CN103029225B - Topping machanism - Google Patents
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- CN103029225B CN103029225B CN201210367191.6A CN201210367191A CN103029225B CN 103029225 B CN103029225 B CN 103029225B CN 201210367191 A CN201210367191 A CN 201210367191A CN 103029225 B CN103029225 B CN 103029225B
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- 238000005520 cutting process Methods 0.000 claims abstract description 183
- 238000012545 processing Methods 0.000 description 26
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- 238000004140 cleaning Methods 0.000 description 8
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- 238000005299 abrasion Methods 0.000 description 3
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
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- 239000000428 dust Substances 0.000 description 1
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- 239000012530 fluid Substances 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical group C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
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- Milling Processes (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Dicing (AREA)
Abstract
The invention provides a kind of topping machanism, achieve the simplification of the operation in straight finishing and the raising of productivity ratio.Topping machanism (1) has chuck table (10), there is the cutting member (20a of the cutting tool (21a) be assemblied on main shaft (22a), 20b), make main shaft (22a) along the Y-axis mobile member (30a of Y direction movement, 30b) and make main shaft (22a) along the Z axis mobile member (40a of Z-direction movement, 40b), it also has trim components (50a, 50b), described trim components is adjacent with chuck table (10) and be provided in by Y-axis mobile member (30a, 30b) drive on the mobile route of cutting tool (21a) movement, trim components (50a, 50b) there is finishing board and retaining member, described retaining member keeps finishing board and can rotate centered by central axis, the height (H1) of the abradant surface of the finishing board kept by retaining member is equal to or less than the height (H2) on the surface of chuck table (10).
Description
Technical field
The present invention relates to topping machanism, described topping machanism is for cutting the machined object kept by chuck table.
Background technology
For being formed with multiple IC(IntegratedCircuit, integrated circuit), LSI(LargeScaleIntegration, large scale integrated circuit) etc. the wafer of device, in order to prevent crackle in manufacture process and dust, chamfer machining is implemented to the periphery of described wafer.Therefore, when grinding wafer is to time very thin, the chamfered part of periphery is formed as cutting edge shape (eaves shape).When the chamfered part of periphery becomes cutting edge shape, there is the danger occurring to make the problem of damage to wafers from periphery generation breach.Therefore, propose there is following technology (for example, referring to patent document 1): utilize cutting tool circumferentially to cut the chamfered part of periphery in advance, after the part along Z-direction removing periphery, the back side of grinding wafer.
Herein, when utilizing cutting tool circumferentially to cut the periphery of wafer, the part consumption bearing cutting of the end of cutting tool, and other parts do not consume, thus produce eccentric wear.When eccentric wear occurs, can not carry out the good cutting of precision, therefore, before eccentric wear increases the weight of, carry out straight finishing (for example, referring to patent document 2) termly, described straight being trimmed to utilizes finishing board that the end of cutting tool is shaped as flat.
Patent document 1: Japanese Unexamined Patent Publication 2000-173961 publication
Patent document 2: Japanese Unexamined Patent Publication 2010-588 publication
But, in existing straight finishing, the machined object kept by chuck table be pulled down, finishing board is placed and is held in chuck table, that is will replace, there is the problem that operation becomes loaded down with trivial details.And, after carrying out straight finishing, the finishing board kept by chuck table must be pulled down, and again machined object placed and be held in chuck table, in order to carry out straight finishing, to interrupt time of the machining of machined object elongated, there is the problem that productivity ratio is reduced.
Summary of the invention
The present invention, just in view of completing above, its object is to provide a kind of topping machanism, can realize at least any one party in the simplification of the operation in straight finishing or the raising of productivity ratio.
For solving above-mentioned problem, reaching object, the topping machanism that the present invention relates to has: chuck table, and it is for remaining on the surface being formed as horizontal plane by machined object; Cutting member, it has the main shaft that can rotate and the cutting tool being assemblied in described main shaft; Y-axis mobile member, it moves along Y direction for making described main shaft, and described Y direction is the direction with the rotation axis parallel of described main shaft; And Z axis mobile member, it moves along Z-direction for making described main shaft, described Z-direction be close to and away from the direction of chuck table, it is characterized in that, described topping machanism also has trim components, described trim components is adjacent with described chuck table, and described trim components is disposed on the mobile route of the described cutting tool driven by Y-axis mobile member, and described trim components has: finishing board; And retaining member, described retaining member is for keeping described finishing board, and described retaining member can rotate centered by central axis, and the height of the abradant surface of the finishing board kept by described retaining member is equal to or less than the height on the surface of described chuck table.
And, preferably, in above-mentioned topping machanism, when utilizing described trim components to repair described cutting tool, described cutting tool is moved to and described finishing board predetermined cutting into position in opposite directions in Y direction, utilize described Y-axis mobile member that the described cutting tool of rotation is moved from described predetermined cutting into position along the direction contacted with described abradant surface, after described cutting tool and described abradant surface become noncontact, described retaining member is rotated, to make not having the region of cutting mark and described cutting tool in Z-direction in opposite directions in described abradant surface on described mobile route.
And preferably, in above-mentioned topping machanism, described trim components arranges in the mode making described central axis and be positioned on described rotation.
Topping machanism of the present invention, being equipped with the finishing board relative to keeping the chuck table of machined object independently can rotate, utilizing Y-axis mobile member and Z axis mobile member that cutting tool is moved relative to finishing board, thus carrying out straight finishing.Thus, machined object need not be pulled down from chuck table, therefore, it is possible to realize the simplification of operation to carry out straight finishing.And, due to the time not having to be undertaken by cutting tool the machining of machined object can be utilized to carry out straight finishing, therefore, the time that machining is interrupted can be shortened, serve the effect of the raising that can realize productivity ratio.
Accompanying drawing explanation
Fig. 1 is the figure of the structure example representing the topping machanism that embodiment relates to.
Fig. 2 is the figure representing cutting member and trim components.
Fig. 3 is the figure of the position relationship representing cutting member and trim components.
Fig. 4 is the flow chart representing the straight finishing that the topping machanism related to by embodiment carries out.
Label declaration
1: topping machanism;
10: chuck table;
20a, 20b: cutting member;
30a, 30b:Y axle mobile member;
40a, 40b:Z axle mobile member;
50a, 50b: trim components;
51a, 51b: finishing board;
52a, 52b: retaining member;
53a, 53b: abradant surface;
54a, 54b: opening portion;
60: box lift;
70: interim placement member;
80: cleaning and dry component;
90: control member;
A: rotation;
B: central axis.
Detailed description of the invention
About for implementing mode of the present invention (embodiment), with reference to accompanying drawing, while be described in detail.But the present invention also can't help the content that embodiment below records and limited.And, in the inscape recorded below, comprise the key element that those skilled in the art can easily imagine, and key element identical in fact.Further, the structure recorded below can suitably combine.And, the various omissions of structure, displacement or change can be carried out without departing from the spirit and scope of the invention.
Fig. 1 is the figure of the structure example representing the topping machanism that embodiment relates to.Fig. 2 is the figure representing cutting member and trim components.Fig. 3 is the figure of the position relationship representing cutting member and trim components.In addition, Fig. 3 is the figure observing cutting member and trim components from Z-direction, which schematically illustrates cutting member.
Topping machanism of the present embodiment is used for the cutting member by making to have cutting tool and keeps the chuck table relative movement of machined object thus carry out machining to machined object.As shown in Figure 1, topping machanism 1 is two main shaft cutting machines (dicer), be exactly so-called two cutting machine, consist of and comprise chuck table 10, two cutting member 20a, 20b, two Y-axis mobile member 30a, 30b, two Z axis mobile member 40a, 40b, two trim components 50a, 50b and control members 90.In addition, topping machanism 1 of the present embodiment is configured to also comprise not shown X-axis mobile member, box lift 60, interim placement member 70 and cleaning and dry component 80.Topping machanism 1 is provided with the post portion 3 of gate on apparatus main body 2.
Chuck table 10 is for remaining on the surface being formed as horizontal plane by machined object W.In the present embodiment, chuck table 10 keeps machined object W by carrying out suction from the back side of machined object W.The part forming the surface of chuck table 10 is the disc-shape formed by porous ceramics etc., and the part on the surface of described formation chuck table 10 is connected with not shown vacuum suction source by not shown vacuum draw path.In addition, around chuck table 10, a pair clamping part 11 is provided with.Clamping part 11 is driven by air actuator and clamps the framework F of the surrounding of machined object W.
Herein, machined object W is the processing object utilizing topping machanism 1 to process, and in the present embodiment, machined object W is the wafer using silicon, sapphire, gallium etc. as mother metal.Machined object W is pasted onto cutting belt T with the back side of the side contrary with the surface of the device-side being formed with multiple device, by the cutting belt T be pasted together with machined object W is pasted framework F, thus machined object W is fixed on framework F.
X-axis mobile member is for making the machined object W that is kept along X-direction relative to cutting tool 21 relative movement.X-axis mobile member is set to make post portion 3 across at apparatus main body 2, and described X-axis mobile member is configured to comprise X-axis ball-screw, X-axis impulse motor and a pair X-axis guide rail.X-axis ball-screw arranges along X-direction, and screws togather with the not shown nut of the bottom being arranged on movable workbench base 4, and one end and the X-axis impulse motor of described X-axis ball-screw link together.A pair X-axis guide rail and X-axis ball-screw are formed abreast, and described a pair X-axis guide rail loads movable workbench base 4 in the mode that can slide.X-axis mobile member makes the rotary actuation of X-axis ball-screw by utilizing the revolving force produced by X-axis impulse motor, thus while utilize a pair X-axis rail guidance movable workbench base 4(chuck table 10), described movable workbench base (chuck table 10) is moved along X-direction relative to apparatus main body 2.
Herein, movable workbench base 4 is supported to rotate freely centered by the central axis of movable workbench base 4 at apparatus main body 2.Movable workbench base 4 links together with the not shown base drive source being accommodated in apparatus main body 2.Movable workbench base 4 can utilize the revolving force produced by base drive source to rotate arbitrary angle (such as 90 degree) or continuous rotation, and chuck table 10 can be made centered by the central axis of movable workbench base 4, to carry out the rotary actuations such as arbitrary angle rotation and continuous rotation relative to cutting tool 21a, 21b.
Cutting member 20a, 20b cut for utilizing cutting tool 21a, 21b the machined object W kept by chuck table 10.Cutting member 20a is supported in support 5a, and described cutting member 20a is located at a side in post portion 3 across Y-axis mobile member 30a, Z axis mobile member 40a and cutter movable base 6a.Cutting member 20b is supported in support 5b, and described cutting member 20b is located at the opposing party in post portion 3 across Y-axis mobile member 30b, Z axis mobile member 40b and cutter movable base 6b.It is opposite disposed that two cutting members 20a, 20b clip chuck table 10.As shown in Figure 2, cutting tool 21a, 21b are the very thin cutting grinding tools with general toroidal shape, and described cutting tool 21a, 21b are detachably assemblied in main shaft 22a, 22b respectively.Main shaft 22a, 22b are supported to can be rotated by housing 23a, 23b of drum respectively, and described main shaft 22a, 22b link together with not shown cutter drives source respectively, and described cutter drives source is accommodated in housing 23a, 23b respectively.Cutting tool 21a, 21b rotary actuation by the revolving force produced by cutter drives source.In addition, for cutting member 20a, 20b, as shown in Figure 3, main shaft 22a, 22b are arranged so that the rotation A of main shaft 22a, 22b is parallel with Y direction.
As shown in Figure 1, Y-axis mobile member 30a, 30b are for making cutting tool 21a, 21b along Y direction respectively relative to the machined object W kept by chuck table 10 and trim components 50a, 50b relative movement.Y-axis mobile member 30a, 30b are located at post portion 3 respectively, and described Y-axis mobile member 30a, 30b are configured to have Y-axis ball-screw 31a, 31b, Y-axis impulse motor 32a, 32b and a pair Y-axis guide rail 33 separately.Y-axis ball-screw 31a, 31b arrange along Y direction, and screw togather with the not shown nut arranged in cutter movable base 6a, 6b inside respectively, one end of described Y-axis ball-screw links together with Y-axis impulse motor 32a, 32b respectively.A pair Y-axis guide rail 33 is formed abreast with Y-axis ball-screw 31a, 31b, and described a pair Y-axis guide rail 33 loads cutter movable base 6a, 6b respectively in the mode that can slide.Y-axis mobile member 30a, 30b make Y-axis ball-screw 31a, 31b rotary actuation by utilizing the revolving force produced by Y-axis impulse motor 32a, 32b, thus while utilize a pair Y-axis guide rail 33 to guide cutter movable base 6a, 6b, described cutter movable base 6a, 6b are moved respectively along Y direction relative to apparatus main body 2.
Z axis mobile member 40a, 40b for make cutting tool 21a, 21b relative to the machined object W kept by chuck table 10 and trim components 50a, 50b along Z-direction that is along main shaft 22a, 22b close to and away from the direction relative movement respectively of chuck table 10.Z axis mobile member 40a, 40b are located at cutter movable base 6a, 6b respectively, and described Z axis mobile member 40a, 40b are configured to have Z axis ball-screw 41a, 41b, Z axis impulse motor 42a, 42b and a pair Z axis guide rail 43a, 43b respectively.Z axis ball-screw 41a, 41b arrange along Z-direction, screw togather respectively with the not shown nut being arranged on support 5a, 5b inside, and one end of described Z axis ball-screw 41a, 41b links together with Z axis impulse motor 42a, 42b respectively.A pair Z axis guide rail 43a, 43b and Z axis ball-screw 41a, 41b are formed abreast, and described a pair Z axis guide rail 43a, 43b load support 5a, 5b in the mode that can slide.Z axis mobile member 40a, 40b make Z axis ball-screw 41a, 41b rotary actuation by utilizing the revolving force produced by Z axis impulse motor 42a, 42b, thus while utilize a pair Z axis guide rail 43a, 43b to guide support 5a, 5b, described support 5a, 5b are moved respectively along Z-direction relative to apparatus main body 2.
Trim components 50a, 50b are to be disposed in apparatus main body 2 respectively with the mode of cutting member 20a, 20b adjacent with chuck table 10 (in the present embodiment, clipping chuck table 10 opposed along Y direction) accordingly.As shown in Figure 2, trim components 50a, 50b are configured to have finishing board 51a, 51b and retaining member 52a, 52b respectively.
Finishing board 51a, 51b are formed with abradant surface 53a, 53b as horizontal plane.Abradant surface 53a, 53b are formed as ring-type, and in the present embodiment, finishing board 51a, 51b of comprising abradant surface 53a, 53b itself are formed as ring-type, and are formed with opening portion 54a, 54b at central portion.Finishing board 51a, 51b are formed by the bond material combined by the abrasive particle resins etc. such as white fused alumina (whitealundum) less than the Abrasive Particle Size of cutting tool 21a, 21b for Abrasive Particle Size, green silicon carbide (greencarbon).
Retaining member 52a, 52b are used for keeping finishing board 51a, 51b to make abradant surface 53a, 53b be disposed in respectively with the mode of the opposition side of retaining member 52a, 52b side in opposite directions.Retaining member 52a, 52b keep finishing board 51a, 51b by carrying out suction from the back side of the side contrary with abradant surface 53a, 53b.The part forming the surface (with finishing board 51a, 51b face in opposite directions) of retaining member 52a, 52b is the disc-shape formed by porous ceramics etc., and the part of the surface of described formation retaining member 52a, 52b (with finishing board 51a, 51b face in opposite directions) is linked together by not shown vacuum draw path and not shown vacuum suction source.And as shown in Figure 3, retaining member 52a, 52b are supported to rotate centered by the central axis B being parallel to Z axis at apparatus main body 2 respectively.Retaining member 52a, 52b and the not shown finishing drive source being accommodated in apparatus main body 2 link together.Retaining member 52a, 52b can rotate arbitrary angle (the label S represented in this figure) by the revolving force produced by finishing drive source, and finishing board 51a, 51b can be made relative to cutting tool 21a, 21b arbitrary anglec of rotation of rotary actuation centered by central axis B.
Herein, trim components 50a, 50b are adapted to and make abradant surface 53a, 53b of being in by under the state of retaining member 52a, 52b maintenance identical relative to the height H 2 of apparatus main body 2 with the surface of chuck table 10 or lower than described height H 2 relative to the height H 1 of apparatus main body 2.That is, under the surface of cutting tool 21a, 21b and chuck table 10 is in non-contacting state, even if cutting member 20a, 20b are moved along Y direction, cutting tool 21a, 21b also can not contact with abradant surface 53a, the 53b be under the state that kept by retaining member 52a, 52b.Thus, even if make cutting member 20a, 20b move along Y direction to carry out machining to the machined object W kept by chuck table 10, also can not interfere with trim components 50a, 50b.Thus, owing to can trim components 50a, 50b be disposed near chuck table 10, therefore, can reduce from chuck table 10 to trim components 50a, amount of movement in the Y-axis direction 50b, can shorten and after machining, to carry out straight finishing and again transfer to time required for machining (below, be simply called " finishing time ").
And trim components 50a, 50b are disposed on cutter mobile route, described cutter mobile route is cutting tool 21a, 21b path by Y-axis mobile member 30a, 30b movement.In the present embodiment, trim components 50a, 50b are positioned on the rotation A of main shaft 22a, 22b with its central axis B, that is to make the radial direction of finishing board 51a, 51b mode parallel with Y direction arrange.Thus, when making cutting member 20a, 20b move along close direction in the Z-axis direction relative to trim components 50a, 50b, using in the periphery of cutting tool 21a, 21b, with the point of following straight line intersection as benchmark, cutting tool 21a, 21b contact with finishing board 51a, 51b, and described straight line is parallel with Z-direction and by the straight line on rotation A.
Box lift 60 is formed with multiple incorporating section along Z-direction, and described incorporating section is used for receiving machined object W singly, and multiple machined object W received together by described box lift 60.Box lift 60 is configured to freely be elevated along Z-direction in the spatial portion formed in apparatus main body 2 inside.Interim placement member 70 has pair of tracks 71, for the machined object W before and after processing is placed on pair of tracks 71 temporarily.Cleaning and dry component 80 have rotary table 81, for loading the machined object W after processing and keep.Rotary table 81 links together with the rotary table drive source being accommodated in apparatus main body 2.When machined object W is remained on rotary table 81, cleaning and dry component 80 make machined object W rotate by the revolving force produced by rotary table drive source, never illustrated washer fluid spraying apparatus cleans machined object W jet cleaning liquid, and never illustrated gas injection apparatus is to the machined object W gas jet after cleaning, make it dry.
Control member 90 is for controlling respectively the above-mentioned inscape forming topping machanism 1.Control member 90 carries out the processing action of processing machined object W for making topping machanism 1.And control member 90 is for controlling the straight finishing to cutting member 20a, 20b undertaken by trim components 50a, 50b.In addition, control member 90 is formed using not shown microprocessor as main body, described not shown microprocessor has the arithmetic processing apparatus and ROM, RAM etc. that are such as made up of CPU etc., and the display member of described control member 90 and the state of display processing action and control member when logging in processing content information etc. for operator link together.
Then, the processing action of topping machanism 1 of the present embodiment is described.First, operator logs in processing content information, when there is processing action sign on, starts processing action.In processing action, by not shown carrying-in/carrying-out component, machined object W is taken out of interim placement member 70 from box lift 60, after in the pair of tracks 71 machined object W being placed on interim placement member 70, by not shown conveyance component machined object W be transported to chuck table 10 and kept by chuck table 10.The chuck table 10 of machined object W is kept to move to processing starting position along X-direction, the periphery of circumferentially cutting machined object W to remove a part for the periphery of machined object W processing (below, referred to as " removing processing "), or carry out for cutting machined object along segmentation preset lines to make the division processing etc. of multiple device difference panelization described later.When removing processing, cutting tool 21a, the 21b of a side or two sides in cutting tool 21a, 21b is made to be positioned at the periphery of machined object W, and, by making machined object W rotate in this position, thus cut and removed a part for the periphery of machined object W in the Z-axis direction by the cutting tool of a side.When division processing, while make to make the relative position of cutting tool 21a, 21b of a side or two sides and machined object W change along splitting preset lines in cutting tool 21a, 21b, while cut machined object W by cutting tool 21a, 21b of a side or two sides, be fritter (dice) shape by each Device singulation with leaving cutting belt T.Machined object W after processing is transported to cleaning and dry component 80 by not shown conveyance component from chuck table 10, by cleaning and dry component 80 clean with drying after, be transported to interim placement member 70 by not shown conveyance component, be then moved to box lift 60 by carrying-in/carrying-out component from interim placement member 70.In addition, owing to having two cutting members 20a, 20b, therefore, the machining to machined object W of being undertaken by above-mentioned topping machanism 1 often can cut one or more pieces machined objects W then makes cutting member 20a, 20b alternately, or also after the cutting tool of a side arrives the limit of abrasion (also comprising eccentric wear), the cutting tool of the opposing party can be replaced by.
Then, the straight finishing of topping machanism 1 of the present embodiment is described.Fig. 4 is the flow chart representing the straight finishing that the topping machanism related to by embodiment carries out.In addition, owing to being identical to the straight finishing of cutting member 20a, 20b, therefore, only the situation that cutting member 20a carries out straight finishing is described herein.By making the cutting tool 21a of rotation and trim components 50a relative movement carry out to the straight finishing of cutting tool 21a.
First, control member 90 judges whether to be necessary to carry out straight finishing (step ST1) to cutting member 20a.Herein, judge whether that the eccentric wear of cutting tool 21a has been exacerbated to need to utilize trim components 50a to carry out straight finishing to cutting tool 21a.In addition, preferably, judge whether to need straight finishing based on the processing Distance geometry abrasion loss of being carried out the machined object W after removing processing by cutting member 20a.Preferably, based on the sheet number of machined object W after removing processing, machined object W diameter, judge to process Distance geometry abrasion loss relative at least one item in the radical of the segmentation preset lines of machined object W and distance, the approach of cutting tool 21a, the hardness of cutting tool 21a etc.
Then, when control member 90 is judged as being necessary to carry out straight finishing (affirmative of step ST1) to cutting member 20a, judge whether just to carry out (step ST2) in machining by cutting member 20a.In addition, when being judged as there is no need to carry out straight finishing (negative of step ST1) to cutting member 20a, circulation performs step ST1, until judge to be necessary to carry out straight finishing.
Then, when control member 90 judges not to be in (negative of step ST2) in the machining of being undertaken by cutting member 20a, the straight finishing (step ST3) to cutting member 20a is carried out.Herein, under the current state be not in machining, straight finishing is just carried out needing the cutting member 20a of straight finishing, such as, in the processing action of the machined object W undertaken by topping machanism 1, be in the machining of being undertaken by cutting member 20b that cutting member 20a is not in the state in machining, or under the state of processing action of not carrying out the machined object W undertaken by topping machanism 1, just carry out straight finishing.
To in the straight finishing of cutting member 20a, first, control member 90 makes not carry out machining by Z axis mobile member 40a and the cutting tool 21a being positioned at position of readiness moves to predetermined cutting into position.Herein, predetermined cutting into position makes cutting tool 21a in Y direction and finishing board 51a position in opposite directions, that is, be the position that cutting tool 21a can be contacted with finishing board 51a in Z-direction.And predetermined cutting into position is exactly the approach of cutting tool 21a relative to finishing board 51a, it is according to the conditional decision such as following: the eccentric wear degree of cutting tool 21a; With the number of times of the straight finishing to cutting tool 21a, that is cutting tool 21a is relative to the frequency of exposure (such as increase when by once contacting and carry out straight finishing, and reduce when carrying out straight finishing by repeated multiple times contact) of abradant surface 53a.
Then, control member 90 utilizes Y-axis mobile member to make the cutting tool 21a of rotation mobile along Y direction (being to the direction contacted with abradant surface 53a) from predetermined cutting into position herein.Cutting tool 21a by while rotate an edge Y direction and move and contact with abradant surface 53a, thus utilizes finishing board 51a to be shaped as straight by the end of this cutting tool 21a.In addition, control member 90 makes the cutting tool 21a of rotation move until cutting tool 21a and abradant surface 53a becomes noncontact along Y direction.That is control member 90 at least makes the cutting tool 21a of rotation move to the other end from one end of abradant surface 53a.Herein, comprise from one end of abradant surface 53a to the other end: from the outer thoughtful radially periphery in opposite directions of finishing board 51a (from C1 to the C2 shown in Fig. 3, or from C2 to C1), from the outer thoughtful radially opening portion 54a(in opposite directions of finishing board 51a from C1 to the D1 shown in Fig. 3, or from C2 to D2), from the opening portion 54a of finishing board 51a to radially periphery (from D1 to the C1 shown in Fig. 3, or from D2 to C2) in opposite directions.Thus, at predetermined cutting into position, when observing along Z-direction (when the vertical direction along Fig. 3 is observed), near the periphery that cutting tool 21a is positioned at finishing board 51a or the opening portion 54a of finishing board 51a.And, in order to carry out straight finishing, cutting tool 21a along Y direction at least movement be equivalent to the diameter of finishing board 51a or the distance of radius.In addition, control member 90 makes cutting tool 21a rotate during making cutting tool 21a from predetermined cutting into position along Y direction movement, but, before cutting tool 21a moves to predetermined cutting into position or mobile after start rotation can.Such as, also can be, after carrying out machining by cutting tool 21a, do not make the rotation of the cutting tool 21a moving to position of readiness stop, and make it maintain the original state move to predetermined cutting into position.
Then, control member 90, after cutting tool 21a and abradant surface 53a becomes noncontact, makes retaining member 52a rotate.Herein, when making the cutting tool 21a of rotation move along Y direction relative to contacted abradant surface 53a, form the cutting mark of linearity at abradant surface 53a.The region being formed with cutting mark of abradant surface 53a (below, referred to as " cutting mark region ") relative to the region (below, referred to as " non-cutting trace region ") not forming cutting mark, the cutting ability of cutting tool 21a is reduced, therefore, had better not again for straight finishing.Thus, cutting tool 21a is contacted with non-cutting trace region in again contacting abradant surface 53a at cutting tool 21a, control member 90 makes retaining member 52a rotate, to make non-cutting trace region and cutting tool 21a in Z-direction (observing the situation of Fig. 3 from vertical below) in opposite directions on the mobile route of cutter.In addition, the anglec of rotation also can be predetermined value, but changes with predetermined cutting into position due to the width (length on direction orthogonal with forming the direction of cutting mark in a horizontal plane) of cutting mark, therefore, also can determine the anglec of rotation according to predetermined cutting into position.And, also can comprise a part of cutting mark region in non-cutting trace region.Such as, also can be comprise cutting mark region in the 54a side, opening portion of Z-direction (observing the situation of Fig. 3 from vertical below) on the mobile route of cutter.In this case, the anglec of rotation of finishing board 51a can be reduced, with when compared with Z-direction (observing the situation of Fig. 3 from vertical below) is not when the mobile route of cutter comprising completely cutting mark region, finishing board 51a can be recycled in straight finishing.
As previously discussed, finishing board 51a, 51b are arranged to and can rotate independent of chuck table 10 by topping machanism 1 of the present embodiment, and make cutting tool 21a, 21b relative to finishing board 51a, 51b relative movement, carry out the straight finishing of cutting tool 21a, 21b thus.Thus, with in order to carry out straight finishing and with pull down machined object W from chuck table and finishing board remained on chuck table and carries out compared with the situation of straight finishing, due to without operator or conveyance component for carrying out the operation of straight finishing, therefore, it is possible to realize the simplification of straight dressing operation.
And, the time not having to be undertaken by cutting tool 21a, 21b the machining of machined object W can be utilized to carry out straight finishing.Such as, in above-mentioned topping machanism 1, in cutting tool 21a, 21b one carries out machining, straight finishing can be carried out to the cutting tool that another does not carry out machining.And, in the topping machanism only having a cutting tool, can machined object W after pulling down processing from chuck table 10, keep new machined object W, during the state of machining, straight finishing can be carried out to cutting tool until reach.Thus, the machining of machined object W can be interrupted, even if or interrupt the time also shortening interruption, the raising of productivity ratio can be realized.
And, owing to abradant surface 53a, 53b of finishing board 51a, 51b being formed as ring-type and can rotating centered by central axis B, therefore, even if define cutting mark because making cutting tool 21a, 21b move along Y direction at abradant surface 53a, 53b, also, can contact with cutting tool 21a, 21b with non-cutting trace region when again making cutting tool 21a, 21b move along Y direction by making finishing board 51a, 51b rotate.Thus, due to can by finishing board 51a, 51b Reusability in straight finishing by making finishing board 51a, 51b rotate, therefore, it is possible to make productivity ratio improve.If abradant surface is discoid, even if rotate centered by central axis to repeatedly carry out straight finishing, cutting tool still can abradant surface on Multiple through then out central axis, and, in order to make cutting tool and abradant surface noncontact, cutting tool will be made to move the distance being equivalent to diameter.But, when abradant surface 53a, 53b are ring-types, the distance being equivalent to radius is moved relative to finishing board 51a, 51b by making cutting tool 21a, 21b, cutting tool 21a, 21b and abradant surface 53a, 53b just can be made to become noncontact, and the distance that cutting tool 21a, 21b need not be made to move be equivalent to diameter is to carry out straight finishing.And even if make cutting tool 21a, 21b move the distance being equivalent to diameter, but owing to being formed with opening portion 54a, 54b on central axis B, therefore, cutting tool 21a, 21b can not Multiple through then out abradant surface 53a, 53b.Thus, the durability of finishing board 51a, 51b can be improved.And, in machining, the mobile member of the relative movement for carrying out cutting member 20a, 20b and machined object W need not be used, just can be in place in Z-direction (observing the situation of Fig. 3 from vertical below) non-cutting trace region on the mobile route of cutter.Thus, interrupt, therefore, it is possible to realize the raising of productivity ratio due to the machining of machined object W can not be made.
In addition, in the above-described embodiment, finishing board 51a, 51b are configured to a component of the ring-type being formed with abradant surface 53a, 53b, but the present invention is not limited to this, also can form by the trim layer comprising abradant surface 53a, 53b is gathered into folds with the substrate layer for the formation of trim layer, in the case, also only trim layer can be configured to ring-type.
Claims (3)
1. a topping machanism, described topping machanism has: chuck table, and described chuck table is used for machined object being remained on the surface being formed as horizontal plane; Cutting member, described cutting member has the main shaft that can rotate and the cutting tool being assemblied in described main shaft; Y-axis mobile member, described Y-axis mobile member moves along the direction and Y direction with the rotation axis parallel of described main shaft for making described main shaft; With Z axis mobile member, described Z axis mobile member for make described main shaft along close to and move away from the direction of chuck table and Z-direction, the feature of described topping machanism is,
Described topping machanism also has trim components, and described trim components is adjacent with described chuck table, and described trim components is disposed in and drives on the mobile route of described cutting tool movement by Y-axis mobile member,
Described trim components has finishing board and retaining member, and described retaining member is for keeping described finishing board, and described retaining member can rotate centered by its central axis,
The height of the abradant surface of the finishing board kept by described retaining member is configured to the height on the surface being equal to or less than described chuck table, and the abradant surface of described finishing board is formed as ring-type.
2. topping machanism according to claim 1, is characterized in that,
When utilizing described trim components to repair described cutting tool, described cutting tool is moved to and described finishing board predetermined cutting into position in opposite directions in Y direction, utilize described Y-axis mobile member that the described cutting tool of rotation is moved from described predetermined cutting into position to the direction contacted with described abradant surface, after described cutting tool and described abradant surface become noncontact, described retaining member is rotated, to make not having the region of cutting mark and described cutting tool in Z-direction in opposite directions in described abradant surface on described mobile route.
3. topping machanism according to claim 1 and 2, is characterized in that,
Described trim components is adapted to and is positioned at described rotation from central axis described during top view.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011222276A JP5764031B2 (en) | 2011-10-06 | 2011-10-06 | Cutting equipment |
| JPJP2011-222276 | 2011-10-06 | ||
| JP2011-222276 | 2011-10-06 |
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| CN103029225A CN103029225A (en) | 2013-04-10 |
| CN103029225B true CN103029225B (en) | 2016-04-20 |
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| CN201210367191.6A Active CN103029225B (en) | 2011-10-06 | 2012-09-28 | Topping machanism |
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| CN (1) | CN103029225B (en) |
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| JP6223237B2 (en) * | 2014-03-07 | 2017-11-01 | 株式会社ディスコ | Cutting equipment |
| JP6223239B2 (en) * | 2014-03-07 | 2017-11-01 | 株式会社ディスコ | Cutting equipment |
| JP6223238B2 (en) * | 2014-03-07 | 2017-11-01 | 株式会社ディスコ | Cutting equipment |
| JP6230477B2 (en) * | 2014-04-25 | 2017-11-15 | 株式会社ディスコ | Cutting equipment |
| JP2016078215A (en) * | 2014-10-22 | 2016-05-16 | 株式会社ディスコ | Sub chuck tabel |
| JP6457327B2 (en) * | 2015-04-28 | 2019-01-23 | 株式会社ディスコ | Setup method |
| JP6541546B2 (en) * | 2015-10-21 | 2019-07-10 | 株式会社ディスコ | Cutting device |
| JP6600267B2 (en) * | 2016-03-15 | 2019-10-30 | 株式会社ディスコ | Workpiece cutting method |
| JP6812079B2 (en) * | 2017-03-13 | 2021-01-13 | 株式会社ディスコ | Processing method of work piece |
| JP6967386B2 (en) | 2017-07-12 | 2021-11-17 | 株式会社ディスコ | Dressing method |
| JP7222636B2 (en) * | 2018-09-12 | 2023-02-15 | 株式会社ディスコ | Edge trimming device |
| JP7242129B2 (en) * | 2019-01-21 | 2023-03-20 | 株式会社ディスコ | Cutting device and cutting blade dressing method |
| CN109940498B (en) * | 2019-03-30 | 2024-03-15 | 浙江联宜电机有限公司 | Gear polishing device |
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| JP2013082021A (en) | 2013-05-09 |
| CN103029225A (en) | 2013-04-10 |
| JP5764031B2 (en) | 2015-08-12 |
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