CN207130157U - A kind of colourless hard glass of two-sided antireflective - Google Patents
A kind of colourless hard glass of two-sided antireflective Download PDFInfo
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- CN207130157U CN207130157U CN201720930800.2U CN201720930800U CN207130157U CN 207130157 U CN207130157 U CN 207130157U CN 201720930800 U CN201720930800 U CN 201720930800U CN 207130157 U CN207130157 U CN 207130157U
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Abstract
The utility model discloses a kind of two-sided colourless hard glass of antireflective, including glass substrate, the both sides of glass substrate are provided with the film layer set by high refractive index layer and low-index layer alternate cycles, and set hard layer in outermost layer.The utility model is set using said structure, and whole visible ray 400nm ~ 700nm wave bands serve antireflective effect;And anti-reflective effect average reflectance can be reduced to less than 1.3%, mean transmissivity can reach more than 97.5%, can meet high-end fine optical instrument;The hardness on final glass surface can have higher scratch resistance and rub resistance ability in Mohs' hardness more than 6, pencil hardness in more than 9h.
Description
Technical field
Anti-reflection glass art is the utility model is related to, specially a kind of colourless hard glass of two-sided antireflective.
Background technology
Smart machine typically will antireflective coating processed in window glass region at present.Reflection on optical element surface, not only
The thang-kng energy of optical element is influenceed, and reflected light can also form the image quality of astigmatism influence optical instrument in instrument,
In order to solve these problems generally in the surface coated with antireflection film of optical element, in order to reduce the reflected light of part.
Traditional antireflective coating simply plays antireflective effect in specific wave band, plays whole visible light wave range
Antireflective acts on;And traditional antireflective coating friction resistant ability, scratch resistance capability are poor, user just goes out using after a period of time
Phenomenon is now scratched, so as to influence the imaging effect of product and attractive in appearance;Therefore, for part high request fine optical instrument and
Speech, the anti-reflective effect of traditional antireflective coating can not meet to require.
The content of the invention
Technical problem to be solved in the utility model is to provide a kind of colourless hard glass of two-sided antireflective, can solve
The bad problem of feature caused by transmitance of the glass at visible-range 430nm ~ 700nm is low;Can also solve manufactured
During because the hardness of product is bad produce more defective products the problem of.
In order to solve the above technical problems, technical scheme is used by the utility model:A kind of two-sided antireflective is colourless hard
Matter glass, including glass substrate, the both sides of glass substrate are provided with what is set by high refractive index layer and low-index layer alternate cycles
Film layer, and hard layer is set in outermost layer.
Further, described high refractive index layer is Nb2O5、Si3N4、TiO2Or Ta2O5, described low-index layer is
SiO2、SiOxNyOr MgF2。
Further, the hard layer is SiC material layer.
Further, high refractive index layer and low-index layer sum of the glass substrate per side are 6-8 layers.
In preferable scheme, thickness of glass substrate 0.2mm ~ 3.2mm;High refractive index layer and low-index layer totally six per side
Layer, both sides are symmetrical arranged, the thickness of the high refractive index layer from glass substrate to outside be followed successively by 11nm ~ 15nm, 44nm ~ 50nm and
38nm ~ 43nm, the thickness of low-index layer are followed successively by 35nm ~ 40nm, 12nm ~ 16nm and 93nm ~ 100nm;Outermost layer hard layer
Thickness be 3nm ~ 5nm.
The utility model is set using said structure, and whole visible ray 400nm ~ 700nm wave bands serve antireflective work
With;And less than 1.3% can be reduced in the anti-reflective effect average reflectance of visible ray 400 ~ 700nm wave bands, it is average to pass through
Rate can reach more than 98.5%, can meet high-end fine optical instrument;The hardness on final glass surface can be in Mohs' hardness 6
More than, pencil hardness in more than 9h, have higher scratch resistance and rub resistance ability.
When high refractive index layer and low-index layer sum of the utility model glass substrate per side are 6 ~ 8 layers, from 400 ~
For mean transmissivity at 700nm more than 98.5%, the transmitance at 700nm is 98%.With making after traditional Film Design difference
Mean transmissivity of the glass in broader wave-length coverage is improved.
Hard layer material of the present utility model is SiC material layer, its hardness it is high and with the low-index material of its lower floor
Adhesion is good;The mode plated film of magnetron sputtering can be taken;And the adhesion after material film plating between other materials will get well;Most
End form into influence of the material not only to anti-reflection effect it is small, additionally it is possible to increase anti-reflection effect.
Brief description of the drawings
Fig. 1 is the structural representation that the utility model provides glass.
Fig. 2 is the reflection spectrum curve figure of only glass substrate layer.
Fig. 3 provides the reflection spectrum curve figure of glass for the utility model.
Embodiment
With reference to embodiment, the utility model is furtherd elucidate.These embodiments are interpreted as being merely to illustrate this reality
With new rather than for limiting the scope of protection of the utility model.After the content of the utility model record has been read, this
Art personnel can make various changes or modifications to the utility model, and these equivalence changes and modification equally fall into this practicality
New claims limited range.
Embodiment 1:
As shown in figure 1, a kind of colourless hard glass of two-sided antireflective, including glass substrate 1, the both sides of glass substrate are provided with
The film layer set by high refractive index layer 2 and the alternate cycles of low-index layer 3, and hard layer 4 is set in outermost layer.
Further, described high refractive index layer is Nb2O5、Si3N4、TiO2Or Ta2O5, preferably Nb2O5, relative to selection
Si3N4、TiO2Or Ta2O5, the more preferable anti-reflective effect of generation when can carry out Film Design to whole wave band, and compared to
Si3N4、TiO2Or Ta2O5, less reflection differences occur in different wave bands during actual Film Design in it.
Described low-index layer is SiO2、SiOxNyOr MgF2, preferably SiO2 is high compared to the adhesion of other materials,
Be advantageous to the monitoring of film performance.
The hard layer is SiC because the hardness of SiC material it is high and with the adhesion of the low-index material of its lower floor
It is good.
High refractive index layer and low-index layer sum of the glass substrate per side are 6-8 layers.In view of the volume production of product
Property, the target position of general continous way magnetic control film coating line can be restricted, and the number of plies designed in principle is The more the better, but actually above 6-
Capacity of equipment can not meet one-shot forming after 8 layers, and production efficiency greatly reduces.
In preferable scheme, thickness of glass substrate 0.2mm ~ 3.2mm;High refractive index layer and low-index layer totally six per side
Layer, both sides are symmetrical arranged, the thickness of the high refractive index layer from glass substrate to outside be followed successively by 11nm ~ 15nm, 44nm ~ 50nm and
38nm ~ 43nm, the thickness of low-index layer are followed successively by 35nm ~ 40nm, 12nm ~ 16nm and 93nm ~ 100nm;Outermost layer hard layer
Thickness be 3nm ~ 5nm.Wherein the film layer in two faces of glass substrate and corresponding thickness are identical.Thickness corresponding to each layer is
Individually control.
The method for specifically preparing the glass is:Using vacuum magnetic-control sputtering technology, by high refractive index material layer, low refraction
Rate layer of material is plated on the glass substrate successively, finally plates hard layer, you can obtains the described colourless hard of two-sided antireflective
Glass.
Further, technological parameter during sputtering plating high refractive index layer is:Vacuum:5.E-04Pa ~ 2.E-03Pa, with
NbxOy is sputtering target material, and target as sputter power is:8000W ~ 160000W, Ar gas flow 200sccm ~ 250sccm, O2Gas
Flow 30sccm ~ 40sccm.
Further, technological parameter during sputtering plating low-index layer is:Vacuum:5.E-04Pa ~ 2.E-03Pa, with silicon
Target is sputtering target material, and target as sputter power is:8000W ~ 120000W, Ar gas flow 200sccm ~ 250sccm, O2 gas stream
Measure 50sccm ~ 150sccm.
Further, technological parameter during sputtering plating hard layer is:Vacuum:5.E-04Pa ~ 2.E-03Pa, using silicon target as
Sputtering target material, target as sputter power are:2000W ~ 2500W, Ar gas flow 200sccm ~ 250sccm, C2H2 gas flow
50sccm~150sccm。
For white glass(Only glass substrate layer)A kind of and two-sided colourless hard glass of antireflective prepared by the utility model
Tested and analyzed, its reflection spectrum curve is shown in Fig. 2 and Fig. 3 respectively.Average reflectance of the glass in 400nm ~ 700nm is in vain
8.35%, the average reflection on white glass after the two-sided complete antireflective hard film layer of plating at 400nm ~ 700nm is 0.473%, very great Cheng
Anti-reflective effect is improved on degree.More flat stroke of reflectivity curves of the wherein Fig. 3 in 400nm ~ 700nm wave bands then corresponding reflection Re
A*, b* are close to 0 point, and the color that final products are presented is closer to colourless.
Summarize:
The colourless hard glass of two-sided antireflective prepared by the utility model has the following effects that
1st, antireflective effect is served in whole visible ray 400nm ~ 700nm wave bands;
2nd, two-sided plus plating hard layer material makes two faces of product have higher scratch resistance and rub resistance ability;Routine is not
The AR products of plating hard layer can only achieve 3 using Mohs' hardness test, take pencil hardness test to can only achieve 6H, and this practicality is new
Mohs' hardness can reach more than 6 after type adds plating hard layer, and pencil hardness can reach more than 9H.
3rd, the anti-reflective effect of whole visible ray 400nm ~ 700nm wave bands can reach less than 0.5%, can meet high-end fine
Optical instrument.
Claims (5)
1. a kind of colourless hard glass of two-sided antireflective, including glass substrate, it is characterised in that:The both sides of glass substrate be provided with by
The film layer that high refractive index layer and low-index layer alternate cycles are set, and hard layer is set in outermost layer.
2. glass according to claim 1, it is characterised in that:Described high refractive index layer is Nb2O5、Si3N4、TiO2Or
Ta2O5Material layer, described low-index layer are SiO2、SiOxNyOr MgF2Material layer.
3. glass according to claim 1, it is characterised in that:The hard layer is SiC material layer.
4. glass according to claim 1, it is characterised in that:High refractive index layer and low refraction of the glass substrate per side
Rate layer sum is 6-8 layers.
5. glass according to claim 1, it is characterised in that:Thickness of glass substrate 0.2mm ~ 3.2mm;High refraction per side
Totally six layers of rate layer and low-index layer, both sides are symmetrical arranged, and the thickness of the high refractive index layer from glass substrate to outside is followed successively by
11nm ~ 15nm, 44nm ~ 50nm and 38nm ~ 43nm, the thickness of low-index layer be followed successively by 35nm ~ 40nm, 12nm ~ 16nm and
93nm~100nm;The thickness of outermost layer hard layer is 3nm ~ 5nm.
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CN201720930800.2U CN207130157U (en) | 2017-07-28 | 2017-07-28 | A kind of colourless hard glass of two-sided antireflective |
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CN201720930800.2U CN207130157U (en) | 2017-07-28 | 2017-07-28 | A kind of colourless hard glass of two-sided antireflective |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111708106A (en) * | 2019-11-21 | 2020-09-25 | 光芯薄膜(深圳)有限公司 | Double-sided antireflection film without reducing transmittance of 940 nanometer waveband and preparation method thereof |
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2017
- 2017-07-28 CN CN201720930800.2U patent/CN207130157U/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111708106A (en) * | 2019-11-21 | 2020-09-25 | 光芯薄膜(深圳)有限公司 | Double-sided antireflection film without reducing transmittance of 940 nanometer waveband and preparation method thereof |
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