CN103184093B - Cutting liquid used for sapphire cutting by diamond wire - Google Patents
Cutting liquid used for sapphire cutting by diamond wire Download PDFInfo
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Abstract
The invention relates to water-based cutting liquid used for sapphire cutting, and is suitable for cutting of hard and brittle materials such as sapphire and the like. The cutting liquid of the invention mainly comprises a lubricant, a dispersant, an emulsifier, an antirust agent, and water. The cutting liquid of the invention has excellent lubricity and dispersibility, is easy to clean, can meet requirements for diamond wire high-speed cutting of hard and brittle materials such as sapphire and the like, also provides cut pieces with good surface properties, and can significantly increase product qualified rates.
Description
Technical field
The present invention relates to a kind of cutting liquid cut for hard brittle material sheet, side and block, more specifically, the present invention relates to a kind of for the sapphire cutting liquid of diamond wire saw.
Technical background
Sapphire is the general designation of other color sapphire except ruby in sapphire, and main component is aluminium sesquioxide.Due to sapphire optics, to penetrate band very wide, all has good light transmission, in a large number for optical element, infrared facility, the radium-shine lens materials of high strength and photomask materials from near-ultraviolet light (190nm) to middle infrared (Mid-IR).Because of its there is the high velocity of sound, high temperature resistant, anticorrosive, high rigidity, high light transmittance, fusing point are high features such as (2045 DEG C), be also often used as the material of sealed cell.Along with the fast development of the product such as LED element and 3G mobile, sapphire wafer has become the material that numerous industry is badly in need of.
Traditional sapphire wafer cutting mode has four kinds: one is emery wheel cutting, but cutting speed in feet per minute is slow and the loss of emery wheel is large; Another kind is laser cutting, and based on solid statelaser, 2 main directions are the solid statelaser of short pulse duration and short wavelength respectively.But, compared with adopting the method for diamond scriber, there is the problem that LED luminance is low in laser scribing processing; The third is inner circle cutting, adopts inner circle or circle cutting machine, cutting edge plates diamond particles; 4th kind is multi-wire saw: (a) free abrasive, cut with silicon material, (b) intrinsic abrasive material, diamond wire cuts, depend on the state of the art of operator, therefore there is the problem of quality stability and yield rate aspect, and the surface quality of the silicon chip cut out is more coarse, unsatisfactory and customer's approval.
CN101870084A discloses a kind of method for sapphire wafer cutting, namely adopt the multi-line cutting method of free abrasive, the method adopts viscosity under normal temperature to be the cutting oil of 20 ~ 50mPas and particle diameter to be the diadust of 4 ~ 12 μm to carry out sapphire cutting.
Less just because of correlative study, cause present chipping qualities relatively poor, how to improve slice surface quality, not only will set about from diamond fretsaw quality and Sawing Process, the lubrication of cutting liquid in cutting process, cooling effect are also very important.The lubricity that cutting liquid is good can slow down the hard friction between steel wire and silicon chip, reduces the generation of heat of friction, and then can reduce stria, reaches the effect improving slice surface quality.So study a kind ofly be applicable to the diamond wire saw technology of cutting sapphire, pollution-free, that product qualified rate is high cutting liquid is our problem anxious to be resolved.
Summary of the invention
Therefore, the technical problem to be solved in the present invention is to provide a kind of pollution-free, cutting liquid that yield rate is high for sapphire cutting.
On the one hand, the invention provides a kind of for the sapphire cutting liquid of Linear cut, this cutting liquid comprises polyoxyethylene glycol, lubricant, dispersion agent, rust-preventive agent, defoamer and water.
On the other hand, the percentage composition of each component in cutting liquid of the present invention is as follows:
Again on the one hand, the number-average molecular weight of the polyoxyethylene glycol in cutting liquid of the present invention is 200-2000.
Again on the one hand, the lubricant in cutting liquid of the present invention be selected from polyether glycol, organic ester one or more.
Polyether glycol (abbreviation polyethers) is obtained through polyaddition reaction in the presence of a catalyst by initiator (compound containing active hydrogen group) and oxyethane (EO), propylene oxide (PO), butylene oxide ring (BO) etc.Described polyether glycol be selected from glycerol atactic polyether, propylene glycol atactic polyether, glycerol block polyether, propylene glycol block polyether one or more.
Described organic ester be selected from glyceryl monooleate, isooctyl oleate, sulphonated oil, sorbitan oleate, tricarboxymethyl propane oleate etc. one or more.
Described dispersion agent be selected from triethyl hexyl phosphoric acid, amine hydroxybenzene, polyacrylamide, fatty acid polyglycol ester, glyceryl monostearate, Tristearoylglycerol, silicate one or more.
Described rust-preventive agent be selected from benzotriazole, methyl benzotriazazole, 4-carboxy benzotriazole, triethanolamine oleate, anhydrous sodium carbonate, boric acid ester one or more.
Described defoamer be selected from polysiloxane defoamers, polyether antifoam agent one or more.
Cutting liquid of the present invention can be prepared according to normal pressure preparation method.Such as, at 20 ~ 60 DEG C, the polyoxyethylene glycol of predetermined weight percent, lubricant, dispersion agent, rust-preventive agent, defoamer and water are mixed, then stirs 10 ~ 20 minutes, form homogeneous phase, stable system, be sapphire cutting liquid of the present invention.
Compared with prior art, beneficial effect of the present invention is mainly:
1. cutting liquid of the present invention has excellent lubrication, cooling performance, is applicable to the cutting of sapphire wafer, can improves slice surface quality and yield rate significantly.
2. cutting liquid of the present invention is pollution-free, is easy to cleaning, reclaims.
In order to understand the present invention better, hereinafter, with reference to embodiment below, the present invention is further illustrated.Unless made separate stipulations herein, the same meaning that scientific and technical terminology used herein is all understood usually with general technical staff of the technical field of the invention.Wherein mentioned material, method and embodiment are below only for illustration of, instead of the restriction to scope of the present invention.
Embodiment
The present invention is composite a kind of cutting liquid for cutting sapphire mainly, and this cutting liquid will possess the performances such as good lubrication, cooling, antirust, dispersion.
Dispersing property and lubricity that polyoxyethylene glycol can significantly improve cutting liquid is added in cutting liquid of the present invention.
The number-average molecular weight scope of described polyoxyethylene glycol is 200 ~ 2000, and when molecular weight polyethylene glycol is less than 200, the lubricant effect of cutting liquid is not good; When molecular weight is greater than 2000, then affect the dispersing property of cutting liquid.
The percent ranges of described polyoxyethylene glycol is 5 ~ 30%, when its percentage composition is less than 5%, does not have effectively lubricating dissemination; When its percentage composition is greater than 30%, viscosity is excessive.So its percentage composition is best between 5-30%.
In cutting liquid of the present invention, add lubricant effectively can reduce hard friction between steel wire and sapphire sheet, reduce the generation of heat of friction, improve the surface quality of section.
Described lubricant be selected from polyether glycol, organic ester one or more, its mass percent is 10-30%, and within the scope of this, its lubricant effect is best.Its consumption is more than 30%, then the viscosity of cutting liquid is excessive; Its consumption is less than 10%, then lubrication is not obvious.
In cutting liquid of the present invention, add dispersion agent can make section chip be distributed in equably in cutting liquid, can be cut liquid and carry, and is conducive to the clean of cutting machine and cut material like this.
Described dispersion agent be selected from triethyl hexyl phosphoric acid, amine hydroxybenzene, polyacrylamide, fatty acid polyglycol ester, glyceryl monostearate, Tristearoylglycerol, silicate one or more, its percentage composition is 8-20%.Experiment shows, when the consumption of dispersion agent is above-mentioned scope, dispersion effect is best.
Described rust-preventive agent be selected from benzotriazole, methyl benzotriazazole, 4-carboxy benzotriazole, triethanolamine oleate, anhydrous sodium carbonate, boric acid ester one or more.Those skilled in the art is to be understood that effect and the consumption of rust-preventive agent.In a preferred embodiment of the invention, the consumption of rust-preventive agent is the 1-5% of whole cutting liquid quality.
In cutting liquid of the present invention, adding defoamer can reach froth breaking effect by reducing surface tension, ensureing cutting quality.
Described defoamer be selected from polysiloxane defoamers, polyether antifoam agent one or more.Clearly, consumption is the 0.01-0.05% of whole cutting liquid quality in the effect of defoamer.
It is pointed out that in this manual, except as otherwise noted, all mass percents are all based on the quality of whole cutting liquid.
Various component carries out the composite of different ratios and different components after primary election.Preparation method refers to specific embodiment, and composite good cutting liquid passes through the test of suspension and dispersing property.
The dispersing property of cutting liquid is characterized by the stability of sapphire powder in cutting liquid, concrete grammar the cutting liquid configured is weighed 100g add 10g sapphire powder, stir, pour in 100mL graduated cylinder and investigate its dispersing property, read the supernatant volume of different time, the less explanation dispersiveness of its numerical value is better.
The lubricity of cutting liquid is tested by four-ball machine, last non seizure load Pb value and frictional coefficient can be obtained, and the size description of the Pb value quality of lubricant effect, wherein the lubricity of the larger cutting liquid of Pb value is better, the oilness of the less cutting liquid of frictional coefficient is better.Concrete measuring method can with reference to National Standard of the People's Republic of China GB-T12583-1998.
The preservative property of cutting liquid measure and adopt monolithic and lamination preservative challenge test method to measure, concrete grammar is entirely invaded in the test solution configured by cast iron, red copper, cover glass cover, be displaced in the thermostatted of 55 ± 2 DEG C of constant temperature, long run test is to the specified time, take out test piece to check, opinion rating is divided into A, B, C, D tetra-grades.
The rust-preventing characteristic of cutting liquid measures same employing monolithic and the antirust determination of experimental method of lamination, concrete grammar is dripped in test piece by the cutting liquid configured, put into constant temperature to the thermostat container of 35 ± 2 DEG C, long run test is taken out test piece to the specified time and is observed, and is divided into A, B, C, D tetra-grades equally.
Concrete anticorrosion and rustless property testing method refers to National Standard of the People's Republic of China GB6144-85.
Triethanolamine oleate derives from Hai'an, Jiangsu petroleum chemical plant.
Propylene glycol atactic polyether derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called PPE1500.
Glycerol atactic polyether derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called GPE3000.
Polyoxyethylene glycol (number-average molecular weight 200) derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called PEG-200.
Polyoxyethylene glycol (number-average molecular weight 400) derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called PEG-400.
Polyoxyethylene glycol (number-average molecular weight 800) derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called PEG-800.
Polyoxyethylene glycol (number-average molecular weight 1000) derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called PEG-1000.
Polyoxyethylene glycol (number-average molecular weight 2000) derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called PEG-2000.
Benzotriazole is commercially available prod.
Silicone antifoam agent derives from defoamer company limited of Jiangsu Huaxing, and commodity are called XPP-7533.
Silicone antifoam agent derives from Shanghai and founds strange chemical industry (Wuxi) company limited, and commodity are called L-101.
Polyether antifoam agent derives from Qingdao Zhong Bao Chemical Co., Ltd., and commodity are called ZBH-305.
With reference to the following examples, those skilled in the art will be easier to understand characteristic of the present invention and advantage.
Embodiment one
Preparation 1000g cutting liquid, taking polyethylene glycol (number-average molecular weight 200) 300g, GPE-3000 block polyether 300g, triethanolamine oleate 200g, benzotriazole 50g, XPP-7533 silicone antifoam agent 0.1g, water is about 150g.
The polyoxyethylene glycol (number-average molecular weight 200) of above-mentioned value is slowly added successively, GPE-3000 block polyether, triethanolamine oleate, benzotriazole, XPP-7533 silicone antifoam agent, water in water with continuous stirring.Stir and namely obtain sapphire cutting liquid in 10 minutes.Its performance index see table 1,2.
Embodiment two
Preparation 1000g cutting liquid, taking polyethylene glycol (number-average molecular weight 400) 300g, PPE-1500 block polyether 300g, triethanolamine oleate 200g, benzotriazole 30g, XPP-7533 silicone antifoam agent 0.1g, water is about 170g.
The polyoxyethylene glycol (number average molecular weight 400) of above-mentioned value is slowly added successively, PPE-1500 block polyether, triethanolamine oleate, benzotriazole, XPP-7533 silicone antifoam agent, water in water with continuous stirring.Stir and namely obtain sapphire cutting liquid in 10 minutes.Its performance index see table 1,2.
Embodiment three
Preparation 1000g cutting liquid, taking polyethylene glycol (number-average molecular weight 1000) 200g, GPE-3000 block polyether 250g, triethanolamine oleate 150g, benzotriazole 10g, ZBH-305 polyether antifoam agent defoamer 0.1g, water is about 390g.
The polyoxyethylene glycol (number-average molecular weight 200) of above-mentioned value is slowly added successively, GPE-3000 block polyether, triethanolamine oleate, benzotriazole, ZBH-305 polyether antifoam agent defoamer, water in water with continuous stirring.Stir and namely obtain sapphire cutting liquid in 10 minutes.Its performance index see table 1,2.
Embodiment four
Preparation 1000g cutting liquid, taking polyethylene glycol (number-average molecular weight 2000) 200g, PPE-1500 block polyether 300g, triethanolamine oleate 240g, benzotriazole 10g, ZBH-305 polyether antifoam agent 0.1g, water is about 250g.
The polyoxyethylene glycol (number-average molecular weight 2000) of above-mentioned value is slowly added successively, PPE-1500 block polyether, triethanolamine oleate, benzotriazole, ZBH-305 polyether antifoam agent, water in water with continuous stirring.Stir and namely obtain sapphire cutting liquid in 10 minutes.Its performance index see table 1,2.
Embodiment five
Preparation 1000g cutting liquid, taking polyethylene glycol (number-average molecular weight 800) 300g, GPE-3000 block polyether 300g, triethanolamine oleate 200g, benzotriazole 50g, L-101 silicone antifoam agent 0.1g, water is about 150g.
The polyoxyethylene glycol (number-average molecular weight 200) of above-mentioned value is slowly added successively, GPE-3000 block polyether, triethanolamine oleate, benzotriazole, L-101 silicone antifoam agent, water in water with continuous stirring.Stir and namely obtain sapphire cutting liquid in 10 minutes.Its performance index see table 1,2.
Embodiment six
Preparation 1000g cutting liquid, taking polyethylene glycol (number-average molecular weight 400) 300g, PPE-1500 block polyether 300g, triethanolamine oleate 200g, benzotriazole 30g, L-101 silicone antifoam agent 0.1g, water is about 170g.
The polyoxyethylene glycol (number-average molecular weight 400) of above-mentioned value is slowly added successively, PPE-1500 block polyether, triethanolamine oleate, benzotriazole, L-101 silicone antifoam agent, water in water with continuous stirring.Stir and namely obtain sapphire cutting liquid in 10 minutes.Its performance index see table 1,2.
Contrast with commercially available cutting liquid, cutting liquid of the present invention has good lubrication and cooling performance, and good dispersion, anticorrosion, rustless property, detailed data is in table 1,2:
The lubricity of table 1 sapphire cutting liquid and commercially available cutting liquid contrasts
| Sample | Frictional coefficient | Last non seizure load Pb value |
| Embodiment one | 0.056 | 350 |
| Embodiment two | 0.037 | 640 |
| Embodiment three | 0.064 | 320 |
| Embodiment four | 0.047 | 580 |
| Embodiment five | 0.034 | 620 |
| Embodiment six | 0.058 | 370 |
| Commercially available cutting liquid | 0.087 | 290 |
The anti-rust and corrosionproperties of table 2 sapphire cutting liquid and commercially available cutting liquid contrasts
The lubricity of this cutting liquid is by its frictional coefficient and maximumly judge without seizing Pb value, and frictional coefficient is less, maximum larger without seizing Pb value, illustrates that its lubricant effect is better.
The cutting liquid of this invention has good suspension and dispersiveness, can ensure its quality of cutting into slices in cutting, also has anticorrosion and rustless property preferably simultaneously, and machine is cut for a long time can not get rusty, and reduces cutting cost; This cutting liquid belongs to water-based cutting liquid, therefore easy cleaning.Sapphire cutting can be applied to.
Although in order to the present invention is described, disclose the preferred embodiments of the invention, but it will be understood by those of skill in the art that when not departing from the design of the present invention and scope that claims limit, various amendment, interpolation and replacement can be made to the present invention.
Claims (6)
1., for the sapphire cutting liquid of Linear cut, this cutting liquid comprises polyoxyethylene glycol, lubricant, dispersion agent, rust-preventive agent, defoamer and water; Wherein the percentage composition of each component is as follows:
Described lubricant is selected from polyether glycol, and described dispersion agent is selected from triethanolamine oleate.
2. cutting liquid according to claim 1, wherein said polyoxyethylene glycol number-average molecular weight is 200-2000.
3. cutting liquid according to claim 1, wherein said polyether glycol be selected from glycerol atactic polyether, propylene glycol atactic polyether, glycerol block polyether, propylene glycol block polyether one or more.
4. cutting liquid according to claim 1, wherein said rust-preventive agent be selected from benzotriazole, methyl benzotriazazole, 4-carboxy benzotriazole, anhydrous sodium carbonate, boric acid ester one or more.
5. cutting liquid according to claim 1, wherein said defoamer is one or more in polysiloxane defoamers, polyether antifoam agent.
6. the application of cutting liquid in diamond wire saw complete processing any one of aforementioned claim.
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