CN102795767A - Marking device - Google Patents

Marking device Download PDF

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Publication number
CN102795767A
CN102795767A CN2012101190856A CN201210119085A CN102795767A CN 102795767 A CN102795767 A CN 102795767A CN 2012101190856 A CN2012101190856 A CN 2012101190856A CN 201210119085 A CN201210119085 A CN 201210119085A CN 102795767 A CN102795767 A CN 102795767A
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CN
China
Prior art keywords
adhesive substrates
tracing wheel
scribe head
protuberance
roller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2012101190856A
Other languages
Chinese (zh)
Other versions
CN102795767B (en
Inventor
成尾彻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of CN102795767A publication Critical patent/CN102795767A/en
Application granted granted Critical
Publication of CN102795767B publication Critical patent/CN102795767B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037Controlling or regulating
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

The invention provides a marking device which can prevent the direction contact of marking wheels when the marking wheels mark a glued substrate from top to bottom at the same time. The two sides of the marking wheels (22, 32) of upper and lower marking heads (19, 20) are provided with roller pairs (23, 24) (33, 34). The distance between the front end of the roller and the front end of the marking wheel is less than half of the thickness of the glued substrate. In such a manner, even the glued substrate thickness data input or operation is wrong, the rollers and the glued substrate can contact before the contact of the knife points of the marking wheels, so the knife points of the marking wheels can not contact with each other.

Description

Chalker
Technical field
The present invention relates to a kind of chalker of being rule in two surfaces of adhesive substrates of being fitted with 2 brittle substrates etc. simultaneously.
Background technology
Liquid crystal panels such as liquid crystal indicator become the structure that is fitted with 2 glass sheets.When the adhesive substrates that is fitted with 2 glass sheets cuts out the situation of liquid crystal panel, must form line at the upper surface and the lower surface of adhesive substrates.Therefore, as the chalker in order to rule in two surfaces simultaneously, the chalker of known patent document 1.It is by a pair of scribe head edge direction parallel with the face of adhesive substrates that has a tracing wheel at front end being moved and the liner being carried out on two surfaces of adhesive substrates.
The prior art document
Patent documentation
No. 2009/157440 communique of patent documentation 1: International Publication WO
Summary of the invention
[problem that invention institute desire solves]
When ruling with previous chalker, at first, make at first at front end to have up and down two surfaces of a pair of scribe head of tracing wheel near adhesive substrates, and in line starting position standby.At this moment, when the situation of the input error of the thickness of slab data that have adhesive substrates or wrong-way, there is the blade tip collision of tracing wheel up and down and defective that blade tip is sustained damage.On tracing wheel, produce when the situation of damage is arranged, existence can't normally be rule afterwards and caused the problem at generation unacceptable products such as the liquid crystal panels that cuts out.
The present invention has in mind in this previous problem and completion person; Its purpose is; In the chalker of being rule in two surfaces of adhesive substrates at the same time; Even if having input error or the wrong-way etc. of the thickness of slab data of substrate, also can tracing wheel be in contact with one another, thus the generation of the unacceptable product in the adhesive substrates after can preventing in advance to cut off.
[technique means of dealing with problems]
For solving this problem, chalker of the present invention comprises: the 1st scribe head, its from the top to the 1st line of the adhesive substrates of hard brittle material; And the 2nd scribe head, its from the below to the 2nd line of said adhesive substrates; And the face by at least one and the said adhesive substrates that make said the 1st, the 2nd scribe head and said adhesive substrates relatively moves abreast; And rule from two surfaces of said adhesive substrates simultaneously; And said the 1st scribe head comprises: the 1st tracing wheel, and the 1st of its said adhesive substrates of court is disposed and rotates freely; And the 1st protuberance, it clips said the 1st tracing wheel and the opposing parallel travel direction when line is configured to a pair of before; And the front end of said the 1st protuberance with the vertical direction of the face of said adhesive substrates on; The position the front end of more said the 1st tracing wheel more above the 1st distance; Said the 2nd scribe head comprises: the 2nd tracing wheel, and the 2nd of its said adhesive substrates of court is disposed and rotates freely; And the 2nd protuberance, it clips said the 2nd tracing wheel and the opposing parallel travel direction when line is configured to a pair of before; And the front end of said the 2nd protuberance with the vertical direction of the face of said adhesive substrates on; The position the front end of more said the 2nd tracing wheel more below the 2nd distance, and will said the 1st distance and the 2nd distance all be made as not reach and be 1/2 of the thickness of the said adhesive substrates of the object of ruling.
Here, the 1st protuberance of said the 1st scribe head also can be made as the roller with turning axle parallel with the turning axle of said the 1st tracing wheel.
Here, the 2nd protuberance of said the 2nd scribe head also can be made as the roller with turning axle parallel with the turning axle of said the 2nd tracing wheel.
Here, said the 1st, the 2nd protuberance also can comprise the member with the low rigidity of more said adhesive substrates and elastically deformable.
[effect of invention]
According to the present invention with said characteristic; At the same time in the two surperficial chalkers of ruling to adhesive substrates; After before the line direction of tracing wheel, protuberance is set; Because according to the 1st, the 2nd distance till protuberance to the tracing wheel on the vertical direction of face of the thickness setting of substrate and adhesive substrates, even if so have the input error or the wrong-way of the thickness of slab data of substrate, tracing wheel can not be in contact with one another yet.Therefore, can prevent the damage of tracing wheel, thereby can prevent in advance to produce unacceptable product in the adhesive substrates after cut-out.
Description of drawings
Figure 1A is the side-view of the chalker of embodiment of the present invention.
Figure 1B is the side-view of the chalker of embodiment of the present invention.
Fig. 2 is the figure of the scribe head up and down of this embodiment of expression.
Fig. 3 is the figure of the position of the scribe head before the expression line.
The figure of the action when Fig. 4 A is the line of chalker of this embodiment of expression.
The figure of the action when Fig. 4 B is the line of chalker of this embodiment of expression.
Fig. 5 is illustrated in the figure of the roller contact of the preceding scribe head of line at the state of brittle substrate.
The figure of the scribe head when Fig. 6 is expression line end and the action of roller.
Fig. 7 is the figure of variation of scribe head and the roller of expression embodiment of the present invention.
[explanation of symbol]
10a, 10b pillar
13a, 13b movably guide pillar
14a, 14b movably guide pillar
Member is moved in 15 sideslips
Member is moved in 16 sideslips
17 vertical sliding components
18 vertical sliding components
19 scribe heads
20 scribe heads
22 tracing wheels
32 tracing wheels
23 rollers
33 rollers
24 rollers
34 rollers
53a, 53b roller
54a, 54b roller
Embodiment
Figure 1A, Figure 1B are the sketch chart of observing the chalker of this embodiment from the side.Shown in these figure, pair of right and left pillar 10a, 10b are installed in pedestal 11 and block 12a, 12b is last.The upper parallel of this intercolumniation be provided with movable guiding pillar 13a, 13b, parallel beneath be provided with movable guiding pillar 14a, 14b.Movable guiding pillar 13a, 13b and 14a, 14b respectively make the moving member 15,16 of sideslip move along x direction of principal axis (left and right directions) respectively.On the moving member 15,16 of sideslip, be respectively arranged with and use so that scribe head is gone up the vertical sliding component 17,18 that moves at z direction of principal axis (above-below direction).Bottom at vertical sliding component 17 is provided with scribe head 19.Upper end at vertical sliding component 18 is provided with scribe head 20.Scribe head the 19, the 20th keeps the tracing wheel person at its front end.
Here, scribe head 19 is the 1st scribe heads, and scribe head 20 is the 2nd scribe heads.Again, vertical sliding component 17,18 constitutes makes these scribe heads to the moving part that mutual direction approaching or that leave moves, and movably guides the moving member 15,16 of pillar 13a, 13b, 14a, 14b and sideslip and constitutes the moving part that scribe head 19,20 is moved along the x direction of principal axis.
Fig. 2 at length representes this figure of scribe head 19,20 up and down, omits the member of expression periphery.In this embodiment,, be that the center rotation is provided with freely with its turning axle 22a with tracing wheel 22 in the lower end of the scribe head 19 of upside.Direct of travel (x direction of principal axis) at tracing wheel 22 is provided with pair of rolls 23,24 before.Roller 23,24 comprises turning axle 23a, the 24a parallel with the turning axle 22a of tracing wheel 22 respectively, and is to rotate maintained freely the 1st protuberance.
The scribe head 20 of below similarly, end above that, tracing wheel 32 is that the center rotation is provided with freely with turning axle 32a.Direct of travel (x direction of principal axis) at tracing wheel 32 is provided with pair of rolls 33,34 before. Roller 33,34 comprises turning axle 33a, the 34a parallel with the turning axle 32a of tracing wheel 32 respectively, and is to rotate maintained freely the 2nd protuberance.
Here, the lower end of tracing wheel 22 constitutes than the lower end of left and right sides roller 23,24 and slightly leans on the below.The lower end of tracing wheel 22 and the interval of lower end on the z direction of principal axis of left and right sides roller 23,24 are made as the 1st apart from d1.
About the scribe head 20 of below, the upper end of tracing wheel 32 constitutes the upper end of the roller 33,34 that is set to pair of right and left and slightly leans on the top.The upper end of tracing wheel 32 and the interval of upper end on the z direction of principal axis of left and right sides roller 33,34 are made as the 2nd apart from d2.The 2nd also can be different with d1 apart from d2, but here, be made as with the scribe head 19 of upside the 1st apart from d1 identical (d1=d2=d).
Here, if the thickness of the adhesive substrates that should rule is made as T, then is set at and satisfies with lower inequality apart from d
d<T/2 (1)
Value.This value d for example is made as 0.5mm.Moreover apart from the different situation of d1, d2 the time, arbitrary distance all is made as and does not reach 1/2 of thickness T.
Left and right sides roller 23,24 and 33,34 can use has the low rigidity of brittle substrate that becomes the line object and the material of elastically deformable, for example synthetic resins material such as polyacetal, vinylchlorid, polyetheretherketone or hard rubber material etc.
And say that the action the when chalker that use is had this a pair of scribe head is rule to adhesive substrates describes.At first, make scribe head 19,20 move to up-down rollers 23 and 33 and the position of adhesive substrates 40 subtends along the x direction of principal axis.Secondly, as shown in Figure 3, vertical sliding component 17 is moved towards lower direction, make vertical sliding component 18 up direction move, thereby make scribe head 19,20 near adhesive substrates 40.At this moment; Become upper end position that upper surface than adhesive substrates 40 slightly leans on below and tracing wheel 32 with the lower end position of tracing wheel 22 and slightly lean on the mode of top, set the lower end of tracing wheel 22 and the position of upper end on the z direction of principal axis of tracing wheel 32 than the lower surface of adhesive substrates 40.Under this state, shown in Fig. 4 A, Fig. 4 B, the moving member 15,16 of sideslip is moved on the x direction of principal axis along movable guiding pillar 13a, 13b, 14a, 14b.Thus, tracing wheel 22,23 moves on the adhesive substrates 40, and then by it is moved along the x direction of principal axis, and simultaneously to the two surface line up and down of adhesive substrates 40.And, finish line if arrive to the moving member 15,16 of sideslip till the right-hand member of adhesive substrates 40, then finish each 1 line up and down.
Here; Since the front end of the thickness T of adhesive substrates 40 and tracing wheel and the front end of roller apart from satisfying said inequality (1) between d; Therefore even if when causing scribe head 19 and scribe head 20 because of the input error of thickness of slab data or wrong-way than the too approaching situation of specific position; Roller 23,33 as shown in Figure 5 is contact adhesive substrates 40 earlier, therefore also can prevent tracing wheel 22,32 contact each other.By this, can prevent the damage of the blade tip of tracing wheel 22,32.
Again, as shown in Figure 6, when the line of adhesive substrates 40 is finished, scribe head 19 is risen, and scribe head 20 is descended and make its etc. leave each other.Yet this moment is if postpone the opportunity that its grade is left, exist tracing wheel 22,32 each other as with as shown in the dotted line near situation.When this situation, contact adhesive substrates 40 earlier owing to be arranged on the roller 24,34 at rear, therefore also can prevent tracing wheel 22,32 contact each other.
When the situation of ruling along opposite direction; The function of roller 23,33 and roller 24,34 reverses; When initial setting, can prevent the contact of tracing wheel 22,32 with roller 24,34, when the end of line, can prevent the contact of tracing wheel 22,32 with roller 23,33.
Moreover, pair of rolls is set about tracing wheel in this embodiment, but also can only jut be set and replaces roller 23,24,33,34, and make the position relation of front end of front end and the tracing wheel of this jut satisfy said formula (1).Even if when this situation,, therefore also can prevent the contact of tracing wheel because of jut before the tracing wheel contact contacts with adhesive substrates.
Again, pair of rolls is set about tracing wheel in the embodiment, replaces this, Fig. 7 representes the figure from beneath of the variation of scribe head 19.As this variation, also configurable have the turning axle parallel with the turning axle of tracing wheel 22 and about a pair of 4 roller 53a, 53b and 54a, 54b are respectively arranged.The scribe head 20 of below is also identical.
Again; Also height control mechanism can be set, with can according to the thickness T of adhesive substrates that becomes the line object make roller 23,24 in the position on the z direction of principal axis, the position of roller 33,34 on the z direction of principal axis, and the position of the roller 53a~54b of the variation of Fig. 7 move up and down.So, can prevent that tracing wheel from directly disturbing the adhesive substrates of all thickness.
Moreover, in this embodiment, be that object is illustrated with the applying brittle substrate that is fitted with 2 brittle substrates.Comprising panel display boards such as the Plasmia indicating panel that glass substrate is fitted each other, organic EL (Electro Luminescence, electroluminescent) display panels, and to the semiconductor substrate of glass adhering substrates such as silicon substrate, sapphire substrate etc.
[utilizability on the industry]
The present invention is applicable to the chalker from simultaneously adhesive substrates being rule up and down.

Claims (8)

1. chalker, it comprises: the 1st scribe head, its from the top to the 1st line of the adhesive substrates of hard brittle material; And the 2nd scribe head, its from the below to the 2nd line of said adhesive substrates; And the face by at least one and the said adhesive substrates that make said the 1st, the 2nd scribe head and said adhesive substrates relatively moves abreast, and rules from two surfaces of said adhesive substrates simultaneously, and
Said the 1st scribe head comprises:
The 1st tracing wheel, the 1st of its said adhesive substrates of court is disposed and rotates freely; And
The 1st protuberance, it clips said the 1st tracing wheel and the opposing parallel travel direction when line is configured to a pair of before; And
The front end of said the 1st protuberance with the vertical direction of the face of said adhesive substrates on, the position than the front end of said the 1st tracing wheel more above the 1st distance,
Said the 2nd scribe head comprises:
The 2nd tracing wheel, the 2nd of its said adhesive substrates of court is disposed and rotates freely; And
The 2nd protuberance, it clips said the 2nd tracing wheel and the opposing parallel travel direction when line is configured to a pair of before; And
The front end of said the 2nd protuberance with the vertical direction of the face of said adhesive substrates on, the position than the front end of said the 2nd tracing wheel more below the 2nd distance, and
With said the 1st the distance and the 2nd the distance all be made as do not reach for the line object said adhesive substrates thickness 1/2.
2. chalker according to claim 1 is characterized in that: the 1st protuberance of said the 1st scribe head is the roller with turning axle parallel with the turning axle of said the 1st tracing wheel.
3. chalker according to claim 2 is characterized in that: the 2nd protuberance of said the 2nd scribe head is the roller with turning axle parallel with the turning axle of said the 2nd tracing wheel.
4. chalker according to claim 3 is characterized in that: said the 1st, the 2nd protuberance comprises the member with the low rigidity of more said adhesive substrates and elastically deformable.
5. chalker according to claim 1 is characterized in that: the 2nd protuberance of said the 2nd scribe head is the roller with turning axle parallel with the turning axle of said the 2nd tracing wheel.
6. chalker according to claim 5 is characterized in that: said the 1st, the 2nd protuberance comprises the member with the low rigidity of more said adhesive substrates and elastically deformable.
7. chalker according to claim 1 is characterized in that: said the 1st, the 2nd protuberance comprises the member with the low rigidity of more said adhesive substrates and elastically deformable.
8. chalker according to claim 2 is characterized in that: said the 1st, the 2nd protuberance comprises the member with the low rigidity of more said adhesive substrates and elastically deformable.
CN201210119085.6A 2011-05-24 2012-04-20 Marking device Expired - Fee Related CN102795767B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011115691A JP5348430B2 (en) 2011-05-24 2011-05-24 Scribing equipment
JP2011-115691 2011-05-24

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Publication Number Publication Date
CN102795767A true CN102795767A (en) 2012-11-28
CN102795767B CN102795767B (en) 2015-03-18

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Country Link
JP (1) JP5348430B2 (en)
KR (1) KR101341383B1 (en)
CN (1) CN102795767B (en)
TW (1) TWI497579B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105366932A (en) * 2014-08-07 2016-03-02 三星钻石工业股份有限公司 Scribing tool
CN105523711A (en) * 2014-10-20 2016-04-27 三星钻石工业股份有限公司 Scribing method and scribing apparatus
CN105523710A (en) * 2014-10-20 2016-04-27 三星钻石工业股份有限公司 Scribing method and scribing apparatus
CN105936093A (en) * 2015-03-03 2016-09-14 三星钻石工业股份有限公司 Scribing method
TWI680953B (en) * 2014-12-24 2020-01-01 日商三星鑽石工業股份有限公司 Crossing method

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Publication number Priority date Publication date Assignee Title
JP6439313B2 (en) 2014-08-07 2018-12-19 三星ダイヤモンド工業株式会社 Scribing method and scribing apparatus
JP6402940B2 (en) * 2015-10-09 2018-10-10 三星ダイヤモンド工業株式会社 Scribing equipment
KR20190049441A (en) 2017-10-31 2019-05-09 미쓰보시 다이야몬도 고교 가부시키가이샤 Scribing method and dividing method
JP2021167257A (en) 2020-04-09 2021-10-21 三星ダイヤモンド工業株式会社 Scribing method and scribing device

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CN1486285A (en) * 2001-01-17 2004-03-31 三星宝石工业株式会社 Scribing and breaking apparatus, system therefor, and scribing and breaking method
JP2007229758A (en) * 2006-02-28 2007-09-13 Fukami Seisakusho:Kk Laser beam machining system
TW200906746A (en) * 2007-08-10 2009-02-16 Mitsuboshi Diamond Ind Co Ltd Scribing head, scribing device, and scribing method

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TW200408061A (en) * 2002-07-02 2004-05-16 Mitsuboshi Diamond Ind Co Ltd Substrate slicing system for sealed substrates and the substrate slicing method
JP2007261885A (en) * 2006-03-29 2007-10-11 Lemi Ltd Cleaving method of piled glass
TW201008887A (en) * 2008-06-25 2010-03-01 Mitsuboshi Diamond Ind Co Ltd Scribing apparatus

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
CN1486285A (en) * 2001-01-17 2004-03-31 三星宝石工业株式会社 Scribing and breaking apparatus, system therefor, and scribing and breaking method
JP2007229758A (en) * 2006-02-28 2007-09-13 Fukami Seisakusho:Kk Laser beam machining system
TW200906746A (en) * 2007-08-10 2009-02-16 Mitsuboshi Diamond Ind Co Ltd Scribing head, scribing device, and scribing method

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105366932A (en) * 2014-08-07 2016-03-02 三星钻石工业股份有限公司 Scribing tool
CN105366932B (en) * 2014-08-07 2019-12-17 三星钻石工业股份有限公司 scribing tool
CN105523711A (en) * 2014-10-20 2016-04-27 三星钻石工业股份有限公司 Scribing method and scribing apparatus
CN105523710A (en) * 2014-10-20 2016-04-27 三星钻石工业股份有限公司 Scribing method and scribing apparatus
CN105523711B (en) * 2014-10-20 2020-07-07 三星钻石工业股份有限公司 Scribing method and scribing device
CN105523710B (en) * 2014-10-20 2020-07-10 三星钻石工业股份有限公司 Scribing method and scribing device
TWI680953B (en) * 2014-12-24 2020-01-01 日商三星鑽石工業股份有限公司 Crossing method
CN105936093A (en) * 2015-03-03 2016-09-14 三星钻石工业股份有限公司 Scribing method
CN105936093B (en) * 2015-03-03 2020-06-30 三星钻石工业股份有限公司 Scribing line forming method

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Publication number Publication date
CN102795767B (en) 2015-03-18
KR101341383B1 (en) 2013-12-13
TW201248711A (en) 2012-12-01
TWI497579B (en) 2015-08-21
KR20120131094A (en) 2012-12-04
JP5348430B2 (en) 2013-11-20
JP2012240902A (en) 2012-12-10

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