CN114894122B

CN114894122B - Perpendicularity measuring probe and measuring device

Info

Publication number: CN114894122B
Application number: CN202210443972.2A
Authority: CN
Inventors: 王三宏; 金少峰; 王刚奎
Original assignee: Shenzhen Sincevision Technology Co ltd
Current assignee: Shenzhen Sincevision Technology Co ltd
Priority date: 2022-04-26
Filing date: 2022-04-26
Publication date: 2023-05-16
Anticipated expiration: 2042-04-26
Also published as: CN114894122A

Abstract

The application provides a perpendicularity measuring probe and measuring device. The perpendicularity measuring probe includes: the first lens array comprises a plurality of first lenses, the plurality of first lenses are used for dividing parallel first light beams into a plurality of converging second light beams and respectively focusing the converging second light beams to a first object plane to be measured, then the plurality of first lenses are used for respectively receiving a plurality of third light beams reflected or backscattered by the first object plane to be measured along an original light path, and synthesizing parallel fourth light beams, and the fourth light beams can be used for judging whether the first object plane to be measured is perpendicular to a first preset reference line or not, wherein the first preset reference line is perpendicular to a plane where the plurality of first lenses are located. The perpendicularity measuring probe provided by the application can improve the accuracy of perpendicularity measurement.

Description

Perpendicularity measuring probe and measuring device

Technical Field

The application relates to the field of measuring distance and measuring level, in particular to a perpendicularity measuring probe and a measuring device.

Background

With the development of technology, there is an increasing demand for precision machining, and vertical alignment measurement is often required in the precision machining process, but errors are easily generated in the vertical alignment measurement process due to the numerous devices required for the vertical alignment measurement.

Disclosure of Invention

In a first aspect, embodiments of the present application provide a perpendicularity measuring probe, the perpendicularity measuring probe comprising:

the first lens array comprises a plurality of first lenses, the plurality of first lenses are used for dividing parallel first light beams into a plurality of converging second light beams and respectively focusing the converging second light beams to a first object plane to be measured, then the plurality of first lenses are used for respectively receiving a plurality of third light beams reflected or backscattered by the first object plane to be measured along an original light path, and synthesizing parallel fourth light beams, and the fourth light beams can be used for judging whether the first object plane to be measured is perpendicular to a first preset reference line or not, wherein the first preset reference line is perpendicular to a plane where the plurality of first lenses are located.

Wherein, the perpendicularity measuring probe further includes:

the reflecting mirror is arranged corresponding to the plurality of first lenses, the plane where the reflecting mirror is located and the plane where the plurality of first lenses are located form an included angle of 45 degrees, and the reflecting mirror is used for reflecting the parallel first light beams to the first lens array.

Wherein, the perpendicularity measuring probe further includes:

the beam splitter is arranged corresponding to the first lenses, a beam splitting surface of the beam splitter forms an included angle of 45 degrees with planes where the plurality of first lenses are positioned, and the beam splitter is used for reflecting the first light beam part to the first lens array and allowing the rest part of the first light beam to transmit; and

The second lens array is arranged at intervals with the first lens array, the second lens array comprises a plurality of second lenses, the planes of the second lenses are perpendicular to the planes of the first lenses, the second lenses are used for dividing part of the first light beams transmitted by the beam splitter into a plurality of converging fifth light beams and focusing the converging fifth light beams to a second object plane respectively, the diverging sixth light beams reflected or scattered back by the second object plane to be measured along an original light path are received through the second lenses respectively, parallel seventh light beams are synthesized, and the seventh light beams can be used for judging whether the second object plane to be measured is perpendicular to a second preset reference line or not, wherein the second preset reference line is perpendicular to the planes of the second lenses.

The first lens array comprises at least three first lenses, and the at least three first lenses are arranged in a non-collinear manner; the second lens array comprises at least three second lenses, and the at least three second lenses are arranged in a non-collinear manner.

The perpendicularity measuring probe further comprises a plurality of shading sleeves, each shading sleeve corresponds to one first lens or one second lens, and the number of the shading sleeves is equal to the sum of the number of the first lenses and the number of the second lenses.

Wherein, the perpendicularity measuring probe further includes:

the optical fiber connector comprises an optical fiber connector, a connecting rod and a connecting rod, wherein the optical fiber connector is used for connecting and fixing an optical fiber; and

the front focus of the collimating mirror coincides with the preset point position of incidence of the light beam, the collimating mirror is used for collimating the light beam output by the optical fiber into a parallel first light beam, and the collimating mirror is also used for converging the parallel fourth light beam into an eighth light beam and focusing the eighth light beam onto the preset point position of incidence of the light beam;

when the verticality measuring probe further comprises the second lens array, the collimating lens is further used for converging the parallel seventh light beam into a ninth light beam and focusing the ninth light beam to a preset incidence point of the light beam.

In a second aspect, embodiments of the present application further provide a measurement device, including:

the perpendicularity measuring probe of the first aspect; and

a spectral interferometer that emits a light beam to the perpendicularity measuring probe and receives a light beam returned from the perpendicularity measuring probe for optical path difference measurement.

Wherein the spectral interferometers comprise:

a broad spectrum light source for outputting a light beam;

an optical coupler for coupling the light beam output from the broad spectrum light source to a perpendicularity measuring probe and for coupling the light beam returned from the perpendicularity measuring probe to a spectrometer;

The spectrometer is used for receiving the light beam returned from the perpendicularity measuring probe and carrying out power spectrum measurement on the light beam returned from the perpendicularity measuring probe so as to obtain an interference power spectrum; and

the data processor is electrically connected with the spectrometer, so as to receive the measurement data of the interference power spectrum, obtain the optical path difference according to the interference power spectrum, and judge whether the object plane to be measured is perpendicular to a preset reference line or not according to the optical path difference.

Wherein, when the perpendicularity measuring probe further comprises the optical fiber ferrule and the collimating mirror, the measuring device further comprises:

an optical fiber for connecting the spectral interferometers and the perpendicularity measuring probes to transmit light beams between the spectral interferometers and the perpendicularity measuring probes;

the optical coupler includes:

the optical fiber circulator is provided with a first interface, a second interface and a third interface which are circumferentially arranged at intervals, the first interface is connected with the wide spectrum light source and is used for receiving light beams output by the wide spectrum light source, the optical fiber circulator is used for transmitting the light beams output by the wide spectrum light source to the second interface and transmitting the light beams to the perpendicularity measuring probe through the second interface, the second interface is also used for receiving the light beams returned from the perpendicularity measuring probe, and the optical fiber circulator is used for transmitting the received light beams to the spectrometer through the third interface.

When the perpendicularity measuring probe further comprises the second lens array, the perpendicularity measuring probe is further used for receiving light beams returned from the second object plane to be measured and transmitting the light beams to the spectrometer, the spectrometer performs power spectrum measurement on the light beams returned from the first object plane to be measured and the light beams returned from the second object plane to be measured so as to obtain interference power spectrums, and the data processor obtains optical path differences according to the interference power spectrums and judges whether the first object plane to be measured is perpendicular to the second object plane to be measured or not according to the optical path differences.

The utility model provides a perpendicularity measuring probe, perpendicularity measuring probe includes first lens array, first lens array includes a plurality of first lenses, a plurality of first lenses are used for dividing into the parallel first light beam and converge the multi-beam second light beam to first object plane of waiting to be measured respectively, then via a plurality of first lenses receive respectively by first object plane along former light path reflection or back scattering's multi-beam third light beam to synthesize parallel fourth light beam, the fourth light beam can be used to judge whether first object plane of waiting to be measured is perpendicular with first default datum line, wherein, first default datum line with the plane that a plurality of first lenses are located is perpendicular. The perpendicularity measuring probe has few devices, and can avoid optical axis drift, so that measuring errors are reduced. In addition, the perpendicularity measuring probe does not contain an electromagnetic device, so that the perpendicularity measuring probe can avoid electromagnetic interference with a measuring result, and measuring accuracy is improved. Therefore, the perpendicularity measuring probe provided by the application can improve the accuracy of perpendicularity measurement.

Drawings

In order to more clearly illustrate the technical solutions of the examples of the present application, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural diagram of a perpendicularity measuring probe according to an embodiment of the present application.

Fig. 2 is a schematic structural diagram of a first lens array in the verticality measurement probe according to the embodiment of fig. 1.

Fig. 3 is a schematic diagram of a verticality measurement probe for measuring a first object plane to be measured according to the embodiment of fig. 1.

Fig. 4 is a schematic structural diagram of a perpendicularity measuring probe according to another embodiment of the present application.

Fig. 5 is a schematic structural diagram of a perpendicularity measuring probe according to another embodiment of the present application.

Fig. 6 is a schematic diagram of a verticality measurement probe according to the embodiment of fig. 5 for measuring a first object plane to be measured and a second object plane to be measured.

Fig. 7 (a) and (b) are schematic structural diagrams of the first lens array provided in the embodiment of fig. 1.

Fig. 8 (a) and (b) are schematic structural diagrams of the second lens array provided in the embodiment of fig. 7.

Fig. 9 is a schematic structural view of a perpendicularity measuring probe according to another embodiment of the present application.

Fig. 10 is a schematic structural diagram of a perpendicularity measuring probe according to another embodiment of the present application.

Fig. 11 is a schematic structural diagram of a measurement device according to an embodiment of the present application.

Fig. 12 is a schematic diagram of a working procedure of the measuring device provided in the embodiment of fig. 11 for measuring.

Fig. 13 is a schematic structural diagram of a spectrum interferometer in the verticality measurement probe according to the embodiment of fig. 11.

Fig. 14 is a schematic structural diagram of a measurement device according to another embodiment of the present application.

Fig. 15 is a schematic structural diagram of a spectrum interferometer in the measuring apparatus provided in the embodiment of fig. 14.

Reference numerals: a measuring device 1; a verticality measuring probe 10; a spectral interferometry instrument 20; an optical fiber 30; a first lens array 110; a fiber stub 120; a collimator mirror 130; a reflecting mirror 140; a second lens array 150; a housing 160; a beam splitter 170; a light shielding sleeve 180; a broad spectrum light source 210; an optical coupler 220; a spectrometer 230; a data processor 240; a first lens 111; a second lens 151; a fiber circulator 221; a first interface 2211; a second interface 2212; a third interface 2213; a first light beam L1; a second light beam L2; a third light beam L3; a fourth light beam L4; a fifth light beam L5; a sixth light beam L6; a seventh light beam L7; an eighth light beam L8; a ninth light beam L9; a first object plane W1 to be measured; the second object plane W2 to be measured.

Detailed Description

The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without undue burden, are within the scope of the present application.

The terms first, second and the like in the description and in the claims of the present application and in the above-described figures, are used for distinguishing between different objects and not for describing a particular sequential order. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed steps or elements but may include other steps or elements not listed or inherent to such process, method, article, or apparatus.

Reference herein to "an embodiment" or "an implementation" means that a particular feature, structure, or characteristic described in connection with the embodiment or implementation may be included in at least one embodiment of the present application. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the embodiments described herein may be combined with other embodiments.

Embodiments of the present application provide a perpendicularity measuring probe 10. Referring to fig. 1, fig. 2 and fig. 3 together, fig. 1 is a schematic structural diagram of a verticality measuring probe according to an embodiment of the present application; FIG. 2 is a schematic view of a first lens array in the verticality measurement probe according to the embodiment of FIG. 1; fig. 3 is a schematic diagram of a verticality measurement probe for measuring a first object plane to be measured according to the embodiment of fig. 1. In this embodiment, the perpendicularity measuring probe 10 includes a first lens array 110. The first lens array 110 includes a plurality of first lenses 111. The first lenses 111 are used for dividing the parallel first light beam L1 into a plurality of converging second light beams L2, focusing the converging second light beams L2 on the first object plane W1, respectively, and then receiving a plurality of third light beams L3 reflected or backscattered by the first object plane W1 along the original optical path via the first lenses 111, respectively, and synthesizing a parallel fourth light beam L4. The fourth light beam L4 may be used to determine whether the first object plane W1 is perpendicular to a first preset reference line. The first preset reference line is perpendicular to the plane where the plurality of first lenses 111 are located.

In this embodiment, the verticality measurement probe 10 is applied to optical measurement of vertical alignment, and specifically, the verticality measurement probe 10 is used to measure whether the first object plane W1 to be measured is vertical to a first preset reference line.

In this embodiment, the first lens array 110 includes a plurality of first lenses 111. The plurality of first lenses 111 may be used to convert the parallel light beam into a converging light beam for emission, and to convert the counter-propagating diverging light beam into a parallel light beam for reception back. One of the first lenses 111 corresponds to one of the second light beams L2 and one of the third light beams L3. Specifically, in an embodiment, the first lens array 110 is a monolithic microlens array, the first lenses 111 are microlenses, and opaque light absorbing materials are disposed between the plurality of first lenses 111. In another embodiment, the first lens array 110 is fabricated by mounting the plurality of first lenses 111 on a carrier with a plurality of mounting holes, and the carrier is fabricated with light absorbing material except for the plurality of mounting holes.

In the present embodiment, the plurality of first lenses 111 are arranged in a coplanar manner, that is, the plurality of first lenses 111 are arranged in a coplanar manner in a cross section perpendicular to a direction in which the first light beam L1 is incident on the plurality of first lenses 111. Such that the first light beam L1 is simultaneously split into the plurality of second light beams L2 at the plurality of first lenses 111 facilitates measurement by the verticality measurement probe 10.

In this embodiment, the plurality of first lenses 111 receives the divergent third light beams L3 and synthesizes a parallel fourth light beam L4, and determines whether the first object plane W1 is perpendicular to a first preset reference line by measuring the fourth light beam L4.

Specifically, the first preset reference line is perpendicular to the plane where the plurality of first lenses 111 are located. The plane of the first lenses 111 is a plane of a cross section of the first lenses 111 perpendicular to the direction in which the first light beam L1 enters the first lenses 111. When the optical path difference of the fourth light beam L4 approaches zero, it indicates that the distances of the third light beams L3 transmitted from the first object plane W1 to the first lenses 111 are the same, i.e. the first object plane W1 is parallel to the planes of the first lenses 111. Therefore, the first object plane W1 is perpendicular to the first preset reference line. When the optical path difference of the fourth light beam L4 does not tend to zero, the first object plane W1 is perpendicular to the first preset reference line by adjusting the posture of the perpendicularity measuring probe or the first object plane W1 until the optical path difference of the fourth light beam L4 tends to zero.

The application provides a verticality measurement probe 10, the verticality measurement probe 10 includes a first lens array 110, the first lens array 110 includes a plurality of first lenses 111, the plurality of first lenses 111 are configured to divide a parallel first light beam L1 into a plurality of converging second light beams L2 and focus the converging second light beams to a first object plane W1 respectively, and then receive a plurality of third light beams L3 reflected or backscattered by the first object plane W1 along an original light path via the plurality of first lenses 111 respectively, and synthesize a parallel fourth light beam L4, where the fourth light beam L4 may be used to determine whether the first object plane W1 is perpendicular to a first preset reference line, where the first preset reference line is perpendicular to a plane where the plurality of first lenses 111 are located. The verticality measuring probe 10 has few devices, and can avoid optical axis drift, thereby reducing measuring errors. In addition, the perpendicularity measuring probe 10 does not include an electromagnetic device, so the perpendicularity measuring probe 10 can avoid electromagnetic interference with a measurement result, thereby improving measurement accuracy. Therefore, the verticality measurement probe 10 provided by the application can improve the accuracy of verticality measurement.

Referring to fig. 4, fig. 4 is a schematic structural diagram of a verticality measurement probe according to another embodiment of the present application. In this embodiment, the perpendicularity measuring probe 10 further includes a mirror 140. The reflecting mirror 140 is disposed corresponding to the plurality of first lenses 111, and a plane where the reflecting mirror 140 is located forms an included angle of 45 ° with a plane where the plurality of first lenses are located. The reflecting mirror 140 is configured to reflect the parallel first light beam L1 to the first lens array 110.

In the present embodiment, the reflecting mirror 140 is disposed corresponding to the plurality of first lenses 111 to reflect the parallel first light beams L1 to the plurality of first lenses 111. Specifically, the plane of the reflecting mirror 140 forms an angle of 45 ° with the planes of the first lenses 111. The parallel first light beam L1 is incident at an angle of 45 ° to the plane of the reflecting mirror 140, so that the reflecting mirror 140 can reflect the first light beam L1 to the plurality of first lenses 111, and the first light beam L1 is perpendicularly incident to the plurality of first lenses 111. The direction of the light beam entering the verticality measuring probe 10 is changed by the reflecting mirror 140, so that the verticality measuring probe 10 can measure the verticality of the first object plane W1 to be measured parallel to the initial direction of the light beam entering the verticality measuring probe 10, thereby avoiding the occupation space of a device for transmitting the light beam to the verticality measuring probe 10, and further enabling the verticality measuring probe 10 to be used for a measuring scene with smaller available space.

Referring to fig. 5 and 6, fig. 5 is a schematic structural diagram of a verticality measurement probe according to another embodiment of the present application;

fig. 6 is a schematic diagram of a verticality measurement probe according to the embodiment of fig. 5 for measuring a first object plane to be measured and a second object plane to be measured. In this embodiment, the verticality measurement probe further includes a beam splitter 170 and a second lens array 150. The beam splitter 170 is disposed corresponding to the first lens 111, and a beam splitting plane of the beam splitter 170 forms an included angle of 45 ° with a plane where the plurality of first lenses 111 are located. The beam splitter 170 is configured to partially reflect the first light beam L1 to the first lens array 110 and allow the remaining portion of the first light beam L1 to be transmitted. The second lens array 150 is spaced apart from the first lens array 110. The second lens array 150 includes a plurality of second lenses 151. The planes of the second lenses 151 are perpendicular to the planes of the first lenses 111. The plurality of second lenses 151 are configured to split a portion of the first light beam L1 transmitted by the beam splitter 170 into a converging fifth light beam L5, focus the converging fifth light beam L5 onto the second object plane W2, and then receive, via the plurality of second lenses 151, a diverging sixth light beam L6 reflected or scattered back by the second object plane W2 along the original optical path, respectively, and synthesize a parallel seventh light beam L7. The seventh light beam L7 may be used to determine whether the second object plane W2 to be measured is perpendicular to a second preset reference line, where the second preset reference line is perpendicular to the planes where the plurality of second lenses 151 are located.

In this embodiment, the beam splitter 170 is configured to reflect a part of the parallel first light beams L1 to the first lens array 110, so as to split the plurality of first lenses 111 into a plurality of converging second light beams L2 and exit through the plurality of first lenses 111. The other part of the parallel first light beams L1 is incident on the second lens array 150 through the beam splitter 170, so as to be split into a plurality of converging fifth light beams L5 by the plurality of second lenses 151 and exit through the plurality of second lenses 151.

In this embodiment, the second lens array 150 includes a plurality of second lenses 151. The plurality of second lenses 151 may be used to convert the parallel light beam into a converging light beam for emission, and to convert the counter-transmitted diverging light beam into a parallel light beam for reception back. One of the second lenses 151 corresponds to one of the fifth light beam L5 and one of the sixth light beam L6. Specifically, in an embodiment, the second lens array 150 is a monolithic microlens array, the second lenses 151 are microlenses, and opaque light absorbing materials are disposed between the plurality of second lenses 151. In another embodiment, the second lens array 150 is fabricated by mounting the plurality of second lenses 151 on a carrier with a plurality of mounting holes, and the carrier is fabricated with light absorbing material except for the plurality of mounting holes.

In the present embodiment, the plurality of second lenses 151 are disposed in a coplanar manner, that is, the plurality of second lenses 151 are disposed in a coplanar manner in a cross section perpendicular to a direction in which the first light beam L1 is incident on the plurality of second lenses 151. So that the first light beam L1 is simultaneously split into the plurality of fifth light beams L5 at the plurality of second lenses 151, it is advantageous for the perpendicularity measuring probe 10 to perform measurement.

In this embodiment, the plurality of second lenses 151 receive the divergent plurality of sixth light beams L6 and synthesize a parallel seventh light beam L7, and determine whether the second object plane W2 to be measured is perpendicular to a second preset reference line by measuring the seventh light beam L7.

Specifically, the second preset reference line is perpendicular to the plane in which the plurality of second lenses 151 are located. The plane of the plurality of second lenses 151 is a plane of a cross section of the plurality of second lenses 151 perpendicular to a direction in which the first light beam L1 enters the plurality of second lenses 151. After shielding the first lens array 110, when the optical path difference of the seventh light beam L7 approaches zero, it indicates that the distances of the multiple sixth light beams L6 transmitted from the second object plane W2 to the multiple second lenses 151 are the same, that is, the second object plane W2 to be measured is parallel to the planes where the multiple second lenses 151 are located. Therefore, the second object plane W2 to be measured is perpendicular to the second preset reference line. When the optical path difference of the seventh light beam L7 does not reach zero, the second object plane W2 to be measured may be adjusted until the optical path difference of the seventh light beam L7 reaches zero, so that the second object plane W2 to be measured is perpendicular to the second preset reference line.

In addition, in the present embodiment, the verticality measurement probe 10 may also be used to measure that the first object plane W1 is perpendicular to the second object plane W2. Taking the first lens array 110 as an example for shielding, after the second object plane W2 to be measured is adjusted to be perpendicular to the second preset reference line W2, shielding the first lens array 110 is removed. The parallel first light beam L1 is partially reflected to the first lens array 110 via the beam splitter 170, and the converged second light beam L2 is emitted via the plurality of first lenses 111, and the other part of the parallel first light beam L1 is incident to the second lens array 150 via the beam splitter 170, and then the converged fifth light beam L5 is emitted via the plurality of second lenses 151. The converging second light beams L2 are reflected or backscattered at the first object plane W1 to form the diverging third light beams L3, and the diverging third light beams L3 are received by the first lenses 111 and combined into the fourth light beam L4 in parallel. The converging fifth light beams L5 are irradiated to the second object plane W2 to be measured and reflected or backscattered to form diverging sixth light beams L6, and the diverging sixth light beams L6 are received by the second lenses 151 and combined into the parallel seventh light beams L7. Both the fourth light beam L4 and the seventh light beam L7 enter the spectral interferometer 20. In an embodiment, the difference between the distance from the beam splitter 170 to the first lens array 110 and the distance to the second lens array 150 in the beam transmission direction is larger than the measurement range of the spectral interferometer 20, and the fourth beam L4 and the seventh beam L7 interfere with each other, but the fourth beam L4 and the seventh beam L7 do not interfere with each other. Therefore, when the optical path difference has a non-zero value, the first object plane W1 is not parallel to the first lenses 111, i.e. the first object plane W1 is not perpendicular to the second object plane W2. By adjusting the posture of the first object plane W1 to be measured or adjusting the postures of the verticality measuring probe 10 and the second object plane W2 to be measured as a whole until the optical path difference tends to be zero, the first object plane W1 to be measured is perpendicular to the second object plane W2 to be measured. In another embodiment, the difference between the distance of the beam from the beam splitter 170 to the first lens array 110 and the distance to the second lens array 150 in the beam transmission direction is less than or equal to the measurement range of the spectral interferometer 20, and interference occurs between the fourth beam L4 and the seventh beam L7 in addition to the interference occurring in the fourth beam L4 and the seventh beam L7, respectively. If the distance between the beam splitter 170 and the first lens array 110 along the beam transmission direction is not equal to the distance between the beam splitter 170 and the second lens array 150, the first object plane W1 is parallel to the first lenses 111, that is, the first object plane W1 is perpendicular to the second object plane W2, only if the optical path difference has a fixed non-zero value, that is, the difference between the distance between the beam splitter 170 and the first lens array 110 along the beam transmission direction and the distance between the beam splitter and the second lens array 150 is 2 times. If the distance from the beam splitter 170 to the first lens array 110 along the beam transmission direction is equal to the distance from the second lens array 150, when the optical path difference tends to be zero, the first object plane W1 is perpendicular to the second object plane W2.

Referring to fig. 7 and 8, fig. 7 (a) and (b) are schematic structural diagrams of the first lens array provided in the embodiment of fig. 1;

fig. 8 (a) and (b) are schematic structural diagrams of the second lens array provided in the embodiment of fig. 1. In this embodiment, the first lens array 110 includes at least three first lenses 111, and the at least three first lenses 111 are arranged in a non-collinear manner. The second lens array 150 includes at least three second lenses 151. The at least three second lenses 151 are arranged in a non-collinear arrangement.

In this embodiment, since at least three non-collinear arrangement points are required for measuring whether the first object plane W1 is perpendicular to the first preset reference line, that is, at least three second light beams L2 are required, at least three first lenses 111 are required for the first lens array 110, and at least three first lenses 111 are arranged non-collinearly.

In this embodiment, since at least three non-collinear arrangement points are required for measuring whether the second object plane W2 is perpendicular to the second object plane W2, that is, at least three beams of the fifth light beam L5 are required, at least three second lenses 151 are required for the second lens array 150, and at least three second lenses 151 are arranged in a non-collinear manner.

In this embodiment, since the dimensions of the first lens array 110 and the second lens array 150 can be designed to be very small, the dimension of the verticality measuring probe 10 can be designed to be relatively small, for example, the outer diameter of the verticality measuring probe 10 can be, but is not limited to, 100 μm or 2mm, so that the verticality measuring probe 10 can be applied to a relatively narrow space for vertical measurement. The size of the verticality measuring probe 10 is not limited in this embodiment, the size of the verticality measuring probe 10 is designed according to a specific measuring environment, and the size of the verticality measuring probe 10 is not limited to a small size, but may be designed to a larger size, for example, the outer diameter of the verticality measuring probe 10 may be, but is not limited to, 10mm, 20mm, 30mm, or the like.

In the present embodiment, the cross-sectional shape of the plurality of first lenses 111 in the direction perpendicular to the first direction may be, but not limited to, a circle, a rectangle, a polygon, or the like. The cross-sectional shape of the plurality of second lenses 151 in the direction perpendicular to the second direction may be, but is not limited to, circular, rectangular, polygonal, or the like. The first direction is a direction in which the first light beam L1 is incident on the plurality of first lenses 111, and the second direction is a direction in which the first light beam L1 is incident on the second lenses 151.

In the present embodiment, the at least three first lenses 111 have the same optical performance, the same aperture, and the same focal length. Wherein the at least three first lenses 111 have a longer focal depth, the measurement error can be reduced. The at least three second lenses 151 have the same optical performance, the same aperture, and the same focal length. Wherein the at least three second lenses 151 have a longer focal depth, the measurement error can be reduced.

The number of the second lenses 151 included in the second lens array 150 is the same as or different from the number of the first lenses 111 included in the first lens array 110. The outer diameter of the second lens 151 is the same as or different from the outer diameter of the first lens 111. The outer diameter of the second lens array 150 is the same as or different from the outer diameter of the first lens array 110.

Referring to fig. 9, fig. 9 is a schematic structural diagram of a verticality measurement probe according to another embodiment of the present application. In this embodiment, the verticality measurement probe 10 further includes a plurality of light shielding sleeves 180, each of the light shielding sleeves 180 is disposed corresponding to one of the first lenses 111 or one of the second lenses 151, and the number of the light shielding sleeves 180 is equal to the sum of the number of the first lenses 111 and the number of the second lenses 151.

In this embodiment, each of the first lenses 111 is disposed corresponding to one of the light shielding sleeves 180, and the light shielding sleeve 180 disposed corresponding to the first lens 111 has an opening toward the first object plane W1, so that a light beam can exit to the first object plane W1 through the opening. The light shielding sleeve 180 can prevent the light beam emitted via the first lens 111 from being reflected or backscattered on the first object plane W1 from entering the other first lenses 111 disposed adjacently. Further, the size of the light shielding sleeve 180 in the direction in which the first lens 111 points to the light shielding sleeve 180 is smaller than the focal length of the first lens 111.

In this embodiment, each of the second lenses 151 is disposed corresponding to one of the light shielding sleeves 180, and the light shielding sleeve 180 disposed corresponding to the second lens 151 has an opening toward the second object plane W2, so that a light beam can be emitted to the second object plane W2 through the opening. The light shielding sleeve 180 can prevent the light beam emitted from the second lens 151 from being reflected or backscattered on the second object plane W2 to be measured from entering the other second lenses 151 disposed adjacently. Further, the size of the light shielding sleeve 180 in the direction in which the second lens 151 points to the light shielding sleeve 180 is smaller than the focal length of the second lens 151.

Referring to fig. 10, fig. 10 is a schematic structural diagram of a verticality measurement probe according to another embodiment of the present application. In this embodiment, the perpendicularity measuring probe 10 further includes an optical fiber ferrule 120 and a collimator lens 130. The fiber ferrule 120 is used to connect and secure the optical fiber 30. The front focal point of the collimator 130 coincides with a preset point position of incidence of the light beam, so as to collimate the light beam output by the optical fiber into a parallel first light beam L1, and the collimator 130 is further configured to converge the parallel fourth light beam L4 into an eighth light beam L8 and focus the eighth light beam L8 to the preset point position of incidence of the light beam. When the verticality measurement probe 10 further includes the second lens array 150, the collimator 130 is further configured to converge the parallel seventh light beam L7 into a ninth light beam L9 and focus the ninth light beam L9 to a preset point of incidence of the light beam.

In this embodiment, the optical fiber ferrule 120 is disposed at one side of the collimator lens 130, and the end surface of the optical fiber 30 from which the first light beam L1 exits is located at the focal point of the collimator lens 130, that is, the light beam incident preset point is favorable for the parallel fourth light beam L4 and the parallel seventh light beam L7 to be converged into the eighth light beam L8 and the ninth light beam L9 by the collimator lens 130 and coupled into the optical fiber 30 so as to increase the light energy received by the optical fiber 30. The first lenses 111 and the second lenses 151 are disposed on the other side of the collimating mirror 130 to receive the collimated light collimated by the collimating mirror 130. After the first light beam L1 is collimated by the collimator 130, the parallelism of the first light beam L1 when transmitted to the plurality of first lenses 111 and the plurality of second lenses 151 is improved.

The embodiment of the application also provides a measuring device 1. Referring to fig. 11 and 12, fig. 11 is a schematic structural diagram of a measuring device according to an embodiment of the present disclosure; fig. 12 is a schematic diagram of a working procedure of the measuring device provided in the embodiment of fig. 11 for measuring. In the present embodiment, the measuring device 1 includes a spectral interferometer 20 and the verticality measuring probe 10 according to any of the foregoing embodiments. The spectral interferometers 20 are used to transmit light beams to the perpendicularity measuring probe 10 and to receive light beams returned from the perpendicularity measuring probe 10 for optical path difference measurement.

In the present embodiment, the measuring device 1 is used for optical perpendicularity alignment measurement.

Specifically, the measurement device 1 is used to measure the perpendicularity between the first object plane W1 to be measured and the first preset reference line. The working procedure for taking measurements with the measuring device 1 may include, but is not limited to: s1, S2, S3 and S4. Steps S1, S2, S3 and S4 will be described in detail.

S1, providing a first object plane W1, and setting the first lens array 110 towards the first object plane W1.

In this embodiment, the first lens array 110 is disposed towards the first object plane W1, i.e. the plurality of first lenses 111 are disposed towards the first object plane. Wherein the first object plane W1 is near the focal plane of the first lenses 111.

S2, the beam is output through the spectrum interferometer 20 and exits through the verticality measurement probe 10.

In this embodiment, the light beam output by the spectral interferometer 20 is low-coherence light, and the low-coherence light has good distance measurement characteristics. Therefore, the relative physical quantity of the sample to be measured can be determined by extracting the interference information of the back scattered light (or the surface reflected light) of two different parts of the sample to be measured, and the method has higher sensitivity and precision and is suitable for non-contact nondestructive measurement.

In this embodiment, when the perpendicularity measuring probe 10 does not include the collimator lens 130, the beam output from the spectral interferometer 20 is the parallel first beam L1. When the perpendicularity measuring probe 10 includes the collimator lens 130, the beam output by the spectrum interferometer 20 is a divergent beam, and the collimator lens 130 is used for collimating the divergent beam output by the spectrum interferometer 20 into a parallel first beam L1.

S3, receiving the light beam returned from the perpendicularity measuring probe 10 by using the spectral interferometer 20, and calculating an optical path difference.

In the present embodiment, the spectrum interferometer 20 receives the light beam returned from the perpendicularity measuring probe 10, performs power spectrum measurement on the light returned from the perpendicularity measuring probe 10 to obtain an interference power spectrum, and further calculates an optical path difference.

In the present embodiment, when the perpendicularity measuring probe 10 does not include the collimator lens 130, the beam received by the spectral interferometer 20 from the perpendicularity measuring probe 10 is the parallel fourth beam L4. When the perpendicularity measuring probe 10 includes the collimator lens 130, the light beam received from the perpendicularity measuring probe 10 by the spectral interferometry 20 is a converging eighth light beam L8.

S4, enabling the first object plane W1 to be perpendicular to the first preset reference line through adjustment.

When the optical path difference of the light beam received by the spectrum interferometer 20 from the perpendicularity measuring probe 10 is a non-zero value, it indicates that the first object plane W1 to be measured is not perpendicular to the first preset reference line. By adjusting the posture of the verticality measuring probe 10 or the first object plane W1 until the optical path difference approaches zero, the first object plane W1 may be perpendicular to the first preset reference line, so as to achieve verticality alignment of the first object plane W1.

The measuring device 1 provided by the application is used for carrying out vertical alignment measurement based on the perpendicularity measuring probe 10, and the perpendicularity measuring probe 10 has few devices, so that optical axis drift can be avoided, and measuring errors are reduced. Furthermore, the perpendicularity measuring probe 10 does not contain an electromagnetic device, so that the perpendicularity measuring probe 10 can avoid electromagnetic interference with a measurement result, thereby improving the measurement accuracy of the measuring apparatus 1. Therefore, the measuring device 1 provided by the present application can improve the verticality measuring accuracy.

Referring to fig. 13, fig. 13 is a schematic structural diagram of a spectrum interferometer in the verticality measurement probe according to the embodiment of fig. 11. In this embodiment, the spectral interferometer 20 includes a broad spectrum light source 210, an optical coupler 220, a spectrometer 230, and a data processor 240. The broad spectrum light source 210 is used to output a light beam. The optical coupler 220 is used to couple the light beam output from the broad spectrum light source 210 to the perpendicularity measuring probe 10, and to couple the light beam returned from the perpendicularity measuring probe 10 to the spectrometer 230. The spectrometer 230 is configured to receive the light beam returned from the perpendicularity measuring probe 10 and perform power spectrum measurement on the light beam returned from the perpendicularity measuring probe 10 to obtain an interference power spectrum. The data processor 240 is electrically connected to the spectrometer 230, so as to receive the measurement data of the interference power spectrum, obtain an optical path difference according to the interference power spectrum, and determine whether the object plane to be measured is perpendicular to a preset reference line according to the optical path difference.

In this embodiment, the light beam output by the broad spectrum light source 210 is low coherence light.

In the present embodiment, the measurement device 1 is used to measure the perpendicularity between the first object plane W1 and the first preset reference line.

When the perpendicularity measuring probe 10 does not include the collimator mirror 130, the optical coupler 220 is configured to couple the parallel first light beam L1 to the perpendicularity measuring probe 10 and to couple the parallel fourth light beam L4 returned from the perpendicularity measuring probe 10 to the spectrometer 230. The spectrometer 230 performs power spectrum measurement on interference inside the fourth light beam L4, and obtains an interference power spectrum of the fourth light beam L4. The data processor 240 performs fourier transform on the interference power spectrum of the fourth light beam L4 to obtain an optical path difference of the fourth light beam L4. When the optical path difference of the fourth light beam L4 approaches zero, it indicates that the distances from the first object plane W1 to the plurality of first lenses 111, which are formed by reflecting or back scattering the plurality of third light beams L3, are the same, that is, the first object plane W1 is perpendicular to the first preset reference line.

When the perpendicularity measuring probe 10 includes the collimator lens 130, the optical coupler 220 is configured to couple the divergent light beam to the perpendicularity measuring probe 10 and to couple the convergent eighth light beam L8 returned from the perpendicularity measuring probe 10 to the spectrometer 230. The spectrometer 230 performs power spectrum measurement on interference inside the eighth light beam L8, and obtains an interference power spectrum of the eighth light beam L8. The data processor 240 performs fourier transform on the interference power spectrum of the eighth light beam L8 to obtain an optical path difference of the eighth light beam L8. When the optical path difference of the eighth light beam L8 approaches zero, it indicates that the distances from the first object plane W1 to the plurality of first lenses 111, which are formed by reflecting or back scattering the plurality of third light beams L3, are the same, that is, the first object plane W1 is perpendicular to the first preset reference line.

Referring to fig. 14 and 15, fig. 14 is a schematic structural diagram of a measuring device according to another embodiment of the present disclosure; fig. 15 is a schematic structural diagram of a spectrum interferometer in the measuring apparatus provided in the embodiment of fig. 14. In this embodiment, when the perpendicularity measuring probe 10 further includes the optical fiber ferrule 120 and the collimator lens 130, the measuring device 1 further includes an optical fiber 30. The optical fiber 30 is used to connect the spectral interferometers 20 and the perpendicularity measuring probes 10 to transmit light beams between the spectral interferometers 20 and the perpendicularity measuring probes 10. The optical coupler 220 includes a fiber optic circulator 221. The optical fiber circulator 221 has a first interface 2211, a second interface 2212, and a third interface 2213 circumferentially arranged at intervals, the first interface 2211 is connected to the broad spectrum light source 210 and is used for receiving a light beam output by the broad spectrum light source 210, the optical fiber circulator 221 is used for transmitting the light beam output by the broad spectrum light source 210 to the second interface 2212 and transmitting the light beam to the perpendicularity measuring probe 10 via the second interface 2212, the second interface 2212 is also used for receiving the light beam returned from the perpendicularity measuring probe 10, and the optical fiber circulator 221 is used for transmitting the received light beam to the spectrometer 230 via the third interface 2213.

In the present embodiment, the spectral interferometers 20 are connected to the verticality measurement probe 10 through the optical fibers 30. The length of the optical fiber 30 may be designed to be any length, so that the measuring length of the measuring device 1 is not limited, and the measuring device can be applied to a long-distance measuring scene.

In this embodiment, the optical fiber circulator 221 serves as a guide. The perpendicularity between the first object plane W1 to be measured and the first preset reference line is schematically illustrated by the measuring device 1. On the one hand, the optical fiber circulator 221 guides the light beam outputted from the broad spectrum light source 210 to the perpendicularity measuring probe 10 and emits the light beam through the perpendicularity measuring probe 10. On the other hand, the fiber optic circulator 221 directs the beam received by the perpendicularity measuring probe 10 to the spectrometer 230 so that the spectrometer 230 performs power spectrum measurement. Specifically, the fiber circulator 221 includes a first interface 2211, a second interface 2212, and a third interface 2213 that are axially disposed. The first interface 2211 is connected to the broad spectrum light source 210. The second interface 2212 is connected to the verticality measurement probe 10 through the optical fiber 30. The third interface 2213 is connected to the spectrometer 230. The light beam output by the broad spectrum light source 210 is transmitted to the second interface 2212 via the first interface 2211. The eighth light beam L8 is transmitted to the third interface 2213 via the second interface 2212.

Referring to fig. 6 again, in this embodiment, the verticality measurement probe 10 is further configured to receive the light beam returned from the second object plane W2 to be measured and transmit the light beam to the spectrometer 230, the spectrometer 230 performs power spectrum measurement on the light beam returned from the first object plane W1 to be measured and the light beam returned from the second object plane W2 to obtain an interference power spectrum, and the data processor obtains an optical path difference according to the interference power spectrum and determines whether the first object plane W1 to be measured is perpendicular to the second object plane W2 according to the optical path difference.

The perpendicularity measuring probe 10 is schematically illustrated as not including the collimator 130. Taking the first lens array 110 as an example for shielding, after the second object plane W2 to be measured is adjusted to be perpendicular to the second preset reference line W2, shielding the first lens array 110 is removed. The parallel first light beam L1 output from the broad spectrum light source 210 is coupled to the verticality measurement probe 10 via the optical coupler 220. The verticality measuring probe 10 emits the converged second light beams L2 and focuses the second light beams L2 to the first object plane W1, and emits the converged fifth light beams L5 and focuses the second object plane W2. The converging second light beams L2 are reflected or backscattered at the first object plane W1 to form the diverging third light beams L3, and the diverging third light beams L3 are received by the first lenses 111 and combined into the fourth light beam L4 in parallel. The converging fifth light beams L5 are irradiated to the second object plane W2 to be measured and reflected or backscattered to form diverging sixth light beams L6, and the diverging sixth light beams L6 are received by the second lenses 151 and combined into the parallel seventh light beams L7. Both the fourth light beam L4 and the seventh light beam L7 are coupled into the spectral interferometer 20 via the optical coupler 220. In an embodiment, the difference between the distance from the beam splitter 170 to the first lens array 110 and the distance to the second lens array 150 in the beam transmission direction is larger than the measurement range of the spectral interferometer 20, and the fourth beam L4 and the seventh beam L7 interfere with each other, but the fourth beam L4 and the seventh beam L7 do not interfere with each other. Therefore, when the optical path difference has a non-zero value, the first object plane W1 is not parallel to the first lenses 111, i.e. the first object plane W1 is not perpendicular to the second object plane W2. By adjusting the posture of the first object plane W1 to be measured or adjusting the postures of the verticality measuring probe 10 and the second object plane W2 to be measured as a whole until the optical path difference tends to be zero, the first object plane W1 to be measured is perpendicular to the second object plane W2 to be measured. In another embodiment, the difference between the distance of the beam from the beam splitter 170 to the first lens array 110 and the distance to the second lens array 150 in the beam transmission direction is less than or equal to the measurement range of the spectral interferometer 20, and interference occurs between the fourth beam L4 and the seventh beam L7 in addition to the interference occurring in the fourth beam L4 and the seventh beam L7, respectively. If the distance between the beam splitter 170 and the first lens array 110 along the beam transmission direction is not equal to the distance between the beam splitter 170 and the second lens array 150, the first object plane W1 is parallel to the first lenses 111, that is, the first object plane W1 is perpendicular to the second object plane W2, only if the optical path difference has a fixed non-zero value, that is, the difference between the distance between the beam splitter 170 and the first lens array 110 along the beam transmission direction and the distance between the beam splitter and the second lens array 150 is 2 times. If the distance from the beam splitter 170 to the first lens array 110 along the beam transmission direction is equal to the distance from the second lens array 150, when the optical path difference tends to be zero, the first object plane W1 is perpendicular to the second object plane W2.

While embodiments of the present application have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the present application, and that variations, modifications, alternatives and alterations of the above embodiments may be made by those skilled in the art within the scope of the present application, which are also to be regarded as being within the scope of the protection of the present application.

Claims

1. A perpendicularity measuring probe, the perpendicularity measuring probe comprising:

the first lens array comprises a plurality of first lenses, the plurality of first lenses are used for dividing parallel first light beams into a plurality of converging second light beams, respectively focusing the converging second light beams to a first object plane to be measured, respectively receiving a plurality of third light beams reflected or backscattered by the first object plane to be measured along an original light path through the plurality of first lenses, respectively synthesizing a parallel fourth light beam, and judging whether the first object plane to be measured is perpendicular to a first preset reference line or not, wherein the first preset reference line is perpendicular to a plane where the plurality of first lenses are positioned;

2. The perpendicularity measurement probe of claim 1, wherein the first lens array comprises at least three first lenses, and the at least three first lenses are disposed in a non-collinear arrangement; the second lens array comprises at least three second lenses, and the at least three second lenses are arranged in a non-collinear manner.

3. The perpendicularity measuring probe of claim 2, further comprising a plurality of light shielding sleeves, each light shielding sleeve corresponding to one of the first lenses or one of the second lenses, and the number of light shielding sleeves being equal to the sum of the number of first lenses and the number of second lenses.

4. The perpendicularity measurement probe of claim 3, further comprising:

5. A measurement device, the measurement device comprising:

a perpendicularity measuring probe as claimed in any one of claims 1 to 4; and

6. The measurement device of claim 5, wherein the spectral interferometers comprise:

a broad spectrum light source for outputting a light beam;

7. The measurement device of claim 6 wherein the perpendicularity measurement probe comprises:

the measuring device further includes:

the optical coupler includes:

8. The measuring device according to claim 6 or 7, wherein the perpendicularity measuring probe is further configured to receive a light beam returned from the second object plane to be measured and transmit the light beam to the spectrometer, the spectrometer performs power spectrum measurement on the light beam returned from the first object plane to be measured and the light beam returned from the second object plane to be measured, so as to obtain an interference power spectrum, and the data processor obtains an optical path difference according to the interference power spectrum, and determines whether the first object plane to be measured is perpendicular to the second object plane to be measured according to the optical path difference.