CN103212973B - 一种大口径光学元件的横向在线洁净拆装方法 - Google Patents
一种大口径光学元件的横向在线洁净拆装方法 Download PDFInfo
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Families Citing this family (4)
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CN105022166B (zh) * | 2015-08-25 | 2017-12-05 | 中国工程物理研究院激光聚变研究中心 | 大口径光学元件动态洁净保持和转运装置 |
CN105093466B (zh) * | 2015-09-30 | 2017-07-28 | 哈尔滨工业大学 | 大口径光学元件的悬挂式在线拆装装置及拆装方法 |
CN107571273B (zh) * | 2017-10-17 | 2020-06-16 | 清华大学 | 一种大口径光学元件精密洁净装配的自动化抓取装置与方法 |
CN111515212B (zh) * | 2020-04-24 | 2021-11-05 | 中国科学院空天信息创新研究院 | 一种侧挂激光器的在线洁净维护的装置及方法 |
Citations (6)
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CN87105883A (zh) * | 1986-08-26 | 1988-03-09 | 森敬 | 用于清洁球形圆顶盖的设备 |
US4951387A (en) * | 1986-12-02 | 1990-08-28 | Clextral | Installation for mounting and removing screws of an extrusion machine |
US7673388B2 (en) * | 2003-11-12 | 2010-03-09 | The Yasunaga Co., Ltd. | Method of forming fracture start portion of ductile metal part and fracture start portion forming device |
CN101770824A (zh) * | 2008-12-31 | 2010-07-07 | 江苏核电有限公司 | 密度式硼浓度仪在线清洁及标定系统 |
CN202270443U (zh) * | 2011-09-19 | 2012-06-13 | 东莞市中镓半导体科技有限公司 | 一种免拆装在线清洁的新型过滤装置 |
CN103008265A (zh) * | 2011-09-21 | 2013-04-03 | 旺矽科技股份有限公司 | 探针清洁装置以及使用其的在线探针清洁方法 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN87105883A (zh) * | 1986-08-26 | 1988-03-09 | 森敬 | 用于清洁球形圆顶盖的设备 |
US4951387A (en) * | 1986-12-02 | 1990-08-28 | Clextral | Installation for mounting and removing screws of an extrusion machine |
US7673388B2 (en) * | 2003-11-12 | 2010-03-09 | The Yasunaga Co., Ltd. | Method of forming fracture start portion of ductile metal part and fracture start portion forming device |
CN101770824A (zh) * | 2008-12-31 | 2010-07-07 | 江苏核电有限公司 | 密度式硼浓度仪在线清洁及标定系统 |
CN202270443U (zh) * | 2011-09-19 | 2012-06-13 | 东莞市中镓半导体科技有限公司 | 一种免拆装在线清洁的新型过滤装置 |
CN103008265A (zh) * | 2011-09-21 | 2013-04-03 | 旺矽科技股份有限公司 | 探针清洁装置以及使用其的在线探针清洁方法 |
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Inventor after: Lu Lihua Inventor after: Zhang Qingchun Inventor after: Yu Fuli Inventor after: Cao Yongzhi Inventor after: Liang Yingchun Inventor before: Liang Yingchun Inventor before: Lu Lihua Inventor before: Zhang Qingchun Inventor before: Yu Fuli Inventor before: Cao Yongzhi |
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Free format text: CORRECT: INVENTOR; FROM: LIANG YINGCHUN LU LIHUA ZHANG QINGCHUN YU FULI CAO YONGZHI TO: LU LIHUA ZHANG QINGCHUN YU FULI CAO YONGZHI LIANG YINGCHUN |
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