CN102893355A - 集成超小型继电器 - Google Patents

集成超小型继电器 Download PDF

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Publication number
CN102893355A
CN102893355A CN2011800241500A CN201180024150A CN102893355A CN 102893355 A CN102893355 A CN 102893355A CN 2011800241500 A CN2011800241500 A CN 2011800241500A CN 201180024150 A CN201180024150 A CN 201180024150A CN 102893355 A CN102893355 A CN 102893355A
Authority
CN
China
Prior art keywords
electrical contact
coil
substrate
plane
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011800241500A
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English (en)
Chinese (zh)
Inventor
托德·R·克里斯坦森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coto Technology Co Ltd
HT MICROANALYTICAL Inc
Original Assignee
Coto Technology Co Ltd
HT MICROANALYTICAL Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Coto Technology Co Ltd, HT MICROANALYTICAL Inc filed Critical Coto Technology Co Ltd
Publication of CN102893355A publication Critical patent/CN102893355A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H51/00—Electromagnetic relays
    • H01H51/02—Non-polarised relays
    • H01H51/04—Non-polarised relays with single armature; with single set of ganged armatures
    • H01H51/06—Armature is movable between two limit positions of rest and is moved in one direction due to energisation of an electromagnet and after the electromagnet is de-energised is returned by energy stored during the movement in the first direction, e.g. by using a spring, by using a permanent magnet, by gravity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/64—Protective enclosures, baffle plates, or screens for contacts
    • H01H1/66—Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Relay Circuits (AREA)
CN2011800241500A 2010-03-16 2011-03-10 集成超小型继电器 Pending CN102893355A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/725,168 US8665041B2 (en) 2008-03-20 2010-03-16 Integrated microminiature relay
US12/725,168 2010-03-16
PCT/US2011/027930 WO2011115814A1 (en) 2010-03-16 2011-03-10 Integrated microminiature relay

Publications (1)

Publication Number Publication Date
CN102893355A true CN102893355A (zh) 2013-01-23

Family

ID=44059281

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011800241500A Pending CN102893355A (zh) 2010-03-16 2011-03-10 集成超小型继电器

Country Status (7)

Country Link
US (2) US8665041B2 (https=)
EP (1) EP2548212A1 (https=)
JP (1) JP2013522847A (https=)
KR (1) KR20130069571A (https=)
CN (1) CN102893355A (https=)
SG (1) SG184022A1 (https=)
WO (1) WO2011115814A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8665041B2 (en) * 2008-03-20 2014-03-04 Ht Microanalytical, Inc. Integrated microminiature relay
US8436701B2 (en) 2010-02-08 2013-05-07 International Business Machines Corporation Integrated electromechanical relays
FR2966813A1 (fr) * 2010-10-29 2012-05-04 Thales Sa Microsysteme electromecanique (mems).
US8552824B1 (en) * 2012-04-03 2013-10-08 Hamilton Sundstrand Corporation Integrated planar electromechanical contactors
WO2013184223A1 (en) * 2012-06-05 2013-12-12 The Regents Of The University Of California Micro electromagnetically actuated latched switches
US10551215B2 (en) 2015-06-11 2020-02-04 Analog Devices Global Unlimited Company Systems, circuits and methods for determining a position of a movable object
US10145906B2 (en) 2015-12-17 2018-12-04 Analog Devices Global Devices, systems and methods including magnetic structures
US10342142B2 (en) 2017-07-28 2019-07-02 International Business Machines Corporation Implementing customized PCB via creation through use of magnetic pads
JP6950613B2 (ja) 2018-04-11 2021-10-13 Tdk株式会社 磁気作動型ｍｅｍｓスイッチ
KR102073153B1 (ko) * 2018-08-14 2020-02-04 한국과학기술연구원 2-자유도 충격 액추에이터 및 충격 제어 방법
US11387029B2 (en) * 2018-09-12 2022-07-12 LuxNour Technologies Inc. Apparatus for transferring plurality of micro devices and methods of fabrication
US20200303114A1 (en) * 2019-03-22 2020-09-24 Cyntec Co., Ltd. Inductor array in a single package

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1357749A (zh) * 2000-12-06 2002-07-10 中国科学院长光学精密机械与物理研究所 一种集成式微型电感位移传感器及其制备方法
US20020140533A1 (en) * 1999-07-01 2002-10-03 Masaru Miyazaki Method of producing an integrated type microswitch
WO2004006295A2 (en) * 2002-05-29 2004-01-15 Superconductor Technologies, Inc. Spring loaded bi-stable mems switch
WO2009001848A1 (ja) * 2007-06-26 2008-12-31 Panasonic Electric Works Co., Ltd. マイクロリレー
CN101373863A (zh) * 2007-06-26 2009-02-25 英特尔公司 切开的电接触件以及通过进行切片制造接触件的方法

Family Cites Families (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2497547A (en) 1946-04-20 1950-02-14 Hastings Charles Edwin Magnetic switch
US2931872A (en) 1958-09-22 1960-04-05 Iron Fireman Mfg Co Polarized relay
US3087125A (en) 1961-07-13 1963-04-23 Gen Electric Coaxial reed relay for interrupting the center conductor and simultaneously terminating its opened ends
US3167625A (en) 1961-09-26 1965-01-26 Wheelock Signals Inc Mounting structure for electromagentic sealed relay
US3268839A (en) 1965-03-05 1966-08-23 Gen Electric Magnetic reed relay
GB1145083A (en) 1965-04-30 1969-03-12 Modern Prec Engineering Finchl Improvements in or relating to electromagnetic switches
DE1251869B (de) 1966-10-08 1967-10-12 Telefunken Patentverwertungsgesellschaft m.b.H., Ulm/Donau, Elisabethenstr. 3 Magnetisch gesteurtes Schutzrohrkontakt-Relais
US3586809A (en) 1969-04-24 1971-06-22 Briggs & Stratton Corp Reed switch for rapid cycle,high power applications
US3579158A (en) 1969-07-28 1971-05-18 Clare & Co C P Armature structure for reed switches
FR2058828A5 (https=) * 1969-09-29 1971-05-28 Preux Roger
US3913054A (en) 1973-11-08 1975-10-14 Robertshaw Controls Co Thermally responsive switch
JPS51121170A (en) 1975-04-15 1976-10-22 Yaskawa Denki Seisakusho Kk Reed switch
US4011533A (en) 1976-01-14 1977-03-08 Briggs & Stratton Corporation Magnetically actuated switch for precise rapid cycle operation
JP2714736B2 (ja) * 1992-06-01 1998-02-16 シャープ株式会社 マイクロリレー
DE69311277T2 (de) 1992-12-15 1998-01-15 Asulab Sa Schutzrohrschalter und Herstellungsverfahren für aufgehängte dreidimensionale metallische Mikrostrukturen
US5472539A (en) * 1994-06-06 1995-12-05 General Electric Company Methods for forming and positioning moldable permanent magnets on electromagnetically actuated microfabricated components
US6094116A (en) * 1996-08-01 2000-07-25 California Institute Of Technology Micro-electromechanical relays
JPH10269920A (ja) * 1997-03-26 1998-10-09 Omron Corp 電磁石マイクロリレー
FR2761518B1 (fr) * 1997-04-01 1999-05-28 Suisse Electronique Microtech Moteur planaire magnetique et micro-actionneur magnetique comportant un tel moteur
CH691559A5 (fr) 1997-04-21 2001-08-15 Asulab Sa Micro-contacteur magnétique et son procédé de fabrication.
JPH11134994A (ja) * 1997-10-30 1999-05-21 Omron Corp リレー
JP3636022B2 (ja) 1998-12-22 2005-04-06 日本電気株式会社 マイクロマシンスイッチ
US6410360B1 (en) 1999-01-26 2002-06-25 Teledyne Industries, Inc. Laminate-based apparatus and method of fabrication
DE10031569A1 (de) 1999-07-01 2001-02-01 Advantest Corp Integrierter Mikroschalter und Verfahren zu seiner Herstellung
JP2001076599A (ja) 1999-09-02 2001-03-23 Tokai Rika Co Ltd マイクロリードスイッチ、マイクロリードスイッチ体及びマイクロリードスイッチ部材の製造方法
US6310526B1 (en) 1999-09-21 2001-10-30 Lap-Sum Yip Double-throw miniature electromagnetic microwave (MEM) switches
US6469602B2 (en) * 1999-09-23 2002-10-22 Arizona State University Electronically switching latching micro-magnetic relay and method of operating same
US6366186B1 (en) 2000-01-20 2002-04-02 Jds Uniphase Inc. Mems magnetically actuated switches and associated switching arrays
WO2002095784A1 (en) 2001-05-18 2002-11-28 Microlab, Inc. Microgagnetic latching switch packaging
FR2826504B1 (fr) * 2001-06-25 2003-09-12 Commissariat Energie Atomique Actionneur magnetique a temps de reponse reduit
FR2826645B1 (fr) 2001-07-02 2004-06-04 Memscap Composant microelectromecanique
US20030107460A1 (en) * 2001-12-10 2003-06-12 Guanghua Huang Low voltage MEM switch
US6917268B2 (en) 2001-12-31 2005-07-12 International Business Machines Corporation Lateral microelectromechanical system switch
US20030137374A1 (en) 2002-01-18 2003-07-24 Meichun Ruan Micro-Magnetic Latching switches with a three-dimensional solenoid coil
US6624003B1 (en) 2002-02-06 2003-09-23 Teravicta Technologies, Inc. Integrated MEMS device and package
JP4292532B2 (ja) 2002-04-24 2009-07-08 株式会社沖センサデバイス 機構デバイスの製造方法、機構デバイスおよびマイクロリードスイッチ
US6828887B2 (en) 2002-05-10 2004-12-07 Jpmorgan Chase Bank Bistable microelectromechanical system based structures, systems and methods
EP1381063B1 (en) 2002-07-10 2004-11-24 Kearney-National Netherlands Holding B.V. Method for adjusting the switch-gap between the contact tongues of a reed switch
US6975193B2 (en) 2003-03-25 2005-12-13 Rockwell Automation Technologies, Inc. Microelectromechanical isolating circuit
AU2003254882A1 (en) 2003-08-07 2005-02-25 Fujitsu Media Devices Limited Micro switching element and method of manufacturing the element
US7215229B2 (en) 2003-09-17 2007-05-08 Schneider Electric Industries Sas Laminated relays with multiple flexible contacts
CN1601682A (zh) 2003-09-28 2005-03-30 乐金电子(天津)电器有限公司 簧片开关组件
JP2005108471A (ja) 2003-09-29 2005-04-21 Oki Sensor Device Corp 接点機構デバイス及びその製造方法
JP4461456B2 (ja) 2004-04-28 2010-05-12 株式会社日本アレフ リードスイッチ
US7999642B2 (en) 2005-03-04 2011-08-16 Ht Microanalytical, Inc. Miniaturized switch device
US7839242B1 (en) * 2006-08-23 2010-11-23 National Semiconductor Corporation Magnetic MEMS switching regulator
JP2008243450A (ja) 2007-03-26 2008-10-09 Oki Sensor Device Corp 接点機構デバイス、接点機構デバイスの製造方法
JP2009009756A (ja) * 2007-06-26 2009-01-15 Panasonic Electric Works Co Ltd マイクロリレー
FR2926922B1 (fr) 2008-01-30 2010-02-19 Schneider Electric Ind Sas Dispositif de commande a double mode d'actionnement
US8665041B2 (en) * 2008-03-20 2014-03-04 Ht Microanalytical, Inc. Integrated microminiature relay
CN102067262B (zh) 2008-03-20 2013-11-27 Ht微量分析有限公司 集成簧片开关
US7902946B2 (en) 2008-07-11 2011-03-08 National Semiconductor Corporation MEMS relay with a flux path that is decoupled from an electrical path through the switch and a suspension structure that is independent of the core structure and a method of forming the same
US8436701B2 (en) * 2010-02-08 2013-05-07 International Business Machines Corporation Integrated electromechanical relays

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020140533A1 (en) * 1999-07-01 2002-10-03 Masaru Miyazaki Method of producing an integrated type microswitch
CN1357749A (zh) * 2000-12-06 2002-07-10 中国科学院长光学精密机械与物理研究所 一种集成式微型电感位移传感器及其制备方法
WO2004006295A2 (en) * 2002-05-29 2004-01-15 Superconductor Technologies, Inc. Spring loaded bi-stable mems switch
WO2009001848A1 (ja) * 2007-06-26 2008-12-31 Panasonic Electric Works Co., Ltd. マイクロリレー
CN101373863A (zh) * 2007-06-26 2009-02-25 英特尔公司 切开的电接触件以及通过进行切片制造接触件的方法

Also Published As

Publication number Publication date
SG184022A1 (en) 2012-10-30
US8665041B2 (en) 2014-03-04
US20140152406A1 (en) 2014-06-05
KR20130069571A (ko) 2013-06-26
US20100171577A1 (en) 2010-07-08
WO2011115814A1 (en) 2011-09-22
JP2013522847A (ja) 2013-06-13
EP2548212A1 (en) 2013-01-23

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