CN102565091B - 检查装置及检查方法 - Google Patents
检查装置及检查方法 Download PDFInfo
- Publication number
- CN102565091B CN102565091B CN201110242040.3A CN201110242040A CN102565091B CN 102565091 B CN102565091 B CN 102565091B CN 201110242040 A CN201110242040 A CN 201110242040A CN 102565091 B CN102565091 B CN 102565091B
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- object thing
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
Claims (17)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010167385 | 2010-07-26 | ||
JP167385/2010 | 2010-07-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102565091A CN102565091A (zh) | 2012-07-11 |
CN102565091B true CN102565091B (zh) | 2015-05-20 |
Family
ID=45493354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110242040.3A Active CN102565091B (zh) | 2010-07-26 | 2011-07-26 | 检查装置及检查方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8854615B2 (zh) |
JP (1) | JP5530984B2 (zh) |
CN (1) | CN102565091B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014056222A (ja) * | 2012-09-14 | 2014-03-27 | Japan Display Inc | 表示装置及びカバー部材 |
JP5923417B2 (ja) * | 2012-09-14 | 2016-05-24 | 株式会社ジャパンディスプレイ | 表示装置及びカバー部材 |
US10474569B2 (en) * | 2014-12-29 | 2019-11-12 | Toshiba Memory Corporation | Information processing device including nonvolatile cache memory and processor |
JP7051287B2 (ja) * | 2016-12-05 | 2022-04-11 | 株式会社ソニー・インタラクティブエンタテインメント | システム、治具、および情報処理方法 |
EP3543681A1 (de) * | 2018-03-23 | 2019-09-25 | Saint-Gobain Glass France | Detektionssystem zur detektion von spezifischen kleinen organischen teilchen auf unbeschichtetem oder beschichtetem glas mit hohem durchsatz |
US20200364442A1 (en) * | 2019-05-15 | 2020-11-19 | Getac Technology Corporation | System for detecting surface pattern of object and artificial neural network-based method for detecting surface pattern of object |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2470821Y (zh) * | 2000-09-05 | 2002-01-09 | 奥林巴斯光学工业株式会社 | 基片检验装置 |
EP1424551A1 (en) * | 2001-07-27 | 2004-06-02 | Nippon Sheet Glass Co., Ltd. | Method for evaluating contamination of object surface and imaging box used for this method |
JP2005181070A (ja) * | 2003-12-18 | 2005-07-07 | Nippon Sheet Glass Co Ltd | 透明板状体の欠点検出方法及び欠点検出装置 |
JP2009150772A (ja) * | 2007-12-20 | 2009-07-09 | Nikon Corp | 基板検査装置、およびマスク用基板の製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09218162A (ja) | 1996-02-08 | 1997-08-19 | Olympus Optical Co Ltd | 表面欠陥検査装置 |
JPH1164970A (ja) * | 1997-08-22 | 1999-03-05 | Gokou Internatl Corp:Kk | 高倍率撮影専用カメラ |
JPH11153515A (ja) * | 1997-11-20 | 1999-06-08 | Canon Inc | カラーフィルタの検査装置及び検査方法 |
JP2000097867A (ja) * | 1998-09-25 | 2000-04-07 | Hoya Optics Kk | 透光性基板の欠陥検出装置及び方法 |
GB2415776B (en) * | 2004-06-28 | 2009-01-28 | Carglass Luxembourg Sarl Zug | Investigation of vehicle glazing panels |
JP2007198953A (ja) * | 2006-01-27 | 2007-08-09 | Nippon System Group:Kk | フィルムの目視検査装置 |
JP4719284B2 (ja) * | 2008-10-10 | 2011-07-06 | トヨタ自動車株式会社 | 表面検査装置 |
-
2011
- 2011-07-06 JP JP2011150150A patent/JP5530984B2/ja active Active
- 2011-07-11 US US13/179,767 patent/US8854615B2/en active Active
- 2011-07-26 CN CN201110242040.3A patent/CN102565091B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2470821Y (zh) * | 2000-09-05 | 2002-01-09 | 奥林巴斯光学工业株式会社 | 基片检验装置 |
EP1424551A1 (en) * | 2001-07-27 | 2004-06-02 | Nippon Sheet Glass Co., Ltd. | Method for evaluating contamination of object surface and imaging box used for this method |
JP2005181070A (ja) * | 2003-12-18 | 2005-07-07 | Nippon Sheet Glass Co Ltd | 透明板状体の欠点検出方法及び欠点検出装置 |
JP2009150772A (ja) * | 2007-12-20 | 2009-07-09 | Nikon Corp | 基板検査装置、およびマスク用基板の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102565091A (zh) | 2012-07-11 |
US8854615B2 (en) | 2014-10-07 |
JP5530984B2 (ja) | 2014-06-25 |
JP2012047729A (ja) | 2012-03-08 |
US20120019817A1 (en) | 2012-01-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C53 | Correction of patent of invention or patent application | ||
CB02 | Change of applicant information |
Address after: Saitama Prefecture, Japan Applicant after: Japan Display East Inc. Address before: Saitama Prefecture, Japan Applicant before: Toshiba Mobile Display Co., Ltd. |
|
COR | Change of bibliographic data |
Free format text: CORRECT: APPLICANT; FROM: TOSHIBA MOBILE DISPLAY CO., LTD. TO: JAPAN DISPLAY MIDDLE INC. |
|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: JAPAN DISPLAY, INC. Free format text: FORMER OWNER: JAPAN DISPLAY CENTRAL INC. Effective date: 20140401 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20140401 Address after: Tokyo, Japan Applicant after: Japan Display Central Inc. Address before: Saitama Prefecture, Japan Applicant before: Japan Display East Inc. |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant |