CN102700237A - Full-automatic vision silicon wafer printing device with double platforms - Google Patents
Full-automatic vision silicon wafer printing device with double platforms Download PDFInfo
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- CN102700237A CN102700237A CN2012101416142A CN201210141614A CN102700237A CN 102700237 A CN102700237 A CN 102700237A CN 2012101416142 A CN2012101416142 A CN 2012101416142A CN 201210141614 A CN201210141614 A CN 201210141614A CN 102700237 A CN102700237 A CN 102700237A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 445
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 445
- 239000010703 silicon Substances 0.000 title claims abstract description 445
- 238000007639 printing Methods 0.000 title claims abstract description 110
- 230000007246 mechanism Effects 0.000 claims abstract description 24
- 238000001514 detection method Methods 0.000 claims abstract description 22
- 238000007790 scraping Methods 0.000 claims abstract description 4
- 238000012546 transfer Methods 0.000 claims description 88
- 230000007306 turnover Effects 0.000 claims description 23
- 230000035807 sensation Effects 0.000 claims description 19
- 230000003139 buffering effect Effects 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 230000006870 function Effects 0.000 claims description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 38
- 230000008569 process Effects 0.000 abstract description 22
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 235000012431 wafers Nutrition 0.000 abstract 9
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- 238000005516 engineering process Methods 0.000 description 6
- 239000002002 slurry Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
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- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F15/00—Screen printers
- B41F15/08—Machines
- B41F15/0881—Machines for printing on polyhedral articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F15/00—Screen printers
- B41F15/14—Details
- B41F15/16—Printing tables
- B41F15/18—Supports for workpieces
- B41F15/26—Supports for workpieces for articles with flat surfaces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- Engineering & Computer Science (AREA)
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- Electromagnetism (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
The invention discloses a full-automatic vision silicon wafer printing device with double platforms. The full-automatic vision silicon wafer printing device comprises two silicon wafer bearing platforms, two inlet-outlet plate detection cameras, a silk screen lifting device, a silk screen gesture adjusting mechanism, two silk screen datum point cameras, an ink scraping device, two sets of silicon wafer loading devices, two sets of silicon wafer unloading devices and two sets of buffer transportation lines. The silicon wafer bearing platforms are installed on a transversely-moving base and can enter a printing position to achieve ink scraping operation in stagger, and the silicon wafer bearing platforms which are not in a printing position can synchronously load and unload silicon wafers. The printing device adopts a double-silicon-wafer bearing platform structure, can achieve parallel operation of processes of wafer changing and printing, improves production efficiency, and is compact in structure and small in equipment occupation area.
Description
Technical field
The present invention relates to a kind of silicon chip printing equipment, be specifically related to realize the full-automatic vision silicon chip printing equipment of printing in turn of two platforms.
Background technology
Along with day being becoming tight of global energy, solar energy receives the extensive attention of countries in the world with exclusive advantage such as pollution-free, that the market space is big, and numerous in the world major companies drop into solar cell research and development and production industry.Obtain electric power from solar energy, need to carry out light-to-current inversion and realize that silicon solar cell is a kind of semi-conductor electronic device that absorbs solar radiation effectively and make it to be converted into electric energy, is widely used in various illuminations and the electricity generation system through solar cell.
The challenge that solar cell manufacturer faces is now beginning to produce a polarization into two big emphasis: the power that improves solar cell is to increase the generated energy of unit are; Next is to need not to increase corresponding investment and the hope or the demand that increase productivity with existing processes.
The solar cell printing is the important procedure of battery slice assembly line, and the quality of battery sheet is played an important role, and the solar cell printing technology is an organic whole, is the combination of various technology.Solar cell divides crystal silicon battery and hull cell; The current thin film battery technology has relative advantage on cost; But mention in the same breath with crystal silicon battery all being difficult to aspect technology maturity, life-span and the conversion efficiency; Crystal silicon battery has accounted for absolute monopoly position in solar cell market; The cost of unit generated energy still is higher than traditional generation mode, and therefore reducing cost is the key factor of crystal silicon solar industry sustainable development, and crystal silicon battery sheet production efficiency constitutes a key factor of battery sheet cost.
The single carrying platform structure of the general employing of existing printing equipment; As shown in Figure 1, this printing equipment has only a carrying platform, and silicon chip imports silicon chip loading attachment 101 into from the upper reaches; Silicon chip loading attachment 101 has silicon chip attitude adjustment function, and the silicon chip attitude is done preliminary correction.Then, silicon chip continues to front transfer along silicon chip loading attachment 101.Silicon chip is delivered to the central authorities of silicon chip carrying platform 103, and the vacuum on the silicon chip carrying platform 103 inhales to live silicon chip surely.It is removable with ejecting plate attitude camera 105 to advance plate attitude camera 107, gets into from silicon chip carrying platform 103 both sides, claps the image of two edge parts at silicon chip diagonal angle, and the laggard plate attitude camera 107 of taking pictures shifts out with ejecting plate attitude camera 105.Silk screen datum mark camera 102 is taken pictures, and obtains the image of two datum marks in screen process press 106 silk screens bottom, and the adjustment silk screen makes the pattern on the silk screen aim at silicon chip.Screen process press 106 lifting platforms descend, and begin to scrape ink print.After finishing printing; Screen process press 106 lifting platforms rise; Vacuum on the silicon chip carrying platform 103 is inhaled and is closed; Conveyer belt on silicon chip carrying platform 103 and the silicon chip unloading device 104 cooperates, and moves on to silicon chip unloading device 104 to silicon chip from silicon chip carrying platform 103, is delivered to downstream along silicon chip unloading device 104 again.Be not difficult to find out that when printing equipment has only a silicon chip carrying platform, load, take pictures, adjust, go up and down, print, unload series connection linkings such as operation, it is more to be completed for printing the time ratio that silicon chip consumed, and has limited the lifting of production efficiency.
The printing machine that has also adopts the turntable type structure, through station rotation, realizes changing sheet and printing parallel work-flow, but one be that the turntable cost is higher, and the 2nd, turntable is bigger, is unfavorable for reducing the machine floor space.
Summary of the invention
The objective of the invention is to overcome the shortcoming of prior art, a kind of compact conformation, production efficiency height are provided, floor space is few, can realize changing the full-automatic vision silicon chip printing equipment with two platforms of sheet and printing process parallel work-flow.For realizing the object of the invention, the technical scheme that the present invention adopts is following.
A kind of full-automatic vision silicon chip printing equipment with two platforms comprises two silicon chip carrying platforms, two turnover plate detection camera; A silk screen lowering or hoisting gear, a silk screen attitude-adjusting system, two silk screen datum mark cameras; Scrape device for ink for one; Two cover silicon chip loading attachments, two cover silicon chip unloading devices, two cover buffering supply lines; Two silicon chip carrying platforms are installed on the pedestal that laterally moves, and alternately get into printing station and realize the wiping operation; Turnover plate detection camera is installed in changing above the sheet station of silicon chip carrying platform, is used to obtain the image of silicon chip; The silk screen lowering or hoisting gear is installed on four support columns of printing machine, is used to make silk screen to press close to silicon chip and leaves silicon chip, so that realize silicon chip printing, the demoulding and clean net bottom; The silk screen attitude-adjusting system is installed on the silk screen lowering or hoisting gear of printing machine, is used to make silk screen to realize the parallel mobile and positioning of rotating of XY; Two silk screen datum mark cameras are installed in the below of silk screen attitude-adjusting system, and are symmetrically distributed in the both sides of the silicon chip carrying platform of printing station, are used for obtaining the image of two datum marks in silk screen bottom; Scrape device for ink and be installed in the top of silk screen attitude-adjusting system, moving up and down and seesawing and be impressed into coating on the silicon chip through scraper; Two cover silicon chip loading attachments with do not align at the silicon chip carrying platform of printing station, and be symmetrically distributed in the both sides of printing machine, can adjust the angle and the lateral shift of silicon chip; Silicon chip unloading device and silicon chip loading attachment are symmetrically distributed in silicon chip carrying platform both sides; Two cover buffering supply lines all are vertical layout with the silicon chip loading attachment with the silicon chip unloading device, are used for receiving from the upper reaches silicon chip of needs printing, or are sent to downstream to the silicon chip that prints.
Further; In the above-mentioned full-automatic vision silicon chip printing equipment with two platforms; Conveyer belt is equipped with in each silicon chip carrying platform top; There are a plurality of equally distributed apertures the platform middle part, and a plurality of equally distributed apertures are also arranged above the conveyer belt, and these apertures are inhaled function through vacuum and are adsorbed on silicon chip on the platform; Conveyer belt covers the plane that is used to support silicon chip on the platform, and the silicon chip bottom obtains evenly to support in the time of can making printing like this, thereby can reduce the breakage of silicon chip.The platform below has can realize laterally mobile slide rail.This structure can realize changing sheet and the printing process process is parallel.
Further, in the above-mentioned full-automatic vision silicon chip printing equipment with two platforms, described silk screen attitude-adjusting system is a planar three freedom serial mechanism, can realize that XY is parallel to move and positioning of rotating.
Further; In the above-mentioned full-automatic vision silicon chip printing equipment with two platforms; The described device for ink of scraping comprises scraper, scraper seesaw mechanism, scraper up-down mechanism and go back to black mechanism; The scraper mechanism that seesaws seesaws scraper, and the scraper up-down mechanism moves up and down scraper, and moving up and down and seesawing of scraper realizes being impressed into coating on the silicon chip.
Further; In the above-mentioned full-automatic vision silicon chip printing equipment with two platforms; Two conveyer belts that are used to adjust silicon chip angle are equipped with in every cover silicon chip loading attachment top; And three light sensations that are used to respond to the silicon chip position are housed near this conveyer belt, and silicon chip loading attachment below has and is used for the bottom platform that the silicon chip lateral displacement is adjusted in translational motion.
Further; In the above-mentioned full-automatic vision silicon chip printing equipment with two platforms; Cover buffering supply line is made up of three straight-through conveyer belts and two corner transfer conveyer belts; The cooperation of straight-through conveyer belt and corner transfer conveyer belt is assigned to two silicon chip loading attachments to silicon chip or the silicon chip unloading device focuses on same ejecting plate supply line overlapping independently through the silicon chip that prints from two.
In the above-mentioned full-automatic vision silicon chip printing equipment with two platforms,, realize the high precision alignment of silicon chip and silk screen according to turnover plate detection camera, silk screen datum mark camera gained silicon chip, silk screen attitude-adjusting system attitude information.
The present invention is to the printing equipment innovative design on the basis of existing single plummer technology; Adopt two carrying platform structures; Make a carrying platform when changing silicon chip; The another one carrying platform is carrying out the silicon chip printing, has guaranteed that printing equipment can realize changing the operation of sheet and wiping simultaneously to two silicon chips, walks abreast with the printing process process even change sheet.
The present invention compared with prior art has following advantage and beneficial effect:
(1) turnover plate of the present invention all adopts band transmission, and is simple in structure, and motion is steadily made and install simple, easy to maintenance;
(2) the present invention adopts two carrying platform structures, makes to change sheet and walk abreast with the printing process process, thereby has reduced the production time, significantly improves the production efficiency of production line unit interval;
(3) compact conformation of the present invention, the hold facility area is little.
Description of drawings
Fig. 1 is the existing sketch map that adopts the printing equipment of single carrying platform structure.
Fig. 2 is the full-automatic vision silicon chip printing equipment structural representation with two platforms of the present invention.
Fig. 3 is the full-automatic vision silicon chip printing equipment left side sketch map with two platforms of the present invention.
Fig. 4 is the full-automatic vision silicon chip printing equipment right side sketch map with two platforms of the present invention.
Fig. 5 is the sketch map that advances panel assembly of the present invention.
Fig. 6 is the sketch map of board discharging device of the present invention.
Fig. 7 is the sketch map of silicon chip carrying platform of the present invention.
Fig. 8 is the front view of silicon chip carrying platform of the present invention.
Fig. 9 is the sketch map of silk screen attitude-adjusting system of the present invention.
Figure 10 is a wiping schematic representation of apparatus of the present invention.
Figure 11 is the sketch map of silicon chip loading attachment of the present invention.
Figure 12 is the installation diagram of straight-through conveyer belt of the present invention and corner transfer conveyer belt.
Figure 13 is a schematic flow sheet of the present invention.
Figure 14 is a control of the present invention system.
Shown in the figure: the 1-first silicon chip carrying platform; The 2-second silicon chip carrying platform; 3-silk screen attitude-adjusting system; 4-silk screen lowering or hoisting gear; 5-scrapes device for ink; The 6-first silicon chip loading attachment; The 7-second silicon chip loading attachment; The 8-first silicon chip unloading device; The 9-second silicon chip unloading device; The 10-first silk screen datum mark camera; The 11-second silk screen datum mark camera; The 12-first turnover plate detection camera; The 13-second turnover plate detection camera; The 14-first straight-through conveyer belt; The 15-first corner transfer conveyer belt; The 16-second straight-through conveyer belt; The 17-second corner transfer conveyer belt; 18-the 3rd straight-through conveyer belt; 19-the 4th straight-through conveyer belt; 20-method of three turning angles transfer conveyer belt; 21-the 5th straight-through conveyer belt; 22-the 4th corner transfer conveyer belt; 23-the 6th straight-through conveyer belt; The 24-pedestal.The 24-pedestal; The 25-silicon chip; The 26-conveyer belt; The 27-motor; The 28-slide rail.29-silk screen fixed mount; The 30-directive wheel; The 31-guide pad; The 32-driver plate; 33-silk screen locking cylinder; The 34-silk screen.The 35-scraper; The 36-scraper mechanism that seesaws; 37-goes back to black mechanism; 38-scraper up-down mechanism.The 39-silicon chip; 40-first light sensation; 41-second light sensation; 42-the 3rd light sensation; 43-first motor; 44-second motor; The 45-slide rail.46-leads directly to conveyer belt; 47-corner transfer conveyer belt; The 48-lowering or hoisting gear.
The specific embodiment
In order to understand the present invention better, below in conjunction with accompanying drawing and embodiment the present invention is done to describe further, but embodiment of the present invention is not limited thereto.
Like Fig. 2～shown in Figure 4, the full-automatic vision silicon chip printing equipment with two platforms comprises the first silicon chip carrying platform, 1, the second silicon chip carrying platform 2, silk screen attitude-adjusting system 3; Scrape device for ink 5, silk screen lowering or hoisting gear 4, the first silicon chip loading attachments 6, the second silicon chip loading attachments 7; The first silicon chip unloading device, 8, the second silicon chip unloading devices, 9, the first silk screen datum mark cameras, 10, the second silk screen datum mark cameras 11; The first turnover plate detection camera, 12, the second turnover plate detection camera, 13, the first straight-through conveyer belt 14, the first corner transfer conveyer belts 15; Second straight-through conveyer belt 16, the second corner transfer conveyer belts 17, the three straight-through conveyer belt 18, the four straight-through conveyer belts 19; Method of three turning angles transfer conveyer belt 20, the five straight-through conveyer belt 21, the four corner transfer conveyer belts 22, the six straight-through conveyer belts 23.Wherein, first straight-through conveyer belt 14, second straight-through conveyer belt the 16, the 3rd straight-through conveyer belt 18 and the first corner transfer conveyer belt 15, the second corner transfer conveyer belt 17 are formed the first buffering supply line; The 4th straight-through conveyer belt the 19, the 5th straight-through conveyer belt the 21, the 6th straight-through conveyer belt 23 and method of three turning angles transfer conveyer belt 20, the 4th corner transfer conveyer belt 22 are formed the second buffering supply line.
The formation of said each device and the effect as follows:
(1) the first silicon chip carrying platform 1 and the second silicon chip carrying platform 2
The effect of silicon chip carrying platform is when application to printed on silicon chip, to silicon chip smooth support to be provided.This printing equipment adopts two silicon chip carrying platform structures: the first silicon chip carrying platform 1 and the second silicon chip carrying platform 2, and can realize changing sheet and printing process process and walk abreast.
Like Fig. 7, shown in Figure 8, the silicon chip carrying platform is a smooth platform, and the platform top is a wide and thin transported flat band 26, and the driving wheel of transported flat band 26 and driven pulley are distributed in the platform both sides, is driven by motor 27.There are many equally distributed apertures the platform middle part, and many equally distributed apertures are also arranged above the conveyer belt 26, and these apertures are inhaled function through vacuum and are adsorbed on silicon chip on the platform.Conveyer belt 26 covers that plane that platform supports silicon chip 25, and silicon chip 25 bottoms obtain evenly to support in the time of can making printing like this, thereby can reduce the breakage of silicon chip 25.There is slide rail 28 the platform below, but implementation platform is laterally mobile.The first silicon chip carrying platform 1 and the second silicon chip carrying platform 12 are identical, are symmetrically distributed on the pedestal 24.
When the first silicon chip carrying platform 1 or the second silicon chip carrying platform 2 are being scraped below the device for ink 5, be called platform at printing station (the second silicon chip carrying platform 2 is at printing station in like Fig. 2); And the first silicon chip carrying platform 1 (or second silicon chip carrying platform 2) is aimed at the position that can implement to change sheet with the conveyer belt of the first silicon chip loading attachment 6 (or second silicon chip loading attachment 7), is called to change sheet station (changing the sheet station like the first silicon chip carrying platform 1 among Fig. 2).The first silicon chip carrying platform 1 and the second silicon chip carrying platform 2 are installed on the same pedestal 24 that can laterally move, and therefore when the first silicon chip carrying platform 1 got into printing station, the second silicon chip carrying platform 2 was moved out to and changes the sheet station; Equally, when the second silicon chip carrying platform 2 got into printing station, the first silicon chip carrying platform 1 was moved out to and changes the sheet station.
When loading new silicon chip; Cooperate through the conveyer belt on first silicon chip loading attachment 6 (or second silicon chip loading attachment 7) and the first silicon chip carrying platform 1 (or second silicon chip carrying platform 2); Be sent to the silicon chip of not printing on the first silicon chip carrying platform 1 (or second silicon chip carrying platform 2); When silicon chip is delivered to platform when central authorities, opens vacuum on the platform and inhale and hold silicon chip, in case silicon chip moves when platform motion or wiping; When unloading the silicon chip that printed; Cooperate through the conveyer belt on first silicon chip carrying platform 1 (or second silicon chip carrying platform 2) and the first silicon chip unloading device 8 (or second silicon chip unloading device 9), be sent to the silicon chip that prints on the first silicon chip unloading device 8 (or second silicon chip unloading device 9).
(2) the silk screen attitude-adjusting system 3
The effect of silk screen attitude-adjusting system 3 is according to the attitude of the attitude adjustment silk screen of silicon chip, makes the pattern on the silk screen align with silicon chip, and coating can correctly be transferred on the silk screen.
As shown in Figure 9, silk screen attitude-adjusting system 3 is made up of silk screen fixed mount 29, directive wheel 30, guide pad 31 and driver plate 32 etc.Guide pad 31 is fixed on the silk screen fixed mount 29, and driver plate 32 passes through Bolt Connection with silk screen fixed mount 29.Directive wheel 30 location are constant, but rotatable.Guide pad 31 and cooperating shown in the partial view of Fig. 9 upper right side between the directive wheel 30.Driving is delivered to silk screen fixed mount 29 through driver plate 32, and silk screen fixed mount 29 can and be rotatablely moved in the XY translation.
Silk screen attitude-adjusting system 3 shown in Figure 9 only is a kind of representative organization wherein, also has other forms of silk screen attitude-adjusting system, does not do too much explanation here.
Because silk screen 34 is installed on the silk screen attitude-adjusting system 3, thereby silk screen 34 can be realized the parallel mobile and positioning of rotating of XY.After silk screen 34 adjustment, be locked at silk screen 34 on the silk screen attitude-adjusting system 3 through silk screen locking cylinder 33.
(3) scrape device for ink 5
Scrape device for ink 5 moving up and down and seesawing and be impressed into coating on the silicon chip through scraper.Shown in figure 10, scrape device for ink 5 and comprise seesaw mechanism 36 and go back to black mechanism 37 etc. of scraper 35, scraper up-down mechanism 38, scraper.Wherein, scraper seesaws mechanism 36 by motor-driven, and scraper up-down mechanism 38 is promoted by cylinder.
(4) the silk screen lowering or hoisting gear 4
As shown in Figure 2; Silk screen attitude-adjusting system 3 with scrape device for ink 5 and be installed on the silk screen lowering or hoisting gear 4; Silk screen lowering or hoisting gear 4 is by motor-driven; When the first silicon chip carrying platform 1 (or second silicon chip carrying platform 2) during, silk screen 34 is pressed close to and left the silicon chip on the first silicon chip carrying platform 1 (or second silicon chip carrying platform 2) through silk screen lowering or hoisting gear 4, so that realize the silicon chip printing or clean net bottom at printing station.
(5) the first silicon chip loading attachments 6 and the second silicon chip loading attachment 7
The first silicon chip loading attachment 6 (or second silicon chip loading attachment 7) aligns when changing the sheet station with the first silicon chip carrying platform 1 (or second silicon chip carrying platform 2), and the conveyer belt cooperation on first silicon chip loading attachment 6 (or second silicon chip loading attachment 7) and the first silicon chip carrying platform 1 (or second silicon chip carrying platform 2) is transported to silicon chip on the first silicon chip carrying platform 1 (or second silicon chip carrying platform 2) from the first silicon chip loading attachment 6 (or second silicon chip loading attachment 7).
The silicon chip loading attachment also has silicon chip attitude adjustment function.When detecting the silicon chip pose deviation when serious,, can adjust to the silicon chip attitude in certain scope through the self-movement of two conveyer belts on the silicon chip loading attachment and laterally moving of bottom platform.This attitude adjustment is that attitude can not exceed silk screen attitude-adjusting system working range when making silicon chip get into the silicon chip carrying platform.Shown in figure 11, if second light sensation 41 and the 3rd light sensation 42 can not be responded to silicon chip 39 simultaneously, need carry out angle adjustment to silicon chip 39 so.If second light sensation 41 is induction silicon chip 39 earlier, then makes 44 stalls of second motor, make 43 counter-rotatings (motor just changes, and silicon chip advances) of first motor simultaneously a bit, two motors just change with same rotational speed then; If the 3rd light sensation 42 is induction silicon chip 39 earlier, then makes 43 stalls of first motor, make 44 counter-rotatings (motor just changes, and silicon chip advances) of second motor simultaneously a bit, two motors just change with same rotational speed then.See whether second light sensation 41 and the 3rd light sensation 42 can respond to silicon chip 39 simultaneously, if can not, then do corresponding adjustment, circulate with this, can respond to silicon chip 39 simultaneously until second light sensation 41 and the 3rd light sensation 42.If first light sensation 40 can not be responded to silicon chip 39, then the silicon chip loading attachment along slide rail 45 to first light sensation 40 near, sense silicon chip 39 when first light sensation 40 1, the silicon chip loading attachment just stops to move.Based on above principle, the silicon chip loading attachment can not only be finely tuned the angle of silicon chip, can also adjust the lateral shift of silicon chip.For adjustment process is oversimplified, earlier silicon chip is carried out angle adjustment, carry out the lateral shift adjustment again.
(6) the first silicon chip unloading devices 8 and the second silicon chip unloading device 9
As shown in Figure 2; The first silicon chip unloading device 8 (or second silicon chip unloading device 9) is symmetrically distributed in the first silicon chip carrying platform 1 and the second silicon chip carrying platform, 2 both sides with the first silicon chip loading attachment 6 (or second silicon chip loading attachment 7), and the conveyer belt on first silicon chip unloading device 8 (or second silicon chip unloading device 9) and the first silicon chip carrying platform 1 (or second silicon chip carrying platform 2) cooperates to be transferred to silicon chip on the first silicon chip unloading device 8 (or second silicon chip unloading device 9) from the first silicon chip carrying platform 1 (or second silicon chip carrying platform 2).
(7) the first silk screen datum mark cameras 10 and the second silk screen datum mark camera 11
The first silk screen datum mark camera 10 and the second silk screen datum mark camera 11 are installed in the below of silk screen attitude-adjusting system 3; As shown in Figure 9; Two Mark points are arranged on the silk screen 34; The first silk screen datum mark camera 10 and the second silk screen datum mark camera 11 are exactly to be used for obtaining these two images that Mark is ordered of silk screen 34 bottoms, thereby calculate the attitude of silk screen 34.
(8) the first turnover plate detection camera 12 and the second turnover plate detection camera 13
As shown in Figure 2; The first turnover plate detection camera 12 (or second turnover plate detection camera 13) be installed in the first silicon chip carrying platform 1 (or second silicon chip carrying platform 2) when changing the sheet station above; Be used to obtain the image of silicon chip; According to the silicon chip image, can analyze the attitude of silicon chip and whether damaged when advancing plate, whether the inspection silicon chip is damaged during ejecting plate.
(9) the first buffering supply lines and the second buffering supply line
The first buffering supply line is vertical layout with the first silicon chip unloading device 8 with the second silicon chip unloading device 9, is led directly to by the first straight-through conveyer belt 14, second that conveyer belt the 16, the 3rd leads directly to conveyer belt 18 and the first corner transfer conveyer belt 15, the second corner transfer conveyer belt 17 constitute.Wherein, first straight-through conveyer belt 14, second straight-through conveyer belt the 16, the 3rd straight-through conveyer belt 18 conllinear; The first corner transfer conveyer belt 15 and the first straight-through conveyer belt 14 are vertical, and with the first silicon chip unloading device, 8 conllinear; The second corner transfer conveyer belt 17 and the 3rd straight-through conveyer belt 18 are vertical, and with the second silicon chip unloading device, 9 conllinear.
The second buffering supply line is vertical layout with the first silicon chip loading attachment 6 with the second silicon chip loading attachment 7, is made up of the 4th straight-through conveyer belt the 19, the 5th straight-through conveyer belt the 21, the 6th straight-through conveyer belt 23 and method of three turning angles transfer conveyer belt 20, the 4th corner transfer conveyer belt 22.Wherein, the 4th straight-through conveyer belt the 19, the 5th straight-through conveyer belt the 21, the 6th straight-through conveyer belt 23 conllinear; Method of three turning angles transfer conveyer belt 20 and the 4th straight-through conveyer belt 19 are vertical, and with the first silicon chip loading attachment, 6 conllinear; The 4th corner transfer conveyer belt 22 and the 6th straight-through conveyer belt 23 are vertical, and with the second silicon chip loading attachment, 7 conllinear.
The second buffering supply line silicon chip that reception need be printed from the printing machine upper reaches, the first buffering supply line is sent to the printing machine downstream to the silicon chip that prints.
Shown in figure 12, straight-through conveyer belt 46 is vertical layout with corner transfer conveyer belt 47.Below the corner transfer conveyer belt 47 lowering or hoisting gear 48 is arranged, combine, make corner transfer conveyer belt 47 rise within the specific limits and descend with top conveyer belt.The centre position of corner transfer conveyer belt 47 symmetry have two sulculuses, make straight-through conveyer belt 46 two conveyer belts can through and do not interfere, and groove depth should satisfy the range of corner transfer conveyer belt 47.The rising of corner transfer conveyer belt 47 and decline can make straight-through conveyer belt 46 and the mutual transfer of silicon chip above the corner transfer conveyer belt 47: when corner transfer conveyer belt 47 is above straight-through conveyer belt 46; Corner transfer conveyer belt 47 descends, and the silicon chip above the corner transfer conveyer belt 47 is fallen above the straight-through conveyer belt 46; When corner transfer conveyer belt 47 was below straight-through conveyer belt 46, corner transfer conveyer belt 47 rose, can be the silicon chip holder above the straight-through conveyer belt 46 to above the corner transfer conveyer belt 47.
Like Fig. 5, shown in Figure 6; Article four, the initial position of corner transfer conveyer belt is: method of three turning angles transfer conveyer belt 20 is below the 4th straight-through conveyer belt 19; The 4th corner transfer conveyer belt 22 is below the 6th straight-through conveyer belt 23; The first corner transfer conveyer belt 15 is above the first straight-through conveyer belt 14, and the second corner transfer conveyer belt 17 is below the 3rd straight-through conveyer belt 18.
Have the full-automatic vision silicon chip printing equipment of two platforms, concrete course of action is following:
1. advance the plate process
As shown in Figure 5, receptions needs the silicon chip of printing to the 4th straight-through conveyer belt 19 from the printing machine upper reaches, silicon chip along the 4th straight-through conveyer belt 19 to front transfer, when silicon chip be delivered to method of three turning angles transfer conveyer belt 20 directly over the time, silicon chip can have both direction to continue transmission.
(1) first silicon chip carrying platform 1 advances plate
When silicon chip when the first silicon chip loading attachment, 6 directions are transmitted, the 4th straight-through conveyer belt 19 stops operating, method of three turning angles transfer conveyer belt 20 rises, and holds up silicon chip, stops rising when high until the method for three turning angles transfer conveyer belt 20 and the first silicon chip loading attachment 6 are neat; Motor on the method for three turning angles transfer conveyer belt 20 and the first silicon chip loading attachment 6 rotates, and transfers to the first silicon chip loading attachment 6 to silicon chip from method of three turning angles transfer conveyer belt 20; When silicon chip was delivered to the first silicon chip loading attachment 6, method of three turning angles transfer conveyer belt 20 descended, and drops to initial position; When method of three turning angles transfer conveyer belt 20 descended, silicon chip continued to front transfer, and when being delivered to the centre position of the first silicon chip loading attachment 6, if silicon chip has certain angle and lateral shift, then the first silicon chip loading attachment 6 is done to adjust accordingly to set silicon chip; After silicon chip is proofreaied and correct, continue to be transported to the first silicon chip carrying platform 1 to silicon chip.
(2) second silicon chip carrying platforms 2 advance plate
When silicon chip when the 5th straight-through conveyer belt 21 directions are transmitted, method of three turning angles transfer conveyer belt 20 does not rise, silicon chip continues to front transfer along the 4th straight-through conveyer belt 19, is delivered to the 6th straight-through conveyer belt 23 through the 5th straight-through conveyer belt 21; When silicon chip be in the 4th corner transfer conveyer belt 22 directly over the time; The 6th straight-through conveyer belt 23 stops operating; The 4th corner transfer conveyer belt 22 rises, and holds up silicon chip, stops rising when high until the 4th corner transfer conveyer belt 22 and the second silicon chip loading attachment 7 are neat; Motor on the 4th corner transfer conveyer belt 22 and the second silicon chip loading attachment 7 rotates, and transfers to the second silicon chip loading attachment 7 to silicon chip from the 4th corner transfer conveyer belt 22; When silicon chip was delivered to the second silicon chip loading attachment 7, the 4th corner transfer conveyer belt 22 descended, and drops to initial position; When the 4th corner transfer conveyer belt 22 descended, silicon chip continued to front transfer, and when being delivered to the centre position of the second silicon chip loading attachment 7, if silicon chip has certain angle and lateral shift, then the second silicon chip loading attachment 7 is done to adjust accordingly to set silicon chip; After silicon chip is proofreaied and correct, continue to be transported to the second silicon chip carrying platform 2 to silicon chip.
When the first silicon chip carrying platform 1 got into printing station, the second silicon chip carrying platform 2 was moved out to and changes the sheet station; Equally, when the second silicon chip carrying platform 2 got into printing station, the first silicon chip carrying platform 1 was moved out to and changes the sheet station.
2. printing process
The first silicon chip carrying platform 1 and the second silicon chip carrying platform 2 alternately get into printing station and realize the wiping operation, and correspondingly control system loads silicon chip alternately for the first silicon chip carrying platform 1 and the second silicon chip carrying platform 2.As shown in Figure 2, printing process is following:
(1) silicon chip advances plate through the first silicon chip carrying platform 1 and is delivered to the first silicon chip carrying platform 1, and the first silicon chip carrying platform 1 was in and changed the sheet station this moment, on the first silicon chip carrying platform 1 silicon chip was arranged; Do not have on the second silicon chip carrying platform 2, when silicon chip arrived the first silicon chip carrying platform 1 central, vacuum was inhaled and is opened; Hold silicon chip, the first turnover plate detection camera 12 is taken pictures, and obtains the attitude of silicon chip; Whether damaged, if do not have, then carry out next operation if analyzing silicon chip simultaneously;
(2) the first silk screen datum mark cameras 10 and the second silk screen datum mark camera 11 take the Mark point of the silk screen 34 of printing machine, and the attitude of adjusting silk screens 34 through silk screen guiding mechanism 3 makes the pattern on the silk screen 34 aim at silicon chip, and the first silicon chip carrying platform 1 moves to printing station from changing the sheet station simultaneously; When the first silicon chip carrying platform, 1 arrival printing station, silk screen lowering or hoisting gear 4 descends, and silk screen 34 and silicon chip are pressed close to; Doctor blade device 5 is coated in tin slurry or silver slurry on the silicon chip through silk screen 34, and after wiping was accomplished, silk screen lowering or hoisting gear 4 rose; When the silicon chip on the first silicon chip carrying platform 1 is printed, transmit silicon chips to the second silicon chip carrying platform 2, when silicon chip arrives the second silicon chip carrying platform 2 central from the second silicon chip loading attachment 7; Vacuum suction sheet is opened, and holds silicon chip, and the second turnover plate detection camera 13 is taken pictures; Obtain the attitude of silicon chip; Whether damaged, if do not have, then carry out next operation if analyzing silicon chip simultaneously;
(3) the first silk screen datum mark cameras 10 and the second silk screen datum mark camera 11 take the Mark point of the silk screen 34 of printing machine, and the attitude of adjusting silk screens 34 through silk screen guiding mechanism 3 makes the pattern on the silk screen 34 aim at silicon chip, and the second silicon chip carrying platform 2 moves to printing station from changing the sheet station simultaneously; When the second silicon chip carrying platform, 2 arrival printing stations, silk screen lowering or hoisting gear 4 descends, and silk screen 34 and silicon chip are pressed close to; Doctor blade device 5 is coated in tin slurry or silver slurry on the silicon chip through silk screen 34, and after wiping was accomplished, silk screen lowering or hoisting gear 4 rose; When the silicon chip on the second silicon chip carrying platform 2 was printed, the silicon chip that prints was delivered to the first silicon chip unloading device 8 from the first silicon chip carrying platform 1, and the silicon chip that does not print on the first silicon chip loading attachment 6 is moved into the first silicon chip carrying platform 1; When silicon chip arrives the first silicon chip carrying platform 1 central; Vacuum suction sheet is opened, and holds silicon chip, and the first turnover plate detection camera 12 is taken pictures; Obtain the attitude of silicon chip; Whether damaged, if do not have, then carry out next operation if analyzing silicon chip simultaneously;
(4) the first silk screen datum mark cameras 10 and the second silk screen datum mark camera 11 take the Mark point of the silk screen 34 of printing machine, and the attitude of adjusting silk screens 34 through silk screen guiding mechanism 3 makes the pattern on the silk screen 34 aim at silicon chip, and the first silicon chip carrying platform 1 moves to printing station from changing the sheet station simultaneously; When the first silicon chip carrying platform, 1 arrival printing station, silk screen lowering or hoisting gear 4 descends, and silk screen 34 and silicon chip are pressed close to; Doctor blade device 5 is coated in tin slurry or silver slurry on the silicon chip through silk screen 34, and after wiping was accomplished, silk screen lowering or hoisting gear 4 rose; When the silicon chip on the first silicon chip carrying platform 1 was printed, the silicon chip that prints was delivered to the second silicon chip unloading device 9 from the second silicon chip carrying platform 2, and the silicon chip that does not print on the second silicon chip loading attachment 7 is moved into the second silicon chip carrying platform 2; When silicon chip arrives the second silicon chip carrying platform 2 central; Vacuum suction sheet is opened, and holds silicon chip, and the second turnover plate detection camera 13 is taken pictures; Obtain the attitude of silicon chip; Whether damaged, if do not have, then carry out next operation if analyzing silicon chip simultaneously;
(5) after this, the first silicon chip carrying platform 1 and the second silicon chip carrying platform 2 alternately get into printing station, and cyclic process is of (3), (4).
3. ejecting plate process
As shown in Figure 6, board discharging device is made up of the first buffering supply line, the first silicon chip unloading device 8 and the second silicon chip loading attachment 9.The silicon chip that prints passes to board discharging device from both direction.
(1) first silicon chip carrying platform 1 ejecting plate
When the silicon chip that prints when the first silicon chip carrying platform 1 is delivered to the first silicon chip unloading device 8, silicon chip passes to the first corner transfer conveyer belt 15 along the first silicon chip unloading device 8; When silicon chip be in the first straight-through conveyer belt 14 directly over the time, the first corner transfer conveyer belt 15 stops operating, the first corner transfer conveyer belt 15 descends simultaneously; When silicon chip is fallen 14 last times of the first straight-through conveyer belt, the first corner transfer conveyer belt 15 continues to descend and stops to descend behind the segment distance, and the first straight-through conveyer belt 14 rotates simultaneously; Silicon chip continues to front transfer along the first straight-through conveyer belt 14; Be delivered to the 3rd straight-through conveyer belt 18 through the second straight-through conveyer belt 16; Deliver to the printing machine downstream to the silicon chip of this equipment printing again, the first corner transfer conveyer belt 15 rises simultaneously, gets back to initial position.
Should be noted that to be that after the silicon chip that prints was delivered to the first silicon chip unloading device 8 from the first silicon chip carrying platform 1, what follow closely was exactly that the first silicon chip loading attachment 6 is loaded into the silicon chip of not printing on the first silicon chip carrying platform 1.
(2) second silicon chip carrying platforms 2 ejecting plates
When the silicon chip that prints when the second silicon chip carrying platform 2 is delivered to the second silicon chip unloading device 9; Silicon chip continues to front transfer along the second silicon chip unloading device 9; Simultaneously the second corner transfer conveyer belt 17 rises, and stops rising when high until the second corner transfer conveyer belt 17 and the second silicon chip unloading device 9 are neat; The second corner transfer conveyer belt 17 rotates, and silicon chip is delivered to the second corner transfer conveyer belt 17 from the second silicon chip unloading device 9; Silicon chip is along the transportation of the second corner transfer conveyer belt 17, when silicon chip be in the 3rd straight-through conveyer belt 18 directly over the time, the second corner transfer conveyer belt 17 stops operating, the second corner transfer conveyer belt 17 descends simultaneously; When silicon chip is fallen 18 last times of the 3rd straight-through conveyer belt, the second corner transfer conveyer belt 17 continues to descend and stops to descend behind the segment distance, drops to initial position, and the 3rd straight-through conveyer belt 18 rotates simultaneously; Silicon chip continues to deliver to the printing machine downstream to the silicon chip of this equipment printing to front transfer along the 3rd straight-through conveyer belt 18.
At the second corner transfer conveyer belt, 17 places, there is the silicon chip of both direction hitherward to transmit, should stagger the transmission of both direction.Sensor is equipped with in appropriate location at board discharging device; Logical design method according to PLC control system; Make silicon chip along the second straight-through conveyer belt 16 when the second corner transfer conveyer belt, 17 directions are transmitted, the second corner transfer conveyer belt 17 be in the 3rd lead directly to conveyer belt 18 the below.When silicon chip along the second silicon chip unloading device 9 when the second corner transfer conveyer belt, 17 directions are transmitted, the second corner transfer conveyer belt 17 rises to again and the second silicon chip unloading device, 9 height such as grade.It should be noted that after the silicon chip that prints is delivered to the second silicon chip unloading device 9 from the second silicon chip carrying platform 2 what follow closely is exactly that the second silicon chip loading attachment 7 is loaded into the silicon chip of not printing on the second silicon chip carrying platform 2.
In sum, this printing equipment adopts two carrying platform structures, and two carrying platforms alternately get into printing station and realize the wiping operation; Make a carrying platform when changing sheet; The another one carrying platform is carrying out the silicon chip printing, has guaranteed that printing equipment can realize changing the operation of sheet and wiping simultaneously, walks abreast with the printing process process even change sheet; Thereby reduced the production time, significantly improved the production efficiency of production line unit interval.And the turnover plate all adopts the conveyer belt transmission, and is simple in structure, motion steadily, turnover plate detection camera can also realize that ejecting plate is damaged and detect.
Shown in figure 14, in order to cooperate the work of printing equipment of the present invention,, realize the high precision alignment of silicon chip and silk screen according to turnover plate detection camera, silk screen datum mark camera gained silicon chip, silk screen attitude-adjusting system attitude information.Also need positioner, image collecting device, shooting controller, image pick-up card, positioner controller, image processing, all-purpose computer and motion controller etc. when originally having the full-automatic vision silicon chip printing dress work of two platforms.Wherein, positioner comprises first light sensation 40, second light sensation 41 and the 3rd light sensation 42; Image collecting device comprises the first silk screen datum mark camera 10, the second silk screen datum mark camera 11, the first turnover plate detection camera 12 and the 3rd turnover plate detection camera 13; The IMAQ of shooting controller control image collecting device; Image pick-up card is given CPU with picture signal and is handled or be saved in memory; The action of motion controller control printing equipment.
In order to get more information about the workflow of this printing equipment, can be with reference to Figure 13.
The present invention has characteristics such as compact conformation, stable drive, manufacturing and installation are simple, easy to maintenance, printing quality is high, production efficiency is high, floor space is little, can be used for the various printings of silicon chip.
The specific embodiment of the above is merely preferred embodiments of the present invention, is not to limit practical implementation scope of the present invention with this, and all shapes according to the present invention, the equivalence that structure is done change all in protection scope of the present invention.
Claims (6)
1. the full-automatic vision silicon chip printing equipment with two platforms is characterized in that comprising two silicon chip carrying platforms, two turnover plate detection camera; A silk screen lowering or hoisting gear, a silk screen attitude-adjusting system, two silk screen datum mark cameras; Scrape device for ink for one; Two cover silicon chip loading attachments, two cover silicon chip unloading devices, two cover buffering supply lines; Two silicon chip carrying platforms are installed on the pedestal that laterally moves, and alternately get into printing station and realize the wiping operation; Turnover plate detection camera is installed in changing above the sheet station of silicon chip carrying platform, is used to obtain the image of silicon chip; The silk screen lowering or hoisting gear is installed on four support columns of printing machine, is used to make silk screen to press close to silicon chip and leaves silicon chip, so that realize silicon chip printing, the demoulding and clean net bottom; The silk screen attitude-adjusting system is installed on the silk screen lowering or hoisting gear of printing machine, is used to make silk screen to realize the parallel mobile and positioning of rotating of XY; Two silk screen datum mark cameras are installed in the below of silk screen attitude-adjusting system, and are symmetrically distributed in the both sides of the silicon chip carrying platform of printing station, are used for obtaining the image of two datum marks in silk screen bottom; Scrape device for ink and be installed in the top of silk screen attitude-adjusting system, moving up and down and seesawing and be impressed into coating on the silicon chip through scraper; Two cover silicon chip loading attachments with do not align at the silicon chip carrying platform of printing station, and be symmetrically distributed in the both sides of printing machine, can adjust the angle and the lateral shift of silicon chip; Silicon chip unloading device and silicon chip loading attachment are symmetrically distributed in silicon chip carrying platform both sides; Two cover buffering supply lines all are vertical layout with the silicon chip loading attachment with the silicon chip unloading device, are used for receiving from the upper reaches silicon chip of needs printing, or are sent to downstream to the silicon chip that prints.
2. the full-automatic vision silicon chip printing equipment with two platforms according to claim 1; It is characterized in that above each silicon chip carrying platform conveyer belt being housed; There are a plurality of equally distributed apertures the platform middle part; A plurality of equally distributed apertures are also arranged above the conveyer belt, and these apertures are inhaled function through vacuum and are adsorbed on silicon chip on the platform; Conveyer belt covers the plane that is used to support silicon chip on the platform; The platform below has can realize laterally mobile slide rail.
3. according to the said full-automatic vision printing equipment that is used to print silicon chip of claim 1, it is characterized in that described silk screen attitude-adjusting system is a planar three freedom serial mechanism, can realize the parallel mobile and positioning of rotating of XY.
4. according to the said full-automatic vision silicon chip printing equipment of claim 1 with two platforms; It is characterized in that the described device for ink of scraping comprises scraper, scraper seesaw mechanism, scraper up-down mechanism and go back to black mechanism; The scraper mechanism that seesaws seesaws scraper; The scraper up-down mechanism moves up and down scraper, and moving up and down and seesawing of scraper realizes being impressed into coating on the silicon chip.
5. according to the said full-automatic vision silicon chip printing equipment of claim 1 with two platforms; It is characterized in that above every cover silicon chip loading attachment two conveyer belts that are used to adjust silicon chip angle being housed; These two conveyer belts are respectively by two driven by motor, and conveyer belt near three light sensations that are used to respond to the silicon chip position are housed; Have below the silicon chip loading attachment and be used for the bottom platform that the silicon chip lateral displacement is adjusted in translational motion.
6. according to the said full-automatic vision silicon chip printing equipment of claim 1 with two platforms; It is characterized in that; Cover buffering supply line is made up of three straight-through conveyer belts and two corner transfer conveyer belts; The cooperation of straight-through conveyer belt and corner transfer conveyer belt is assigned to two silicon chip loading attachments to silicon chip or the silicon chip unloading device focuses on same ejecting plate supply line overlapping independently through the silicon chip that prints from two.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
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| CN201210141614.2A CN102700237B (en) | 2012-05-09 | 2012-05-09 | A kind of full-automatic vision silicon chip printing equipment with Double tabletop |
| PCT/CN2012/086894 WO2013166837A1 (en) | 2012-05-09 | 2012-12-19 | Fully-automatic vision silicon wafer printing device with double platforms |
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| CN201210141614.2A CN102700237B (en) | 2012-05-09 | 2012-05-09 | A kind of full-automatic vision silicon chip printing equipment with Double tabletop |
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