CN102974936A - System for laser focus positioning and method for positioning material on laser focus point - Google Patents
System for laser focus positioning and method for positioning material on laser focus point Download PDFInfo
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- CN102974936A CN102974936A CN2012104319036A CN201210431903A CN102974936A CN 102974936 A CN102974936 A CN 102974936A CN 2012104319036 A CN2012104319036 A CN 2012104319036A CN 201210431903 A CN201210431903 A CN 201210431903A CN 102974936 A CN102974936 A CN 102974936A
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Abstract
The invention discloses a system for laser focus positioning. The system for the laser focus positioning comprises a laser device, a convergent lens, a material translation device. A laser beam output from the laser device incidents on the convergent lens and incidents on the surface of an optical material which is clamped on the material translation device after focalized. A plasma body bright spot is produced after the laser beam is focalized and a bright spot mirror image is formed by the bright spot through the surface of the optical material. A charge coupled device (CCD) micro imaging system which is used for simultaneously collecting and outputting the images of the plasma body bright spot and the bright spot mirror image is further arranged. The invention further discloses a method for positioning the optical material on a laser focus point. The method includes that after focalized and output, the laser beam produces the plasma body bright spot by adjusting the laser device and the like, the surface of the material is controlled to approach the plasma body bright spot until the bright spot mirror image is formed, the plasma body bright spot and the bright spot mirror image are enabled to enter a view field of the CCD micro imaging system until a complete registration of the plasma body bright spot and the bright spot mirror image is achieved. The system for the laser focus positioning and the method for positioning the material on the laser focus point have the advantages of being convenient to operate, high in positioning precision and small in artificial factor intervention and the like.
Description
Technical field
The present invention relates to a kind of apparatus and method to material surface location in the optical material surface laser damage threshold measurement (or surface laser process), relate in particular to a kind of navigation system and localization method thereof of laser spot.
Background technology
Laser forms minimum spot size through convergent lens system in the focal position, and reaches maximum power density, utilizes these characteristics focusing to position.In the surface laser damage threshold of the optical materials such as optical window glass, film and crystal is measured, material surface is positioned at the focal position can reduces the damage difficulty.And, in the accurate process operation of laser, material surface is accurately positioned in the focal position can realizes the highest machining accuracy.
Under the light laser effect, the materials such as optical window glass, film-substrate and crystal can produce nonlinear effect, such as self-focusing effect.This effect can make incident laser form converging action at material internal, and accelerated material damages, thereby affects the measurement of surface damage threshold value.Adopt large-numerical aperture, weak point focal length system that laser beam is focused on, can form less focused spot size and larger convergence angle, assurance only has the laser power density of focal position can reach the damage threshold of material, and before and after the focus, laser beam is dispersed rapidly, intensity descends rapidly, but the establishment nonlinear optical effect is on the impact of threshold measurement.Simultaneously, less focal beam spot can make the precision of Laser Processing higher.
When incident laser was plane wave, the Airy disc diameter that is focused at the formation of focus place through lens was:
Wherein, λ is optical maser wavelength, and f is the focusing system focal length, and D is the focusing system aperture.As seen, in theoretical situation, the focal beam spot size is directly proportional with the convergence yoke focal length, and focal length is less, and the focused spot size that obtains is also less.Under the actual conditions, laser output laser beam is not the ideal plane ripple, so focal beam spot is greater than theoretical value.The focal beam spot size is actual to be determined jointly by beam quality and convergence yoke, thereby the laser power density at focus place is also determined jointly by both and laser output power.
Material is ionized, and launch the observable plasma light of naked eyes, this effect has been applied to manual focus operation.Spot area is observed on limit, mobile material position, executor limit in operation, stops to move when plasma light such as white light occurring, finishes material surface at the positioning action of focus.Different implementation effects can appear because of executor's difference in the method.
Further, utilize photoelectric sensor to survey plasma light, can realize the automatic location of focal position, for example, Japanese documentation Unexamined Patent 6-7980 communique.When the plasma light that utilizes laser action material surface to be measured or to be processed to form carries out the focus location to material, at first can because the laser spot zone itself exists the certain space yardstick to bring position error, can't determine whether material surface is positioned at the focus area center.Especially under the short focal length lens focused condition, because laser beam is dispersed before and after focus fast, this position error will make practical function at the laser spot size of material surface greater than the focus spot size, thereby affect the measurement result of surface damage threshold value and reduce machining accuracy.And because identical laser intensity is different at the plasma light intensity that the different materials surface excitation goes out, therefore, difference can appear because material is different in the effect of location.In addition, the size of focus area and material surface are to the direct tracking observation of the distance of focus, and position error is difficult to control.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, provides a kind of precision high, simple in structure, easy to make, adaptable laser spot navigation system.Also provide a kind of easy and simple to handle, positioning accuracy is high, the artifact intervention is less, the method that optical material surface to be measured or to be processed is positioned the laser spot place of wide accommodation.
For solving the problems of the technologies described above, the technical scheme that the present invention proposes is a kind of laser spot navigation system, comprises laser instrument, convergent lens and material translating device; The laser beam of described laser instrument output impinges perpendicularly on the convergent lens, after convergent lens focuses on, reenter be mapped to clamping on the material translating device with optical material surface to be measured or to be processed, described laser beam makes the air at laser spot place that ionization occurs after convergent lens focuses on and produces first-class plasma bright spot, this plasma bright spot forms a bright spot mirror image by optical material surface to be measured or to be processed, and described laser spot navigation system also comprises the CCD micro imaging system that a cover can gather simultaneously the image of plasma bright spot and bright spot mirror image and carry out image output.
Above-mentioned laser spot navigation system goes for the convergent lens of various focal lengths, but utilizing short focal length lens to carry out in the tightly focusing situation, because the focus spot area is less, thereby easier improving laser power density forms air ionization; In addition, the laser-beam divergence degree is larger before and after the focus, and is stricter to the requirement of position error, use laser spot navigation system of the present invention can obtain better effect, therefore, described convergent lens is preferably short focal length focusing len, and its focus controlling scope is preferably 1mm to 30mm.
In the above-mentioned laser spot navigation system, the beam quality M of the laser beam of described laser instrument output
2Factor control range is preferably 1～2, and described laser beam laser power density at the focus place after convergent lens focuses on can reach TW/m
2Magnitude.
In the above-mentioned laser spot navigation system, described CCD micro imaging system preferably includes CCD camera, microlens, camera translating device, data wire and image output device, described CCD camera is installed on the camera translating device, described CCD camera is connected with described image output device by data wire, and microlens is installed on the CCD camera.The enlargement ratio of microlens is preferably 1 to 40 times in the described micro imaging system.
In the above-mentioned laser spot navigation system, preferably set up an adjustable type laser attenuation sheet system on the light path between described laser instrument and the convergent lens, described laser attenuation sheet system comprises the attenuator fixed support, is equiped with the laser attenuation sheet of variable number on the attenuator fixed support.In the operating process, by adding or reduce the realization of laser attenuation sheet at the attenuator fixed support to the adjusting of transmission laser intensity.
As a total technical conceive, the present invention also provides a kind of optical material to be measured or to be processed is positioned the method at laser spot place, may further comprise the steps:
(1) forms the plasma bright spot: open laser instrument, make the laser beam of from laser instrument, launching first by an adjustable type laser attenuation sheet system, incide again and gather on the lens for a moment, control the laser power that incides on the convergent lens by power output and/or the laser attenuation sheet system that regulates laser instrument, the short focal length convergent lens control of recycling focal spot size makes the laser power density at focus place reach 10
12W/m
2Magnitude forms a plasma bright spot thereby produce air ionization at the focus place;
(2) form the bright spot mirror image: optical material to be measured or to be processed is clamped on the material translating device, make material surface perpendicular to laser beam, adjusting the material translating device makes material surface aim at the plasma bright spot, again by adjust the material translating device make described optical material to be measured or to be processed along the optical axis of convergent lens gradually near the plasma bright spot, until the plasma bright spot can form clearly bright spot mirror image at described optical material surface to be measured or to be processed, stop the movement of material translating device;
(3) gather output image: by one the described plasma bright spot of CCD collected by camera of microlens and the image of bright spot mirror image are installed, and image outputed to image output device in real time, constantly adjust the camera translating device of material translating device and/or CCD camera according to the image frame of output, until plasma bright spot and bright spot mirror image all enter the visual field of CCD camera;
(4) final location: again regulate the material translating device, described optical material to be measured or to be processed is continued near the plasma bright spot along the optical axis of convergent lens, until from the image of image output device output, observe the plasma bright spot and the bright spot mirror image overlaps fully, finish optical material to be measured or to be processed at the positioning action at laser spot place.
The above-mentioned method that optical material to be measured or to be processed is positioned the laser spot place, between described step (3) and step (4), the preferred operating procedure that increases by an adjusting bright spot size, the concrete operations mode of this step is: the power output by regulating laser instrument and/or laser attenuation sheet system are to weaken gradually the brightness of described plasma bright spot and bright spot mirror image, until plasma bright spot and bright spot mirror image can just be detected by the CCD camera of described installation microscope head.
Technique scheme of the present invention is mainly based on following principle: utilize laser focusing to form air ionization at the focus place, thereby launch the plasma light line and form detectable plasma bright spot, this plasma bright spot can form a bright spot mirror image by optical material surface to be measured or to be processed, adjust again the visual field that the CCD micro imaging system makes the two be arranged in simultaneously the CCD camera, and by the aforesaid plasma bright spot of image output device Real Time Observation and bright spot mirror image; According to the mirror image principle, optical material surface to be measured or to be processed is with line vertical and five equilibrium plasma bright spot and bright spot mirror image, then it is close to the plasma bright spot to control optical material to be measured or to be processed, observe simultaneously gradually close process of CCD micro imaging system output picture applying plasma bright spot and bright spot mirror image, when the two is overlapped, namely finish material surface at the positioning action at focus place.
Compared with prior art, the invention has the advantages that:
(1) the technical scheme of the present invention plasma light that utilizes laser that air ionization is launched carries out the focus location as object of reference, rather than utilize laser directly to inspire the plasma of to be measured or optical material surface to be processed, so at first avoid material to rigidly connect and touched the position error that the focus area edge is namely caused by laser ionization;
(2) technical scheme of the present invention is to utilize laser that the ionisation effect of air is positioned, compare the mode of operation of utilizing laser that the ionisation effect of optical material is positioned, the present invention has got rid of the poor location opposite sex of bringing because of optical material laser ionization characteristic difference, in other words, the present invention is applicable to the location of the to be measured or optical material to be processed of unlike material, and can reach identical positioning accuracy, generally only require smooth smooth the getting final product of optical material surface;
(3) technical scheme of the present invention can observe from the side of focus area the size in air ionization zone by introducing the CCD micro imaging system, utilize the mirror image principle can easily optical material surface to be measured or to be processed be positioned at the center of focus area, easy and simple to handle, directly perceived, be conducive to further improve positioning accuracy.
Generally speaking, navigation system of the present invention has precision height, characteristics simple in structure, easy to make, adaptable, match with it, localization method of the present invention not only easy and simple to handle, positioning accuracy is high, and the artifact intervention is less, wide accommodation, technical scheme of the present invention is measured by the damage threshold of subsequent optical material (such as optical window glass, film and crystalline material etc.) and high-precision surface is processed significant.
Description of drawings
Fig. 1 is structural representation and the schematic diagram of the laser spot navigation system in the embodiment of the invention.
Fig. 2 is the structural representation of adjustable type laser attenuation sheet system in the embodiment of the invention.
Fig. 3 is the moving direction schematic diagram of detected materials and bright spot mirror image in the localization method of the embodiment of the invention.
Fig. 4 adopts short focal length lens to focus on the focus spot schematic diagram that obtains in the embodiment of the invention.
Fig. 5 adopts the common type of focusing to obtain the focus spot schematic diagram in the embodiment of the invention.
Marginal data:
1, laser instrument; 2, laser beam; 3, laser attenuation sheet system; 4, convergent lens; 5, material translating device; 6, material translation stage Y-axis; 7, material translation stage X-axis; 8, material translation stage Z axis; 9, plasma bright spot; 10, bright spot mirror image; 11, optical material to be measured or to be processed; 12, CCD camera; 13, microlens; 14, image output device; 15, data wire; 16, camera translation stage Z axis; 17, camera translation stage Y-axis; 18, camera translation stage X-axis; 19, camera translating device; 20, attenuator fixed support; 21, the first laser attenuation sheet; 22, the second laser attenuation sheet; 23, the 3rd laser attenuation sheet; 24, long-focus convergent lens; 25, long-focus lens focus.
The specific embodiment
The invention will be further described below in conjunction with Figure of description and specific embodiment.
Embodiment:
A kind of as shown in Figure 1 laser spot navigation system of the present invention, comprise laser instrument 1, adjustable type laser attenuation sheet system 3, convergent lens 4, material translating device 5 and CCD micro imaging system, the laser beam 2 of laser instrument 1 output passes through first laser attenuation sheet system 3, the optical axis that is parallel to again convergent lens 4 impinges perpendicularly on the convergent lens 4, and the light beam of output incides optical material to be measured or to be processed 11 surfaces of clamping on the material translating device 5 after convergent lens 4 focuses on.Laser instrument 1 output wavelength of present embodiment is 800nm, and maximum output mean power is 5W, beam quality factor M
2Be 1.2.The convergent lens 4 of present embodiment is a short focal length focusing len, and its focal length is 10mm.As shown in Figure 2, the adjustable type laser attenuation sheet system 3 of present embodiment comprises an attenuator fixed support 20, be equiped with the first laser attenuation sheet 21, the second laser attenuation sheet 22 and the 3rd laser attenuation sheet 23 that parallel interval is arranged on the attenuator fixed support 20, these three laser attenuation sheets all are laid on the propagation light path of laser beam 2 and perpendicular to the incident direction of laser beam 2.The material translating device 5 of present embodiment is three-dimensional adjustable type mobile device, its three dimensions refer to respectively material translation stage Y-axis 6, material translation stage X-axis 7 and material translation stage Z axis 8, wherein make material translation stage Z axis 8 be parallel to the optical path direction (being the optical axis direction of convergent lens 4) of laser beam 2, material translation stage Y-axis 6 and material translation stage X-axis 7 are perpendicular to the optical path direction of laser beam 2.Optical material 11 to be measured or to be processed is installed on the material translating device 5, and makes material surface perpendicular to laser beam 2.
In the present embodiment, laser beam 2 focuses on through convergent lens 4, produce air ionization and form plasma bright spot 9, this plasma bright spot 9 forms a bright spot mirror image 10 by optical material to be measured or to be processed 11 surfaces, and the CCD micro imaging system of installing microlens 13 can gather simultaneously the image of plasma bright spot 9 and bright spot mirror image 10 and output in real time on the image output device 14.The CCD micro imaging system of present embodiment is installed in the side that laser beam 2 is propagated light path, comprise CCD camera 12, microlens 13, the image output device of camera translating device 19 and image output device 14(present embodiment refers to be equipped with IMAQ, the computer for the treatment of system, and this computer is with the display device of output image), the enlargement ratio of microlens 13 is 10 times, CCD camera 12 is installed on the camera translating device 19, CCD camera 12 is connected with image output device 14 by data wire 15, and the image frame that CCD camera 12 is taken can be exported in real time by the display of image output device 14.For guaranteeing that whole CCD micro imaging system can not cause obstruction to beam propagation, material translation and imaging, the operating distance of microlens 13 is 30mm in the present embodiment, and the optical axis included angle of the optical axis of microlens 13 and laser beam 2 is about 45 °.Camera translating device 19 in the present embodiment is similarly three-dimensional adjustable type mobile device, its three dimensions refer to respectively camera translation stage Z axis 16, camera translation stage Y-axis 17 and camera translation stage X-axis 18, wherein camera translation stage Z axis 16 is controlled the distance of microlens 13 and plasma bright spot 9, and the plane at camera translation stage Y-axis 17 and camera translation stage X-axis 18 places and the angle of convergent lens 4 optical axises are about 45 °.
A kind ofly of the present invention optical material to be measured or to be processed is positioned the method at laser spot place, the method is used the above-mentioned laser spot navigation system of present embodiment, specifically may further comprise the steps:
(1) forms the plasma bright spot: open laser instrument 1, make the laser beam 2 of emission from laser instrument 1 first by the laser attenuation sheet system 3 of an adjustable type, impinge perpendicularly on again one and assemble on the lens 4, after convergent lens 4 outputs, form laser spot; For example adjust the first laser attenuation sheet 21, the second laser attenuation sheet 22 and the 3rd laser attenuation sheet 23 laying reduction attenuations by power output and/or the laser attenuation sheet 3(of system that regulates laser instrument 1), making the laser power that arrives convergent lens 4 surfaces is 5W, obtaining focus place spot diameter after convergent lens 4 focuses on is 6 μ m, and average laser power density is 0.18 * 10
12W/m
2, under this power density, the air at focus place is ionized and produces the observable plasma bright spot 9 of naked eyes;
(2) form the bright spot mirror image: optical material 11 to be measured or to be processed is clamped on the material translating device 5, makes material translation stage Z axis 8 parallel with the optical axis of convergent lens 4, material surface is perpendicular to the propagation light path of laser beam 2 at this moment; Adjust first material translation stage Y-axis 6 and the material translation stage X-axis 7 of material translating device 5, make material surface aim at the plasma bright spot 9 of above-mentioned formation, again by adjusting the material translation stage Z axis 8 of material translating device 5, make optical material 11 to be measured or to be processed along the optical axis of convergent lens 4 gradually near plasma bright spot 9, until plasma bright spot 9 can form clearly bright spot mirror image 10 on optical material to be measured or to be processed 11 surfaces, (the light path adjusting stage of this step does not make material surface contact plasma bright spot 9 to stop the movement of material translating device 5, in order to avoid laser ablation occurs optical material 11 to be measured or to be processed, the distance at interval is as the criterion with the clear bright spot mirror image 10 of observing of lucky energy);
(3) gather output image: the image that gathers simultaneously above-mentioned plasma bright spot 9 and bright spot mirror image 10 by the CCD camera 12 of installing microlens 13, and image outputed to image output device 14 in real time, during collection first with the microlens 13 of the CCD camera 12 plasma bright spot 9 over against the focus place, and the image of plasma bright spot 9 exported in real time by image output device 14, constantly adjust the camera translating device 19 of CCD camera 12 according to the image frame of output, make plasma bright spot 9 blur-free imagings at CCD micro imaging system focusing place, further regulate material translating device 5 and make material surface further near plasma bright spot 9, all enter the visual field of CCD camera 12 to guarantee plasma bright spot 9 and bright spot mirror image 10; All require the microlens 13 can not contact measured or optical material to be processed 11 with the adjustment process of the layout of the CCD camera 12 of microlens 13 and camera translating device 19, can not stop the propagation light path of laser beam 2;
(4) regulate the bright spot size: the power output by regulating laser instrument 1 and/or laser attenuation sheet system 3 are to weaken gradually the brightness of plasma bright spot 9 and bright spot mirror image 10, until plasma bright spot 9 and bright spot mirror image 10 can just be detected by CCD camera 12, plasma bright spot 9 and bright spot mirror image 10 minimums that observe by the CCD micro imaging system this moment, the plasma zone at corresponding laser spot place is minimum, and the focal position that determine by plasma bright spot 9 this moment is also accurate;
(5) final location: the material translation stage Z axis 8 of again regulating material translating device 5, optical material 11 to be measured or to be processed is continued near plasma bright spot 9 along the optical axis of convergent lens 4, observe simultaneously the in real time image of output of image output device 14, can observe the plasma bright spot 9 at laser spot place and bright spot mirror image 10 this moment also mutually close, as shown in Figure 3, according to the mirror image principle, when optical material 11 to be measured or to be processed to plasma bright spot 9 near the time, bright spot mirror image 10 can be close to plasma bright spot 9 with the point-to-point speed that doubles material, material surface then is positioned at the center of plasma bright spot 9 and bright spot mirror image 10 lines all the time, until from the image of image output device 14 output, observe plasma bright spot 9 and bright spot mirror image 10 overlaps fully, namely finish optical material 11 to be measured or to be processed at the positioning action at laser spot place.
Claims (8)
1. laser spot navigation system, comprise laser instrument (1), convergent lens (4) and material translating device (5), the laser beam (2) of described laser instrument (1) output incides on the convergent lens (4), the light beam of output incides optical material to be measured or to be processed (11) surface of the upper clamping of material translating device (5) after convergent lens (4) focuses on, it is characterized in that: described laser beam (2) makes the air at laser spot place that ionization occurs after convergent lens (4) focuses on and produces a plasma bright spot (9), this plasma bright spot (9) forms a bright spot mirror image (10) by optical material to be measured or to be processed (11) surface, and described laser spot navigation system also comprises the go forward side by side CCD micro imaging system of line output of an image that can gather simultaneously plasma bright spot (9) and bright spot mirror image (10).
2. laser spot navigation system according to claim 1, it is characterized in that: described convergent lens (4) is short focal length focusing len, and the focus controlling scope of described convergent lens (4) is that 1mm is to 30mm.
3. laser spot navigation system according to claim 1 and 2 is characterized in that: the beam quality M2 factor control range of the laser beam (2) of described laser instrument (1) output is 1～2.
4. laser spot navigation system according to claim 1 and 2, it is characterized in that: described CCD micro imaging system comprises CCD camera (12), microlens (13), image output device (14), data wire (15) and camera translating device (19), described CCD camera (12) is installed on the camera translating device (19), and be connected with image output device (14) by data wire (15), microlens (13) is installed on the CCD camera (12).
5. laser spot navigation system according to claim 4, it is characterized in that: the enlargement ratio of described microlens (13) is 1 to 40 times.
6. laser spot navigation system according to claim 1 and 2, it is characterized in that: set up an adjustable type laser attenuation sheet system (3) on the light path between described laser instrument (1) and the convergent lens (4), described laser attenuation sheet system (3) comprises attenuator fixed support (20), is equiped with the laser attenuation sheet of variable number on the attenuator fixed support (20).
7. one kind is positioned optical material to be measured or to be processed for the method at laser spot place, may further comprise the steps:
(1) forms the plasma bright spot: open laser instrument (1), make the laser beam (2) of emission from laser instrument (1) first by an adjustable type laser attenuation sheet system (3), incide again and gather on the lens (4) for a moment, by regulating power output and/or the laser attenuation sheet system (3) of laser instrument (1), make the light beam of output after convergent lens (4) focuses in the air at focus place, produce a plasma bright spot (9);
(2) form the bright spot mirror image: optical material to be measured or to be processed (11) is clamped on the material translating device (5), make material surface perpendicular to laser beam (2), adjusting material translating device (5) makes material surface aim at plasma bright spot (9), again by adjust material translating device (5) make described optical material to be measured or to be processed (11) along the optical axis of convergent lens (4) gradually near plasma bright spot (9), until plasma bright spot (9) can form clearly bright spot mirror image (10) on described optical material to be measured or to be processed (11) surface, stop the movement of material translating device (5);
(3) gather output image: the image that gathers simultaneously described plasma bright spot (9) and bright spot mirror image (10) by a CCD camera (12) that microlens (13) is installed, and image outputed to image output device (14) in real time, constantly adjust the camera translating device (19) of material translating device (5) and/or CCD camera (12) according to the image frame of output, until plasma bright spot (9) and bright spot mirror image (10) all enter the visual field of CCD camera (12);
(4) final location: again regulate material translating device (5), described optical material to be measured or to be processed (11) is continued near plasma bright spot (9) along the optical axis of convergent lens (4), until from the image of image output device (14) output, observe plasma bright spot (9) and bright spot mirror image (10) overlaps fully, finish optical material to be measured or to be processed at the positioning action at laser spot place.
8. the method that optical material to be measured or to be processed is positioned the laser spot place according to claim 7, it is characterized in that, between described step (3) and step (4), increase the operating procedure of an adjusting bright spot size, the concrete operations mode of this step is: the power output by regulating laser instrument (1) and/or laser attenuation sheet system (3) are to weaken gradually the brightness of described plasma bright spot (9) and bright spot mirror image (10), until plasma bright spot (9) and bright spot mirror image (10) can just be detected by described CCD camera (12).
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| CN112935530A (en) * | 2021-04-25 | 2021-06-11 | 山东大学深圳研究院 | Method and device for determining pulse laser focus position |
| CN112935530B (en) * | 2021-04-25 | 2022-12-13 | 山东大学深圳研究院 | Method and device for determining position of pulse laser focus |
| CN113484322A (en) * | 2021-07-13 | 2021-10-08 | 天津大学 | Optical tweezers super-resolution imaging method and system capable of feeding back axial optical trap position in real time |
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