JP2009130346A - Method of preventing chattering of air cleaner head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air cleaner which is prevented from halt due to chattering (abnormal vibration) of a flat plate or sticking to suction opening (1) of a cleaner head to drive stably without deteriorating collecting efficiency of drifting fine dust. <P>SOLUTION: A vacuum head 20 is placed under a new air cleaner head 17 having an inclined nozzle 18 and a flat plate 16 is made to run in the direction of pressurizing air from an inclined nozzle 18 between them. The air volume sucked from a plurality of suction openings (2) 22 prepared to respective vacuum chambers (2) is properly adjusted by an air volume adjusting valve (2) of the vacuum head 17 to prevent from halt due to chattering (abnormal vibration) which is likely to occur at initial and final steps of the flat plate 16, or due to sticking of the flat plate 16 to the suction opening (1) 11. Thus deterioration of operating rates is prevented and stable production is maintained. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  With the recent development and development of miniaturization, miniaturization, and sophistication of digital electronic devices and semiconductor components, the presence and adhesion of fine dust in the air is increasingly affected by the quality and retention of products. Further, the present invention relates to a method for preventing an operation trouble of an air cleaner device that removes the attached fine dust 14 by greatly affecting the stabilization of the manufacturing process and the life.

  In particular, among these digital electronic devices, it is possible to stabilize the separation of fine dust 14 attached to the surface of wafers, substrates, electronic components, liquid crystal glass (hereinafter referred to as flat plate 16), and the collection of scattered fine dust 15. As a method of improving the speed, the method relates to a chattering (abnormal vibration) of the flat plate 16 below the cleaner head in the air cleaner device, a method of preventing temporary stop due to sticking, and the traveling direction.

  A push-pull type air cleaner apparatus in a semiconductor manufacturing apparatus that has been conventionally used is configured as shown in FIG. The structure includes a cleaner head 1 and a pressure, a blower 2 as a vacuum air source, a HEPA filter 3 for purifying the pressurized air supplied to the cleaner head 1, and a prefilter for collecting fine dust sucked from each cleaner head. 4, an air volume adjusting valve 5 for adjusting the air volume (pressure), and a hose and pipe 6 for connecting them.

  This method is a closed loop (closed circuit) method, and it is an air circulation method that has a vacuum function to supply and eject pressurized air to one blower 2 and suck fine dust. However, there is an advantage that the equipment cost is low without breaking the air balance in the room.

  When the pressure of the blower 2 is increased, the air temperature rises due to the compression heat of the air, so it is necessary to pay attention to the flat plate 16 and parts / materials that are easily affected by temperature.

  Next, the cross-sectional shape of the conventional air cleaner head 1 is displayed in FIG. The cross-sectional shape is a smooth flat dust collecting surface 9 having a pressure chamber 7 and a jet port 10, a vacuum chamber (1) 8 and a suction port (1) 11 on both sides thereof.

  As shown in FIG. 3, the flow of air is sprayed from above on the surface of the flat plate 16 running on the transport roller 25 from the upper portion of the pressure chamber 7 via the jet port 10. In addition, by applying an impact force to the adhering fine dust 14, the fine dust 15 is scattered by being sucked and collected from the suction ports (1) 11 provided at both ends of the jet outlet 10.

  In the conventional air cleaner apparatus, when the flat plate 16 traveling on the conveying roller 25 comes directly under the jet outlet 10, as shown in FIG. 3, the jetted pressurized air is applied to the adhering fine dust 14 from above. An impact force is applied to peel off the adhering surface, float, and move to the suction port (1) 11 to suck the scattered fine dust 15.

  Also, as shown in FIG. 4, when the tip of the flat plate 16 comes directly under the jet port 10, the pressurized air travels below the flat plate 16, causing chattering (abnormal Vibration) or a phenomenon that the flat plate 16 sticks to the suction port (1) 11 occurs, causing a problem of temporarily stopping the production line, which needs to be resolved.

  Furthermore, when the tip of the flat plate 16 comes to a position directly below the jet outlet 10, the jet flow of pressurized air blocks the forward movement of the tip of the flat plate 16, and in this case as well, the production line is temporarily suspended. Cause troubles to stop and need to be resolved.

  As shown in FIG. 5, the chattering (abnormal vibration) and the temporary stop due to the sticking to the suction port (1) 11 occur such that the rear end of the flat plate 16 passes directly under the jet port 10. It sometimes exists, the same phenomenon occurs, and it is necessary to solve the trouble.

  Recently, the tendency for the thickness of the flat plate 16 to become thinner and thinner is about 0.5 mm, and troubles such as chattering (abnormal vibration) and temporary stop due to sticking are increasing.

  Therefore, there is a demand for a stable operating rate that eliminates chattering (moving vibration) of the flat plate 16 and temporary stop due to sticking, and does not reduce the collection efficiency of the scattered fine dust 15.

Means to solve the problem

  As shown in FIG. 6, the present invention adopts a new cleaner head 17 having an inclined outlet 18 instead of the conventional air cleaner head 1, and places a vacuum head 20 at the lower part of the target flat plate 16. Consists of arranged configurations.

  The vacuum head 20 has a structure including a vacuum chamber (2) 21 having a plurality of suction ports (2) 22 in the traveling direction of the flat plate 16 and a receiving roller 23 that supports the flat plate 16, and further includes a vacuum chamber ( It has a structure in which an air volume adjusting valve (2) 24 for adjusting the suction air volume is provided at an appropriate position 2).

The biggest cause of chattering (abnormal vibration) is that the thickness of the target flat plate 16 is becoming thinner and lighter and lighter, and thus is easily affected by the air flow.
In particular, the distance between the dust collecting surface 9 of the new cleaner head 17 and the flat plate 16 is as narrow as 2 mm, and the air balance between the flow of pressurized air and the suction flow of the suction port (1) is likely to be disturbed. This occurs remarkably when the terminal unit is carried out.

And the next most trouble is that the flat plate 16 sticks to the suction air flow of the suction port (1) of the new air cleaner head 17 and the production line is temporarily stopped.
The present invention considers that the most important point is to eliminate these troubles, and focuses on the solution.

  Therefore, as shown in FIG. 6, the flat plate 16 is sucked into the suction port (1) 11 side of the new air cleaner head 17 and stuck and temporarily stopped to prevent chattering (abnormal vibration). It has been found that the improvement can be made remarkably by providing the vacuum head 20 on the lower side of the face plate 16.

  In this case, the air volume adjusting valve (2) 24 provided in the vacuum chamber (2) 21 of the vacuum head 20 should appropriately adjust the suction air volume pulled from below to prevent the flat plate 16 from being lifted. It was also found that the upper and lower air balance of the flat plate 16 is adjusted, and that there is an appropriate upper and lower air balance ratio.

  Since the space | interval of the dust collection surface 9 and the plane board 16 is as very narrow as 1-2 mm, it is easy to receive to the influence of the suction | inhalation air volume of the suction inlet (1) 11 located in front and back sensitively. In particular, the thinner and lighter the flat plate 16 is, the easier it is to be sucked into the suction port (1) 11 and the sticking state due to the disturbance of the air balance occurs.

  亦 When the flat plate 16 is caused to travel in the jet flow portion, if it is run in the flow direction of the jet flow, it becomes a tailwind and further suppresses chattering (abnormal vibration) or temporary stop due to sticking. It also turned out to be.

The invention's effect

  The first effect of the present invention is that the occurrence of chattering (abnormal vibration) of the new air cleaner head 17 of the flat plate 16 and temporary stop due to sticking to the suction port (1) 11 is remarkably reduced.

  亦 By inserting the flat plate 16 in the flow direction of the inclined jet port 18 and running, the flow becomes smoother, and the occurrence rate of the aforementioned chattering (abnormal vibration) or temporary stop due to sticking is reduced. It is a contribution.

  The second effect is that the air balance between the upper and lower surfaces of the flat plate 16 is improved, which is effective in improving the separation efficiency of the attached fine dust 14 and the collection efficiency of the scattered fine dust 15 and maintaining the quality. It can contribute to the improvement and stability of the operation rate of the production line.

  In the best mode for carrying out the invention, as shown in FIG. 6, a plane plate 16 as a target is inclined and jetted between a new air cleaner head 17 having an inclined outlet 18 and a vacuum head 20 installed in the lower part. It has been found that inserting and running in accordance with the flow direction of the outlet 18 is the best mode to prevent chattering (abnormal vibration) and temporary stop due to sticking to the suction port (1) 11 and so on.

  The vacuum head 20 has a structure in which a plurality of suction ports (2) 22 are provided in a vacuum chamber (2) 21 and a receiving roller 23 and an air volume adjusting valve (2) 24 are provided. By adjusting the balance, it is possible to grasp the point at which the flat plate 16 can travel smoothly and optimally, and contribute to stable operation of the production line.

Therefore, in order to determine appropriate dimensions, an experimental device is created, an experiment is performed, and the experimental result is verified.
As shown in FIG. 11, the cleaner head of the new experimental air cleaner apparatus has the inclination angle θ of the inclined outlet 18 of 60 °, and the experimental apparatus (A), (B) with or without the vacuum head 20 and FIG. The following two items of evaluation experiments were carried out by changing the line speed ν to three types of conventional devices as shown in FIG.

1. Evaluation item (1) Presence / absence of chattering of substrate (planar plate 16)
(2) Presence / absence of sticking of substrate (planar plate 16) to suction port (1) 11 (visual observation)

2. Test conditions (1) Base material (planar plate 16): PET film (2) Blowing air pressure: 15 kpa
(3) Base material and gap: H ₁ = about _{1 to} 2.5 mm
(4) Line speed: 20 m / min and 30 m / min
(5) Number of travels of substrate: 100 times each

3. Type of experimental apparatus (1) Experimental apparatus (A): outlet groove width: W ₁ = 1.0 mm, outlet angle: θ = 60 °
: Pressure chamber angle: θ = 60 °
: Suction port groove width: W ₂ = 3.0 mm, Suction port groove width: W ₃ = 1.5 mm
: With vacuum head (suction port groove width: W ₄ = 3.0 mm)
(2) Experimental apparatus (B): outlet groove width: W ₁ = 1.0 mm, outlet angle: θ = 60 °
: Pressure chamber angle: θ = 60 °
: Suction port groove width: W ₂ = 3.0 mm, Suction port groove width: W ₃ = 1.5 mm
: No vacuum head (3) Experimental device (C): Outlet width: W ₁ = 1.0 mm, Outlet angle: θ = 90 °
: Pressure chamber angle: θ = 90 °
: Suction groove width: W ₂ = W ₃ = 3.0 mm
: No vacuum head * The dimensions of each experimental device are shown in Fig. 11.
* IV, experimental device (C) is a conventional device.

Experimental result

From the experimental results, it is determined that the device according to the present invention has no chattering (abnormal vibration) due to sticking, and can sufficiently achieve the purpose of the present invention.
The presence of the vacuum head 20 has a remarkable effect, and can contribute to stabilization of the manufacturing process and improvement of operation efficiency, and further to cost reduction.

Industrial applicability is considered to be optimal for a cleaning apparatus for fine dust adhered on the surface of a semiconductor substrate, a high value-added film, a glass plate, a thin plate or the like.
In particular, due to the expansion of capital investment accompanying the increasing size of liquid crystal televisions and plasma televisions, it is expected that the demand for thin glass plates with a size of around 0.5 mm will increase further due to the large dimensions of these flat plates 16. The

Even if the width of the glass plate as the flat plate 16 is 2 to 3 m, the new air cleaner device of the present invention can easily cope with the method in which the pressurized air is jetted uniformly.
At present, the glass plate is in operation until the width of the glass plate is about 1.5 m, and the possibility of being used for future enlargement can be predicted to be large.

  As other fields, application to photographic paper, high-quality paper, pharmaceuticals, nanotech products, and components is also in view.

  Configuration diagram of push-pull type air cleaner   Cross section of a conventional air cleaner head   Explanatory drawing of air flow on dust collecting surface of conventional air cleaner head   Explanatory diagram of air flow to the initial plane plate of the conventional air cleaner head   Explanatory diagram of air flow to the target flat plate of the conventional air cleaner head   Sectional view of the air cleaner head (inclined outlet) and vacuum head of the present invention   Air flow explanatory diagram of dust collecting surface of air cleaner head of the present invention   Air flow explanatory diagram to the initial plane plate of the air cleaner head of the present invention   Explanatory drawing of air flow from jet port of conventional air cleaner head   Air flow explanatory view from the inclined outlet of the air cleaner head of the present invention   Dimensional symbol explanatory diagram of air cleaner head (inclined jet port) and vacuum head of the present invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Air cleaner head 2 Blower 3 HEPA filter 4 Pre filter 5 Air volume adjustment valve 6 Hose and pipe 7 Pressure chamber 8 Vacuum chamber (1)
9 Dust collecting surface 10 Spout 11 Suction port (1)
12 Air Flow 13 Vortex 14 Adhered Fine Dust 15 Scattered Fine Dust 16 Planar Plate 17 New Air Cleaner Head 18 Inclined Jet 19 Air Volume Control Valve (1)
20 Vacuum head 21 Vacuum room (2)
22 Suction port (2)
23 Receiving roller 24 Air flow adjustment valve (2)
25 Transport roller

Claims (2)

  The new air cleaner head 17 includes a pressure chamber 7 having an inclined jet outlet 18 for pressurized air, and a vacuum chamber ((1) 8) having two suction ports (1) 11 provided at the front and rear of the pressure chamber 7. However, in order to prevent chattering (abnormal vibration) of the flat plate 16 and to prevent temporary stop due to sticking, a receiving roller 23 and a plurality of suction ports (2) are newly provided below the flat plate 16. An air cleaner device comprising a vacuum chamber (2) 21 having an air volume 22 and a vacuum head 20 having an air volume adjusting valve (2) 24 for adjusting the intake air volume.   The direction in which the flat plate 16 travels on the new air cleaner head 17 set in the configuration of claim 1 is matched with the direction of the jet flow from the inclined jet port 18, so that chattering (abnormal vibration) or temporary stop due to sticking can be achieved. Air cleaner device that has a remarkable effect to prevent.

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