CN105891914A - Window protection panel with AG+AR+AF coating film - Google Patents

Window protection panel with AG+AR+AF coating film Download PDF

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Publication number
CN105891914A
CN105891914A CN201610393815.XA CN201610393815A CN105891914A CN 105891914 A CN105891914 A CN 105891914A CN 201610393815 A CN201610393815 A CN 201610393815A CN 105891914 A CN105891914 A CN 105891914A
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film
thickness
sio
zro
layer
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CN105891914B (en
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王先玉
夏永光
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Jiangxi Star Technology Co ltd
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Zhejiang Xingxing Technology Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14Protective coatings, e.g. hard coatings

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

The invention relates to a window protection panel with an AG+AR+AF coating film, belongs to the technical field of coating materials, and aims to solve the problem that the existing window protection panel does not have high wear resistance and low color difference at the same time. The panel comprises a transmitting substrate, wherein an antiglare film layer, an antireflection film layer and an anti-fingerprint film layer cover the upper surface of the transmitting substrate from the inner part to the outer part; the antireflection film layer is formed by alternately and repeatedly plating a ZrO2 film, an Si3N4 film and an SiO2 film from the inner part to the outer part in sequence; the outmost layer of the antireflection film is the SiO2 film; an Al2O3 film is further plated between the antireflection film layer and the anti-fingerprint film layer. The window protection panel can realize the effects of dazzle prevention, high light transmittance, low reflection and fingerprint resistance, and meanwhile further has the effect of high wear resistance and low color difference.

Description

A kind of windows be protected panel with AG+AR+AF plated film
Technical field
The present invention relates to a kind of windows be protected panel with AG+AR+AF plated film, belong to plating Technology field of membrane materials.
Background technology
Along with developing rapidly of science and technology, at such as mobile phone, palm PC, vehicle-mounted lead Touch screen (windows be protected is applied widely on the boat electronic product such as instrument, notebook computer Panel), various windows be protected screens it is also proposed special optical demands to the performance of plated film. As existing protection panel (such as display protection, handset viewing window sealer etc.) Make have one after using the re-surface that some substrate surfaces such as glass or PMMA carry out The most special effect.Specifically, glare proof glass windows be protected screen has anti-dazzle light efficiency Really, anti reflection glass has high transmission rate and the effect of low reflection and anti-fingerprint glass tool There are anti-fingerprint, anti-dirty effect.Also have and have above-mentioned several effect concurrently by making simultaneously Windows be protected screen.One as disclosed in Chinese patent (publication number: CN103950248A) The anti-fingerprint glass of anti-dazzle antireflective, it includes being provided with anti-dazzling film layer on the glass substrate, Anti-dazzling film layer is provided with AR antireflection film layer and is provided with on AR antireflection film layer Anti-fingerprint film layer, make to have concurrently simultaneously anti-dazzle, high transmission rate, low reflection, anti-fingerprint and The effect of anti-dirty characteristic.But it is relatively poor in terms of wearability and chromatic aberration performance.
Summary of the invention
The present invention is directed to defect present in above prior art, it is provided that one has The windows be protected panel of AG+AR+AF plated film, the problem of solution be how to make to have concurrently anti-dazzle Also there is while light, high transmission rate, low reflection and anti-fingerprint high-wearing feature and low aberration Value.
It is an object of the invention to be achieved by the following technical programs, one has The windows be protected panel of AG+AR+AF plated film, this panel includes transparent substrates, described printing opacity The upper surface of substrate is coated with anti-dazzling film layer, antireflective coating and anti-finger the most successively Stricture of vagina film layer, described antireflective coating is followed successively by ZrO from the inside to surface2Film, Si3N4Film and SiO2 Film is alternately repeated plating and sets and form, and the outermost layer of described antireflective coating is SiO2Film;Described Al also it is coated with between antireflective coating and anti-fingerprint film layer2O3Film.
Originally there is the windows be protected panel of AG+AR+AF plated film, by making antireflective coating use ZrO2Film and SiO2Film alternately plating sets, and is i.e. equivalent to make ZrO2Film and SiO2Film alternately intersects If reseting plating to set dried layer, make that not only there is high transmission rate and the effect of low reflecting properties;So And, only use ZrO2Film and SiO2Film is arranged alternately the poor-performing for aberration and is prone to The mottle of some colours occurs, the inventors discovered that by ZrO2Film and SiO2Between film Plate one layer of Si again3N4The light transmission of anti-reflection film can not only be ensured, can also improve on the contrary Chromatic aberration performance, makes the effect with relatively low value of chromatism;On the other hand, by making ZrO2Film With SiO2Si is increased between film3N4The wearability of antireflective coating can also be improved, improve and increase The wearability of permeable membrane itself;Meanwhile, plating it is combined between antireflective coating and anti-fingerprint film layer If Al2O3Film improves the wearability on anti-reflection film surface, so that antireflective coating will not be easily By damage tolerant, it is ensured that its light transmittance and the effect of low value of chromatism;And due to anti-dazzling film Layer and the existence of anti-fingerprint film layer, it is achieved that product can be made to have anti-dazzle, anti-fingerprint concurrently With anti-dirty effect.
At the above-mentioned windows be protected panel with AG+AR+AF plated film, as a kind of embodiment party Formula, described antireflective coating is followed successively by ZrO from the inside to surface2Film, Si3N4Film, SiO2Film, ZrO2 Film, Si3N4Film, SiO2Film, ZrO2Film, Si3N4Film and SiO2Film.By using this knot The antireflective coating of structure can make product have the effect of low value of chromatism and high transmission rate.As Further preferably, described antireflective coating is 10.5nm's by thickness the most successively ZrO2Film layer, thickness are the Si of 12.2nm3N4Film, thickness are the SiO of 15.1nm2Film, Thickness is the ZrO of 20nm2Film layer, thickness are the Si of 30.87nm3N4Film, thickness are 10nm SiO2Film, thickness are the ZrO of 11.5nm2Film layer, thickness are the Si of 18.6nm3N4 Film and thickness are the SiO of 85.4nm2Film is constituted.Product can be made to have the most thoroughly Light rate, product its to reflectance≤0.5% that wavelength is 400nm-700nm wave-length coverage section, Namely realize light transmittance and reach more than 99.5%, it is achieved the effect of high transmission rate, aberration Value ensure that at-1≤La*≤ 1 ,-2≤Lb*The high request of≤2.
At the above-mentioned windows be protected panel with AG+AR+AF plated film, implement as another kind Mode, described antireflective coating is the most successively by ZrO2Film, Si3N4Film, SiO2Film, ZrO2Film, Si3N4Film, SiO2Film, ZrO2Film, Si3N4Film, SiO2Film, ZrO2Film, Si3N4Film, SiO2Film, ZrO2Film, Si3N4Film, SiO2Film, ZrO2Film, Si3N4Film and SiO2Film is constituted.The antireflective coating using this structure can make product have low aberration equally Value and the effect of high transmission rate.As further preferably, described antireflective coating is from the inside to surface It is the ZrO of 10.5nm by thickness successively2Film layer, thickness are the Si of 7.2nm3N4Film, thickness Degree is the SiO of 30.5nm2Film, the ZrO of 14.1nm2Film layer, thickness are 36.5nm's Si3N4Film, thickness are the SiO of 11.6nm2Film, the ZrO of 15.1nm2Film layer, thickness are 28.9nm Si3N4Film, thickness are the SiO of 175.3nm2Film, the ZrO of 7.1nm2Film Layer, thickness are the Si of 99.5nm3N4Film, thickness are the SiO of 155.3nm2Film, 16.4nm ZrO2Film layer, thickness are the Si of 89.7nm3N4Film and thickness are the SiO of 78.9nm2 Film is constituted.Equally, it is possible to make product have preferable light transmittance, product its to wavelength be Reflectance≤0.5% of 400nm-700nm wave-length coverage section, namely realizes light transmittance and reaches To more than 99.5%, it is achieved the effect of high transmission rate, value of chromatism ensure that at-1≤La* ≤ 1 ,-2≤Lb*The high request of≤2, has high-precision effect.
At the above-mentioned windows be protected panel with AG+AR+AF plated film, described anti-dazzling film layer And also there is between antireflective coating adhesive film layer.Antireflective coating and anti-dazzling film can be improved Adhesion between Ceng, thus improve the stability of antireflective coating, be not susceptible to come off or Shifting phenomena, so that having the effect of stable high transmission rate and antiradar reflectivity, also makes The individual effect having stable low value of chromatism.
At the above-mentioned windows be protected panel with AG+AR+AF plated film, described transparent substrates is The safety glass of printing opacity, sapphire, PMMA or PC material are made.These materials are made The substrate advantage with high light transmittance.
At the above-mentioned windows be protected panel with AG+AR+AF plated film, described anti-dazzling film layer Thickness be 3 μm~5 μm.The effect of anti-dazzle is improved by controlling thickness.
At the above-mentioned windows be protected panel with AG+AR+AF plated film, described Al2O3Film Thickness is 1 μm~3 μm, it is ensured that the wearability on surface prevents antireflective coating to be difficult to be ground Damage and ensure high transmission rate and the effect of low value of chromatism.
In sum, the present invention compared with prior art, has the advantage that
Originally there is the windows be protected panel of AG+AR+AF plated film, by using ZrO2Film, Si3N4Film and SiO2Film alternately plating sets, and plates between antireflective coating and anti-fingerprint film layer If Al2O3Film, improve and ensure product have concurrently anti-dazzle, high transmission rate, low reflection and Anti-fingerprint effects, meanwhile, has again high-wearing feature and the effect of low value of chromatism.
Accompanying drawing explanation
Fig. 1 is the sectional structure that the present invention has the windows be protected panel of AG+AR+AF plated film Schematic diagram.
Fig. 2 is the windows be protected panel that the another kind of the present invention has AG+AR+AF plated film Sectional structure schematic diagram.
Fig. 3 is the windows be protected panel accordingly with AG+AR+AF plated film in comparative example 1 Sectional structure schematic diagram.
In figure, 1, transparent substrates;2, anti-dazzling film layer;3, antireflective coating;31、ZrO2 Film;32、Si3N4Film;33、SiO2Film;4、Al2O3Film;5, anti-fingerprint film layer;6、 Adhesive film layer.
Detailed description of the invention
Below by specific embodiments and the drawings, technical scheme is made further Specific description, but the present invention is not limited to these embodiments.
As depicted in figs. 1 and 2, originally there is the windows be protected panel bag of AG+AR+AF plated film Including transparent substrates 1, the upper surface of transparent substrates 1 is coated with anti-dazzle the most successively Film layer 2, antireflective coating 3 and anti-fingerprint film layer 5, wherein, antireflective coating 3 is from the inside to surface It is followed successively by ZrO2Film 31, Si3N4Film 32 and SiO2Film 33 is alternately repeated plating and sets and form, Namely be equivalent to arrangement mode for " ZrO2Film 31-Si3N4Film 32-SiO2Film 33 " Structural order alternately plating set repeated several times, be conducive to improving while light transmittance and have again There is the performance of low value of chromatism, and the outermost layer of antireflective coating 3 is SiO2Film 33;Anti-reflection film Al also it is coated with between layer 3 and anti-fingerprint film layer 52O3Film 4.By using ZrO2Film 31, Si3N4Film 32 and SiO2Film 33 alternately plating sets the antireflective coating 3 of formation to improve light transmittance With the effect of low value of chromatism, set 3-5 time it is generally advisable to repeat plating;Anti-reflection additionally by making The outermost layer of film layer 3 is SiO2Film 33 can make antireflective coating 3 and Al2O3Between film 4 Adhesion more preferable, make that there is preferable stability, thus do not have and come off or hole Phenomenon, it is ensured that the requirement of low value of chromatism.If causing that because adhesion is bad hole occurs Gap phenomenon, the easily impact refraction effect to light, affect aberration, thus occur existing Aberration crosses obvious phenomenon.Wherein, ZrO2Film 31, Si3N4Film 32 and SiO2Film 33 And Al2O3Film 4 all can use the vacuum coating mode of routine to plate to set and form, it is also possible to adopts Realize by modes such as magnetron sputtering, chemical gaseous phase deposition and pulsed laser depositions.Wherein Anti-dazzling film layer 2 can by be etched on the surface of transparent substrates 1 formed film As anti-dazzling film layer 2, it is also possible to by using routine on the surface of transparent substrates 1 The anti-dazzling film layer 2 that AG material is made.Transparent substrates 1 therein can use printing opacity The transparent substrates 1 that safety glass, sapphire, PMMA or PC material are made, has printing opacity The advantage that property is good.The windows be protected panel originally with AG+AR+AF plated film can be that mobile phone regards Window sealer, computer monitor windows be protected screen or panel computer windows be protected screen etc. electricity The window screen of sub-product.
In particular, as a kind of embodiment, wherein antireflective coating 3 is from the inside to surface It is arranged in order by ZrO2Film 31, Si3N4Film 32, SiO2Film 33, ZrO2Film 31, Si3N4 Film 32, SiO2Film 33, ZrO2Film 31, Si3N4Film 32 and SiO2Film 33 is constituted.Respectively Film all uses the plated film mode of routine to be formed, as used the mode of vacuum coating.By adopting Set with repeating alternately to plate, make the antireflective coating of formation have high transmission rate and low value of chromatism Effect.Preferably, the thickness of film each in antireflective coating 3 is adjusted, the most anti-reflection It is the ZrO of 10.5nm that film layer 3 is arranged in order from the inside to surface by thickness2Film layer 31, thickness Si for 12.2nm3N4Film 32, thickness are the SiO of 15.1nm2Film 33, thickness are 20nm ZrO2Film layer 31, thickness are the Si of 30.87nm3N4Film 32, thickness are 10nm's SiO2Film 33, thickness are the ZrO of 11.5nm2Film layer 31, thickness are the Si of 18.6nm3N4 Film 32 and thickness are the SiO of 85.4nm2Film 33 is constituted.It can be made to wavelength to be Light light transmittance >=99.5% of 400nm-700nm range section, and the overall value of chromatism of product At-1≤La*≤ 1 ,-2≤Lb*≤ 2, there is high-precision performance, it is achieved that high printing opacity Rate and the effect of low value of chromatism.As another embodiment, it is also possible to make antireflective coating 3 are arranged in order from the inside to surface by ZrO2Film 31, Si3N4Film 32, SiO2Film 33, ZrO2 Film 31, Si3N4Film 32, SiO2Film 33, ZrO2Film 31, Si3N4Film 32, SiO2Film 33、ZrO2Film 31, Si3N4Film 32, SiO2Film 33, ZrO2Film 31, Si3N4Film 32, SiO2Film 33, ZrO2Film 31, Si3N4Film 32 and SiO2Film 33 is constituted.It is further preferred that Making antireflective coating 3 be arranged in order from the inside to surface by thickness is the ZrO of 10.5nm2Film layer 31, Thickness is the Si of 7.2nm3N4Film 32, thickness are the SiO of 30.5nm2Film 33,14.1nm ZrO2Film layer 31, thickness are the Si of 36.5nm3N4Film 32, thickness are 11.6nm's SiO2Film 33, the ZrO of 15.1nm2Film layer 31, thickness are the Si of 28.9nm3N4Film 32, Thickness is the SiO of 175.3nm2Film 33, the ZrO of 7.1nm2Film layer 31, thickness are 99.5nm Si3N4Film 32, thickness are the SiO of 155.3nm2Film 33, the ZrO of 16.4nm2Film layer 31, thickness is the Si of 89.7nm3N4Film 32 and thickness are the SiO of 78.9nm2Film 33 Constitute.Equally, it is possible to make it to the light printing opacity that wavelength is 400nm-700nm range section Rate >=99.5%, it is achieved the effect of high transmission rate, additionally it is possible to make value of chromatism at-1≤La*≤ 1, -2≤Lb*≤2.Originally have the windows be protected panel of AG+AR+AF plated film have concurrently anti-fingerprint and Antifouling effect, its initial water droplet angle more than 120 degree, can enough reach 130 degree with On, there is anti-fingerprint and anti-dirty characteristic.It addition, in friction resistant is tested, by adopting Add 500g pressure with the 000# steel wool of a diameter of 20mm to rub back and forth and can reach 2500 More than secondary, frequency reaches 50 beats/min.
Further, as in figure 2 it is shown, anti-dazzling film layer 2 therein and anti-reflection film Between layer 3, also there is adhesive film layer 6.Improve adhesion between the two, make to be difficult to out Now come off and misplace or hole phenomenon occurs, it is ensured that the stability of antireflective coating, thus also It is equivalent to ensure that high transmission rate and the requirement of low value of chromatism.Certainly, bonding here Film layer 5 can use SiO2Material is made.
Further, the thickness of anti-dazzling film layer 2 therein is 3 μm~5 μm. The effect of anti-dazzle can be improved.Wherein Al2O3The thickness of film 4 is 1 μm~3 μm. By adjusting Al2O3The thickness of film 4 improves wearability so that antireflective coating be difficult to by Abrasion realizes ensureing light transmittance and the performance of low colour, this tool also ensured that of product The windows be protected panel having AG+AR+AF plated film has anti-dazzle, high transmission rate, low concurrently simultaneously Reflection and anti-fingerprint, high-wearing feature and the advantage of low value of chromatism.
Comparative example 1
This comparative example is primarily to explanation is only with ZrO2Film 31 and SiO2Film 33 is alternately The effect situation that the antireflective coating 3 that plating sets and formed is reached.Concrete as it is shown on figure 3, The windows be protected panel in Fig. 3 with AG+AR+AF plated film includes transparent substrates 1, printing opacity The upper surface of substrate 1 is coated with anti-dazzling film layer 2, antireflective coating 3 the most successively With anti-fingerprint film layer 5, wherein, antireflective coating 3 is followed successively by ZrO from the inside to surface2Film 31 And SiO2Film 33 is alternately repeated plating and sets and form, and is namely equivalent to some by with arrangement side Formula is " ZrO2Film 31-SiO2Film 33 " structure alternately plating set repeated several times, and increase The outermost layer of permeable membrane layer 3 is SiO2Film 33;Between antireflective coating 3 and anti-fingerprint film layer 5 Also it is coated with Al2O3Film 4, specially anti-reflection film 3 are followed successively by ZrO from the inside to surface2Film 31, SiO2Film 33, ZrO2Film 31, SiO2Film 33, ZrO2Film 31 and SiO2Film 33;Should Anti-reflection film is concrete is the ZrO of 9.8nm by thickness the most successively2Film layer 31, thickness are 35.1nm SiO2Film 33, thickness are the ZrO of 39.5nm2Film layer 31, thickness are 12.2nm SiO2Film 33, thickness are the ZrO of 42.4nm2Film layer 31 and thickness are 80.3nm's SiO2Film 33 is constituted.It can be made the light transmittance that wavelength is 400nm-700nm range section >=98.4%, value of chromatism is at-3≤La*≤ 3 ,-4≤Lb*≤4.Visible, individually use ZrO2 Film 31 and SiO2Film 33 alternately plating is provided as antireflective coating, although have preferable printing opacity Rate, but at value of chromatism aspect of performance or relatively poor, precision is poor, also illustrate that this Invention is by adding Si3N4Film 32 has large effect to value of chromatism performance, it is possible to real The lowest aberration and high-precision effect.
Specific embodiment described in the present invention is only to present invention spirit theory for example Bright.Those skilled in the art can be to described specific embodiment Make various amendment or supplement or use similar mode to substitute, but without departing from The spirit of the present invention or surmount scope defined in appended claims.
It is embodied as although the present invention having been made a detailed description and having quoted some as proof Example, but to those skilled in the art, as long as without departing from the spirit of the present invention It is obvious for can making various changes with scope or revise.

Claims (9)

1. having a windows be protected panel for AG+AR+AF plated film, this panel includes printing opacity Substrate (1), the upper surface of described transparent substrates (1) is coated with anti-dazzle the most successively Light film layer (2), antireflective coating (3) and anti-fingerprint film layer (5), it is characterised in that institute State antireflective coating (3) and be followed successively by ZrO from the inside to surface2Film (31), Si3N4Film (32) and SiO2Film (33) is alternately repeated plating and sets and form, and the outermost layer of described antireflective coating (3) For SiO2Film (33);Between described antireflective coating (3) and anti-fingerprint film layer (5) also It is coated with Al2O3Film (4).
The most according to claim 1, there is the windows be protected panel of AG+AR+AF plated film, It is characterized in that, described antireflective coating (3) is the most successively by ZrO2Film (31), Si3N4Film (32), SiO2Film (33), ZrO2Film (31), Si3N4Film (32), SiO2 Film (33), ZrO2Film (31), Si3N4Film (32) and SiO2Film (33) is constituted.
The most according to claim 2, there is the windows be protected panel of AG+AR+AF plated film, It is characterized in that, described antireflective coating (3) is 10.5nm by thickness the most successively ZrO2Film layer (31), thickness are the Si of 12.2nm3N4Film (32), thickness are 15.1nm SiO2Film (33), thickness are the ZrO of 20nm2Film layer (31), thickness are 30.87nm Si3N4Film (32), thickness are the SiO of 10nm2Film (33), thickness are 11.5nm ZrO2Film layer (31), thickness are the Si of 18.6nm3N4Film (32) and thickness are 85.4nm SiO2Film (33) is constituted.
The most according to claim 1, there is the windows be protected panel of AG+AR+AF plated film, It is characterized in that, described antireflective coating (3) is the most successively by ZrO2Film (31), Si3N4Film (32), SiO2Film (33), ZrO2Film (31), Si3N4Film (32), SiO2 Film (33), ZrO2Film (31), Si3N4Film (32), SiO2Film (33), ZrO2Film (31), Si3N4Film (32), SiO2Film (33), ZrO2Film (31), Si3N4Film (32), SiO2 Film (33), ZrO2Film (31), Si3N4Film (32) and SiO2Film (33) is constituted.
The most according to claim 4, there is the windows be protected panel of AG+AR+AF plated film, It is characterized in that, described antireflective coating (3) is 10.5nm by thickness the most successively ZrO2Film layer (31), thickness are the Si of 7.2nm3N4Film (32), thickness are 30.5nm SiO2Film (33), the ZrO of 14.1nm2Film layer (31), thickness are the Si of 36.5nm3N4 Film (32), thickness are the SiO of 11.6nm2Film (33), the ZrO of 15.1nm2Film layer (31), Thickness is the Si of 28.9nm3N4Film (32), thickness are the SiO of 175.3nm2Film (33), The ZrO of 7.1nm2Film layer (31), thickness are the Si of 99.5nm3N4Film (32), thickness SiO for 155.3nm2Film (33), the ZrO of 16.4nm2Film layer (31), thickness are 89.7nm Si3N4Film (32) and thickness are the SiO of 78.9nm2Film (33) is constituted.
6. there is according to claim 1-5 any one the form of AG+AR+AF plated film Protection panel, it is characterised in that described anti-dazzling film layer (2) and antireflective coating (3) Between also there is adhesive film layer (6).
The most according to claim 1, there is the windows be protected panel of AG+AR+AF plated film, It is characterized in that, described transparent substrates (1) is the safety glass of printing opacity, sapphire, PMMA Or the transparent substrates (1) that PC material is made.
8. there is according to claim 1-5 any one the form of AG+AR+AF plated film Protection panel, it is characterised in that the thickness of described anti-dazzling film layer (2) is 3 μm~5 μm。
9. there is according to claim 1-5 any one the form of AG+AR+AF plated film Protection panel, it is characterised in that described Al2O3The thickness of film (4) is 1 μm~3 μm.
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