CN102899635A - 一种原位清洁mocvd反应腔室的方法 - Google Patents
一种原位清洁mocvd反应腔室的方法 Download PDFInfo
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- CN102899635A CN102899635A CN2012103649560A CN201210364956A CN102899635A CN 102899635 A CN102899635 A CN 102899635A CN 2012103649560 A CN2012103649560 A CN 2012103649560A CN 201210364956 A CN201210364956 A CN 201210364956A CN 102899635 A CN102899635 A CN 102899635A
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- 238000004140 cleaning Methods 0.000 title claims abstract description 98
- 238000000034 method Methods 0.000 title claims abstract description 51
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- 238000005229 chemical vapour deposition Methods 0.000 title description 3
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- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims description 33
- 229910052736 halogen Inorganic materials 0.000 claims description 29
- 150000002367 halogens Chemical class 0.000 claims description 29
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- 229910015844 BCl3 Inorganic materials 0.000 claims description 5
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 9
- 229910052799 carbon Inorganic materials 0.000 abstract description 3
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- 229910021478 group 5 element Inorganic materials 0.000 description 5
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- 229910021617 Indium monochloride Inorganic materials 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
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- 229910052733 gallium Inorganic materials 0.000 description 2
- UPWPDUACHOATKO-UHFFFAOYSA-K gallium trichloride Chemical compound Cl[Ga](Cl)Cl UPWPDUACHOATKO-UHFFFAOYSA-K 0.000 description 2
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- APHGZSBLRQFRCA-UHFFFAOYSA-M indium(1+);chloride Chemical compound [In]Cl APHGZSBLRQFRCA-UHFFFAOYSA-M 0.000 description 2
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Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Public Health (AREA)
- Epidemiology (AREA)
- Health & Medical Sciences (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (8)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210364956.0A CN102899635B (zh) | 2012-09-26 | 2012-09-26 | 一种原位清洁mocvd反应腔室的方法 |
KR1020130111999A KR20140040642A (ko) | 2012-09-26 | 2013-09-17 | Mocvd 반응 챔버의 현장 세정 방법 |
US14/032,124 US20140083451A1 (en) | 2012-09-26 | 2013-09-19 | Method for in situ cleaning of mocvd reaction chamber |
TW102134872A TWI614366B (zh) | 2012-09-26 | 2013-09-26 | 原位清潔mocvd反應腔室的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210364956.0A CN102899635B (zh) | 2012-09-26 | 2012-09-26 | 一种原位清洁mocvd反应腔室的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102899635A true CN102899635A (zh) | 2013-01-30 |
CN102899635B CN102899635B (zh) | 2015-12-02 |
Family
ID=47572117
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210364956.0A Active CN102899635B (zh) | 2012-09-26 | 2012-09-26 | 一种原位清洁mocvd反应腔室的方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20140083451A1 (zh) |
KR (1) | KR20140040642A (zh) |
CN (1) | CN102899635B (zh) |
TW (1) | TWI614366B (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105074879A (zh) * | 2013-03-05 | 2015-11-18 | 应用材料公司 | 用于清洁基板的方法和装置 |
KR20150143835A (ko) * | 2013-04-23 | 2015-12-23 | 아익스트론 에스이 | 후속하는 다단의 세정 단계를 갖는 mocvd-층 성장 방법 |
CN105177533A (zh) * | 2015-09-07 | 2015-12-23 | 哈尔滨工业大学 | 一种利用等离子体原位清洗mwcvd舱体的方法 |
CN106298446A (zh) * | 2015-06-29 | 2017-01-04 | 台湾积体电路制造股份有限公司 | 用于清洁等离子体处理室和衬底的方法 |
CN109385621A (zh) * | 2018-11-26 | 2019-02-26 | 合肥彩虹蓝光科技有限公司 | 一种金属有机物化学气相沉积设备的反应腔体的清洁方法 |
CN110894595A (zh) * | 2018-09-13 | 2020-03-20 | 北京北方华创微电子装备有限公司 | 气相沉积设备及其清洗方法 |
CN112609168A (zh) * | 2020-11-30 | 2021-04-06 | 中威新能源(成都)有限公司 | 一种快速清洗大面积真空腔室内累积薄膜的方法 |
CN113564562A (zh) * | 2021-07-08 | 2021-10-29 | 哈工大机器人(中山)无人装备与人工智能研究院 | 一种mpcvd腔体清洗方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9548188B2 (en) * | 2014-07-30 | 2017-01-17 | Lam Research Corporation | Method of conditioning vacuum chamber of semiconductor substrate processing apparatus |
CN106702348B (zh) * | 2016-12-29 | 2019-06-18 | 圆融光电科技股份有限公司 | 消除mocvd设备反应腔内水氧分子杂质的方法 |
JP7300945B2 (ja) * | 2019-09-13 | 2023-06-30 | 東京エレクトロン株式会社 | クリーニング方法およびクリーニングプログラムを記録する記録媒体 |
JP7285761B2 (ja) * | 2019-11-06 | 2023-06-02 | 東京エレクトロン株式会社 | 処理方法 |
Citations (5)
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CN1507502A (zh) * | 2001-05-04 | 2004-06-23 | 拉姆研究公司 | 处理室残留物的两步式等离子清洗 |
CN101024800A (zh) * | 2006-02-21 | 2007-08-29 | 联华电子股份有限公司 | 清洗液以及移除等离子体工艺后的残余物的方法 |
US20110052833A1 (en) * | 2009-08-27 | 2011-03-03 | Applied Materials, Inc. | Gas distribution showerhead and method of cleaning |
CN102011097A (zh) * | 2010-12-17 | 2011-04-13 | 中微半导体设备(上海)有限公司 | 一种清除第ⅲ族元素和第v族元素化合物沉积物残余的方法 |
CN102586753A (zh) * | 2012-03-21 | 2012-07-18 | 中微半导体设备(上海)有限公司 | Mocvd设备的清洁方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4669605B2 (ja) * | 2000-11-20 | 2011-04-13 | 東京エレクトロン株式会社 | 半導体製造装置のクリーニング方法 |
US6692903B2 (en) * | 2000-12-13 | 2004-02-17 | Applied Materials, Inc | Substrate cleaning apparatus and method |
JP2008288281A (ja) * | 2007-05-15 | 2008-11-27 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法および基板処理装置 |
JP2009123795A (ja) * | 2007-11-13 | 2009-06-04 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法及び基板処理装置 |
-
2012
- 2012-09-26 CN CN201210364956.0A patent/CN102899635B/zh active Active
-
2013
- 2013-09-17 KR KR1020130111999A patent/KR20140040642A/ko not_active Application Discontinuation
- 2013-09-19 US US14/032,124 patent/US20140083451A1/en not_active Abandoned
- 2013-09-26 TW TW102134872A patent/TWI614366B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1507502A (zh) * | 2001-05-04 | 2004-06-23 | 拉姆研究公司 | 处理室残留物的两步式等离子清洗 |
CN101024800A (zh) * | 2006-02-21 | 2007-08-29 | 联华电子股份有限公司 | 清洗液以及移除等离子体工艺后的残余物的方法 |
US20110052833A1 (en) * | 2009-08-27 | 2011-03-03 | Applied Materials, Inc. | Gas distribution showerhead and method of cleaning |
CN102011097A (zh) * | 2010-12-17 | 2011-04-13 | 中微半导体设备(上海)有限公司 | 一种清除第ⅲ族元素和第v族元素化合物沉积物残余的方法 |
CN102586753A (zh) * | 2012-03-21 | 2012-07-18 | 中微半导体设备(上海)有限公司 | Mocvd设备的清洁方法 |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105074879A (zh) * | 2013-03-05 | 2015-11-18 | 应用材料公司 | 用于清洁基板的方法和装置 |
CN105074879B (zh) * | 2013-03-05 | 2018-04-24 | 应用材料公司 | 用于清洁基板的方法和装置 |
JP2016524808A (ja) * | 2013-04-23 | 2016-08-18 | アイクストロン、エスイー | 後続の多段洗浄ステップを伴うmocvd層成長方法 |
KR20150143835A (ko) * | 2013-04-23 | 2015-12-23 | 아익스트론 에스이 | 후속하는 다단의 세정 단계를 갖는 mocvd-층 성장 방법 |
KR102293802B1 (ko) * | 2013-04-23 | 2021-08-24 | 아익스트론 에스이 | 후속하는 다단의 세정 단계를 갖는 mocvd-층 성장 방법 |
CN106298446A (zh) * | 2015-06-29 | 2017-01-04 | 台湾积体电路制造股份有限公司 | 用于清洁等离子体处理室和衬底的方法 |
CN105177533A (zh) * | 2015-09-07 | 2015-12-23 | 哈尔滨工业大学 | 一种利用等离子体原位清洗mwcvd舱体的方法 |
CN105177533B (zh) * | 2015-09-07 | 2017-11-03 | 哈尔滨工业大学 | 一种利用等离子体原位清洗mwcvd舱体的方法 |
CN110894595A (zh) * | 2018-09-13 | 2020-03-20 | 北京北方华创微电子装备有限公司 | 气相沉积设备及其清洗方法 |
CN110894595B (zh) * | 2018-09-13 | 2022-05-27 | 北京北方华创微电子装备有限公司 | 气相沉积设备及其清洗方法 |
CN109385621A (zh) * | 2018-11-26 | 2019-02-26 | 合肥彩虹蓝光科技有限公司 | 一种金属有机物化学气相沉积设备的反应腔体的清洁方法 |
CN112609168A (zh) * | 2020-11-30 | 2021-04-06 | 中威新能源(成都)有限公司 | 一种快速清洗大面积真空腔室内累积薄膜的方法 |
CN113564562A (zh) * | 2021-07-08 | 2021-10-29 | 哈工大机器人(中山)无人装备与人工智能研究院 | 一种mpcvd腔体清洗方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI614366B (zh) | 2018-02-11 |
US20140083451A1 (en) | 2014-03-27 |
TW201420804A (zh) | 2014-06-01 |
KR20140040642A (ko) | 2014-04-03 |
CN102899635B (zh) | 2015-12-02 |
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Application publication date: 20130130 Assignee: Nanchang Medium and Micro Semiconductor Equipment Co., Ltd. Assignor: Advanced Micro-Fabrication Equipment (Shanghai) Inc. Contract record no.: 2018990000345 Denomination of invention: Method for in-situ cleaning MOCVD (metal organic chemical vapor deposition) reaction chamber Granted publication date: 20151202 License type: Exclusive License Record date: 20181217 |
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Address after: 201201 No. 188 Taihua Road, Jinqiao Export Processing Zone, Pudong New Area, Shanghai Patentee after: Medium and Micro Semiconductor Equipment (Shanghai) Co., Ltd. Address before: 201201 No. 188 Taihua Road, Jinqiao Export Processing Zone, Pudong New Area, Shanghai Patentee before: Advanced Micro-Fabrication Equipment (Shanghai) Inc. |