CN102959685B - 纤维传送激光光学系统 - Google Patents
纤维传送激光光学系统 Download PDFInfo
- Publication number
- CN102959685B CN102959685B CN201280001616.XA CN201280001616A CN102959685B CN 102959685 B CN102959685 B CN 102959685B CN 201280001616 A CN201280001616 A CN 201280001616A CN 102959685 B CN102959685 B CN 102959685B
- Authority
- CN
- China
- Prior art keywords
- mentioned
- laser
- optical fiber
- lens
- cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 45
- 239000000835 fiber Substances 0.000 title claims abstract description 25
- 239000013307 optical fiber Substances 0.000 claims abstract description 102
- 238000002347 injection Methods 0.000 claims description 26
- 239000007924 injection Substances 0.000 claims description 26
- 241000276498 Pollachius virens Species 0.000 claims description 5
- 238000005286 illumination Methods 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 claims description 5
- 238000009826 distribution Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 11
- 238000000137 annealing Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0738—Shaping the laser spot into a linear shape
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
- G02B6/0008—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type the light being emitted at the end of the fibre
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
- G02B6/0006—Coupling light into the fibre
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02678—Beam shaping, e.g. using a mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optical Couplings Of Light Guides (AREA)
- Laser Beam Processing (AREA)
- Recrystallisation Techniques (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011-111396 | 2011-05-18 | ||
JP2011111396A JP5148730B2 (ja) | 2011-05-18 | 2011-05-18 | ファイバ転送レーザ光学系 |
PCT/JP2012/002896 WO2012157194A1 (ja) | 2011-05-18 | 2012-04-27 | ファイバ転送レーザ光学系 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102959685A CN102959685A (zh) | 2013-03-06 |
CN102959685B true CN102959685B (zh) | 2015-06-17 |
Family
ID=47176548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201280001616.XA Active CN102959685B (zh) | 2011-05-18 | 2012-04-27 | 纤维传送激光光学系统 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8662761B2 (zh) |
JP (1) | JP5148730B2 (zh) |
KR (1) | KR101322346B1 (zh) |
CN (1) | CN102959685B (zh) |
DE (1) | DE112012000019B4 (zh) |
SG (1) | SG186846A1 (zh) |
TW (1) | TWI414386B (zh) |
WO (1) | WO2012157194A1 (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015083029A1 (en) * | 2013-12-02 | 2015-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US10537965B2 (en) * | 2013-12-13 | 2020-01-21 | Applied Materials, Inc. | Fiber array line generator |
US9343307B2 (en) | 2013-12-24 | 2016-05-17 | Ultratech, Inc. | Laser spike annealing using fiber lasers |
DE102014200633B3 (de) * | 2014-01-15 | 2015-05-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Bearbeitungsvorrichtung und -verfahren zur Laserbearbeitung einer Oberfläche |
CN107111153B (zh) | 2014-12-31 | 2019-12-27 | 杜比实验室特许公司 | 用于图像投影仪的分立激光光纤输入 |
CN105108331A (zh) * | 2015-07-28 | 2015-12-02 | 上海信耀电子有限公司 | 一种整形导光管及激光焊接工艺 |
CN105328331B (zh) * | 2015-11-10 | 2017-08-04 | 哈尔滨工程大学 | 用于激光车削和磨削复合加工的强聚焦光学系统及加工方法 |
EP3437788B1 (en) * | 2016-03-31 | 2022-06-15 | Muratani Machine Inc. | Laser machining apparatus and laser machining method |
CN106094219A (zh) * | 2016-07-18 | 2016-11-09 | 柳州好顺科技有限公司 | 一种电子设备的光学显示电路 |
CN109581676A (zh) * | 2017-09-29 | 2019-04-05 | 武汉资联虹康科技股份有限公司 | 一种激光均匀分散的发射光纤 |
JP7303538B2 (ja) * | 2018-05-28 | 2023-07-05 | 国立研究開発法人理化学研究所 | レーザ加工装置 |
CN108747053B (zh) * | 2018-07-13 | 2019-11-22 | 苏州福唐智能科技有限公司 | 一种自校准式激光切割设备 |
JP7277716B2 (ja) | 2019-02-25 | 2023-05-19 | 日亜化学工業株式会社 | 光源装置、ダイレクトダイオードレーザ装置、および光結合器 |
KR102377331B1 (ko) * | 2020-01-29 | 2022-03-21 | 김윤호 | 라인빔 광학계 및 이를 포함하는 레이저 리프트 오프 장치 |
CN114654109B (zh) * | 2022-04-09 | 2023-03-28 | 法特迪精密科技(苏州)有限公司 | Mems探针硅片切割方法 |
CN116341257B (zh) * | 2023-03-23 | 2023-10-24 | 深圳市比洋光通信科技股份有限公司 | 基于光纤纤维编织的纤维丝自动布局方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1467802A (zh) * | 2002-06-07 | 2004-01-14 | 富士胶片株式会社 | 激光退火装置和激光薄膜形成装置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02187294A (ja) * | 1989-01-13 | 1990-07-23 | Nec Corp | レーザビーム整形装置 |
US5396571A (en) * | 1993-05-21 | 1995-03-07 | Trimedyne, Inc. | Coupling device and method for improved transfer efficiency of light energy from a laser source into optical fibers |
US5559911A (en) * | 1995-01-17 | 1996-09-24 | Radiant Imaging, Inc. | Optical fiber coupler using segmented lenses |
JP3191702B2 (ja) | 1996-11-25 | 2001-07-23 | 住友重機械工業株式会社 | ビームホモジナイザ |
JPH10244392A (ja) | 1997-03-04 | 1998-09-14 | Semiconductor Energy Lab Co Ltd | レーザー照射装置 |
JP2003344802A (ja) * | 2002-05-23 | 2003-12-03 | Toshiba Corp | レーザ照射装置 |
JP2004064065A (ja) * | 2002-06-07 | 2004-02-26 | Fuji Photo Film Co Ltd | レーザアニール装置 |
JP2004064066A (ja) * | 2002-06-07 | 2004-02-26 | Fuji Photo Film Co Ltd | レーザアニール装置 |
JP2004064064A (ja) * | 2002-06-07 | 2004-02-26 | Fuji Photo Film Co Ltd | レーザアニール装置 |
JP3839375B2 (ja) * | 2002-07-31 | 2006-11-01 | 株式会社モリテックス | 光ファイバのレーザ光による切断方法 |
JP5116232B2 (ja) * | 2004-10-29 | 2013-01-09 | 株式会社半導体エネルギー研究所 | レーザ照射装置およびレーザ照射方法 |
JP5084137B2 (ja) * | 2004-12-06 | 2012-11-28 | 株式会社半導体エネルギー研究所 | レーザ照射装置及びレーザ照射方法、並びに半導体装置の作製方法 |
JP2006278491A (ja) * | 2005-03-28 | 2006-10-12 | Sony Corp | 照射装置 |
JP5132119B2 (ja) * | 2005-10-26 | 2013-01-30 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP4667270B2 (ja) | 2006-02-27 | 2011-04-06 | キヤノン株式会社 | 円筒状電子写真感光体用支持体の切削方法 |
JP4698460B2 (ja) * | 2006-03-27 | 2011-06-08 | オムロンレーザーフロント株式会社 | レーザアニーリング装置 |
JP2008147428A (ja) * | 2006-12-11 | 2008-06-26 | Sumitomo Heavy Ind Ltd | レーザ照射装置、及び、レーザ照射方法 |
DE112008000872T5 (de) * | 2007-04-04 | 2010-01-28 | Mitsubishi Electric Corp. | Vorrichtung und Verfahren zur Laserbearbeitung |
JP5288583B2 (ja) * | 2007-07-04 | 2013-09-11 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
-
2011
- 2011-05-18 JP JP2011111396A patent/JP5148730B2/ja active Active
-
2012
- 2012-04-27 DE DE112012000019.6T patent/DE112012000019B4/de not_active Expired - Fee Related
- 2012-04-27 KR KR1020127031835A patent/KR101322346B1/ko active IP Right Grant
- 2012-04-27 CN CN201280001616.XA patent/CN102959685B/zh active Active
- 2012-04-27 US US13/702,342 patent/US8662761B2/en active Active
- 2012-04-27 WO PCT/JP2012/002896 patent/WO2012157194A1/ja active Application Filing
- 2012-04-27 SG SG2012095923A patent/SG186846A1/en unknown
- 2012-05-04 TW TW101116011A patent/TWI414386B/zh not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1467802A (zh) * | 2002-06-07 | 2004-01-14 | 富士胶片株式会社 | 激光退火装置和激光薄膜形成装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20130014063A (ko) | 2013-02-06 |
TW201249578A (en) | 2012-12-16 |
WO2012157194A1 (ja) | 2012-11-22 |
JP2012243900A (ja) | 2012-12-10 |
US8662761B2 (en) | 2014-03-04 |
DE112012000019B4 (de) | 2017-05-18 |
SG186846A1 (en) | 2013-02-28 |
JP5148730B2 (ja) | 2013-02-20 |
TWI414386B (zh) | 2013-11-11 |
KR101322346B1 (ko) | 2013-10-28 |
US20130084046A1 (en) | 2013-04-04 |
CN102959685A (zh) | 2013-03-06 |
DE112012000019T5 (de) | 2013-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102959685B (zh) | 纤维传送激光光学系统 | |
CN107615601B (zh) | 激光模块及激光加工装置 | |
JP5876612B2 (ja) | 非円形状の光ビームに信号ビームを結合するための光ファイバーカプラー | |
CN102395914B (zh) | 激光射线成型装置及具有该类装置的激光装置 | |
KR20130121292A (ko) | 평면 도파로 소자 | |
US9513483B2 (en) | Beam shaper system for laser diode array | |
CN102099726A (zh) | 射束成形设备和方法 | |
CN105974534B (zh) | 一种光纤耦合装置 | |
CN101464563B (zh) | 激光辐射成形的装置 | |
CN105759411A (zh) | 光纤耦合激光器、光纤耦合激光器系统及其优化方法 | |
CN203811854U (zh) | 一种半导体激光器阵列输出光束匀称化和光纤耦合装置 | |
CN105189017A (zh) | 用于产生具有线状强度分布的激光射线的设备 | |
CN104882784A (zh) | 一种用于大功率半导体激光器的合束输出耦合装置 | |
CN206322997U (zh) | 一种光纤激光器泵浦源 | |
CN207133521U (zh) | 一种二维平顶光束发生器 | |
CN201674110U (zh) | 一种实现半导体激光列阵光束重组和光纤耦合的装置 | |
US20070211996A1 (en) | Laser bar coupler with improved brightness | |
CN111146682A (zh) | 一种光纤耦合半导体激光器模块及半导体激光器 | |
CN101303457A (zh) | 一种波前重组的光束准直均匀方法及其光源系统 | |
JP3994961B2 (ja) | 光導波路アレイ及びレーザ発光装置 | |
CN104049326A (zh) | 半导体激光器阵列输出光束匀称化和光纤耦合系统 | |
CN103676186A (zh) | 激光二极管布局系统和方法 | |
CN203012192U (zh) | 光学系统及激光熔覆设备 | |
US20120262769A1 (en) | Holographic solar coupler | |
CN201852958U (zh) | 一种阵列准直器结构 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: Kanagawa Prefecture, Japan Patentee after: Kyocera optoelectronics Co.,Ltd. Patentee after: THE JAPAN STEEL WORKS, Ltd. Address before: Tokyo, Japan Patentee before: SHOWA OPTRONICS Co.,Ltd. Patentee before: THE JAPAN STEEL WORKS, Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220801 Address after: Kanagawa Patentee after: Kyocera optoelectronics Co.,Ltd. Patentee after: JSW acdina System Co.,Ltd. Address before: Kanagawa County Patentee before: Kyocera optoelectronics Co.,Ltd. Patentee before: THE JAPAN STEEL WORKS, Ltd. |