CN103250312A - 用于离子平衡测量和调节的具有隔离的电容器电路的离子化平衡装置 - Google Patents
用于离子平衡测量和调节的具有隔离的电容器电路的离子化平衡装置 Download PDFInfo
- Publication number
- CN103250312A CN103250312A CN2011800588499A CN201180058849A CN103250312A CN 103250312 A CN103250312 A CN 103250312A CN 2011800588499 A CN2011800588499 A CN 2011800588499A CN 201180058849 A CN201180058849 A CN 201180058849A CN 103250312 A CN103250312 A CN 103250312A
- Authority
- CN
- China
- Prior art keywords
- conductor
- capacitor
- ions
- ion
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Elimination Of Static Electricity (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US42062910P | 2010-12-07 | 2010-12-07 | |
| US61/420,629 | 2010-12-07 | ||
| PCT/US2011/062367 WO2012078403A1 (en) | 2010-12-07 | 2011-11-29 | Ionization balance device with shielded capacitor circuit for ion balance measurements and adjustments |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103250312A true CN103250312A (zh) | 2013-08-14 |
Family
ID=45443148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011800588499A Pending CN103250312A (zh) | 2010-12-07 | 2011-11-29 | 用于离子平衡测量和调节的具有隔离的电容器电路的离子化平衡装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9588161B2 (https=) |
| JP (1) | JP5909785B2 (https=) |
| CN (1) | CN103250312A (https=) |
| TW (1) | TW201231820A (https=) |
| WO (1) | WO2012078403A1 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110888154A (zh) * | 2018-09-10 | 2020-03-17 | Nrd有限责任公司 | 离子发生器监视系统和离子传感器 |
| CN110945293A (zh) * | 2017-07-27 | 2020-03-31 | 尔森私人有限公司 | 离子产生装置 |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101969736A (zh) * | 2010-11-03 | 2011-02-09 | 北京聚星创源科技有限公司 | 离子发生系统及控制离子平衡度的方法 |
| CN103250312A (zh) | 2010-12-07 | 2013-08-14 | 3M创新有限公司 | 用于离子平衡测量和调节的具有隔离的电容器电路的离子化平衡装置 |
| DE102011002447B4 (de) * | 2011-01-04 | 2014-07-10 | Ident Technology Ag | Kapazitiver Annäherungsensor sowie Verfahren zur kapazitiven Annäherungsdetektion |
| WO2013085952A1 (en) | 2011-12-08 | 2013-06-13 | 3M Innovative Properties Company | An ionization monitoring device and method |
| JP5945970B2 (ja) * | 2013-10-23 | 2016-07-05 | Smc株式会社 | イオナイザ及びその制御方法 |
| JP5945972B2 (ja) * | 2013-11-01 | 2016-07-05 | Smc株式会社 | イオナイザ及びその制御方法 |
| TWI479952B (zh) * | 2013-12-10 | 2015-04-01 | 倚晶科技有限公司 | 離子產生裝置之靜電消散能力自我檢測方法 |
| US9356434B2 (en) * | 2014-08-15 | 2016-05-31 | Illinois Tool Works Inc. | Active ionization control with closed loop feedback and interleaved sampling |
| US9557294B2 (en) | 2014-12-19 | 2017-01-31 | Genia Technologies, Inc. | Nanopore-based sequencing with varying voltage stimulus |
| US9863904B2 (en) * | 2014-12-19 | 2018-01-09 | Genia Technologies, Inc. | Nanopore-based sequencing with varying voltage stimulus |
| KR101629915B1 (ko) * | 2015-02-17 | 2016-06-13 | (주)동일기연 | 챠지 플레이트 모니터링 장치 |
| US10126262B2 (en) | 2015-09-24 | 2018-11-13 | Genia Technologies, Inc. | Differential output of analog memories storing nanopore measurement samples |
| US10794863B1 (en) * | 2018-04-16 | 2020-10-06 | Nrd Llc | Ionizer monitoring system and ion sensor |
| US11385263B2 (en) * | 2018-10-18 | 2022-07-12 | S&C Electric Company | Capacitive voltage sensor with a hidden sensing electrode |
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| US3908164A (en) * | 1974-10-03 | 1975-09-23 | Xerox Corp | Corona current measurement and control arrangement |
| US4740862A (en) * | 1986-12-16 | 1988-04-26 | Westward Electronics, Inc. | Ion imbalance monitoring device |
| CN1375061A (zh) * | 1999-04-21 | 2002-10-16 | 布鲁斯·T·威廉姆斯 | 浮动平板电压监视器 |
| US20040145852A1 (en) * | 2003-01-29 | 2004-07-29 | Credence Technologies Inc. | Method and device for controlling ionization |
| CN1538182A (zh) * | 2003-04-15 | 2004-10-20 | ������������ʽ���� | 带电电位的评价方法及评价装置 |
| CN101437602A (zh) * | 2004-10-29 | 2009-05-20 | 特瑞克股份有限公司 | 离子平衡监视器 |
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| US4035720A (en) * | 1975-12-31 | 1977-07-12 | Harvey Philip C | Ion gauge system |
| US4757422A (en) * | 1986-09-15 | 1988-07-12 | Voyager Technologies, Inc. | Dynamically balanced ionization blower |
| US4829398A (en) * | 1987-02-02 | 1989-05-09 | Minnesota Mining And Manufacturing Company | Apparatus for generating air ions and an air ionization system |
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| US5008594A (en) * | 1989-02-16 | 1991-04-16 | Chapman Corporation | Self-balancing circuit for convection air ionizers |
| US5422573A (en) * | 1990-04-11 | 1995-06-06 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
| JPH11159430A (ja) | 1997-11-26 | 1999-06-15 | Mitsubishi Electric Corp | 内燃機関用のイオン電流検出装置 |
| US6252756B1 (en) | 1998-09-18 | 2001-06-26 | Illinois Tool Works Inc. | Low voltage modular room ionization system |
| DE69942695D1 (de) | 1998-12-22 | 2010-09-30 | Illinois Tool Works | Überwachungsanlage für selbstausgleichenden ionisator |
| JP3667186B2 (ja) * | 2000-02-29 | 2005-07-06 | キヤノン株式会社 | 信号転送装置及びそれを用いた固体撮像装置 |
| US6850403B1 (en) | 2001-11-30 | 2005-02-01 | Ion Systems, Inc. | Air ionizer and method |
| US20030218855A1 (en) * | 2002-05-22 | 2003-11-27 | Semtronics | Ionization system with reduced power supply |
| JP2004111310A (ja) * | 2002-09-20 | 2004-04-08 | Nissin Ion Equipment Co Ltd | 基板の帯電電圧計測装置およびイオンビーム照射装置 |
| US7091672B2 (en) * | 2003-06-10 | 2006-08-15 | Lutron Electronics Co., Inc. | High efficiency off-line linear power supply |
| US7197913B2 (en) * | 2003-09-04 | 2007-04-03 | Visteon Global Technologies, Inc. | Low cost circuit for IC engine diagnostics using ionization current signal |
| DE502005009411D1 (de) | 2005-05-06 | 2010-05-27 | Siemens Building Tech Ag | Verfahren und Vorrichtung zur Flammenüberwachung |
| JP4910207B2 (ja) | 2005-11-25 | 2012-04-04 | Smc株式会社 | イオンバランス調整方法及びそれを用いたワークの除電方法 |
| US7560948B2 (en) | 2006-01-11 | 2009-07-14 | Thermo Keytek LLC | Circuit for minimizing or eliminating pulse anomalies in human body model electrostatic discharge tests |
| JP2008041345A (ja) | 2006-08-03 | 2008-02-21 | Fujitsu Ltd | スポット型イオナイザの評価方法及びスポット型イオナイザ |
| JP2008060429A (ja) * | 2006-08-31 | 2008-03-13 | Toshiba Corp | 基板のプラズマ処理装置及びプラズマ処理方法 |
| US7456634B2 (en) * | 2006-10-26 | 2008-11-25 | Brooks Automation, Inc. | Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments |
| US7729101B2 (en) | 2006-12-04 | 2010-06-01 | Mks, Ion Systems | Method and apparatus for monitoring and controlling ionizing blowers |
| US7649728B2 (en) | 2006-12-20 | 2010-01-19 | Keyence Corporation | Electricity removal apparatus |
| JP5156993B2 (ja) | 2007-02-09 | 2013-03-06 | 独立行政法人産業技術総合研究所 | イオン発生器及び除電器 |
| US7768267B2 (en) * | 2007-07-11 | 2010-08-03 | Brooks Automation, Inc. | Ionization gauge with a cold electron source |
| JP5201958B2 (ja) * | 2007-11-22 | 2013-06-05 | 国立大学法人東京工業大学 | 圧電トランス電極を用いたイオナイザ及びそれによる除電用イオン発生方法 |
| KR101541273B1 (ko) * | 2007-12-19 | 2015-08-03 | 엠케이에스 인스트루먼츠, 인코포레이티드 | 전자 멀티플라이어 냉 방출 소스를 갖는 이온화 게이지 |
| CN101990630B (zh) * | 2008-02-21 | 2013-08-14 | 布鲁克机械公司 | 具有设计用于高压操作的操作参数和几何形状的电离计 |
| US9887069B2 (en) * | 2008-12-19 | 2018-02-06 | Lam Research Corporation | Controlling ion energy distribution in plasma processing systems |
| US8324905B2 (en) * | 2010-03-01 | 2012-12-04 | Woodward, Inc. | Automatic variable gain amplifier |
| US20120043972A1 (en) * | 2010-08-20 | 2012-02-23 | Arun Jayaraman | Method and circuit for reducing noise in a capacitive sensing device |
| CN103250312A (zh) | 2010-12-07 | 2013-08-14 | 3M创新有限公司 | 用于离子平衡测量和调节的具有隔离的电容器电路的离子化平衡装置 |
| US9437093B2 (en) | 2011-10-06 | 2016-09-06 | Microchip Technology Incorporated | Differential current measurements to determine ION current in the presence of leakage current |
| WO2013085952A1 (en) | 2011-12-08 | 2013-06-13 | 3M Innovative Properties Company | An ionization monitoring device and method |
| US9189940B2 (en) | 2011-12-14 | 2015-11-17 | Microchip Technology Incorporated | Method and apparatus for detecting smoke in an ion chamber |
-
2011
- 2011-11-29 CN CN2011800588499A patent/CN103250312A/zh active Pending
- 2011-11-29 US US13/991,926 patent/US9588161B2/en active Active
- 2011-11-29 JP JP2013543206A patent/JP5909785B2/ja active Active
- 2011-11-29 WO PCT/US2011/062367 patent/WO2012078403A1/en not_active Ceased
- 2011-12-06 TW TW100144927A patent/TW201231820A/zh unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3908164A (en) * | 1974-10-03 | 1975-09-23 | Xerox Corp | Corona current measurement and control arrangement |
| US4740862A (en) * | 1986-12-16 | 1988-04-26 | Westward Electronics, Inc. | Ion imbalance monitoring device |
| CN1375061A (zh) * | 1999-04-21 | 2002-10-16 | 布鲁斯·T·威廉姆斯 | 浮动平板电压监视器 |
| US20040145852A1 (en) * | 2003-01-29 | 2004-07-29 | Credence Technologies Inc. | Method and device for controlling ionization |
| CN1538182A (zh) * | 2003-04-15 | 2004-10-20 | ������������ʽ���� | 带电电位的评价方法及评价装置 |
| CN101437602A (zh) * | 2004-10-29 | 2009-05-20 | 特瑞克股份有限公司 | 离子平衡监视器 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110945293A (zh) * | 2017-07-27 | 2020-03-31 | 尔森私人有限公司 | 离子产生装置 |
| US11368000B2 (en) | 2017-07-27 | 2022-06-21 | Naturion Pte. Ltd. | Ion generator device |
| US11502483B2 (en) | 2017-07-27 | 2022-11-15 | Naturion Pte. Ltd. | Ion generator device |
| CN110888154A (zh) * | 2018-09-10 | 2020-03-17 | Nrd有限责任公司 | 离子发生器监视系统和离子传感器 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012078403A1 (en) | 2012-06-14 |
| US20130271164A1 (en) | 2013-10-17 |
| US9588161B2 (en) | 2017-03-07 |
| JP2014502026A (ja) | 2014-01-23 |
| JP5909785B2 (ja) | 2016-04-27 |
| TW201231820A (en) | 2012-08-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| AD01 | Patent right deemed abandoned |
Effective date of abandoning: 20160106 |
|
| C20 | Patent right or utility model deemed to be abandoned or is abandoned |