CN104049291B - The neutral gray scale dim light filter of a kind of stratified film and manufacture method thereof - Google Patents
The neutral gray scale dim light filter of a kind of stratified film and manufacture method thereof Download PDFInfo
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- CN104049291B CN104049291B CN201410283093.3A CN201410283093A CN104049291B CN 104049291 B CN104049291 B CN 104049291B CN 201410283093 A CN201410283093 A CN 201410283093A CN 104049291 B CN104049291 B CN 104049291B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/205—Neutral density filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
Abstract
The invention provides the neutral gray scale dim light filter of a kind of stratified film and manufacture method thereof, it includes substrate, described substrate is coated with some tunic layers, described rete includes antireflective coating and the metal film of stacking, two adjacent described metals are intermembranous is provided with antireflective coating described at least one of which, and the refractive index of the constituent material of described antireflective coating is more than 1.30.The manufacture method of the neutral gray scale dim light filter of stratified film, it step included has: coating umbrella is installed to the cavity top of vacuum chamber by (1), the rotating shaft of described coating umbrella is provided with power source, the cavity bottom of described vacuum chamber is provided with two plated film material sources, revision board is fixed in described vacuum chamber, one end is positioned at the same side, two described plated film material sources, adopts vacuum pump that described vacuum chamber is evacuated to predetermined vacuum level；(2) described power source drives described coating umbrella to rotate, and adopts two described plated film material sources to be alternately deposited with described rete, and described rete stacks gradually with predetermined optical thickness and predetermined order.
Description
Technical field
The present invention relates to a kind of neutral gray scale dim light filter, specifically, relate to the mellow lime definite value dim light filter of stratified film and mellow lime gradual change dim light filter and manufacture method thereof.
Background technology
Neutral gray scale filter is the energy beam splitter that light is balanced decay, and it filters light when being mainly used in photography and vedio recording, has simple in construction, uses the advantages such as wave-length coverage is wide.Neutral gray scale filter includes mellow lime definite value dim light filter (NeutralDensityFilter is called for short ND mirror) and mellow lime gradual change dim light filter (GraduatedNeutralDensityFilter, guide number D mirror).
ND mirror is primarily used to reduce camera exposure amount, when subject light is brighter, it is necessary to reduce light exposure with ND mirror.Light action is nonselective by the filter of ND mirror, the minimizing ability of the light of various different wave lengths is equal, uniform by ND mirror, only serves the effect weakening light, and the color of the original will not be produced any impact, its optical density is not with change in location, and one-piece parts is uniformity.The optical density of GND mirror changes along with position, has different darkness to change, namely different optical density.GND mirror will not change the color balance of picture, but can change photosensitive contrast.Such as, when running into the very big situation of light difference, if light strong side exposure is accurately, the weak side of light is then under-exposed；If light weak side exposure is accurately, then the strong side of light is over-exposed.This problem just can be solved plus GND mirror before camera lens.
When producing ND mirror or GND mirror, owing to the deformation of resin sheet or glue-line can affect image quality, or because high reflectance causes producing in use procedure the phenomenons such as ghost.To make GND mirror, including following four production method.Fig. 1 is the schematic diagram of the light transmittance curve of spectrum of the GND mirror adopting resin dyeing, glass laminating and neutral density gluing method to manufacture in prior art.As shown in Figure 1, curve 1 represents the light transmittance curve of spectrum of the GND mirror that resin colouring method manufactures, resin dyeing is easily deformed with resin lens itself owing to needing bubble in high-temp liquid to boil in dyeing course, cause that resin sheet produces deformation, thus the image quality affecting photography and vedio recording is difficult to reach high-definition effect.Simultaneously as the chromatic dispersion problem of dyestuff, cause light can not be balanced decay.From collection of illustrative plates it can be seen that from wavelength 650nm, transmitance there occurs significantly raised, this is also produce partially red main cause in photography.Curve 2 represents the light transmittance curve of spectrum of the GND mirror that glass laminating method manufactures, and glass clamp film is made up of a piece of staining section of folder in the middle of 2 sheet glass, outside the disadvantages mentioned above with resin dyeing, also increases the shortcoming that a thickness is big.Curve 3 represents the light transmittance curve of spectrum of GND mirror that neutral density gluing method manufactures, neutral density and after colourless transparent glass gluing, grinds sideling, makes neutral density produce thickness change and realize balance attenuation effect.Owing to glue-line results in deformation, the image quality affecting photography and vedio recording and the real high permeability that high transmission region can not be realized and can not to the real balance attenuation of light.Fig. 2 a is the schematic diagram of the light transmittance curve of spectrum of the GND mirror adopting vacuum neutral metal film method to manufacture in prior art.Fig. 2 b is the schematic diagram of the reflectance spectrum curve of the GND mirror adopting vacuum neutral metal film method to manufacture in prior art.As shown in Figure 2 a, curve 1 represents optical transmission spectra curve, and as shown in Figure 2 b, curve 1 represents reflectance spectrum curve, although vacuum neutral metal membrane process preferably resolves the problem affecting image quality and has comparatively ideal to light balance attenuation function.But but because there being higher reflectance, cause use procedure is easily generated the phenomenons such as ghost.
Summary of the invention
The technical problem to be solved is to provide neutral gray scale dim light filter and the manufacture method thereof of a kind of stratified film, it is possible to produce light balance attenuation is effective and have ND mirror and the GND mirror of antiradar reflectivity, and manufacturing process is without influence on image quality simultaneously.
For achieving the above object, the present invention provides neutral gray scale dim light filter and the manufacture method thereof of a kind of stratified film, it includes substrate, described substrate is coated with some tunic layers, described rete includes antireflective coating and the metal film of stacking, being provided with antireflective coating described at least one of which between two adjacent described metal films, the refractive index of the constituent material of described antireflective coating is more than 1.30.
Preferably, the constituent material of described antireflective coating includes at least one selected from Al2O3、AlF3、BeO、CaF2、CeF3、CeO3、Cr2O3、Dy2O3、Gd2O3、HfO2、Ho2O3、In2O3、LaF3、MgF2、MgO、NiO、Nd2O3、Pb6O11、SnO3、SiO、SiO2、Sm2O3、TiO2、Ta2O5、ThO2、ZrO2Compound or the mixture that is made up of above-claimed cpd.
Preferably, the constituent material of described metal film includes at least one metal simple-substance selected from Al, Ag, Cr, Ni, Au, Cu, Fe, Zn, Sn, Mo or the alloy being made up of above-mentioned metal simple-substance.
Preferably, described substrate is coated with at least rete described in two-layer.
Preferably, the scope of the rete optical thickness of described antireflective coating is 1～300nm, and the scope of the rete optical thickness of described metal film is 1～320nm.
Preferably, the step that the manufacture method of the neutral gray scale dim light filter of stratified film includes has: coating umbrella is installed to the cavity top of vacuum chamber by (1), the rotating shaft of described coating umbrella is provided with power source, the cavity bottom of described vacuum chamber is provided with two plated film material sources, revision board is fixed in described vacuum chamber, one end is positioned at the same side, two described plated film material sources, adopts vacuum pump that described vacuum chamber is evacuated to predetermined vacuum level；(2) described power source drives described coating umbrella to rotate, and adopts two described plated film material sources to be alternately deposited with described rete, and described rete stacks gradually with predetermined optical thickness and predetermined order.
Preferably, the manufacture method of the neutral gray scale dim light filter of stratified film further includes the steps takes off the described revision board in step (1), also comprise the steps between step (1) and step (2), at described coating umbrella baffle plate mounted below, described baffle plate is provided with multiple symmetrical gradual change hole, and the cross section in described gradual change hole is blade-shaped.
Preferably, in the interval of wavelength 420～680nm, the scope of reflectance is 1.50%～2.30%, and the scope of transmitance is 47.8%～51.3%.
Furthermore it is preferred that in the interval of wavelength 420～680nm, the scope of reflectance of maximum end of decaying is 2.5%～3.1%, the scope of transmitance is 11.45%～12.06%, and the scope of the reflectance of decay smallest end is 1.5%～2.3%, and the scope of transmitance is 47.8%～96.3%.
From the description above and putting into practice, the neutral gray scale dim light filter of stratified film provided by the invention and manufacture method thereof, one, the neutral gray scale dim light filter of stratified film is provided with antireflective coating, the refractive index compound layer higher than 1.30 is adopted to be separated by metal simple-substance layer, double-layer reflection reducing coating and multiple layer metal film-stack, then the reflectance of ND mirror and GND mirror is low, it is possible to light balance attenuation；Its two, the manufacture method of the neutral gray scale dim light filter of stratified film the ND mirror manufactured and the reflectance of GND mirror are low, and light balance attenuation is effective, and manufacturing process is without influence on image quality；Its three, adopt the same device that is coated with to coordinate revision board or baffle plate to use, it is possible to manufacture ND mirror and GND mirror respectively；Its four, baffle plate can make the neutral metal plated present the change of thin and thick on substrate, thus reaching the effect of gradual change.
Accompanying drawing explanation
By below in conjunction with the accompanying drawing description to embodiment, the features described above of the present invention and technological merit will become apparent with easy to understand.In the accompanying drawings,
Fig. 1 is the schematic diagram of the light transmittance curve of spectrum of the GND mirror adopting resin dyeing, glass laminating and neutral density gluing method to manufacture in prior art；
Fig. 2 a is the schematic diagram of the light transmittance curve of spectrum of the GND mirror adopting vacuum neutral metal film method to manufacture in prior art；
Fig. 2 b is the schematic diagram of the reflectance spectrum curve of the GND mirror adopting vacuum neutral metal film method to manufacture in prior art；
Fig. 3 a is the schematic diagram of the ND mirror of the neutral gray scale dim light filter of the stratified film described in one embodiment of the invention；
Fig. 3 b be the ND mirror of the neutral gray scale dim light filter of the stratified film shown in Fig. 3 a be coated with device schematic diagram；
Fig. 4 is the schematic diagram of the baffle plate being coated with device of the GND mirror of the neutral gray scale dim light filter of the stratified film described in further embodiment of this invention；
Fig. 5 a is the schematic diagram of the curve of spectrum of the absorbance of the GND mirror of the neutral gray scale dim light filter of the stratified film of Fig. 4；
Fig. 5 b is the schematic diagram of the curve of spectrum of the reflectance of the GND mirror of the neutral gray scale dim light filter of the stratified film of Fig. 4.
Accompanying drawing labelling:
Substrate: 1000；It is coated with device 100；
10: vacuum chamber；11: coating umbrella；12: power source；13: revision board；
14: plated film material source；15: plated film material source；16: baffle plate；161: gradual change hole；
Detailed description of the invention
Understandable for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from, below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation.
The neutral gray scale dim light filter of stratified film includes substrate, substrate is coated with some tunic layers, rete includes antireflective coating and the metal film of stacking, it is provided with at least one of which antireflective coating between two adjacent metal films, can also being provided with double-layer reflection reducing coating between two adjacent metal films, the refractive index of the constituent material of antireflective coating is more than 1.30.
Preferably, the constituent material of antireflective coating includes at least one selected from Al2O3、AlF3、BeO、CaF2、CeF3、
CeO3、Cr2O3、Dy2O3、Gd2O3、HfO2、Ho2O3、In2O3、LaF3、MgF2、MgO、NiO、Nd2O3、Pb6O11、SnO3、SiO、SiO2、Sm2O3、TiO2、Ta2O5、ThO2、ZrO2Compound or the mixture that is made up of above-claimed cpd.Antireflective coating can be a kind of refractive index compound more than 1.30, it is also possible to be the refractive index mixture more than 1.30 that constitutes of multiple compounds.
Preferably, the constituent material of metal film includes at least one metal simple-substance selected from Al, Ag, Cr, Ni, Au, Cu, Fe, Zn, Sn, Mo or the alloy being made up of above-mentioned metal simple-substance.Metal film can be a kind of metal simple-substance, it is also possible to be the alloy of various metals simple substance composition.
Preferably, substrate is coated with at least two-layer rete.Preferably, the scope of the rete optical thickness of antireflective coating is 1～300nm, and the scope of the rete optical thickness of metal film is 1～320nm.
In the present embodiment, for decay 88% ND mirror, Fig. 3 a is the schematic diagram of the ND mirror of the neutral gray scale dim light filter of the stratified film described in one embodiment of the invention.As shown in Figure 3 a, substrate 1000 having ten tunic layers, the first rete is antireflective coating to the odd number rete in the 8th rete, and even numbers rete is metal film, and the 9th rete and the tenth rete are antireflective coating.On substrate 1000, the composition of rete, optical thickness and distribution are as shown in table 1.Table 1 is ten tunic layer composition table of evaporation above substrate.
Above table 1 substrate, ten tunic layers of evaporation constitute table
| Rete | Title material | Optical thickness (nm) |
| 1st layer | Al2O3 | 2.30 |
| 2nd layer | Cu | 3.39 |
| 3rd layer | ZrO2 | 6.79 |
| 4th layer | Cr | 7.55 |
| 5th layer | SiO2 | 91.24 |
| 6th layer | Ni | 5.29 |
| 7th layer | Al2O3 | 83.22 |
| 8th layer | Au | 11.82 |
| 9th layer | Al2O3 | 46.80 |
| 10th layer | SiO2 | 5.68 |
The manufacture method of the neutral gray scale dim light filter of stratified film is described below.Neutral gray scale dim light filter includes ND mirror and GND mirror.
First, the manufacture method of ND mirror is introduced.Fig. 3 b be the ND mirror of the neutral gray scale dim light filter of the stratified film shown in Fig. 3 a be coated with device schematic diagram.
As shown in Figure 3 b, the first step, coating umbrella 11 is installed to the cavity top of vacuum chamber 10, the rotating shaft of coating umbrella 11 is provided with power source 12, power source 12 is positioned at the outside of vacuum chamber 10, the cavity bottom of vacuum chamber 10 is provided with two plated film material sources, it is plated film material source 14 and plated film material source 15 respectively, plated film material source 14 and plated film material source 15 are respectively positioned on below coating umbrella 11, revision board 13 is fixed in vacuum chamber 10, revision board 13 one end is positioned at plated film material source 14 and the same side in plated film material source 15, plated film material source 14 and the uniformity in plated film material source 15 can be revised, adopt vacuum pump that vacuum chamber 10 is evacuated to predetermined vacuum level, here, the predetermined vacuum level of vacuum chamber is 9.0 × 10-3Pa to 5.0 × 10-4Pa。
Second step, power source 12 drives coating umbrella 11 to rotate, and adopts plated film material source 14 and plated film material source 15 alternately evaporation to arrive substrate, to form rete on substrate, rete stacks gradually with predetermined optical thickness and predetermined order, and in the present embodiment, rete is with optical thickness shown in table 1 and order stacking.
Below, the manufacture method of GND mirror is introduced.Fig. 4 is the baffle plate schematic diagram being coated with device of the GND mirror of the neutral gray scale dim light filter of the stratified film described in further embodiment of this invention.
As shown in Figure 4, manufacture GND mirror and manufacture differring primarily in that of ND mirror, revision board 13 in step (1) is taken off, following steps are increased between step (1) and step (2), at coating umbrella 11 baffle plate 16 mounted below, from coating umbrella 11 about 0.1～50cm place, baffle plate 16 is being set, the distance of baffle plate 16 and coating umbrella 11 will affect the attenuation rate of rete, baffle plate 16 is provided with multiple symmetrical gradual change hole 161, the cross section in gradual change hole 161 is blade-shaped, the cross section of baffle plate 16 is circular, can also be 60 ° or 120 ° or 0～360 ° sectors at any angle.Baffle plate 16 can make the neutral metal plated present the change of thin and thick on substrate, thus reaching the effect of gradual change.Can also be parallel to, by motor drag, mode that the baffle plate of substrate moves or other shielding modes make the neutral metal film plated present thin and thick change.
Absorbance and the reflectance of ND mirror and the GND mirror that by the manufacture method of the neutral gray scale dim light filter of stratified film manufacture are described below.
Preferably, in the interval of wavelength 420～680nm, the scope of reflectance is 1.50%～2.30%, and the scope of transmitance is 47.8%～51.3%.
Preferably, in the interval of wavelength 420～680nm, the scope of the reflectance of maximum end of decaying is 2.5%～3.1%, and the scope of transmitance is 11.45%～12.06%, the scope of the reflectance of decay smallest end is 1.5%～2.3%, and the scope of transmitance is 47.8%～96.3%.
The ND mirror being coated with by spectrogrph test is reached a conclusion as follows: in the interval of wavelength 420nm-680nm, at wavelength 580nm place, transmitance is maximum, maximum transmission is 51.3%, at wavelength 440nm place, transmitance is minimum, and minimum transmitance is 47.8%, and in the interval of wavelength 420nm-680nm, mean transmissivity 50.5%.In the interval of wavelength 420nm-680nm, at wavelength 420nm place, reflectance is maximum, and maximum reflectivity is 2.3%, and at wavelength 493nm place, reflectance is minimum, and minimum reflectance is 1.5%, and in the interval of wavelength 420nm-680nm, mean transmissivity 1.8%.
Fig. 5 a is the schematic diagram of the curve of spectrum of the absorbance of the GND mirror of the neutral gray scale dim light filter of the stratified film of Fig. 4.Fig. 5 b is the schematic diagram of the curve of spectrum of the reflectance of the GND mirror of the neutral gray scale dim light filter of the stratified film of Fig. 4.
As shown in Figure 5 a, the GND mirror being coated with by spectrogrph test is reached a conclusion as follows: curve 1 represents the transmitance of the maximum end of decaying in the interval of wavelength 420nm-680nm, at wavelength 580nm place, transmitance is maximum, maximum transmission is 12.06%, at wavelength 440nm place, transmitance is minimum, minimum transmitance is 11.45%, and in the viewing area of wavelength 420nm-680nm, mean transmissivity 11.95%；
As shown in Figure 5 b, curve 1 represents the reflectance of the maximum end of decaying in the interval of wavelength 420nm-680nm, at wavelength 420nm place, reflectance is maximum, maximum reflectivity is 3.1%, at wavelength 493nm place, reflectance is minimum, minimum reflectance is 2.5%, and in the interval of wavelength 420nm-680nm, mean transmissivity 1.8%.
In the interval of wavelength 420nm-680nm, the transmitance of decay smallest end is maximum at wavelength 580nm place, maximum transmission is 96.3%, the transmitance of decay smallest end is minimum at wavelength 440nm place, minimum transmitance is 47.8%, and in the interval of wavelength 420nm-680nm, mean transmissivity 50.5%.In the interval of wavelength 420nm-680nm, the reflectance of decay smallest end is maximum at wavelength 420nm place, and maximum reflectivity is 2.3%, the reflectance of decay smallest end is minimum at wavelength 493nm place, minimum reflectance is 1.5%, and in the interval of wavelength 420nm-680nm, mean transmissivity 1.8%.
The neutral gray scale dim light filter of the stratified film that the embodiment provided by the invention described above is provided and manufacture method thereof, one, the neutral gray scale dim light filter of stratified film is provided with antireflective coating, the refractive index compound layer higher than 1.30 is adopted to be separated by metal simple-substance layer, double-layer reflection reducing coating and multiple layer metal film-stack, then the reflectance of ND mirror and GND mirror is low, it is possible to light balance attenuation；Its two, the manufacture method of the neutral gray scale dim light filter of stratified film the ND mirror manufactured and the reflectance of GND mirror are low, and light balance attenuation is effective, and manufacturing process is without influence on image quality；Its three, adopt the same device that is coated with to coordinate revision board or baffle plate to use, it is possible to manufacture ND mirror and GND mirror respectively；Its four, baffle plate can make the neutral metal plated present the change of thin and thick on substrate, thus reaching the effect of gradual change.
The above; being only the present invention preferably detailed description of the invention, but protection scope of the present invention is not limited thereto, any people being familiar with this technology is in the technical scope that disclosed herein; the change that can readily occur in or replacement, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with scope of the claims.
Claims (1)
1. the neutral gray scale dim light filter of a stratified film, it includes substrate, it is characterized in that, described substrate is coated with some tunic layers, described rete includes antireflective coating and the metal film of stacking, being provided with antireflective coating described at least one of which between two adjacent described metal films, the refractive index of the constituent material of described antireflective coating is more than 1.30；
The constituent material of described antireflective coating includes by compound Al2O3、AlF3、BeO、CaF2、CeF3、CeO3、Cr2O3、Dy2O3、Gd2O3、HfO2、Ho2O3、In2O3、LaF3、MgF2、MgO、NiO、Nd2O3、Pb6O11、SnO3、SiO、SiO2、Sm2O3、TiO2、Ta2O5、ThO2、ZrO2The mixture constituted；
The constituent material of described metal film includes the alloy being made up of metal simple-substance Al, Ag, Cr, Ni, Au, Cu, Fe, Zn, Sn, Mo；
Described substrate is coated with at least rete described in two-layer；
The scope of the rete optical thickness of described antireflective coating is 1～300nm, and the scope of the rete optical thickness of described metal film is 1～320nm；
The manufacture method of the neutral gray scale dim light filter of described stratified film, it step included has:
(1) coating umbrella is installed to the cavity top of vacuum chamber, the rotating shaft of described coating umbrella is provided with power source, the cavity bottom of described vacuum chamber is provided with two plated film material sources, revision board is fixed in described vacuum chamber, one end is positioned at the same side, two described plated film material sources, adopts vacuum pump that described vacuum chamber is evacuated to predetermined vacuum level；
(2) described power source drives described coating umbrella to rotate, and adopts two described plated film material sources to be alternately deposited with described rete, and described rete stacks gradually with predetermined optical thickness and predetermined order；
Described revision board in step (1) is taken off, also comprise the steps between step (1) and step (2), at described coating umbrella baffle plate mounted below, described baffle plate is provided with multiple symmetrical gradual change hole, and the cross section in described gradual change hole is blade-shaped；
In the interval of wavelength 420～680nm, the scope of reflectance is 1.50%～2.30%, and the scope of transmitance is 47.8%～51.3%；
In the interval of wavelength 420～680nm, the scope of reflectance of maximum end of decaying is 2.5%～3.1%, the scope of transmitance is 11.45%～12.06%, and the scope of the reflectance of decay smallest end is 1.5%～2.3%, and the scope of transmitance is 47.8%～96.3%.
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| WO2015196326A1 (en) * | 2014-06-23 | 2015-12-30 | 孙义昌 | Neutral density filter having multiple film layers, manufacturing device thereof and manufacturing method therefor |
| CN106646917A (en) * | 2016-12-09 | 2017-05-10 | 杨陈楹 | Color-enhanced sun lenses, sun glasses and equipment, and manufacturing method thereof |
| CN107479122B (en) * | 2017-08-30 | 2023-11-24 | 惠州信诺精密光学有限公司 | Colored gradient light-reducing lens and manufacturing method thereof |
| CN107523789B (en) * | 2017-09-18 | 2019-04-19 | 江门市卡色光学有限公司 | A kind of gradual change ash filter is coated with device and its plating method |
| CN108017278B (en) * | 2017-12-15 | 2019-04-09 | 长兴旗滨玻璃有限公司 | A kind of bluish grey coated glass and its manufacturing method |
| CN110093589B (en) * | 2018-01-31 | 2023-10-20 | 吉林大学 | Vacuum magnetron sputtering coating device for preparing graded neutral density filter |
| CN111025448B (en) * | 2019-12-27 | 2021-11-30 | 江西水晶光电有限公司 | Low-reflection optical filter |
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| JP3692096B2 (en) * | 2002-06-28 | 2005-09-07 | ニスカ株式会社 | ND filter, manufacturing method thereof, and diaphragm device incorporating the ND filter |
| JP4481720B2 (en) * | 2004-05-14 | 2010-06-16 | 日本電産コパル株式会社 | ND filter and light quantity reduction device |
| JP2012159815A (en) * | 2011-01-31 | 2012-08-23 | Tanaka Engineering Inc | Optical stabilizer and optical thin film |
| JP2013015827A (en) * | 2011-06-09 | 2013-01-24 | Canon Electronics Inc | Nd filter and optical device |
| CN202808934U (en) * | 2012-09-26 | 2013-03-20 | 福建中策光电科技有限公司 | Coating equipment |
| CN102974918A (en) * | 2012-11-26 | 2013-03-20 | 清华大学 | Multi-spectral spectroscopic photography-based visual monitoring system |
| CN204044387U (en) * | 2014-06-23 | 2014-12-24 | 孙义昌 | A kind of neutral gray scale dim light filter of stratified film and manufacturing installation thereof |
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