CN108317970B - System and method for measuring incident angle of light - Google Patents

System and method for measuring incident angle of light Download PDF

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CN108317970B
CN108317970B CN201711291461.9A CN201711291461A CN108317970B CN 108317970 B CN108317970 B CN 108317970B CN 201711291461 A CN201711291461 A CN 201711291461A CN 108317970 B CN108317970 B CN 108317970B
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light
receiving device
micro lens
optical receiving
angle
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CN108317970A (en
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闫钰锋
丁晓
李洋
付跃刚
白素平
周见红
王世峰
宋鸿飞
牟达
王崇娥
王赫
郭逢时
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Changchun University of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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Abstract

The system and the method for measuring the light incidence angle provided by the embodiment of the application form a light incidence angle measuring system by at least one group of micro lens arrays with preset installation parameters, an optical receiving device and a calculating device, and the incident angle of the light to be measured is calculated to serve as a measuring result through the calculating device in the measuring system according to the installation parameters of the optical receiving device and light spot information formed by the light to be measured on the optical receiving device through the micro lens arrays by the light to be measured by the optical receiving device, namely the incident angle of the light to be measured can be calculated based on the determined information, so that the measuring precision of the light incidence angle can be improved.

Description

System and method for measuring incident angle of light
Technical Field
The invention relates to the field of optical measurement, in particular to a system and a method for measuring a light incidence angle.
Background
In the field of optical measurement, especially for the measurement of the incident angle of light, most of the current methods are implemented by using a photoelectric auto-collimation system. Among them, the common photo receiver in the photo-electric auto-collimation system may include, for example, a CCD (Charge-coupled Device) Charge coupled Device, a psd (position sensitive detector), a four-quadrant photo detector, etc. to realize the measurement of the incident angle of the light according to the auto-collimation principle of the light and in combination with the data obtained by the photo receiver. However, the system has single measurement data, which affects the measurement accuracy, and needs additional devices for calibration.
In addition, there are also solutions that use microlens arrays for optical measurements, such as by wavefront sensors based on the wavefront radial slope measurement principle (i.e., Hartmann sensors) for wavefront sensing. However, in this scheme, the physical properties of the light are measured by the microlens array, and the measurement is not suitable for measuring the incident angle of the light.
Disclosure of Invention
The invention provides a system and a method for measuring the incident angle of light, which can improve the measurement precision of the incident angle of light.
In order to achieve the above purpose, the embodiment of the present application adopts the following technical solutions:
in one aspect, a system for measuring an incident angle of a light ray is provided, including: an optical receiving device, a calculating device and at least one group of micro lens array with preset installation parameters,
the optical receiving device is used for acquiring light spot information formed by the light to be detected on the optical receiving device through the at least one group of micro-lens arrays;
the calculating device is used for calculating the incidence angle of the light to be measured according to the preset installation parameters and the light spot information;
the mounting parameters comprise the distance between the centers of two adjacent micro lenses in the micro lens array, the focal length of each micro lens in the micro lens array and the angle between each micro lens in the micro lens array and a plane perpendicular to the receiving surface of the optical receiving device.
In another aspect, a method for measuring an incident angle of a light ray is provided, where the method is based on the above measurement system, and includes:
acquiring light spot information formed by the light to be detected on the optical receiving device through the at least one group of micro lens arrays with preset installation parameters by the optical receiving device;
calculating to obtain the incident angle of the light to be measured according to the preset installation parameters and the light spot information through a calculating device;
the mounting parameters comprise the distance between the centers of two adjacent micro lenses in the micro lens array, the focal length of each micro lens in the micro lens array and the angle between each micro lens in the micro lens array and a plane perpendicular to the receiving surface of the optical receiving device.
The invention provides a system and a method for measuring the incident angle of light, which comprises at least one group of micro lens arrays with preset installation parameters, an optical receiving device and a calculating device, wherein the calculating device in the measuring system calculates the incident angle of the light to be measured as a measuring result according to the installation parameters of the optical receiving device and light spot information formed by the light to be measured on the optical receiving device through the micro lens arrays by the calculating device in the measuring system, namely the incident angle of the light to be measured can be calculated based on determined information (the installation parameters which are preset and the light spot information which is obtained by measurement), thereby improving the measuring precision of the incident angle of the light.
The foregoing description is only an overview of the technical solutions of the present invention, and the embodiments of the present invention are described below in order to make the technical means of the present invention more clearly understood and to make the above and other objects, features, and advantages of the present invention more clearly understandable.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
FIG. 1 is a schematic diagram of a system for measuring incident angles of light rays according to an embodiment of the present invention;
FIG. 2 is a schematic view of a scene of a system for measuring an incident angle of a light ray according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a microlens array structure according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a structure using a plurality of microlens arrays according to an embodiment of the present invention;
FIGS. 5-1 and 5-2 are schematic views of two calculation modes according to the embodiment of the present invention;
fig. 6 is a flowchart illustrating a method for measuring an incident angle of a light beam according to an embodiment of the invention.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
The technical solution of the present invention is further illustrated by the following examples.
In this embodiment, a technical principle of the measurement system is that the measurement system for the incident angle of light is composed of at least one set of microlens arrays, optical receiving devices and computing devices, where the installation parameters are planned in advance, and the computing devices in the measurement system calculate the incident angle of light to be measured as a measurement result according to the installation parameters and light spot information formed by the light to be measured through the microlens arrays and measured by the optical receiving devices, that is, the incident angle of light to be measured can be calculated based on determined information (installation parameters planned in advance and light spot information obtained by measurement), so as to improve the measurement accuracy of the measurement system for the incident angle of light.
Example one
As shown in fig. 1, which is a schematic structural diagram of a system for measuring an incident angle of a light beam according to a first embodiment of the present invention, the system includes: an optical receiving device 11, a computing device 12 and at least one set of microlens arrays 13 with preset mounting parameters. As shown in fig. 2, in the present embodiment, for example, two sets of microlens arrays 13 may be provided, and the two sets of microlens arrays 13 may be disposed at a predetermined angle, wherein:
the optical receiving device 11 can be used to obtain spot information, such as position coordinates of a spot, a distance between two adjacent spots, and the like, formed on the optical receiving device 11 by the light to be measured through the at least one microlens array 13.
In a specific implementation, the optical receiving Device 11 may be selected according to system requirements, for example, a Charge-coupled Device (CCD) or a complementary Metal oxide semiconductor (cmos) may be used, which is not limited in this embodiment.
And the calculating device 12 is configured to calculate an incident angle of the light to be measured according to preset mounting parameters of the microlens array 13 and the light spot information acquired by the optical receiving device 11.
The installation parameters of the microlens array can be set according to actual requirements, and in this embodiment, the installation parameters can include the distance between the centers of two adjacent microlenses in the microlens array 13, the focal length of each microlens in the microlens array 13, the angle between each microlens in the microlens array 13 and a plane perpendicular to the receiving surface of the optical receiving device 11, and the like.
In a specific implementation, the microlenses in the microlens array 13 may be coplanar, and the angle between each microlens and a plane perpendicular to the receiving surface of the optical receiving device 11 may be the same, so that the distance between each microlens in the microlens array 13 and the receiving surface of the optical receiving device 11 may exhibit a gradient change.
Referring to FIG. 3, it is shown as a row of a microlens array, which includes four microlenses 131, 132, 133, 134 (the centers of the lenses are respectively O) arranged as shown in FIG. 31、O2、O3、O4And represents), the null optical axis is perpendicular to the receiving surface of the optical receiving device 11, and the intersection points with the optical receiving device 11 are respectively A1、A2、A3、A4When the light to be measured is incident at an angle of β degrees, the light spot is located at C on the optical receiving device 111、C2、C3、C4The distances from the lens centers of the four microlenses 131, 132, 133, 134 to the receiving surface of the optical receiving device 11 are x1、x2、x3、x4The angles between the four microlenses and the plane perpendicular to the receiving surface of the optical receiving device 11 are all α, where O2D1Perpendicular to O1A1The foot drop is D1And then:
x2=x1-lcosα,x3=x2-lcosα,...,xn=xn-1-lcosα。
to calculate x1And x2The relationship between the two is taken as an example, and the specific calculation method can be as follows:
at right triangle O1D1O2Middle, ∠ O2O1D1=α,O1O2=l,
Figure BDA0001499471700000041
Can obtain O1D1=lcosα;
In the rectangle O2D1A1A2In (D)1A1=O2A2Then O is2A2=O1A1-O1D1I.e. x2=x1-lcosα。
Can calculate out x by the same principle3,...,xnAnd will not be described herein.
In order to facilitate the calculation of the incident angles of the plurality of azimuth rays and ensure the measurement effect while using as few microlens arrays as possible, in a specific implementation, referring to fig. 4, the microlens arrays 13 may be arranged in four groups, wherein the measurement direction of two groups of microlens arrays 13 arranged at intervals is the horizontal direction (for example, the X direction shown in the figure), and the measurement direction of the other two groups of microlens arrays 13 arranged at intervals is the vertical direction (for example, the Y direction shown in the figure), so that the measurement can be performed from the horizontal direction and the vertical direction respectively, so as to realize the measurement from a plurality of azimuths and improve the comprehensiveness of the measurement result.
In this embodiment, in the case of using multiple microlens arrays, the relative angles between the microlens arrays and the optical receiving device may be the same, and the relative angles may be the angles between the microlenses in the microlens arrays and the plane perpendicular to the receiving surface of the optical receiving device.
Because the focal point of a part of the microlens array may be located in front of or behind the optical receiving device when the microlens array is obliquely arranged, and the light spots formed by the part of the microlens array are not clearest, a phenomenon that the light spots overlap due to the fact that the light spots are too large may exist on the optical receiving device, and therefore light spot position information cannot be obtained. Under the condition that the incident angle of the light is set to be 0-10 degrees, after a large number of experiments are carried out based on parameters such as changing the focal length of the micro lenses, the distance between the centers of the micro lenses in the array and the like, the relative angle can be set to be 76-84 degrees, so that the fact that light spots formed by the incident light on the optical receiving device are not overlapped is guaranteed, and accurate and effective light spot information is guaranteed to be obtained to participate in subsequent calculation.
In this embodiment, the incident angle of the light to be measured can be calculated by the calculating device 12 according to the preset installation parameters and the light spot information, and because it is considered that the relative angles of the plurality of microlens arrays are consistent, and the angles formed by the microlenses in each microlens array and the receiving surface of the optical receiving device are also consistent, only one set of microlens array (for example, including two microlenses) and the optical receiving device can be used, and for the calculation process, refer to fig. 5-1 and 5-2.
The centers of the two microlenses 131, 132 are located at O1And O2The zero optical axis is perpendicular to the receiving surface of the optical receiving device 11, and the intersection points with the optical receiving device 11 are respectively A1、A2When the light to be measured is incident at an angle of β degrees, the light spot is located at C on the optical receiving device 111、C2And (4) point. Suppose that the focal plane of the microlens lies at A2At F, intersects the optical receiving device 11 at A2Point (see fig. 5-1), then, in this case, the light spot a formed on the optical receiving device 11 by the light to be measured via the microlens 1322Is most clear, but in practical applications there are also situations where the focal plane of the microlens does not intersect the spot (see fig. 5-2).
Wherein, the installation parameters of the micro-lenses are preset, such as the distance l between the centers of two adjacent micro-lenses in the micro-lens array 13, the focal length f of each micro-lens in the micro-lens array 13, and the angle α between each micro-lens in the micro-lens array 13 and the plane perpendicular to the receiving surface of the optical receiving device 11, and further, the distance h between the light spots formed by the light to be measured through each micro-lens can be obtained through the measurement result of the optical receiving device 11, therefore, the incidence angle β of the light to be measured can be calculated through the calculating device 12 by a mathematical relational expression based on the above-mentioned determinable information.
Different calculation methods can be adopted for the two cases, as follows:
referring to fig. 5-1, for the first case where the focal plane of the microlens intersects with the light spot, the incident angle of the light to be measured is calculated as follows:
(1) at right triangle O2FA2Middle, ∠ O2A2F=α,O2F=f,
Figure BDA0001499471700000061
Can obtain the product
Figure BDA0001499471700000062
Then
Figure BDA0001499471700000063
(2) At right triangle O2A2C2Middle, ∠ C2O2A2=β,
Figure BDA0001499471700000064
To obtain
Figure BDA0001499471700000065
Then
Figure BDA0001499471700000066
(3) In a right triangle A2B1A1Middle, ∠ A2B1A1=α,A2B1=O2O1=l,
Figure BDA0001499471700000067
Figure BDA0001499471700000068
Then A is2A1=lsinα,A1B1=lcosα。
Then
Figure BDA0001499471700000069
(4) At right triangle O1A1C1In (1),
Figure BDA00014994717000000610
then
Figure BDA00014994717000000611
Then A is2A1=A2C1+C1A1=h+lcosαtanβ。
(5) According to the two A obtained in the step (3) and the step (4)2A1Are equal, i.e. A2A1Lsin α ═ h + lcos α tan β, then
Figure BDA0001499471700000072
Referring to fig. 5-2, for the second case where the focal plane of the microlens does not intersect the spot, where the focal plane of the microlens lies at FB1Where it intersects the optical receiving device at a point, O2F is perpendicular to FB1And the drop foot is F. Wherein, O2D1Perpendicular to O1A1Foot dropIs D1The calculation method of the incident angle of the light to be measured is as follows:
(1) at right triangle O2O1D1In (ii), O is obtained2D1=lsinα,O1D1Four-sided O ═ lcos α2D1A1A2Is rectangular, then A1A2=O2D1=lsinα。
(2) Suppose A1C1A in a right triangle1O1C1In, can be obtained as
Figure BDA0001499471700000074
(3) In a right triangle A2O2C2In (1), can obtain
Figure BDA0001499471700000075
Then A is2C1=A1A2-A1C1=lsinα-a。
(4) (5) determining two A according to the step (3) and the step (4)2C1Are equal to each other, can obtain
Figure BDA0001499471700000077
In the calculation process, the incident angle of the light to be measured is calculated through a determined mathematical relational expression based on determined information (the installation parameters of the micro lens planned in advance, the light spot information measured by the optical receiving device and the like), that is, the incident angle of the light to be measured is obtained based on the determined information and a determined calculation mode, so that the measurement precision of the incident angle of the light can be improved.
The measurement system for the light incident angle provided by this embodiment may include at least one set of microlens arrays, an optical receiving device, and a computing device, where the installation parameters are planned in advance, and the light spot information of the light to be measured, which is obtained by measurement by the optical receiving device, formed by the microlens arrays is calculated by the computing device in the measurement system according to the installation parameters, so as to obtain the measurement result, that is, the incident angle of the light to be measured may be calculated based on the determined information (the installation parameters planned in advance and the measured light spot information), so as to improve the measurement accuracy of the measurement system for the light incident angle.
Example two
Fig. 6 is a schematic flow chart of a method for measuring an incident angle of a light beam according to a second embodiment of the invention.
The method is based on the measurement system in the first embodiment and comprises the following steps:
s610, acquiring light spot information of the light to be detected on the optical receiving device through the at least one group of micro lens arrays with preset installation parameters through the optical receiving device.
The optical receiving Device may be a Charge-coupled Device (CCD) or a complementary Metal Oxide semiconductor (cmos) according to system requirements.
S620, calculating the incidence angle of the light to be measured according to the preset installation parameters and the light spot information through a calculating device;
the mounting parameters may include a distance between centers of two adjacent microlenses in the microlens array, a focal length of each microlens in the microlens array, and an angle between each microlens in the microlens array and a plane perpendicular to a receiving surface of the optical receiving device.
In a specific implementation, the microlenses in the microlens array are coplanar, and the angles between the microlenses and the plane perpendicular to the receiving surface of the optical receiving device are the same, so that the distances between the microlenses in the microlens array and the receiving surface of the optical receiving device can be changed in a gradient manner.
In order to calculate the incident angles of a plurality of azimuth rays conveniently, and ensure the measuring effect while adopting the number of the microlens array groups as small as possible, in the concrete implementation, the microlens arrays can be set into four groups, wherein the measuring direction of the microlens arrays arranged at intervals between two groups is the horizontal direction, and the measuring direction of the microlens arrays arranged at intervals between another two groups is the vertical direction.
In practical applications, in the case of using multiple microlens arrays, in the present embodiment, in the case of using multiple microlens arrays, the relative angle between each microlens array and the optical receiving device may be set to be the same, and the relative angle may be the angle between each microlens in the microlens array and a plane perpendicular to the receiving surface of the optical receiving device. In this embodiment, the relative angle may be 76 to 84 degrees.
The method for measuring the incident angle of light provided by this embodiment is based on a measurement system composed of at least one set of microlens array, optical receiving device and computing device, where the mounting parameters are planned in advance, and the light spot information formed by the light to be measured through the microlens array, which is measured by the optical receiving device, is calculated by the computing device in the measurement system according to the mounting parameters, so as to obtain the incident angle of the light to be measured as the measurement result, that is, the incident angle of the light to be measured can be calculated based on the determined information (the installation parameters planned in advance and the light spot information obtained by measurement), so as to improve the measurement accuracy of the measurement system on the incident angle of light.
Those of ordinary skill in the art will understand that: all or a portion of the steps of a method embodiment described above may be performed by hardware associated with program instructions. The program may be stored in a computer-readable storage medium. When executed, the program performs steps comprising the method embodiments described above; and the aforementioned storage medium includes: various media that can store program codes, such as ROM, RAM, magnetic or optical disks.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (6)

1. A system for measuring the angle of incidence of a light beam, comprising: an optical receiving device, a calculating device and at least one group of micro lens array with preset installation parameters,
the optical receiving device is used for acquiring light spot information formed by the light to be detected on the optical receiving device through the at least one group of micro-lens arrays;
the calculating device is used for calculating the incidence angle of the light to be measured according to the preset installation parameters and the light spot information;
the mounting parameters comprise the distance between the centers of two adjacent micro lenses in the micro lens array, the focal length of each micro lens in the micro lens array, and the angle between each micro lens in the micro lens array and a plane perpendicular to the receiving surface of the optical receiving device; the angles between each micro lens in the micro lens array and a plane perpendicular to the receiving surface of the optical receiving device are the same;
the micro lens arrays are four groups, wherein the measuring direction of the micro lens arrays arranged at intervals between two groups is the horizontal direction, and the measuring direction of the micro lens arrays arranged at intervals between the other two groups is the vertical direction.
2. The system of claim 1, wherein the relative angle between each set of microlens arrays and the optical receiving device is the same, the relative angle being the angle between each microlens in the microlens arrays and a plane perpendicular to the receiving surface of the optical receiving device.
3. The system of claim 2, wherein the relative angle is 76 to 84 degrees.
4. A method for measuring the angle of incidence of a light ray, the method being based on the system of claim 1, the method comprising:
acquiring light spot information formed by the light to be detected on the optical receiving device through the at least one group of micro lens arrays with preset installation parameters by the optical receiving device;
calculating to obtain the incident angle of the light to be measured according to the preset installation parameters and the light spot information through a calculating device;
the mounting parameters comprise the distance between the centers of two adjacent micro lenses in the micro lens array, the focal length of each micro lens in the micro lens array, and the angle between each micro lens in the micro lens array and a plane perpendicular to the receiving surface of the optical receiving device;
the angles between each micro lens in the micro lens array and a plane perpendicular to the receiving surface of the optical receiving device are the same;
the micro lens arrays are four groups, wherein the measuring direction of the micro lens arrays arranged at intervals between two groups is the horizontal direction, and the measuring direction of the micro lens arrays arranged at intervals between the other two groups is the vertical direction.
5. The method of claim 4, wherein the relative angle between each set of microlens arrays and the optical receiving device is the same, the relative angle being the angle between each microlens in the microlens arrays and a plane perpendicular to the receiving surface of the optical receiving device.
6. The method of claim 5, wherein the relative angle is 76 to 84 degrees.
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