CN103026456B - Discharge lamp - Google Patents
Discharge lamp Download PDFInfo
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- CN103026456B CN103026456B CN201180036021.3A CN201180036021A CN103026456B CN 103026456 B CN103026456 B CN 103026456B CN 201180036021 A CN201180036021 A CN 201180036021A CN 103026456 B CN103026456 B CN 103026456B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
- H01J61/545—Igniting arrangements, e.g. promoting ionisation for starting using an auxiliary electrode inside the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
Abstract
The feature of discharge lamp is to possess: discharge tube, and it is sealed with discharge gas; At least 1 band electrode, it is disposed in above-mentioned discharge vessel; And at least 1 dielectric, it covers above-mentioned electrode, and the Thickness Ratio electrode central portion at least one edge in alongst two edges of above-mentioned band electrode is thin.
Description
Technical field
The present invention relates to and to be discharged by dielectric barrier or capacitively coupled high-frequency discharge carries out the electrodeless type discharge lamp such as Excimer lamp, external electrode fluorescent lamp of Discharge illuminating, particularly relate to the electrode structure of lamp.
Background technology
In the Excimer lamp of dual cylinder cast, utilize two axially long coaxial circles bobbins to form illuminating part, in luminous tube, enclose gases at high pressure, axially, inside tube inner surface and outboard tube outer surface are relatively configured with pair of electrodes.Further, by carrying out Discharge illuminating to the high frequency voltage applying a few kV between electrode.
In addition, in the discharge lamp constructed adopting single hose as external electrode fluorescent lamp, the band electrode that the axial arrangement along discharge tube inside is covered with a dielectric substance, and be disposed in discharge tube outer surface outer electrode between carry out Discharge illuminating.
Such as, in patent documentation 1, describe the Excimer lamp carrying out Discharge illuminating by applying high frequency voltage.In addition, to describe in citing document 2 in discharge tube internal configurations band electrode and the discharge lamp of outer surface configuring external electrode at discharge tube.
Patent documentation 1: Japanese Unexamined Patent Publication 6-275242 publication
Patent documentation 2: Japanese Unexamined Patent Publication 11-283579 publication
Summary of the invention
Invent problem to be solved
In existing discharge lamp, the electrode of discharge tube inside is cylindric or lamellar, and its cross sectional shape is circular or rectangular-shaped.For such cross sectional shape, in order to discharge between the electrode in dielectric and the electrode outside discharge tube, need very large electric power, thus lighting of lamp starts slowly.
When providing larger electric power to lamp, due to the thermal expansion difference between the dielectric of coated electrode and electrode, electrode is easy to depart from from dielectric, thus likely because electrode material is exposed to discharge space and generating electrodes oxidation.
For the means of dealing with problems
Discharge lamp of the present invention to be discharged by dielectric barrier or capacitively coupled high-frequency discharge etc. carries out luminous discharge lamp, and this Discharging lamps and lanterns is standby: discharge tube, and it is sealed with discharge gas; At least 1 band electrode, it is disposed in above-mentioned discharge vessel; And at least 1 dielectric, it covers above-mentioned electrode.The band electrodes such as foil electrode are embedded in dielectric, are not exposed to discharge space.The gas enclosed in discharge space is arbitrary, can enclose the mist of the halogen monomers such as rare gas monomer, chlorine or halogen and rare gas.
In the present invention, the Thickness Ratio electrode central portion of at least one party in alongst two edges of electrode is thin.Therefore, there is electric field at thin electrode edge portions place and concentrate, electric field strength grow.As a result, even if utilize lower input voltage, also electric discharge can be produced in-between the electrodes.
Several electrode can be concentrated, and utilize 1 dielectric to cover, in addition, different dielectrics also can be utilized respectively to cover.Preferably, make the thickness of the Thickness Ratio electrode central portion at two of band electrode edges thin, improve at electrode two ends and light startability.
As electrode shape, can apply towards edge sharpening various shapes, but as becoming sharp-pointed shape preferably cutting edge shape smoothly towards edge part.Therefore, cross section, marginal portion becomes wire in the axial direction, thus can suppress lower by discharge ionization voltage level, in addition, owing to being cutting edge shape, is therefore being difficult to produce gap with covered dielectric boundary portion office, is being difficult to occur to depart from.
About electrode configuration, an electrode can be arranged in discharge tube outside, or also can only at discharge tube Inner Constitution electrode.Such as, in discharge tube, configure multiple band electrodes that polarity is identical, at discharge tube exterior arrangement electrode.Now, consider and from whole discharge tube radiating light equably, preferably will configure the plurality of band electrode with the state that the Width of multiple band electrode is parallel to each other.Or, multiple band electrode can configured about the axisymmetric position of discharge tube.
On the other hand, the different multiple band electrodes of polarity can be configured in discharge tube.Now, consider and will radiate as far as possible equably from whole discharge tube, preferably configuring multiple band electrode about the axisymmetric position of discharge tube.In addition, by making the Width of multiple band electrode become same direction and parallel to each other, overall radiation can also be realized.
Such as when electrode being configured in the modulated structure of discharge tube outside, in order to improve the electric field strength with electrode edge portion, preferably in above-mentioned discharge tube, configure band electrode coaxially, and make the Width of electrode consistent with the radial direction of discharge tube inside.Thus, the electric field strength of the extending direction in electrode edge portion is maximum, can suppress to light starting resistor.
The material of electrode can be formed by the metal or alloy that conductivity is high.Wish to consider that current capacity or the coefficient of expansion are to set the thickness of electrode, such as, be set in the thickness of electrode in a certain scope of 20 μm ~ 50 μm.In addition, it is desirable to consider that current capacity is to set the width of electrode, such as, be preferably set in the scope of 1.2mm ~ 10mm.
The wall thickness of discharge tube has and prevents because quasi-molecule light causes the thickness of discharge tube deterioration, on the other hand, as long as be set as below the thickness that improves discharge ionization voltage or light ME for maintenance.Such as, the wall thickness of discharge tube is set in the scope of 0.8mm ~ 1.5mm.Wish the internal diameter of discharge tube to be set as not cause because arcing distance shortens illumination not enough, on the other hand not because arcing distance is elongated guiding discharge instability scope in, such as the internal diameter of discharge tube is set in the scope of 8mm ~ 20mm.
Dielectric such as can be made up of the cylindrical dielectric of cross section circle.Preferably, be made up of the insulating material approximate with the electrode thermal expansion coefficient under serviceability temperature.In addition, consider and maintain insulating properties and prevent discharge ionization voltage from uprising, the scope of dielectric thickness preferably 0.1mm ~ 2mm.
According to the kind of discharge gas with apply the arcing distance that voltage etc. decides between electrode other electrode different from polarity.Cause to prevent discharge range from narrowing illumination not enough, and prevent arcing distance elongated thus discharge instability, preferably arcing distance is set in the scope of 3mm ~ 10mm.
When the width of band electrode being set to w, the internal diameter of above-mentioned discharge tube being set to d, preferably, the ratio of d/w meets " 1.6≤d/w≤13.4 ".When the value of d/w is less than 1.6, the shared in the discharge vessel area of paper tinsel becomes large, and arcing distance shortens, and discharging light is blocked by band electrode thus causes illumination not enough.When the value of d/w is greater than 13.4, because the width of band electrode is little, what likely produce caused by overcurrent is overheated, or guiding discharge is unstable because arcing distance is elongated.
Invention effect
According to the present invention, a kind of improve can be provided to light startability and the discharge lamp that can maintain illumination for a long time.
Accompanying drawing explanation
Fig. 1 is the approximate vertical view of the discharge lamp of the 1st execution mode.
Fig. 2 is the cutaway view of the II-II along Fig. 1.
Fig. 3 is the cutaway view amplified near the electrode edge portion to Fig. 2.
Fig. 4 is the figure of the manufacturing process that discharge lamp is shown.
Fig. 5 is the general profile chart of the discharge lamp in the 2nd execution mode.
Fig. 6 is the general profile chart of the discharge lamp of the 3rd execution mode.
In Fig. 7, the discharge lamp of the 4th execution mode is described.
Embodiment
Below, with reference to accompanying drawing, embodiments of the present invention are described.
Fig. 1 is the approximate vertical view of the discharge lamp of the 1st execution mode.Fig. 2 is the cutaway view of the II-II along Fig. 1.
Discharge lamp 10 as Excimer lamp possesses the discharge tube 20 of the cross section toroidal be made up of dielectric materials such as quartz glasss, has enclosed the rare gas such as xenon or their mist is used as discharge gas in discharge tube 20.Be such as 5kPa ~ 150kPa by the inclosure pressure setting of discharge gas.
1 foil electrode 30 extended along tubular axis C band shape is had in discharge tube 20 internal configurations.The cylindrical dielectric 50 that foil electrode 30 is circular shape by cross section is covered, thus this foil electrode 30 is not exposed to discharge space and is embedded in dielectric 50.
With the state that the center of dielectric 50 overlaps with the Width center of foil electrode 30, configure this foil electrode 30 coaxially.Further, dielectric 50 is configured coaxially relative to discharge tube 20.Therefore, foil electrode 30 is configured in the position coaxial with discharge tube 20, is configured in the position about tubular axis C symmetry.
As described later, two edges along tube axial direction of foil electrode 30 and edge part 30K1,30K2 are configured to cutting edge shape.Therefore, the thickness of foil electrode 30 center is in the width direction towards edge thinning, and electrode sections shape is tip gradually thin shape.In fig. 2, the Width of foil electrode 30 is defined as Y-direction, the direction (thickness direction) vertical with this Width is defined as X-direction.
The outer electrode 40 that the outer surface of discharge tube 20 arranges is the structures being equipped with multiple electrode section nettedly, along tubular axis C with predetermined space helically and row arrangement.The supply lines 70 being connected to the end of foil electrode 30 is connected with the power supply unit (not shown) being arranged on outside, provides electric power via supply lines 70 pairs of discharge lamps 10.
The polarity of foil electrode 30, outer electrode 40 is respectively provided as anode, negative electrode.When providing the voltage of a few kV to discharge lamp 10, between foil electrode 30 and outer electrode 40, produce dielectric barrier discharge, radiate the quasi-molecule light of predetermined spectrum (such as, 172nm).
The axial length of discharge tube 20 is set as 100mm ~ 250mm.On the other hand, in order to prevent causing discharge tube deterioration because of quasi-molecule light and suppress the rising of discharge ionization voltage, the wall thickness of discharge tube 20 is set as 0.8mm ~ 1.5mm.In addition, in order to prevent the discharge instability that causes because arcing distance is long and prevent the illumination that causes because arcing distance is short not enough, the internal diameter of discharge tube 20 is set as 8mm ~ 20mm.
Consider current capacity, manufacture difficulty and prevent the disengaging etc. because thermal expansion causes, the thickness of foil electrode 30 is set as 20 μm ~ 50 μm.In addition, consider current capacity, manufacture difficulty and prevent the cut-out of the discharging light caused because electrode area is huge, the width of paper tinsel is set as 1.2mm ~ 10mm.Electrode material can use molybdenum or comprise the alloy etc. of molybdenum.
Dielectric material (the SiO that dielectric 50 is similar to by the thermal coefficient of expansion with electrode as far as possible
2deng) form.Consider the limit maintaining insulating properties, the rising preventing discharge ionization voltage, and the thickness of dielectric 50 is set as 0.1mm ~ 2mm.
Consider the stability preventing and discharge of illumination deficiency, and the distance interval between the internal diameter of arcing distance and dielectric 50 and discharge tube 20 is set as 3mm ~ 10mm.In addition, when the width of foil electrode 30 being set to w, when discharge tube internal diameter is set to d, electrode width and discharge tube internal diameter is set in the mode satisfied the following conditional expression.
1.6≤d/w≤13.4····(1)
Fig. 3 is the cutaway view amplified near the electrode edge portion to Fig. 2.But the size of electrode, dielectric, discharge tube, a part for relative position relation are different from Fig. 1.
As mentioned above, edge part 30K1,30K2 of foil electrode 30 are cutting edge shape.Foil electrode 30 center is in the width direction towards edge sharpening, and the thickness T of the central part of its Thickness Ratio Width is thin, and edge 30T1 becomes sharp-pointed.Not shown edge part 30K2 is also same shape.
By such electrode shape, produce electric field at 30T1 place, edge and concentrate.Namely, the region of electric field strength near edge 30T1 reach maximum in (with reference to dotted line E), and this region narrows because of the sharp-pointed shape of edge 30T1.This is because, in the existing cross section that edge part is not sharp-pointed is rectangular-shaped, in the whole planar section at edge, produces electric field concentrate i.e. electric potential gradient to become large, but in present embodiment, edge 30T1 is in fact line axially, only produces electric field in edge and concentrates.
In addition, foil electrode 30 is configured coaxially relative to dielectric 50 and discharge tube 20, and its Width radially.Therefore, the distance (arcing distance) between edge part 30K1,30K2 of foil electrode 30 and the inner surface of discharge tube 20 is equal.Therefore, radiating light is well balanced on the whole from discharge tube 20.
Fig. 4 is the figure of the manufacturing process that discharge lamp is shown.
Foil electrode 70 connects supply lines 80 by resistance welded etc., and is inserted in the glass tube 60 as dielectric coating film material.Make to become vacuum in pipe after electrode insertion 70, then, heat from outside to dielectric coating film material 60, be welded together with foil electrode 70 (operation (1)).In addition, also can instead carry out applying dielectric operation.
Flange shape so-called abacus bead shape closure 85 (operation (2)) is formed in the position of the glass tube corresponding to electrode edge portion.Then, the discharge tube 90 (operation (3)) of the quartz glass define and be at one end provided with blast pipe, being provided with insert port at the other end etc., electrode insertion 70 in discharge tube 90, makes the insert port of discharge tube 70 and abacus bead shape closure 85 be welded together (operation (4)).
While heat entirety, vacuumized by the blast pipe of discharge tube 90, to remove impurity.Further, enclosing the rear enclosed blast pipe of discharge gas, the outer surface of discharge tube 90 arranges outer electrode 95 (operation (5)).
Like this, according to the present embodiment, in discharge tube 20 inside along tubular axis C be configured with the foil electrode 30 that covers by dielectric 50.Further, the outer surface of discharge tube 20 is equipped with the different outer electrode of polarity 40.In addition, edge part 30K1,30K2 of foil electrode 30 are formed as blade-like.
Because electrode edge portion is sharp-pointed, so electrolysis strength uprises partly at place of electrode edge portion, produce electric discharge during lighting start at lower voltages.Electrode edge portion plays the trigger action that electric discharge starts, even if long-time some bright light also can maintain illumination.
In addition, because electrode edge portion has carried out sharpening smoothly, so be difficult to produce gap between electrode and dielectric, even if there is thermal expansion difference when lighting, electrode also can not be made to be exposed in discharge space, thus to have avoided oxidized.
Then, use Fig. 5 that the discharge lamp of the 2nd execution mode is described.In the 2nd execution mode, two foil electrodes that polarity is mutually different in discharge tube internal configurations.
Fig. 5 is the general profile chart of the discharge lamp in the 2nd execution mode.
Discharge lamp 100 has two foil electrodes 130A, 130B in discharge tube 120 inside, is covered respectively by cylindrical dielectric 150A, 150B.The polarity of foil electrode 130A, 130B is mutually different, foil electrode 130A is set as anode here, and foil electrode 130B is set as negative electrode.
In addition, foil electrode 130A, 130B are configured in the position about tubular axis C symmetry, and Width is all parallel with Y-axis.Two edge parts of foil electrode 130A, 130B become cutting edge shape identically with the 1st execution mode.By the configuration of such electrode, produce the Discharge illuminating relative to discharge tube 20 symmetry thus, from whole discharge tube 20 radiating light.
Fig. 6 is the general profile chart of the discharge lamp of the 3rd execution mode.In the 3rd execution mode, in discharge tube, be arranged with multiple foil electrode.
Discharge lamp 200 is arranged with 9 foil electrodes two-dimensionally along X, Y-axis and buries dielectric 220A ~ 220C underground in discharge tube 210.The Width of each foil electrode is towards Y direction.The different outer electrode of polarity 250 is equipped at the outer surface of discharge tube 210.By the balanced configuration of such electrode, from whole discharge tube radiating light equably.
Fig. 7 is for illustration of the discharge lamp of the 4th execution mode.Discharge lamp 300 has 3 foil electrodes and buries dielectric 320 underground in discharge tube 310, is configured in column.Be that the both sides of rectangular-shaped discharge tube 300 are configured with the different outer electrode of polarity 350 in cross section.By such electrode configuration, below discharge tube, irradiate light.
Dielectric also can be the shape beyond the circle of cross section, as long as such as can with coaxial configuration relation cover foil electrode.Electrode edge portion is not limited to cutting edge shape, as long as the thin shape of the central portion of Thickness Ratio Width produces the shape that electric field is concentrated like that.In addition, also an electrode edge portion sharpening can only be made.And, the shape of electrode can also be made to become the uneven zigzag of width or be configured to dielectric center and not overlap with the center of foil electrode, set the position producing electric field and concentrate thus.In addition, relative to the Width of the axial torsion electrode foil of discharge tube, spiral helicine foil electrode can be formed thus, thus disperse the stress of the thickness direction causing electrode foil and dielectric to depart from.
As discharge mode, the above-mentioned dielectric barrier discharge excimer lamp that stably can produce Uniform Discharge along the axle of discharge space can be replaced, and as the lamp of the external electrode fluorescent lamp used in such as scanner light source etc. and low capacitively coupled (capacitance-type) the high-frequency discharge mode of voltage compare, apply.When capacitively coupled high-frequency discharge mode, by using the last part of LC resonant circuit as power supply unit, easily high voltage can be applied.
Embodiment
The discharge lamp of the embodiment being equivalent to the 1st execution mode is described.The axial length of discharge tube is set as 300mm, wall thickness is set as 1mm, internal diameter is set as 12.8mm, on the direction of the width parallel with foil electrode, dielectric thickness of cross section toroidal is set as 1mm, on the direction parallel with the thickness of foil electrode, dielectric thickness of cross section toroidal is set as 1.5mm, arcing distance is set as about 5mm.The thickness of foil electrode is set as 20 μm, width is set as 1.5mm.When the internal diameter of discharge tube being set to d, when the width of foil electrode is set to w, it is 8.5 than d/w.
Enclose Xe gas as discharge gas, carried out lighting experiment under applying voltage 6.5kV, air pressure 47kPa.Make the action of lighting of the lamp of the spectral light of radiation 172nm continue for 2500 hours, result, for illumination, can obtain the sustainment rate of 90%.
It should be noted that, the disclosure comprising specification, accompanying drawing and claim of Japanese patent application No.2010-179652 (application on August 10th, 2010) combines in this manual by reference.
About the present invention, only otherwise depart from the intent of the present invention and scope of being defined by appended claim, just various change, displacement, replacement can be carried out.And the present invention is not limited to the process of the particular implementation recorded in specification, device, manufacture, construct, means, method and step.Those skilled in the art can recognize, according to disclosure of the present invention, can derive and achieve in fact the function same with the function that described execution mode plays here or serve in fact equivalent effect, the device of effect, means, method.Therefore, appended claim is included in the scope of such device, means, method.
Claims (12)
1. a discharge lamp, is characterized in that,
This Discharging lamps and lanterns is standby:
Be sealed with the discharge tube of discharge gas;
Be disposed at least 1 band electrode in described discharge tube; And
Cover at least 1 dielectric of described electrode,
Described band electrode is foil electrode, and the Thickness Ratio electrode central portion at least one edge in alongst two of described band electrode edges is thin,
Described dielectric foil electrode is embedded in inner cylindrical dielectric.
2. discharge lamp according to claim 1, is characterized in that,
The edge of described band electrode is cutting edge shape.
3. discharge lamp according to claim 1 and 2, is characterized in that,
Described band electrode is configured with coaxially in described discharge tube.
4. discharge lamp according to claim 1 and 2, is characterized in that,
The thickness of the Thickness Ratio electrode central portion at two edges of described band electrode is thin.
5. discharge lamp according to claim 1, is characterized in that,
Multiple band electrodes that polarity is different are configured with in described discharge tube.
6. discharge lamp according to claim 1, is characterized in that,
Multiple band electrodes that polarity is identical are configured with in described discharge tube,
The outer electrode with described band electrode opposed polarity is configured with outside described discharge tube.
7. the discharge lamp according to claim 5 or 6, is characterized in that,
Described multiple band electrode is configured in about the axisymmetric position of discharge tube.
8. the discharge lamp according to claim 5 or 6, is characterized in that,
The plurality of band electrode is configured with the state that the Width of multiple band electrode is parallel to each other.
9. discharge lamp according to claim 1 and 2, is characterized in that,
Multiple electrode respectively cover by different dielectrics.
10. discharge lamp according to claim 1, is characterized in that,
The thickness of described band electrode is set in the scope of 20 μm ~ 50 μm, and the width of described band electrode is set in the scope of 1.2mm ~ 10mm.
11. discharge lamps according to claim 1, is characterized in that,
The wall thickness of described discharge tube is set in the scope of 0.8mm ~ 1.5mm, the internal diameter of described discharge tube is set in the scope of 8mm ~ 20mm, described dielectric thickness is set in the scope of 0.1mm ~ 2mm, and arcing distance is set in the scope of 3mm ~ 10mm.
12. discharge lamps according to claim 10 or 11, is characterized in that,
When the width of described band electrode being set to w, the internal diameter of described discharge tube being set to d, meet following formula:
1.6≤d/w≤13.4。
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010179652A JP5504095B2 (en) | 2010-08-10 | 2010-08-10 | Discharge lamp |
| JP2010-179652 | 2010-08-10 | ||
| PCT/JP2011/067931 WO2012020703A1 (en) | 2010-08-10 | 2011-08-05 | Discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103026456A CN103026456A (en) | 2013-04-03 |
| CN103026456B true CN103026456B (en) | 2015-12-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180036021.3A Active CN103026456B (en) | 2010-08-10 | 2011-08-05 | Discharge lamp |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP2608245A4 (en) |
| JP (1) | JP5504095B2 (en) |
| KR (1) | KR101792563B1 (en) |
| CN (1) | CN103026456B (en) |
| TW (1) | TWI500067B (en) |
| WO (1) | WO2012020703A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI622082B (en) * | 2013-10-04 | 2018-04-21 | Orc Manufacturing Co Ltd | Excimer lamp and manufacturing method thereof |
| JP6557011B2 (en) * | 2015-01-26 | 2019-08-07 | 株式会社オーク製作所 | Excimer lamp |
| JP6921557B2 (en) * | 2016-03-23 | 2021-08-18 | 株式会社オーク製作所 | Discharge lamp and its manufacturing method |
| JP6974678B2 (en) * | 2017-03-22 | 2021-12-01 | 公立大学法人大阪 | Plasma processing equipment and plasma processing method |
| JP6974677B2 (en) * | 2017-03-22 | 2021-12-01 | 公立大学法人大阪 | Plasma generator and plasma generation method |
| JP7185521B2 (en) * | 2018-12-26 | 2022-12-07 | 株式会社オーク製作所 | discharge lamp |
| DE102019202479B4 (en) * | 2019-02-25 | 2021-12-02 | Osram Gmbh | ELECTRODE ARRANGEMENT FOR A DISCHARGE LAMP, GAS DISCHARGE LAMP, PROTECTIVE FILM AND METHOD FOR PROVIDING A PROTECTIVE FILM ON AN ELECTRODE ARRANGEMENT |
| KR102256709B1 (en) * | 2019-04-05 | 2021-05-28 | 오영래 | A plasma lamp apparatus |
| KR20210093122A (en) | 2020-01-17 | 2021-07-27 | 유니램 주식회사 | Light center-concentration type excimer lamp and light irradiating device using the same |
| JP7462524B2 (en) | 2020-09-17 | 2024-04-05 | 株式会社オーク製作所 | Excimer lamps, UV irradiation devices and ozone generators |
| TW202247246A (en) | 2021-05-28 | 2022-12-01 | 日商鷗爾熙製作所股份有限公司 | Excimer lamp, lighting method of excimer lamp, and method for producing excimer lamp capable of performing lamp lighting by efficient main discharge |
| JP2023087558A (en) | 2021-12-13 | 2023-06-23 | 株式会社オーク製作所 | Excimer lamp, method for lighting the same, and manufacturing method for the same |
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- 2011-08-05 KR KR1020137001683A patent/KR101792563B1/en active IP Right Grant
- 2011-08-05 CN CN201180036021.3A patent/CN103026456B/en active Active
- 2011-08-05 EP EP11816368.2A patent/EP2608245A4/en not_active Withdrawn
- 2011-08-05 WO PCT/JP2011/067931 patent/WO2012020703A1/en active Application Filing
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|---|---|---|---|---|
| US6605899B2 (en) * | 2000-09-29 | 2003-08-12 | Patent-Treuhand-Gesellschaft Fuer Elektrische Gluehlampen Mbh | Dielectric barrier discharge lamp |
| CN1744275A (en) * | 2004-07-06 | 2006-03-08 | 通用电气公司 | Dielectric barrier discharge lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5504095B2 (en) | 2014-05-28 |
| TWI500067B (en) | 2015-09-11 |
| JP2012038658A (en) | 2012-02-23 |
| CN103026456A (en) | 2013-04-03 |
| KR101792563B1 (en) | 2017-11-01 |
| KR20130138716A (en) | 2013-12-19 |
| WO2012020703A1 (en) | 2012-02-16 |
| EP2608245A4 (en) | 2014-01-15 |
| EP2608245A1 (en) | 2013-06-26 |
| TW201207887A (en) | 2012-02-16 |
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