CN103246065A - Device for remotely and accurately focusing laser beam - Google Patents
Device for remotely and accurately focusing laser beam Download PDFInfo
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- CN103246065A CN103246065A CN2013101836459A CN201310183645A CN103246065A CN 103246065 A CN103246065 A CN 103246065A CN 2013101836459 A CN2013101836459 A CN 2013101836459A CN 201310183645 A CN201310183645 A CN 201310183645A CN 103246065 A CN103246065 A CN 103246065A
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Abstract
The invention provides a device for remotely and accurately focusing a laser beam. The device comprises two parts, i.e. a focusing device and a focus detection device, wherein the focus detection device consists of a focus detection beam reducer, a Hartman micro lens array and a charge-coupled device (CCD) camera, and is used for accurately detecting a defocusing amount of the laser beam in real time, and a translation platform carrying a focusing beam expander is controlled to move along an optical axis of the focusing beam expander through the detected defocusing amount to fulfill the aim of controlling the remote and accurate focusing of the laser beam. The device is simple in structure, high in focusing accuracy, convenient to use and suitable for a high-accuracy remote laser focusing system, and a focusing curve is not required to be calculated in advance.
Description
Technical field
The invention belongs to laser system Beam Control field, be specifically related to a kind of device of realizing the remote vernier focusing of laser beam.Be used for laser system, accurately change the remote focal position of laser beam in real time.
Background technology
In laser guiding emission coefficient, need the guiding Level Change emission laser beam focal height according to appointment, make the laser beam vernier focusing to specified altitude assignment, improve the power density of laser, be convenient to laser guiding receiving system and obtain the strongest heliogram in specified altitude assignment.At present, the remote focus adjustment means of known laser beam adopts translation stage to carry the laser beam expander secondary mirror or primary mirror is mobile in precise guide rail, changes the laser beam focal position at interval by changing beam expander primary and secondary mirror.Before the adjusting, need utilize input laser beam and beam expander calculation of parameter focusing curve.During adjusting, utilize focusing curve to determine the spacing distance of beam expander primary and secondary mirror according to the focal position of appointment, mobile beam expander secondary mirror or primary mirror make the spacing distance of beam expander primary and secondary mirror satisfy setting value then.Owing to the mismachining tolerance of lens, debug the positioning error of error and precise guide rail, the actual focal position of laser beam with set focal position and have deviation, can not satisfy the application demand that distant-range high-precision focuses on.
Summary of the invention
Adopt in mobile laser beam expander secondary mirror or the remote focal position process of primary mirror real time altering laser beam in order to overcome, cause departing from of the remote focal position of laser beam by the mismachining tolerance of lens, the positioning error of debuging error and precise guide rail, the invention provides a kind of device of realizing the remote vernier focusing of laser beam.
The remote vernier focusing device of laser beam of the present invention is characterized in: described device comprises focusing beam expander, plane beam splitter, focusing test contracting bundle device, Hartmann wave front sensor, pedestal, translation stage and guide rail.The focusing beam expander is made up of focusing beam expander primary mirror and focusing beam expander secondary mirror.Focusing test contracting bundle device is made up of focusing test contracting bundle device primary mirror and focusing test contracting bundle device secondary mirror.Hartmann wave front sensor is made up of Hartmann's microlens array and CCD camera, and Hartmann's microlens array comprises a plurality of conplane lenticules that are in.Focusing beam expander primary mirror is installed on the pedestal, and focusing beam expander secondary mirror is installed on the translation stage, and translation stage can be along the translation of focusing beam expander optical axis by guide rail.Plane beam splitter is that 45 is installed on the pedestal with focusing beam expander optical axis.Focusing test contracting bundle device primary mirror and secondary mirror are installed on the pedestal, and focusing test contracting bundle device primary mirror and focusing test contracting bundle device secondary mirror are confocal.Hartmann's microlens array and CCD camera are installed on the pedestal, and CCD camera target surface is positioned on the focal plane of Hartmann's microlens array.Laser is successively by focusing beam expander secondary mirror, focusing beam expander primary mirror, then through the plane beam splitter light splitting, reflected light is launched, and transmitted light by focusing test contracting bundle device primary mirror, focusing test contracting bundle device secondary mirror, focuses on CCD camera target surface finally by Hartmann's microlens array successively.
The resolving range of described translation stage is 0.01 mm～0.1mm.
Described focusing beam expander and the coaxial setting of focusing test contracting bundle device.
When need changing the remote focal position of laser beam, translation stage carries focusing beam expander secondary mirror and moves along focusing beam expander optical axis, the Hartmann's hot spot image that receives by the CCD camera calculates the defocusing amount of laser beam in real time, control moving direction and the speed of focusing beam expander secondary mirror in real time according to the variation of defocusing amount, when the defocusing amount of monitoring with the deviation of setting defocusing amount in allowed band the time, focusing beam expander secondary mirror stops mobile, reaches the purpose of the remote focal position of accurate control laser beam.
The focusing test method of the remote vernier focusing device of laser beam of the present invention, its ultimate principle is: directional light is behind Hartmann's microlens array, and interlattice distance just in time is the spacing of Hartmann's microlens array on Hartmann's image that the CCD camera obtains on its focal plane.If the spherical wave incident of out of focus, then interlattice distance will change on Hartmann's image of receiving of CCD camera.The spherical wave that converges can make that interlattice distance reduces on Hartmann's image, and the spherical wave of dispersing can make that interlattice distance increases on Hartmann's image.Spacing by calculating interlattice mean distance and Hartmann's microlens array on Hartmann's image poor just can accurately obtain the defocusing amount of laser beam.The purpose of focusing test contracting bundle device is to dwindle spot size, increases the hot spot angle of divergence, is convenient to Hartmann's microlens array on the one hand and receives laser, can improve the accuracy of detection of defocusing amount on the other hand.
In laser guiding emission coefficient, adopt the remote vernier focusing device of laser beam of the present invention, the focusing test device that utilizes focusing test contracting bundle device, Hartmann's microlens array and CCD camera to form can detect the defocusing amount of emission laser beam in real time, carry focusing beam expander secondary mirror by the defocusing amount control translation stage that detects and move along focusing beam expander optical axis, reach the purpose of the remote vernier focusing of control laser beam.Because the defocusing amount of accurate detection laser beam when therefore using the remote vernier focusing device of laser beam of the present invention to change the laser beam focal position, need not the calculated in advance focusing curve, and can realize remote vernier focusing in real time.Apparatus structure of the present invention is simple, easy to use, is adapted at using in the distant-range high-precision laser focusing system.
Description of drawings
Fig. 1 is the remote vernier focusing apparatus structure of laser beam of the present invention synoptic diagram;
Fig. 2 is Hartmann wave front sensor focusing test principle schematic in the remote vernier focusing device of laser beam of the present invention;
Fig. 3 is that focusing test contracting bundle device changes emission laser beam focal length synoptic diagram in the remote vernier focusing device of laser beam of the present invention;
Among the figure: 1. device primary mirror 5. focusing tests contracting bundle device secondary mirror 6. Hartmann's microlens array 7.CCD cameras 8. translation stages 9. guide rails 10. pedestals are restrainted in focusing beam expander secondary mirror 2. focusing beam expander primary mirrors 3. plane beam splitters 4. focusing tests contracting.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
Fig. 1 is the remote vernier focusing apparatus structure of laser beam of the present invention synoptic diagram, in Fig. 1, the remote vernier focusing device of laser beam of the present invention comprises focusing beam expander secondary mirror 1, focusing beam expander primary mirror 2, plane beam splitter 3, focusing test contracting bundle device primary mirror 4, focusing test contracting bundle device secondary mirror 5, Hartmann's microlens array 6, CCD camera 7, translation stage 8, guide rail 9 and pedestal 10.The focusing beam expander is made up of focusing beam expander primary mirror 2 and focusing beam expander secondary mirror 1.Focusing test contracting bundle device is made up of focusing test contracting bundle device primary mirror 4 and focusing test contracting bundle device secondary mirror 5.Hartmann wave front sensor is made up of Hartmann's microlens array 6 and CCD camera 7, and Hartmann's microlens array 6 comprises a plurality of conplane lenticules that are in.Focusing beam expander primary mirror 2, plane beam splitter 3, focusing test contracting bundle device primary mirror 4, focusing test contracting bundle device secondary mirror 5, Hartmann's microlens array 6, CCD camera 7 are installed on the pedestal 10 successively, focusing beam expander secondary mirror 1 is installed on the translation stage 8, translation stage 8 is arranged on the guide rail 9, and guide rail 9 be arranged in parallel with the optical axis of focusing beam expander.Plane beam splitter 3 is the 45 setting with focusing beam expander optical axis.Focusing test contracting bundle device primary mirror 4 is confocal with focusing test contracting bundle device secondary mirror 5.The target surface of CCD camera 7 is positioned on the focal plane of Hartmann's microlens array 6.The light shaft coaxle setting of the optical axis of focusing beam expander and focusing test contracting bundle device.Hartmann's image accurate Calculation of utilizing CCD camera 7 to gather is in real time launched the defocusing amount of laser beam, variation control translation stage 8 lift-launch focusing beam expander secondary mirrors 1 edge focusing beam expander optical axis according to defocusing amount moves, and changes the distance of focusing between beam expander secondary mirror 1 and the focusing beam expander primary mirror 2 and accurately adjusts the laser beam focal position.
Fig. 2 is Hartmann wave front sensor focusing test principle schematic in the remote vernier focusing device of laser beam of the present invention, and in Fig. 2, the CCD target surface is positioned on the focal plane of microlens array, and the focal length of microlens array is
, the spacing of microlens array is
, the laser beam of supposing incident is the spherical wave that converges,
Be focal length.Chosen any two contiguous microlens I 601 and lenticule II 602 as analytic target, the light beam of crossing lenticule I 601, lenticule II 602 centers forms picture point at the CCD target surface respectively.Made the parallel lines of lenticule II 602 central light beam through lenticule I 601 centers, saw among the figure easily
The distance of expression lenticule I 601, lenticule II 602 picture points is poor with the microlens array spacing.Consider remote focusing situation,
Very little, so
The angle is very little, formula
Set up, approximate have
Accurately detect the defocusing amount of emission laser beam by the difference of interlattice average headway and microlens array spacing on the Hartmann's image that calculates the acquisition of CCD camera.The movement of the defocusing amount control focusing beam expander secondary mirror by real-time detection realizes the remote vernier focusing of laser beam.
Fig. 3 is that focusing test contracting bundle device changes emission laser beam focal length synoptic diagram in the remote vernier focusing device of laser beam of the present invention, and in Fig. 3, the spot radius of incoming laser beam before focusing test contracting bundle device primary mirror 4 is
, the angle of divergence is
Laser beam through the spot radius of focusing test contracting bundle device behind focusing test contracting bundle device secondary mirror 5 is
, the angle of divergence is
If
Contracting bundle multiplying power for focusing test contracting bundle device then has formula
,
, from figure, see the focal length of incoming laser beam before the focusing test contracting bundle device easily
, the focal length of outgoing laser beam behind the focusing test contracting bundle device
, the angle of divergence is very little, and approximate have
, can see that laser beam becomes original by focusing test contracting bundle device back focal length
Claims (3)
1. device of realizing the remote vernier focusing of laser beam is characterized in that: described device comprises focusing beam expander, plane beam splitter (3), focusing test contracting bundle device, Hartmann wave front sensor, pedestal (10), translation stage (8), guide rail (9); The focusing beam expander is made up of focusing beam expander primary mirror (2) and focusing beam expander secondary mirror (1); Focusing test contracting bundle device is made up of focusing test contracting bundle device primary mirror (4) and focusing test contracting bundle device secondary mirror (5); Hartmann wave front sensor is made up of Hartmann's microlens array (6) and CCD camera (7), and Hartmann's microlens array comprises a plurality of conplane lenticules that are in; Focusing beam expander secondary mirror (1) is installed on the translation stage (8), and translation stage (8) is by the translation of guide rail (9) edge focusing beam expander optical axis; Focusing beam expander primary mirror (2), plane beam splitter (3), focusing test contracting bundle device primary mirror (4), focusing test contracting bundle device secondary mirror (5), Hartmann's microlens array (6), CCD camera (7) are installed on the pedestal (10) successively; Plane beam splitter (3) is the 45 setting with focusing beam expander optical axis; Focusing test contracting bundle device primary mirror (4) and the confocal setting of focusing test contracting bundle device secondary mirror (5); The target surface of CCD camera (7) is positioned on the focal plane of Hartmann's microlens array (6).
2. a kind of device of realizing the remote vernier focusing of laser beam according to claim 1 is characterized in that: described focusing beam expander and focusing test contracting bundle device are with the optical axis setting.
3. a kind of device of realizing the remote vernier focusing of laser beam according to claim 1, it is characterized in that: the resolution of described translation stage (8) is less than 0.01 mm～0.1mm.
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| CN201310183645.9A CN103246065B (en) | 2013-05-17 | 2013-05-17 | Device for remotely and accurately focusing laser beam |
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Cited By (6)
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| CN103674839A (en) * | 2013-11-12 | 2014-03-26 | 清华大学 | Visual sample positioning operating system and method based on light spot detection |
| CN104267493A (en) * | 2014-10-15 | 2015-01-07 | 沈阳理工大学 | Array lens type laser guide star system |
| CN104764588A (en) * | 2015-03-31 | 2015-07-08 | 中国科学院西安光学精密机械研究所 | Single-pulse laser dynamic focal spot position measuring device and method |
| CN107179605A (en) * | 2017-07-04 | 2017-09-19 | 成都安的光电科技有限公司 | Telescope focusing system and method |
| CN107643601A (en) * | 2017-11-09 | 2018-01-30 | 北京电子工程总体研究所 | One kind is based on CO2Laser tube light source expand and real-time focusing device |
| CN112033647A (en) * | 2020-08-27 | 2020-12-04 | 中国科学院光电技术研究所 | Multi-aperture system pupil detection and correction method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103674839A (en) * | 2013-11-12 | 2014-03-26 | 清华大学 | Visual sample positioning operating system and method based on light spot detection |
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| CN104267493A (en) * | 2014-10-15 | 2015-01-07 | 沈阳理工大学 | Array lens type laser guide star system |
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| CN104764588A (en) * | 2015-03-31 | 2015-07-08 | 中国科学院西安光学精密机械研究所 | Single-pulse laser dynamic focal spot position measuring device and method |
| CN107179605A (en) * | 2017-07-04 | 2017-09-19 | 成都安的光电科技有限公司 | Telescope focusing system and method |
| CN107643601A (en) * | 2017-11-09 | 2018-01-30 | 北京电子工程总体研究所 | One kind is based on CO2Laser tube light source expand and real-time focusing device |
| CN112033647A (en) * | 2020-08-27 | 2020-12-04 | 中国科学院光电技术研究所 | Multi-aperture system pupil detection and correction method |
| CN112033647B (en) * | 2020-08-27 | 2022-08-02 | 中国科学院光电技术研究所 | Multi-aperture system pupil detection and correction method |
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| CN103246065B (en) | 2015-07-15 |
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