CN102548673A - Cleaning nozzle and dust removal device equipped with same - Google Patents
Cleaning nozzle and dust removal device equipped with same Download PDFInfo
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- CN102548673A CN102548673A CN2010800438571A CN201080043857A CN102548673A CN 102548673 A CN102548673 A CN 102548673A CN 2010800438571 A CN2010800438571 A CN 2010800438571A CN 201080043857 A CN201080043857 A CN 201080043857A CN 102548673 A CN102548673 A CN 102548673A
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- dust
- suction
- suction nozzle
- handled object
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
Abstract
A cleaning nozzle is equipped with a suction nozzle, having a suction opening formed at one end and a discharge opening at the other end and has an internal airflow path, and which detaches dust adhering to the surface of an object to be treated with a suction airflow that sucks the dust in from the suction opening and discharges the dust from the discharge section. Part of the internal surface of the suction nozzle is provided with an adhesive layer for capturing dust.
Description
Technical field
The present invention relates to clean mouth and remove device with the dust that possesses this cleaning mouth.
Background technology
Generally; In the manufacturing of display panels, semiconductor devices etc.; Handled objects such as display panels, glass substrate, wafer substrate are carried out film forming processing, etch processes; So when dust such as particle were attached to this handled object surperficial, this became products panel, the bad reason of product chips.Therefore, use will be attached to the dust that the dust on the surface of handled object removes and remove device.
For example, remove device as the dust of gas pumping type, known possess the maintenance platform that keeps handled object and the device (for example, with reference to patent documentation 1) of suction nozzle cylindraceous.This dust is removed the exhaust outlet of suction nozzle of device through negative pressure unit bindings such as pipe arrangement and dust incorporating section etc. and vavuum pumps; Driving through this negative pressure unit; Generation is inhaled near the suction airstream in the suction inlet of the suction nozzle of handled object, and the dust on suction handled object surface also is removed.
The prior art document
Patent documentation
Patent documentation 1: the spy opens flat 5-156033 communique
Summary of the invention
The problem that invention will solve
As above-mentioned pass through suction and remove the dust of dust and remove in the device, be drawn into the dust incorporating section for the dust that makes the handled object surface is floating from suction nozzle, need big suction force.Therefore, when the suction force of negative pressure unit is little and insufficient, the lip-deep dust of handled object remove the performance step-down.But when the vavuum pump that suction force is big was used as negative pressure unit, installation cost uprised.
The present invention accomplishes in view of such aspect, and its main purpose is: even little suction force also makes the performance of removing of the dust in the handled object surface improve.
The scheme that is used to deal with problems
In order to reach above-mentioned purpose, the present invention is that at least a portion at the suction nozzle inner face is provided with the adhesion layer that is used to catch dust.
Particularly; The the 1st to the 6th invention will be cleaned mouth as object, tell about following technical scheme, and this cleaning mouth possesses suction nozzle; This suction nozzle has gas flow path in inside; And at one end be formed with suction inlet, and be formed with exhaust outlet, utilize from above-mentioned suction inlet suction and from the suction airstream that above-mentioned exhaust outlet is discharged the dust on the surface that is attached to handled object is broken away from the other end.
That is, the 1st invention is characterised in that, is provided with the adhesion layer that is used to catch above-mentioned dust at least a portion of above-mentioned suction nozzle inner face.
The 2nd the invention be characterised in that, the 1st the invention the cleaning mouth in, also possess rectification unit, this rectification unit make above-mentioned suction airstream in the shape of a spiral shape ground along above-mentioned suction nozzle inner face.
The 3rd invention is characterised in that; In the cleaning mouth of the 2nd invention; Above-mentioned rectification unit is the spray nozzle of ejiction opening that is formed with the ejection Compressed Gas on the top, the Compressed Gas emission direction of above-mentioned ejiction opening make Compressed Gas along above-mentioned suction nozzle inner face towards setting for respect to this suction nozzle inner face.
The 4th invention is characterised in that in the cleaning mouth of each in the 1st to the 3rd invention, the above-mentioned gas stream forms towards the mode that above-mentioned exhaust side narrows down gradually from above-mentioned suction oral-lateral with flow path area more inward more narrowly.
The 5th invention is characterised in that in the cleaning mouth of the 4th invention, the above-mentioned gas stream forms the truncated cone shape that the stream diameter little by little dwindles towards above-mentioned exhaust side from above-mentioned suction oral-lateral.
The 6th invention is characterised in that in the cleaning mouth of each in the 1st to the 5th invention, above-mentioned adhesion layer comprises silicone-based adhesion material or acrylic acid series adhesion material.
In addition, the 7th invention relates to the dust that possesses the cleaning mouth that is made as above-mentioned object and removes device, it is characterized in that possessing: the cleaning mouth of each in the 1st to the 6th invention; Negative pressure unit, it is connected to the exhaust outlet of above-mentioned suction nozzle through pipe arrangement, makes the inside of above-mentioned suction nozzle become negative pressure state through driving; And maintenance platform; It keeps handled object; Above-mentioned dust is removed device and is constituted: under the suction inlet that the makes above-mentioned suction nozzle state corresponding with the handled object that remains in above-mentioned maintenance platform; Driving through above-mentioned negative pressure unit makes the inside of above-mentioned suction nozzle become negative pressure state and produces suction airstream, utilizes above-mentioned suction airstream that the dust on the surface that is attached to above-mentioned handled object is broken away from, and makes this dust be attached to the adhesion layer of suction nozzle inner face and catches this dust.
-effect-
Then, effect of the present invention is described.
According to the 1st to the 6th invention, the dust that breaks away from from handled object is inhaled into the inside of suction nozzle and is attached to the adhesion layer of suction nozzle inner face and is hunted down.Therefore, and the situation that dust is drawn into the incorporating section is compared, needn't be sucked dust with big suction force from suction nozzle.Therefore, even little suction force also can make the performance of removing of the lip-deep dust of handled object improve.
According to the 2nd invention, under the situation of the dust that sucks the handled object surface, utilize rectification unit with suction airstream in the shape of a spiral shape ground along the mode rectification of suction nozzle inner face.Thus; Suction airstream be from suck oral-lateral under the situation of the linearity of exhaust side only the part of suction airstream along the suction nozzle inner face; Relative therewith, the major part of suction airstream is along the suction nozzle inner face, and along the distance of suction nozzle inner face elongated the amount of suction airstream rotation.In view of the above, the dust that rises of shape floor-covering roll is caught with the adhesion layer that suction airstream is inhaled into the mouth inner face effectively in the shape of a spiral, and the dust on handled object surface is removed well.
According to the 3rd invention; Under the situation of the dust that sucks the handled object surface; Utilize spray nozzle so that its mode along the suction nozzle inner face sprays Compressed Gas, thus the suction airstream of the inside of suction nozzle with shape ground in the shape of a spiral along the mode of suction nozzle inner face by rectification.Therefore, even constitute rectification unit by spray nozzle like this, also can make suction airstream play the action effect of the 2nd invention particularly along the suction nozzle inner face in shape ground in the shape of a spiral.
And, constituting with spray nozzle under the situation of rectification unit, for example can with spray nozzle is inserted into from the outside side of suction nozzle inside etc. simple constitute realize rectification unit, therefore can simplify the formation of cleaning mouth.
According to the 4th invention, gas flow path forms more inward more narrowly, so the velocity ratio of the suction airstream of exhaust side (downstream) sucks oral-lateral (upstream side) rising.Thus; Utilize rectification unit make easily suction airstream in the shape of a spiral shape ground along the suction nozzle inner face; And utilize and be accompanied by the flow velocity that raises towards exhaust side and the revolving force of the suction airstream that increases; The dust of rolling is urged to the suction nozzle inner face side, therefore can make the adhesion layer of suction nozzle inner face catch dust reliably.
According to the 5th invention; Gas flow path forms truncated cone shape; Therefore the situation that forms other shapes such as triangular frustum shape, tetragonous cone table shape with this gas flow path is compared; Can utilize rectification unit do not produce the turbulent flow situation under make suction airstream easily in the shape of a spiral shape ground can make the adhesion layer of suction nozzle inner face further catch dust reliably along the suction nozzle inner face.
Therefore according to the 6th invention, silicone-based adhesion material or acrylic acid series adhesion material are general adhesion materials, can utilize the adhesion of two-sided tape for example, the coating of brush etc. at the suction nozzle inner face adhesion layer to be set simply.
According to the 7th invention, utilize suction airstream to make to be attached to the dust on the surface of handled object to break away from and the adhesion layer that is inhaled into the mouth inner face is caught, the dust incorporating section that therefore need not take in the dust that utilizes suction nozzle to suck.Therefore, can simplify the formation that dust is removed device.
And, because the dust that suction is removed is inhaled into the trapped inside of mouth, so can utilize the replacing of suction nozzle, adhesion layer to carry out the maintenance that dust is removed device simply.
The invention effect
According to the present invention, because be provided with the adhesion layer that is used to catch dust, so even little suction force also can make the performance of removing of the lip-deep dust of handled object improve at least a portion of suction nozzle inner face.Consequently: the rising of ability restraining device cost, and can remove the dust on handled object surface well, suppress the bad generation of product that causes owing to dust is residual.
Description of drawings
Fig. 1 is the stereogram that dust that embodiment roughly is shown is removed device.
Fig. 2 roughly illustrates to the dust of large-area handled object to remove the stereogram of processing.
Fig. 3 roughly illustrates to the dust of the handled object of small size to remove the stereogram of processing.
Fig. 4 is the stereogram that the suction nozzle of variation 1 roughly is shown.
Fig. 5 is the stereogram that the suction nozzle of variation 2 roughly is shown.
Fig. 6 is the stereogram that dust that variation roughly is shown is removed device.
The specific embodiment
Below, specify embodiment of the present invention based on accompanying drawing.In addition, the present invention is not limited to following embodiment.
" working of an invention mode "
Fig. 1 is the stereogram that dust that embodiment of the present invention roughly is shown is removed device A.In addition, in Fig. 1, illustrate the big handled object of suction inlet 11a that area is removed the cleaning mouth 10 among the device A than dust and placed situation about keeping on the platform 23 in 1 year.
The dust of this embodiment is removed the dust such as particle that device A for example is used to remove the surface of handled objects such as semiconductor substrates such as being attached to display panels, glass substrate, wafer or chip.
< dust is removed the summary formation of device A >
As shown in Figure 1, dust is removed device A and is possessed: cleaning mouth 10, and it has the suction nozzle 11 that sucks the dust on the surface that is attached to handled object 1 from the top; As the vavuum pump 22 of negative pressure unit, it is connected to the rear end of suction nozzle 11 through blast pipe (pipe arrangement) 20; And keeping platform 23, it keeps handled object 1.
< formation of cleaning mouth 10 >
This suction nozzle 11 forms the tubular of the truncated cone that diameter little by little dwindles towards the rear end from the top.Imitate the shape of this suction nozzle 11, gas flow path 12 also forms the truncated cone shape that diameter little by little dwindles towards exhaust outlet 11b from suction inlet 11a, and flow path area is with along with the mode that narrows down gradually towards pumping direction is narrow more more inward.
And,, spread all over and be provided with the adhesion layer 13 (Fig. 1 illustrates with thick dashed line) that is used for catching dust full week in the suction inlet 11a of suction nozzle 11 inner faces side the latter half.This adhesion layer 13 for example comprises silicone-based adhesion material or acrylic acid series adhesion material, can be located at the inner face of suction nozzle 11 through the adhesion of two-sided tape, the coating of brush etc. simply.
< formation of vavuum pump 22 >
< formation that keeps platform 23 >
Keep platform 23 to possess not shown rotation travel mechanism, lifting moving mechanism and horizontal mobile mechanism, constitute: make and carry the cleaning mouth 10 that places top handled object 1 with respect to being disposed at the top and can relatively move.In addition, on keep platform 23, be formed with not shown a plurality of adsorption orifices, the through hole that links to each other with these each adsorption orifices is connected with vavuum pump equal vacuum pump unit.And, keep platform 23 to constitute:, to adsorb maintenance to carrying the handled object of putting 1 through the driving of vacuum draw unit.
-dust remove method-
Then, on one side enumerate an example on one side with reference to Fig. 2 and Fig. 3 and explain that the above-mentioned dust of use removes the method that dust that device A will be attached to the surface of handled object 1,2 is removed.Fig. 2 roughly illustrates to the dust of the area handled object 1 bigger than the suction inlet 11a of suction nozzle 11 to remove the stereogram of processing, and Fig. 3 roughly illustrates to the dust of the area handled object 2 littler than the suction inlet 11a of suction nozzle 11 to remove the stereogram of processing.In addition, the arrow among Fig. 2 and Fig. 3 illustrates the flow direction of air-flow.
< dust to the area handled object 1 bigger than suction inlet 11a is removed processing >
Carrying out dust and removing under the situation of processing to large-area handled object 1; Handled object 1 and cleaning mouth 10 are relatively moved; By the surface of the top (suction inlet 11a) of suction nozzle 11 scanning handled object 1, thus the dust suction of 1 whole of handled object is removed.
At first; As shown in Figure 1; After utilizing transfer robot etc. that handled object was placed in 1 year to keep on the platform 23; Driving is connected to the vacuum draw unit of this maintenance platform 23, keeps the air between platform 23 and the handled object 1 from each adsorption orifice ejection thus, handled object 1 absorption is remained in keep platform 23 surfaces.
Then; Driven in rotation travel mechanism, lifting moving mechanism and horizontal mobile mechanism, thus with cleaning mouth 10 (suction nozzle 11) be disposed at handled object 1 surface the scanning starting position mode and make with the mode that the distance of separation h on suction nozzle 11 tops and handled object 1 surface becomes the 3mm degree and to keep platform 23 to move.
Then, drive the vavuum pump 22 that is connected to the rear end (exhaust outlet 11b) of suction nozzle 11 through blast pipe 20, the inside (gas flow path 12) with suction nozzle 11 is made as negative pressure state thus, produces atmosphere is drawn into the suction force in the suction inlet 11a.Follow in this, drive the gas supply department 18 that is connected to the rear end (gas introduction port 15b) of spray nozzle 15 through feed tube 17, the top (gas vent 15a) from spray nozzle 15 sprays Compressed Gas thus.Thus, as shown in Figure 2, the suction airstream 19 of the inside of suction nozzle 11 with shape ground in the shape of a spiral along the mode of mouth inner face by rectification.At this moment, in this embodiment, gas flow path 12 forms truncated cone shape more inward more narrowly, thus suction airstream 19 can not spread all over from suction inlet 11a until the integral body of exhaust outlet 11b get muddled by rectification.
Like this, drive vavuum pump 22 and gas supply department 18 respectively, be utilized in dust 5 that the suction force that produces in the suction nozzle 11 will be attached to handled object 1 surface thus in atmosphere is drawn into suction inlet 11a.The dust 5 that is inhaled into follow suction airstream 19 with along the mode of suction nozzle 11 inner faces to exhaust outlet 11b side in the shape of a spiral the shape floor-covering roll rise, in its way, caught by adhesion layer 13.
And; Make suction nozzle 11 continue to carry out under the state of suction action; Driven in rotation travel mechanism and horizontal mobile mechanism; Make to keep platform 23 to move, thereby on one side make the top of this suction nozzle 11 keep whole of distance of separation h one scan edge handled object 1, whole dust 5 suctions that will be attached to handled object 1 are thus removed.Then, each adsorption orifice that keeps platform 23 is removed the absorption of handled object 1, from keeping platform 23 surface isolation handled objects 1, finished to remove processing thus to the dust of this handled object 1.
< dust to the area handled object 2 littler than suction inlet 11a is removed processing >
Carry out dust at handled object 2 and remove under the situation of processing, cover handled object 2 with suction nozzle 11 dust 5 suctions on handled object 2 surfaces are removed to small size.
At first, to remove the situation of processing same with large-area handled object 1 being carried out dust, handled object 2 absorption are remained in keep platform 23 above.Then, driven in rotation travel mechanism, lifting moving mechanism and horizontal mobile mechanism, as shown in Figure 3 thus, make suction nozzle 11 cover handled object 2 with suction inlet 11a with the mode that keeps platform 23 surfaces to contact.
And, through driving vavuum pump 22 and gas supply department 18 respectively, make suction nozzle 11 produce suction forces, and produce in the shape of a spiral shape ground in the inside of this suction nozzle 11 along the suction airstream 19 of mouth inner face.Thus, the dust 5 that is attached to handled object 2 surface is blown by suction airstream 19 and flies and dance in the air, and shape ground is rolled-up along suction nozzle 11 inner faces in the shape of a spiral to exhaust outlet 11b with suction airstream 19, is caught by adhesion layer 13 on the way at it.Then, to remove the situation of processing same with large-area handled object 1 being carried out dust, separates handled objects 2 from keeping platform 23, finishes to remove processing to the dust of this handled object 2.
As stated, can utilize dust to remove device A removes dust 5 suctions on handled object 1,2 surfaces.
The effect of-embodiment-
Therefore; Dust according to the cleaning mouth 10 that possesses this embodiment is removed device A; The latter half at suction nozzle 11 inner faces is provided with the adhesion layer 13 that is used to catch dust 5, can utilize adhesion layer 13 to catch the dust 5 that sucks from suction inlet 11a through suction airstream 19 at suction nozzle 11 inner faces thus.
Particularly, in this embodiment, under the situation of the dust 5 that sucks handled object 1,2 surfaces, suction airstream 19 utilize spray nozzle with shape ground in the shape of a spiral along the mode of suction nozzle 11 inner faces by rectification.Thus; Suction airstream 19 be from suction inlet 11a side under the situation of the linearity of exhaust outlet 11b side only the part of suction airstream along suction nozzle 11 inner faces; Relative therewith; The major part of suction airstream 19 is along suction nozzle 11 inner faces, and along the distance of suction nozzle 11 inner faces elongated the amount of suction airstream 19 rotations.
And; Gas flow path 12 forms truncated cone shape more inward more narrowly; Therefore the velocity ratio suction inlet 11a side (upstream side) of the suction airstream 19 of exhaust outlet 11b side (downstream) raises; Thus, utilization is accompanied by the revolving force of the suction airstream 19 that increases towards the flow velocity of suction airstream 19, and the dust of rolling 5 is urged to suction nozzle 11 inner face side.
The dust 5 that to sum up, shape floor-covering roll is in the shape of a spiral risen is caught with the adhesion layer that suction airstream 19 is inhaled into mouth 11 inner faces effectively.Therefore, even little suction force also can make the performance of removing of handled object 1,2 lip-deep dust 5 improve.Consequently: can be made as negative pressure unit by or not suction force is not big vavuum pump, the rising of ability restraining device cost, and can remove the dust 5 on handled object 1,2 surfaces well, suppress owing to the bad generation of the dust 5 residual products that cause.
In addition, the dust 5 removed of suction is inhaled into the trapped inside of mouth 11, so the formation that dust is removed device A can be simplified in the dust incorporating section that need not take in the dust 5 that utilizes suction nozzle 11 to suck.And, can utilize more bringing of suction nozzle 11, adhesion layer 13 to carry out the maintenance that dust is removed device A simply.
In addition, in this embodiment, the latter half that is made as at suction nozzle 11 inner faces is provided with adhesion layer 13, but the invention is not restricted to this.Fig. 4 and Fig. 5 are the stereograms of suction nozzle 11 that the variation of this embodiment roughly is shown respectively.As shown in Figure 4; Adhesion layer 13 can spread all on suction nozzle 11 inner face devices spaced apart ground is arranged to top ends (suction inlet 11a side sections) and middle part full week; As shown in Figure 5, can be arranged to extend to the band shape of exhaust outlet 11b at suction nozzle 11 inner faces from suction inlet 11a along bus.In addition, adhesion layer 13 can be located at the integral body of suction nozzle 11 inner faces.
In addition, in this embodiment, shape ground is along the rectification unit of suction nozzle 11 inner faces in the shape of a spiral to utilize 1 spray nozzle 15 to constitute to make suction airstream 19, but that spray nozzle 15 can be provided with is a plurality of.If constitute rectification units with a plurality of spray nozzles 15, can make suction airstream 19 more reliably in the shape of a spiral shape ground along suction nozzle 11 inner faces the revolving force of suction airstream 19 is increased, blow the surperficial dust 5 of handled object 2 that flies small size more reliably.
In addition; The gas flow path 12 that is made as suction nozzle 11 forms truncated cone shape; But the gas flow path 12 of suction nozzle 11 can form towards the mode that pumping direction narrows down gradually with the part of flow path area more inward more narrowly; For example, top ends forms the truncated cone shape that the stream diameter dwindles towards exhaust outlet 11b side from suction inlet 11a, and other one of rear end side forms isometrical tubular etc.And in this case, the inner face of suction nozzle 11 parts that preferably form inward more at gas flow path 12 is provided with adhesion layer 13 more narrowly, and be provided with make suction airstream 19 in the shape of a spiral shape ground along the rectification units such as spray nozzle 15 of the inner face of these suction nozzle 11 parts.If constitute like this; Then same with above-mentioned embodiment; Can the dust 5 on handled object 1,2 surface be rolled with suction airstream 19 with the mode along the inner face of the suction nozzle that forms inward more 11 parts more narrowly in the shape of a spiral shape, utilize adhesion layer 13 to catch effectively.
In addition; Except that above-mentioned; The gas flow path 12 of suction nozzle 11 can form and spread all over from suction inlet 11a to be isometrical tubular until the stream diameter of the integral body of exhaust outlet 11b, can to adopt various shapes, as long as constitute the dust 5 that can utilize adhesion layer 13 to catch to be inhaled into suction nozzle 11 inner.
In addition; In this embodiment; Being made as can utilize the rotation travel mechanism, lifting moving mechanism, the horizontal mobile mechanism that keep platform 23 to make to carry places the handled object 1,2 that keeps platform 23 to move with respect to cleaning mouth 10; But can make handled object 1,2 fixing and cleaning mouth 10 moves or handled object 1,2 and cleaning mouth 10 both are removable, can relatively move each other as long as constitute the two.
In addition; In this embodiment; Enumerate the situation that is provided with the dust incorporating section that the dust 5 that utilizes suction nozzle 11 to suck is taken in and be illustrated, but the invention is not restricted to this for example, as shown in Figure 6; For preparing for the worst, can between vavuum pump 22 and blast pipe 20, be provided with dust incorporating section 21 in advance from the situation of suction nozzle 11 through blast pipe 20 suction dust 5.Dust incorporating section 21 for example is provided with not shown filter in inside, connecting vavuum pump with respect to the introducing port that is connecting blast pipe 20 at the position through filter.And this dust recoverer 21 constitutes: utilize filter to filter the dust that sucks through blast pipe 20 from suction nozzle 11 and make it be accommodated in inside.
Utilizability in the industry
As stated; It is useful that the present invention removes device for cleaning mouth and the dust that possesses this cleaning mouth, also is expected to make remove performance the cleaning mouth that improves and the dust that possesses this cleaning mouth of the lip-deep dust of handled object to remove device even particularly be suitable for little suction force.
Description of reference numerals
S dust is removed device
1,2 handled objects
5 dust
10 cleaning mouths
11 suction nozzles
The 11a suction inlet
The 11b exhaust outlet
12 gas flow paths
13 adhesion layers
15 spray nozzles (rectification unit)
The 15a ejiction opening
19 suction airstream
20 blast pipes (pipe arrangement)
22 vavuum pumps (negative pressure unit)
23 keep platform
Claims (7)
1. a cleaning mouth is characterized in that,
Possesses suction nozzle; This suction nozzle has gas flow path in inside, and at one end is formed with suction inlet, and is formed with exhaust outlet at the other end; Utilization breaks away from the dust on the surface that is attached to handled object from above-mentioned suction inlet suction and from the suction airstream that above-mentioned exhaust outlet is discharged
At least a portion at above-mentioned suction nozzle inner face is provided with the adhesion layer that is used to catch above-mentioned dust.
2. cleaning mouth according to claim 1 is characterized in that,
Also possess rectification unit, this rectification unit make above-mentioned suction airstream in the shape of a spiral shape ground along above-mentioned suction nozzle inner face.
3. cleaning mouth according to claim 2 is characterized in that,
Above-mentioned rectification unit is the spray nozzle of ejiction opening that is formed with the ejection Compressed Gas on the top, the Compressed Gas emission direction of above-mentioned ejiction opening make Compressed Gas along above-mentioned suction nozzle inner face towards setting for respect to this suction nozzle inner face.
4. according to each the described cleaning mouth in the claim 1 to 3, it is characterized in that,
The above-mentioned gas stream forms towards the mode that above-mentioned exhaust side narrows down gradually from above-mentioned suction oral-lateral with flow path area more inward more narrowly.
5. cleaning mouth according to claim 4 is characterized in that,
The above-mentioned gas stream forms the truncated cone shape that the stream diameter little by little dwindles towards above-mentioned exhaust side from above-mentioned suction oral-lateral.
6. according to each the described cleaning mouth in the claim 1 to 5, it is characterized in that,
Above-mentioned adhesion layer comprises silicone-based adhesion material or acrylic acid series adhesion material.
7. a dust is removed device, it is characterized in that possessing:
The described cleaning mouth of in the claim 1 to 6 each;
Negative pressure unit, it is connected to the exhaust outlet of above-mentioned suction nozzle through pipe arrangement, makes the inside of above-mentioned suction nozzle become negative pressure state through driving; And
Keep platform, it keeps handled object,
Above-mentioned dust is removed device and is constituted: under the suction inlet that the makes above-mentioned suction nozzle state corresponding with the handled object that remains in above-mentioned maintenance platform; Driving through above-mentioned negative pressure unit makes the inside of above-mentioned suction nozzle become negative pressure state and produces suction airstream; Utilize above-mentioned suction airstream that the dust on the surface that is attached to above-mentioned handled object is broken away from, make this dust be attached to the adhesion layer of suction nozzle inner face and catch this dust.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-230843 | 2009-10-02 | ||
| JP2009230843 | 2009-10-02 | ||
| PCT/JP2010/005722 WO2011039972A1 (en) | 2009-10-02 | 2010-09-21 | Cleaning nozzle and dust removal device equipped with same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102548673A true CN102548673A (en) | 2012-07-04 |
Family
ID=43825825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010800438571A Pending CN102548673A (en) | 2009-10-02 | 2010-09-21 | Cleaning nozzle and dust removal device equipped with same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2011039972A1 (en) |
| CN (1) | CN102548673A (en) |
| WO (1) | WO2011039972A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109174816A (en) * | 2018-08-20 | 2019-01-11 | 英业达科技有限公司 | A kind of board cleaning equipment, board checking system and method |
| CN109562417A (en) * | 2016-06-17 | 2019-04-02 | 堺显示器制品株式会社 | Foreign matter removal device, foreign matter removal system and foreign matter minimizing technology |
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|---|---|---|---|---|
| JP2015085279A (en) * | 2013-10-31 | 2015-05-07 | 住友電装株式会社 | Foreign matter removal apparatus and method |
| CN114652195B (en) * | 2020-12-23 | 2023-01-03 | 宁波方太厨具有限公司 | Brush head module for cleaning machine and cleaning machine |
| CN113877888B (en) * | 2021-10-29 | 2022-10-04 | 深圳中科飞测科技股份有限公司 | Cleaning device and detection equipment |
| CN113969444A (en) * | 2021-10-29 | 2022-01-25 | 盐城工学院 | Weaving is collected and cleaning device with weaving quick-witted weaving dirt of weaving |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61249584A (en) * | 1985-04-25 | 1986-11-06 | 株式会社 パイオニア風力機 | Wind-pressure washer |
| JPH0624781U (en) * | 1992-09-04 | 1994-04-05 | 有限会社松阪精電舎 | Product cleaning equipment |
| CN1166386A (en) * | 1996-05-29 | 1997-12-03 | 株式会社伸兴 | Dust removing system |
| JP2006278367A (en) * | 2005-03-28 | 2006-10-12 | Yamaha Corp | Dust removing device and dust removal method |
| JP2008177442A (en) * | 2007-01-19 | 2008-07-31 | Seiko Epson Corp | Method and device for removing foreign matter |
| CN101254502A (en) * | 2006-09-06 | 2008-09-03 | 株式会社理光 | Dry cleaning device and dry cleaning method |
-
2010
- 2010-09-21 JP JP2011534058A patent/JPWO2011039972A1/en active Pending
- 2010-09-21 CN CN2010800438571A patent/CN102548673A/en active Pending
- 2010-09-21 WO PCT/JP2010/005722 patent/WO2011039972A1/en active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61249584A (en) * | 1985-04-25 | 1986-11-06 | 株式会社 パイオニア風力機 | Wind-pressure washer |
| JPH0624781U (en) * | 1992-09-04 | 1994-04-05 | 有限会社松阪精電舎 | Product cleaning equipment |
| CN1166386A (en) * | 1996-05-29 | 1997-12-03 | 株式会社伸兴 | Dust removing system |
| JP2006278367A (en) * | 2005-03-28 | 2006-10-12 | Yamaha Corp | Dust removing device and dust removal method |
| CN101254502A (en) * | 2006-09-06 | 2008-09-03 | 株式会社理光 | Dry cleaning device and dry cleaning method |
| JP2008177442A (en) * | 2007-01-19 | 2008-07-31 | Seiko Epson Corp | Method and device for removing foreign matter |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109562417A (en) * | 2016-06-17 | 2019-04-02 | 堺显示器制品株式会社 | Foreign matter removal device, foreign matter removal system and foreign matter minimizing technology |
| CN109174816A (en) * | 2018-08-20 | 2019-01-11 | 英业达科技有限公司 | A kind of board cleaning equipment, board checking system and method |
| CN109174816B (en) * | 2018-08-20 | 2021-07-06 | 英业达科技有限公司 | Board cleaning equipment, board inspection system and board inspection method |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011039972A1 (en) | 2011-04-07 |
| JPWO2011039972A1 (en) | 2013-02-21 |
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Application publication date: 20120704 |