CN103128302B - 金属粉末制造用等离子装置 - Google Patents
金属粉末制造用等离子装置 Download PDFInfo
- Publication number
- CN103128302B CN103128302B CN201210507900.6A CN201210507900A CN103128302B CN 103128302 B CN103128302 B CN 103128302B CN 201210507900 A CN201210507900 A CN 201210507900A CN 103128302 B CN103128302 B CN 103128302B
- Authority
- CN
- China
- Prior art keywords
- metal
- cooling
- indirect
- carrier gas
- cooled region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 126
- 239000002184 metal Substances 0.000 title claims abstract description 126
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000000843 powder Substances 0.000 title abstract description 49
- 238000001816 cooling Methods 0.000 claims abstract description 175
- 239000012159 carrier gas Substances 0.000 claims abstract description 54
- 239000012809 cooling fluid Substances 0.000 claims description 14
- 230000012010 growth Effects 0.000 claims description 14
- 239000012530 fluid Substances 0.000 claims description 6
- 239000000428 dust Substances 0.000 claims 9
- 239000002245 particle Substances 0.000 abstract description 29
- 238000009826 distribution Methods 0.000 abstract description 21
- 239000002994 raw material Substances 0.000 abstract description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 56
- 229910052759 nickel Inorganic materials 0.000 description 17
- 239000007789 gas Substances 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000002425 crystallisation Methods 0.000 description 5
- 230000008025 crystallization Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 102220043159 rs587780996 Human genes 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000012210 heat-resistant fiber Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- -1 phosphorus or sulfur Chemical compound 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/12—Making metallic powder or suspensions thereof using physical processes starting from gaseous material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/28—Cooling arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-263165 | 2011-12-01 | ||
| JP2011263165A JP5821579B2 (ja) | 2011-12-01 | 2011-12-01 | 金属粉末製造用プラズマ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103128302A CN103128302A (zh) | 2013-06-05 |
| CN103128302B true CN103128302B (zh) | 2015-04-29 |
Family
ID=48489115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210507900.6A Active CN103128302B (zh) | 2011-12-01 | 2012-12-03 | 金属粉末制造用等离子装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5821579B2 (enExample) |
| KR (1) | KR101408238B1 (enExample) |
| CN (1) | CN103128302B (enExample) |
| TW (1) | TWI589375B (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107745120B (zh) | 2014-06-20 | 2019-08-20 | 昭荣化学工业株式会社 | 碳被覆金属粉末、导电性糊剂及层叠电子部件、以及碳被覆金属粉末的制造方法 |
| KR101699879B1 (ko) * | 2015-08-13 | 2017-01-25 | 서울대학교산학협력단 | 금속 미세입자의 형상 제어 방법 |
| CN106735279B (zh) * | 2016-11-30 | 2020-08-28 | 江永斌 | 循环冷却连续量产高纯纳米级金属粒子的装置 |
| CN106623957B (zh) * | 2016-11-30 | 2020-01-21 | 江永斌 | 连续量产超细纳米级金属粒子的纳米粒子生长器 |
| CN106941153B (zh) * | 2017-01-19 | 2021-04-27 | 江永斌 | 棉絮状单质硅纳米线团/碳复合负极材料及制备方法和用途 |
| CN107055543A (zh) * | 2017-03-27 | 2017-08-18 | 江永斌 | 一种连续量产硅纳米线团或硅棉絮状颗粒团的装置 |
| CN109648093A (zh) * | 2018-12-18 | 2019-04-19 | 江苏博迁新材料股份有限公司 | 一种超细金属镍粉表面处理方法 |
| CN109513917A (zh) * | 2018-12-18 | 2019-03-26 | 江苏博迁新材料股份有限公司 | 一种pvd生产镍粉的降碳方法 |
| CN111185595A (zh) * | 2020-03-19 | 2020-05-22 | 阳江市高功率激光应用实验室有限公司 | 一种制备包覆粉末的装置及包覆粉末的方法 |
| CN112846206A (zh) * | 2020-12-29 | 2021-05-28 | 江苏博迁新材料股份有限公司 | 一种脉冲式金属粉制备冷凝方法 |
| CN214184130U (zh) * | 2021-01-08 | 2021-09-14 | 江苏博迁新材料股份有限公司 | 一种制备超细粉粒子成形过程中的不良品回收结构 |
| WO2022156217A1 (zh) * | 2021-01-25 | 2022-07-28 | 钟笔 | 一种超微粉粒子聚集冷却管式结构及超微粉粒子成形方法 |
| CN112742305A (zh) * | 2021-01-25 | 2021-05-04 | 钟笔 | 一种用于控制超微粉粒子成型的控制器 |
| US12330126B2 (en) * | 2021-01-25 | 2025-06-17 | Jiangsu Boqian New Materials Stock Co., Ltd. | Ultrafine powder particle aggregation and cooling tank-type structure and ultrafine powder particle forming method |
| CN216421070U (zh) * | 2021-10-19 | 2022-05-03 | 江苏博迁新材料股份有限公司 | 一种物理气相法制备超细粉体材料用的金属蒸气成核装置 |
| CN114566327B (zh) * | 2021-11-11 | 2024-03-26 | 江苏博迁新材料股份有限公司 | 合金粉生产方法及该方法制备的合金粉、浆料和电容器 |
| CN115383124A (zh) * | 2022-09-02 | 2022-11-25 | 杭州新川新材料有限公司 | 超细金属粉末的冷却设备 |
| CN115770882A (zh) * | 2022-11-02 | 2023-03-10 | 杭州新川新材料有限公司 | 超细球形金属粉末的制造方法及装置 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2359096A (en) * | 2000-02-10 | 2001-08-15 | Tetronics Ltd | Plasma production of fine powders using an electrode with a channel |
| US6379419B1 (en) * | 1998-08-18 | 2002-04-30 | Noranda Inc. | Method and transferred arc plasma system for production of fine and ultrafine powders |
| CN2503475Y (zh) * | 2001-09-14 | 2002-07-31 | 沈三立 | 分析气体冷却装置 |
| CN1406693A (zh) * | 2001-09-04 | 2003-04-02 | 深圳华科纳米技术开发有限公司 | 常压下制备细粉－超细粉的方法及其专用设备 |
| CN2629878Y (zh) * | 2003-07-25 | 2004-08-04 | 浙江省新昌县恒升金属纳米材料有限公司 | 纳米金属粉生产装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5854166B2 (ja) | 1981-12-17 | 1983-12-03 | 科学技術庁金属材料技術研究所長 | 金属微粒子の製造法およびその製造装置 |
| RU2263006C2 (ru) | 2000-02-10 | 2005-10-27 | Тетроникс Лимитед | Плазменно-дуговой реактор и способ получения тонких порошков |
| JP5824906B2 (ja) * | 2011-06-24 | 2015-12-02 | 昭栄化学工業株式会社 | 金属粉末製造用プラズマ装置及び金属粉末製造方法 |
-
2011
- 2011-12-01 JP JP2011263165A patent/JP5821579B2/ja active Active
-
2012
- 2012-11-28 KR KR1020120136004A patent/KR101408238B1/ko active Active
- 2012-11-30 TW TW101144892A patent/TWI589375B/zh active
- 2012-12-03 CN CN201210507900.6A patent/CN103128302B/zh active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6379419B1 (en) * | 1998-08-18 | 2002-04-30 | Noranda Inc. | Method and transferred arc plasma system for production of fine and ultrafine powders |
| GB2359096A (en) * | 2000-02-10 | 2001-08-15 | Tetronics Ltd | Plasma production of fine powders using an electrode with a channel |
| CN1406693A (zh) * | 2001-09-04 | 2003-04-02 | 深圳华科纳米技术开发有限公司 | 常压下制备细粉－超细粉的方法及其专用设备 |
| CN2503475Y (zh) * | 2001-09-14 | 2002-07-31 | 沈三立 | 分析气体冷却装置 |
| CN2629878Y (zh) * | 2003-07-25 | 2004-08-04 | 浙江省新昌县恒升金属纳米材料有限公司 | 纳米金属粉生产装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103128302A (zh) | 2013-06-05 |
| TWI589375B (zh) | 2017-07-01 |
| KR101408238B1 (ko) | 2014-06-16 |
| TW201336602A (zh) | 2013-09-16 |
| JP5821579B2 (ja) | 2015-11-24 |
| JP2013112893A (ja) | 2013-06-10 |
| KR20130061634A (ko) | 2013-06-11 |
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| C14 | Grant of patent or utility model | ||
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