JP2008055398A - Cross-sectional structure of air cleaner head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that collection efficiency is bad because of an insufficient release of fine dust from a sticking surface by pushing the sticking fine dust with a blown out pressurized air, and that chattering (abnormal vibration) caused by collapse of air balance induced by the pressurized air whirling about underneath brings about a decline in an operation rate of a production line, when an object product 17, which is transferred on a conveyor roller 21 to be cleaned, comes right under a blowing opening 10 in a conventional air cleaner. <P>SOLUTION: An air cleaner head has such a structure that the angle of a blowing opening of the pressurized air to a dust collecting surface is not greater than 60 degree, and the angle of a sucking opening is approximately right angle to the dust collecting surface as is in a conventional structure. Thus, the sticking fine dust is easy to release from the sticking surface, and the chattering (the abnormal vibration) is eliminated by improving the air balance under and above the object product. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  With the recent development and development of miniaturization, miniaturization, and sophistication of digital electronic devices and semiconductor components, the presence and adhesion of fine dust in the air is increasingly affected by the quality and retention of products. Also, it has a great influence on the stabilization of the manufacturing process and the life.

  Therefore, as a method for stabilizing and improving the collection efficiency of fine dust adhering to the surface of wafers, films, electronic components and liquid crystal glass among these digital electronic devices, the cleaner head of the new air cleaner device It relates to a cross-sectional structure.

  A push-pull type air cleaner apparatus in a semiconductor manufacturing apparatus that has been conventionally used is configured as shown in FIG. Cleaner head 1, pressure, vacuum air source blower 2, HEPA filter 3 for purifying the pressurized air supplied to the cleaner head, prefilter 4 for collecting fine dust sucked from each cleaner head, air volume (pressure) ) And a hose / pipe 6 for connecting them.

  This method is a closed loop (closed circuit) method, and it is an air circulation method that has a vacuum function to supply and eject compressed air to one blower 2 and suck fine dust. However, there is an advantage that the equipment cost is low without breaking the air balance in the room.

  When the pressure of the blower 2 is increased, the air temperature rises due to the compression heat of the air, so it is necessary to pay attention to products, parts and materials that are easily affected by temperature.

Next, the cross-sectional shape of the air cleaner head 1 is displayed in FIG. The structure has a pressure chamber 7 and its outlet 10 in the center, a vacuum chamber 8 and its suction port 11 on both sides, and a smooth flat dust collecting surface 9 on its lower surface.
The target product 17 moves on the transport roller 21.

  As shown in FIG. 3, the flow of air is obtained by spraying clean pressurized air from the upper part of the target product 17 moving on the conveyor from the pressure chamber 7 via the jet port 10. By applying an impact force to the attached fine dust 14, the fine dust 14 is scattered and sucked and collected from the suction port 11.

In the conventional air cleaner apparatus, when the target product 17 moving on the conveying roller 21 comes directly below the jet outlet 10, as shown in FIG. , Peeled off from the adhesion surface, floated and moved to the suction port 11 to suck the fine dust.
However, there are cases where the pressurized air from the upper side presses the fine dust and the separation from the adhesion surface is insufficient, and there remains a problem in the collection efficiency of the fine dust.

Further, as shown in FIG. 4, when the tip of the target product 17 comes directly below the jet port 10, the pressurized air moves under the target product 17, causing chattering (abnormality) due to disturbance of the air balance. In order to generate (vibration), the ejection speed must be reduced by about 30%.
The occurrence of chattering (abnormal phenomenon) is also present when the last end of the target product 17 passes directly below the jet nozzle 10 as shown in FIG.
For this reason, the collection efficiency of fine dust will also fall about 30 to 40%, and it may be considered that it influences the ability selection of a blower.

  Therefore, there is a demand for stable operation that improves the collection efficiency of fine dust and eliminates chattering (abnormal vibration) of the target product 17.

Means to solve the problem

  As shown in FIG. 7, the present invention provides an inclined outlet 19 of the new air cleaner head 18 in which the outlet angle of the outlet 10 of the conventional air cleaner head 1 is processed to 60 degrees or less with respect to the horizontal plane. Since pressurized air can be efficiently ejected between the adhering fine dust 14 and the adhering surface 16, it becomes easier to peel off and the collection efficiency of the fine dust is further improved.

  Further, when the target product 17 reaches the vicinity of the inclined jet port 19, the pressurized air is pressed from the upper side or wraps around the lower side as in the conventional case, generating vortex and disturbing the air balance. However, according to the present invention, as shown in FIG. 9 to FIG. 11, the air balance is improved by the same amount of pressurized air flowing around the upper side and the lower side of the target product 17. Eliminates the occurrence of (abnormal vibration) and contributes to improving the collection efficiency of fine dust and stable operation.

The invention's effect

  One of the effects of the present invention is that the collection efficiency of the attached fine dust of the target product 17 is improved by 30% or more than before, so that the retention is improved and unnecessary pressurized air is eliminated. It can also contribute to cost reduction.

  Moreover, two effects are that the balance of the flow of pressurized air is improved, so that chattering (abnormal vibration) does not occur at all and it can contribute to the maintenance of a stable production process.

  As shown in FIG. 6, the best mode for carrying out the invention is to provide a jet outlet 19 inclined at 60 degrees or less with respect to the horizontal plane on the left side of the dust collecting surface 9 of the new air cleaner head 18. It is set as the shape which has the cross-sectional structure which provided the suction inlet 20 inclined 80 degrees or less so that it may face the inclination ejection port 19 with respect to a horizontal surface on the right side.

Therefore, in order to determine appropriate dimensions, an experimental device is created, an experiment is performed, and the experimental result is verified.
As shown in FIG. 8, the cleaner head of the new experimental air cleaner device is changed into three types of experimental devices (A) and (B) in which the inclination angle θ of the jet port is changed and the conventional device, and the line speed ν is changed. The following two evaluation experiments were performed.

1. Evaluation item (1) Presence / absence of chattering (visual)
(2) Fine dust collection ability (particle counter)

2. Test conditions (1) Base material: PET film (2) Fine dust: Environmental dust (PSL)
(3) Blowing air pressure: 15 kpa
(4) Base material and gap: about 1 to 2.5 mm
(5) Line speed: 20 m / min and 30 m / min

3. Type of experimental device (1) Experimental device (A): Jet port width: W ₁ = 1.0 mm, Jet port angle: θ = 30 °
(2) Experimental apparatus (B): Outlet width: W ₁ = 1.0 mm, Outlet angle: θ = 15 °
(3) Experimental apparatus (C): ejection port width: W ₁ = 1.0 mm, ejection port angle: θ = 90 °
* Experimental equipment (C) is a conventional equipment.

Experimental result

From the experimental results, it can be judged that the apparatus of the present invention can eliminate chattering (abnormal vibration) and further improve the collection efficiency of fine dust and achieve the purpose of the present station, compared with the conventional apparatus.
This effect can contribute to the stabilization of the manufacturing process and the improvement of operation efficiency, and further to cost reduction.

Industrial applicability is considered to be optimal for a cleaning apparatus for fine dust adhered on the surface of a high value-added film, glass plate, thin plate or the like.
In particular, demand for these thin glass plates is expected to increase due to an increase in capital investment accompanying the ever-increasing size of liquid crystal televisions and plasma televisions.

The new air cleaner apparatus according to the present invention can easily cope with the width of the glass plate as the target product in consideration of a method in which pressurized air is uniformly ejected even when the width is 2 to 3 m.
At present, the glass plate is in operation until the width of the glass plate reaches about 1.5 m, and the possibility of being used for future enlargement is expected to increase more and more.

  As other fields, application to photographic paper, high-quality paper, pharmaceuticals, nanotechnology products and components, etc. is also in view.

  Configuration diagram of push-pull type air cleaner   Cross section of a conventional air cleaner head   Explanatory drawing of air flow on dust collecting surface of conventional air cleaner head   Explanatory diagram of air flow to initial target product of conventional air cleaner head   Explanatory diagram of air flow to the target product of the conventional air cleaner head   Sectional view of the air cleaner head of the present invention   Peeling state diagram of adhering fine dust   Air flow explanatory diagram of dust collecting surface of air cleaner head of the present invention   Air flow explanatory diagram of the initial product of the air cleaner head of the present invention   Air flow explanatory diagram to the final product of the air cleaner head of the present invention   Dimensional symbol for experiment of air cleaner head of the present invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Air cleaner head 2 Blower 3 HEPA filter 4 Pre filter 5 Air volume adjustment valve 6 Hose / pipe 7 Pressure chamber 8 Vacuum chamber 9 Dust collection surface 10 Jet outlet 11 Suction port 12 Air flow 13 Vortex 14 Adhering fine dust 15 Scattering fine dust 16 Adhering surface 17 Target product 18 New air cleaner head 19 Inclined outlet 20 Inlet 21 Transport roller

Claims (1)

  The air cleaner head has a structure in which the angle of the jet outlet of the pressurized air is set to 60 degrees or less with respect to the dust collecting surface, and the angle of the suction port is substantially perpendicular to the dust collecting surface as in the past. An air cleaner device characterized by that.

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