CN102974936B - System for laser focus positioning and method for positioning material on laser focus point - Google Patents
System for laser focus positioning and method for positioning material on laser focus point Download PDFInfo
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- CN102974936B CN102974936B CN201210431903.6A CN201210431903A CN102974936B CN 102974936 B CN102974936 B CN 102974936B CN 201210431903 A CN201210431903 A CN 201210431903A CN 102974936 B CN102974936 B CN 102974936B
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Abstract
The invention discloses a system for laser focus positioning. The system for the laser focus positioning comprises a laser device, a convergent lens, a material translation device. A laser beam output from the laser device incidents on the convergent lens and incidents on the surface of an optical material which is clamped on the material translation device after focalized. A plasma body bright spot is produced after the laser beam is focalized and a bright spot mirror image is formed by the bright spot through the surface of the optical material. A charge coupled device (CCD) micro imaging system which is used for simultaneously collecting and outputting the images of the plasma body bright spot and the bright spot mirror image is further arranged. The invention further discloses a method for positioning the optical material on a laser focus point. The method includes that after focalized and output, the laser beam produces the plasma body bright spot by adjusting the laser device and the like, the surface of the material is controlled to approach the plasma body bright spot until the bright spot mirror image is formed, the plasma body bright spot and the bright spot mirror image are enabled to enter a view field of the CCD micro imaging system until a complete registration of the plasma body bright spot and the bright spot mirror image is achieved. The system for the laser focus positioning and the method for positioning the material on the laser focus point have the advantages of being convenient to operate, high in positioning precision and small in artificial factor intervention and the like.
Description
Technical field
The present invention relates to a kind of apparatus and method optical material surface laser damage threshold being measured to material surface location in (or surface laser process), particularly relate to a kind of navigation system and localization method thereof of laser spot.
Background technology
Laser forms minimum spot size through convergent lens system in focal position, and reaches maximum power density, utilizes this feature focusing to position.In the surface laser damage threshold of the optical materials such as optical window glass, film and crystal is measured, material surface is positioned at focal position and can reduces damage difficulty.Further, in the accurate process operation of laser, material surface is accurately positioned in focal position and can realizes the highest machining accuracy.
Under light laser effect, the materials such as optical window glass, film-substrate and crystal can produce nonlinear effect, as self-focusing effect.This effect can make incident laser form converging action at material internal, and accelerated material damages, thus affects the measurement of surface damage threshold value.Employing large-numerical aperture, short focus system focus on laser beam, less focused spot size and larger convergence angle can be formed, ensure to only have the laser power density of focal position can reach the damage threshold of material, and before and after focus, laser beam is dispersed rapidly, intensity declines rapidly, can effectively suppress nonlinear optical effect on the impact of threshold measurement.Meanwhile, less focal beam spot can make the precision of Laser Processing higher.
When incident laser is plane wave, the Airy disc diameter being focused at the formation of focus place through lens is:
wherein, λ is optical maser wavelength, and f is focusing system focal length, and D is focusing system aperture.Visible, under theoretical case, focal beam spot size is directly proportional to convergence yoke focal length, and focal length is less, and the focused spot size obtained is also less.Under actual conditions, laser output laser beam is not ideal plane ripple, and therefore focal beam spot is greater than theoretical value.Focal beam spot size reality is determined jointly by beam quality and convergence yoke, thus the laser power density at focus place is also determined jointly by both and laser output power.
Material can be made to ionize when the laser power density at focus place reaches certain level, and launch the observable plasma light of naked eyes, this effect is applied to manual focus operation.Spot area is observed on limit, mobile material position, executor limit in operation, when occurring that plasma light is as mobile in stopped during white light, completes the positioning action of material surface in focus.Different implementation effects can be there is in the method because of the difference of executor.
Further, utilize photoelectric sensor to detect plasma light, the automatic location of focal position can be realized, such as, the flat 6-7980 publication of Japanese Patent Laid-Open.When utilizing laser action plasma light to be measured or material surface formation to be processed to carry out focus location to material, first can bring position error because laser spot region itself there is certain space yardstick, cannot determine whether material surface is positioned at focus area center.Especially under short focal length lens focused condition, due to laser beam rapid divergence before and after focus, the laser spot size making practical function at material surface is greater than focus spot size by this position error, thus affects the measurement result of surface damage threshold value and reduce machining accuracy.Further, the plasma light intensity gone out at different materials surface excitation due to identical laser intensity is different, and therefore, the effect of location can occur difference because material is different.In addition, the size of focus area and material surface cannot direct tracking observation to the distance of focus, and position error is difficult to control.
Summary of the invention
The technical problem to be solved in the present invention overcomes the deficiencies in the prior art, provides that a kind of precision is high, structure is simple, easy to make, adaptable laser spot navigation system.Also provide a kind of easy and simple to handle, positioning precision is high, artifact intervention is less, method optical material surface to be measured or to be processed being positioned laser spot place of wide accommodation.
For solving the problems of the technologies described above, the technical scheme that the present invention proposes is a kind of laser spot navigation system, comprises laser instrument, convergent lens and material translating device; The laser beam that described laser instrument exports impinges perpendicularly on convergent lens, reenter after convergent lens focuses on be mapped to clamping on material translating device by optical material surface to be measured or to be processed, described laser beam makes the air at laser spot place that ionization occurs and produces first-class plasma bright spot after convergent lens focuses on, this plasma bright spot forms a bright spot mirror image by optical material surface to be measured or to be processed, described laser spot navigation system also comprise a set of can gather plasma bright spot and bright spot mirror image simultaneously image and carry out the CCD micro imaging system of image output.
Above-mentioned laser spot navigation system goes for the convergent lens of various focal length, but under utilizing short focal length lens to carry out tight focus condition because focus spot area is less, easier improving laser power density thus formed air ionization; In addition, before and after focus, laser-beam divergence degree is larger, stricter to the requirement of position error, use laser spot navigation system of the present invention can obtain better effect, therefore, described convergent lens is preferably short focal length focusing len, and its focus controlling ranges preferably from 1mm to 30mm.
In above-mentioned laser spot navigation system, the beam quality M of the laser beam that described laser instrument exports
2factor control range is preferably 1 ~ 2, and the laser power density of described laser beam at focus place after convergent lens focuses on can reach TW/m
2magnitude.
In above-mentioned laser spot navigation system, described CCD micro imaging system preferably includes CCD camera, microlens, camera translating device, data wire and image output device, described CCD camera is arranged on camera translating device, described CCD camera is connected with described image output device by data wire, and microlens is installed in CCD camera.In described micro imaging system, the enlargement ratio of microlens is preferably 1 to 40 times.
In above-mentioned laser spot navigation system, light path between described laser instrument and convergent lens is preferably set up an adjustable type laser attenuation sheet system, described laser attenuation sheet system comprises attenuator fixed support, attenuator fixed support is equiped with the laser attenuation sheet of variable number.In operating process, by adding or reduce the adjustment of laser attenuation sheet realization to transmission laser intensity on attenuator fixed support.
As a total technical conceive, the present invention also provides a kind of method optical material to be measured or to be processed being positioned laser spot place, comprises the following steps:
(1) plasma bright spot is formed: open laser instrument, make the laser beam launched from laser instrument first by an adjustable type laser attenuation sheet system, reenter to be mapped to gathers on lens for a moment, the laser power on convergent lens is incided by the power output and/or laser attenuation sheet Systematical control regulating laser instrument, recycling short focus convergent lens controls focal spot size, makes the laser power density at focus place reach 10
12w/m
2magnitude, thus form a plasma bright spot at focus place generation air ionization;
(2) bright spot mirror image is formed: be clamped on material translating device by optical material to be measured or to be processed, make material surface perpendicular to laser beam, adjustment material translating device makes material surface aim at plasma bright spot, described to be measured or optical material to be processed is made along the optical axis of convergent lens gradually near plasma bright spot again by adjustment material translating device, until plasma bright spot can form bright spot mirror image clearly at described to be measured or optical material surface to be processed, stop the movement of material translating device;
(3) output image is gathered: the CCD camera being provided with microlens by gathers the image of described plasma bright spot and bright spot mirror image, and image is outputted to image output device in real time, the camera translating device of material translating device and/or CCD camera is constantly adjusted, until plasma bright spot and bright spot mirror image all enter the visual field of CCD camera according to the image frame exported;
(4) finally locate: again regulate material translating device, described to be measured or optical material to be processed is made to continue near plasma bright spot along the optical axis of convergent lens, until observe plasma bright spot and bright spot mirror image overlaps completely from the image that image output device exports, complete the positioning action of optical material to be measured or to be processed at laser spot place.
Above-mentioned method optical material to be measured or to be processed being positioned laser spot place, between described step (3) and step (4), preferred increase by regulates the operating procedure of bright spot size, the concrete operations mode of this step is: by regulating the power output of laser instrument and/or laser attenuation sheet system to weaken the brightness of described plasma bright spot and bright spot mirror image gradually, until plasma bright spot and bright spot mirror image can just be detected by the CCD camera of described installation microscope head.
Technique scheme of the present invention is mainly based on following principle: utilize laser focusing to form air ionization at focus place, thus launch plasma light line and form detectable plasma bright spot, this plasma bright spot can form a bright spot mirror image by optical material surface to be measured or to be processed, adjust CCD micro imaging system again makes the two be arranged in the visual field of CCD camera simultaneously, and by the aforesaid plasma bright spot of image output device Real Time Observation and bright spot mirror image; According to mirror image principle, optical material surface to be measured or to be processed is by vertical and decile plasma bright spot and bright spot mirror image line, then optical material to be measured or to be processed is controlled close to plasma bright spot, observe CCD micro imaging system simultaneously and export the process close gradually of plasma bright spot and bright spot mirror image in picture, when the two is overlapped, namely complete the positioning action of material surface at focus place.
Compared with prior art, the invention has the advantages that:
(1) technical scheme of the present invention utilizes laser to carry out focus location to the plasma light that air ionization is launched as object of reference, instead of utilize laser directly to inspire the plasma of optical material surface to be measured or to be processed, so first avoid material and just contact the position error namely caused by laser ionization at focus area edge;
(2) technical scheme of the present invention utilizes the ionisation effect of laser to air to position, compare the mode of operation utilizing the ionisation effect of laser to optical material to position, present invention eliminates the poor location opposite sex brought because optical material laser ionization characteristic is different, in other words, the present invention is applicable to the location of the to be measured of unlike material or optical material to be processed, and identical positioning precision can be reached, generally only require optical material surface flat smooth;
(3) technical scheme of the present invention can observe the size in air ionization region from the side of focus area by introducing CCD micro imaging system, utilize mirror image principle easily optical material surface to be measured or to be processed can be positioned at the center of focus area, easy and simple to handle, directly perceived, be conducive to improving positioning precision further.
Generally speaking, navigation system of the present invention has that precision is high, structure is simple, easy to make, adaptable feature, match with it, localization method of the present invention not only easy and simple to handle, positioning precision is high, and artifact intervention is less, wide accommodation, technical scheme of the present invention measures the damage threshold of subsequent optical material (such as optical window glass, film and crystalline material etc.) and high-precision surface is processed significant.
Accompanying drawing explanation
Fig. 1 is structural representation and the schematic diagram of laser spot navigation system in the embodiment of the present invention.
Fig. 2 is the structural representation of adjustable type laser attenuation sheet system in the embodiment of the present invention.
Fig. 3 is the moving direction schematic diagram of detected materials and bright spot mirror image in the localization method of the embodiment of the present invention.
Fig. 4 adopts short focal length lens to focus on the focus spot schematic diagram obtained in the embodiment of the present invention.
Fig. 5 adopts the common type of focusing to obtain focus spot schematic diagram in the embodiment of the present invention.
Marginal data:
1, laser instrument; 2, laser beam; 3, laser attenuation sheet system; 4, convergent lens; 5, material translating device; 6, material translation stage Y-axis; 7, material translation stage X-axis; 8, material translation stage Z axis; 9, plasma bright spot; 10, bright spot mirror image; 11, to be measured or optical material to be processed; 12, CCD camera; 13, microlens; 14, image output device; 15, data wire; 16, camera translation stage Z axis; 17, camera translation stage Y-axis; 18, camera translation stage X-axis; 19, camera translating device; 20, attenuator fixed support; 21, the first laser attenuation sheet; 22, the second laser attenuation sheet; 23, the 3rd laser attenuation sheet; 24, long-focus convergent lens; 25, long-focus lens focus.
Detailed description of the invention
Below in conjunction with Figure of description and specific embodiment, the invention will be further described.
Embodiment:
One is laser spot navigation system of the present invention as shown in Figure 1, comprise laser instrument 1, adjustable type laser attenuation sheet system 3, convergent lens 4, material translating device 5 and CCD micro imaging system, the laser beam 2 that laser instrument 1 exports is first through laser attenuation sheet system 3, the optical axis being parallel to convergent lens 4 again impinges perpendicularly on convergent lens 4, and the light beam exported after convergent lens 4 focuses on incides to be measured or optical material 11 surface to be processed of clamping on material translating device 5.Laser instrument 1 output wavelength of the present embodiment is 800nm, and maximum output mean power is 5W, beam quality factor M
2be 1.2.The convergent lens 4 of the present embodiment is a short focal length focusing len, and its focal length is 10mm.As shown in Figure 2, the adjustable type laser attenuation sheet system 3 of the present embodiment comprises an attenuator fixed support 20, attenuator fixed support 20 is equiped with the first laser attenuation sheet 21, second laser attenuation sheet 22 and the 3rd laser attenuation sheet 23 that parallel interval arranges, in the propagation light path that these three laser attenuation sheets are all laid in laser beam 2 and perpendicular to the incident direction of laser beam 2.The material translating device 5 of the present embodiment is three-dimensional adjustable type mobile device, its three dimensions refer to material translation stage Y-axis 6, material translation stage X-axis 7 and material translation stage Z axis 8 respectively, wherein make material translation stage Z axis 8 be parallel to the optical path direction (i.e. the optical axis direction of convergent lens 4) of laser beam 2, material translation stage Y-axis 6 and material translation stage X-axis 7 are perpendicular to the optical path direction of laser beam 2.Optical material 11 to be measured or to be processed is installed on material translating device 5, and makes material surface perpendicular to laser beam 2.
In the present embodiment, laser beam 2 focuses on through convergent lens 4, produce air ionization and form plasma bright spot 9, this plasma bright spot 9 forms a bright spot mirror image 10 by optical material 11 surface to be measured or to be processed, and the CCD micro imaging system of installing microlens 13 can gather the image of plasma bright spot 9 and bright spot mirror image 10 simultaneously and output in real time on image output device 14.The CCD micro imaging system of the present embodiment is installed in the side that laser beam 2 propagates light path, comprise CCD camera 12, microlens 13, the image output device of camera translating device 19 and image output device 14(the present embodiment refers to and IMAQ is housed, the computer for the treatment of system, and this computer is with the display device of output image), the enlargement ratio of microlens 13 is 10 times, CCD camera 12 is arranged on camera translating device 19, CCD camera 12 is connected with image output device 14 by data wire 15, the image frame that CCD camera 12 is taken exports in real time by the display of image output device 14.For ensureing that whole CCD micro imaging system can not cause obstruction to beam propagation, material translation and imaging, in the present embodiment, the operating distance of microlens 13 is 30mm, and the optical axis of microlens 13 and the optical axis included angle of laser beam 2 are about 45 °.Camera translating device 19 in the present embodiment is similarly three-dimensional adjustable type mobile device, its three dimensions refer to camera translation stage Z axis 16, camera translation stage Y-axis 17 and camera translation stage X-axis 18 respectively, wherein camera translation stage Z axis 16 controls the distance of microlens 13 and plasma bright spot 9, and the plane at camera translation stage Y-axis 17 and camera translation stage X-axis 18 place and the angle of convergent lens 4 optical axis are about 45 °.
Method optical material to be measured or to be processed being positioned laser spot place of the present invention, the method uses the above-mentioned laser spot navigation system of the present embodiment, specifically comprises the following steps:
(1) form plasma bright spot: open laser instrument 1, make the laser beam 2 launched from laser instrument 1 first by the laser attenuation sheet system 3 of an adjustable type, then impinge perpendicularly on a convergent lens 4, after convergent lens 4 exports, form laser spot; The first laser attenuation sheet 21, second laser attenuation sheet 22 and the 3rd laser attenuation sheet 23 laying reduction attenuation is such as adjusted) by the power output and/or laser attenuation sheet system 3(regulating laser instrument 1, the laser power on arrival convergent lens 4 surface is made to be 5W, after convergent lens 4 focuses on, obtain focus place spot diameter is 6 μm, and average laser power density is 0.18 × 10
12w/m
2, under this power density, the air at focus place is ionized the observable plasma bright spot 9 of generation one naked eyes;
(2) bright spot mirror image is formed: be clamped on material translating device 5 by optical material 11 to be measured or to be processed, make material translation stage Z axis 8 parallel with the optical axis of convergent lens 4, now material surface is perpendicular to the propagation light path of laser beam 2, first adjust material translation stage Y-axis 6 and the material translation stage X-axis 7 of material translating device 5, material surface is made to aim at the plasma bright spot 9 of above-mentioned formation, again by the material translation stage Z axis 8 of adjustment material translating device 5, make optical material 11 to be measured or to be processed along the optical axis of convergent lens 4 gradually near plasma bright spot 9, until plasma bright spot 9 can form bright spot mirror image 10 clearly on optical material 11 surface to be measured or to be processed, (the light path adjusting stage of this step does not make material surface contact plasma bright spot 9 in the movement of stopping material translating device 5, in order to avoid there is laser ablation in optical material 11 to be measured or to be processed, the distance at interval is as the criterion with the clear bright spot mirror image 10 of observing of lucky energy),
(3) output image is gathered: the image simultaneously being gathered above-mentioned plasma bright spot 9 and bright spot mirror image 10 by the CCD camera 12 installing microlens 13, and image is outputted to image output device 14 in real time, first by the plasma bright spot 9 at positive for the microlens 13 of CCD camera 12 focusing place during collection, and the image of plasma bright spot 9 is exported in real time by image output device 14, the camera translating device 19 of CCD camera 12 is constantly adjusted according to the image frame exported, make plasma bright spot 9 blur-free imaging at CCD micro imaging system focusing place, further adjustment material translating device 5 makes material surface further near plasma bright spot 9, to ensure that plasma bright spot 9 and bright spot mirror image 10 all enter the visual field of CCD camera 12, the layout of the CCD camera 12 with microlens 13 and the adjustment process of camera translating device 19 all require that microlens 13 can not contact measured or optical material to be processed 11, can not stop the propagation light path of laser beam 2,
(4) bright spot size is regulated: by regulating the power output of laser instrument 1 and/or laser attenuation sheet system 3 to weaken the brightness of plasma bright spot 9 and bright spot mirror image 10 gradually, until plasma bright spot 9 and bright spot mirror image 10 can just be detected by CCD camera 12, the plasma bright spot 9 now observed by CCD micro imaging system and bright spot mirror image 10 minimum, the heating region at corresponding laser spot place is minimum, and the focal position now determined by plasma bright spot 9 is also accurate;
(5) finally locate: the material translation stage Z axis 8 again regulating material translating device 5, optical material 11 to be measured or to be processed is made to continue near plasma bright spot 9 along the optical axis of convergent lens 4, observe the image that image output device 14 exports in real time simultaneously, now can observe the plasma bright spot 9 at laser spot place and bright spot mirror image 10 also close to each other, as shown in Figure 3, according to mirror image principle, when optical material 11 to be measured or to be processed to plasma bright spot 9 near time, bright spot mirror image 10 can be close to plasma bright spot 9 with the point-to-point speed doubling material, material surface is then positioned at the center of plasma bright spot 9 and bright spot mirror image 10 line all the time, until observe plasma bright spot 9 and bright spot mirror image 10 overlaps completely from the image that image output device 14 exports, namely the positioning action of optical material 11 to be measured or to be processed at laser spot place is completed.
Under laser beam 2 in the present embodiment is in short focal length lens focus state as shown in Figure 4, by adopting short focus convergent lens 4, laser beam foucing spot size can be reduced on the one hand, be conducive to air ionization and launch plasma light line, the precision of processing can be improved on the other hand in Laser Processing; With shown in Fig. 5 utilize long-focus convergent lens 24 to focus on time long-focus focus 25 size that formed to carry out contrast known, under short focal length lens focus state, laser beam is dispersed larger, now more accurate to the positioning control of material surface before and after focus.
Claims (8)
1. a laser spot navigation system, comprise laser instrument (1), convergent lens (4) and material translating device (5), the laser beam (2) that described laser instrument (1) exports incides on convergent lens (4), the light beam exported after convergent lens (4) focuses on incides to be measured or optical material to be processed (11) surface of the upper clamping of material translating device (5), it is characterized in that: described laser beam (2) makes the air at laser spot place that ionization generation one plasma bright spot (9) occurs after convergent lens (4) focuses on, this plasma bright spot (9) forms a bright spot mirror image (10) by optical material (11) surface to be measured or to be processed, described laser spot navigation system also comprises the CCD micro imaging system that an image carrying out that simultaneously can gather plasma bright spot (9) and bright spot mirror image (10) exports, described CCD micro imaging system comprises microlens (13), the optical axis of described microlens (13) is arranged relative to the inclined light shaft of laser beam (2).
2. laser spot navigation system according to claim 1, is characterized in that: described convergent lens (4) is short focal length focusing len, and the focus controlling scope of described convergent lens (4) is 1mm to 30mm.
3. laser spot navigation system according to claim 1 and 2, is characterized in that: the beam quality M of the laser beam (2) that described laser instrument (1) exports
2factor control range is 1 ~ 2.
4. laser spot navigation system according to claim 1 and 2, it is characterized in that: described CCD micro imaging system also comprises CCD camera (12), image output device (14), data wire (15) and camera translating device (19), described CCD camera (12) is arranged on camera translating device (19), and be connected with image output device (14) by data wire (15), microlens (13) is installed in CCD camera (12).
5. laser spot navigation system according to claim 4, is characterized in that: the enlargement ratio of described microlens (13) is 1 to 40 times.
6. laser spot navigation system according to claim 1 and 2, it is characterized in that: the light path between described laser instrument (1) and convergent lens (4) is set up adjustable type laser attenuation sheet system (3), described laser attenuation sheet system (3) comprises attenuator fixed support (20), attenuator fixed support (20) is equiped with the laser attenuation sheet of variable number.
7. optical material to be measured or to be processed is positioned the method at laser spot place, comprises the following steps:
(1) plasma bright spot is formed: open laser instrument (1), make the laser beam (2) launched from laser instrument (1) first by adjustable type laser attenuation sheet system (3), reenter to be mapped to gathers on lens (4) for a moment, by regulating power output and/or the laser attenuation sheet system (3) of laser instrument (1), make the light beam exported after convergent lens (4) focuses in the air at focus place, produce a plasma bright spot (9);
(2) bright spot mirror image is formed: be clamped on material translating device (5) by optical material (11) to be measured or to be processed, make material surface perpendicular to laser beam (2), adjustment material translating device (5) makes material surface aim at plasma bright spot (9), described to be measured or optical material to be processed (11) is made along the optical axis of convergent lens (4) gradually near plasma bright spot (9) again by adjustment material translating device (5), until plasma bright spot (9) can form bright spot mirror image (10) clearly on described to be measured or optical material to be processed (11) surface, stop the movement of material translating device (5),
(3) output image is gathered: the CCD camera (12) being provided with microlens (13) by gathers the image of described plasma bright spot (9) and bright spot mirror image (10) simultaneously, and image is outputted in real time image output device (14), the camera translating device (19) of material translating device (5) and/or CCD camera (12) is constantly adjusted, until plasma bright spot (9) and bright spot mirror image (10) all enter the visual field of CCD camera (12) according to the image frame exported;
(4) finally locate: again regulate material translating device (5), described to be measured or optical material to be processed (11) is made to continue near plasma bright spot (9) along the optical axis of convergent lens (4), until observe plasma bright spot (9) and bright spot mirror image (10) overlaps completely from the image that image output device (14) exports, complete the positioning action of optical material to be measured or to be processed at laser spot place.
8. method optical material to be measured or to be processed being positioned laser spot place according to claim 7, it is characterized in that, between described step (3) and step (4), increase the operating procedure that regulates bright spot size, the concrete operations mode of this step is: by regulate laser instrument (1) power output and/or laser attenuation sheet system (3) to weaken the brightness of described plasma bright spot (9) and bright spot mirror image (10) gradually, until plasma bright spot (9) and bright spot mirror image (10) can just be detected by described CCD camera (12).
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