一部分上的板块进行切割,两个不能对齐的来源消除了。如上所表明的,最终校准的现有标准偏差是这里公开的实施例的标准偏差的3倍。
此外,来自连接粘合剂的潜在串扰也消除了。如图8所示,当如图1所述板块切割后附着到膜片64时,粘合剂74可以挤出到片(例如62)之间的空间。这创建了换能器片之间的串扰的来源。当板块在切割前附着时,因粘合剂在切割之前固化,从而不能进入到的切割的切口。这可使得如果需要的话,能在换能器板块和膜片之间使用导电性接触粘合剂,以加强电连接。
Claims (6)
1.一种把打印头换能器安装到膜片的方法,其包括:
把换能器板块与膜片合并;
把该膜片按压到该板块以形成组件;及
在将该膜片按压到该板块之后,切割该板块以把该板块分割成换能器阵列,其中,该换能器阵列与体腔阵列对齐。
2.根据权利要求1的方法,进一步包括在切割后检验该组件。
3.如权利要求1所述的方法,其中,按压包括在合并后在切割前固化该板块和该膜片。
4.如权利要求1的方法,其中,所述膜片具有形成体腔的半蚀刻线,且切割该板块包括把切割刀的切割深度设置成与所述体腔内的深度相对应的深度。
5.根据权利要求1的方法,其中,切割该板块包括设置切割刀的切割深度以便在切割穿过该板块后在该膜片的顶部划痕。
6.根据权利要求1的方法,其中,该板块具有导电的顶层,且切割该板块包括设置切割刀的切割深度,以使得切断该板块的导电层,但不会切割穿过该板块的所述底表面。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US13/412,516 US9139004B2 (en) | 2012-03-05 | 2012-03-05 | Print head transducer dicing directly on diaphragm |
US13/412,516 | 2012-03-05 | ||
US13/412516 | 2012-03-05 |
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CN103302978A true CN103302978A (zh) | 2013-09-18 |
CN103302978B CN103302978B (zh) | 2016-09-28 |
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CN201310060415.3A Expired - Fee Related CN103302978B (zh) | 2012-03-05 | 2013-02-26 | 直接在膜片上切割的打印头换能器 |
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US (1) | US9139004B2 (zh) |
JP (1) | JP6059035B2 (zh) |
KR (1) | KR101959572B1 (zh) |
CN (1) | CN103302978B (zh) |
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US9139004B2 (en) * | 2012-03-05 | 2015-09-22 | Xerox Corporation | Print head transducer dicing directly on diaphragm |
US10166777B2 (en) | 2016-04-21 | 2019-01-01 | Xerox Corporation | Method of forming piezo driver electrodes |
US10252525B2 (en) | 2017-06-01 | 2019-04-09 | Xerox Corporation | Lead-free piezo printhead using thinned bulk material |
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KR20130101471A (ko) | 2013-09-13 |
JP2013184479A (ja) | 2013-09-19 |
US9139004B2 (en) | 2015-09-22 |
CN103302978B (zh) | 2016-09-28 |
JP6059035B2 (ja) | 2017-01-11 |
US20130227826A1 (en) | 2013-09-05 |
KR101959572B1 (ko) | 2019-03-18 |
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