WO2011039972A1 - Cleaning nozzle and dust removal device equipped with same - Google Patents

Cleaning nozzle and dust removal device equipped with same Download PDF

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Publication number
WO2011039972A1
WO2011039972A1 PCT/JP2010/005722 JP2010005722W WO2011039972A1 WO 2011039972 A1 WO2011039972 A1 WO 2011039972A1 JP 2010005722 W JP2010005722 W JP 2010005722W WO 2011039972 A1 WO2011039972 A1 WO 2011039972A1
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WO
WIPO (PCT)
Prior art keywords
suction
nozzle
dust
suction nozzle
cleaning nozzle
Prior art date
Application number
PCT/JP2010/005722
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French (fr)
Japanese (ja)
Inventor
安田忠睦
田村保則
Original Assignee
シャープ株式会社
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Publication date
Application filed by シャープ株式会社 filed Critical シャープ株式会社
Priority to CN2010800438571A priority Critical patent/CN102548673A/en
Priority to JP2011534058A priority patent/JPWO2011039972A1/en
Publication of WO2011039972A1 publication Critical patent/WO2011039972A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

Definitions

  • the present invention relates to a cleaning nozzle and a dust removing device including the same.
  • a film forming process or an etching process is performed on an object to be processed such as a liquid crystal display panel, a glass substrate, or a wafer substrate. If dust is attached, this causes a defect in the product panel or product chip. Therefore, a dust removing device that removes dust attached to the surface of the object to be processed is used.
  • a gas suction type dust removing device a device including a holding stage for holding an object to be processed and a cylindrical suction nozzle is known (for example, see Patent Document 1).
  • the exhaust port of the suction nozzle is connected to a negative pressure means such as a vacuum pump via a pipe and a dust container, and the negative pressure means is driven to approach the object to be processed.
  • a suction air flow sucked into the suction port of the suction nozzle is generated, and dust on the surface of the object to be processed is sucked and removed.
  • the dust removing apparatus that removes dust by suction as described above, a large suction force is required to float the dust on the surface of the object to be processed and suck it from the suction nozzle to the dust container. Therefore, if the suction force by the negative pressure means is small and insufficient, the dust removal performance on the surface of the object to be processed is lowered. However, if a vacuum pump with a large suction force is used as the negative pressure means, the apparatus cost will be high.
  • the present invention has been made in view of such a point, and an object of the present invention is to improve dust removal performance on the surface of the object to be processed even with a small suction force.
  • the present invention is provided with an adhesive layer for capturing dust on at least a part of the inner surface of the suction nozzle.
  • the first to sixth inventions have a gas flow path inside, a suction port is formed at one end and an exhaust port is formed at the other end, and are attached to the surface of the object to be processed.
  • the present invention is directed to a cleaning nozzle including a suction nozzle that sucks dust from the suction port and separates it by a suction airflow exhausted from the exhaust port.
  • the first invention is characterized in that an adhesive layer for capturing the dust is provided on at least a part of the inner surface of the suction nozzle.
  • the cleaning nozzle of the first aspect of the present invention further includes a rectifying unit that spirals the suction airflow along the inner surface of the suction nozzle.
  • the rectifying means is a blow-off nozzle formed at the tip of a blow-out port for blowing out compressed gas, and the direction of the blow-out port in the compressed gas blow direction is compressed It is set with respect to the inner surface of the suction nozzle so that the gas follows the inner surface of the suction nozzle.
  • the gas flow path is arranged so that the flow path area gradually decreases from the suction port side toward the exhaust port side. It is narrowly formed.
  • the gas flow path is formed in a truncated cone shape in which the flow path diameter gradually decreases from the suction port side toward the exhaust port side.
  • the sixth invention is characterized in that, in any one of the cleaning nozzles of the first to fifth inventions, the adhesive layer is made of a silicone adhesive material or an acrylic adhesive material.
  • 7th invention is related with the dust removal apparatus provided with the cleaning nozzle made into said object, and piping to the exhaust nozzle of any one cleaning nozzle of 1st to 6th invention, and the said suction nozzle
  • a negative pressure means that drives the inside of the suction nozzle to be in a negative pressure state by driving, and a holding stage that holds the object to be processed, with respect to the object to be processed held by the holding stage, With the suction port of the suction nozzle corresponding, the negative pressure means is driven to generate a suction air flow by making the inside of the suction nozzle into a negative pressure state. It is configured to be separated by an air current and attached to the adhesive layer on the inner surface of the suction nozzle to be captured.
  • the dust that has separated from the object to be processed is sucked into the suction nozzle and is attached to and trapped on the adhesive layer on the inner surface of the suction nozzle. Therefore, it is not necessary to suck in the dust with a large suction force as compared with the case of sucking in the dust from the suction nozzle to the dust container. Therefore, the dust removal performance on the surface of the object to be processed can be improved even with a small suction force.
  • the suction air flow is rectified by the rectifying means so as to follow the inner surface of the suction nozzle in a spiral shape.
  • the suction airflow is linear from the suction port side to the exhaust port side, only a part of the suction airflow is along the suction nozzle inner surface, whereas most of the suction airflow is along the suction nozzle inner surface.
  • the distance along the inner surface of the suction nozzle is increased by the amount of swirling of the suction airflow.
  • the dust that is spirally wound together with the suction airflow is efficiently captured by the adhesive layer on the inner surface of the suction nozzle, and the dust on the surface of the object to be processed is satisfactorily removed.
  • the blown nozzle blows out the compressed gas so as to follow the inner surface of the suction nozzle, so that the suction air flow inside the suction nozzle spirals to the inner surface of the suction nozzle. Rectified to follow the shape. Therefore, even if the rectifying means is constituted by the blowout nozzle in this way, the suction airflow can be spiraled along the inner surface of the suction nozzle, and the operational effects of the second invention are specifically exhibited.
  • the rectifying means when the rectifying means is constituted by the blowout nozzle, for example, the rectifying means can be realized with a simple configuration such as inserting the blowout nozzle from the outside side of the suction nozzle to the inside, so that the configuration of the cleaning nozzle can be simplified. .
  • the suction airflow on the exhaust port side is higher than the suction port side (upstream side).
  • the suction airflow can be easily spiraled along the inner surface of the suction nozzle by the rectifying means, and the dust that has been wound up is increased by the rotational force of the suction airflow that increases with the flow velocity that increases toward the exhaust port side. Therefore, the dust can be reliably captured by the adhesive layer on the inner surface of the suction nozzle.
  • the gas flow path is formed in a truncated cone shape, compared to the case where the gas flow path is formed in another shape such as a triangular frustum shape or a quadrangular frustum shape,
  • the flow of the suction air can be easily spiraled along the inner surface of the suction nozzle without generating turbulence by the rectifying means, and the dust can be more reliably captured by the adhesive layer on the inner surface of the suction nozzle.
  • the silicone-based adhesive material or the acrylic-based adhesive material is a general adhesive material, for example, an adhesive layer can be easily provided on the inner surface of the suction nozzle by attaching a double-sided tape or applying with a brush. Is possible.
  • the dust adhering to the surface of the object to be processed is separated by the suction airflow and is captured by the adhesive layer on the inner surface of the suction nozzle, so that the dust container for storing the dust sucked by the suction nozzle is unnecessary. Become. Therefore, the configuration of the dust removing device can be simplified.
  • the maintenance of the dust removal device can be easily performed by replacing the suction nozzle and the adhesive layer.
  • the adhesive layer for capturing dust is provided on at least a part of the inner surface of the suction nozzle, the dust removal performance on the surface of the object to be processed can be improved even with a small suction force. As a result, it is possible to satisfactorily remove dust on the surface of the object to be processed while suppressing an increase in apparatus cost, and it is possible to suppress the occurrence of product defects due to residual dust.
  • FIG. 1 is a perspective view schematically showing the dust removing device of the embodiment.
  • FIG. 2 is a perspective view schematically showing dust removal processing on a large-scale object to be processed.
  • FIG. 3 is a perspective view schematically showing dust removal processing for a small-sized object to be processed.
  • FIG. 4 is a perspective view schematically showing the suction nozzle of the first modification.
  • FIG. 5 is a perspective view schematically showing a suction nozzle of a second modification.
  • FIG. 6 is a perspective view schematically showing a dust removing device according to a modification.
  • FIG. 1 is a perspective view schematically showing a dust removing device A according to an embodiment of the present invention.
  • FIG. 1 illustrates a case where the object 1 to be processed having a larger area than the suction port 11 a of the cleaning nozzle 10 in the dust removing apparatus A is placed on the holding stage 23.
  • the dust removing apparatus A of the present embodiment is used for removing dust such as particles adhering to the surface of an object to be processed such as a liquid crystal display panel, a glass substrate, a semiconductor substrate such as a wafer, or a chip.
  • the dust removing device A includes a cleaning nozzle 10 having a suction nozzle 11 that sucks dust adhering to the surface of the workpiece 1 from the tip, and an exhaust pipe (pipe) 20 at the rear end of the suction nozzle 11. And a holding stage 23 for holding the object 1 to be processed.
  • the cleaning nozzle 10 is composed of a suction nozzle 11 and a blowout nozzle 15 which is a rectifying means inserted through the side wall from the outside on the tip side of the suction nozzle 11 and inserted therein.
  • the suction nozzle 11 has a gas flow path 12 therein, a suction port 11a is formed at the front end, and an exhaust port 11b is formed at the rear end.
  • the suction nozzle 11 is sucked from the suction port 11a generated by driving the vacuum pump 22.
  • the dust on the surface of the object to be processed 1 is separated by the suction airflow exhausted from the exhaust port 11b.
  • the suction nozzle 11 is formed in a truncated cone shape that gradually decreases in diameter from the front end to the rear end.
  • the gas flow path 12 is also formed in a truncated cone shape that gradually decreases in diameter from the suction port 11 a toward the exhaust port 11 b, and the flow path area gradually becomes narrower as it goes in the suction direction. It is so narrow.
  • an adhesive layer 13 (shown by a thick broken line in FIG. 1) for capturing dust is provided over the entire circumference of the lower half portion of the inner surface of the suction nozzle 11 on the suction port 11a side.
  • the pressure-sensitive adhesive layer 13 is made of, for example, a silicone-based pressure-sensitive adhesive material or an acrylic pressure-sensitive adhesive material, and can be easily provided on the inner surface of the suction nozzle 11 by sticking a double-sided tape or applying it with a brush.
  • the blowout nozzle 15 has a gas flow path 16 therein, a gas blowout port 15a is formed at the front end disposed inside the suction nozzle 11, and a gas introduction port 15b is formed at the rear end.
  • the gas introduction port 15 b is connected to a gas supply unit 18 such as a gas cylinder through a gas supply pipe 17.
  • the gas outlet 15a blows out compressed gas (for example, inert gas such as argon or nitrogen, or compressed air) introduced from the gas inlet 15b by driving the gas supply unit 18.
  • the gas outlet 15a faces a direction along the inner periphery of the suction nozzle 11 (that is, a direction along the curve of the inner surface of the suction nozzle 11 around the central axis of the suction nozzle 11) and slightly toward the exhaust port 11b side of the suction nozzle 11.
  • the direction in which the compressed gas is blown out is set so that the compressed gas that has been blown out follows the inner surface of the suction nozzle 11.
  • the vacuum pump 22 is configured to bring the inside of the suction nozzle 11 (the gas flow path 12) into a negative pressure state together with the exhaust pipe 20 by driving.
  • a general vacuum pump such as a mechanical booster pump or a rotary pump can be used.
  • the holding stage 23 includes a rotational movement mechanism, a vertical movement mechanism, and a horizontal movement mechanism (not shown), and moves the workpiece 1 placed on the upper surface relative to the cleaning nozzle 10 disposed above. It is configured to be possible.
  • a plurality of suction ports are formed on the upper surface of the holding stage 23, and through holes connected to the suction ports are connected to a vacuum suction means such as a vacuum pump.
  • the holding stage 23 is comprised so that the to-be-processed body 1 mounted may be adsorbed and hold
  • FIG. 2 schematically shows dust removal processing for the object 1 having a larger area than the suction port 11a of the suction nozzle 11
  • FIG. 3 schematically shows dust removal processing for the object 2 having a smaller area than the suction port 11a of the suction nozzle 11.
  • FIG. 2 and FIG.3 has shown the direction through which airflow flows.
  • the holding stage 23 and the holding stage 23 are driven by driving the vacuum suction means connected to the holding stage 23. Air between the object to be processed 1 is discharged from each suction port, and the object to be processed 1 is adsorbed and held on the surface of the holding stage 23.
  • the cleaning nozzle 10 (suction nozzle 11) is arranged at the scanning start position on the surface of the object 1 and the tip of the suction nozzle 11
  • the holding stage 23 is moved so that the distance h from the surface of the workpiece 1 is about 3 mm.
  • the dust 5 adhering to the surface of the object to be processed 1 together with the outside air is sucked into the suction port 11a by the suction force generated in the suction nozzle 11.
  • the sucked dust 5 rides on the suction airflow 19 and is spirally wound up toward the exhaust port 11b along the inner surface of the suction nozzle 11, and is trapped by the adhesive layer 13 in the middle thereof.
  • the rotational movement mechanism and the horizontal movement transition are driven so that the front end of the suction nozzle 11 scans the entire surface of the object 1 while keeping the separation distance h.
  • the dust 5 adhering to the entire surface of the workpiece 1 is removed by suction.
  • the object to be processed 1 is released from the surface of the holding stage 23 by releasing the suction of the object 1 to be processed by the suction ports of the holding stage 23, and the dust removal process for the object 1 is completed.
  • the object to be processed 2 is adsorbed and held on the upper surface of the holding stage 23 in the same manner as when the object to be processed 1 having a large area is subjected to the dust removal process.
  • the workpiece 2 is covered with the suction nozzle 11 so that the suction port 11a contacts the surface of the holding stage 23.
  • the dust 5 on the surfaces of the objects to be processed 1 and 2 can be sucked and removed by the dust removing device A.
  • the adhesive layer 13 for capturing the dust 5 is provided in the lower half portion of the inner surface of the suction nozzle 11, so that the suction port 11a The dust 5 sucked by the suction airflow 19 can be captured on the inner surface of the suction nozzle 11 by the adhesive layer 13.
  • the suction air flow 19 is rectified by the blowout nozzle so as to follow the inner surface of the suction nozzle 11 in a spiral shape.
  • the suction airflow 19 is linear from the suction port 11a side to the exhaust port 11b side, only a part of the suction airflow is along the inner surface of the suction nozzle 11, whereas most of the suction airflow 19 is Along the inner surface of the suction nozzle 11, the distance along the inner surface of the suction nozzle 11 increases as the suction airflow 19 turns.
  • the gas flow path 12 is formed in a truncated cone shape, the flow velocity of the suction air flow 19 on the exhaust port 11b side (downstream side) is higher than the suction port 11a side (upstream side). Due to the rotational force of the suction airflow 19 that increases with the flow velocity of the suction airflow 19, the dust 5 that has been wound up is pressed against the inner surface side of the suction nozzle 11.
  • the dust 5 wound spirally together with the suction airflow 19 can be efficiently captured in the adhesive layer on the inner surface of the suction nozzle 11. Therefore, the removal performance of the dust 5 on the surfaces of the objects to be processed 1 and 2 can be improved even with a small suction force. As a result, it is not necessary to use a vacuum pump with a large suction force as a negative pressure means, and it is possible to satisfactorily remove the dust 5 on the surfaces of the objects to be processed 1 and 2 while suppressing an increase in apparatus cost. Can be suppressed.
  • FIG.4 and FIG.5 is a perspective view which shows schematically the suction nozzle 11 of the modification of this embodiment, respectively.
  • the adhesive layer 13 may be provided over the entire circumference with a gap between the tip (suction port 11 a side portion) and the middle part on the inner surface of the suction nozzle 11, as shown in FIG. 5. In this way, a plurality of strips extending along the bus line from the suction port 11a to the exhaust port 11b may be provided on the inner surface of the suction nozzle 11.
  • the adhesive layer 13 may be provided on the entire inner surface of the suction nozzle 11.
  • the blowing nozzle 15 may be provided with two or more. If the rectifying means is constituted by a plurality of blowing nozzles 15, the suction air flow 19 can be more reliably spiraled along the inner surface of the suction nozzle 11, and the rotational force of the suction air flow 19 can be increased to reduce the area to be processed. The dust 5 on the surface of the body 2 can be blown off more reliably.
  • the tip portion has a truncated cone shape whose diameter decreases from the suction port 11a toward the exhaust port 11b.
  • the other part on the rear end side may be formed in a cylindrical shape having the same diameter, and may be formed so as to be narrower in depth so that the channel area gradually becomes narrower in the suction direction.
  • the pressure-sensitive adhesive layer 13 is provided on the inner surface of the suction nozzle 11 portion where the gas flow path 12 is narrowly formed, and the blowout nozzle that causes the suction airflow 19 to spiral along the inner surface of the suction nozzle 11 portion.
  • a rectifying means such as 15 is provided. If configured in this manner, the dust 5 on the surfaces of the objects to be processed 1 and 2 is spirally formed along with the suction airflow 19 along the inner surface of the suction nozzle 11 formed narrowly in the same manner as in the above embodiment. It can be wound up and captured efficiently by the adhesive layer 13.
  • the gas flow path 12 of the suction nozzle 11 may be formed in a cylindrical shape having the same flow path diameter from the suction port 11a to the exhaust port 11b, and various shapes may be adopted. It is possible that the dust 5 sucked into the suction nozzle 11 is captured by the adhesive layer 13.
  • the objects 1 and 2 placed on the holding stage 23 can be moved with respect to the cleaning nozzle 10 by a rotation movement mechanism, a lifting movement mechanism, and a horizontal movement mechanism of the holding stage 23.
  • the objects to be processed 1 and 2 may be fixed and the cleaning nozzle 10 may move, or both the objects to be processed 1 and 2 and the cleaning nozzle 10 may move, both of which can move relative to each other. It only has to be configured.
  • a dust container 21 may be preliminarily provided between the vacuum pump 22 and the exhaust pipe 20.
  • a filter (not shown) is provided inside the dust container 21, and a vacuum pump is connected to the inlet through which the exhaust pipe 20 is connected via a filter.
  • the dust collecting unit 21 is configured to filter the dust sucked from the suction nozzle 11 through the exhaust pipe 20 and accommodate the dust inside.
  • the present invention is useful for a cleaning nozzle and a dust removing device including the cleaning nozzle, and in particular, it is desired to improve the dust removing performance on the surface of the object to be processed even with a small suction force.
  • This is suitable for a cleaning nozzle and a dust removing device having the same.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

A cleaning nozzle is equipped with a suction nozzle, having a suction opening formed at one end and a discharge opening at the other end and has an internal airflow path, and which detaches dust adhering to the surface of an object to be treated with a suction airflow that sucks the dust in from the suction opening and discharges the dust from the discharge section. Part of the internal surface of the suction nozzle is provided with an adhesive layer for capturing dust.

Description

清掃ノズル及びそれを備えた塵埃除去装置Cleaning nozzle and dust removing device having the same
　本発明は、清掃ノズル及びそれを備えた塵埃除去装置に関するものである。 The present invention relates to a cleaning nozzle and a dust removing device including the same.
　一般に、液晶表示パネルや半導体デバイスなどの製造においては、液晶表示パネルやガラス基板、ウェハ基板などの被処理体に成膜処理やエッチング処理を行うことから、その被処理体の表面にパーティクルなどの塵埃が付着していると、これが製品パネルや製品チップの不良の原因となる。そのため、被処理体の表面に付着した塵埃を除去する塵埃除去装置が用いられている。 In general, in the manufacture of liquid crystal display panels and semiconductor devices, a film forming process or an etching process is performed on an object to be processed such as a liquid crystal display panel, a glass substrate, or a wafer substrate. If dust is attached, this causes a defect in the product panel or product chip. Therefore, a dust removing device that removes dust attached to the surface of the object to be processed is used.
　例えば、気体吸引型の塵埃除去装置として、被処理体を保持する保持ステージと、円筒状の吸込ノズルとを備えたものが知られている（例えば、特許文献１参照）。この種の塵埃除去装置は、吸込ノズルの排気口が配管及び塵埃収容部などを介して真空ポンプなどの負圧手段と接続されており、この負圧手段の駆動により、被処理体に接近させた吸込ノズルの吸込口内に吸い込まれる吸引気流を発生させて、被処理体表面の塵埃を吸い込んで除去するようになっている。 For example, as a gas suction type dust removing device, a device including a holding stage for holding an object to be processed and a cylindrical suction nozzle is known (for example, see Patent Document 1). In this type of dust removing device, the exhaust port of the suction nozzle is connected to a negative pressure means such as a vacuum pump via a pipe and a dust container, and the negative pressure means is driven to approach the object to be processed. A suction air flow sucked into the suction port of the suction nozzle is generated, and dust on the surface of the object to be processed is sucked and removed.
特開平５－１５６０３３号公報Japanese Patent Laid-Open No. 5-156033
　上述のような吸引により塵埃を除去する塵埃除去装置では、被処理体表面の塵埃を浮かせて吸込ノズルから塵埃収容部にまで吸い込むために大きな吸引力が必要となる。そのため、負圧手段による吸引力が小さく十分でないと、被処理体表面における塵埃の除去性能が低くなる。しかしながら、吸引力の大きな真空ポンプを負圧手段として用いると、装置コストが高くなってしまう。 In the dust removing apparatus that removes dust by suction as described above, a large suction force is required to float the dust on the surface of the object to be processed and suck it from the suction nozzle to the dust container. Therefore, if the suction force by the negative pressure means is small and insufficient, the dust removal performance on the surface of the object to be processed is lowered. However, if a vacuum pump with a large suction force is used as the negative pressure means, the apparatus cost will be high.
　本発明は、斯かる点に鑑みてなされたものであり、その目的とするところは、小さな吸引力であっても被処理体表面における塵埃の除去性能を向上させることにある。 The present invention has been made in view of such a point, and an object of the present invention is to improve dust removal performance on the surface of the object to be processed even with a small suction force.
　上記の目的を達成するために、本発明は、吸込ノズル内面の少なくとも一部に塵埃を捕捉するための粘着層が設けられているようにしたものである。 In order to achieve the above object, the present invention is provided with an adhesive layer for capturing dust on at least a part of the inner surface of the suction nozzle.
　具体的には、第１から第６の発明は、内部に気体流路を有し、且つ一端に吸込口が形成されると共に他端に排気口が形成され、被処理体の表面に付着した塵埃を上記吸込口から吸い込まれて上記排気口から排気される吸引気流により離脱させる吸込ノズルを備えた清掃ノズルを対象とし、以下の解決手段を講じたものである。 Specifically, the first to sixth inventions have a gas flow path inside, a suction port is formed at one end and an exhaust port is formed at the other end, and are attached to the surface of the object to be processed. The present invention is directed to a cleaning nozzle including a suction nozzle that sucks dust from the suction port and separates it by a suction airflow exhausted from the exhaust port.
　すなわち、第１の発明は、上記吸込ノズル内面の少なくとも一部には、上記塵埃を捕捉するための粘着層が設けられていることを特徴とする。 That is, the first invention is characterized in that an adhesive layer for capturing the dust is provided on at least a part of the inner surface of the suction nozzle.
　第２の発明は、第１の発明の清掃ノズルにおいて、上記吸引気流を上記吸込ノズル内面に螺旋状に沿わせる整流手段をさらに備えることを特徴とする。 According to a second aspect of the invention, in the cleaning nozzle of the first aspect of the present invention, the cleaning nozzle further includes a rectifying unit that spirals the suction airflow along the inner surface of the suction nozzle.
　第３の発明は、第２の発明の清掃ノズルにおいて、上記整流手段は、圧縮気体を吹き出す吹出口が先端に形成された吹出ノズルであり、上記吹出口の圧縮気体吹出方向の向きが、圧縮気体を上記吸込ノズル内面に沿わせるように該吸込ノズル内面に対して設定されていることを特徴とする。 According to a third aspect of the present invention, in the cleaning nozzle of the second aspect, the rectifying means is a blow-off nozzle formed at the tip of a blow-out port for blowing out compressed gas, and the direction of the blow-out port in the compressed gas blow direction is compressed It is set with respect to the inner surface of the suction nozzle so that the gas follows the inner surface of the suction nozzle.
　第４の発明は、第１から第３の発明のいずれか１つの清掃ノズルにおいて、上記気体流路は、上記吸込口側から上記排気口側に向かって流路面積が次第に狭くなるように奥狭く形成されていることを特徴とする。 According to a fourth aspect of the present invention, in the cleaning nozzle according to any one of the first to third aspects of the invention, the gas flow path is arranged so that the flow path area gradually decreases from the suction port side toward the exhaust port side. It is narrowly formed.
　第５の発明は、第４の発明の清掃ノズルにおいて、上記気体流路は、上記吸込口側から上記排気口側に向かって流路径が次第に縮径する円錐台形状に形成されていることを特徴とする。 According to a fifth aspect of the present invention, in the cleaning nozzle of the fourth aspect, the gas flow path is formed in a truncated cone shape in which the flow path diameter gradually decreases from the suction port side toward the exhaust port side. Features.
　第６の発明は、第１から第５の発明のいずれか１つの清掃ノズルにおいて、上記粘着層は、シリコーン系粘着材又はアクリル系粘着材により構成されていることを特徴とする。 The sixth invention is characterized in that, in any one of the cleaning nozzles of the first to fifth inventions, the adhesive layer is made of a silicone adhesive material or an acrylic adhesive material.
　また、第７の発明は、上記の対象とする清掃ノズルを備えた塵埃除去装置に関するものであり、第１から第６の発明のいずれか１つの清掃ノズルと、上記吸込ノズルの排気口に配管を介して接続され、駆動により上記吸込ノズルの内部を負圧状態にする負圧手段と、被処理体を保持する保持ステージとを備え、上記保持ステージに保持された被処理体に対し、上記吸込ノズルの吸込口を対応させた状態で、上記負圧手段の駆動により、上記吸込ノズルの内部を負圧状態にして吸引気流を発生させ、上記被処理体の表面に付着した塵埃を上記吸引気流により離脱させて吸込ノズル内面の粘着層に付着させて捕捉するように構成されていることを特徴とする。 Moreover, 7th invention is related with the dust removal apparatus provided with the cleaning nozzle made into said object, and piping to the exhaust nozzle of any one cleaning nozzle of 1st to 6th invention, and the said suction nozzle A negative pressure means that drives the inside of the suction nozzle to be in a negative pressure state by driving, and a holding stage that holds the object to be processed, with respect to the object to be processed held by the holding stage, With the suction port of the suction nozzle corresponding, the negative pressure means is driven to generate a suction air flow by making the inside of the suction nozzle into a negative pressure state. It is configured to be separated by an air current and attached to the adhesive layer on the inner surface of the suction nozzle to be captured.
　　－作用－
　次に、本発明の作用について説明する。 -Action-
Next, the operation of the present invention will be described.
　第１から第６の発明によると、被処理体から離脱した塵埃が吸込ノズルの内部に吸い込まれて吸込ノズル内面の粘着層に付着して捕捉される。そのため、吸込ノズルから塵埃収容部まで塵埃を吸い込む場合に比べて、大きな吸引力で塵埃を吸い込む必要がない。したがって、小さな吸引力であっても被処理体表面における塵埃の除去性能を向上させることが可能になる。 According to the first to sixth inventions, the dust that has separated from the object to be processed is sucked into the suction nozzle and is attached to and trapped on the adhesive layer on the inner surface of the suction nozzle. Therefore, it is not necessary to suck in the dust with a large suction force as compared with the case of sucking in the dust from the suction nozzle to the dust container. Therefore, the dust removal performance on the surface of the object to be processed can be improved even with a small suction force.
　第２の発明によると、被処理体表面の塵埃を吸い込む場合に、整流手段により、吸引気流が吸込ノズル内面に螺旋状に沿うように整流される。そのことにより、吸引気流が吸込口側から排気口側に向かって直線状である場合は吸引気流のほんの一部しか吸込ノズル内面に沿わないのに対し、吸引気流のほとんどが吸込ノズル内面に沿うと共に、吸引気流が旋回する分だけ吸込ノズル内面に沿う距離が長くなる。これによって、吸引気流と共に螺旋状に巻き上げられた塵埃が吸込ノズル内面の粘着層に効率良く捕捉され、被処理体表面の塵埃が良好に除去される。 According to the second invention, when the dust on the surface of the object to be treated is sucked, the suction air flow is rectified by the rectifying means so as to follow the inner surface of the suction nozzle in a spiral shape. As a result, when the suction airflow is linear from the suction port side to the exhaust port side, only a part of the suction airflow is along the suction nozzle inner surface, whereas most of the suction airflow is along the suction nozzle inner surface. At the same time, the distance along the inner surface of the suction nozzle is increased by the amount of swirling of the suction airflow. As a result, the dust that is spirally wound together with the suction airflow is efficiently captured by the adhesive layer on the inner surface of the suction nozzle, and the dust on the surface of the object to be processed is satisfactorily removed.
　第３の発明によると、被処理体表面の塵埃を吸い込む場合に、吹出ノズルにより、吸込ノズル内面に沿わせるように圧縮気体を吹き出すことで、吸込ノズルの内部における吸引気流が吸込ノズル内面に螺旋状に沿うように整流される。したがって、このように吹出ノズルで整流手段を構成しても、吸引気流を吸込ノズル内面に螺旋状に沿わせることができ、第２の発明の作用効果が具体的に奏される。 According to the third invention, when sucking dust on the surface of the object to be processed, the blown nozzle blows out the compressed gas so as to follow the inner surface of the suction nozzle, so that the suction air flow inside the suction nozzle spirals to the inner surface of the suction nozzle. Rectified to follow the shape. Therefore, even if the rectifying means is constituted by the blowout nozzle in this way, the suction airflow can be spiraled along the inner surface of the suction nozzle, and the operational effects of the second invention are specifically exhibited.
　さらに、吹出ノズルで整流手段を構成する場合には、例えば吹出ノズルを吸込ノズルの外部側方から内部に挿入するなど、簡素な構成で整流手段を実現できるため、清掃ノズルの構成を簡略化できる。 Further, when the rectifying means is constituted by the blowout nozzle, for example, the rectifying means can be realized with a simple configuration such as inserting the blowout nozzle from the outside side of the suction nozzle to the inside, so that the configuration of the cleaning nozzle can be simplified. .
　第４の発明によると、気体流路が奥狭く形成されているため、吸込口側（上流側）よりも排気口側（下流側）での吸引気流の流速が上がる。そのことにより、整流手段により吸引気流を吸込ノズル内面に螺旋状に沿わせやすいと共に、排気口側に向かって上がる流速に伴って増す吸引気流の回転力により、巻き上げられた塵埃が吸込ノズル内面側に押し付けられるため、吸込ノズル内面の粘着層に塵埃を確実に捕捉させることが可能になる。 According to the fourth invention, since the gas flow path is narrowly formed, the flow velocity of the suction airflow on the exhaust port side (downstream side) is higher than the suction port side (upstream side). As a result, the suction airflow can be easily spiraled along the inner surface of the suction nozzle by the rectifying means, and the dust that has been wound up is increased by the rotational force of the suction airflow that increases with the flow velocity that increases toward the exhaust port side. Therefore, the dust can be reliably captured by the adhesive layer on the inner surface of the suction nozzle.
　第５の発明によると、気体流路が円錐台形状に形成されているため、その気体流路が三角錐台形状や四角錐台形状などの他の形状に形成されている場合に比べて、整流手段により乱流を発生させることなく吸引気流を吸込ノズル内面に螺旋状に沿わせやすく、吸込ノズル内面の粘着層に塵埃をより一層確実に捕捉させることが可能になる。 According to the fifth invention, since the gas flow path is formed in a truncated cone shape, compared to the case where the gas flow path is formed in another shape such as a triangular frustum shape or a quadrangular frustum shape, The flow of the suction air can be easily spiraled along the inner surface of the suction nozzle without generating turbulence by the rectifying means, and the dust can be more reliably captured by the adhesive layer on the inner surface of the suction nozzle.
　第６の発明によると、シリコーン系粘着材又はアクリル系粘着材は一般的な粘着材であるため、例えば両面テープの貼着や刷毛による塗布などにより吸込ノズル内面に粘着層を簡易に設けることが可能である。 According to the sixth invention, since the silicone-based adhesive material or the acrylic-based adhesive material is a general adhesive material, for example, an adhesive layer can be easily provided on the inner surface of the suction nozzle by attaching a double-sided tape or applying with a brush. Is possible.
　第７の発明によると、被処理体の表面に付着した塵埃が吸引気流により離脱して吸込ノズル内面の粘着層に捕捉されるため、吸込ノズルにより吸い込んだ塵埃を収容する塵埃収容部が不要になる。したがって、塵埃除去装置の構成を簡略化することが可能である。 According to the seventh invention, the dust adhering to the surface of the object to be processed is separated by the suction airflow and is captured by the adhesive layer on the inner surface of the suction nozzle, so that the dust container for storing the dust sucked by the suction nozzle is unnecessary. Become. Therefore, the configuration of the dust removing device can be simplified.
　さらに、吸引除去した塵埃は吸込ノズルの内部に捕集されるので、吸込ノズルや粘着層の交換により塵埃除去装置のメンテナンスを簡易に行うことが可能になる。 Furthermore, since the dust removed by suction is collected inside the suction nozzle, the maintenance of the dust removal device can be easily performed by replacing the suction nozzle and the adhesive layer.
　本発明によれば、吸込ノズル内面の少なくとも一部に塵埃を捕捉するための粘着層が設けられているので、小さな吸引力でも被処理体表面における塵埃の除去性能を向上させることができる。その結果、装置コストの上昇を抑えながらも、被処理体表面の塵埃を良好に除去できて、塵埃残留による製品不良の発生を抑制できる。 According to the present invention, since the adhesive layer for capturing dust is provided on at least a part of the inner surface of the suction nozzle, the dust removal performance on the surface of the object to be processed can be improved even with a small suction force. As a result, it is possible to satisfactorily remove dust on the surface of the object to be processed while suppressing an increase in apparatus cost, and it is possible to suppress the occurrence of product defects due to residual dust.
図１は、実施形態の塵埃除去装置を概略的に示す斜視図である。FIG. 1 is a perspective view schematically showing the dust removing device of the embodiment. 図２は、大面積の被処理体に対する塵埃除去処理を概略的に示す斜視図である。FIG. 2 is a perspective view schematically showing dust removal processing on a large-scale object to be processed. 図３は、小面積の被処理体に対する塵埃除去処理を概略的に示す斜視図である。FIG. 3 is a perspective view schematically showing dust removal processing for a small-sized object to be processed. 図４は、変形例１の吸込ノズルを概略的に示す斜視図である。FIG. 4 is a perspective view schematically showing the suction nozzle of the first modification. 図５は、変形例２の吸込ノズルを概略的に示す斜視図である。FIG. 5 is a perspective view schematically showing a suction nozzle of a second modification. 図６は、変形例の塵埃除去装置を概略的に示す斜視図である。FIG. 6 is a perspective view schematically showing a dust removing device according to a modification.
　以下、本発明の実施形態を図面に基づいて詳細に説明する。なお、本発明は、以下の実施形態に限定されるものではない。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited to the following embodiment.
　《発明の実施形態》
　図１は、本発明の実施形態に係る塵埃除去装置Ａを概略的に示す斜視図である。なお、図１では、塵埃除去装置Ａにおける清掃ノズル１０の吸込口１１ａよりも大面積の被処理体１を保持ステージ２３上に載置した場合を図示している。 << Embodiment of the Invention >>
FIG. 1 is a perspective view schematically showing a dust removing device A according to an embodiment of the present invention. FIG. 1 illustrates a case where the object 1 to be processed having a larger area than the suction port 11 a of the cleaning nozzle 10 in the dust removing apparatus A is placed on the holding stage 23.
　本実施形態の塵埃除去装置Ａは、例えば、液晶表示パネル、ガラス基板、ウェハなどの半導体基板、又はチップなどの被処理体の表面に付着したパーティクルなどの塵埃を除去するために用いられる。 The dust removing apparatus A of the present embodiment is used for removing dust such as particles adhering to the surface of an object to be processed such as a liquid crystal display panel, a glass substrate, a semiconductor substrate such as a wafer, or a chip.
　＜塵埃除去装置Ａの概略構成＞
　塵埃除去装置Ａは、図１に示すように、被処理体１の表面に付着した塵埃を先端から吸い込む吸込ノズル１１を有する清掃ノズル１０と、吸込ノズル１１の後端に排気管（配管）２０を介して接続された負圧手段である真空ポンプ２２と、被処理体１を保持する保持ステージ２３とを備えている。 <Schematic configuration of dust removing apparatus A>
As shown in FIG. 1, the dust removing device A includes a cleaning nozzle 10 having a suction nozzle 11 that sucks dust adhering to the surface of the workpiece 1 from the tip, and an exhaust pipe (pipe) 20 at the rear end of the suction nozzle 11. And a holding stage 23 for holding the object 1 to be processed.
　＜清掃ノズル１０の構成＞
　清掃ノズル１０は、吸込ノズル１１と、吸込ノズル１１の先端側において外部側方から側壁を貫通して内部に挿入された整流手段である吹出ノズル１５とにより構成されている。 <Configuration of cleaning nozzle 10>
The cleaning nozzle 10 is composed of a suction nozzle 11 and a blowout nozzle 15 which is a rectifying means inserted through the side wall from the outside on the tip side of the suction nozzle 11 and inserted therein.
　吸込ノズル１１は、内部に気体流路１２を有し、先端に吸込口１１ａが形成されると共に後端に排気口１１ｂが形成されており、真空ポンプ２２の駆動により生じる吸込口１１ａから吸い込まれて排気口１１ｂから排気される吸引気流によって、被処理体１表面の塵埃を離脱させるように構成されている。 The suction nozzle 11 has a gas flow path 12 therein, a suction port 11a is formed at the front end, and an exhaust port 11b is formed at the rear end. The suction nozzle 11 is sucked from the suction port 11a generated by driving the vacuum pump 22. The dust on the surface of the object to be processed 1 is separated by the suction airflow exhausted from the exhaust port 11b.
　この吸込ノズル１１は、先端から後端に向かって次第に縮径する円錐台形の筒状に形成されている。この吸込ノズル１１の形状に倣って、気体流路１２も吸込口１１ａから排気口１１ｂに向かって次第に縮径する円錐台形状に形成され、流路面積が吸引方向に向かうに連れて徐々に狭くなるように奥狭くなっている。 The suction nozzle 11 is formed in a truncated cone shape that gradually decreases in diameter from the front end to the rear end. Following the shape of the suction nozzle 11, the gas flow path 12 is also formed in a truncated cone shape that gradually decreases in diameter from the suction port 11 a toward the exhaust port 11 b, and the flow path area gradually becomes narrower as it goes in the suction direction. It is so narrow.
　そして、吸込ノズル１１内面の吸込口１１ａ側下半部分には、塵埃を捕捉するための粘着層１３（図１中に太破線で示す）が全周に亘って設けられている。この粘着層１３は、例えば、シリコーン系粘着材又はアクリル系粘着材により構成されており、両面テープの貼着や刷毛による塗布などによって吸込ノズル１１の内面に簡易に設けることが可能である。 Further, an adhesive layer 13 (shown by a thick broken line in FIG. 1) for capturing dust is provided over the entire circumference of the lower half portion of the inner surface of the suction nozzle 11 on the suction port 11a side. The pressure-sensitive adhesive layer 13 is made of, for example, a silicone-based pressure-sensitive adhesive material or an acrylic pressure-sensitive adhesive material, and can be easily provided on the inner surface of the suction nozzle 11 by sticking a double-sided tape or applying it with a brush.
　吹出ノズル１５は、内部に気体流路１６を有し、吸込ノズル１１の内部に配置された先端に気体吹出口１５ａが形成されると共に後端に気体導入口１５ｂが形成されいる。気体導入口１５ｂは、気体供給管１７を介してガスボンベなどの気体供給部１８に接続されている。気体吹出口１５ａは、気体供給部１８の駆動により気体導入口１５ｂから導入された圧縮気体（例えば、アルゴンや窒素などの不活性ガス、又は圧縮空気など）を吹き出す。この気体吹出口１５ａは、吸込ノズル１１の内周に沿う方向（つまり吸込ノズル１１の中心軸周りに吸込ノズル１１内面の曲がりに沿う方向）に臨んで、吸込ノズル１１の排気口１１ｂ側に若干傾斜しており、吹き出した圧縮気体を吸込ノズル１１内面に沿うわせるように圧縮気体吹出方向が設定されている。この吹出ノズル１５を吸込ノズル１１による吸引動作時に駆動させることにより、吸引気流を吸込ノズル１１の内面に螺旋状に沿わせることができる。 The blowout nozzle 15 has a gas flow path 16 therein, a gas blowout port 15a is formed at the front end disposed inside the suction nozzle 11, and a gas introduction port 15b is formed at the rear end. The gas introduction port 15 b is connected to a gas supply unit 18 such as a gas cylinder through a gas supply pipe 17. The gas outlet 15a blows out compressed gas (for example, inert gas such as argon or nitrogen, or compressed air) introduced from the gas inlet 15b by driving the gas supply unit 18. The gas outlet 15a faces a direction along the inner periphery of the suction nozzle 11 (that is, a direction along the curve of the inner surface of the suction nozzle 11 around the central axis of the suction nozzle 11) and slightly toward the exhaust port 11b side of the suction nozzle 11. The direction in which the compressed gas is blown out is set so that the compressed gas that has been blown out follows the inner surface of the suction nozzle 11. By driving the blowing nozzle 15 during the suction operation by the suction nozzle 11, the suction airflow can be spiraled along the inner surface of the suction nozzle 11.
　＜真空ポンプ２２の構成＞
　真空ポンプ２２は、駆動により排気管２０と共に吸込ノズル１１の内部（気体流路１２）を負圧状態にするように構成されている。この真空ポンプ２２には、例えばメカニカルブースターポンプやロータリーポンプなどの一般的な真空ポンプを用いることが可能である。 <Configuration of vacuum pump 22>
The vacuum pump 22 is configured to bring the inside of the suction nozzle 11 (the gas flow path 12) into a negative pressure state together with the exhaust pipe 20 by driving. As this vacuum pump 22, for example, a general vacuum pump such as a mechanical booster pump or a rotary pump can be used.
　＜保持ステージ２３の構成＞
　保持ステージ２３は、不図示の回転移動機構、昇降移動機構及び水平移動機構を備えており、上面に載置した被処理体１を、上方に配置された清掃ノズル１０に対して相対的に移動可能に構成されている。また、保持ステージ２３の上面には、不図示の複数の吸着口が形成され、これら各吸着口に繋がる貫通孔が真空ポンプなどの真空吸引手段と接続されている。そして、保持ステージ２３は、真空吸引手段の駆動により、載置した被処理体１を吸着保持するように構成されている。 <Configuration of holding stage 23>
The holding stage 23 includes a rotational movement mechanism, a vertical movement mechanism, and a horizontal movement mechanism (not shown), and moves the workpiece 1 placed on the upper surface relative to the cleaning nozzle 10 disposed above. It is configured to be possible. A plurality of suction ports (not shown) are formed on the upper surface of the holding stage 23, and through holes connected to the suction ports are connected to a vacuum suction means such as a vacuum pump. And the holding stage 23 is comprised so that the to-be-processed body 1 mounted may be adsorbed and hold | maintained by the drive of a vacuum suction means.
　　－塵埃除去方法－
　次に、上記塵埃除去装置Ａを使用して被処理体１，２の表面に付着した塵埃を除去する方法について、図２及び図３を参照しながら、一例を挙げて説明する。図２は吸込ノズル１１の吸込口１１ａよりも大面積の被処理体１に対する塵埃除去処理、図３は吸込ノズル１１の吸込口１１ａよりも小面積の被処理体２に対する塵埃除去処理をそれぞれ概略的に示す斜視図である。なお、図２及び図３中の矢印は気流の流れる方向を示している。 -Dust removal method-
Next, a method for removing dust adhering to the surfaces of the objects to be processed 1 and 2 using the dust removing device A will be described with reference to FIGS. FIG. 2 schematically shows dust removal processing for the object 1 having a larger area than the suction port 11a of the suction nozzle 11, and FIG. 3 schematically shows dust removal processing for the object 2 having a smaller area than the suction port 11a of the suction nozzle 11. FIG. In addition, the arrow in FIG.2 and FIG.3 has shown the direction through which airflow flows.
　＜吸込口１１ａよりも大面積の被処理体１に対する塵埃除去処理＞
　大面積の被処理体１に対して塵埃除去処理を行う場合には、被処理体１と清掃ノズル１０とを相対的に移動させて、吸込ノズル１１の先端（吸込口１１ａ）で被処理体１の表面を走査することにより、被処理体１全面の塵埃を吸引除去する。 <Dust removal processing for the object 1 having a larger area than the suction port 11a>
When performing the dust removal process on the large-scale object 1, the object 1 and the cleaning nozzle 10 are relatively moved, and the object is processed at the tip (suction port 11 a) of the suction nozzle 11. By scanning the surface of 1, dust on the entire surface of the object 1 is removed by suction.
　まず、搬送ロボットなどにより、図１に示すように、保持ステージ２３上に被処理体１を載置した後、この保持ステージ２３に接続された真空吸引手段を駆動させることにより、保持ステージ２３と被処理体１との間の空気を各吸着口から排出し、保持ステージ２３表面に被処理体１を吸着保持させる。 First, as shown in FIG. 1, after the workpiece 1 is placed on the holding stage 23 by a transfer robot or the like, the holding stage 23 and the holding stage 23 are driven by driving the vacuum suction means connected to the holding stage 23. Air between the object to be processed 1 is discharged from each suction port, and the object to be processed 1 is adsorbed and held on the surface of the holding stage 23.
　次いで、回転移動機構、昇降移動機構及び水平移動機構を駆動することにより、清掃ノズル１０（吸込ノズル１１）が被処理体１表面の走査開始位置に配置されるように、且つ吸込ノズル１１先端と被処理体１表面との離間距離ｈが３ｍｍ程度となるように保持ステージ２３を移動させる。 Next, by driving the rotational movement mechanism, the elevation movement mechanism, and the horizontal movement mechanism, the cleaning nozzle 10 (suction nozzle 11) is arranged at the scanning start position on the surface of the object 1 and the tip of the suction nozzle 11 The holding stage 23 is moved so that the distance h from the surface of the workpiece 1 is about 3 mm.
　続いて、吸込ノズル１１の後端（排気口１１ｂ）に排気管２０を介して接続された真空ポンプ２２を駆動することにより、吸込ノズル１１の内部（気体流路１２）を負圧状態にし、外気を吸込口１１ａ内に吸い込む吸引力を発生させる。それと共に、吹出ノズル１５の後端（気体導入口１５ｂ）に気体供給管１７を介して接続された気体供給部１８を駆動することにより、吹出ノズル１５の先端（気体吹出口１５ａ）から圧縮気体を吹き出す。そのことにより、図２に示すように、吸込ノズル１１の内部での吸引気流１９がノズル内面に螺旋状に沿うように整流される。このとき、本実施形態では、気体流路１２が円錐台形状に奥狭く形成されているため、吸引気流１９が吸込口１１ａから排気口１１ｂまでの全体に亘って乱れることなく整流される。 Subsequently, by driving the vacuum pump 22 connected to the rear end (exhaust port 11b) of the suction nozzle 11 via the exhaust pipe 20, the inside of the suction nozzle 11 (gas flow path 12) is brought into a negative pressure state, A suction force for sucking outside air into the suction port 11a is generated. At the same time, by driving the gas supply unit 18 connected to the rear end (gas introduction port 15b) of the blowing nozzle 15 via the gas supply pipe 17, the compressed gas is discharged from the tip (gas blowing port 15a) of the blowing nozzle 15. Blow out. As a result, as shown in FIG. 2, the suction air flow 19 inside the suction nozzle 11 is rectified so as to spiral along the inner surface of the nozzle. At this time, in this embodiment, since the gas flow path 12 is formed in a truncated cone shape, the suction air flow 19 is rectified without being disturbed over the entire area from the suction port 11a to the exhaust port 11b.
　このように真空ポンプ２２及び気体供給部１８をそれぞれ駆動することにより、吸込ノズル１１に発生した吸引力によって外気と共に被処理体１表面に付着した塵埃５を吸込口１１ａ内に吸い込む。吸い込まれた塵埃５は、吸引気流１９に乗って吸込ノズル１１内面に沿うように排気口１１ｂ側へ螺旋状に巻き上げられ、その途中で粘着層１３に捕捉される。 Thus, by driving the vacuum pump 22 and the gas supply unit 18 respectively, the dust 5 adhering to the surface of the object to be processed 1 together with the outside air is sucked into the suction port 11a by the suction force generated in the suction nozzle 11. The sucked dust 5 rides on the suction airflow 19 and is spirally wound up toward the exhaust port 11b along the inner surface of the suction nozzle 11, and is trapped by the adhesive layer 13 in the middle thereof.
　さらに、吸込ノズル１１に吸引動作を持続させた状態で、その吸込ノズル１１の先端が離間距離ｈを保ちつつ被処理体１の全面を走査するように、回転移動機構及び水平移動移行を駆動して保持ステージ２３を移動させることにより、被処理体１の全面に付着した塵埃５を吸引除去する。その後、保持ステージ２３の各吸着口による被処理体１の吸着を解除することにより、保持ステージ２３表面から被処理体１を分離して、該被処理体１に対する塵埃除去処理を終了する。 Further, in a state where the suction nozzle 11 continues the suction operation, the rotational movement mechanism and the horizontal movement transition are driven so that the front end of the suction nozzle 11 scans the entire surface of the object 1 while keeping the separation distance h. By moving the holding stage 23, the dust 5 adhering to the entire surface of the workpiece 1 is removed by suction. Thereafter, the object to be processed 1 is released from the surface of the holding stage 23 by releasing the suction of the object 1 to be processed by the suction ports of the holding stage 23, and the dust removal process for the object 1 is completed.
　＜吸込口１１ａよりも小面積の被処理体２に対する塵埃除去処理＞
　小面積の被処理体２に対して塵埃除去処理を行う場合には、被処理体２を吸込ノズル１１で覆って被処理体２表面の塵埃５を吸引除去する。 <Dust removal processing for the object to be processed 2 having a smaller area than the suction port 11a>
When the dust removal process is performed on the target object 2 having a small area, the target object 2 is covered with the suction nozzle 11 and the dust 5 on the surface of the target object 2 is removed by suction.
　まず、大面積の被処理体１を塵埃除去処理する場合と同様に、保持ステージ２３の上面に被処理体２を吸着保持させる。次いで、回転移動機構、昇降移動機構及び水平移動機構を駆動することにより、図３に示すように、保持ステージ２３表面に吸込口１１ａが接触するように被処理体２に吸込ノズル１１を被せる。 First, the object to be processed 2 is adsorbed and held on the upper surface of the holding stage 23 in the same manner as when the object to be processed 1 having a large area is subjected to the dust removal process. Next, by driving the rotational movement mechanism, the raising / lowering movement mechanism, and the horizontal movement mechanism, as shown in FIG. 3, the workpiece 2 is covered with the suction nozzle 11 so that the suction port 11a contacts the surface of the holding stage 23.
　そして、真空ポンプ２２及び気体供給部１８をそれぞれ駆動させることにより、吸込ノズル１１に吸引力を発生させると共に、その吸込ノズル１１の内部においてノズル内面に螺旋状に沿う吸引気流１９を発生させる。そのことにより、被処理体２表面に付着した塵埃５が吸引気流１９に吹き飛ばされて舞い上がり、吸引気流１９と共に排気口１１ｂ側に吸込ノズル１１内面に沿って螺旋状に巻き上げられ、その途中で粘着層１３に捕捉される。その後、大面積の被処理体１を塵埃除去処理する場合と同様に、保持ステージ２３から被処理体２を分離して、該被処理体２に対する塵埃除去処理を終了する。 Then, by driving each of the vacuum pump 22 and the gas supply unit 18, a suction force is generated in the suction nozzle 11, and a suction air flow 19 along a spiral shape is generated on the inner surface of the suction nozzle 11. As a result, the dust 5 adhering to the surface of the object to be processed 2 is blown up and blown up by the suction airflow 19 and is spirally wound along the inner surface of the suction nozzle 11 together with the suction airflow 19 along the inner surface of the suction nozzle 11. Captured by layer 13. Thereafter, in the same manner as in the case of performing the dust removal process on the large-area object 1, the object 2 is separated from the holding stage 23, and the dust removal process for the object 2 is completed.
　以上のようにして、塵埃除去装置Ａにより被処理体１，２表面の塵埃５を吸引除去することができる。 As described above, the dust 5 on the surfaces of the objects to be processed 1 and 2 can be sucked and removed by the dust removing device A.
　　－実施形態の効果－
　したがって、この実施形態の清掃ノズル１０を備えた塵埃除去装置Ａによると、吸込ノズル１１内面の下半部分に塵埃５を捕捉するための粘着層１３が設けられていることにより、吸込口１１ａから吸引気流１９により吸い込んだ塵埃５を粘着層１３により吸込ノズル１１内面に捕捉できる。 -Effects of the embodiment-
Therefore, according to the dust removing apparatus A provided with the cleaning nozzle 10 of this embodiment, the adhesive layer 13 for capturing the dust 5 is provided in the lower half portion of the inner surface of the suction nozzle 11, so that the suction port 11a The dust 5 sucked by the suction airflow 19 can be captured on the inner surface of the suction nozzle 11 by the adhesive layer 13.
　特に、この実施形態では、被処理体１，２表面の塵埃５を吸い込む場合に、吹出ノズルにより、吸引気流１９が吸込ノズル１１内面に螺旋状に沿うように整流される。そのことにより、吸引気流１９が吸込口１１ａ側から排気口１１ｂ側に向かって直線状である場合は吸引気流のほんの一部しか吸込ノズル１１内面に沿わないのに対し、吸引気流１９のほとんどが吸込ノズル１１内面に沿うと共に、吸引気流１９が旋回する分だけ吸込ノズル１１内面に沿う距離が長くなる。 In particular, in this embodiment, when the dust 5 on the surfaces of the objects to be processed 1 and 2 is sucked in, the suction air flow 19 is rectified by the blowout nozzle so as to follow the inner surface of the suction nozzle 11 in a spiral shape. As a result, when the suction airflow 19 is linear from the suction port 11a side to the exhaust port 11b side, only a part of the suction airflow is along the inner surface of the suction nozzle 11, whereas most of the suction airflow 19 is Along the inner surface of the suction nozzle 11, the distance along the inner surface of the suction nozzle 11 increases as the suction airflow 19 turns.
　しかも、気体流路１２が円錐台形状に奥狭く形成されているため、吸込口１１ａ側（上流側）よりも排気口１１ｂ側（下流側）での吸引気流１９の流速が上がることにより、この吸引気流１９の流速に伴って増す吸引気流１９の回転力により、巻き上げられた塵埃５が吸込ノズル１１内面側に押し付けられる。 In addition, since the gas flow path 12 is formed in a truncated cone shape, the flow velocity of the suction air flow 19 on the exhaust port 11b side (downstream side) is higher than the suction port 11a side (upstream side). Due to the rotational force of the suction airflow 19 that increases with the flow velocity of the suction airflow 19, the dust 5 that has been wound up is pressed against the inner surface side of the suction nozzle 11.
　以上により、吸引気流１９と共に螺旋状に巻き上げられた塵埃５を吸込ノズル１１内面の粘着層に効率良く捕捉できる。したがって、小さな吸引力であっても被処理体１，２表面における塵埃５の除去性能を向上させることができる。その結果、吸引力の大きな真空ポンプを負圧手段としなくてよく、装置コストの上昇を抑えながらも、被処理体１，２表面の塵埃５を良好に除去できて、塵埃５残留による製品不良の発生を抑制できる。 As described above, the dust 5 wound spirally together with the suction airflow 19 can be efficiently captured in the adhesive layer on the inner surface of the suction nozzle 11. Therefore, the removal performance of the dust 5 on the surfaces of the objects to be processed 1 and 2 can be improved even with a small suction force. As a result, it is not necessary to use a vacuum pump with a large suction force as a negative pressure means, and it is possible to satisfactorily remove the dust 5 on the surfaces of the objects to be processed 1 and 2 while suppressing an increase in apparatus cost. Can be suppressed.
　また、吸引除去した塵埃５は吸込ノズル１１の内部に捕集されるので、吸込ノズル１１により吸い込んだ塵埃５を収容する塵埃収容部が不要であり、塵埃除去装置Ａの構成を簡略化できる。そして、吸込ノズル１１や粘着層１３の交換によって塵埃除去装置Ａのメンテナンスを簡易に行うことができる。 Further, since the dust 5 removed by suction is collected inside the suction nozzle 11, a dust container for storing the dust 5 sucked by the suction nozzle 11 is unnecessary, and the configuration of the dust removing device A can be simplified. The maintenance of the dust removing device A can be easily performed by replacing the suction nozzle 11 and the adhesive layer 13.
　なお、本実施形態では、吸込ノズル１１内面の下半部分に粘着層１３が設けられているとしているが、本発明はこれに限定されない。図４及び図５は、それぞれ本実施形態の変形例の吸込ノズル１１を概略的に示す斜視図である。粘着層１３は、図４に示すように吸込ノズル１１内面において先端部（吸込口１１ａ側部分）と中途部とに間隔をあけて全周に亘って設けられていてもよく、図５に示すように吸込ノズル１１内面において吸込口１１ａから排気口１１ｂに母線に沿って延びる帯状に複数設けられていてもよい。また、粘着層１３は、吸込ノズル１１内面の全体に設けられていてもよい。 In the present embodiment, the adhesive layer 13 is provided in the lower half of the inner surface of the suction nozzle 11, but the present invention is not limited to this. FIG.4 and FIG.5 is a perspective view which shows schematically the suction nozzle 11 of the modification of this embodiment, respectively. As shown in FIG. 4, the adhesive layer 13 may be provided over the entire circumference with a gap between the tip (suction port 11 a side portion) and the middle part on the inner surface of the suction nozzle 11, as shown in FIG. 5. In this way, a plurality of strips extending along the bus line from the suction port 11a to the exhaust port 11b may be provided on the inner surface of the suction nozzle 11. The adhesive layer 13 may be provided on the entire inner surface of the suction nozzle 11.
　また、本実施形態では、１本の吹出ノズル１５により吸引気流１９を吸込ノズル１１内面に螺旋状に沿わせる整流手段を構成しているが、吹出ノズル１５は複数本設けられていてもよい。複数本の吹出ノズル１５で整流手段を構成すれば、吸引気流１９をより確実に吸込ノズル１１内面に螺旋状に沿わせることができ、吸引気流１９の回転力を増大させて小面積の被処理体２表面の塵埃５をより確実に吹き飛ばすことができる。 Moreover, in this embodiment, although the rectification | straightening means which makes the suction | inhalation airflow 19 follow along the inner surface of the suction nozzle 11 by the one blowing nozzle 15 is comprised, the blowing nozzle 15 may be provided with two or more. If the rectifying means is constituted by a plurality of blowing nozzles 15, the suction air flow 19 can be more reliably spiraled along the inner surface of the suction nozzle 11, and the rotational force of the suction air flow 19 can be increased to reduce the area to be processed. The dust 5 on the surface of the body 2 can be blown off more reliably.
　また、吸込ノズル１１の気体流路１２は、円錐台形状に形成されているとしたが、例えば、先端部が吸込口１１ａから排気口１１ｂ側に向かって流路径が縮径する円錐台形状に形成されると共に後端側の他部が同径の筒状に形成されているなど、一部で吸引方向に向かって流路面積が次第に狭くなるように奥狭く形成されていてもよい。そして、この場合には、気体流路１２が奥狭く形成された吸込ノズル１１部分の内面に粘着層１３が設けられ、その吸込ノズル１１部分の内面に吸引気流１９を螺旋状に沿わせる吹出ノズル１５などの整流手段が設けられていることが好ましい。このように構成されていれば、上記実施形態と同様に、被処理体１，２表面の塵埃５を、奥狭く形成された吸込ノズル１１部分の内面に沿うように吸引気流１９と共に螺旋状に巻き上げて、粘着層１３により効率良く捕捉できる。 Moreover, although the gas flow path 12 of the suction nozzle 11 was formed in the truncated cone shape, for example, the tip portion has a truncated cone shape whose diameter decreases from the suction port 11a toward the exhaust port 11b. In addition to being formed, the other part on the rear end side may be formed in a cylindrical shape having the same diameter, and may be formed so as to be narrower in depth so that the channel area gradually becomes narrower in the suction direction. In this case, the pressure-sensitive adhesive layer 13 is provided on the inner surface of the suction nozzle 11 portion where the gas flow path 12 is narrowly formed, and the blowout nozzle that causes the suction airflow 19 to spiral along the inner surface of the suction nozzle 11 portion. Preferably, a rectifying means such as 15 is provided. If configured in this manner, the dust 5 on the surfaces of the objects to be processed 1 and 2 is spirally formed along with the suction airflow 19 along the inner surface of the suction nozzle 11 formed narrowly in the same manner as in the above embodiment. It can be wound up and captured efficiently by the adhesive layer 13.
　またその他に、吸込ノズル１１の気体流路１２は、吸込口１１ａから排気口１１ｂまでの全体に亘る流路径が同径の筒状に形成されていてもよく、種々の形状を採用することが可能であり、吸込ノズル１１内部に吸い込んだ塵埃５が粘着層１３により捕捉されるように構成されていればよい。 In addition, the gas flow path 12 of the suction nozzle 11 may be formed in a cylindrical shape having the same flow path diameter from the suction port 11a to the exhaust port 11b, and various shapes may be adopted. It is possible that the dust 5 sucked into the suction nozzle 11 is captured by the adhesive layer 13.
　また、本実施形態では、清掃ノズル１０に対して、保持ステージ２３に載置された被処理体１，２が保持ステージ２３の回転移動機構や昇降移動機構、水平移動機構によって移動可能であるとしたが、被処理体１，２が固定されて清掃ノズル１０が移動する、若しくは被処理体１，２及び清掃ノズル１０の双方が移動してもよく、この両方が互いに相対的に移動可能に構成されていればよい。 Further, in the present embodiment, the objects 1 and 2 placed on the holding stage 23 can be moved with respect to the cleaning nozzle 10 by a rotation movement mechanism, a lifting movement mechanism, and a horizontal movement mechanism of the holding stage 23. However, the objects to be processed 1 and 2 may be fixed and the cleaning nozzle 10 may move, or both the objects to be processed 1 and 2 and the cleaning nozzle 10 may move, both of which can move relative to each other. It only has to be configured.
　また、本実施形態では、吸込ノズル１１により吸い込んだ塵埃５を収容する塵埃収容部が設けられてない場合を例に挙げて説明したが、本発明はこれに限られず、図６に示すように、万一吸込ノズル１１から排気管２０を介して塵埃５が吸い込まれる場合に備えて、真空ポンプ２２と排気管２０との間に塵埃収容部２１が予備的に設けられていてもよい。塵埃収容部２１は、例えば、不図示のフィルタが内部に設けられており、排気管２０が接続された導入口に対してフィルタを介する箇所に真空ポンプが接続されている。そして、この塵埃回収部２１は、吸込ノズル１１から排気管２０を介して吸い込まれた塵埃をフィルタによりろ過して内部に収容するように構成されている。 Moreover, in this embodiment, although the case where the dust accommodating part which accommodates the dust 5 suck | inhaled by the suction nozzle 11 was not provided was mentioned as an example, this invention is not limited to this, As shown in FIG. In the unlikely event that dust 5 is sucked from the suction nozzle 11 through the exhaust pipe 20, a dust container 21 may be preliminarily provided between the vacuum pump 22 and the exhaust pipe 20. For example, a filter (not shown) is provided inside the dust container 21, and a vacuum pump is connected to the inlet through which the exhaust pipe 20 is connected via a filter. The dust collecting unit 21 is configured to filter the dust sucked from the suction nozzle 11 through the exhaust pipe 20 and accommodate the dust inside.
　以上説明したように、本発明は、清掃ノズル及びそれを備えた塵埃除去装置について有用であり、特に、小さな吸引力であっても被処理体表面における塵埃の除去性能を向上させることが要望される清掃ノズル及びそれを備えた塵埃除去装置に適している。 As described above, the present invention is useful for a cleaning nozzle and a dust removing device including the cleaning nozzle, and in particular, it is desired to improve the dust removing performance on the surface of the object to be processed even with a small suction force. This is suitable for a cleaning nozzle and a dust removing device having the same.
　Ｓ　　塵埃除去装置
　１，２　　被処理体
　５　　塵埃
　１０　　清掃ノズル
　１１　　吸込ノズル
　１１ａ　　吸込口
　１１ｂ　　排気口
　１２　　気体流路
　１３　　粘着層
　１５　　吹出ノズル（整流手段）
　１５ａ　　吹出口
　１９　　吸引気流
　２０　　排気管（配管）
　２２　　真空ポンプ（負圧手段）
　２３　　保持ステージ DESCRIPTION OF SYMBOLS S Dust removal apparatus 1, 2, To-be-processed object 5 Dust 10 Cleaning nozzle 11 Suction nozzle 11a Suction port 11b Exhaust port 12 Gas flow path 13 Adhesive layer 15 Blowout nozzle (rectifying means)
15a Air outlet 19 Suction airflow 20 Exhaust pipe (pipe)
22 Vacuum pump (negative pressure means)
23 Holding stage

Claims (7)

  1. 　内部に気体流路を有し、且つ一端に吸込口が形成されると共に他端に排気口が形成され、被処理体の表面に付着した塵埃を上記吸込口から吸い込まれて上記排気口から排気される吸引気流により離脱させる吸込ノズルを備えた清掃ノズルであって、
    　上記吸込ノズル内面の少なくとも一部には、上記塵埃を捕捉するための粘着層が設けられている
    ことを特徴とする清掃ノズル。     It has a gas flow path inside, and a suction port is formed at one end and an exhaust port is formed at the other end. Dust adhering to the surface of the workpiece is sucked from the suction port and exhausted from the exhaust port. A cleaning nozzle having a suction nozzle that is separated by a suction airflow,
    A cleaning nozzle, wherein an adhesive layer for capturing the dust is provided on at least a part of the inner surface of the suction nozzle.
  2. 　請求項１に記載の清掃ノズルにおいて、
    　上記吸引気流を上記吸込ノズル内面に螺旋状に沿わせる整流手段をさらに備える
    ことを特徴とする清掃ノズル。     The cleaning nozzle according to claim 1,
    A cleaning nozzle, further comprising rectifying means for causing the suction air flow to spiral along the inner surface of the suction nozzle.
  3. 　請求項２に記載の清掃ノズルにおいて、
    　上記整流手段は、圧縮気体を吹き出す吹出口が先端に形成された吹出ノズルであり、上記吹出口の圧縮気体吹出方向の向きが、圧縮気体を上記吸込ノズル内面に沿わせるように該吸込ノズル内面に対して設定されている
    ことを特徴とする清掃ノズル。     The cleaning nozzle according to claim 2,
    The rectifying means is a blow-off nozzle formed at the tip of a blow-out port for blowing out compressed gas, and the direction of the compressed gas blow-out direction of the blow-out port is the inner surface of the suction nozzle so that the compressed gas is along the inner surface of the suction nozzle. A cleaning nozzle characterized by being set for
  4. 　請求項１から３のいずれか１項に記載の清掃ノズルにおいて、
    　上記気体流路は、上記吸込口側から上記排気口側に向かって流路面積が次第に狭くなるように奥狭く形成されている
    ことを特徴とする清掃ノズル。     In the cleaning nozzle according to any one of claims 1 to 3,
    The cleaning nozzle, wherein the gas flow path is formed narrowly so that the flow path area gradually decreases from the suction port side toward the exhaust port side.
  5. 　請求項４に記載の清掃ノズルにおいて、
    　上記気体流路は、上記吸込口側から上記排気口側に向かって流路径が次第に縮径する円錐台形状に形成されている
    ことを特徴とする清掃ノズル。     The cleaning nozzle according to claim 4,
    The cleaning nozzle, wherein the gas flow path is formed in a truncated cone shape in which a flow path diameter is gradually reduced from the suction port side toward the exhaust port side.
  6. 　請求項１から５のいずれか１項に記載の清掃ノズルにおいて、
    　上記粘着層は、シリコーン系粘着材又はアクリル系粘着材により構成されている
    ことを特徴とする清掃ノズル。     In the cleaning nozzle according to any one of claims 1 to 5,
    The said adhesion layer is comprised by the silicone type adhesive material or the acrylic adhesive material, The cleaning nozzle characterized by the above-mentioned.
  7. 　請求項１から６のいずれか１項に記載の清掃ノズルと、
    　上記吸込ノズルの排気口に配管を介して接続され、駆動により上記吸込ノズルの内部を負圧状態にする負圧手段と、
    　被処理体を保持する保持ステージとを備え、
    　上記保持ステージに保持された被処理体に対し、上記吸込ノズルの吸込口を対応させた状態で、上記負圧手段の駆動により、上記吸込ノズルの内部を負圧状態にして吸引気流を発生させ、上記被処理体の表面に付着した塵埃を上記吸引気流により離脱させて吸込ノズル内面の粘着層に付着させて捕捉するように構成されている
    ことを特徴とする塵埃除去装置。     The cleaning nozzle according to any one of claims 1 to 6,
    A negative pressure means connected to the exhaust port of the suction nozzle via a pipe, and driving to bring the inside of the suction nozzle into a negative pressure state;
    A holding stage for holding a workpiece,
    With the suction port of the suction nozzle corresponding to the object to be processed held on the holding stage, the negative pressure means is driven to generate a suction air flow by setting the inside of the suction nozzle to a negative pressure state. The dust removing device is configured so that dust adhering to the surface of the object to be processed is separated by the suction airflow and attached to the adhesive layer on the inner surface of the suction nozzle to be captured.
PCT/JP2010/005722 2009-10-02 2010-09-21 Cleaning nozzle and dust removal device equipped with same WO2011039972A1 (en)

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CN113969444A (en) * 2021-10-29 2022-01-25 盐城工学院 Weaving is collected and cleaning device with weaving quick-witted weaving dirt of weaving
CN114652195A (en) * 2020-12-23 2022-06-24 宁波方太厨具有限公司 Brush head module for cleaning machine and cleaning machine
US20230215721A1 (en) * 2022-01-05 2023-07-06 STATS ChipPAC Pte. Ltd. Semiconductor Manufacturing Equipment and Method of Expelling Residue Through Suction Hood
JP7506920B2 (en) 2020-09-17 2024-06-27 三和システムエンジニアリング株式会社 Suction nozzle

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JP2015085279A (en) * 2013-10-31 2015-05-07 住友電装株式会社 Foreign matter removal apparatus and method
WO2017216963A1 (en) * 2016-06-17 2017-12-21 堺ディスプレイプロダクト株式会社 Foreign material removing device, foreign material removing system, and foreign material removing method
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JP7506920B2 (en) 2020-09-17 2024-06-27 三和システムエンジニアリング株式会社 Suction nozzle
CN114652195A (en) * 2020-12-23 2022-06-24 宁波方太厨具有限公司 Brush head module for cleaning machine and cleaning machine
CN114652195B (en) * 2020-12-23 2023-01-03 宁波方太厨具有限公司 Brush head module for cleaning machine and cleaning machine
CN112796265A (en) * 2021-02-04 2021-05-14 辽宁天信专用汽车制造有限公司 Sweeping dust collector of road sweeper
CN113877888A (en) * 2021-10-29 2022-01-04 深圳中科飞测科技股份有限公司 Cleaning device and detection equipment
CN113969444A (en) * 2021-10-29 2022-01-25 盐城工学院 Weaving is collected and cleaning device with weaving quick-witted weaving dirt of weaving
CN113877888B (en) * 2021-10-29 2022-10-04 深圳中科飞测科技股份有限公司 Cleaning device and detection equipment
US20230215721A1 (en) * 2022-01-05 2023-07-06 STATS ChipPAC Pte. Ltd. Semiconductor Manufacturing Equipment and Method of Expelling Residue Through Suction Hood

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