CN102887636A - Dividing apparatus - Google Patents
Dividing apparatus Download PDFInfo
- Publication number
- CN102887636A CN102887636A CN2012101538845A CN201210153884A CN102887636A CN 102887636 A CN102887636 A CN 102887636A CN 2012101538845 A CN2012101538845 A CN 2012101538845A CN 201210153884 A CN201210153884 A CN 201210153884A CN 102887636 A CN102887636 A CN 102887636A
- Authority
- CN
- China
- Prior art keywords
- rectangular substrate
- short rectangular
- section
- break
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
The invention relates to a dividing apparatus for a short rectangle substrate, saving equipment power and reducing operation time. The dividing apparatus comprises a scribe part which forms a scribe groove on the surface of the short rectangle substrate along a width direction of the substrate; a reverse part which reverses the scribed surface of the short rectangle substrate; a break part which divides the reversed short rectangle substrate along the scribe groove; a transport part which conveys the short rectangle substrate from the scribe part to the break part. The transport part is formed such that the short rectangle substrate can be conveyed while the length direction of the short rectangle substrate is maintained in the transport direction; and a cross beam of a scribe probe of the scribe part is formed along the length direction of the short rectangle substrate, so that a scribe groove can be made on the short rectangle substrate along the width direction by means of relative movement of either the scribe probe or the short rectangle substrate.
Description
Technical field
The present invention relates to the break-up device of the brittle substrate such as a kind of glass substrate, particularly relate to the break-up device that forms scored groove and carry out disjunction along this scored groove at substrate.
Background technology
All the time, known many parallel scored groove along being formed on large-area mother substrate are carried out disjunction to form a plurality of short rectangular substrate, afterwards, short rectangular substrate form along many scored groove of width and from then on scored groove with the substrate brisement, be divided into whereby the constituent parts product, take out the method (such as reference patent documentation 1, patent documentation 2 etc.) of unit product.
Fig. 9 is the explanatory view that summary shows existing known method for dividing.
Short rectangular substrate W from mother substrate cuts out shown in Fig. 9 (a) and Fig. 9 (b), delivers to scoring device 31 with flat-hand position alongst, processes a plurality of scored groove S at width.Crossbeam (Beam) 31a of the long band of the part of the framework of formation scoring device 31, be configured in the direction with the conveyance direction quadrature of short rectangular substrate W, at crossbeam 31a the engraving head 31b that scored groove such as possessing break bar forms tool is installed, a plurality of scored groove S are sequentially processed in this engraving head 31b to-and-fro movement.Afterwards, shown in Fig. 9 (c), make the back side counter-rotating of short rectangular substrate W surface and deliver to brisement device 32, shown in Fig. 9 (d), by brisement bar 32a from sequentially disjunction of scored groove S, take out the product W1 of unit key element.
Yet, in this method, must make engraving head move back and forth the number of times of scored groove S quantity at scoring device, therefore have the shortcoming that activity duration lifting elongated, productive rate is restricted, product cost is impacted.
Therefore, as the method for a plurality of scored groove S of time processing, motion has method shown in Figure 10.
The crossbeam of scoring device 33 (Beam) 33a is the direction that is configured in the conveyance direction quadrature of short rectangular substrate W, at this crossbeam 33a engraving head 33b with scored groove S equal amts to be processed is installed.This delineates device 33, and shown in Figure 10 (a) and Figure 10 (b), the short rectangular substrate W from mother substrate cuts out delivers to scoring device 33 with the flat-hand position of its length direction and conveyance direction quadrature, and time processing is along a plurality of scored groove S of width.Then, shown in Figure 10 (c) and Figure 10 (d), behind the 90-degree rotation, brisement device 34 is also delivered in the counter-rotating of the surperficial back side to the short rectangular substrate W that processes scored groove under flat-hand position, shown in Figure 10 (e), sequentially divide by brisement bar 34a from scored groove S to be broken into unit product W1.
Patent documentation 1: TOHKEMY 2003-292333 communique
Patent documentation 2: TOHKEMY 2006-315901 communique
Summary of the invention
Yet in the latter's shown in Figure 10 method, because the mechanism that makes short rectangular substrate W keep 90-degree rotation under the state of flat-hand position on the mounting plane must be arranged, so cost of equipment uprises, and has the corresponding elongated shortcoming of production line.
Again, the crossbeam 33a of long band of a part that consists of the framework of scoring device 33 is the conveyance direction orthogonal collocation with short rectangular substrate W, so the two end portions of crossbeam becomes from a succession of production line and laterally exposing.Be with, with the situation that production line two consecutives or three consecutives be arranged in parallel, above-mentioned exposed portions serve becomes and hinders and produce meaningless space, has the problem points of the rationalization that can't seek to arrange the space.
Therefore, the present invention is in order to solve above-mentioned existing known problem, and its purpose is to provide the break-up device of short rectangular substrate of the novelty of a kind of Labor-saving that can reach equipment and the shortening of activity duration.
In order to reach above-mentioned purpose, the present invention seeks following technique means.That is break-up device of the present invention possesses: delineation section forms scored groove on the surface of short rectangular substrate along the substrate width direction; Inversion portion makes the short rectangular substrate surface back side counter-rotating that is formed with scored groove; Brisement section is along the short rectangular substrate disjunction of scored groove after with the counter-rotating of the surperficial back side; And conveying unit, should short rectangular substrate from the conveyance of delineation section to brisement section; This conveying unit is to form the length direction that can make short rectangular substrate to keep towards the posture of conveyance direction and keep the short rectangular substrate of conveyance under the state of conveyance direction; Keep the crossbeam of the engraving head of this delineation section to form along the length direction of short rectangular substrate, relatively move by any one that makes engraving head or short rectangular substrate, in the scored groove of short rectangular substrate processing along width.
Break-up device of the present invention such as above-mentioned formation, therefore by at the crossbeam of delineation section a plurality of engraving heads being installed, can be in a plurality of scored groove of short rectangular substrate time processing, can seek the cripetura of activity duration, and the short rectangular substrate after the delineation processing, under the state of the posture that maintains delineation section, deliver to ensuing inversion portion by conveying unit, therefore need not make short rectangular substrate 90-degree rotation.Whereby, can omit in order to the rotating mechanism of 90-degree rotation or its space is set, can seek the miniaturization of device.Again, keeping the crossbeam of the engraving head of delineation section is to form along the length direction of short rectangular substrate that is along the conveyance direction, therefore the crossbeam of long band can not expose at transverse direction from the production line of break-up device, from the production line of viewed in plan break-up device, can form the narrower and meticulous band shape of width.Whereby, have following effect, can with the conveyance direction of short rectangular substrate abreast with two or three etc. a plurality of break-up device reasonable combination consist of, can seek to arrange effective utilization in space.
Other means and effects in order to solve problem
Among the present invention, possess: the 1st, load short rectangular substrate in this delineation section; The 2nd, the short rectangular substrate after the counter-rotating of inversion portion mounting is also delivered to brisement section; And transport mechanism, from this delineation section with short rectangular substrate conveyance to inversion portion; Transport mechanism and the 2nd form in fact this conveying unit and also can.
Whereby, can on the 1st platform to short rectangular substrate processing scored groove after, make the length direction of short rectangular substrate keep posture and the counter-rotating of the surperficial back side towards the conveyance direction, and with short rectangular substrate conveyance to brisement section.
Again, among the present invention, this inversion portion be by accept from transport mechanism short rectangular substrate and the counter-rotating platform of mounting and the platform that will reverse counter-rotating driving with short rectangular substrate is handover to below the 2nd reversing device of standby consist of, the platform that reverses possesses the adsorption function that short rectangular substrate is adsorbed removably.
Whereby, can positively carry out the surperficial back side counter-rotating of short rectangular substrate, and really be handover to deliver to the 2nd of ensuing brisement section.
Description of drawings
Fig. 1 shows the stereographic map of an example of break-up device of the present invention.
Fig. 2 is the stereographic map of delineation section in the break-up device of Fig. 1.
Fig. 3 is the stereographic map of inversion portion and brisement section in the break-up device of Fig. 1.
Fig. 4 is the side-view that shows an example of transport mechanism in the break-up device of Fig. 1.
Fig. 5 (a), (b) are the side-views of inversion portion in the break-up device of Fig. 1.
Fig. 6 shows the whole figure that consists of of the summary of break-up device of the present invention.
The figure of the action of the step order of Fig. 7 (a)-(e) demonstration break-up device of the present invention.
Fig. 8 shows the approximate vertical view of another embodiment of break-up device of the present invention.
Fig. 9 (a)-(d) summary shows the explanatory view of existing known method for dividing.
Figure 10 (a)-(e) summary shows the explanatory view of existing known another method for dividing.
[main element nomenclature]
Embodiment
Below, describe the detailed of break-up device of the present invention in detail according to Fig. 1-Fig. 7.Fig. 1 is the stereographic map of break-up device of the present invention, Fig. 2 is the stereographic map of delineation section, Fig. 3 is the stereographic map of inversion portion and brisement section, Fig. 4 is the side-view that shows an example of transport mechanism, Fig. 5 is the side-view of inversion portion, Fig. 6 is the whole figure that consists of of summary that shows break-up device, and Fig. 7 is the figure of the action of step display order.
Break-up device of the present invention is as dividing from the mother substrate of glass system the short rectangular substrate W that has no progeny to use with the break-up device that takes out a plurality of unit products along width (Y-direction of figure) disjunction.It is the rectangular substrate that refers to become a plurality of arrangements of unit product one row of the finished product with, short rectangular substrate W used in the present invention.
Break-up device 1 of the present invention possesses: the A of delineation section, and forming a plurality of, the present embodiment on the surface of short rectangular substrate W along the substrate width direction is 3 scored groove S; Inversion portion B makes the short rectangular substrate W surface back side counter-rotating that is scored; The C of brisement section, the short rectangular substrate W disjunction after will reversing along scored groove; And conveying unit, with short rectangular substrate W from the A of delineation section conveyance to the C of brisement section.Conveying unit is made of aftermentioned transport mechanism 9 and the 2nd 18 in fact, makes the length direction (length directions that a plurality of unit products are arranged) of substrate transferring direction and the short rectangular substrate of conveying unit become equidirectional.That is, be to form the length direction that can make short rectangular substrate W to keep towards the posture of conveyance direction and keep under the state that the conveyance direction is certain orientation short rectangular substrate W from the A of delineation section in the certain orientation conveyance to the C of brisement section.This substrate transferring direction is shown as directions X in graphic.
The A of delineation section possesses pair of right and left pillar 2,2, hanger at the crossbeam (Beam) 3 of these pillars 2,2, and crossbeam 3 is to configure along directions X.Being separated by at crossbeam 3, set to be interval with a plurality of, the present embodiment be 3 engraving heads 4, is equipped with in the lower end of engraving head 4 in order to the scored groove such as break bar to short rectangular substrate W processing scored groove S and forms tool 5.Again, disposing the horizontal plane that loads short rectangular substrate W below engraving head 4 is rectangular the 1st 6.The 1st 6 be form can along with directions X in the plane the track 8 that extends of the Y-direction of quadrature move, loaded maintenance with its length direction towards the posture of directions X at these the 1st 6 short rectangular substrate W.
At the above-mentioned delineation A of section, scored groove is formed tool 5 press on the surface of short rectangular substrate W and make simultaneously the 1st 6 and be displaced into Y-direction by drive shaft 7, whereby to 3 scored groove S of short rectangular substrate W processing.The short rectangular substrate W that is scored processing delivers to ensuing inversion portion B by the transport mechanism 9 of the conveying unit of following explanation.
Fig. 4 is an example that shows above-mentioned transport mechanism 9.This transport mechanism 9 is to be assembled in above-mentioned break-up device 1, but among Fig. 1-Fig. 3 for fear of graphic complicated and omitted.
Transport mechanism 9 is to form in the following manner, at the pillar 10 along the front and back of directions X, 10 install the guide rail 11 of level, at the moving body 12 that moves along this guide rail 11, possess below air and attract the adsorption plate 13 in hole can pass through driving mechanism (not shown) lifting.Make these adsorption plate 13 liftings keep short rectangular substrate W with absorption, move at directions X along guide rail 11, the short rectangular substrate W that is scored the A of section delineation processing can be delivered to ensuing inversion portion B under the state that does not change its plane posture whereby.
Inversion portion B as shown in Figure 5, possesses the lifting body 15 that moves up and down along pillar 14, and is inverted to the down counter-rotating platform 17 of posture take axle 16 as fulcrum from posture up at lifting body 15.Counter-rotating platform 17 possesses to adsorb the air attraction hole of short rectangular substrate W on the surface, reverse by reversing device (not shown).Below counter-rotating platform 17, in order to accept short rectangular substrate W after the counter-rotating and conveyance to the 2nd of the ensuing brisement C of section just in standby.
Fig. 5 (a) shows that short rectangular substrate W is handover to state on the counter-rotating platform 17 from adsorption plate 13.Shown in Fig. 5 (b), but from then on state rises to till the reverse position of counter-rotating platform 17 lifting body 15, by the reversing device counter-rotating, the short rectangular substrate W after the counter-rotating of the surperficial back side is handover to the 2nd 18.
The 2nd 18, the short rectangular substrate W conveyance after formation will be reversed is to the part of the conveying unit of the ensuing brisement C of section.At the present embodiment, at the track 19 that is layed in directions X towards the C of brisement section microscope carrier 21 is installed movably, at this microscope carrier 21 can be provided with by the mode that drive shaft 23 moves along the track 22 that is layed in Y-direction the 2nd 18.
Short rectangular substrate W after the inversion portion B handing-over is loading under the 2nd 18 state, on the microscope carrier 21 after Y-direction is mobile a little, deliver to the C of brisement section with microscope carrier 21.
Inversion portion B and the C of brisement section configure in the position of width (Y-direction of figure) with staggering.Be with, at break-up device 1, can avoid the mutual interference of inversion portion B and the C of brisement section and the space of safeguarding of guaranteeing both sides, and dwindle simultaneously the inversion portion B that occupies break-up device 1 integral body and the C of brisement section in the size of length direction (directions X of figure).
In addition, at the present embodiment, make microscope carrier 21 mobile a little in Y-direction from the relation of the position of the C of brisement section, but mobile and directly deliver to the C of brisement section by microscope carrier 21 and also can.
The C of brisement section possesses the door type framework 24 that configures across track 19,19 in order to allow microscope carrier 21 to pass through, and at the crossbeam 25 of this framework 24, the brisement bar 26 that front end attenuates can arrange up and down by hoisting appliance (not shown).Be positioned in the 2nd 18 and deliver to the short rectangular substrate W of the C of brisement section, press with brisement bar 26 from the face opposite with the face that is provided with scored groove S, whereby from sequentially disjunction of scored groove S, take out unit product W1.Above-mentioned a succession of processing sequence from the A of delineation section process inversion portion B to the C of brisement section shows at Fig. 6 and Fig. 7 (a)-Fig. 7 (e) summary.
At above-mentioned break-up device, can be by a plurality of scored groove S of a plurality of engraving heads 4 time processing of the crossbeam 3 that is installed in the A of delineation section, and the crossbeam 3 of the long ribbon shape of the A of delineation section of maintenance engraving head 4 is to form along the length direction of short rectangular substrate W that is directions X, therefore the two end portions of crossbeam 3 can not exposed at transverse direction from the production line of break-up device, from the production line of viewed in plan break-up device, can form the narrower and meticulous band shape of width.Whereby, for example shown in Figure 8, can abreast 1,1 combination of two break-up devices be consisted of with the conveyance direction of short rectangular substrate W, or organize not with three groups, four groups etc. that wasting space ground reasonable combination consists of more, can seek to arrange effective utilization in space.
Therefore again, the short rectangular substrate W the A of delineation section is scored delivers to inversion portion B by conveying unit under the state of keeping its plane posture, need not have the step that makes short rectangular substrate W 90-degree rotation as known now, can omit the equipment of rotating mechanism or it arranges the space.
At above-described embodiment, by making the 1st 6 of the A of delineation section to move short rectangular substrate W processing scored groove S in Y-direction, but on the contrary, fix in advance the 1st 6 crossbeam 5 that makes supporting engraving head 4 or pillar 2 and move to delineate and also can.To the scored groove formation tool 31b of short rectangular substrate W processing scored groove, except the machine tools such as break bar, also can by laser beam processing again.
Above, describe for representative embodiment of the present invention, but the present invention is not specific to above-mentioned example.For example, the formation of the transport mechanism 9 of the part of formation conveying unit can substitute above-described embodiment by mechanical arm.In addition, among the present invention, in order to reach above-mentioned purpose, in the scope that does not break away from claim, can suitably revise, change.
Method for dividing of the present invention is the disjunction that is used in the short rectangular substrate that is made of hard brittle materials such as glass substrates.
Claims (5)
1. break-up device is characterized in that possessing:
Delineation section forms scored groove on the surface of short rectangular substrate along the substrate width direction;
Inversion portion makes the short rectangular substrate surface back side counter-rotating that is formed with scored groove;
Brisement section is along the short rectangular substrate disjunction of scored groove after with the counter-rotating of the surperficial back side; And
Conveying unit, should short rectangular substrate from the conveyance of delineation section to brisement section;
This conveying unit is to form the length direction that can make short rectangular substrate to keep towards the posture of conveyance direction and keep the short rectangular substrate of conveyance under the state of conveyance direction;
The crossbeam that keeps the engraving head of this delineation section is to form along the length direction of short rectangular substrate, relatively moves by any one that makes engraving head or short rectangular substrate, in the scored groove of short rectangular substrate processing along width.
2. break-up device as claimed in claim 1 is characterized in that it possesses:
The 1st, load short rectangular substrate in this delineation section;
The 2nd, the short rectangular substrate after the counter-rotating of inversion portion mounting is also delivered to brisement section; And
Transport mechanism, from this delineation section with short rectangular substrate conveyance to inversion portion;
Transport mechanism and the 2nd this conveying unit of formation.
3. break-up device as claimed in claim 2, it is characterized in that wherein, this inversion portion be by accept from transport mechanism short rectangular substrate and the counter-rotating platform of mounting and the platform that will reverse counter-rotating driving with short rectangular substrate is handover to below the 2nd reversing device of standby consist of, the platform that reverses possesses the adsorption function that short rectangular substrate is adsorbed removably.
4. break-up device as claimed in claim 3 is characterized in that wherein, the 2nd will the section of being inverted after the short rectangular substrate mounting of counter-rotating after width moves conveyance to brisement section.
5. such as the described break-up device of arbitrary claim in the claim 1 to 4, it is characterized in that it is to be configured to be arranged in parallel a plurality of with the conveyance direction.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011158882A JP2013023401A (en) | 2011-07-20 | 2011-07-20 | Splitting apparatus |
| JP2011-158882 | 2011-07-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102887636A true CN102887636A (en) | 2013-01-23 |
| CN102887636B CN102887636B (en) | 2015-07-15 |
Family
ID=47531341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210153884.5A Expired - Fee Related CN102887636B (en) | 2011-07-20 | 2012-05-11 | Dividing apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2013023401A (en) |
| KR (1) | KR101397487B1 (en) |
| CN (1) | CN102887636B (en) |
| TW (1) | TWI532088B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103978564A (en) * | 2013-02-07 | 2014-08-13 | 三星钻石工业股份有限公司 | Substrate processing device |
| CN104072096A (en) * | 2013-03-31 | 2014-10-01 | 平田机工株式会社 | Glass plate dividing device and glass plate dividing method |
| CN109986461A (en) * | 2017-12-25 | 2019-07-09 | 株式会社迪思科 | Cutting apparatus |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5566511B2 (en) * | 2013-08-07 | 2014-08-06 | 三星ダイヤモンド工業株式会社 | Cutting device |
| TWI507371B (en) * | 2013-12-12 | 2015-11-11 | Taiwan Mitsuboshi Diamond Ind Co Ltd | Cutting method and cutting apparatus |
| JP6716900B2 (en) * | 2015-12-04 | 2020-07-01 | 三星ダイヤモンド工業株式会社 | Cutting device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1890074A (en) * | 2003-12-04 | 2007-01-03 | 三星钻石工业股份有限公司 | Substrate machining method, substrate machining device, substrate carrying method, and substrate carrying mechanism |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11116260A (en) * | 1997-10-08 | 1999-04-27 | Mitsuboshi Diamond Kogyo Kk | Device for machining glass |
| JP4141805B2 (en) * | 2002-11-07 | 2008-08-27 | 住友化学株式会社 | Single wafer coating method |
| JP2006027795A (en) * | 2004-07-14 | 2006-02-02 | Toshiba Corp | Sucking device, method of carrying plate-like member, and method of manufacturing liquid crystal display |
| KR100924083B1 (en) * | 2008-03-05 | 2009-11-02 | 세메스 주식회사 | Scribing apparatus, apparatus and method for cutting substrate using the same |
| JP5167160B2 (en) | 2009-01-30 | 2013-03-21 | 三星ダイヤモンド工業株式会社 | Brittle material substrate transfer and cutting equipment |
-
2011
- 2011-07-20 JP JP2011158882A patent/JP2013023401A/en active Pending
-
2012
- 2012-04-05 TW TW101112022A patent/TWI532088B/en not_active IP Right Cessation
- 2012-05-08 KR KR1020120048453A patent/KR101397487B1/en not_active IP Right Cessation
- 2012-05-11 CN CN201210153884.5A patent/CN102887636B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1890074A (en) * | 2003-12-04 | 2007-01-03 | 三星钻石工业股份有限公司 | Substrate machining method, substrate machining device, substrate carrying method, and substrate carrying mechanism |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103978564A (en) * | 2013-02-07 | 2014-08-13 | 三星钻石工业股份有限公司 | Substrate processing device |
| CN104072096A (en) * | 2013-03-31 | 2014-10-01 | 平田机工株式会社 | Glass plate dividing device and glass plate dividing method |
| CN109986461A (en) * | 2017-12-25 | 2019-07-09 | 株式会社迪思科 | Cutting apparatus |
| CN109986461B (en) * | 2017-12-25 | 2022-08-02 | 株式会社迪思科 | Cutting device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101397487B1 (en) | 2014-05-20 |
| TWI532088B (en) | 2016-05-01 |
| KR20130011907A (en) | 2013-01-30 |
| JP2013023401A (en) | 2013-02-04 |
| TW201306102A (en) | 2013-02-01 |
| CN102887636B (en) | 2015-07-15 |
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