CN103066095B - 一种影像传感器及其制造方法 - Google Patents
一种影像传感器及其制造方法 Download PDFInfo
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Cited By (1)
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US10340306B1 (en) | 2018-02-08 | 2019-07-02 | Semiconductor Components Industries, Llc | Semiconductor package with chamfered corners and related methods |
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CN109300785B (zh) * | 2018-09-17 | 2021-01-12 | 武汉新芯集成电路制造有限公司 | 一种改善关键尺寸均匀性的方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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EP0221093B1 (en) * | 1985-04-29 | 1990-05-23 | Hughes Aircraft Company | Double layer photoresist technique for side-wall profile control in plasma etching processes |
CN101771061A (zh) * | 2008-12-30 | 2010-07-07 | 东部高科股份有限公司 | 图像传感器及其制造方法 |
CN101924018A (zh) * | 2009-06-11 | 2010-12-22 | 上海华虹Nec电子有限公司 | 将沟槽顶部拐角改善为圆角的方法 |
CN101996876A (zh) * | 2009-08-27 | 2011-03-30 | 上海华虹Nec电子有限公司 | 将较大尺寸沟槽顶部直角改变成明显圆角的方法 |
CN203085542U (zh) * | 2013-01-14 | 2013-07-24 | 陆伟 | 一种影像传感器 |
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DE102009023251B4 (de) * | 2009-05-29 | 2011-02-24 | Globalfoundries Dresden Module One Limited Liability Company & Co. Kg | Verfahren zur Herstellung eines Kontaktelements mit großem Aspektverhältnis und mit einer günstigeren Form in einem Halbleiterbauelement zur Verbesserung der Abscheidung einer Beschichtung |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0221093B1 (en) * | 1985-04-29 | 1990-05-23 | Hughes Aircraft Company | Double layer photoresist technique for side-wall profile control in plasma etching processes |
CN101771061A (zh) * | 2008-12-30 | 2010-07-07 | 东部高科股份有限公司 | 图像传感器及其制造方法 |
CN101924018A (zh) * | 2009-06-11 | 2010-12-22 | 上海华虹Nec电子有限公司 | 将沟槽顶部拐角改善为圆角的方法 |
CN101996876A (zh) * | 2009-08-27 | 2011-03-30 | 上海华虹Nec电子有限公司 | 将较大尺寸沟槽顶部直角改变成明显圆角的方法 |
CN203085542U (zh) * | 2013-01-14 | 2013-07-24 | 陆伟 | 一种影像传感器 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10340306B1 (en) | 2018-02-08 | 2019-07-02 | Semiconductor Components Industries, Llc | Semiconductor package with chamfered corners and related methods |
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