CN103018812B - Near-infrared narrow-band optical filter used for somatosensory recognition system - Google Patents
Near-infrared narrow-band optical filter used for somatosensory recognition system Download PDFInfo
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- CN103018812B CN103018812B CN201210548652.XA CN201210548652A CN103018812B CN 103018812 B CN103018812 B CN 103018812B CN 201210548652 A CN201210548652 A CN 201210548652A CN 103018812 B CN103018812 B CN 103018812B
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Abstract
The invention discloses a near-infrared narrow-band optical filter used for a somatosensory recognition system. The near-infrared narrow-band optical filter used for the somatosensory recognition system comprises a base plate and a narrow-band optical filter main film system and a cut-off film system which are respectively arranged on two opposite surfaces of the base plate. The narrow-band optical filter main film system and the cut-off film system are respectively stacked by high refractive index film layers and low refractive index film layers in alternative mode, the high refractive index film layers and the low refractive index film layers are deposited through a vacuum film coating method, and the central wavelength of a passing band of the narrow-band optical filter main film system is identical with that of an infrared emission light source of the somatosensory recognition system. The near-infrared narrow-band optical filter used for the somatosensory recognition system adopts the single base plate, and utilizes the scheme of stacking the main film system and the cut-off film system through double-face vacuum film coating; achieves the characteristics of being large in cut-off width, high in central wavelength transmission ratio and good in rectangular degree of the narrow-band optical filter of the somatosensory recognition system; reduces thickness of the optical filter; effectively prevents warping and deformation of the base plate caused by film layer stress; requires no optical adhesive; avoids multiple reflection; an can adapt to different temperature environments.
Description
Technical field
The present invention relates to optical filter, particularly relate to a kind of near infrared narrow band pass filter for body sense recognition system.
Background technology
Body sense recognition technology selling fast along with Microsoft Xbox360 Kinect somatosensory system, causes extensive concern.Along with the exploitation that body sense recognition system deepens continuously, following body perception will not obtain in every field such as industry manufacture, man-machine interaction, amusement, multimedia, game application, shopping and apply widely.Current body sense recognition system is generally adopt optical imaging modalities, be made up of infrared light supply, 3D depth of field detector, RGB image detector, wherein the most key is exactly 3D depth of field explorer portion, this part is used to the action body extracting the Infrared irradiation that infrared transmitter is launched, its reflected light is obtained by depth of field camera by 3D depth of field detector, the depth information of person each several part bone action is caught with this, be converted into information command, realize the real-time interactive of people and software, equipment.Body sense interaction makes man-machine interaction escape handle, distant bar, the restriction of mouse or telepilot, makes user itself become telepilot, realizes real personalized human-computer interaction.In order to ensure the accurate identification to human action, require the detection of flashlight very accurate, 3D depth of field detector will have very strong antijamming capability.Narrow band pass filter is mainly used for isolating stray light, through flashlight, fully highlights useful information, reduces interfere information, for follow-up video procession lays the foundation.In body sense recognition system, there is the general Infrared adopting laser diode transmitting 808nm, 828nm or infrared LED transmitting 830nm, 850nm, 870nm or 940nm or be positioned at this wave band in infrared transmitter.The common 828nm LD(that uses for body sensing system and laser diode at present) and 850nmLED as infrared transmitter.The effective service band of depth of field detector is generally interval at 400nm-1100nm, all will be curbed like this by narrow band pass filter by being positioned at 400nm-1100nm interval other band spectrums except flashlight.
What the infrared narrow band filter adopted with body sensing system had identity function is at present for the infrared fileter of recognition of face or fingerprint, bio-identification aspect, its major function is all used to extract flashlight, effectively suppresses the near infrared light outside visible ray and flashlight.The patent No. is " ZL200710304305.1 ", employing infrared glass listed in the Chinese invention patent of denomination of invention for " infrared fileter and preparation method thereof for recognition of face " has arrowband in conjunction with the infrared fileter that film plating process makes and highly ends the degree of depth, but this patent adopts the thickness of infra-red-transmitting glass to reach 3-9 millimeter, for working as the small camera lens of the other system of precursor perception, the optical filter that this method makes is too thick, cannot meet the demands.The patent No. is " ZL201020248861.9 ", name is called that the employing listed by utility model patent of " a kind of infrared fileter for recognition of face " is coated with regular master tape pass filter film system at transparent glass substrate, glue together infrared through glass or the method for gluing together the infrared long wave pass filter passed through again, although it is good to also achieve the squaring degree of passband, the feature that the cut-off degree of depth is high, but adopt the method for gummed, optical filter integral thickness is difficult to the magnitude accomplishing to be less than 1mm, and multiple inner boundary can be produced during glass substrate gummed, thus generation multiple reflections, larger on imaging system impact, use tackifier simultaneously, its environment resistant stability can be poor, particularly in the place that temperature variation is larger.Modern camera product, more and more less to volume requirement, to image quality, color rendition requires more and more higher, and the infrared narrow band filter be embedded in before CMOS depth of field detector, general thickness requires to only have 0.3mm-0.75mm, so thin substrate thickness space, if adopt infrared glass in conjunction with the method for plated film or the method for gluing together infrared glass after adopting white glass plated film again, the effect being issued to very high narrow-band-filter in ultra thin substrate thickness condition all cannot be realized.
Summary of the invention
The technical matters that the present invention mainly solves is to provide a kind of near infrared narrow band pass filter for body sense recognition system realizing wide cutoff range on single thin substrate.
For solving the problems of the technologies described above, the technical solution used in the present invention is: provide a kind of near infrared narrow band pass filter for body sense recognition system, comprise substrate and the main film system of narrow band pass filter and the cut film system that lay respectively at described substrate two opposing surface, described narrow band pass filter main film system and cut film system replace stacking forming by high refractive index layer and low-index film respectively, and described high refractive index layer and low-index film are formed by vacuum coating method deposition; The passband center wavelengths of described narrow band pass filter main film system is consistent with body perception other system IR transmitting illuminant centre wavelength.
Wherein, the main film of described narrow band pass filter is the structure of long-pass membrane stack and the superposition of short-pass membrane stack, and the passband center wavelengths of the main film system of described narrow band pass filter is 850nm, and passband width is 20nm ~ 50nm.
Wherein, the underlying membrane that described long-pass membrane stack is 0.5HL0.5H by multiple version is piled and is formed by stacking, and the underlying membrane that described short-pass membrane stack is 0.5LH0.5L by multiple version is piled and is formed by stacking, wherein, H represents high refractive index layer, and L represents low-index film.
Wherein, total rete number of described narrow band pass filter main film system is 40 layers ~ 55 layers.
Wherein, described cut film is long-pass film stacking structure, and the cutoff range of described cut film system is 400nm ~ 630nm, and free transmission range is 750nm ~ 1000nm.
Wherein, the underlying membrane that described long-pass membrane stack is 0.5HL0.5H by multiple version is piled and is formed by stacking, and wherein, H represents high refractive index layer, and L represents low-index film.
Wherein, total rete number of described cut film system is 30 layers ~ 45 layers.
Wherein, described substrate is transparent glass substrate, and thickness is 0.3mm ~ 0.75mm.
Wherein, the material of described high refractive index layer is TiO
2, Ta
2o
5, Nb
2o
5in the mixing of one or more, the material of described low-index film is SiO
2or MgF
2.
The invention has the beneficial effects as follows: the near infrared narrow band pass filter for body sense recognition system provided by the present invention adopts single substrate, by the scheme of the main film system of two-sided superposition narrow band pass filter and cut film system, achieve the characteristic that body sense recognition system narrow band pass filter cut-off width is large, centre wavelength transmitance is high and squaring degree is good.Adopt single substrate, avoid using thicker glasses for infrared use, reduce filter thickness.Substrate adopts the way of double-face vacuum plated film to form the surperficial film system of substrate two, owing to selecting identical films material and production technology, the stress that two membrane stacks should rise also is close, realize stress on substrate two sides so mutually to balance, at utmost reduce the deformation caused due to stress, effectively prevent ultra thin glass substrates from causing warpage, distortion due to stress in thin film.Without the need to using optical adhesive in optical filter, avoid multiple reflections, and cause optical adhesive performance change without the need to worrying due to temperature, make this near infrared narrow band pass filter can be suitable for different temperatures environment.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention for the near infrared narrow band pass filter of body sense recognition system;
Fig. 2 is the spectrum schematic diagram of the main film system of narrow band pass filter near infrared narrow band pass filter one embodiment of the present invention;
Fig. 3 is the spectrum schematic diagram of cut film system near infrared narrow band pass filter one embodiment of the present invention;
Fig. 4 is the spectrum schematic diagram of near infrared narrow band pass filter one embodiment of the present invention.
Label declaration:
10, substrate; 20, the main film system of narrow band pass filter; 21, high refractive index layer; 22, low-index film; 30, cut film system; 31, high refractive index layer; 32, low-index film.
Embodiment
By describing technology contents of the present invention, structural attitude in detail, realized object and effect, accompanying drawing is coordinated to be explained in detail below in conjunction with embodiment.
Refer to Fig. 1, present embodiment provides a kind of near infrared narrow band pass filter for body sense recognition system, comprises substrate 10 and lays respectively at the main film system 20 of narrow band pass filter of substrate 10 liang of opposing surface and cut film is 30.Substrate 10 forms the agent structure of optical filter, adopts ultra-thin transparent glass substrate, and material is ordinary optical clear glass, and thickness is between 0.3mm ~ 0.75mm, and regular size is 0.3mm, 0.55mm and 0.7mm, specifically selects according to the actual needs.
Narrow band pass filter main film system 20 replaces stacking forming by high refractive index layer 21 and low-index film 22, cut film is 30 equally by high refractive index layer 31 with low-index film 32 is alternately stacking forms, and each rete is deposited successively by vacuum coating method and formed.Wherein, the material of high refractive index layer 21,31 is TiO
2, Ta
2o
5, Nb
2o
5in the mixing of one or more, the material of described low-index film 22,32 is SiO
2or MgF
2.For same optical filter, narrow band pass filter main film system 20 and cut film are that the material of high refractive index layer 21,31 in 30 is identical, and the material of low-index film 22,32 is identical.
For the near infrared narrow band pass filter in the present invention, the passband center wavelengths of narrow band pass filter main film system 20 is consistent with body perception other system IR transmitting illuminant centre wavelength.The main film system 20 of narrow band pass filter mainly makes the light of body perception other system IR transmitting illuminant centre wavelength pass through, but by itself structure influence, there will be bleeder region in visible light part wavelength coverage, namely some visible light can pass through the main film system 20 of narrow band pass filter; Cut film be 30 mainly make visible ray end and infrared band through.Interval and cut film is the interval common realizations of 30 cutoff wavelengths by the cutoff wavelength of the main film system 20 of narrow band pass filter for the cutoff range of near infrared narrow band pass filter of the present invention, the passband that free transmission range is 30 by the passband of the main film system 20 of narrow band pass filter and cut film realizes jointly, therefore can obtain wider cutoff range.
Near infrared narrow band pass filter for body sense recognition system provided by the present invention adopts single substrate, by the scheme of the main film system of two-sided superposition narrow band pass filter and cut film system, achieve the characteristic that body sense recognition system narrow band pass filter cut-off width is large, centre wavelength transmitance is high and squaring degree is good.Adopt single substrate, avoid using thicker glasses for infrared use, reduce filter thickness.Substrate adopts the way of double-face vacuum plated film to form the surperficial film system of substrate two, owing to selecting identical films material and production technology, the stress that two membrane stacks should rise also is close, realize stress on substrate two sides so mutually to balance, at utmost reduce the deformation caused due to stress, effectively prevent ultra thin glass substrates from causing warpage, distortion due to stress in thin film.Without the need to using optical adhesive in optical filter, avoid multiple reflections, and cause optical adhesive performance change without the need to worrying due to temperature, make this near infrared narrow band pass filter can be suitable for different temperatures environment.
Centered by the main film system 20 of described narrow band pass filter, wavelength is the narrow-band-filter chip architecture of infrared light generator centre wavelength, and typical wavelengths is for being positioned at LD or the LED generation wavelength of 800nm ~ 950nm scope, and common is 850mm.The structure of described narrow band pass filter main film system 20 employing long-pass membrane stack and the superposition of short-pass membrane stack, realizing passband center wavelengths is 850nm, and passband width is the narrow band pass filter of 20nm ~ 50nm.The several difference according to pass band width of total rete, modular design is between 40 layers ~ 55 layers.Wherein, long-pass film stacking structure is (0.5HL0.5H) ^S, and the underlying membrane being namely 0.5HL0.5H by multiple version is piled and is formed by stacking; Short-pass film stacking structure is (0.5LH0.5L) ^S, and the underlying membrane being namely 0.5LH0.5L by multiple version is piled and is formed by stacking; Wherein, H represents high refractive index layer, and L represents low-index film, and S represents the periodicity of basic membrane stack.
Described cut film be 30 for cutoff range at 400nm ~ 630nm, free transmission range at the long-pass film stacking structure of 750nm ~ 1000nm, to ensure that this cut film is 30 can not affect the near infrared 850nm of the main film system 20 of narrow band pass filter or the transmitance requirement of respective wavelength near infrared part, according to cut-off depth requirements, cut film is that total rete number of 30 is between 30 layers to 45 layers.Wherein, long-pass film stacking structure is (0.5HL0.5H) ^S, and the underlying membrane being namely 0.5HL0.5H by multiple version is piled and is formed by stacking, and H represents high refractive index layer, and L represents low-index film, and S represents the periodicity of basic membrane stack.
Consult Fig. 2, in one embodiment, the structure of narrow band pass filter main film system 20 employing long-pass membrane stack and the superposition of short-pass membrane stack, realize the narrow band pass filter at 850nm centre wavelength, 20nm passband width, underlying membrane pile structure is that long-pass (0.5HL0.5H) ^12 and short-pass (0.5LH0.5L) ^12 superpose formation, wherein H represents high refractive index layer, adopts TiO
2, L represents low-index film, adopts SiO
2; For passband ripple, after doing optimization further by passband optical admittance coupling, obtain passband ripple little, the narrow band pass filter that squaring degree is high.Can see by Fig. 2, although this main film system achieves 850nm central permeate, other spectral ranges are ended, but effectively only cover 850nm proximate region between cut-off region, in this embodiment, as shown in Figure 2, be 640nm ~ 800nm and 900nm ~ 1100nm between its cut-off region, occur bleeder region at 400nm ~ 640nm, and for body sense recognition system CMOS depth of field detector, its response is interval at 400nm ~ 1100nm, suppresses to require so rely on separately this main film system cannot meet wide cut-off region.
Consult Fig. 3, the present embodiment provides a kind of cut film system, this cut film system achieves 400nm ~ 640nm range break, 750nm ~ 1000nm through Requirement of Spectrum, can ensure that this cut film ties up near infrared part and can not affect the transmitance requirement that main film ties up near infrared 850nm or respective wavelength, underlying membrane pile structure is long-pass (0.5HL0.5H) ^18, according to cut-off depth requirements, the total rete number of this film system is 37 layers, and total physical thickness is 2.7 microns.
As cut film system in main for narrow band pass filter in Fig. 2 film system and Fig. 3 being formed at respectively substrate two opposing surface to form the near infrared narrow band pass filter for body sense recognition system of the present invention, its spectral transmission rate curve as shown in Figure 4, as seen from the figure, the short wavelength cutoff scope of described near infrared narrow band pass filter is the interval common realization of cutoff wavelength by the short wavelength cutoff range of wavelengths of main film system and cut film system, free transmission range is jointly realized by the narrow bandpass of main film system and the long wave passband of cut film system, long wave cut-off function scope is that passband that is interval by the long wave cut-off function of main film system and cut film system is formed.Spectrum after superposition, whole cut-off is achieved in 400nm ~ 825nm interval, 875nm ~ 1100nm then by main film system cut-off region between institute cover still realize cut-off, clearly, by the superposition of main film system and cut film system, except in the free transmission range that centre wavelength is adjacent, the light in other intervals can all be ended, during for body sense recognition system, the impact that the light effectively can removing other wavelength detects flashlight, improves the identification accuracy of body sense recognition system.
The foregoing is only embodiments of the invention; not thereby the scope of the claims of the present invention is limited; every utilize instructions of the present invention and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present invention.
Claims (3)
1. the near infrared narrow band pass filter for body sense recognition system, it is characterized in that, comprise substrate and the main film system of narrow band pass filter and the cut film system that lay respectively at described substrate two opposing surface, described narrow band pass filter main film system and cut film system replace stacking forming by high refractive index layer and low-index film respectively, and described high refractive index layer and low-index film are formed by vacuum coating method deposition; The passband center wavelengths of described narrow band pass filter main film system is consistent with body perception other system IR transmitting illuminant centre wavelength;
The main film of described narrow band pass filter is the structure of long-pass membrane stack and the superposition of short-pass membrane stack, and the passband center wavelengths of the main film system of described narrow band pass filter is 850nm, and passband width is 20nm ~ 50nm;
Described cut film is long-pass film stacking structure, and the cutoff range of described cut film system is 400nm ~ 630nm, and free transmission range is 750nm ~ 1000nm;
The underlying membrane that described long-pass membrane stack is 0.5HL0.5H by multiple version is piled and is formed by stacking, and the underlying membrane that described short-pass membrane stack is 0.5LH0.5L by multiple version is piled and is formed by stacking, and wherein, H represents high refractive index layer, and L represents low-index film;
Total rete number of described narrow band pass filter main film system is 40 layers ~ 55 layers, and total rete number of described cut film system is 30 layers ~ 45 layers.
2. the near infrared narrow band pass filter for body sense recognition system according to claim 1, it is characterized in that: described substrate is transparent glass substrate, thickness is 0.3mm ~ 0.75mm.
3. the near infrared narrow band pass filter for body sense recognition system according to claim 1, is characterized in that: the material of described high refractive index layer is TiO
2, Ta
2o
5, Nb
2o
5in the mixing of one or more, the material of described low-index film is SiO
2or MgF
2.
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| CN201210548652.XA CN103018812B (en) | 2012-12-17 | 2012-12-17 | Near-infrared narrow-band optical filter used for somatosensory recognition system |
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| CN103018812B true CN103018812B (en) | 2015-05-13 |
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| EP3982171A4 (en) * | 2019-06-05 | 2022-12-28 | Xin Yang Sunny Optics Co., Ltd. | Optical filter plate |
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