CN205787193U - Transmission-type colored filter - Google Patents
Transmission-type colored filter Download PDFInfo
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- CN205787193U CN205787193U CN201620647602.0U CN201620647602U CN205787193U CN 205787193 U CN205787193 U CN 205787193U CN 201620647602 U CN201620647602 U CN 201620647602U CN 205787193 U CN205787193 U CN 205787193U
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Abstract
This utility model provides a kind of transmission-type colored filter, described transmission-type colored filter includes: substrate layer (1), the first metal layer (2), dielectric layer (3) and the second metal level (4) it is sequentially provided with on described substrate layer (1), the thickness of described dielectric layer (3) is T, refractive index is N, N*T >=4* λ/4, λ is the wavelength of visible ray, and scope is 400～700nm.The transmission-type colored filter described in the utility model peak transmittance at RGB tri-peak is between 60%～100%, at 490nm and 590nm wavelength, transmitance is less than 30%, the three peak filtering functions of RGB are just realized by simple trilamellar membrane system, utilize sputtering and coating hybrid technique, the R2R scale of mass production making the type is possibly realized, and has broad application prospects.
Description
Technical field
This utility model relates to optical element technology field, is specifically related to a kind of transmission-type colored filter.
Background technology
Being mainly absorption-type colored filter in existing market upper filter, the shortcoming of the optical filter of the type is at any time
Between the ability that filters can decline, and have the light loss of more than 60%, cause the reduction of actual transmitance, reason is absorption-type
Optical filter in addition to absorbing, outside non-rgb light, also can absorb quite a few rgb light.The Chinese patent of Zhejiang University
CN105137518A proposes a kind of optical filter using medium/metal/metal structure, comes by controlling the thickness of middle dielectric layer
Unimodal filtering functions in 400～700nm all-wave length, is realized by reflection rather than absorption, the problem not having decline, tool
There is higher transmitance；But the defect existed is that such optical filter can be only formed unimodal perspective, as saturating in RGB multimodal to be realized
Depending on, then need three kinds of optical filters of different-thickness, thus cause the display element thickness applying this optical filter increased, become
This also can uprise.This utility model is the skill that a kind of single optical filter proposed on its basis can realize RGB multimodal transmission
Art scheme.
Utility model content
A purpose of the present utility model provides a kind of transmission-type coloured silk being combined preparation by coating process and sputtering process
Colo(u)r filter structure, is carried out the accurate control of thickness of dielectric layers, thus realizes utilizing individual optical filter by sputtering process
Carry out the purpose of RGB multimodal transmission.
For achieving the above object, the technical scheme that this utility model is concrete is:
A kind of transmission-type colored filter, it is characterised in that including: include substrate layer, described substrate layer is sequentially provided with
The first metal layer, dielectric layer and the second metal level, the thickness of described dielectric layer is T, and refractive index is N, N*T >=4* λ/4, and λ is can
Seeing the wavelength of light, scope is 400～700nm.
Preferably, described dielectric layer includes that stacking arranges coating dielectric layer and sputter dielectric layer, and described coating dielectric layer sets
Put at described the first metal layer upper surface.
Preferably, the thickness of described coating dielectric layer is 300～1500nm, and refractive index is 1.4～5.
Preferably, the refractive index of described sputter dielectric layer is identical with the refractive index of described coating dielectric layer, and described sputter is situated between
The material of matter layer is selected from SiOx or SiNy, wherein 0 ＜ x≤2,0 ＜ y≤2.
The refractive index of described sputter dielectric layer is identical with the refractive index of described coating dielectric layer is to unify whole medium
The refractive index of layer, the primary position being used for accurately controlling transmission crest.
Coating dielectric layer by wet coating technique be coated with one layer of thicker dielectric layer, coating fluid be mainly composed of propylene
Acid lipid hardening bath.Sputter dielectric layer plates the dielectric layer of layer by sputtering process, such as SiOx or SiNx, by spattering
Depositing process can accurately control thickness of dielectric layers, thus controls quantity and the position of crest transmission.
Thickness of dielectric layers illustrates with the principle of transmission crest number:
As shown in Figure 2:
The wavelength of reference visible ray is 550nm,
N0 is air layer refractive index, refractive index=1,；
N1 is coating refractive index, and refractive index assumes=1.52；
N2 is substrate layer refractive index, and refractive index assumes=1.66；
When thickness of coating T meets following condition, the light that upper and lower two interfaces reflect can produce destructive interference, shape
Become reflection a Valley, i.e. transmission Peak, owing to being unsatisfactory for destructive interference bar on the wave band near reference wavelength 550nm scope
Part, transmitance declines.
During 2*N1*T=(m+1/2) λ, m=0,1,2 ... integer；
N1*T is referred to as optical thickness；
When thickness about 90nm, N1*T are referred to as 1 QWOT (Quarter-Wave Optical Thickness), 1/4th
The optical thickness of individual wavelength, 1QWOT=550/4nm=137.5nm, when dielectric layer, is taken advantage of when 1.52 in about 90nm, refractive index
, there is 1 transmission peaks in long-pending=1QWOT；
When thickness increases, when optical thickness is close to 4 QWOT thickness, there will be about 2 transmission peaks in visible region；
When thickness increases, when optical thickness is close to 7 QWOT thickness, there will be about 3 transmission peaks in visible region；
When thickness continues to increase, it may appear that more transmission peaks.
When being applied to metal/dielectric/metal film layer result described in the utility model, principle is identical.
Preferably, the thickness of described substrate layer is 50～200 μm, and refractive index is 1.4～1.7.
Preferably, the material of described substrate layer is selected from PET or the glass scribbling hardened layer, and the thickness of described hardened layer is 1
～3 μm.
Preferably, the material of described the first metal layer and the second metal level one in Au, Ag, Cu, Al or Cr or
Multiple, the thickness of described the first metal layer is 12～30nm, and the thickness of described second metal level is 12～30nm.
The most above-mentioned four layers of the primary structure of described transmission-type colored filter, other auxiliary function layer (such as surface anti-reflections
Film, substrate surface Obstruct membrane, surface steam or Scratch-prevention film) can additionally add.
The preparation method of transmission-type colored filter as above, it is characterised in that comprise the steps:
1) selection PET or glass are as substrate layer, sputter the first metal layer on described substrate layer；
2) arranging dielectric layer on described the first metal layer, described dielectric layer completes in two steps: the first step uses coating work
Skill is coated with the coating dielectric layer that a layer thickness is 300～1500nm on described the first metal layer；Second step is at described coating medium
One layer of sputter dielectric layer of sputter on layer, sputter material is selected from SiOx or SiNy, wherein 0 ＜ x≤2,0 ＜ y≤2.
Making the thickness of dielectric layer meet N*T >=4* λ/4 by controlling the thickness of sputter dielectric layer, wherein, T is dielectric layer
Thickness, N is the refractive index of dielectric layer, and λ is the wavelength of visible ray, and scope is 400～700nm；
3) sputter the second metal level on described sputter dielectric layer.
Preferably, described PET scribbles hardened layer, and described thin hardened layer is 1～3 μm.
Preferably, the material of described the first metal layer and the second metal level one in Au, Ag, Cu, Al or Cr or
Multiple, the thickness of described the first metal layer is 12～30nm, and the thickness of described second metal level is 12～30nm.
Beneficial effect:
The film layer structure of a kind of transmission-type colored filter sputtering and being coated with hybrid technique that this utility model provides, first
Use sputtering method one layer of thin metal layer of plating, then realize thicker dielectric layer plated film by wet coating technique, then by sputtering work
Skill carries out the accurate control of thickness of dielectric layers, and sputters uppermost metal level.The peak value at RGB tri-peak of integral membrane system is saturating
Rate of crossing is between 60%～100%, and at 490nm and 590nm wavelength, transmitance is less than 30%, the most real by simple trilamellar membrane system
The three peak filtering functions of existing RGB, utilize sputtering and coating hybrid technique, make the R2R scale of mass production of the type be possibly realized, tool
Have broad application prospects.
Accompanying drawing explanation
Below in conjunction with structural representation and embodiment, this utility model is further illustrated.
Fig. 1 is the structural representation of transmission-type colored filter described in the utility model；
Fig. 2 is interface light interference schematic diagram；
Fig. 3 be the optical thickness of dielectric layer be transmitted spectrum figure during 1 QWOT；
Fig. 4 be the optical thickness of dielectric layer be transmitted spectrum figure during 1.5 QWOT；
Fig. 5 be the optical thickness of dielectric layer be transmitted spectrum figure during 4 QWOT；
Fig. 6 be the optical thickness of dielectric layer be transmitted spectrum figure during 10.7 QWOT；
Wherein, 1, substrate layer, 2, the first metal layer, 3, dielectric layer, the 4, second metal level, 31, coating dielectric layer, 32, spatter
Plating dielectric layer.
Detailed description of the invention
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing and enforcement
Example, is further elaborated to utility model.Should be appreciated that specific embodiment described herein is only in order to explain this
Utility model, is not used to limit this utility model.
Embodiment
As shown in Figure 1: a kind of transmission-type colored filter, including: include substrate layer 1, described substrate layer 1 be sequentially provided with
The first metal layer 2, dielectric layer 3 and the second metal level 4, the thickness of described dielectric layer 3 is T, and refractive index is N, N*T >=4* λ/4, λ
For the wavelength of visible ray, scope is 400～700nm.
Preferably, described dielectric layer 3 includes that stacking arranges coating dielectric layer 31 and sputter dielectric layer 32, described coating medium
Layer 31 is arranged on described the first metal layer 2 upper surface.
Preferably, the thickness of described coating dielectric layer 31 is 900nm, and refractive index is 1.52.
Preferably, the refractive index of described sputter dielectric layer 32 is identical with the refractive index of described coating dielectric layer 31, described in spatter
The material of plating dielectric layer 32 is selected from SiO2Or SiN2。
The refractive index of described sputter dielectric layer 32 is identical with the refractive index of described coating dielectric layer 31 is whole in order to unify
The refractive index of dielectric layer 3, the primary position being used for accurately controlling transmission crest.
Coating dielectric layer by wet coating technique be coated with one layer of thicker dielectric layer, coating fluid be mainly composed of propylene
Acid lipid hardening bath.Sputter dielectric layer plates the dielectric layer of layer by sputtering process, such as SiO2Or SiN2, by spattering
Depositing process can accurately control thickness of dielectric layers, thus controls quantity and the position of crest transmission.
Preferably, the thickness of described substrate layer 1 is 120 μm, and refractive index is 1.53.
Preferably, the material of described substrate layer 1 is selected from PET or the glass scribbling hardened layer, and the thickness of described hardened layer is
0.96μm。
Preferably, the material of described the first metal layer 2 and the second metal level 4 one in Au, Ag, Cu, Al or Cr
Or multiple, the thickness of described the first metal layer 2 is 16nm, and the thickness of described second metal level 4 is 14nm.
The most above-mentioned four layers of the primary structure of described transmission-type colored filter, other auxiliary function layer (such as surface anti-reflections
Film, substrate surface Obstruct membrane, surface steam or Scratch-prevention film) can additionally add.
The preparation method of transmission-type colored filter as above, it is characterised in that comprise the steps:
1) select PET or glass as substrate layer 1, sputter the first metal layer 2 on described substrate layer 1；
2) arranging dielectric layer 3 on described the first metal layer 2, described dielectric layer 3 completes in two steps: the first step uses coating
Technique is coated with the coating dielectric layer 31 that a layer thickness is 300～1500nm on described the first metal layer 2；Second step is in described coating
One layer of sputter dielectric layer 32 of sputter on dielectric layer 31, sputter material is selected from SiO2Or SiN2。
Making the thickness of dielectric layer 3 meet N*T >=4* λ/4 by controlling the thickness of sputter dielectric layer 32, wherein, T is for being situated between
The thickness of matter layer 3, N is the refractive index of dielectric layer 3, and λ is the wavelength of visible ray, and scope is 400～700nm；
3) sputter the second metal level 4 on described sputter dielectric layer 32.
Embodiment transmission peaks position measurement result:
In this utility model example, structure is the first metal layer 2/ dielectric layer 3/ second metal level 4, if dielectric layer 3 is thick
Degree is T, and refractive index N is 550nm with reference to visible wavelength λ；
As shown in Figure 3: when optical thickness N*T=1 QWOT (λ/4), near 450nm wavelength (green glow), occurs 1
Transmission peaks；
As shown in Figure 4: along with N*T increases, as reached 1.5 QWOT, this transmission peaks moves toward long wave, 615nm occurs
The transmission peaks of (HONGGUANG)；
As shown in Figure 5: when N*T reaches 4 QWOT, two transmission peaks, respectively 434nm occur in visible region
(blue light) and 659nm (HONGGUANG)；
Along with N*T continues to increase, two transmission peaks move toward long wave together, and between peak, wavelength interval shortens；
As shown in Figure 6: when N*T is more than 7 QWOT, during as reached 10.7 QWOT, occur three in visible region
Transmission peaks, respectively 450nm (blue light), 524nm (green glow) and 627nm (HONGGUANG), RGB multimodal transmission can be realized；
Along with N*T continues to increase, three transmission peaks move toward long wave together, and between peak, wavelength interval shortens；Until the
Four transmission peaks；
When thickness continues to increase, it may appear that more transmission peaks.
By above-mentioned experimental result it can be seen that transmission-type colored filter described in the utility model only need to control middle Jie
The thickness of matter layer 3 is obtained with dichroic filter or three-colour filter, and the position of transmission crest is also can basis
Need continuous moving.The thickness controlling dielectric layer 3 is then that the method combined by coating process and sputtering process is come real
Existing, i.e. realize thicker dielectric layer plated film by wet coating technique, then carry out the accurate control of thickness of dielectric layers by sputtering technology
System.
The foregoing is only the preferred embodiment of utility model, be not limiting as this utility model, all of the present utility model
Amendment, equivalent and the improvement etc. made within spirit and principle, should be included in protection domain of the present utility model it
In.
This utility model is made any restriction in form by attempt according to this, has in identical utility model spirit therefore all
Any modification of lower made relevant this utility model or change, all must be included in this utility model and be intended to the category of protection.
Claims (7)
1. a transmission-type colored filter, it is characterised in that including: substrate layer (1), described substrate layer is sequentially provided with on (1)
The first metal layer (2), dielectric layer (3) and the second metal level (4), the thickness of described dielectric layer (3) is T, refractive index be N, N*T >=
4* λ/4, λ is the wavelength of visible ray, and scope is 400～700nm.
Transmission-type colored filter the most according to claim 1, it is characterised in that described dielectric layer (3) includes that stacking sets
Putting coating dielectric layer (31) and sputter dielectric layer (32), described coating dielectric layer (31) is arranged on described the first metal layer (2)
Surface.
Transmission-type colored filter the most according to claim 2, it is characterised in that the thickness of described coating dielectric layer (31)
Being 300～1500nm, refractive index is 1.4～5.
Transmission-type colored filter the most according to claim 2, it is characterised in that the refraction of described sputter dielectric layer (32)
Rate is identical with the refractive index of described coating dielectric layer (31), and the material of described sputter dielectric layer (32) is selected from SiOx or SiNy,
Wherein 0 ＜ x≤2,0 ＜ y≤2.
Transmission-type colored filter the most according to claim 1, it is characterised in that the thickness of described substrate layer (1) is 50
～200 μm, refractive index is 1.4～1.7.
Transmission-type colored filter the most according to claim 5, it is characterised in that the material of described substrate layer (1) is selected from
Scribbling PET or the glass of hardened layer, the thickness of described hardened layer is 1～3 μm.
Transmission-type colored filter the most according to claim 1, it is characterised in that described the first metal layer (2) and second
One or more in Au, Ag, Cu, Al or Cr of the material of metal level (4), the thickness of described the first metal layer (2) is 12
～30nm, the thickness of described second metal level (4) is 12～30nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620647602.0U CN205787193U (en) | 2016-06-27 | 2016-06-27 | Transmission-type colored filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620647602.0U CN205787193U (en) | 2016-06-27 | 2016-06-27 | Transmission-type colored filter |
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| Publication Number | Publication Date |
|---|---|
| CN205787193U true CN205787193U (en) | 2016-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620647602.0U Withdrawn - After Issue CN205787193U (en) | 2016-06-27 | 2016-06-27 | Transmission-type colored filter |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105938212A (en) * | 2016-06-27 | 2016-09-14 | 张家港康得新光电材料有限公司 | Transmission type color filter and preparation method thereof |
| CN110456437A (en) * | 2019-07-15 | 2019-11-15 | 杭州美迪凯光电科技股份有限公司 | Infrared three wave crests coating process |
-
2016
- 2016-06-27 CN CN201620647602.0U patent/CN205787193U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105938212A (en) * | 2016-06-27 | 2016-09-14 | 张家港康得新光电材料有限公司 | Transmission type color filter and preparation method thereof |
| CN110456437A (en) * | 2019-07-15 | 2019-11-15 | 杭州美迪凯光电科技股份有限公司 | Infrared three wave crests coating process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20161207 Effective date of abandoning: 20180706 |