CN102844697A - 光斑消减器及包括光斑消减器的投影单元 - Google Patents
光斑消减器及包括光斑消减器的投影单元 Download PDFInfo
- Publication number
- CN102844697A CN102844697A CN2011800211100A CN201180021110A CN102844697A CN 102844697 A CN102844697 A CN 102844697A CN 2011800211100 A CN2011800211100 A CN 2011800211100A CN 201180021110 A CN201180021110 A CN 201180021110A CN 102844697 A CN102844697 A CN 102844697A
- Authority
- CN
- China
- Prior art keywords
- optical element
- crystal
- hot spot
- abatement device
- described hot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003638 chemical reducing agent Substances 0.000 title abstract 3
- 239000013078 crystal Substances 0.000 claims abstract description 82
- 230000003287 optical effect Effects 0.000 claims abstract description 67
- 238000010438 heat treatment Methods 0.000 claims abstract description 30
- 238000001816 cooling Methods 0.000 claims abstract description 24
- 230000001427 coherent effect Effects 0.000 claims abstract description 20
- 230000008859 change Effects 0.000 claims description 19
- 239000010453 quartz Substances 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 10
- 230000010355 oscillation Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 2
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- 238000013519 translation Methods 0.000 description 6
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000003534 oscillatory effect Effects 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 206010009856 Cold exposure injury Diseases 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000001962 electrophoresis Methods 0.000 description 2
- 230000005686 electrostatic field Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 229910017119 AlPO Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000003128 head Anatomy 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 210000001525 retina Anatomy 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000005619 thermoelectricity Effects 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/48—Laser speckle optics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/32—Systems for obtaining speckle elimination
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Lasers (AREA)
- Projection Apparatus (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1053271 | 2010-04-28 | ||
FR1053271A FR2959574B1 (fr) | 2010-04-28 | 2010-04-28 | Reducteur de speckles et unite de projection comprenant un reducteur de speckles |
PCT/EP2011/056681 WO2011135008A1 (fr) | 2010-04-28 | 2011-04-27 | Reducteur de speckles et unite de projection comprenant un réducteur de speckles |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102844697A true CN102844697A (zh) | 2012-12-26 |
CN102844697B CN102844697B (zh) | 2015-06-17 |
Family
ID=43216764
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201180021110.0A Active CN102844697B (zh) | 2010-04-28 | 2011-04-27 | 光斑消减器及包括光斑消减器的投影单元 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8833945B2 (zh) |
EP (1) | EP2564260B1 (zh) |
JP (1) | JP5643423B2 (zh) |
KR (1) | KR20130092388A (zh) |
CN (1) | CN102844697B (zh) |
FR (1) | FR2959574B1 (zh) |
WO (1) | WO2011135008A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112631055A (zh) * | 2020-12-25 | 2021-04-09 | 四川长虹电器股份有限公司 | 一种固液双态消散斑装置及激光投影光源 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10132684B1 (en) | 2014-12-18 | 2018-11-20 | J.A. Woolam Co., Inc. | Reflectometer, spectrophometer, ellipsometer and polarimeter system with a super continuum laser-source of a beam of electromagnetism and improved detector system |
US11035729B1 (en) | 2014-12-18 | 2021-06-15 | J.A. Woqllam Co., Inc. | Reflectometer, spectrophotometer, ellipsometer and polarimeter system with a super continuum laser source of a beam of electromagnetism, and improved detector system |
US10422739B1 (en) | 2014-12-18 | 2019-09-24 | J.A. Woollam Co., Inc. | Reflectometer, spectrophotometer, ellipsometer and polarimeter systems with a super continuum laser source of a beam of electromagnetism, and improved detector system |
US11675208B1 (en) | 2014-12-18 | 2023-06-13 | J.A. Woollam Co., Inc. | Reflectometer, spectrophotometer, ellipsometer and polarimeter system with a super continuum laser source of a beam of electromagnetism, and improved detector system |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010007510A1 (en) * | 1996-06-11 | 2001-07-12 | Andreas Dorsel | Method and apparatus for reducing the formation of spots in laser projection |
US6577429B1 (en) * | 2002-01-15 | 2003-06-10 | Eastman Kodak Company | Laser projection display system |
CN1879057A (zh) * | 2004-04-09 | 2006-12-13 | 松下电器产业株式会社 | 激光图像显示装置 |
CN101344712A (zh) * | 2007-07-12 | 2009-01-14 | 精工爱普生株式会社 | 光源装置、图像显示装置及监视装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005008330A1 (ja) | 2003-07-22 | 2005-01-27 | Matsushita Electric Industrial Co., Ltd. | 2次元画像形成装置 |
US7202466B2 (en) | 2003-08-25 | 2007-04-10 | Cadent Ltd. | Apparatus and method for providing high intensity non-coherent light and for speckle reduction |
JP4441918B2 (ja) * | 2006-08-31 | 2010-03-31 | セイコーエプソン株式会社 | 光源装置及び画像表示装置 |
KR100803222B1 (ko) * | 2007-01-26 | 2008-02-14 | 삼성전자주식회사 | 스펙클 저감 레이저와 이를 채용한 레이저 디스플레이 장치 |
US8767783B2 (en) * | 2008-02-20 | 2014-07-01 | Panasonic Corporation | Light source device, lighting device and image display device |
EP2196844B1 (en) * | 2008-12-10 | 2014-09-10 | Delphi Technologies, Inc. | A projection unit having a speckle suppression device based on piezoelectric actuating |
-
2010
- 2010-04-28 FR FR1053271A patent/FR2959574B1/fr active Active
-
2011
- 2011-04-27 WO PCT/EP2011/056681 patent/WO2011135008A1/fr active Application Filing
- 2011-04-27 CN CN201180021110.0A patent/CN102844697B/zh active Active
- 2011-04-27 US US13/640,684 patent/US8833945B2/en active Active
- 2011-04-27 EP EP11717256.9A patent/EP2564260B1/fr active Active
- 2011-04-27 KR KR1020127027927A patent/KR20130092388A/ko not_active Application Discontinuation
- 2011-04-27 JP JP2013506654A patent/JP5643423B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010007510A1 (en) * | 1996-06-11 | 2001-07-12 | Andreas Dorsel | Method and apparatus for reducing the formation of spots in laser projection |
US6577429B1 (en) * | 2002-01-15 | 2003-06-10 | Eastman Kodak Company | Laser projection display system |
CN1879057A (zh) * | 2004-04-09 | 2006-12-13 | 松下电器产业株式会社 | 激光图像显示装置 |
CN101344712A (zh) * | 2007-07-12 | 2009-01-14 | 精工爱普生株式会社 | 光源装置、图像显示装置及监视装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112631055A (zh) * | 2020-12-25 | 2021-04-09 | 四川长虹电器股份有限公司 | 一种固液双态消散斑装置及激光投影光源 |
Also Published As
Publication number | Publication date |
---|---|
WO2011135008A1 (fr) | 2011-11-03 |
JP2013525852A (ja) | 2013-06-20 |
JP5643423B2 (ja) | 2014-12-17 |
EP2564260A1 (fr) | 2013-03-06 |
FR2959574B1 (fr) | 2012-08-17 |
CN102844697B (zh) | 2015-06-17 |
US20130027673A1 (en) | 2013-01-31 |
US8833945B2 (en) | 2014-09-16 |
KR20130092388A (ko) | 2013-08-20 |
EP2564260B1 (fr) | 2014-12-03 |
FR2959574A1 (fr) | 2011-11-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102844697A (zh) | 光斑消减器及包括光斑消减器的投影单元 | |
JP4006251B2 (ja) | ミラー装置、ミラーの調整方法、露光装置、露光方法及び半導体デバイスの製造方法 | |
JP6415434B2 (ja) | Euv投影露光装置用ミラー機構、その操作方法、及びeuv投影露光装置 | |
US9335543B2 (en) | Optical scanner, image display device, head mount display, and heads-up display | |
KR102572139B1 (ko) | 리소그래피 장치용 미러를 제조하기 위한 방법 | |
JP2008191512A (ja) | 光散乱素子、光散乱装置、照明装置及び網膜走査型画像表示装置 | |
TW200402915A (en) | Laser light source control method and device, exposure method and apparatus, and device manufacturing method | |
JP2010014798A (ja) | マイクロミラーデバイス及び光照射装置 | |
JPS6159316A (ja) | 液晶パネルの温度制御方法 | |
JPH08262210A (ja) | 光学装置およびこれを有する露光装置 | |
TWI767961B (zh) | 微影系統與方法 | |
JP2022533380A (ja) | ベッセル様ビームを用いる走査型投影法のための画像生成装置 | |
JP6889243B2 (ja) | 屋外用画像照射装置およびこれを備える移動体 | |
JP4325846B2 (ja) | 分光器およびこの分光器を備えたレーザ装置 | |
TW202210953A (zh) | 反射鏡、特別是用於微影投射曝光裝置的反射鏡 | |
KR102304261B1 (ko) | 장치, 디바이스 및 디바이스 제조 방법 | |
JP5419900B2 (ja) | フィルタ、露光装置及びデバイス製造方法 | |
JPWO2004034447A1 (ja) | 極短紫外線光学系用反射ミラー、極短紫外線光学系、極短紫外線光学系の使用方法、極短紫外線光学系の製造方法、極短紫外線露光装置、及び極短紫外線露光装置の使用方法 | |
JPS62284323A (ja) | 光走査装置 | |
JP5513636B2 (ja) | 露光装置及びデバイス製造方法 | |
JP2008288323A (ja) | 露光用レーザ装置 | |
CN116339048A (zh) | 投影仪 | |
JPH11257893A (ja) | 赤外線放射量制御装置 | |
Rowe et al. | The Development and Optimisation of High Bandwidth Bimorph Deformable Mirrors | |
JPH0540126A (ja) | 流量センサ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190201 Address after: Babado J San Michaele Patentee after: Delphi Technologies, Inc. Address before: Michigan Patentee before: DELPHI TECHNOLOGIES, Inc. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240814 Address after: Luxembourg Patentee after: Anbofu Technology (2) Co.,Ltd. Country or region after: Luxembourg Address before: Babado J San Michaele Patentee before: Delphi Technologies, Inc. Country or region before: Barbados |
|
TR01 | Transfer of patent right |