CN102569370B - BiCMOS工艺中垂直寄生型PNP器件及制造方法 - Google Patents
BiCMOS工艺中垂直寄生型PNP器件及制造方法 Download PDFInfo
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JP2004079719A (ja) * | 2002-08-15 | 2004-03-11 | Nec Electronics Corp | 半導体装置及びその製造方法 |
US7488662B2 (en) * | 2005-12-13 | 2009-02-10 | Chartered Semiconductor Manufacturing, Ltd. | Self-aligned vertical PNP transistor for high performance SiGe CBiCMOS process |
CN101192537A (zh) * | 2006-11-24 | 2008-06-04 | 上海华虹Nec电子有限公司 | 垂直型双极晶体管的制作工艺方法及垂直型双极晶体管 |
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