CN102738015A - Secondary plastic packaging manufacturing process of AAQFN products based on corrosion and sand blasting - Google Patents
Secondary plastic packaging manufacturing process of AAQFN products based on corrosion and sand blasting Download PDFInfo
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- CN102738015A CN102738015A CN2012101822042A CN201210182204A CN102738015A CN 102738015 A CN102738015 A CN 102738015A CN 2012101822042 A CN2012101822042 A CN 2012101822042A CN 201210182204 A CN201210182204 A CN 201210182204A CN 102738015 A CN102738015 A CN 102738015A
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- plastic packaging
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- secondary plastic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
The invention relates to a secondary plastic packaging manufacturing process of AAQFN products based on corrosion and sand blasting, and belongs to the technical field of packaging of integrated circuits. The secondary plastic packaging manufacturing process disclosed by the invention comprises the following steps: firstly forming a groove on a framework by a corrosion method, further filling the groove by using a method of firstly blasting sand and then brushing green paint, and then adopting secondary plastic packaging to form an anti-dragging structure which is more effective between a plastic packaging material for primary plastic packaging and the framework, so that the combination of the framework of the integrated circuit and a plastic packaged body is firmer and can be prevented from being affected by an external environment, and the reliability in packaging of the product is directly improved; simultaneously, the secondary plastic packaging manufacturing process has the advantages of simplicity and easiness in operation, high production efficiency and capability of reducing the cost.
Description
Technical field
The present invention relates to the improved process in a kind of flat packaging part plastic packaging operation, especially a kind of secondary plastic packaging manufacture craft of the AAQFN product based on the burn into sandblast belongs to integrated circuit encapsulation technology field.
Background technology
Integrated circuit is the core of information industry and new and high technology, is the basis of economic development.The integrated circuit encapsulation is the chief component of IC industry, and its development is accompanied by the increase of its function and device count always and strides forward.From the nineties in 20th century, it has got into the development track of many number of pins, thin space, small-sized slimming.Carrier-free Background Grid array packages (being AAQFN) is for adapting to the fast-developing a kind of new packing forms that is born of electronic product, is that complete electronic set is realized microminaturization, lightweight, networked requisite product.
Carrier-free Background Grid array packages element, the bottom does not have soldered ball, pin directly is connected with pcb board during welding, with the electric and mechanical connection of PCB be through on the PCB pad, printing soldering paste, the solder joint that cooperates the SMT reflow soldering process to form is realized.This technology encapsulation can realize many pins, high density, small-sized slimming encapsulation under same size condition, have characteristics such as thermal diffusivity, electrical property and coplanarity are good.
The AAQFN encapsulating products is applicable on a large scale, the encapsulation of very lagre scale integrated circuit (VLSIC).AAQFN packaged device great majority are used for luxury goods markets such as mobile phone, network and communications equipment, digital camera, microcomputer, notebook computer and various types of flat panel display.Grasp its core technology, possess mass production capabilities, with the gap of dwindling domestic IC industry and international most advanced level greatly, this product has wide market application foreground.
But because restrictions such as technical difficulty, the popularization of AAQFN product on market at present acquires a certain degree of difficulty, and especially aspect reliability, directly influences the use and the life-span of product, become the research of technique difficult point of AAQFN packaging part.
Summary of the invention
In order to overcome the problem that above-mentioned prior art exists; The present invention provides a kind of secondary plastic packaging manufacture craft of the AAQFN product based on the burn into sandblast; It is more firm that the integrated circuit framework is combined with plastic-sealed body; Be not affected by the external environment, directly improve the package reliability of product, reduce cost simultaneously.
To achieve these goals; The present invention adopts a kind of secondary plastic packaging manufacture craft of the AAQFN product based on the burn into sandblast; Earlier on framework, form groove with corroding method; Fill with the method for the lacquer of greenwashing after the first sandblast, adopt the method for secondary plastic packaging then, concrete manufacture craft is carried out according to following steps:
The first step, wafer attenuate; The wafer thickness thinning is 50 μ m～200 μ m, roughness Ra 0.10um～0.30um;
Second step, scribing;
Core on the 3rd step, the employing bonding die glue;
The 4th step, pressure welding;
The 5th step, the traditional plastic packaging material of employing carry out plastic packaging one time;
Solidify the 6th step, back;
The 7th step, framework back etched groove; Do the part at the framework back side with liquor ferri trichloridi and window and etch partially, form groove, the degree of depth is controlled in frame thickness half the;
The 8th step, brush mill, the lacquer of greenwashing, secondary plastic packaging;
Glue, tinization, printing, product separation, check, packing, warehouse-in are solidified, ground in the 9th step, back.
In the described method second be the above wafer employing common Q FN scribing process of 150 μ m in the step; Thickness adopts double-pole scribing machine and technology thereof at the following wafer of 150 μ m; The bonding die glue that in the described method the 3rd adopts when going up core in the step can be used glue film (DAF) replacement; Use the plastic packaging material of 30～32um granularity to fill in the described method the 8th step secondary plastic packaging; In the described method the 4th step, the 6th step, the 9th step, all identical with conventional AAQFN technology.
Beneficial effect of the present invention: the present invention is forming groove with corroding method earlier on the framework earlier on framework, fills with the method for the lacquer of greenwashing after the first sandblast again, adopts the method for secondary plastic packaging then; Between the plastic packaging material of a plastic packaging and framework, form more effectively anti-dilatory structure, it is more firm that the integrated circuit framework is combined with plastic-sealed body, is not affected by the external environment; Directly improve the package reliability of product, simultaneously, simple; Production efficiency is high, reduces cost.
Description of drawings
Fig. 1 is lead frame profile among the present invention;
Fig. 2 is for going up product profile behind the core among the present invention;
Fig. 3 for pressure welding among the present invention after product profile;
Fig. 4 for plastic packaging among the present invention after product profile;
Fig. 5 is product profile behind the middle frame back etched of the present invention.
Among the figure: 1-lead frame, 2-bonding die glue, 3-chip, 4-bonding line, 5-plastic-sealed body, 6-etched recesses.
Embodiment
Below in conjunction with accompanying drawing 1-5 and embodiment the present invention is further specified, understand to make things convenient for the technical staff.
Earlier on framework, form groove with corroding method, fill with the method for the lacquer of greenwashing after the first sandblast, adopt the method for secondary plastic packaging then, concrete manufacture craft is carried out according to following steps:
The first step, wafer attenuate; The wafer thickness thinning is 50 μ m, roughness Ra 0.10um;
Second step, employing double-pole scribing machine and technology thereof are carried out scribing;
Core on the 3rd step, the employing bonding die glue;
The 4th step, the employing method identical with conventional AAQFN technology are carried out pressure welding;
The 5th step, the traditional plastic packaging material of employing carry out plastic packaging one time;
The 6th step, the employing method identical with conventional AAQFN technology are carried out the back and are solidified;
The 7th step, framework back etched groove; Do the part at the framework back side with liquor ferri trichloridi and window and etch partially, form groove, the degree of depth is controlled in frame thickness half the;
The 8th step, brush mill, the lacquer of greenwashing, secondary plastic packaging; Use the plastic packaging material of 30um granularity to fill;
The 9th step, the employing method identical with conventional AAQFN technology carry out that the back is solidified, mill glue, tinization, printing, product separate, check, pack, put in storage.
Embodiment 2
Earlier on framework, form groove with corroding method, fill with the method for the lacquer of greenwashing after the first sandblast, adopt the method for secondary plastic packaging then, concrete manufacture craft is carried out according to following steps:
The first step, wafer thickness thinning are 130 μ m, and roughness Ra is 0.20um;
Second step, employing double-pole scribing machine and technology thereof are carried out scribing;
The 3rd step, employing glue film (DAF) are gone up core;
The 4th step, the employing method identical with conventional AAQFN technology are carried out pressure welding;
The 5th step, the traditional plastic packaging material of employing carry out plastic packaging one time;
The 6th step, the employing method identical with conventional AAQFN technology are carried out the back and are solidified;
The 7th step, framework back etched groove; Do the part at the framework back side with liquor ferri trichloridi and window and etch partially, form groove, the degree of depth is controlled in frame thickness half the;
The 8th step, brush mill, the lacquer of greenwashing, secondary plastic packaging; Use the plastic packaging material of 31um granularity to fill;
The 9th step, the employing method identical with conventional AAQFN technology carry out that the back is solidified, mill glue, tinization, printing, product separate, check, pack, put in storage.
Earlier on framework, form groove with corroding method, fill with the method for the lacquer of greenwashing after the first sandblast, adopt the method for secondary plastic packaging then, concrete manufacture craft is carried out according to following steps:
The first step, wafer thickness thinning are 200 μ m, and roughness Ra is 0.30um;
Second step, employing common Q FN scribing process carry out scribing;
The 3rd step, employing glue film (DAF) are gone up core;
The 4th step, the employing method identical with conventional AAQFN technology are carried out pressure welding;
The 5th step, the traditional plastic packaging material of employing carry out plastic packaging one time;
The 6th step, the employing method identical with conventional AAQFN technology are carried out the back and are solidified;
The 7th step, framework back etched groove; Do the part at the framework back side with liquor ferri trichloridi and window and etch partially, form groove, the degree of depth is controlled in frame thickness half the;
The 8th step, brush mill, the lacquer of greenwashing, secondary plastic packaging; Use the plastic packaging material of 32um granularity to fill;
The 9th step, the employing method identical with conventional AAQFN technology carry out that the back is solidified, mill glue, tinization, printing, product separate, check, pack, put in storage.
The tradition ram frame is after plastic packaging operation plastic packaging material is filled, because framework itself is smooth smooth, the conjugation between plastic packaging material and the framework is low, the situation of layering very easily occurs, and the packaging part reliability can not get guaranteeing.The plastic package process different from the past that the present invention adopts; Earlier on framework, form groove with corroding method; Fill with the method for the lacquer of greenwashing after the first sandblast, the method that adopts the secondary plastic packaging then forms the effectively anti-structure of drawing between framework and plastic packaging material, secondary plastic packaging material, reduce the occurrence probability of packaging part layering situation greatly again; Greatly improve product reliability, be superior to the plastic packaging effect of traditional AQQFN product.
Claims (5)
1. secondary plastic packaging manufacture craft based on the AAQFN product of burn into sandblast; It is characterized in that: on framework, form groove earlier with corroding method; Fill with the method for the lacquer of greenwashing after the first sandblast, adopt the method for secondary plastic packaging then, concrete manufacture craft is carried out according to following steps:
The first step, wafer attenuate; The wafer thickness thinning is 50 μ m～200 μ m, roughness Ra 0.10um～0.30um;
Second step, scribing;
Core on the 3rd step, the employing bonding die glue;
The 4th step, pressure welding;
The 5th step, the traditional plastic packaging material of employing carry out plastic packaging one time;
Solidify the 6th step, back;
The 7th step, framework back etched groove; Do the part at the framework back side with liquor ferri trichloridi and window and etch partially, form groove, the degree of depth is controlled in frame thickness half the;
The 8th step, brush mill, the lacquer of greenwashing, secondary plastic packaging;
Glue, tinization, printing, product separation, check, packing, warehouse-in are solidified, ground in the 9th step, back.
2. the secondary plastic packaging manufacture craft of a kind of AAQFN product based on the burn into sandblast according to claim 1 is characterized in that: second in the described method in the step the above wafer of 150 μ m adopt common Q FN scribing process; Thickness adopts double-pole scribing machine and technology thereof at the following wafer of 150 μ m.
3. the secondary plastic packaging manufacture craft of a kind of AAQFN product based on the burn into sandblast according to claim 1 is characterized in that: the bonding die glue that the 3rd in the described method adopts when going up core in the step is replaced with glue film (DAF).
4. the secondary plastic packaging manufacture craft of a kind of AAQFN product based on the burn into sandblast according to claim 1 is characterized in that: use the plastic packaging material of 30～32um granularity to fill in the step of the 8th in the described method secondary plastic packaging.
5. the secondary plastic packaging manufacture craft of a kind of AAQFN product based on the burn into sandblast according to claim 1 is characterized in that: the step of the 4th in the described method, the 6th step, the 9th step are all identical with conventional AAQFN technology.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101822042A CN102738015A (en) | 2012-06-05 | 2012-06-05 | Secondary plastic packaging manufacturing process of AAQFN products based on corrosion and sand blasting |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012101822042A CN102738015A (en) | 2012-06-05 | 2012-06-05 | Secondary plastic packaging manufacturing process of AAQFN products based on corrosion and sand blasting |
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| CN102738015A true CN102738015A (en) | 2012-10-17 |
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| CN2012101822042A Pending CN102738015A (en) | 2012-06-05 | 2012-06-05 | Secondary plastic packaging manufacturing process of AAQFN products based on corrosion and sand blasting |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103021884A (en) * | 2012-12-10 | 2013-04-03 | 华天科技（西安）有限公司 | Flat package part manufacturing process based on thin frame |
| CN103021885A (en) * | 2012-12-10 | 2013-04-03 | 华天科技（西安）有限公司 | Flat package part manufacturing process based on sand blasting |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6424047B1 (en) * | 1999-02-23 | 2002-07-23 | Institute Of Microelectronics | Plastic ball grid array package for passing JEDEC Level 1 Moisture Sensitivity Test |
| US20100258934A1 (en) * | 2009-04-10 | 2010-10-14 | Advanced Semiconductor Engineering, Inc. | Advanced quad flat non-leaded package structure and manufacturing method thereof |
| CN101958300A (en) * | 2010-09-04 | 2011-01-26 | 江苏长电科技股份有限公司 | Double-sided graphic chip inversion module packaging structure and packaging method thereof |
| CN102446882A (en) * | 2011-12-30 | 2012-05-09 | 北京工业大学 | Semiconductor PiP (package in package) system structure and manufacturing method thereof |
-
2012
- 2012-06-05 CN CN2012101822042A patent/CN102738015A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6424047B1 (en) * | 1999-02-23 | 2002-07-23 | Institute Of Microelectronics | Plastic ball grid array package for passing JEDEC Level 1 Moisture Sensitivity Test |
| US20100258934A1 (en) * | 2009-04-10 | 2010-10-14 | Advanced Semiconductor Engineering, Inc. | Advanced quad flat non-leaded package structure and manufacturing method thereof |
| CN101958300A (en) * | 2010-09-04 | 2011-01-26 | 江苏长电科技股份有限公司 | Double-sided graphic chip inversion module packaging structure and packaging method thereof |
| CN102446882A (en) * | 2011-12-30 | 2012-05-09 | 北京工业大学 | Semiconductor PiP (package in package) system structure and manufacturing method thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103021884A (en) * | 2012-12-10 | 2013-04-03 | 华天科技（西安）有限公司 | Flat package part manufacturing process based on thin frame |
| CN103021885A (en) * | 2012-12-10 | 2013-04-03 | 华天科技（西安）有限公司 | Flat package part manufacturing process based on sand blasting |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C53 | Correction of patent of invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Zhu Wenhui Inventor after: Chen Shiguang Inventor after: Wang Hu Inventor after: Liu Weidong Inventor after: Luo Yuguang Inventor before: Luo Yuguang Inventor before: Guo Xiaowei Inventor before: Cui Meng Inventor before: Pu Hongming Inventor before: Li Wanxia |
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| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: LUO YUGUANG GUO XIAOWEI CUI MENG PU HONGMING LI WANXIA TO: ZHU WENHUI CHEN SHIGUANG WANG HU LIU WEIDONG LUO YUGUANG |
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| C10 | Entry into substantive examination | ||
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| RJ01 | Rejection of invention patent application after publication | ||
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Application publication date: 20121017 |