CN103072989A - 一种蓝宝石用抛光废浆中的碳化硼回收利用的方法 - Google Patents
一种蓝宝石用抛光废浆中的碳化硼回收利用的方法 Download PDFInfo
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- CN103072989A CN103072989A CN2013100078872A CN201310007887A CN103072989A CN 103072989 A CN103072989 A CN 103072989A CN 2013100078872 A CN2013100078872 A CN 2013100078872A CN 201310007887 A CN201310007887 A CN 201310007887A CN 103072989 A CN103072989 A CN 103072989A
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- suspension
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- norbide
- aluminum oxide
- boron carbide
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- 229910052580 B4C Inorganic materials 0.000 title claims abstract description 34
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 27
- 239000010980 sapphire Substances 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000005498 polishing Methods 0.000 title claims abstract description 19
- 239000002002 slurry Substances 0.000 title claims abstract description 13
- 238000004064 recycling Methods 0.000 title claims abstract description 5
- 239000002699 waste material Substances 0.000 title abstract description 7
- 239000000843 powder Substances 0.000 claims abstract description 95
- 239000007787 solid Substances 0.000 claims abstract description 93
- 239000007788 liquid Substances 0.000 claims abstract description 43
- 238000000926 separation method Methods 0.000 claims abstract description 36
- 238000003756 stirring Methods 0.000 claims abstract description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000003513 alkali Substances 0.000 claims abstract description 15
- 238000004140 cleaning Methods 0.000 claims abstract description 15
- 238000005406 washing Methods 0.000 claims abstract description 15
- 239000011259 mixed solution Substances 0.000 claims abstract description 9
- 239000002253 acid Substances 0.000 claims abstract description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000005554 pickling Methods 0.000 claims abstract description 8
- 238000004062 sedimentation Methods 0.000 claims abstract description 7
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 7
- 239000000725 suspension Substances 0.000 claims description 111
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 61
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 48
- 239000003795 chemical substances by application Substances 0.000 claims description 28
- 239000000126 substance Substances 0.000 claims description 26
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 24
- 238000005119 centrifugation Methods 0.000 claims description 12
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 claims description 6
- DPDMMXDBJGCCQC-UHFFFAOYSA-N [Na].[Cl] Chemical compound [Na].[Cl] DPDMMXDBJGCCQC-UHFFFAOYSA-N 0.000 claims description 6
- 239000006194 liquid suspension Substances 0.000 claims description 6
- 150000001298 alcohols Chemical class 0.000 claims description 2
- 239000002585 base Substances 0.000 claims description 2
- 150000002576 ketones Chemical class 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 125000001997 phenyl group Chemical class [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims 1
- 238000011084 recovery Methods 0.000 abstract description 4
- 239000002245 particle Substances 0.000 abstract 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 2
- 239000003638 chemical reducing agent Substances 0.000 abstract 2
- 238000001035 drying Methods 0.000 abstract 1
- 229910052742 iron Inorganic materials 0.000 abstract 1
- 238000002156 mixing Methods 0.000 abstract 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001555 benzenes Chemical class 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000009189 diving Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 206010016256 fatigue Diseases 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000002920 hazardous waste Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
Abstract
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CN201310007887.2A CN103072989B (zh) | 2013-01-09 | 2013-01-09 | 一种蓝宝石用抛光废浆中的碳化硼回收利用的方法 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106315585A (zh) * | 2016-08-30 | 2017-01-11 | 玉溪恒宇科技有限公司 | 碳化硼研磨蓝宝石产生的废液的提纯工艺 |
DE102015221997A1 (de) * | 2015-11-09 | 2017-05-11 | Technische Universität Dresden | Verfahren zum Herstellen von Borcarbid |
CN107902659A (zh) * | 2017-12-08 | 2018-04-13 | 中国科学院青海盐湖研究所 | 一种从蓝宝石研磨废料中回收提纯碳化硼的方法 |
CN107986283A (zh) * | 2017-11-09 | 2018-05-04 | 重庆大学 | 一种蓝宝石衬底研磨废液中碳化硼高效循环再利用装置 |
CN108002388A (zh) * | 2017-11-09 | 2018-05-08 | 重庆大学 | 一种蓝宝石衬底研磨废液中碳化硼高效循环再利用新方法 |
CN108298544A (zh) * | 2018-03-27 | 2018-07-20 | 江西瑞合精细化工有限公司 | 一种卤化硼生产过程中残余碳化硼的浮选法回收装置及其回收方法 |
CN108706589A (zh) * | 2018-08-17 | 2018-10-26 | 郑州川豫新材料科技有限公司 | 一种碳化硼微粉的生产工艺 |
Citations (5)
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CN101016439A (zh) * | 2007-02-06 | 2007-08-15 | 中国科学院上海微系统与信息技术研究所 | 一种蓝宝石衬底化学机械抛光浆液 |
CN101074098A (zh) * | 2006-05-15 | 2007-11-21 | 润鸣新素材(通辽)有限公司 | 碳化硼原料预处理方法及设备 |
JP2011111665A (ja) * | 2009-11-30 | 2011-06-09 | Tohoku Univ | 稀少金属の製造方法 |
CN102295285A (zh) * | 2010-06-26 | 2011-12-28 | 比亚迪股份有限公司 | 一种硅片切割废砂浆的回收方法 |
CN102701249A (zh) * | 2012-06-26 | 2012-10-03 | 吕铁铮 | 一种从蓝宝石晶片切割废液中回收氧化铝的方法 |
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2013
- 2013-01-09 CN CN201310007887.2A patent/CN103072989B/zh active Active
Patent Citations (5)
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CN101074098A (zh) * | 2006-05-15 | 2007-11-21 | 润鸣新素材(通辽)有限公司 | 碳化硼原料预处理方法及设备 |
CN101016439A (zh) * | 2007-02-06 | 2007-08-15 | 中国科学院上海微系统与信息技术研究所 | 一种蓝宝石衬底化学机械抛光浆液 |
JP2011111665A (ja) * | 2009-11-30 | 2011-06-09 | Tohoku Univ | 稀少金属の製造方法 |
CN102295285A (zh) * | 2010-06-26 | 2011-12-28 | 比亚迪股份有限公司 | 一种硅片切割废砂浆的回收方法 |
CN102701249A (zh) * | 2012-06-26 | 2012-10-03 | 吕铁铮 | 一种从蓝宝石晶片切割废液中回收氧化铝的方法 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015221997A1 (de) * | 2015-11-09 | 2017-05-11 | Technische Universität Dresden | Verfahren zum Herstellen von Borcarbid |
CN106315585A (zh) * | 2016-08-30 | 2017-01-11 | 玉溪恒宇科技有限公司 | 碳化硼研磨蓝宝石产生的废液的提纯工艺 |
CN107986283A (zh) * | 2017-11-09 | 2018-05-04 | 重庆大学 | 一种蓝宝石衬底研磨废液中碳化硼高效循环再利用装置 |
CN108002388A (zh) * | 2017-11-09 | 2018-05-08 | 重庆大学 | 一种蓝宝石衬底研磨废液中碳化硼高效循环再利用新方法 |
CN107902659A (zh) * | 2017-12-08 | 2018-04-13 | 中国科学院青海盐湖研究所 | 一种从蓝宝石研磨废料中回收提纯碳化硼的方法 |
CN108298544A (zh) * | 2018-03-27 | 2018-07-20 | 江西瑞合精细化工有限公司 | 一种卤化硼生产过程中残余碳化硼的浮选法回收装置及其回收方法 |
CN108706589A (zh) * | 2018-08-17 | 2018-10-26 | 郑州川豫新材料科技有限公司 | 一种碳化硼微粉的生产工艺 |
CN108706589B (zh) * | 2018-08-17 | 2023-10-20 | 郑州瑞意森新材料科技有限公司 | 一种碳化硼微粉的生产工艺 |
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Inventor after: Guo Dawei Inventor after: Sun Hongliang Inventor after: Liu Ying Inventor after: Liu Xiaona Inventor before: Chen Xiaoguang Inventor before: Guo Dawei Inventor before: Sun Hongliang |
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Address after: 265500 No. 20 Intel Road, Fushan District, Shandong, Yantai Patentee after: YANTAI TOMLEY HI-TECH NEW MATERIALS Co.,Ltd. Address before: 265500 No. 17 Intel street, Fushan District, Shandong, Yantai Patentee before: YANTAI TOMLEY HI-TECH NEW MATERIALS Co.,Ltd. |
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