CN1429707A - Printing method and printing device for non-individual body sheet - Google Patents
Printing method and printing device for non-individual body sheet Download PDFInfo
- Publication number
- CN1429707A CN1429707A CN 02159624 CN02159624A CN1429707A CN 1429707 A CN1429707 A CN 1429707A CN 02159624 CN02159624 CN 02159624 CN 02159624 A CN02159624 A CN 02159624A CN 1429707 A CN1429707 A CN 1429707A
- Authority
- CN
- China
- Prior art keywords
- thin slice
- individual body
- body thin
- sign
- galley
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention provides a method for printing a continuous body sheet by which the position of the sheet can be registered highly precisely without applying an excess tensile stress to the sheet, and a printer. This method comprises a step to prepare a printing plate arranged above a printing stage, a step to retain the continuous body sheet on the printing stage by suction, a step to screen-print a specified pattern on the suction-retained continuous body sheet by the printing plate and at the same time, screen-print a position discerning mark of the printing plate on the sheet, a step to convey the sheet to a feedback stage from the printing stage and retain the sheet by suction, a step to seek a deviation level between each of the position registering marks of the sheet retained on the feedback stage by suction and each of the printed position discerning marks of the printing plate by image processing and a step to control the positions of the printing plate in a feedback mode according to the sought deviation level.
Description
Technical field
The present invention relates to the printing process and the printing equipment that carry out wire mark on the non-individual body thin slice of a plurality of contraposition signs setting in advance.
Technical background
In the past, as the device of making stacking type electronic component-use ceramic raw material sheet (green sheet), known to have by on the quite long carrier film of length, forming the raw material ceramic layer, make this non-individual body thin slice at the printing process that keeps under the continuum of states successively by electrode film, drying process, multiple working procedures such as blanking operation, thus the device (with reference to No. 2504277 communique of Japan Patent) of ceramic raw material sheet obtained.
In recent years, below the 10 μ m that the raw material ceramic layer is done extremely thinly, if republish the difference in height that electrode film will produce electrode film thereon.As will the raw material ceramic layer stacking because that the discrepancy in elevation of electrode film produces crack or delamination etc. sometimes is improper.Therefore, advise: the ceramic coating that overlapping again printing and raw material ceramic layer identical materials constitute on the raw material ceramic layer of the film that prints electrode, reduce the electrode film difference in height.
Figure 15, Figure 16 are the one example, (a) are the state behind the printed electrode pattern, (b) are again the state behind the overlapping printing ceramic layer.In the drawings, 100 is carrier film, and 101 is ceramic layer originally, and 102 is electrode film, and 103 is the ceramic layer after the printing again.
But, easily produce pattern shift between later on that the ceramic layer 103 of printing and front is the printed electrode film 102.For example the overlapping width W of electrode film 102 and ceramic layer 103 is about 0-150 μ m, just can't absorb if produce the pattern shift difference in height.
In such printing process, can carry out following action, the non-individual body thin slice that film printing electrode in advance and is printed on the contraposition sign is simultaneously attracted to remain on the print station, preprint in its printing beginning time, take its printed patterns, handle the side-play amount of measuring for contraposition sign printed patterns by pattern with gamma camera, side-play amount according to this printed patterns makes print station at S, Y makes position correction on the θ direction, and galley is aimed at the non-individual body flap position.
But, in the method, only only when the printing beginning according to carrying out contraposition, so through repeatedly printing, because pattern deformation produces the printing skew sometimes for a long time for the printed patterns side-play amount of contraposition sign.Again, come contraposition that suitable precision must be arranged, so exist the shortcoming that contraposition need be arranged the more time with preprinted.
So, the suggestion of TOHKEMY 2000-272089 communique: the printed material of predeterminated position being discerned reference mark is placed on printing with on the platform, when this printed material being printed by galley, near the location recognition reference mark, stamp the printing position acknowledgement indicator,, measure the side-play amount of two signs by image processing, before the printing of carrying out after this, at X, Y does the positive printing process in position to print station on the θ direction according to its side-play amount.
But the printed material material piece is done more and more thinlyyer for the big capacity of little shape, if make print station at X, Y moves on the θ direction for the contraposition of non-individual body thin slice, and material web as thin as a wafer will be subjected to excessive tensile stress, becomes wrinkling or deformation reason.The result can produce such as thin slice and owe sunken, problems such as delivery precision deterioration.
So, not the object of the present invention is to provide and can apply excessive tensile stress, accurately the printing process of non-individual body thin slice and the printing equipment of aligned position the non-individual body thin slice.
Summary of the invention
In order to achieve the above object, the printing process of the non-individual body thin slice of the application the 1st aspect, on the non-individual body thin slice that sets in advance a plurality of contraposition sign M1, carry out wire mark, comprise following operation: the operation of preparing galley, this printed panel is held the corresponding beneficial distinguishing mark M2 of a plurality of and above-mentioned contraposition sign M1, be configured in the top of print station, on print station, attract to keep the operation of above-mentioned non-individual body thin slice, by galley with the pattern wire mark of regulation on the above-mentioned non-individual body thin slice that attracts to remain on the above-mentioned print station, simultaneously with the operation of location recognition sign M2 wire mark on the non-individual body thin slice of galley, the non-individual body thin slice is transported to feedback stage (Feedback stage) from print station, attraction remains on the operation on the back coupling platform, by image processing, obtain the operation that is attracted side-play amount between each contraposition sign M1 of non-individual body thin slice that remains on the feedback stage and each the position distinguishing mark M2 that is printed on, and according to the side-play amount of obtaining at S, Y, the operation of FEEDBACK CONTROL galley position on the θ direction.
The printing process of the non-individual body thin slice of the application the 2nd aspect, on the non-individual body thin slice that sets in advance a plurality of contraposition sign M1, carry out wire mark, comprise following operation: the operation of preparing galley, this printed panel is held a plurality of location recognition sign M2s corresponding with above-mentioned contraposition sign M1, be configured in the top of print station, above-mentioned non-individual body thin slice is attracted the operation that remains on the print station, leaning on galley that the pattern wire mark of stipulating is drawn at quilt receives on the above-mentioned non-individual body thin slice that remains on the above-mentioned print station, simultaneously with the operation of location recognition sign M2 wire mark on the non-individual body thin slice of galley, by image processing, obtain on print station, the operation of side-play amount between each contraposition sign M1 of non-individual body thin slice and each position distinguishing mark M2 of being printed on, and the side-play amount that basis is obtained is at S, Y, the operation of FEEDBACK CONTROL galley position on the θ direction.
In aspect the application the 1st, make the non-individual body thin slice attract to remain on the print station, predetermined pattern is imprinted on the non-individual body thin slice, simultaneously, on the non-individual body thin slice, stamp the location recognition sign of galley by galley.And the location recognition sign is different with the contraposition character shape, and for example: as the contraposition sign is printed as sealing, the shape that fences up on the position of the determining deviation that staggers, just detects side-play amount easily.
Then the non-individual body thin slice is delivered to feedback stage from print station, attracts to remain on the feedback stage.Then, on feedback stage,, obtain and be attracted departure between each contraposition sign M1 of non-individual body thin slice that remains on the feedback stage and each the position distinguishing mark M2 that is printed on by image processing.The location recognition sign M2 of galley is the corresponding sign of contraposition sign M1 with the non-individual body thin slice, because location recognition sign M2 that is printed on and contraposition sign M1 are in contiguous position, so can two signs be caught in the same visual field with gamma camera.At this moment, above feedback stage, there is not the barrier of galley and so on, so can measure side-play amount with image processing method from the front of non-individual body thin slice.Thus, can clearly discern the position of contraposition sign M1 and the location recognition sign M2 that is printed on.And the location recognition sign is masked as different shapes with contraposition, for example: as the contraposition sign being printed as the shape that fences up of sealing, or on the position of the determining deviation that staggers, just detect side-play amount easily.
At last, according to the position of the side-play amount FEEDBACK CONTROL galley of trying to achieve.Not the position of adjusting print station in the present invention, but adjust the position of galley,, produce defective, problems such as delivery precision deterioration so bring damage can for the non-individual body thin slice.In addition, according to detected side-play amount after long-time on the feedback stage, FEEDBACK CONTROL galley position is offset so can eliminate the printing that causes because of the long variation of the seal net of galley.
Omitted the feedback stage in the application the 1st aspect in aspect the application the 2nd, on print station by image processing, side-play amount between each position distinguishing mark of obtaining each contraposition sign of non-individual body thin slice and being printed on is according to the position of this side-play amount FEEDBACK CONTROL galley.
At this moment, do not need to suppose feedback stage, also just do not need so videotape the gamma camera of usefulness on the feedback stage, the gamma camera of print station can dual-purpose.
This printing process also can be used for from the back side of non-individual body thin slice each the position distinguishing mark that is printed on being taken.That is, the non-individual body thin slice constitutes with light transmissive material, printed thereon location recognition sign can for be printed on the non-individual body thin slice on the contraposition sign hold different contrasts or difform sign.
Shown in the application the 3rd aspect, before the operation with galley wire mark predetermined pattern and location recognition sign M2 on the non-individual body thin slice, can be provided with by image processing, the operation that the location recognition sign M2 of the above-mentioned galley that is configured in print station top is carried out position measurement, by image processing, the operation that the contraposition sign M1 that attracts to remain on the above-mentioned non-individual body thin slice on the print station is carried out position measurement, obtain the operation of side-play amount between above-mentioned location recognition sign M2 that measures and contraposition sign M1, reach according to above-mentioned side-play amount at X, Y, the θ direction is to the operation of above-mentioned galley contraposition.
At this moment, at first by image processing, measure the position of a plurality of location recognition sign M2 of the galley that is configured in the print station top.Position measurement can be configured in print station one side with gamma camera, and gamma camera just can not pass in and out camera site distinguishing mark M2 easily between galley and print station.
Then, make the non-individual body thin slice attract to remain on the print station after, by image processing, measure a plurality of contraposition sign M1 that are attracted the non-individual body thin slice that remains on the print station.
Then, obtain the side-play amount between the contraposition sign M1 of the location recognition sign M2 of galley and non-individual body thin slice, according to this side-play amount at X, Y, on the θ direction to the galley contraposition.
After this, can be imprinted on the non-individual body thin slice by pattern and the location recognition sign of galley regulation.Thus, when the non-individual body chip sorption remains on the print station, because of the printing skew of carrying deviation to cause can detect by side-play amount between location recognition sign M2 and contraposition sign M1.
At this moment, because also be offset adjustment, so can not be subjected to excessive stress on the non-individual body thin slice with galley.
Shown in the application the 4th aspect, can carry out position probing with the image processing of the contraposition sign M1 on the print station at the back side of non-individual body thin slice.At this moment, can use and measure same gamma camera of gamma camera of the galley location recognition sign M2 position of the application the 3rd aspect, promptly use the gamma camera that is configured in print station one side.Make image at the back side of non-individual body thin slice if so and handle, just needn't between non-individual body thin slice and galley, pass in and out once by gamma camera of every seal.Can shorten the blanking time that image processing is used.At this moment, carrier film can be transparent or semitransparent, makes can see through thin slice identification contraposition sign M1 from the back side of non-individual body thin slice.For example, the non-individual body thin slice is the occasion of coating ceramic layer on carrier film, if get thickness below 5 μ m, then just can see through from the back side of non-individual body thin slice and discern the contraposition sign M1 that is imprinted on the ceramic layer.
Shown in the application the 5th aspect, the non-individual body thin slice is the ceramic layer that forms on the surface film shape ground of transparent or semitransparent carrier film, pattern and contraposition sign thereon in advance print electrode, galley is applicable to that wire mark simultaneously buries on the surface of ceramic layer with pottery and sticks with paste the pattern used because of the high yield that prints above-mentioned electrode pattern generation and the occasion of location recognition sign.
Form electrode pattern like this on ceramic layer, in order to bury this difference in height, the present invention as having used the non-individual body thin slice of printing electricity paste, print electrode pattern and ceramic pattern once more with then not having offset.
The application the 6th aspect is opposite with the application the 5th aspect, sticks with paste printing with pottery earlier and bury the pattern that electrode altitude difference is used on ceramic layer, and pattern after this prints electrode.
At this moment, also can stick with paste printing recessed pattern and contraposition sign with pottery earlier, stick with paste by protruding pattern and the location recognition sign of galley seal with pottery afterwards.
Shown in the application the 7th aspect, can every seal once or the operation values of each set point number provide feedback data in the FEEDBACK CONTROL operation.
When every seal once provided feedback data, the skew of considering each time printing is adjusting position subtly.On the other hand, when the operation values with each set point number provides feedback data, because can grasp the overall variation of offset, so can determine for example to consider optimum position behind the long-time accumulation of error.
Also have, so-called operation values for example can be expressed as the mean value of set point number, each side-play amount, and to these values that goes up the coefficient about 0.8-0.9 on duty, or the optimum value obtained of statistics etc.
Description of drawings
Fig. 1 represents the printing equipment one example system figure that the present invention is correlated with.
Fig. 2 represents the plane graph before the printing of non-individual body thin slice.
Fig. 3 represents the phantom of print station.
Fig. 4 represents the ground plan of galley.
Fig. 5 represents the schematic diagram of contraposition sign and location recognition sign one example.
Fig. 6 represents contraposition sign and another routine schematic diagram of location recognition sign.
Fig. 7 represents first printing-flow figure among the 1st embodiment of the present invention.
Fig. 8 represents the 2nd later printing-flow figure among the 1st embodiment of the present invention.
Fig. 9 represents the plane graph after the printing of non-individual body thin slice.
Figure 10 represents the printed patterns figure of the 2nd embodiment of the present invention.
Figure 11 represents the first printing-flow figure of the 2nd embodiment of the present invention.
Figure 12 represents the 2nd the later printing-flow figure of the 2nd embodiment of the present invention.
Figure 13 represents the first printing-flow figure of the 3rd embodiment of the present invention.
Figure 14 represents the 2nd the later printing-flow figure of the 3rd embodiment of the present invention.
The plane graph of the non-individual body thin slice before Figure 15 (a) expression printing.
The plane graph of the non-individual body thin slice after Figure 15 (b) expression printing.
Figure 16 represents the C-C profile of Figure 15.
Label declaration
1 non-individual body thin slice
4 print stations
5 gamma cameras
7 printed panels
9 feedback stages
11 gamma cameras
20 control device (CPU)
21 image-processing systems
Concrete example
The 1st embodiment
Fig. 1 represents an example of the printing equipment of non-individual body thin slice related to the present invention.
Non-individual body thin slice 11 used herein and quite long flexible support 1a such as carrier film shown in Figure 2 go up continuous film shape ground and form raw material ceramic layer 1b, and certain interval that is separated by on the length direction in the above is pre-formed the 1st pattern P 1 and a plurality of contraposition sign M1s corresponding with this P1 with methods such as printings.In this example, pattern P 1 and sign M1 are printed as preset thickness with electrode materials such as Ni pastes.When the thickness of ceramic layer 1b is 5 μ m-0.2 μ m because non-individual body thin slice 1 self almost is transparent, so see through with the back side one side of non-individual body thin slice 1, can identification icon P1, sign M1, having again after with the sign M2 of the galley 7 narrated.The contraposition sign M1 of this embodiment as shown in Figure 2, at pattern P 1X direction of principal axis) throughput direction) opaque two logotypes of forming of both sides.But its allocation position, shape, numbers etc. do not limit.Have again, also the part of pattern P 1 can be used as M1.Also have,, for ease of understanding contraposition sign M1 amplification is drawn at Fig. 2, it is very little in fact comparing with pattern P 1.
Non-individual body thin slice 1 is in the state that twists on the pay-off roll 2, printing surface is upwards rolled out the non-individual body thin slice of certain-length from this pay-off roll 2.The print station 4 of the non-individual body thin slice 1 that is uncoiled by narrating later on, feedback stage 9, and drying oven 12 is wrapped on the winding roller 3.The action of winding roller 3 is by control device (CPU) 20 controls.
In the present embodiment, in order to videotape with glass plate 13, but also can use synthetic quartz, or the material formed such as sapphire.
Galley 7 is configured in the top of print station 4, and keeping the print head 8 of this printed panel 7 can be X along two axles of thin slice throughput direction imagination quadrature, and the Y direction and can be to the galley 7 independent positions of adjusting on the θ direction of rotating on the Z axle vertical with these two axles.Again, print head 8 also can move on the Z direction.Printed panel is made of the wire mark version, as shown in Figure 4: be provided with on non-individual body thin slice 1 and form the 2nd pattern P 2 that the difference in height bury the 1st pattern P 1 uses and a plurality of location recognition sign M2s corresponding with contraposition sign M1.Location recognition sign M2 desirable for to get different shape with contraposition sign M1, in the present embodiment, as shown in Figure 5: constitute contraposition sign M1 with the quadrangle sign that surrounds 4.But also can with identical,, also can be other shape as shown in Figure 6 leaving the garden shape sign that forms on a determining deviation 8 positions with contraposition sign M1 shape.In addition, location recognition sign M2 be because can discern through non-individual body thin slice 1, thus desirable be non-permeability.Be configured in that 5 pairs of gamma cameras on the above-mentioned print station 4 remain on the contraposition sign M1 of lip-deep non-individual body thin slice 1 of print station 4 and the location recognition sign M2 of galley 7 videotapes, these data are sent image-processing system 21.Because of non-individual body thin slice 1 almost is transparent, can clearly discern contraposition sign M1 and location recognition sign M2 so see through non-individual body thin slice 1.
Feedback stage 9 is also the same with print station 4, possesses the device that absorption keeps non-individual body thin slice 1 back side, on this position the non-individual body thin slice is located.Gamma camera illuminating lamp 10 is set below feedback stage 9, and many of equipment videotape with gamma camera 11 up.These gamma cameras 11 are caught continuous distinguishing mark M2 in the same visual field with the face side of non-individual body thin slice 1, this is videotaped data send image-processing system 21.And, this gamma camera 11 also can with the gamma camera 5 the same belows that are configured in feedback stage 9 of print station 4.
Image-processing system 21 is handled from videotaping 5 and the data of gamma camera 11, send control device 20.Control device 20 calculates side-play amount etc. according to the data of image-processing system 21, by drive unit 22, drives print head 8 according to side-play amount, controls galley 7 at X, Y, the position of θ direction.
Below, with reference to Fig. 7, the action of the printing equipment that Fig. 8 explanation the present invention relates to.
Fig. 7 represents the flow process of first printing.
Initial location recognition sign M2 with gamma camera 5 shooting galleys 7 measures its position B (step S1).In a single day the position data of location recognition sign M2 continues to use during the printing stipulated number, so deposit memory in, just needn't print one-time detection once.But during printing repeatedly, use reasons such as generation elongation because of the seal net is long-term, so every seal stipulated number refreshes memory contents with regard to the detection position.Non-individual body thin slice 1 printing surface that then will be printed on the 1st pattern P 1 and contraposition sign M1 in advance is upwards with 2 length of pulling out given size of pay-off roll, and absorption keeps (step S2) on print station 4.Here, from the back side of non-individual body thin slice 1 contraposition sign M1 is taken, measure its position A (step S3) by gamma camera 5.Then, calculate the location recognition sign M2 that records by image processing and the side-play amount (B-A) (step S4) of contraposition sign M1, revise galley at X according to this side-play amount (B-A), Y, the position of θ direction (step S5).After the position correction, print (step S6) for the first time.In first printing, can eliminate non-individual body thin slice 1 whenever the position offset (B-A) that is adsorbed the contraposition sign M1 that produces when remaining on the print station 4, but can not eliminate the elongation because of the seal net, the side-play amount that the elongation of thin slice etc. produce.
Below, implement the 2nd the later printing of Fig. 8.
To be transported to feedback stage 9 through the non-individual body thin slice after the first printing, when absorption keeps (step S10), again from pay-off roll 2 from newly pulling out the non-individual body thin slice 1 of given size, absorption remains on (step S11) on the print station 4.At print station 4, take contraposition sign M1 with gamma camera 5 from the back side of non-individual body thin slice 1, measure its position A (step S12).Then, calculate and the side-play amount (B-A) (step S13) of the location recognition sign M2 that prestores.On the feedback stage 9 on the other hand, take the contraposition sign M1 of non-individual body thin slices 1 and the location recognition sign M2 (step S14) of first printing with gamma camera 11, calculate two signs side-play amount (B '-A) (step S15).Here, the position B that must be noted that the location recognition sign M2 of the position B ' of printed location recognition sign M2 and galley 7 is not identical.Why like this, be because in the net carp louse, because of reasons such as the long elongations of seal net, the online mark position B of seal and the position B ' of institute's franking are offset.
As mentioned above, utilize the first printing that side-play amount (B-A) that print station 4 places try to achieve and feedback stage 9 places try to achieve side-play amount (B '-A), the optimum position (step S15) of decision galley 7.As the simplest determining method for example can with both sides' side-play amount sum (B-A)+(B '-A) as final side-play amount.And, the side-play amount (B-A) that try to achieve at print station 4 places is that non-individual body thin slice 1 is when remaining on the print station 4, for the side-play amount of each variation, the side-play amount that feedback stage 9 is tried to achieve (B '-A) be not limited to each variation, be to wait the change in long term that causes because of the seal net extends for a long time.Therefore, when the decision optimum position, side-play amount (B '-A) can be only with reference to last data, also the mean value of available each set point number (accumulative total is average) is tried to achieve.
As described above, begin at X from the optimum position, Y makes position correction (step S17) to galley on the θ direction, carries out the 2nd printing (step S18).
Like this, side-play amount (B-A) to print station 4, with feedback stage 9 detected side-play amounts (B '-A) feedback, obtain the optimum position of galley 7, so each non-individual body thin slice 1 is adsorbed the side-play amount (B-A) that produces when remaining on the print station 4 and can ignores in the 2nd later printing, because of long-time side-play amount such as the elongation of seal net (B '-A) also can eliminate, contraposition accurately always can be eliminated the pattern shift between the 1st pattern P 1 and printed the 2nd pattern P 2 '.In addition, not to make position correction by print station 4, because be that galley 7 is made position correction, so can not be subjected to the effect of excessive tensile stress on the non-individual body thin slice 1, material piece can not rise has a rest and is out of shape.Therefore, can prevent that thin slice from producing defective and improving delivery precision.
Fig. 9 represents to revise a concrete example of offset method.
As shown in FIG., when on non-individual body thin slice 1, between default the 1st pattern P 1 and the 2nd pattern P 2 ' that stamps with galley 7 skew being arranged, by image processing, the XY that obtains on the non-individual body thin slice 1 center 01 of default contraposition sign M1 produces the angle of mark and centre line L 1, the XY coordinate of the central point 02 of the location recognition sign M2 of galley 7 or printed location recognition sign M2 and the angle of centre line L 2.Then at X, Y, θ adjustment in direction galley 7 makes each mid point 01,02 and centre line L 1, the angle unanimity of L2.
The 2nd embodiment
In the wire mark printing deflection from each pattern deviation big on as can be known.As shown in figure 10: offset detects with sign M1, and M2 is configured in pattern P 1, during the outside, can make sign M1 around the P2 ', the M2 contraposition, and pattern P 1 wherein, P2 ' might not want contraposition.
(a) of Figure 10 is sign M1 and pattern P 1, and when the mutual alignment relation of sign M2 and pattern P 2 ' equated, (b) of Figure 10 was that mutual position concerns not simultaneously.
Yet, by use the feedback correction value obtained by image processing (B '-A), measure in advance and print both sides' correction value that the mutual alignment of filming calculates skew (offset) value, thereby make original conceivable pattern P 1, the offset correction of P2 ' is revised with lumping together because of the long skew of other different generations.In order to obtain deviant, for example add the gamma camera 11 that is configured in feedback stage 9 tops, the gamma camera 11a (with reference to Fig. 1) that deviant detects usefulness can be set.
Like this, use deviant to carry out the offset correction simultaneously, even then shown in Figure 10 , sign M1, M2 is offset, pattern P 1, still accurately contraposition between the P2 '.At this moment can carry out contraposition printing minimizing and changed by printing condition, the influence of change in long term.
Figure 11, Figure 12 is the flow chart of the printing process of use deviant.
In first printing (Figure 11), after calculating side-play amount (step S4), append the addition process (step S7) of deviant, in the 2nd later printing (Figure 12), calculate side-play amount (step S13) afterwards, appending the addition process (step S19) of deviant.
The 3rd embodiment
In the 1st, the 2nd embodiment, after the print station 4 places printings, obtain feedback stage 9 places printing side-play amount and feedback, but in the 3rd embodiment, omit feedback stage, ask the printing side-play amount to feed back to next time printing at print station 4.
Though the printing device system figure of the 3rd embodiment has omitted, be exactly from the printing equipment shown in Fig. 1, saved feedback stage 9, illumination 10, the system of gamma camera 11 grades.Also have, use the gamma camera 5 that is located on the print station 4, measure and be printed on location recognition sign M2 by image processing, and the side-play amount between contraposition sign M1.
Figure 13, Figure 14 are the flow chart of the printing process of the 3rd embodiment.
In first printing shown in Figure 13, the same Fig. 7 of the processing of step S1 to S7.Do not carry non-individual body thin slice 1 after the printing immediately, discern the image (step S8) of the location recognition sign M2 that is preset in the contraposition sign M1 on the non-individual body thin slice 1 and is printed on gamma camera 5, calculate two sign M1, the side-play amount of M2 (B '-A) (step S9), the side-play amount that calculates (B '-A) be pre-stored in the memory for subsequent printings.
In the 2nd the later printing shown in Figure 14, carry out giving no longer repeat specification of prosign with the part of Fig. 8 same treatment.
At step S13, calculate the side-play amount (B-A) between contraposition sign M1 and location recognition sign M2, simultaneously, read last sign M1 from memory, the side-play amount of M2 (B '-A) (step S20).Utilize the optimum position (step S16) of these side-play amount decision galleys 7.At this moment, side-play amount (B '-A) also can be only with reference to previous data, also the mean value of available each set point number (accumulative total is average) is obtained.After this, revise the position (step S17) of galley 7, print back (step S18), do not carry non-individual body thin slice 1 immediately, the image (step S21) of the location recognition sign M2 that utilizes the contraposition sign M1 of gamma camera 5 identification non-individual body thin slices 1 and be printed on, calculate two sign M1, the side-play amount of M2 (B '-A) (step S22).With the side-play amount of calculating (B '-A) upgrade the side-play amount existed in the memory, can obtain the data accumulative total mean value of stipulated number.
In the 3rd embodiment, omitted feedback stage, only ask side-play amount, so the advantage that can do the printing equipment profile littler is arranged at print station 4 places.But can not see off immediately after the printing, must by image recognition measure contraposition sign M1 and the location recognition sign M2 that stamps between side-play amount, compare with the 1st embodiment that may to handle speed slightly slow.
At the foregoing description, as the contraposition sign M1 of non-individual body thin slice 1, once be assumed to be with the 1st pattern P 1 and printed simultaneously, but be not limited to this, for example: can be sign, or the face of carrier film be worn into the perforation in prescribed level hole with the ink-jet printer printing.So sign M1 can be provided with separately with pattern P 1.
Be not limited to ceramic layer is formed on thin slice on the carrier film as non-individual body thin slice of the present invention, for example: also can be resin films such as film printing base plate.
Method of the present invention is not limited to printing the 2nd pattern on the non-individual body thin slice behind formation the 1st pattern, also can use when for example filling conduction paste waits packing material on being pre-formed the thin slice of perforation.
In the above-described embodiments, for the example of configuration gamma camera on the print station, but also can once allow gamma camera between print station and galley, pass in and out once by every seal.
In addition, detect following information when print station 4 carries out image recognition and when feedback stage carries out image recognition and during the contraposition information of same, device is promptly stopped.
(1) when handling galley visual, detects the unusual of galley.
(2) on handling print station, during non-individual body thin slice visual, detect the seepage of the pattern P 1 that stamps in advance, scratch, galley unusual and carry unusual.
(3) when handling feedback stage visual, detect seepage, scratch, galley unusual and carry unusual with the pattern P 2 ' of galley printing.
In the above-described embodiments, as Figure 15, shown in Figure 16, once on the ceramic layer of the surface of the surface of carrier film formation formation, print electrode earlier pattern and contraposition sign, later on wire mark buries the pattern used because of the difference in height of electrode pattern generation by electrode paste and the method for location recognition sign is illustrated, but also can be opposite with it, the pottery that printing is earlier used for the difference in height of burying underground on the ceramic layer is stuck with paste pattern and the contraposition sign that produces, the electrode pattern and the location recognition sign of printing regulation later on.
At this moment also can obtain same effect.
In the foregoing description, in order to measure whenever the non-individual body chip sorption remains on the side-play amount that produces on the print station, measure the location recognition sign M2 of galley by image recognition, but if the X of supposition galley, Y, the position of θ direction is always certain, then just do not measure by image recognition, can be pre-set value, at this moment, with regard to the detection that no longer needs to do because of the image recognition of galley location recognition sign M2.
From above explanation as can be known, if adopt the related invention in the application the 1st aspect,, not the print station that absorption keeps the non-individual body thin slice, so can on the non-individual body thin slice, not add excessive tensile stress and contraposition because adjustment is the position of galley.Thus, dare can not rise and have a rest or be out of shape, can print accurately even the non-individual body thin slice forms the ceramic layer of thin layer.
With the detected printing side-play amount feedback of feedback stage, adjust the position of galley in addition, can eliminate the printing skew of the long-time variation generation of using of seal net of galley.
In aspect the application the 2nd, after omitting the feedback of the application the 1st aspect, by image processing, the side-play amount of each position distinguishing mark of obtaining each contraposition sign of non-individual body thin slice on the print station and being printed on, position according to this side-play amount FEEDBACK CONTROL galley, so, adding the effect that the application the 1st aspect relates to, printing equipment can be done compactly and miniaturization.
In the invention that aspect the application the 3rd, relates to, the side-play amount that produces during according to absorption maintenance non-individual body thin slice on print station, adjust the position of galley, so when can be offset in the printing that elimination carries skew to cause, because be not the position of adjusting print station, but the position of adjustment galley, so can not apply excessive tensile stress to the non-individual body thin slice.
Claims (9)
1. the printing process of a non-individual body thin slice is carried out wire mark on the non-individual body thin slice that sets in advance a plurality of contraposition sign M1, it is characterized in that, comprises following operation:
Preparation is held a plurality of location recognition sign M2s corresponding with described contraposition sign M1, is configured in the operation of the galley of print station top,
Make described non-individual body thin slice attract to remain on operation on the print station,
Be attracted on the described non-individual body thin slice that remains on the described print station, with the pattern of galley wire mark regulation, simultaneously in the operation of the location recognition sign M2 of non-individual body thin slice online printing,
The non-individual body thin slice is transported to feedback stage from print station, attracts to remain on the operation on the feedback stage again,
By image processing, obtain the operation of the side-play amount of each the position distinguishing mark M2 that attracts to remain on each contraposition sign M1 of the non-individual body thin slice on the feedback stage and be printed on, and
According to the side-play amount of trying to achieve at X, Y, the operation of FEEDBACK CONTROL galley position on the θ direction.
2. the printing process of a non-individual body thin slice is carried out wire mark on the non-individual body thin slice that sets in advance a plurality of contraposition sign M1, it is characterized in that, comprises following operation:
The a plurality of location recognition sign M2s corresponding with described contraposition sign M1 are held in preparation, are configured in the operation of the galley on the print station,
Make described non-individual body thin slice attract to remain on operation on the print station,
At the pattern that is being attracted on the non-individual body thin slice that remains on the described print station with galley wire mark regulation, simultaneously in the operation of the location recognition sign M2 of non-individual body thin slice online printing,
On print station, by image processing, obtain the operation of the side-play amount of each the contraposition sign M1 on the non-individual body thin slice and each position distinguishing mark M2 of being printed on, and
According to the side-play amount of obtaining at X, Y, the operation of FEEDBACK CONTROL galley position on the θ direction.
3. the printing process of non-individual body thin slice as claimed in claim 1 or 2 is characterized in that,
Before using galley wire mark predetermined pattern and location recognition sign M2 on the described non-individual body thin slice, be provided with:
By image processing, measure the operation of position of the location recognition sign M2 of the described galley be configured in described print station top,
By image processing, measure the operation of the described contraposition sign M1 position that is attracted the described non-individual body thin slice that remains on the described print station,
Obtain the operation of the side-play amount of described location recognition sign M2 that measures and contraposition sign M1, and
According to described side-play amount to described galley at X, Y, the operation of contraposition on the θ direction.
4. the printing process of non-individual body thin slice as claimed in claim 3 is characterized in that,
From the back side of non-individual body thin slice one side, carry out on described print station position measurement by the image processing of contraposition sign M1.
5. as the printing process of each described non-individual body thin slice in the claim 1 to 4, it is characterized in that,
Described non-individual body thin slice is that a kind of surperficial upper film shape ground in transparent or semitransparent carrier film forms one deck ceramic layer, is printed on the non-individual body thin slice of electrode pattern and contraposition sign in the above in advance,
Described galley is that wire mark on the surface of ceramic layer of a kind of while is stuck with paste with pottery and buried the pattern that the difference in height that produces because of described electrode pattern uses and version of location recognition sign.
6. as the printing process of each described non-individual body thin slice in the claim 1 to 4, it is characterized in that,
Described non-individual body thin slice is that a kind of surperficial upper film shape ground in transparent or semitransparent carrier film forms one deck ceramic layer, sticks with paste the pattern of printing regulation and the non-individual body thin slice of contraposition sign with pottery thereon,
Described galley is with the electrode paste electrode pattern of wire mark regulation and version of location recognition sign simultaneously on a kind of zone that is not printed on the pattern that described pottery sticks with paste on the ceramic layer surface.
7. as the printing process of each described non-individual body thin slice in the claim 1 to 6, it is characterized in that,
With every printing once or the operation values of each set point number provide feedback data in the described FEEDBACK CONTROL operation.
8. the printing equipment of a non-individual body thin slice carries out wire mark being preset with on the non-individual body thin slice of a plurality of contraposition signs, it is characterized in that, comprises
Attract to keep the print station of described non-individual body thin slice,
Attract to keep the feedback stage of described non-individual body thin slice,
The conveying device that described non-individual body thin slice is carried to feedback stage from print station,
Handle the device that measurement attraction remains on a plurality of contrapositions mark position of the non-individual body thin slice on the described print station by pattern,
Hold a plurality of location recognition signs corresponding with the contraposition sign of non-individual body thin slice, at the pattern that is attracted wire mark regulation on the non-individual body thin slice that remains on the print station, the galley of while wire mark location recognition sign,
Keep described galley, can be at X, Y, the θ direction is adjusted the print head of position,
Handle the device of measuring described galley location recognition mark position by pattern,
By image processing, obtain the device of side-play amount between each contraposition sign that is attracted the non-individual body thin slice that remains on the feedback stage and each the position distinguishing mark that is printed on, and
According to the side-play amount of obtaining at X, Y, the device of FEEDBACK CONTROL print head position on the θ direction.
9. the printing equipment of a non-individual body thin slice carries out wire mark on the non-individual body thin slice of default a plurality of contraposition signs, it is characterized in that, comprises
Attract to keep the print station of described non-individual body thin slice,
By image processing, measure the device of a plurality of contrapositions mark position that is attracted the non-individual body thin slice that remains on the described print station,
Hold a plurality of location recognition signs corresponding with the contraposition sign of non-individual body thin slice, in the pattern that wire mark is stipulated on being attracted the non-individual body thin slice that remains on the described print station, the galley of going back wire mark location recognition sign,
Keep described galley, can be at X, Y, the print head of adjustment position on the θ direction,
By image processing, measure the device of the location recognition mark position of described galley,
By image processing, obtain the device that is offset between each contraposition sign that is attracted the non-individual body thin slice that remains on the print station and each the position distinguishing mark that is printed on, and
According to the side-play amount of obtaining at X, Y, FEEDBACK CONTROL keeps the device of the print head position of galley on the θ direction.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001390904A JP3705202B2 (en) | 2001-12-25 | 2001-12-25 | Printing method and printing apparatus for continuous sheet |
| JP2001390904 | 2001-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1429707A true CN1429707A (en) | 2003-07-16 |
| CN1257798C CN1257798C (en) | 2006-05-31 |
Family
ID=19188458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02159624 Expired - Lifetime CN1257798C (en) | 2001-12-25 | 2002-12-25 | Printing method and printing device for non-individual body sheet |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3705202B2 (en) |
| CN (1) | CN1257798C (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101304880B (en) * | 2005-11-11 | 2010-10-13 | 松下电器产业株式会社 | Screen printing apparatus and screen printing method |
| CN101098784B (en) * | 2005-01-17 | 2010-12-01 | 株式会社村田制作所 | Screen printer and screen printing method |
| CN102326226A (en) * | 2009-02-23 | 2012-01-18 | 应用材料公司 | Auto-tuned screen printing process |
| CN102463735A (en) * | 2010-11-15 | 2012-05-23 | 福建捷联电子有限公司 | Printing plate for printing optical image on light guide plate and printing correction method thereof |
| CN102700237A (en) * | 2012-05-09 | 2012-10-03 | 华南理工大学 | Full-automatic vision silicon wafer printing device with double platforms |
| TWI462670B (en) * | 2009-02-23 | 2014-11-21 | Applied Materials Inc | Method and apparatus for screen printing a multiple layer pattern |
| CN104354453A (en) * | 2014-10-21 | 2015-02-18 | 吴江迈为技术有限公司 | Efficient printing method and device for solar battery piece |
| CN106739442A (en) * | 2017-01-06 | 2017-05-31 | 京东方科技集团股份有限公司 | The alignment method and alignment device of a kind of silk-screen printing technique |
| CN111204144A (en) * | 2019-12-23 | 2020-05-29 | 江西沃格光电股份有限公司深圳分公司 | Printing method and apparatus, electronic device, computer-readable storage medium |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100745512B1 (en) | 2006-05-02 | 2007-08-02 | 삼성테크윈 주식회사 | Method of printing pattern on flexible printed circuit board |
| JP4356769B2 (en) * | 2007-05-22 | 2009-11-04 | パナソニック株式会社 | Screen printing apparatus and screen printing method |
| FR2943947B1 (en) * | 2009-04-06 | 2011-12-16 | Commissariat Energie Atomique | METHOD FOR PRINTING USING A DRIVER IN TWO SUPERIMPOSED LAYERS |
| KR101181196B1 (en) | 2010-03-25 | 2012-09-18 | 엘지이노텍 주식회사 | Printer for flexible film |
| JP2011124588A (en) * | 2011-01-14 | 2011-06-23 | Ngk Insulators Ltd | Method of manufacturing piezoelectric/electrostrictive device |
| KR101456323B1 (en) | 2011-05-20 | 2014-11-03 | 주식회사 윌리언스 | Apparatus for Menufacturing a In-mould Printing Film |
| JP5793457B2 (en) * | 2012-03-26 | 2015-10-14 | 株式会社Ｓｃｒｅｅｎホールディングス | Transfer method and transfer apparatus |
| US9216544B2 (en) * | 2012-12-21 | 2015-12-22 | Stratasys, Inc. | Automated additive manufacturing system for printing three-dimensional parts, printing farm thereof, and method of use thereof |
| JP2015047715A (en) * | 2013-08-30 | 2015-03-16 | 株式会社桜井グラフィックシステムズ | Printing position adjustment device of screen printer |
| KR102182378B1 (en) * | 2018-12-24 | 2020-11-24 | 한국기계연구원 | Roll-to-roll printing unit and method of printing using the same |
| WO2022064625A1 (en) * | 2020-09-25 | 2022-03-31 | 株式会社Fuji | Computing device and computation method |
-
2001
- 2001-12-25 JP JP2001390904A patent/JP3705202B2/en not_active Expired - Fee Related
-
2002
- 2002-12-25 CN CN 02159624 patent/CN1257798C/en not_active Expired - Lifetime
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101098784B (en) * | 2005-01-17 | 2010-12-01 | 株式会社村田制作所 | Screen printer and screen printing method |
| CN101304880B (en) * | 2005-11-11 | 2010-10-13 | 松下电器产业株式会社 | Screen printing apparatus and screen printing method |
| CN102326226B (en) * | 2009-02-23 | 2016-09-14 | 应用材料公司 | Automatically the silk-screen printing technique adjusted |
| CN102326226A (en) * | 2009-02-23 | 2012-01-18 | 应用材料公司 | Auto-tuned screen printing process |
| CN106183374B (en) * | 2009-02-23 | 2021-07-27 | 应用材料公司 | Automatic deposition process |
| TWI462670B (en) * | 2009-02-23 | 2014-11-21 | Applied Materials Inc | Method and apparatus for screen printing a multiple layer pattern |
| TWI473549B (en) * | 2009-02-23 | 2015-02-11 | Applied Materials Inc | Autotuned screen printing process |
| CN106183374A (en) * | 2009-02-23 | 2016-12-07 | 应用材料公司 | A kind of automatization depositing operation |
| US9204556B2 (en) | 2009-02-23 | 2015-12-01 | Applied Materials, Inc. | Autotuned screen printing process |
| CN102463735A (en) * | 2010-11-15 | 2012-05-23 | 福建捷联电子有限公司 | Printing plate for printing optical image on light guide plate and printing correction method thereof |
| CN102700237B (en) * | 2012-05-09 | 2015-08-26 | 华南理工大学 | A kind of full-automatic vision silicon chip printing equipment with Double tabletop |
| CN102700237A (en) * | 2012-05-09 | 2012-10-03 | 华南理工大学 | Full-automatic vision silicon wafer printing device with double platforms |
| CN104354453A (en) * | 2014-10-21 | 2015-02-18 | 吴江迈为技术有限公司 | Efficient printing method and device for solar battery piece |
| CN104354453B (en) * | 2014-10-21 | 2017-02-08 | 苏州迈为科技股份有限公司 | Efficient printing method and device for solar battery piece |
| CN106739442A (en) * | 2017-01-06 | 2017-05-31 | 京东方科技集团股份有限公司 | The alignment method and alignment device of a kind of silk-screen printing technique |
| CN106739442B (en) * | 2017-01-06 | 2019-07-30 | 京东方科技集团股份有限公司 | A kind of alignment method and alignment device of silk-screen printing technique |
| CN111204144A (en) * | 2019-12-23 | 2020-05-29 | 江西沃格光电股份有限公司深圳分公司 | Printing method and apparatus, electronic device, computer-readable storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1257798C (en) | 2006-05-31 |
| JP3705202B2 (en) | 2005-10-12 |
| JP2003191432A (en) | 2003-07-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1257798C (en) | Printing method and printing device for non-individual body sheet | |
| EP3442011B1 (en) | Method and apparatus for manufacturing electronic device using device chip | |
| CN1115945C (en) | Method and apparatus for assembling integral circuit units | |
| CN103917055B (en) | Touch pad laminating alignment system based on machine vision | |
| EP1705692A3 (en) | Method of manufacturing a semiconductor device | |
| CN1649102A (en) | Protective tape joining method and its apparatus as well as protective tape separating method and its apparatus | |
| CN1525504A (en) | Method for manufacturing ceramic electronic component and gravure printing method | |
| CN1849038A (en) | Manufacturing installation of substrate for element mounting | |
| CN1933700A (en) | Wiring forming system and method | |
| JP4153755B2 (en) | Solar panel color unevenness inspection device | |
| JP4337001B2 (en) | Conductive pattern forming method, conductive pattern forming apparatus, and substrate for solar cell | |
| CN107645904A (en) | A kind of chip mounter | |
| CN1661771A (en) | Method for aligning wafer | |
| KR102066181B1 (en) | Film protective holder removal device | |
| KR101592246B1 (en) | System for fabricating light emitting diode package | |
| JP2007315882A (en) | Apparatus and method for positioning substrate, and device and method for manufacturing color filter | |
| CN113380661B (en) | Chip mounting apparatus and method for manufacturing semiconductor device | |
| CN207399761U (en) | A kind of chip mounter | |
| KR101600452B1 (en) | Apparatus for fabricating light emitting diode package | |
| JP2560042B2 (en) | Semiconductor wafer mounting device | |
| JP4142233B2 (en) | Component adsorption head, component mounting apparatus and component mounting method using the same | |
| WO2020147358A1 (en) | Multi-substrate alignment printing method and alignment printing machine | |
| JPH09186193A (en) | Method and apparatus for mounting electronic component | |
| CN1159957C (en) | Method and apparatus for mfg. flexible element substrate | |
| CN1287771A (en) | Manufacturing method of wiring circuit board, and wiring circuit board |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20060531 |
|
| CX01 | Expiry of patent term |