CN102586758A - 高密度等离子机台的预沉积方法 - Google Patents
高密度等离子机台的预沉积方法 Download PDFInfo
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- CN102586758A CN102586758A CN2012100816650A CN201210081665A CN102586758A CN 102586758 A CN102586758 A CN 102586758A CN 2012100816650 A CN2012100816650 A CN 2012100816650A CN 201210081665 A CN201210081665 A CN 201210081665A CN 102586758 A CN102586758 A CN 102586758A
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CN 201210081665 CN102586758B (zh) | 2012-03-23 | 2012-03-23 | 高密度等离子机台的预沉积方法 |
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CN 201210081665 CN102586758B (zh) | 2012-03-23 | 2012-03-23 | 高密度等离子机台的预沉积方法 |
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CN102586758A true CN102586758A (zh) | 2012-07-18 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105304551A (zh) * | 2015-09-25 | 2016-02-03 | 上海华力微电子有限公司 | 一种hdp工艺淀积sti薄膜时减少颗粒的方法 |
CN109841475A (zh) * | 2017-11-28 | 2019-06-04 | 北京北方华创微电子装备有限公司 | 预处理方法及晶片处理方法 |
CN113445005A (zh) * | 2021-05-21 | 2021-09-28 | 南昌大学 | 一种低应力TiW薄膜的制备方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101451238A (zh) * | 2007-11-30 | 2009-06-10 | 中芯国际集成电路制造(上海)有限公司 | 在腔体内壁形成保护膜的预沉积方法 |
CN102087955A (zh) * | 2009-12-04 | 2011-06-08 | 中芯国际集成电路制造(上海)有限公司 | 改善等离子体工艺中反应腔室内部颗粒状况的方法 |
CN102110635A (zh) * | 2009-12-23 | 2011-06-29 | 中芯国际集成电路制造(上海)有限公司 | 减少hdp cvd工艺中的等离子体诱发损伤的方法 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101451238A (zh) * | 2007-11-30 | 2009-06-10 | 中芯国际集成电路制造(上海)有限公司 | 在腔体内壁形成保护膜的预沉积方法 |
CN102087955A (zh) * | 2009-12-04 | 2011-06-08 | 中芯国际集成电路制造(上海)有限公司 | 改善等离子体工艺中反应腔室内部颗粒状况的方法 |
CN102110635A (zh) * | 2009-12-23 | 2011-06-29 | 中芯国际集成电路制造(上海)有限公司 | 减少hdp cvd工艺中的等离子体诱发损伤的方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105304551A (zh) * | 2015-09-25 | 2016-02-03 | 上海华力微电子有限公司 | 一种hdp工艺淀积sti薄膜时减少颗粒的方法 |
CN109841475A (zh) * | 2017-11-28 | 2019-06-04 | 北京北方华创微电子装备有限公司 | 预处理方法及晶片处理方法 |
CN109841475B (zh) * | 2017-11-28 | 2021-06-08 | 北京北方华创微电子装备有限公司 | 预处理方法及晶片处理方法 |
CN113445005A (zh) * | 2021-05-21 | 2021-09-28 | 南昌大学 | 一种低应力TiW薄膜的制备方法 |
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