CN112378623A - Light beam quality measuring method and system - Google Patents
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Abstract
The application relates to a method and a system for measuring the quality of a light beam, wherein the method comprises the following steps: the method comprises the steps that a light beam to be measured is emitted into a focusing lens to be focused, and the focused light beam is emitted into a beam splitter group; the beam splitter group comprises a plurality of beam splitters which are uniformly arranged on the optical axis of the focusing lens and intersect the optical axis at the center of the mirror surface of the beam splitter; detecting the spot size of the light beam refracted by each spectroscope by each CCD; according to the size of the measured light spot, the corresponding CCDs are respectively controlled to move along the movable route, and the size of the light spot when the light spot is minimum is measured; the movable route is vertical to the optical axis and is the center of the mirror surface of the spectroscope, and the movable route of the CCD is equal to the distance between two adjacent spectroscopes; according to the size of the light spot measured by each CCD and the corresponding first distance, fitting to obtain a relation curve between the size of the light spot and the first distance; and calculating the current beam quality according to the relationship curve of the spot size and the first distance. The method and the device have the advantages of high measuring speed and good real-time performance.
Description
Technical Field
The present application relates to the field of laser technology, and in particular, to a method and system for measuring beam quality.
Background
The beam quality analyzer is a common instrument for judging the quality of the laser beam, and can measure quality parameters such as M2, astigmatism and the like of the laser beam, so that the quality of the laser beam is judged according to the quality parameters. At present, a beam quality analyzer firstly focuses a laser beam through a focusing lens (a convex lens with a certain focal length), then measures the sizes of laser spots at different positions after focusing through a Charge-coupled Device (CCD), and finally obtains quality parameters of laser such as M2, astigmatism and the like through calculation; in the beam quality analyzer, the focusing lens and the CCD are fixed, a delay line arranged on the mechanical translation stage is arranged in front of the focusing lens and the CCD, and the distance between the CCD and the focusing lens is changed by changing the length of the delay line, so that the measurement of the laser spot sizes at different positions behind the focusing lens is realized.
However, when the quality of the laser beam is measured by the beam quality analyzer, the CCD can only obtain one spot image at a time, and the measurement of the spot sizes at different positions behind the focusing lens needs to be realized by changing the length of the delay line, which is controlled by the mechanical translation stage, which has a limited speed when performing accurate translation, so that the measurement of the spot sizes of all the laser beams at different positions after focusing is often completed for over one minute, which cannot realize real-time measurement of the quality of the laser beam, and the laser quality may change to some extent during the measurement process, resulting in a large error in the measurement.
Disclosure of Invention
In order to improve the measuring speed of the light beams at different positions, the application provides a light beam quality measuring method and a light beam quality measuring system.
In a first aspect, the present application provides a method for measuring a beam quality, which adopts the following technical scheme:
a method of beam quality measurement comprising the steps of:
the method comprises the steps that a light beam to be measured is emitted into a focusing lens to be focused, and the focused light beam is emitted into a beam splitter group; the spectroscope group comprises a plurality of spectroscopes, the spectroscopes are uniformly arranged on the optical axis of the focusing lens and intersect with the optical axis at the center of the lens surface of the spectroscope, and the included angle between the lens surface of the spectroscope and the optical axis is 45 degrees;
the light beams refracted by each spectroscope are respectively emitted into corresponding CCDs, and the size of the emitted light spots is detected by each CCD;
according to the size of the measured light spot, the corresponding CCDs are respectively controlled to move along the movable route, and the size of the light spot when the light spot is minimum is measured; the movable route is vertical to the optical axis, is the center of the mirror surface of the spectroscope and is superposed with the center line of the CCD, and the movable route of the CCD is equal to the distance between two adjacent spectroscopes;
according to the size of the light spot measured by each CCD and the corresponding first distance, fitting to obtain a relation curve between the size of the light spot and the first distance; the first distance is the distance between the spectroscope and the focusing lens corresponding to the CCD;
and calculating the current beam quality according to the relationship curve of the spot size and the first distance.
By adopting the technical scheme, the light beams at different positions can be measured simultaneously, the real-time measurement of the quality of the light beams at different positions is realized, and the measurement time is greatly reduced.
Optionally, the spectroscope group includes an even number of spectroscopes, and the mirror surface of two adjacent spectroscopes forms an angle of 90 degrees.
By adopting the technical scheme, the optical path deviation brought by the spectroscope can be corrected.
Optionally, the focusing lens with the corresponding focal length is replaced according to the light beams to be measured with different divergence angles.
By adopting the technical scheme, the quality measurement of the light beams with different divergence angles can be realized.
Optionally, the light beams refracted by each beam splitter are respectively incident on a corresponding variable attenuation sheet, the variable attenuation sheets are controlled to attenuate the intensity of the refracted light beams, and the attenuated light beams are incident on corresponding CCDs.
By adopting the technical scheme, the phenomenon that the CCD is damaged due to overlarge intensity of the light beam emitted into the CCD can be avoided.
Optionally, the controlling the variable attenuation sheet to attenuate the intensity of the refracted light beam includes:
calculating first attenuation power of the variable attenuation sheet according to the intensity of the current light beam detected by the CCD and a preset optimal intensity value;
and controlling and adjusting the attenuation power of the variable attenuation sheet to a first attenuation power.
By adopting the technical scheme, the optimal measurement of the size of the light spot can be realized under the condition of ensuring that the CCD is not damaged.
In a second aspect, the present application provides a light beam quality measurement system, which adopts the following technical solutions:
a beam quality measurement system comprising:
a focusing lens device for focusing the incident light beam to be measured;
the spectroscope group comprises a plurality of spectroscopes, the spectroscopes are uniformly arranged on the optical axis of the focusing lens device and intersect with the optical axis at the center of the mirror surface of the spectroscope, and the included angle between the mirror surface of the spectroscope and the optical axis is 45 degrees; the light splitting device is used for splitting the focused light beam;
the CCD is corresponding to one spectroscope, and the spot size of the light beam refracted by each spectroscope is detected;
the control module is used for respectively controlling the corresponding CCDs to move along a movable route according to the size of each CCD measured light spot, and measuring the size of the light spot of the minimum light spot; according to the size of the light spot measured by each CCD and the corresponding first distance, fitting to obtain a first curve of the relation between the size of the light spot and the first distance, and calculating the current light beam quality according to the first curve; the movable route is perpendicular to the optical axis, is the center of the mirror surface of the spectroscope and is superposed with the center line of the CCD, and the movable route of the CCD is equal to the distance between two adjacent spectroscopes.
By adopting the technical scheme, the light beams at different positions can be measured simultaneously, the real-time measurement of the quality of the light beams at different positions is realized, the measurement time is greatly reduced, the time for debugging the quality of the light beams in the debugging process of the laser is greatly reduced, and the production efficiency of the laser is greatly improved.
Preferably, the spectroscope group comprises an even number of spectroscopes, and the mirror surfaces of two adjacent spectroscopes form an angle of 90 degrees.
By adopting the technical scheme, the optical path deviation brought by the spectroscope can be corrected.
Optionally, the focusing lens device can replace the focusing lens with the corresponding focal length according to different divergence angles of the light beam to be measured.
By adopting the technical scheme, the quality measurement of the light beams with different divergence angles can be realized.
Optionally, the system further comprises a plurality of variable attenuation panels;
each variable attenuation piece attenuates the intensity of the light beam refracted by the corresponding spectroscope, and the attenuated light beam is emitted to the corresponding CCD.
By adopting the technical scheme, the phenomenon that the CCD is damaged due to overlarge intensity of the light beam emitted into the CCD can be avoided.
Optionally, the control module further calculates a first attenuation power of the variable attenuation sheet according to the intensity of the current light beam detected by the CCD and a preset optimal intensity value, and adjusts the attenuation power of the variable attenuation sheet to the first attenuation power.
By adopting the technical scheme, the optimal measurement of the size of the light spot can be realized under the condition of ensuring that the CCD is not damaged.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the beam quality at different positions is measured simultaneously by the beam splitter group and the CCDs, so that the real-time measurement of the beam quality at different positions is realized, the measurement time is greatly reduced, and for the beam with larger beam quality change due to shorter measurement time, the error caused by the change of the beam quality in the measurement process is avoided, and the accuracy of the measurement result can be effectively improved;
2. the variable attenuation sheet ensures that the intensity of the light beam incident to the CCD does not exceed the maximum value allowed to be received by the CCD, so that the damage to the CCD is avoided;
3. and the focusing lens is replaced, so that the quality detection of the light beams with different divergence angles is realized.
Drawings
Fig. 1 is a schematic structural diagram of a beam quality measurement system provided in an embodiment of the present application;
fig. 2 is a flowchart of a method for measuring beam quality according to an embodiment of the present disclosure.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is further described in detail below with reference to fig. 1-2 and the embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
The embodiment of the application discloses light beam quality measurement system includes:
a focusing lens device for focusing the incident light beam to be measured;
the spectroscope group comprises a plurality of spectroscopes, the spectroscopes are uniformly arranged on the optical axis of the focusing lens device and intersect with the optical axis at the center of the mirror surface of the spectroscope, and the included angle between the mirror surface of the spectroscope and the optical axis is 45 degrees; the light splitting device is used for splitting the focused light beam;
the CCD is corresponding to one spectroscope, and the spot size of the light beam refracted by each spectroscope is detected;
the control module is used for respectively controlling the corresponding CCDs to move along a movable route according to the size of each CCD measured light spot, and measuring the size of the light spot of the minimum light spot; according to the size of the light spot measured by each CCD and the corresponding first distance, fitting to obtain a first curve of the relation between the size of the light spot and the first distance, and calculating the current light beam quality according to the first curve; the movable route is perpendicular to the optical axis, is the center of the mirror surface of the spectroscope and is superposed with the center line of the CCD, and the movable route of the CCD is equal to the distance between two adjacent spectroscopes.
Referring to fig. 1, as an embodiment of a beam quality measuring system, the beam quality measuring system includes:
the focusing lens device 10, which includes at least a focusing lens, focuses the incident light beam to be measured. In the present embodiment, the focusing lens device 10 is designed to be changeable, and the focusing lens with the corresponding focal length can be replaced according to the divergence angle of the light beam to be measured (including replacing the focusing lens and replacing the focusing lens device 10 with the focusing lens with different focal lengths), so as to measure the light beam with different divergence angles.
A spectroscope group 20 including a plurality of spectroscopes 21, each spectroscope 21 being uniformly arranged (the distance between two adjacent spectroscopes is the same) on the optical axis of the focusing lens device 10 and intersecting the optical axis at the center of the lens surface of the spectroscope 21, the included angle between the lens surface of the spectroscope 21 and the axis being 45 degrees; each beam splitter 21 is used for splitting the focused light beam, so that the beam splitter group 20 can separate the light beams at different positions behind the focusing lens device 10.
In order to solve the problem, in some embodiments of the present application, the light splitting mirror group 20 includes an even number of light splitting mirrors 21, and the mirror surfaces of two adjacent light splitting mirrors 21 form an angle of 90 degrees, so that when the mirror surfaces of two adjacent light splitting mirrors 21 form an angle of 90 degrees, two light splitting mirrors 21 are symmetrical, and the latter light splitting mirror 21 corrects the light path offset caused by the former light splitting mirror.
In some embodiments of the present application, the more the number of the beam splitters in the beam splitter group 20 is, the more the measurement points are, the more accurate the curve fitted by the control module is, the higher the measurement precision is, but the higher the system complexity is; the number of the spectroscopes is 12, so that the precision, the system complexity and the cost can be balanced, and the highest cost performance is achieved. Because the light beam quality measurement mainly depends on the size of a series of light spots two meters behind the focusing lens device 10, and the weight of the light spots between 30 centimeters behind the focusing lens device 10 to the fitting curve is not large, in summary, the spectroscope group 20 is arranged from 30 centimeters behind the focusing lens device 10 (the first spectroscope is arranged at 30 centimeters behind the focusing lens device 10), and the distance between two adjacent spectroscopes is (200-30) ÷ the number n of spectroscopes, the cost and the system complexity of the application can be further reduced. For example, the distance between the beam splitters is 15cm, the first beam splitter is arranged 30cm behind the focusing lens device 10, the number of the beam splitters is 12, and the maximum measurement distance of the beam splitters is 30+ (12-1) × 15 ═ 195cm at this time.
The control module 40 is used for respectively controlling the corresponding CCDs to move along the movable route according to the size of the light spot measured by each CCD, and measuring the size of the light spot of the minimum light spot; according to the size of the light spot measured by each CCD and the corresponding first distance, fitting to obtain a first curve of the relation between the size of the light spot and the first distance, and calculating the current light beam quality according to the first curve; the movable route is vertical to the optical axis, is the center of the lens surface of the spectroscope and is superposed with the center line of the CCD, and the movable route of the CCD is equal to the distance between two adjacent spectroscopes, so that the size of a light spot at the interval position of the spectroscope can be measured.
In this embodiment, the device further includes a translation base installed on each CCD and a mechanical control module connected to each translation base, where the mechanical control module controls the translation base to move accurately according to instructions (including at least a moving direction and a moving distance) of the control module.
In order to avoid damage to the CCD and reduction in service life due to excessive focused beam power, the present embodiment further includes a plurality of variable attenuation sheets; each variable attenuation sheet is arranged in front of the CCD, light beams refracted out of the corresponding spectroscope enter the variable attenuation sheet for power attenuation, and the power of the light beams entering the corresponding CCD is guaranteed not to exceed the maximum power which can be received by the CCD. In this embodiment, in order to further ensure the measurement result, the control module 30 further presets an optimal intensity value of the CCD incident beam, where the optimal intensity value does not damage the CCD and the measurement effect is optimal, the control module 30 receives the intensity of the current light beam detected by the CCD, compares the current intensity with the optimal intensity value, if the current intensity is consistent with the optimal intensity value, does not change the attenuation degree of the variable attenuation sheet, and if the current intensity is different from the optimal intensity value, the control module 30 calculates the first attenuation power of the variable attenuation sheet and adjusts the attenuation power of the variable attenuation sheet to the first attenuation power; the first attenuation power is the attenuation power which can enable the variable attenuation sheet to attenuate the current light beam intensity to the optimal intensity value.
In addition, this embodiment further includes an optical garbage can 50 for collecting optical garbage in the system, and avoid laser to cause damage to environment or experimenters.
According to the embodiment of the application, the light beams at different positions are simultaneously measured through the light splitting mirror group and the CCDs, the real-time measurement of the light beam quality at different positions is realized, the measurement time is greatly reduced, the time for debugging the light beam quality in the laser debugging process is greatly reduced, and the production efficiency of the laser is greatly improved. In addition, the measuring time is shortened, so that errors caused by the change of the quality of the light beam in the measuring process are avoided for the light beam with larger quality change, and the accuracy of the measuring result can be effectively improved.
The embodiment of the application also discloses a light beam quality measuring method, which refers to fig. 2 and comprises the following steps:
step S100, a light beam to be measured is emitted into a focusing lens to be focused, and the focused light beam is emitted into a beam splitter group; the beam splitter group comprises a plurality of beam splitters, the beam splitters are uniformly arranged on the optical axis of the focusing lens and intersect the optical axis at the center of the mirror surface of the beam splitter, and the included angle between the mirror surface of the beam splitter and the optical axis is 45 degrees; in this embodiment, the method further comprises replacing the focusing lens with a corresponding focal length according to the light beams to be measured with different divergence angles. In this embodiment, after the light beam to be measured is focused by the focusing lens, the light spot size W and the distance z between the CCD and the focusing lens satisfy the following formula:
wherein, W0Is the size of the beam waist of the spot, z0The spot waist position, and θ the spot divergence angle.
And S200, respectively emitting the light beams refracted by each spectroscope into corresponding CCDs, and detecting the sizes of the emitted light spots by each CCD, namely the primary measurement result. In this embodiment of the application, the CCD is a CCD camera, and the measurement result is a spot intensity distribution image at different positions after the focusing lens, and other light beam information such as the spot size can be calculated from the spot intensity distribution image.
Step S300, respectively controlling the corresponding CCDs to move along a movable route according to the sizes of the light spots measured in the step S200, measuring the size of the light spot when the light spot is minimum, namely finely adjusting the measuring position by translating the CCDs according to the result of primary measurement, and recording the size of the light spot measured by each CCD; the movable route is vertical to the optical axis, is the center of the lens surface of the spectroscope and is superposed with the center line of the CCD, and the movable route of the CCD is equal to the distance between two adjacent spectroscopes.
In this embodiment, according to the measurement of the light spot size, the corresponding CCDs are respectively controlled to move along the movable route, and the light spot size when the light spot is the smallest is measured, including:
sequencing the sizes of the light spots detected by the CCD in the step S200 to obtain a preset number of light spots with smaller sizes as preselected light spots;
simultaneously, the CCDs for measuring the size of the preselected light spot are independently controlled to move along a movable route (when the CCDs move, the CCDs are not influenced, and the moving action and the distance are not necessarily synchronous), and each CCD respectively measures the size of the light spot of the minimum light spot which can be measured by each CCD; in this embodiment, all CCDs may be shifted, and the number of preselected spots is not limited herein.
S400, fitting according to the size of the light spot measured by each CCD in the S300 and the corresponding first distance to obtain a relation curve of the size of the light spot and the first distance; the first distance is the distance between the spectroscope and the focusing lens corresponding to the CCD. In this embodiment, the spot size W of the spot on the x axis and the y axis can be calculated according to the spot intensity distribution image measured by each CC at different positions behind the focusing lensxAnd WyMeanwhile, the distance z corresponding to the CCD to the condenser lens is calculated, the light spot size W is taken as the ordinate of the relation curve between the light spot size and the first distance, and the distance z corresponding to the CCD to the condenser lens is taken as the abscissa of the relation curve between the light spot size and the first distanceAnd (4) coordinates.
And S500, calculating the current beam quality according to the relationship curve between the spot size and the first distance.
The relationship curve between the spot size and the first distance obtained in step S400 can be used to calculate the spot waist size W of the laser in the x-axis and y-axis directions0xAnd W0ySpot waist position z0xAnd z0xAngle of divergence of light spot thetaxAnd thetayAccording to M2And calculating M in the directions of the x axis and the y axis respectively by using an astigmatism calculation formula2And astigmatism, M2The calculation formula is as follows:
wherein λ is the laser wavelength.
The astigmatism calculation formula is as follows:
in this embodiment, the light beams refracted by each beam splitter are respectively incident on the corresponding variable attenuation sheets, the variable attenuation sheets are controlled to attenuate the intensity of the refracted light beams, and the attenuated light beams are incident on the corresponding CCDs, so that the phenomenon that the focused light beams are damaged by long-time incident CCDs due to overlarge power is avoided. In this embodiment, controlling the variable attenuation sheet to attenuate the intensity of the refracted light beam includes:
calculating first attenuation power of the variable attenuation sheet according to the intensity of the current light beam detected by the CCD and a preset optimal intensity value;
and controlling and adjusting the attenuation power of the variable attenuation sheet to the first attenuation power.
According to the embodiment of the application, the light beams at different positions are measured simultaneously, so that the real-time measurement of the quality of the light beams at different positions is realized, the measurement time is greatly reduced, the time for debugging the quality of the light beams in the laser debugging process is greatly reduced, and the production efficiency of the laser is greatly improved. In addition, the measuring time is shortened, so that errors caused by the change of the quality of the light beam in the measuring process are avoided for the light beam with larger quality change, and the accuracy of the measuring result can be effectively improved.
The foregoing is a preferred embodiment of the present application and is not intended to limit the scope of the application in any way, and any features disclosed in this specification (including the abstract and drawings) may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
Claims (10)
1. A method of measuring beam quality, characterized by: the method comprises the following steps:
the method comprises the steps that a light beam to be measured is emitted into a focusing lens to be focused, and the focused light beam is emitted into a beam splitter group; the spectroscope group comprises a plurality of spectroscopes, the spectroscopes are uniformly arranged on the optical axis of the focusing lens and intersect with the optical axis at the center of the lens surface of the spectroscope, and the included angle between the lens surface of the spectroscope and the optical axis is 45 degrees;
the light beams refracted by each spectroscope are respectively emitted into corresponding CCDs, and the size of the emitted light spots is detected by each CCD;
according to the size of the measured light spot, the corresponding CCDs are respectively controlled to move along the movable route, and the size of the light spot when the light spot is minimum is measured; the movable route is vertical to the optical axis, is the center of the mirror surface of the spectroscope and is superposed with the center line of the CCD, and the movable route of the CCD is equal to the distance between two adjacent spectroscopes;
according to the size of the light spot measured by each CCD and the corresponding first distance, fitting to obtain a relation curve between the size of the light spot and the first distance; the first distance is the distance between the spectroscope and the focusing lens corresponding to the CCD;
and calculating the current beam quality according to the relationship curve of the spot size and the first distance.
2. A beam quality measuring method according to claim 1, wherein: the spectroscope group comprises an even number of spectroscopes, and the mirror surfaces of two adjacent spectroscopes form an angle of 90 degrees.
3. A beam quality measuring method according to claim 1, wherein: and replacing the focusing lens with the corresponding focal length according to the light beams to be measured with different divergence angles.
4. A beam quality measuring method according to claim 1, wherein: and the light beams refracted by each spectroscope are respectively emitted into the corresponding variable attenuation sheet, the variable attenuation sheet is controlled to attenuate the intensity of the refracted light beams, and the attenuated light beams are emitted into the corresponding CCD.
5. A beam quality measuring method according to claim 4, wherein: controlling the variable attenuation sheet to attenuate the intensity of the refracted light beam, comprising:
calculating first attenuation power of the variable attenuation sheet according to the intensity of the current light beam detected by the CCD and a preset optimal intensity value;
and controlling and adjusting the attenuation power of the variable attenuation sheet to a first attenuation power.
6. A beam quality measurement system, characterized by: the method comprises the following steps:
a focusing lens device for focusing the incident light beam to be measured;
the spectroscope group comprises a plurality of spectroscopes, the spectroscopes are uniformly arranged on the optical axis of the focusing lens device and intersect with the optical axis at the center of the mirror surface of the spectroscope, and the included angle between the mirror surface of the spectroscope and the optical axis is 45 degrees; the light splitting device is used for splitting the focused light beam;
the CCD is corresponding to one spectroscope, and the spot size of the light beam refracted by each spectroscope is detected;
the control module is used for respectively controlling the corresponding CCDs to move along a movable route according to the size of each CCD measured light spot, and measuring the size of the light spot of the minimum light spot; according to the size of the light spot measured by each CCD and the corresponding first distance, fitting to obtain a first curve of the relation between the size of the light spot and the first distance, and calculating the current light beam quality according to the first curve; the movable route is perpendicular to the optical axis, is the center of the mirror surface of the spectroscope and is superposed with the center line of the CCD, and the movable route of the CCD is equal to the distance between two adjacent spectroscopes.
7. A beam quality measurement system according to claim 6, wherein: the spectroscope group comprises an even number of spectroscopes, and the mirror surfaces of two adjacent spectroscopes form an angle of 90 degrees.
8. A beam quality measurement system according to claim 6, wherein: the focusing lens device can replace the focusing lens with the corresponding focal length according to different divergence angles of the light beam to be measured.
9. A beam quality measurement system according to claim 6, wherein: the system further includes a plurality of variable attenuation sheets;
each variable attenuation piece attenuates the intensity of the light beam refracted by the corresponding spectroscope, and the attenuated light beam is emitted to the corresponding CCD.
10. A beam quality measurement system according to claim 9, wherein: the control module is also used for calculating first attenuation power of the variable attenuation sheet according to the intensity of the current light beam detected by the CCD and a preset optimal intensity value, and adjusting the attenuation power of the variable attenuation sheet to the first attenuation power.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113639964A (en) * | 2021-07-21 | 2021-11-12 | 武汉华臻志创科技有限公司 | Transmitter light beam quality detection system |
| CN113927191A (en) * | 2021-11-29 | 2022-01-14 | 广东宏石激光技术股份有限公司 | Laser processing light beam quality monitoring system and method |
| CN114593898A (en) * | 2022-05-07 | 2022-06-07 | 深圳市润之汇实业有限公司 | Lens quality analysis method, device, equipment and medium based on refraction data |
| CN115683576A (en) * | 2022-12-28 | 2023-02-03 | 中国科学院长春光学精密机械与物理研究所 | Detection device and method for optical coupling device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101644600A (en) * | 2008-12-25 | 2010-02-10 | 长春理工大学 | Embedded type laser beam quality measuring device |
| CN104359564A (en) * | 2014-11-19 | 2015-02-18 | 湖北三江航天红峰控制有限公司 | Pulse laser beam quality synchronous measuring system and synchronous control method thereof |
| CN105784334A (en) * | 2016-04-08 | 2016-07-20 | 中国人民解放军国防科学技术大学 | Fiber laser beam quality measurement method base on photoelectric detector and CCD camera |
| CN108287059A (en) * | 2018-01-16 | 2018-07-17 | 南京理工大学 | High-precision near-infrared laser beam quality measurement analysis device |
-
2020
- 2020-11-06 CN CN202011231540.2A patent/CN112378623A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101644600A (en) * | 2008-12-25 | 2010-02-10 | 长春理工大学 | Embedded type laser beam quality measuring device |
| CN104359564A (en) * | 2014-11-19 | 2015-02-18 | 湖北三江航天红峰控制有限公司 | Pulse laser beam quality synchronous measuring system and synchronous control method thereof |
| CN105784334A (en) * | 2016-04-08 | 2016-07-20 | 中国人民解放军国防科学技术大学 | Fiber laser beam quality measurement method base on photoelectric detector and CCD camera |
| CN108287059A (en) * | 2018-01-16 | 2018-07-17 | 南京理工大学 | High-precision near-infrared laser beam quality measurement analysis device |
Non-Patent Citations (4)
| Title |
|---|
| J. A. RUFF AND A. E. SIEGMAN: "Single-pulse laser beam quality measurements using a CCD camera system", 《APPLIED OPTICS》 * |
| 于永爱等: "激光束质量实时测量技术", 《中国激光》 * |
| 房滔等: "一种基于衍射光栅光束质量M2因子的实时检测技术", 《中国激光》 * |
| 陈诚等: "基于CCD测量激光光束质量M2", 《发光学报》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113639964A (en) * | 2021-07-21 | 2021-11-12 | 武汉华臻志创科技有限公司 | Transmitter light beam quality detection system |
| CN113927191A (en) * | 2021-11-29 | 2022-01-14 | 广东宏石激光技术股份有限公司 | Laser processing light beam quality monitoring system and method |
| CN113927191B (en) * | 2021-11-29 | 2023-08-18 | 广东宏石激光技术股份有限公司 | Laser processing beam quality monitoring system and method |
| CN114593898A (en) * | 2022-05-07 | 2022-06-07 | 深圳市润之汇实业有限公司 | Lens quality analysis method, device, equipment and medium based on refraction data |
| CN115683576A (en) * | 2022-12-28 | 2023-02-03 | 中国科学院长春光学精密机械与物理研究所 | Detection device and method for optical coupling device |
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