CN103026456A - Discharge lamp - Google Patents
Discharge lamp Download PDFInfo
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- CN103026456A CN103026456A CN2011800360213A CN201180036021A CN103026456A CN 103026456 A CN103026456 A CN 103026456A CN 2011800360213 A CN2011800360213 A CN 2011800360213A CN 201180036021 A CN201180036021 A CN 201180036021A CN 103026456 A CN103026456 A CN 103026456A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
- H01J61/545—Igniting arrangements, e.g. promoting ionisation for starting using an auxiliary electrode inside the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Abstract
In the present invention, a discharge lamp is provided with a discharge tube filled with a discharge gas, at least one band shaped electrode provided inside the discharge container, and at least one dielectric covering the electrode. The discharge lamp is characterized in that at least one of the two edges along the longitudinal direction of the band shaped electrode is thinner than the middle portion of the electrode.
Description
Technical field
The present invention relates to be undertaken by dielectric barrier discharge or capacitive coupling type high-frequency discharge the electrodeless type discharge lamps such as Excimer lamp, external electrode fluorescent lamp of Discharge illuminating, relate in particular to the electrode structure of lamp.
Background technology
In the Excimer lamp of dual cylinder cast, utilize two axially long coaxial circles bobbins to consist of illuminating part, in luminous tube, enclose gases at high pressure, along axially, on inside tube inner surface and outboard tube outer surface, relatively disposed pair of electrodes.And, by the high frequency voltage that applies several kV between the electrode is carried out Discharge illuminating.
In addition, in as external electrode fluorescent lamp, adopting the discharge lamp of single hose structure,, and be provided between the outer electrode of outer surface of discharge tube and carry out Discharge illuminating by the band electrode that dielectric covered along the axial arrangement of discharge tube inside.
For example, in patent documentation 1, put down in writing the Excimer lamp that carries out Discharge illuminating by applying high frequency voltage.In addition, in citing document 2, put down in writing in discharge tube internal configurations band electrode and at the discharge lamp of the outer surface configuring external electrode of discharge tube.
Patent documentation 1: Japanese kokai publication hei 6-275242 communique
Patent documentation 2: Japanese kokai publication hei 11-283579 communique
Summary of the invention
Invent problem to be solved
In existing discharge lamp, the electrode of discharge tube inside is cylindric or lamellar, and its cross sectional shape is circular or rectangular-shaped.For such cross sectional shape, in order to discharge between the electrode in dielectric and the electrode outside discharge tube, need very large electric power, thereby lighting of lamp starts slowly.
When lamp being provided larger electric power, because the dielectric of coated electrode and the thermal expansion difference between the electrode, electrode is easy to break away from from dielectric, thereby might be exposed to discharge space and the generating electrodes oxidation owing to electrode material.
For the means of dealing with problems
Discharge lamp of the present invention is to carry out luminous discharge lamp by dielectric barrier discharge or capacitive coupling type high-frequency discharge etc., and this Discharging lamps and lanterns is standby: discharge tube, its inclosure have discharge gas; At least 1 band electrode, it is provided in the above-mentioned discharge vessel; And at least 1 dielectric, it covers above-mentioned electrode.The band electrodes such as foil electrode are embedded in the dielectric, are not exposed to discharge space.The gas of enclosing in discharge space is arbitrarily, can enclose the mist of the halogen monomers such as rare gas monomer, chlorine or halogen and rare gas.
In the present invention, the Thickness Ratio electrode central portion of at least one party in two edges alongst of electrode is thin.Therefore, partly locate to occur electric field at thin electrode edge and concentrate the electric field strength grow.As a result, even utilize lower input voltage, also can between electrode, produce discharge.
Can concentrate several electrodes, and utilize 1 dielectric to cover, in addition, also can utilize respectively different dielectrics to cover.Preferably, make the thin thickness of Thickness Ratio electrode central portion at two edges of band electrode, improve at the electrode two ends and light startability.
As electrode shape, can use the various shapes towards the edge sharpening, but as become smoothly sharp-pointed towards edge part shape cutting edge shape preferably.Therefore, the cross section, marginal portion becomes wire in the axial direction, thereby can suppress the discharge ionization voltage level lower, in addition, owing to be cutting edge shape, therefore is being difficult to produce the gap with the dielectric boundary portion office that covers, and is difficult to occur to break away from etc.
About the electrode configuration, can set in the discharge tube outside electrode, perhaps also can be only at the inner formation of discharge tube electrode.For example, the identical a plurality of band electrodes of configuration polarity in discharge tube are at discharge tube exterior arrangement electrode.At this moment, considering will be from whole discharge tube radiating light equably, preferably with the Width of a plurality of band electrodes these a plurality of band electrodes of state configuration parallel to each other.Perhaps, can dispose a plurality of band electrodes about the axisymmetric position of discharge tube.
On the other hand, can in discharge tube, dispose the different a plurality of band electrodes of polarity.At this moment, consider and to radiate as far as possible equably from whole discharge tube, preferably disposing a plurality of band electrodes about the axisymmetric position of discharge tube.In addition, it is namely parallel to each other to become same direction by the Width that makes a plurality of band electrodes, also can realize whole radiation.
For example in the situation of the modulated structure that electrode is configured in the discharge tube outside, in order to improve the electric field strength with electrode edge section, preferably in above-mentioned discharge tube, dispose coaxially band electrode, and the Width that makes electrode and discharge tube inside is radially consistent.Thus, the electric field strength of the extending direction of electrode edge section is maximum, can suppress to light starting resistor.
The material of electrode can be formed by the high metal or alloy of conductivity.Wish to consider that current capacity or the coefficient of expansion set the thickness of electrode, for example with the thickness setting of electrode in a certain scope of 20 μ m～50 μ m.In addition, hope consideration current capacity is set the width of electrode, for example preferably is set in the scope of 1.2mm～10mm.
The wall thickness of discharge tube has and prevents because quasi-molecule light causes the thickness that discharge tube is deteriorated, on the other hand, as long as be set as improve discharge ionization voltage or light the thickness of keeping voltage following.For example, the wall thickness with discharge tube is set in the scope of 0.8mm～1.5mm.Hope with the internal diameter of discharge tube be not set as because of arcing distance shorten cause illumination not enough, on the other hand not because of in the unsettled scope of the elongated guiding discharge of arcing distance, for example the internal diameter with discharge tube is set in the scope of 8mm～20mm.
Dielectric for example can be made of the cylindrical dielectric of cross section circle.Preferably, by with serviceability temperature under the approximate insulating material of electrode thermal expansion coefficient consist of.In addition, consider and keep insulating properties and prevent that discharge ionization voltage from uprising that dielectric thickness is the scope of 0.1mm～2mm preferably.
According to the kind of discharge gas with apply voltage etc. and decide arcing distance between electrode other electrode different from polarity.Cause illumination not enough in order to prevent discharge range from narrowing down, thereby and prevent the elongated discharge instability of arcing distance, preferably arcing distance is set in the scope of 3mm～10mm.
Be made as w at the width with band electrode, when the internal diameter of above-mentioned discharge tube is made as d, preferably, the ratio of d/w satisfies " 1.6≤d/w≤13.4 ".When the value of d/w less than 1.6 the time, paper tinsel shared area in discharge vessel becomes large, arcing distance shortens, thereby discharging light is blocked by band electrode and causes illumination not enough.When the value of d/w greater than 13.4 the time because the width of band electrode is little, it is caused overheated to produce overcurrent, perhaps guiding discharge is unstable because arcing distance is elongated.
The invention effect
According to the present invention, can provide a kind of discharge lamp of lighting startability and can keeping for a long time illumination that improved.
Description of drawings
Fig. 1 is the approximate vertical view of the discharge lamp of the 1st execution mode.
Fig. 2 is the cutaway view along the II-II of Fig. 1.
Fig. 3 is near the cutaway view that amplifies the electrode edge section to Fig. 2.
Fig. 4 is the figure that the manufacturing process of discharge lamp is shown.
Fig. 5 is the general profile chart of the discharge lamp in the 2nd execution mode.
Fig. 6 is the general profile chart of the discharge lamp of the 3rd execution mode.
Among Fig. 7 the discharge lamp of the 4th execution mode described.
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.
Fig. 1 is the approximate vertical view of the discharge lamp of the 1st execution mode.Fig. 2 is the cutaway view along the II-II of Fig. 1.
Possess the discharge tube 20 of the cross section toroidal that is consisted of by dielectric materials such as quartz glasss as the discharge lamp 10 of Excimer lamp, enclosed the rare gas such as xenon or their mist is used as discharge gas in that discharge tube 20 is interior.For example the inclosure pressure setting with discharge gas is 5kPa～150kPa.
In discharge tube 20 internal configurations banded 1 foil electrode 30 that extends along tubular axis C is arranged.Foil electrode 30 is covered by the cylindrical dielectric 50 of cross section by the circular shape, thereby this foil electrode 30 is not exposed to discharge space and is embedded in the dielectric 50.
Center and the state that the Width center of foil electrode 30 overlaps with dielectric 50 dispose this foil electrode 30 coaxially.And, dispose coaxially dielectric 50 with respect to discharge tube 20.Therefore, foil electrode 30 is configured in the position coaxial with discharge tube 20, is configured in the position about tubular axis C symmetry.
As described later, two edges along tube axial direction of foil electrode 30 are that edge part 30K1,30K2 constitute cutting edge shape.Therefore, the thickness of foil electrode 30 is from the center of Width towards edge thinning, and electrode sections is shaped as gradually thin shape of tip.In Fig. 2, the Width of foil electrode 30 is defined as Y-direction, direction that will be vertical with this Width (thickness direction) is defined as directions X.
The outer electrode 40 that sets at the outer surface of discharge tube 20 is the structures that are equipped with a plurality of electrode parts nettedly, along tubular axis C with predetermined space helically and row arrangement.The supply lines 70 that is connected to the end of foil electrode 30 is connected with the power supply unit (not shown) that is arranged on the outside, provides electric power via 70 pairs of discharge lamps 10 of supply lines.
Be anode, negative electrode with the polarity separate provision of foil electrode 30, outer electrode 40.When providing the voltage of several kV to discharge lamp 10, between foil electrode 30 and outer electrode 40, produce the dielectric barrier discharge, radiate predetermined spectrum (for example, 172nm) quasi-molecule light.
The axial length of discharge tube 20 is set as 100mm～250mm.On the other hand, in order to prevent because quasi-molecule light causes that discharge tube is deteriorated and suppresses the rising of discharge ionization voltage, the wall thickness of discharge tube 20 is set as 0.8mm～1.5mm.In addition, for the illumination that prevents the discharge instability that causes because of arcing distance length and prevent from causing because of the arcing distance weak point is not enough, the internal diameter of discharge tube 20 is set as 8mm～20mm.
Considering current capacity, make difficulty and the disengaging that prevents from causing because of thermal expansion etc., is 20 μ m～50 μ m with the thickness setting of foil electrode 30.In addition, consider current capacity, make difficulty and the cut-out of the discharging light that prevents from causing because electrode area is huge, the width of paper tinsel is set as 1.2mm～10mm.Electrode material can use molybdenum or comprise alloy of molybdenum etc.
Dielectric material (the SiO that dielectric 50 is similar to by the thermal coefficient of expansion with electrode as far as possible
2Deng) consist of.Consider the limit of keeping insulating properties, the rising that prevents discharge ionization voltage, and be 0.1mm～2mm with the thickness setting of dielectric 50.
Consider the stability that prevents and discharge of illumination deficiency, and be to be set as 3mm～10mm apart from the interval between the internal diameter of dielectric 50 and discharge tube 20 with arcing distance.In addition, be made as w, when the discharge tube internal diameter is made as d, set electrode width and discharge tube internal diameter in the mode of the formula of meeting the following conditions when the width with foil electrode 30.
1.6≤d/w≤13.4 ····(1)
Fig. 3 is near the cutaway view that amplifies the electrode edge section to Fig. 2.But the size of electrode, dielectric, discharge tube, the part of relative position relation are different from Fig. 1.
As mentioned above, edge part 30K1, the 30K2 of foil electrode 30 are cutting edge shape.Foil electrode 30 is from the center of Width towards the edge sharpening, and the thickness T of the central part of its Thickness Ratio Width is thin, and it is sharp-pointed that edge 30T1 becomes.Not shown edge part 30K2 also is same shape.
By such electrode shape, produce electric field at edge 30T1 place and concentrate.Namely, reach maximum near the zone (with reference to dotted line E) of electric field strength edge 30T1, this zone narrows down because of the sharp-pointed shape of edge 30T1.This be because, in the not sharp-pointed existing cross section of edge part was rectangular-shaped, producing electric field concentrated in the whole planar section at edge was that electric potential gradient becomes greatly, but in the present embodiment, edge 30T1 is in fact along axial line, only produces electric field in edge and concentrates.
In addition, foil electrode 30 is configured coaxially with respect to dielectric 50 and discharge tube 20, and its Width is along radially.Therefore, the distance (arcing distance) between the inner surface of edge part 30K1, the 30K2 of foil electrode 30 and discharge tube 20 equates.Therefore, from discharge tube 20 balance radiating light well on the whole.
Fig. 4 is the figure that the manufacturing process of discharge lamp is shown.
On foil electrode 70, connect supply lines 80 by resistance welded etc., and be inserted in the glass tube 60 as the dielectric coating film material.Making after electrode insertion 70 becomes vacuum in the pipe, then, heat from the outside to dielectric coating film material 60, is welded together (operation (1)) with foil electrode 70.In addition, also can apply dielectric operation with replacing.
Form flange shape so-called abacus bead shape closure 85 (operation (2)) in the position with electrode edge section corresponding glass tube.Then, formed and at one end be provided with blast pipe, be provided with at the other end discharge tube 90 (operation (3)) of the quartz glass etc. of insert port, at discharge tube 90 interior electrode insertions 70, so that the insert port of discharge tube 70 and abacus bead shape closure 85 are welded together (operation (4)).
On one side integral body is heated, on one side blast pipe by discharge tube 90 vacuumize, to remove impurity.And, after enclosing discharge gas, seal blast pipe, set outer electrode 95 (operation (5)) at the outer surface of discharge tube 90.
Like this, according to present embodiment, disposed the foil electrode 30 that is covered by dielectric 50 along tubular axis C in discharge tube 20 inside.And, be equipped with the different outer electrode of polarity 40 at the outer surface of discharge tube 20.In addition, edge part 30K1, the 30K2 of foil electrode 30 form blade-like.
Because electrode edge section is sharp-pointed, so electrolysis strength uprises partly at electrode edge section place, under low-voltage, produce the discharge when lighting beginning.The trigger action of electrode edge section performance discharge beginning also can be kept illumination even put for a long time bright light.
In addition, because electrode edge section has carried out sharpening smoothly, so between electrode and dielectric, be difficult to produce the gap, even if there is the thermal expansion difference when lighting, electrode is exposed in the discharge space, thereby avoids oxidized.
The discharge lamp of the 2nd execution mode then, is described with Fig. 5.In the 2nd execution mode, in the discharge tube internal configurations mutual two the different foil electrodes of polarity.
Fig. 5 is the general profile chart of the discharge lamp in the 2nd execution mode.
In addition, foil electrode 130A, 130B are configured in the position about tubular axis C symmetry, and Width is all parallel with Y-axis.Two edge parts and the 1st execution mode of foil electrode 130A, 130B become cutting edge shape in the same manner.Electrode configuration by such produces the Discharge illuminating with respect to discharge tube 20 symmetries, thus from whole discharge tube 20 radiating lights.
Fig. 6 is the general profile chart of the discharge lamp of the 3rd execution mode.In the 3rd execution mode, in discharge tube, be arranged with a plurality of foil electrodes.
Fig. 7 is used for the discharge lamp of explanation the 4th execution mode.Discharge lamp 300 has 3 foil electrodes and buries dielectric 320 underground in discharge tube 310, be configured to row.The both sides that in the cross section are rectangular-shaped discharge tube 300 dispose the different outer electrode of polarity 350.By such electrode configuration, from discharge tube below irradiation light.
Dielectric also can be the shape beyond the circle of cross section, as long as for example can be with coaxial configuration relation cover foil electrode.Electrode edge section is not limited to cutting edge shape, gets final product so long as the thin shape of the central portion of Thickness Ratio Width produces the concentrated shape of electric field like that.In addition, also can only make the sharpening of an electrode edge section.And, can also make the shape of electrode become the inhomogeneous zigzag of width or be configured to dielectric center and not overlap with the center of foil electrode, set thus and produce the position that electric field is concentrated.In addition, can form thus spiral helicine foil electrode with respect to the Width of the axial torsion electrode foil of discharge tube, thereby disperse to cause the stress of the thickness direction that electrode foil and dielectric break away from.
As discharge mode, can replace the above-mentioned dielectric barrier discharge excimer lamp that can produce along the stabilizer shaft ground of discharge space Uniform Discharge, and as being the lamp of lower capacitive coupling type (capacitance-type) the high-frequency discharge mode of voltage ratio such as middle external electrode fluorescent lamps that uses such as scanner light sources, use.In the situation of capacitive coupling type high-frequency discharge mode, by with the last part of LC resonant circuit as power supply unit, can easily apply high voltage.
Embodiment
Discharge lamp to the embodiment that is equivalent to the 1st execution mode describes.The axial length of discharge tube is set as 300mm, wall thickness is set as 1mm, internal diameter is set as 12.8mm, on the direction parallel with the width of foil electrode, be 1mm with dielectric thickness setting of cross section toroidal, on the direction parallel with the thickness of foil electrode, be 1.5mm with dielectric thickness setting of cross section toroidal, arcing distance is set as about 5mm.Be 20 μ m with the thickness setting of foil electrode, width is set as 1.5mm.When the internal diameter with discharge tube be made as d, when the width of foil electrode is made as w, it is 8.5 than d/w.
Enclose Xe gas as discharge gas, carried out lighting experiment applying under voltage 6.5kV, the air pressure 47kPa.Make the action of lighting of the lamp of the spectral light of radiating 172nm continue 2500 hours, the result can obtain 90% sustainment rate for illumination.
Need to prove, Japanese patent application No.2010-179652 (application on August 10th, 2010) comprise specification, accompanying drawing and claim in interior disclosure by reference in conjunction with in this manual.
About the present invention, only otherwise break away from the intent of the present invention and scope by appended claim definition, just can carry out various changes, displacement, replacement.And the present invention is not limited to processing, device, manufacturing, construct, means, method and the step of the particular implementation of putting down in writing in the specification.Those skilled in the art can recognize, according to disclosure of the present invention, can derive and realize in fact the function that the function that plays with the execution mode of putting down in writing is same here or played in fact equivalent effect, the device of effect, means, method.Therefore, appended claim is included in the scope of such device, means, method.
Claims (12)
1. a discharge lamp is characterized in that,
This Discharging lamps and lanterns is standby:
Inclosure has the discharge tube of discharge gas;
Be provided at least 1 band electrode in the described discharge vessel; And
Cover at least 1 dielectric of described electrode,
The Thickness Ratio electrode central portion at least one edge in two edges alongst of described band electrode is thin.
2. discharge lamp according to claim 1 is characterized in that,
The edge of described band electrode is cutting edge shape.
3. discharge lamp according to claim 1 and 2 is characterized in that,
In described discharge tube, disposed coaxially described band electrode.
4. discharge lamp according to claim 1 and 2 is characterized in that,
The thin thickness of the Thickness Ratio electrode central portion at two edges of described band electrode.
5. discharge lamp according to claim 1 is characterized in that,
The different a plurality of band electrodes of polarity in described discharge tube, have been disposed.
6. discharge lamp according to claim 1 is characterized in that,
In described discharge tube, disposed the identical a plurality of band electrodes of polarity,
Outside described discharge tube, disposed the outer electrode with described band electrode opposed polarity.
7. according to claim 5 or 6 described discharge lamps, it is characterized in that,
Described a plurality of band electrode is configured in about the axisymmetric position of discharge tube.
8. according to claim 5 or 6 described discharge lamps, it is characterized in that,
With the Width of a plurality of band electrodes state configuration parallel to each other these a plurality of band electrodes.
9. discharge lamp according to claim 1 and 2 is characterized in that,
A plurality of electrodes are covered by different dielectrics respectively.
10. discharge lamp according to claim 1 is characterized in that,
The thickness of described band electrode is set in the scope of 20 μ m～50 μ m, and the width of described band electrode is set in the scope of 1.2mm～10mm.
11. discharge lamp according to claim 1 is characterized in that,
The wall thickness of described discharge tube is set in the scope of 0.8mm～1.5mm, the internal diameter of described discharge tube is set in the scope of 8mm～20mm, described dielectric thickness is set in the scope of 0.1mm～2mm, and arcing distance is set in the scope of 3mm～10mm.
12. according to claim 10 or 11 described discharge lamps, it is characterized in that,
Be made as w at the width with described band electrode, when the internal diameter of described discharge tube is made as d, satisfy following formula:
1.6≤d/w≤13.4。
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-179652 | 2010-08-10 | ||
| JP2010179652A JP5504095B2 (en) | 2010-08-10 | 2010-08-10 | Discharge lamp |
| PCT/JP2011/067931 WO2012020703A1 (en) | 2010-08-10 | 2011-08-05 | Discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103026456A true CN103026456A (en) | 2013-04-03 |
| CN103026456B CN103026456B (en) | 2015-12-02 |
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ID=45567671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180036021.3A Active CN103026456B (en) | 2010-08-10 | 2011-08-05 | Discharge lamp |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP2608245A4 (en) |
| JP (1) | JP5504095B2 (en) |
| KR (1) | KR101792563B1 (en) |
| CN (1) | CN103026456B (en) |
| TW (1) | TWI500067B (en) |
| WO (1) | WO2012020703A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105593969A (en) * | 2013-10-04 | 2016-05-18 | 株式会社Orc制作所 | Excimer lamp and method for producing same |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6557011B2 (en) * | 2015-01-26 | 2019-08-07 | 株式会社オーク製作所 | Excimer lamp |
| JP6921557B2 (en) * | 2016-03-23 | 2021-08-18 | 株式会社オーク製作所 | Discharge lamp and its manufacturing method |
| JP6974677B2 (en) * | 2017-03-22 | 2021-12-01 | 公立大学法人大阪 | Plasma generator and plasma generation method |
| JP6974678B2 (en) * | 2017-03-22 | 2021-12-01 | 公立大学法人大阪 | Plasma processing equipment and plasma processing method |
| JP7185521B2 (en) * | 2018-12-26 | 2022-12-07 | 株式会社オーク製作所 | discharge lamp |
| DE102019202479B4 (en) * | 2019-02-25 | 2021-12-02 | Osram Gmbh | ELECTRODE ARRANGEMENT FOR A DISCHARGE LAMP, GAS DISCHARGE LAMP, PROTECTIVE FILM AND METHOD FOR PROVIDING A PROTECTIVE FILM ON AN ELECTRODE ARRANGEMENT |
| KR102256709B1 (en) * | 2019-04-05 | 2021-05-28 | 오영래 | A plasma lamp apparatus |
| KR20210093122A (en) | 2020-01-17 | 2021-07-27 | 유니램 주식회사 | Light center-concentration type excimer lamp and light irradiating device using the same |
| JP7462524B2 (en) | 2020-09-17 | 2024-04-05 | 株式会社オーク製作所 | Excimer lamps, UV irradiation devices and ozone generators |
| TW202247246A (en) | 2021-05-28 | 2022-12-01 | 日商鷗爾熙製作所股份有限公司 | Excimer lamp, lighting method of excimer lamp, and method for producing excimer lamp capable of performing lamp lighting by efficient main discharge |
| JP2023087558A (en) | 2021-12-13 | 2023-06-23 | 株式会社オーク製作所 | Excimer lamp, method for lighting the same, and manufacturing method for the same |
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2010
- 2010-08-10 JP JP2010179652A patent/JP5504095B2/en active Active
-
2011
- 2011-06-07 TW TW100119750A patent/TWI500067B/en active
- 2011-08-05 EP EP11816368.2A patent/EP2608245A4/en not_active Withdrawn
- 2011-08-05 CN CN201180036021.3A patent/CN103026456B/en active Active
- 2011-08-05 KR KR1020137001683A patent/KR101792563B1/en active IP Right Grant
- 2011-08-05 WO PCT/JP2011/067931 patent/WO2012020703A1/en active Application Filing
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020163305A1 (en) * | 2000-09-29 | 2002-11-07 | Lothar Hitzschke | Discharge lamp having capacitive field modulation |
| US6605899B2 (en) * | 2000-09-29 | 2003-08-12 | Patent-Treuhand-Gesellschaft Fuer Elektrische Gluehlampen Mbh | Dielectric barrier discharge lamp |
| US20040021411A1 (en) * | 2001-08-17 | 2004-02-05 | Gerhard Doll | Tubular discharge lamp with ignition aid |
| CN1744275A (en) * | 2004-07-06 | 2006-03-08 | 通用电气公司 | Dielectric barrier discharge lamp |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105593969A (en) * | 2013-10-04 | 2016-05-18 | 株式会社Orc制作所 | Excimer lamp and method for producing same |
| CN105593969B (en) * | 2013-10-04 | 2017-07-04 | 株式会社Orc制作所 | Excimer lamp and its manufacture method |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2608245A4 (en) | 2014-01-15 |
| KR20130138716A (en) | 2013-12-19 |
| JP5504095B2 (en) | 2014-05-28 |
| TWI500067B (en) | 2015-09-11 |
| WO2012020703A1 (en) | 2012-02-16 |
| TW201207887A (en) | 2012-02-16 |
| CN103026456B (en) | 2015-12-02 |
| KR101792563B1 (en) | 2017-11-01 |
| JP2012038658A (en) | 2012-02-23 |
| EP2608245A1 (en) | 2013-06-26 |
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