CN102426061A - Hartmann wavefront sensor with adjustable dynamic range - Google Patents
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Abstract
The invention provides a Hartmann wavefront sensor with an adjustable dynamic range, which consists of an optical matching system, a wavefront division sampling array, a phase modulator and a photoelectric sensor, wherein the optical matching system is used for shrinking an incident light wave so that the size of the incident light wave is less than the size of the wavefront division sampling array and the size of the phase modulator; the phase modulator is arranged between the optical matching system and the wavefront division sampling array, and the caliber of the phase modulator is greater than the clear caliber of the optical matching system; the phase modulator adds aberration to the shrunk incident wave, and multiple subareas are formed in the clear caliber of the phase modulator; the subareas and the sub-apertures of the wavefront division sampling array are in one-to-one correspondence in caliber and distribution, and the generated aberration is added to the light wave passing through the corresponding sub-aperture; and the wavefront divisions sampling array divides the light wave processed by the phase modulator into multiple sub-beams, and focuses the sub-beams on a target surface of the photoelectric sensor on a focus surface thereof respectively. The Hartmann wavefront sensor with an adjustable dynamic range provided by the invention can be widely applied to wavefront detection in various wavefront great aberrations.
Description
Technical field
The present invention relates to the dynamic Wavefront sensor of a kind of novel optical, relate in particular to a kind of based on the adjustable Hartmann wave front sensor of the dynamic range of phase compensation principle.
Background technology
ADAPTIVE OPTICS SYSTEMS mainly is made up of Wavefront sensor, wavefront controller and wave-front corrector; Wherein Wavefront sensor can be described as ADAPTIVE OPTICS SYSTEMS " eyes ", and the detectivity of Wavefront sensor directly influences the correcting feature of ADAPTIVE OPTICS SYSTEMS.Hartmann wave front sensor be the most popular at present, use Wavefront sensor the most widely.One Chinese patent application prospectus (application number 98112210.8; Publication number CN1245904A) disclosed a kind of Hartmann wave front sensor; Its implementation mainly adopts wavefront division sampling array element such as microlens array; Wavefront division is become many sub-apertures wavefront, and the light of incident converged to respectively on the array photoelectric sensor form spot array.When the incident of aberrationless plane wave; The hot spot of each sub-aperture wavefront is positioned at the center of respective sub-areas on the photoelectric sensor target surface; When having the incident of aberration wavefront, certain skew can take place in the corresponding hot spot in each sub-aperture, measures the side-play amount of each hot spot with respect to aberrationless plane wave condition of incidence; Calculate through Computer Processing, just can obtain wavefront and whole wavefront aberration information in each sub-aperture.But the dynamic range of Hartmann wave front sensor has generally been confirmed when design, when needs are measured big aberration, tends to occur facula deviation and exceeds the design dynamic range, causes surveying situation inaccurate even that can't survey.If just adopt great dynamic range during design, the whole detection accuracy of Hartmann wave front sensor can descend again thereupon.Therefore, how surveying big aberration with Hartmann wave front sensor, and guarantee detection accuracy, is the research work that need carry out.
At present; The adjustable Hartmann wave front sensor of many great dynamic ranges or dynamic range has been proposed; Like one Chinese patent application prospectus (application number 02123756.5; Publication number CN1212508C) a kind of dynamic range and the adjustable Hartmann wave front sensor of measuring accuracy that propose; It measures sub-aperture gating control element through in the Hartmann wave front sensor structure, adding, and controls the gating in sub-aperture and controls the sampling period that the array of taking a sample is cut apart on the corrugated, to reach the purpose of adjustment Wavefront sensor measuring accuracy and dynamic range.These inventions can realize increasing the purpose of the dynamic range of Hartmann wave front sensor; Array element always has certain off-axis aberration but sampling is cut apart on the corrugated, the Hartmann wave front sensor that this invention and other great dynamic ranges or dynamic range are adjustable all can run into inevitably facula deviation big, be difficult to survey problem accurately from axle facula mass center than far the time.If ignore this problem, even increased the dynamic range of Hartmann wave front sensor, the Wavefront detecting precision also can descend greatly because of the facula mass center detecting error becomes.Therefore invent and a kind ofly can realize that dynamic range is adjustable, the Hartmann wave front sensor that can guarantee detection accuracy again is very to be necessary.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcome the big and high-leveled and difficult problem to take into account of measuring accuracy of Hartmann wave front sensor dynamic range; It is adjustable to propose a kind of dynamic range; Measuring accuracy can guarantee, and satisfy the Hartmann wave front sensor of centroid algorithm precision and wavefront division sampling array element off-axis aberration control requirement easily.
The adjustable Hartmann wave front sensor of dynamic range that the present invention proposes; Form by optical match system, wavefront division sampling array, phase-modulator and photoelectric sensor; The optical match system is used for the incident light wave bundle that contracts; Make incident light wave beam size be no more than the size of wavefront division sampling array and the size of phase-modulator, phase-modulator places between optical match system and the wavefront division sampling array, and its bore is greater than the clear aperture of optical match system; Phase-modulator is to the incident wave additional aberrations through the bundle that contracts; In its clear aperture, form many subregions, the sub-aperture bore of this subregion and wavefront division sampling array and arrange corresponding one by one, and the aberration that is produced is additional to the light wave that passes through corresponding sub-aperture; The light wave that wavefront division sampling array will pass through phase-modulator is divided into the multi beam beamlet, and focuses on respectively on the photoelectric sensor target surface that is positioned at its focal plane.
Said phase-modulator places the front end of optical match system, and the ratio of the sub-aperture of phase-modulator subregion bore and wavefront division sampling array bore and the optical match system beam ratio example that contracts is identical, and the subregion arrangement mode is identical with sub-aperture.
Said phase-modulator also can place between optical match system and the wavefront division sampling array, and phase-modulator subregion bore is all identical with the sub-aperture of wavefront division sampling array with arrangement mode.
Said phase-modulator is the transmission-type phase-modulator, adopts the LCD space light modulator of electrical addressing phase modulation (PM).
Said wavefront division sampling array adopts binary micro fresnel lens array, or the continuous surface microlens array, or the graded index microlens array.
Said photoelectric sensor adopts ccd detector, or cmos detector, or the quadrant sensors array.
Compare with existing Hartmann wave front sensor, the Hartmann wave front sensor that dynamic range of the present invention is adjustable can make corresponding hot spot on each sub-aperture quick lock in photoelectric sensor of wavefront division sampling array, realizes that dynamic range is adjustable; Guarantee measuring accuracy; When measuring big aberration, even the facula mass center skew is bigger, the intrinsic off-axis aberration of wavefront division sampling array can impact centroid detection; But through phase compensation; Make the big aberration through wavefront division sampling array gradually become little aberration, hot spot is got back to separately near the calibration position on the photoelectric sensor, and Hartmann wave front sensor precision when measuring the statuette difference can be trusted; Therefore the present invention can reduce the requirement to the control of wavefront division sampling array off-axis aberration, has alleviated the influence of off-axis aberration to final measurement greatly.
Description of drawings
Fig. 1 is the structural representation of the adjustable Hartmann wave front sensor embodiment of dynamic range of the present invention.
When Fig. 2 is a facula deviation within Hartmann wave front sensor design dynamic range, spot array reseting procedure synoptic diagram on the Hartmann wave front sensor target surface that dynamic range of the present invention is adjustable;
When Fig. 3 exceeds Hartmann wave front sensor design dynamic range for some facula deviation, spot array reseting procedure synoptic diagram on the Hartmann wave front sensor target surface that dynamic range of the present invention is adjustable;
Fig. 4 is the structural representation of adjustable another embodiment of Hartmann wave front sensor of dynamic range of the present invention.
Embodiment
Below in conjunction with accompanying drawing and embodiment the adjustable Hartmann wave front sensor of dynamic range of the present invention is described further.
Embodiment one
As shown in Figure 1; Compensate wave front aberration element employing transmission-type phase-modulator 3 in the sub-aperture, be positioned at the corrugated and cut apart before the sampling array 2, compensate wavelet top rake aberration in each sub-aperture; It comprises optical match system 1, wavefront division sampling array 2, transmission-type phase-modulator 3 and photoelectric sensor 4; Incident light wave is through optical match system 1 bundle that contracted, and through transmission-type phase-modulator 3, the transmission-type phase-modulator can add specific aberration to light wave before getting into wavefront division sampling array 2; The sub-aperture of wavefront division sampling array 2 is divided into many beamlets with light wave; Its focal plane overlaps with photoelectric sensor 4 target surfaces, and the beamlet in each sub-aperture is focused on respectively on photoelectric sensor 4 target surfaces, and wherein transmission-type phase-modulator 3 adopts the LCD space light modulator of electrical addressing phase modulation (PM); Wavefront division sampling array 2 adopts binary micro fresnel lens array; Or the continuous surface microlens array, or the graded index microlens array, photoelectric sensor 4 adopts ccd detector or cmos detector; Transmission-type phase-modulator 3 is additional specific the differing of light wave in wavefront division sampling array 2 each sub-aperture; Append mode can be a synchroballistic;, also can be asynchronous compensation promptly, only to additional specific the differing of light wave in specific one or several sub-aperture simultaneously to additional specific the differing of light wave in each sub-aperture; When wave front aberration to be measured little; The hot spot centroid motion is little on the photoelectric sensor 4, and wavefront division sampling array 2 sub-apertures and hot spot can be one by one at once, and skew obtains light wave inclined aberration size in each sub-aperture according to photoelectric sensor 4 facula mass centers during measurement; And with transmission-type phase-modulator 3 synchroballistics; Making finally that each hot spot all is reset to the determined initial position of Hartmann wave front sensor timing signal on the photoelectric sensor 4, also is that transmission-type phase-modulator 3 compensates wave front aberration to be measured, and wave front aberration amount to be measured is exactly the conjugate of the used aberration amount of compensation.Corrugated to be measured is the opposite number relation with the used corrugated of compensation every bit aberration amount and forms conjugation.When wave front aberration to be measured is bigger, the hot spot centroid motion is excessive on the photoelectric sensor 4, and wavefront division sampling array 2 sub-apertures and hot spot can't be one by one at once; Through the asynchronous compensation of light wave aberration in 3 pairs of different sub apertures of control transmission-type phase-modulator, to observe facula mass center and change, the hot spot that barycenter takes place is corresponding with the sub-aperture of additional aberrations; After the corresponding hot spot in each sub-aperture of locking; Just can measuring the hot spot centroid motion, to calculate in each sub-aperture the light wave inclined aberration big or small, and with transmission-type phase-modulator 3 synchroballistics, makes finally that each hot spot all is reset to the determined initial position of Hartmann wave front sensor timing signal on the photoelectric sensor 4; So just can not limited by dynamic range; Realize that dynamic range is adjustable and to the compensation and the measurement of wave front aberration, because the hot spot after the aberration compensation is all near initial alignment position or its, the light wave wave front aberration that gets into wavefront division sampling array 2 is very little; And the measurement of Hartmann wave front sensor is reliable under statuette difference situation; The residual error that also is phase compensation is very little, so even wave front aberration to be measured is very big, final measuring accuracy also can guarantee consistent with statuette difference situation.
Embodiment one is adjustable through following steps realization Wavefront detecting and dynamic range:
(1) on phase-modulator 3, divides corresponding subregion for each wavefront division sampling array 2 sub-aperture; The size of phase-modulator 3 subregions with arrange with the size in wavefront division sampling array 2 sub-apertures with arrange identically, each phase-modulator 3 subregion adds certain inclined aberration for the light wave in its corresponding sub-aperture;
(2) demarcate the not additional any aberration of transmission-type phase-modulator 3, the initial alignment position of each corresponding hot spot in wavefront division sampling array 2 sub-apertures on the record detector with the incident of aberrationless plane wave;
When (3) measuring the zonal aberration wavefront, the corresponding hot spot in each sub-aperture can be offset on photoelectric sensor 4 target surfaces, based on the inclined aberration amount of light wave in each sub-aperture of the current facula mass center calculations of offset that records; Transmission-type phase-modulator 3 with light wave in each sub-aperture calculate inclined aberration compensation, each hot spot moves to calibration position thereupon, because there is error in facula mass center offset measurement value; So only a phase compensation can not make hot spot get back on the calibration position or its near; Need be through repeatedly measuring and compensating, make finally that each hot spot all is reset near the calibration position on photoelectric sensor 4 target surfaces, wherein phase compensation can be directed against specific sub-aperture; Mode through asynchronous compensation; Sub-aperture can lock corresponding hot spot apace, is not subjected to the restriction of dynamic range when therefore surveying wave front aberration, can realize that dynamic range is adjustable;
(4) in the time of near each hot spot on the photoelectric sensor 4 all is reset to calibration position; Can think that the light wave wave front aberration of wavefront division sampling array 2 is very little; Approximate with the aberrationless directional light that timing signal is used; Also be that phase-modulator has compensated wave front aberration to be measured basically, be exactly Zong the conjugate of aberration for compensation on the final wave front aberration phase-modulator to be measured.
Further specify the transmission-type phase-modulator to light wave additional tilt aberration in each sub-aperture below in conjunction with accompanying drawing, make the process that each hot spot resets on the photoelectric sensor.
As shown in Figure 2; The corresponding facula deviation in each sub-aperture is within Hartmann wave front sensor design dynamic range; The spot array that sampling array 2 adopts 8 * 8 sub-aperture unit on photoelectric sensor 4 target surfaces, to form is cut apart on the corrugated; Symbol " * " expression aberrationless wavefront is demarcated facula position, and stain " " expression zonal aberration corrugated forms hot spot.Wave front aberration all surpasses dynamic range in the sub-aperture at this moment.To corresponding photoelectric sensor 4 subregions in wherein single sub-aperture as an example, the corresponding hot spot reseting procedure in sub-aperture when phase compensation is described.
Suppose the approximate inclined aberration that only contains of wavefront in the sub-aperture.The side-play amount of the corresponding hot spot in sub-aperture obtains sub-aperture wavetilt slope σ when recording original state
xAnd σ
y, wavefront can be expressed as in the sub-aperture
W(x，y)＝σ
x·x+σ
y·y (1)
Because have error to surveying from the facula mass center of axle, also there is error delta σ in the slope that records with respect to actual value
x, δ σ
y, can be expressed as before the true wavelet
W(x，y)＝(σ
x+δσ
x)·x+(σ
y+δσ
y)·y (2)
Produce compensation of phase according to measured value
W(x，y)＝-σ
x·x-σ
y·y (3)
Behind the single compensation in the sub-aperture wavefront do
W(x，y)＝δσ
x·x+δσ
y·y (4)
This moment, facula position squinted toward aberrationless wavefront calibration position, got near axis area.Measure the hot spot centroid motion once more; According to the amount of recording compensation of phase is before replenished correction; So repeated measurement compensates near the corresponding hot spot in each sub-aperture resets to aberrationless wavefront calibration position or this position, but concrete reset position permissible range can be confirmed according to permissible error.So just can cut apart sampling array 2 on the corrugated has off-axis aberration and when the measurement of axle facula mass center has error, also can guarantee measuring accuracy.
As shown in Figure 3, the corresponding facula deviation in certain a little aperture occurs and exceed Hartmann wave front sensor design dynamic range, get into the situation of closing in corresponding photoelectric sensor 4 subregions in sub-aperture.By controlling the asynchronous compensation of phase place between the contiguous sub-aperture; When in to a sub-aperture, carrying out phase compensation; For the hot spot of confirming that sub-aperture is corresponding; At first produce a very little slope compensation aberration at random for this sub-aperture; And keep contiguous sub-aperture phase constant; Whether have facula position change, i.e. the corresponding hot spot in this sub-aperture of lockable if surveying in this sub-aperture and the corresponding region, contiguous sub-aperture.After the hot spot locking, it is carried out phase compensation, can let hot spot return in correspondence photoelectric sensor 4 subregions of sub-aperture, until being reset near the aberrationless wavefront calibration position with situation same procedure among Fig. 2.So just can break through dynamic range restriction, realize that dynamic range is adjustable, and when measuring big aberration, the inaccurate problem of bringing after also having avoided facula deviation to increase of centroid detection has guaranteed detectivity and detection accuracy to big aberration.
Embodiment two
As shown in Figure 4; Compensate wave front aberration element employing transmission-type phase-modulator 3 in the sub-aperture, be positioned at the corrugated and cut apart sampling array 2 before the optical match system, compensate wave front aberration in each sub-aperture; It comprises optical match system 1, wavefront division sampling array 2, transmission-type phase-modulator 3 and photoelectric sensor 4; Incident light wave is gone into wavefront and is cut apart sampling array 2 through the Shu Houjin that contracts of optical match system 1, and the sub-aperture of wavefront division sampling array 2 is divided into many beamlets with light wave, and its focal plane overlaps with photoelectric sensor 4 target surfaces; Beamlet in each sub-aperture is focused on respectively on photoelectric sensor 4 target surfaces; The transmission-type phase-modulator places before the optical match system, can be to the additional specific aberration of light wave, and wherein transmission-type phase-modulator 3 adopts the LCD space light modulator of electrical addressing phase modulation (PM); Wavefront division sampling array 2 adopts binary micro fresnel lens array; Or the continuous surface microlens array, or the graded index microlens array, photoelectric sensor adopts ccd detector or cmos detector; Transmission-type phase-modulator 3 is additional specific the differing of light wave in wavefront division sampling array 2 each sub-aperture, and append mode can be a synchroballistic, promptly simultaneously to additional specific the differing of light wave in each sub-aperture; Also can be asynchronous compensation, only to additional specific the differing of light wave in specific one or several sub-aperture, when wave front aberration to be measured little; The hot spot centroid motion is little on the photoelectric sensor 4, and wavefront division sampling array 2 sub-apertures and hot spot can be one by one at once, and skew obtains light wave inclined aberration size in each sub-aperture according to photoelectric sensor 4 facula mass centers during measurement; And with transmission-type phase-modulator 3 synchroballistics; Making finally that each hot spot all is reset to the determined initial position of Hartmann wave front sensor timing signal on the photoelectric sensor 4, also is that transmission-type phase-modulator 3 compensates wave front aberration to be measured, and wave front aberration amount to be measured is exactly the conjugate of the used aberration amount of compensation; When wave front aberration to be measured bigger; The hot spot centroid motion is excessive on the photoelectric sensor 4, and wavefront division sampling array 2 sub-apertures and hot spot can't be one by one at once, through the asynchronous compensation of light wave aberration in 3 pairs of different sub apertures of control transmission-type phase-modulator; The observation facula mass center changes; The hot spot that barycenter takes place is corresponding with the sub-aperture of additional aberrations, after the corresponding hot spot in each sub-aperture of locking, just can measure the hot spot centroid motion and calculate light wave inclined aberration size in each sub-aperture; And with transmission-type phase-modulator 3 synchroballistics; Make finally that each hot spot all is reset to the determined initial position of Hartmann wave front sensor timing signal on the photoelectric sensor 4, so just can not limited by dynamic range, realize that dynamic range is adjustable and to the compensation and the measurement of wave front aberration; Because the hot spot after the aberration compensation is all near initial alignment position or its; The light wave wave front aberration that gets into wavefront division sampling array 2 is very little, and the measurement of Hartmann wave front sensor is reliably under statuette difference situation, also is that the residual error of phase compensation is very little; So even wave front aberration to be measured is very big, final measuring accuracy also can guarantee consistent with statuette difference situation.
Embodiment two is adjustable through following steps realization Wavefront detecting and dynamic range:
(1) on phase-modulator 3, divides corresponding subregion for each wavefront division sampling array 2 sub-aperture; Phase-modulator 3 subregions are arranged and are arranged identical with wavefront division sampling array 2 sub-apertures; Each subregion and the ratio of the bore in corresponding sub-aperture equal the beam ratio that contracts of optical match system 1, and each phase-modulator 3 subregion adds certain inclined aberration for the light wave in its corresponding sub-aperture;
(2) demarcate the not additional any aberration of transmission-type phase-modulator 3, the initial alignment position of each corresponding hot spot in wavefront division sampling array 2 sub-apertures on the record detector with the incident of aberrationless plane wave;
When (3) measuring the zonal aberration wavefront, the corresponding hot spot in each sub-aperture can be offset on photoelectric sensor 4 target surfaces, based on the inclined aberration amount of light wave in each sub-aperture of the current facula mass center calculations of offset that records; Transmission-type phase-modulator 3 with light wave in each sub-aperture calculate inclined aberration compensation, each hot spot moves to calibration position thereupon, because there is error in facula mass center offset measurement value; So only a phase compensation can not make hot spot get back on the calibration position or its near; Need be through repeatedly measuring and compensating, make finally that each hot spot all is reset near the calibration position on photoelectric sensor 4 target surfaces, wherein phase compensation can be directed against specific sub-aperture; Mode through asynchronous compensation; Sub-aperture can lock corresponding hot spot apace, is not subjected to the restriction of dynamic range when therefore surveying wave front aberration, can realize that dynamic range is adjustable;
(4) in the time of near each hot spot on the photoelectric sensor 4 all is reset to calibration position; Can think that the light wave wave front aberration of wavefront division sampling array 2 is very little; Approximate with the aberrationless directional light that timing signal is used; Also be that phase-modulator has compensated wave front aberration to be measured basically, be exactly Zong the conjugate of aberration for compensation on the final wave front aberration phase-modulator to be measured.
Claims (6)
1. Hartmann wave front sensor that dynamic range is adjustable; Form by optical match system (1), wavefront division sampling array (2), phase-modulator (3) and photoelectric sensor (4); Optical match system (1) is used for the incident light wave bundle that contracts; Make incident light wave beam size be no more than the size of wavefront division sampling array (2) and the size of phase-modulator (3), it is characterized in that phase-modulator (3) places between optical match system (1) and the wavefront division sampling array (2), its bore is greater than the clear aperture of optical match system (1); Phase-modulator (3) is to the incident wave additional aberrations through the bundle that contracts; In its clear aperture, form many subregions, the sub-aperture bore of this subregion and wavefront division sampling array (2) and arrange corresponding one by one, and the aberration that is produced is additional to the light wave that passes through corresponding sub-aperture; The light wave that wavefront division sampling array (2) will pass through phase-modulator (3) is divided into the multi beam beamlet, and focuses on respectively on photoelectric sensor (4) target surface that is positioned at its focal plane.
2. the adjustable Hartmann wave front sensor of dynamic range according to claim 1; It is characterized in that phase-modulator (3) places the front end of optical match system (1); The ratio of the sub-aperture of phase-modulator (3) subregion bore and wavefront division sampling array (2) bore and the optical match system beam ratio example that contracts is identical, and the subregion arrangement mode is identical with sub-aperture.
3. the adjustable Hartmann wave front sensor of dynamic range according to claim 1; It is characterized in that phase-modulator (3) places between optical match system (1) and the wavefront division sampling array (2), phase-modulator (3) subregion bore is all identical with the sub-aperture of wavefront division sampling array (2) with arrangement mode.
4. the adjustable Hartmann wave front sensor of dynamic range according to claim 1 and 2 is characterized in that phase-modulator (3) is the transmission-type phase-modulator, adopts the LCD space light modulator of electrical addressing phase modulation (PM).
5. the adjustable Hartmann wave front sensor of dynamic range according to claim 1 and 2 is characterized in that wavefront division sampling array (2) adopts binary micro fresnel lens array, or the continuous surface microlens array, or the graded index microlens array.
6. the adjustable Hartmann wave front sensor of dynamic range according to claim 1 is characterized in that photoelectric sensor (4) adopts ccd detector, or cmos detector, or the quadrant sensors array.
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| CN103246065A (en) * | 2013-05-17 | 2013-08-14 | 中国工程物理研究院应用电子学研究所 | Device for remotely and accurately focusing laser beam |
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| CN104198054B (en) * | 2014-08-27 | 2017-03-15 | 中国科学院上海光学精密机械研究所 | Packaged type high-power laser beams Wavefront measuring apparatus and its measuring method |
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| CN104198056A (en) * | 2014-09-25 | 2014-12-10 | 中国科学院国家天文台南京天文光学技术研究所 | Schack hartmann wavefront sensor for low contrast expansion source telescope |
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| CN104596651A (en) * | 2015-02-02 | 2015-05-06 | 中国科学院光电技术研究所 | Phase inversion method based on four-quadrant binary-phase modulation |
| CN109964144A (en) * | 2016-11-17 | 2019-07-02 | 特里纳米克斯股份有限公司 | Detector at least one object of optical detection |
| CN111579097A (en) * | 2020-05-21 | 2020-08-25 | 浙江大学 | High-precision optical scattering compensation method based on neural network |
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