CN103184093A - Cutting liquid used for sapphire cutting by diamond wire - Google Patents
Cutting liquid used for sapphire cutting by diamond wire Download PDFInfo
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Abstract
The invention relates to water-based cutting liquid used for sapphire cutting, and is suitable for cutting of hard and brittle materials such as sapphire and the like. The cutting liquid of the invention mainly comprises a lubricant, a dispersant, an emulsifier, an antirust agent, and water. The cutting liquid of the invention has excellent lubricity and dispersibility, is easy to clean, can meet requirements for diamond wire high-speed cutting of hard and brittle materials such as sapphire and the like, also provides cut pieces with good surface properties, and can significantly increase product qualified rates.
Description
Technical field
The present invention relates to a kind of cutting liquid for hard brittle material sheet, side and piece cutting, more specifically, the present invention relates to a kind of cutting liquid for the diamond wire cutting sapphire.
Technical background
Sapphire be in the sapphire except ruby the general designation of other color sapphire, main component is aluminium sesquioxide.Band is very wide because sapphire optics penetrates, and (190nm) all has good light transmission to middle infrared (Mid-IR) from near-ultraviolet light, is used for optical element, infrared facility, the radium-shine lens materials of high strength and photomask materials in a large number.Because it has the high velocity of sound, high temperature resistant, anticorrosive, high rigidity, high light transmittance, fusing point height characteristics such as (2045 ℃), also be often used as the material of sealed cell.Along with the fast development of products such as LED element and 3G mobile, sapphire wafer has become the material that numerous industries are badly in need of.
Traditional sapphire wafer cutting mode has four kinds: a kind of is the emery wheel cutting, but cutting speed in feet per minute loss slow and emery wheel is big; Another kind is laser cutting, based on solid statelaser, and 2 main solid statelasers that direction is respectively short pulse duration and short wavelength.But, laser scribing processing is compared with the method that adopts diamond scriber, has the problem of LED low lightness; The third is interior circle cutting, circle or cylindrical cutting machine in adopting, gold-plated hard rock particle on the cutting edge; The 4th kind is multi-thread cutting: (a) free abrasive, cut with the silicon material, (b) intrinsic abrasive material, the cutting of Buddha's warrior attendant line, depend on technical level of operators, so have the problem of quality stability and yield rate aspect, and the surface quality of the silicon chip that cuts out is more coarse, is difficult to satisfactory and customer's approval.
CN101870084A discloses a kind of method for the sapphire wafer cutting, namely adopt the multi-line cutting method of free abrasive, it is that the cutting oil of 20～50mPas and diadust that particle diameter is 4～12 μ m carry out the sapphire cutting that this method adopts viscosity under normal temperature.
Less just because of correlative study, cause present chipping qualities relatively poor relatively, how to improve the slice surface quality, not only to set about from diamond fretsaw quality and sawing technology, in the cutting process cutting liquid lubricated, cooling effect is also very important.Cutting liquid good lubricating property can be slowed down the hard friction between steel wire and the silicon chip, the generation of heat of reducing friction, and then can reduce stria, reach the effect that improves the slice surface quality.So studying a kind of diamond wire cutting technique of cutting sapphire, cutting liquid pollution-free, that product qualified rate is high of being applicable to is our urgency problems to be solved.
Summary of the invention
Therefore, the technical problem to be solved in the present invention provides a kind of pollution-free, cutting liquid that yield rate is high for sapphire cutting.
On the one hand, the invention provides a kind of cutting liquid for the line cutting sapphire, this cutting liquid comprises polyoxyethylene glycol, lubricant, dispersion agent, rust-preventive agent, defoamer and water.
On the other hand, the percentage composition of each component in the cutting liquid of the present invention is as follows:
On the one hand, the number-average molecular weight of the polyoxyethylene glycol in the cutting liquid of the present invention is 200-2000 again.
Again on the one hand, the lubricant in the cutting liquid of the present invention is to be selected from polyether glycol, the organic ester one or more.
Polyether glycol (abbreviation polyethers) is to be made through polyaddition reaction in the presence of catalyzer by initiator (compound that contains active hydrogen group) and oxyethane (EO), propylene oxide (PO), butylene oxide ring (BO) etc.Described polyether glycol is selected from one or more in glycerol atactic polyether, propylene glycol atactic polyether, glycerol block polyether, the propylene glycol block polyether.
Described organic ester is to be selected from glyceryl monooleate, the different monooctyl ester of oleic acid, sulphonated oil, sorbitan oleate, the tricarboxymethyl propane oleate etc. one or more.
Described dispersion agent is to be selected from triethyl hexyl phosphoric acid, amine hydroxybenzene, polyacrylamide, fatty acid polyglycol ester, glyceryl monostearate, Tristearoylglycerol, the silicate one or more.
Described rust-preventive agent is to be selected from benzotriazole, methyl benzotriazazole, 4-carboxy benzotriazole, triethanolamine oleate, anhydrous sodium carbonate, the boric acid ester one or more.
Described defoamer is to be selected from polysiloxane defoamers, the polyether antifoam agent one or more.
Cutting liquid of the present invention can prepare according to the normal pressure preparation method.For example, under 20～60 ℃, the polyoxyethylene glycol of predetermined weight percent, lubricant, dispersion agent, rust-preventive agent, defoamer and water are mixed, stirred then 10～20 minutes, form homogeneous phase, stable system, be sapphire cutting liquid of the present invention.
Compared with prior art, beneficial effect of the present invention mainly is:
1. cutting liquid of the present invention has excellent lubricated, cooling performance, is applicable to the cutting of sapphire wafer, can improve slice surface quality and yield rate significantly.
2. cutting liquid of the present invention is pollution-free, is easy to clean, and reclaims.
In order to understand the present invention better, hereinafter, the embodiment with reference to the back is described more specifically the present invention.Unless this paper makes separate stipulations, the employed scientific and technical terminology of this paper all with the same meaning of general technical staff of the technical field of the invention institute common sense.Wherein the embodiment of mentioned material, method and back only is used for explanation, rather than to the restriction of scope of the present invention.
Embodiment
The present invention mainly is composite a kind of cutting liquid for cutting sapphire, and this cutting liquid will possess performances such as good lubricated, cooling, antirust, dispersion.
In cutting liquid of the present invention, add dispersing property and the lubricity that polyoxyethylene glycol can significantly improve cutting liquid.
The number-average molecular weight scope of described polyoxyethylene glycol is 200～2000, when molecular weight polyethylene glycol less than 200 the time, the lubricant effect of cutting liquid is not good; When molecular weight greater than 2000 the time, the dispersing property of influence cutting liquid then.
The percentage composition scope of described polyoxyethylene glycol is 5～30%, and its percentage composition did not have the effectively lubricating dissemination less than 5% o'clock; Its percentage composition was greater than 30% o'clock, and viscosity is excessive.So its percentage composition is best between 5-30%.
The interpolation lubricant can effectively reduce the hard friction between steel wire and the sapphire sheet in cutting liquid of the present invention, and the generation of the heat of reducing friction improves the surface quality of section.
Described lubricant is to be selected from polyether glycol, the organic ester one or more, and its mass percent is 10-30%, and its lubricant effect is best in this scope.Its consumption surpasses 30%, and the viscosity of then cutting liquid is excessive; Its consumption is less than 10%, and then lubrication is not obvious.
In cutting liquid of the present invention, add dispersion agent the section chip is distributed in the cutting liquid equably, can be cut liquid and carry, be conducive to cutting machine like this and be cut the cleaning of material.
Described dispersion agent is to be selected from triethyl hexyl phosphoric acid, amine hydroxybenzene, polyacrylamide, fatty acid polyglycol ester, glyceryl monostearate, Tristearoylglycerol, the silicate one or more, and its percentage composition is 8-20%.Experiment shows, when the consumption of dispersion agent is above-mentioned scope, and dispersion effect the best.
Described rust-preventive agent is to be selected from benzotriazole, methyl benzotriazazole, 4-carboxy benzotriazole, triethanolamine oleate, anhydrous sodium carbonate, the boric acid ester one or more.Those skilled in the art is to be understood that effect and the consumption of rust-preventive agent.In a preferred embodiment of the invention, the consumption of rust-preventive agent is the 1-5% of whole cutting liquid quality.
In cutting liquid of the present invention, add defoamer and can guarantee cutting quality by reducing the effect that surface tension reaches froth breaking.
Described defoamer is to be selected from one or more of polysiloxane defoamers, polyether antifoam agent.The effect of defoamer clearly, consumption is the 0.01-0.05% of whole cutting liquid quality.
It is pointed out that in this manual except as otherwise noted, all mass percents all are the quality based on whole cutting liquid.
Various components are carried out the composite of different ratios and different components later on through primary election.Preparation method sees specific embodiment for details, composite good cutting liquid process suspension and the test of dispersing property.
The dispersing property of cutting liquid is to characterize by the stability of sapphire powder in cutting liquid, concrete grammar is that the cutting liquid weighing 100g that will configure adds 10g sapphire powder, stir, pour into and investigate its dispersing property in the 100mL graduated cylinder, read the supernatant liquor volume of different time, its numerical value more bright dispersiveness of novel is more good.
The lubricity of cutting liquid is to test by four-ball machine, can obtain last non seizure load Pb value and frictional coefficient, and the size description of Pb value the quality of lubricant effect, wherein the lubricity of the more big cutting liquid of Pb value is more good, the oilness of the more little cutting liquid of frictional coefficient is more good.Concrete measuring method can be with reference to State Standard of the People's Republic of China GB-T12583-1998.
The preservative property of cutting liquid are measured and are adopted monolithic and the anticorrosion determination of experimental method of lamination, concrete grammar is that cast iron, red copper are invaded entirely in the test solution that has configured, add a cover lens, be displaced in 55 ± 2 ℃ the thermostatted of constant temperature, long run test is to the specified time, take out test piece and check that opinion rating is divided into A, B, four grades of C, D.
The rust-preventing characteristic of cutting liquid is measured same monolithic and the antirust determination of experimental method of lamination of adopting, concrete grammar is that the cutting drop that will configure is added in the test piece, put into the thermostat container of constant temperature to 35 ± 2 ℃, long run test is taken out test piece to the specified time and is observed, and is divided into A, B, four grades of C, D equally.
Concrete anticorrosion and rustless property testing method sees State Standard of the People's Republic of China GB6144-85 for details.
Triethanolamine oleate derives from Hai'an, Jiangsu petroleum chemical plant.
The propylene glycol atactic polyether derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called PPE1500.
The glycerol atactic polyether derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called GPE3000.
Polyoxyethylene glycol (number-average molecular weight 200) derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called PEG-200.
Polyoxyethylene glycol (number-average molecular weight 400) derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called PEG-400.
Polyoxyethylene glycol (number-average molecular weight 800) derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called PEG-800.
Polyoxyethylene glycol (number-average molecular weight 1000) derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called PEG-1000.
Polyoxyethylene glycol (number-average molecular weight 2000) derives from Liaoning AoKe Chemical Co., Ltd, and commodity are called PEG-2000.
Benzotriazole is the commercially available prod.
Silicone antifoam agent derives from defoamer company limited of Jiangsu Huaxing, and commodity are called XPP-7533.
Silicone antifoam agent derives from upright strange chemical industry (Wuxi) company limited in Shanghai, and commodity are called L-101.
Polyether antifoam agent derives from precious chemical industry company limited in the Qingdao, and commodity are called ZBH-305.
With reference to the following examples, those skilled in the art will be more readily understood characteristic of the present invention and advantage.
Embodiment one
Preparation 1000g cutting liquid, taking polyethylene glycol (number-average molecular weight 200) 300g, GPE-3000 block polyether 300g, triethanolamine oleate 200g, benzotriazole 50g, XPP-7533 silicone antifoam agent 0.1g, water is about 150g.
The polyoxyethylene glycol (number-average molecular weight 200) that in the water under the continuously stirring, slowly adds above-mentioned value successively, GPE-3000 block polyether, triethanolamine oleate, benzotriazole, XPP-7533 silicone antifoam agent, water.Stir and namely got sapphire cutting liquid in 10 minutes.Its performance index see table 1,2.
Embodiment two
Preparation 1000g cutting liquid, taking polyethylene glycol (number-average molecular weight 400) 300g, PPE-1500 block polyether 300g, triethanolamine oleate 200g, benzotriazole 30g, XPP-7533 silicone antifoam agent 0.1g, water is about 170g.
The polyoxyethylene glycol (data molecular weight 400) that in the water under the continuously stirring, slowly adds above-mentioned value successively, PPE-1500 block polyether, triethanolamine oleate, benzotriazole, XPP-7533 silicone antifoam agent, water.Stir and namely got sapphire cutting liquid in 10 minutes.Its performance index see table 1,2.
Embodiment three
Preparation 1000g cutting liquid, taking polyethylene glycol (number-average molecular weight 1000) 200g, GPE-3000 block polyether 250g, triethanolamine oleate 150g, benzotriazole 10g, ZBH-305 polyether antifoam agent defoamer 0.1g, water is about 390g.
The polyoxyethylene glycol (number-average molecular weight 200) that in the water under the continuously stirring, slowly adds above-mentioned value successively, GPE-3000 block polyether, triethanolamine oleate, benzotriazole, ZBH-305 polyether antifoam agent defoamer, water.Stir and namely got sapphire cutting liquid in 10 minutes.Its performance index see table 1,2.
Embodiment four
Preparation 1000g cutting liquid, taking polyethylene glycol (number-average molecular weight 2000) 200g, PPE-1500 block polyether 300g, triethanolamine oleate 240g, benzotriazole 10g, ZBH-305 polyether antifoam agent 0.1g, water is about 250g.
The polyoxyethylene glycol (number-average molecular weight 2000) that in the water under the continuously stirring, slowly adds above-mentioned value successively, PPE-1500 block polyether, triethanolamine oleate, benzotriazole, ZBH-305 polyether antifoam agent, water.Stir and namely got sapphire cutting liquid in 10 minutes.Its performance index see table 1,2.
Embodiment five
Preparation 1000g cutting liquid, taking polyethylene glycol (number-average molecular weight 800) 300g, GPE-3000 block polyether 300g, triethanolamine oleate 200g, benzotriazole 50g, L-101 silicone antifoam agent 0.1g, water is about 150g.
The polyoxyethylene glycol (number-average molecular weight 200) that in the water under the continuously stirring, slowly adds above-mentioned value successively, GPE-3000 block polyether, triethanolamine oleate, benzotriazole, L-101 silicone antifoam agent, water.Stir and namely got sapphire cutting liquid in 10 minutes.Its performance index see table 1,2.
Embodiment six
Preparation 1000g cutting liquid, taking polyethylene glycol (number-average molecular weight 400) 300g, PPE-1500 block polyether 300g, triethanolamine oleate 200g, benzotriazole 30g, L-101 silicone antifoam agent 0.1g, water is about 170g.
The polyoxyethylene glycol (number-average molecular weight 400) that in the water under the continuously stirring, slowly adds above-mentioned value successively, PPE-1500 block polyether, triethanolamine oleate, benzotriazole, L-101 silicone antifoam agent, water.Stir and namely got sapphire cutting liquid in 10 minutes.Its performance index see table 1,2.
Compare with commercially available cutting liquid, cutting liquid of the present invention has good lubricated and cooling performance, and good dispersion, anticorrosion, rustless property, and detailed data sees Table 1,2:
The lubricity contrast of table 1 sapphire cutting liquid and commercially available cutting liquid
| Sample | Frictional coefficient | Last non seizure load Pb value |
| Embodiment one | 0.056 | 350 |
| Embodiment two | 0.037 | 640 |
| Embodiment three | 0.064 | 320 |
| Embodiment four | 0.047 | 580 |
| Embodiment five | 0.034 | 620 |
| Embodiment six | 0.058 | 370 |
| Commercially available cutting liquid | 0.087 | 290 |
The antiseptic and rustproof performance comparison of table 2 sapphire cutting liquid and commercially available cutting liquid
The lubricity of this cutting liquid is by its frictional coefficient and maximum do not have card and sting the Pb value and judge, frictional coefficient is more little, maximum not to be had card to sting the Pb value more big, illustrates that its lubricant effect is more good.
The cutting liquid of this invention has good suspension property and dispersiveness, can guarantee the quality of its section in cutting, also has anticorrosion and rustless property preferably simultaneously, makes the long-time cutting of machine can not get rusty, and reduces cutting cost; This cutting liquid belongs to water-based cutting liquid, so easy cleaning.Can be applied to sapphire cutting.
Though for the present invention is described, the preferred embodiments of the invention are disclosed, but it will be understood by those of skill in the art that under the situation that does not break away from design of the present invention that claims limit and scope, can make various modifications, interpolation and replacement to the present invention.
Claims (10)
1. cutting liquid that is used for the line cutting sapphire, this cutting liquid comprises polyoxyethylene glycol, lubricant, dispersion agent, rust-preventive agent, defoamer and water.
2. according to the cutting liquid of claim 1, wherein the percentage composition of each component is as follows:
3. according to the cutting liquid of claim 1 or 2, wherein said polyoxyethylene glycol number-average molecular weight is 200-2000.
4. according to the cutting liquid of claim 1, wherein said lubricant is to be selected from polyether glycol or the organic ester one or more.
5. according to the cutting liquid of claim 4, wherein said polyether glycol is selected from one or more in glycerol atactic polyether, propylene glycol atactic polyether, glycerol block polyether, the propylene glycol block polyether.
6. according to the cutting liquid of claim 4, wherein said organic ester is to be selected from glyceryl monooleate, the different monooctyl ester of oleic acid, sulphonated oil, sorbitan oleate, the tricarboxymethyl propane oleate one or more.
7. according to the cutting liquid of claim 1, wherein said dispersion agent is to be selected from triethyl hexyl phosphoric acid, amine hydroxybenzene, polyacrylamide, fatty acid polyglycol ester, glyceryl monostearate, Tristearoylglycerol, the silicate one or more.
8. according to the cutting liquid of claim 1, wherein said rust-preventive agent is to be selected from benzotriazole, methyl benzotriazazole, 4-carboxy benzotriazole, triethanolamine oleate, anhydrous sodium carbonate, the boric acid ester one or more.
9. according to the cutting liquid of claim 1, wherein said defoamer is one or more in polysiloxane defoamers, the polyether antifoam agent.
10. according to each the application of cutting liquid in the diamond wire cutting technology in the aforementioned claim.
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