JP2008194661A - Jetting angle of jetting port, sucking angle of suction port, and arrangement of air cleaner head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air cleaner improved in stripping efficiency of attached fine dust and collection efficiency of scattered fine dust, causing no chattering. <P>SOLUTION: Provision of jetting ports 21 with a tilted angle of 60±5° to upper and lower air cleaner heads 19, 20 facilitates stripping of attached fine dust. Parallel arrangement of suction ports (1), (2) 22, 23 with a tilted angle of 30±5° to a pressurized air flow side increases the collection efficiency of scattered fine dust. The flow of the pressurized air from the tilted jetting ports 21 gently impinges on object articles, and the flow rate of the air is uniform between upper and lower spaces and dust collection faces 10, eliminating chattering and contributing to a further stable production process. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  With the recent development and development of miniaturization, miniaturization, and sophistication of digital electronic devices and semiconductor components, the presence and adhesion of fine dust in the air is increasingly affected by the quality and retention of products. Also, it has a great influence on the stabilization of the manufacturing process and the life.

  Therefore, among these digital electronic devices, as a method to stabilize and improve the separation efficiency of fine dust adhering to the surface of wafers, films, electronic components and liquid crystal glass and the collection efficiency of the scattered fine dust In addition, the present invention relates to a pressurized air ejection angle from a nozzle outlet of a cleaner head and a suction angle and arrangement of a suction port in an air cleaner device.

  A push-pull type air cleaner apparatus in a semiconductor manufacturing apparatus that has been conventionally used is configured as shown in FIG. The structure includes an upper cleaner head 1, a lower cleaner head 2, a pressure, a blower 3 as a vacuum air source, a HEPA filter 4 for purifying the pressurized air supplied by the cleaner head, and fine dust sucked from each cleaner head. The pre-filter 5 to collect, the damper 6 which adjusts an air volume (pressure), the hose pipe 7 which connects these, etc.

  This method is a closed loop (closed circuit) method, and it is an air circulation method that has a vacuum function to supply and eject pressurized air to one blower 3 and suck fine dust. However, there is an advantage that the equipment cost is low without breaking the air balance in the room.

  When the blower 3 is boosted, the air temperature rises due to the compression heat of the air, so care must be taken for products, parts, materials, etc. that are susceptible to temperature effects.

Next, the cross-sectional shapes of the conventional upper and lower air cleaner heads 1 and 2 are shown in FIG. The cross-sectional shape has a pressure chamber 8, a jet port 11, a vacuum chamber 9 on both sides, a suction port 12, and a smooth flat dust collecting surface 10.
The target product 18 moves on the transport roller 24.

  As shown in FIG. 3, the flow of air is obtained by spraying clean pressurized air from the upper portion of the target product 18 moving on the conveyor from the pressure chamber 8 through the jet port 11. By applying an impact force to the attached fine dust 15, the fine dust 16 is scattered and sucked and collected from the suction ports 12 provided at both ends of the ejection port 11.

In the current air cleaner apparatus, the material of the air cleaner head is made of an aluminum alloy casting and is lightened.
In the sectional view of the air cleaner head 1, as shown in FIG. 2, it is necessary to process the grooves of the jet port 11 at the lower portion and the two suction ports 12 at both ends thereof.

In the conventional air cleaner apparatus, when the target product 18 moving on the conveying roller 24 comes directly below the jet outlet 11, as shown in FIG. 3, the jetted pressurized air is applied to the adhering fine dust 15 from the upper side. An impact force is applied to peel off the adhered surface, and then scattered and moved to the suction ports 12 provided at the front and back to suck the scattered fine dust 16.
However, since the pressurized air from the upper side hits vertically, the attached fine dust 15 may be pressed down and peeled off from the attached surface 17 in some cases, and there is a problem in the collection efficiency of the scattered fine dust 16. Remain.

Further, as shown in FIG. 4, when the tip of the target product 18 comes directly under the jet port 11, the pressurized air travels to the lower side of the target product 18, causing chattering (abnormality due to disturbance of the air balance). Vibration) occurs, and the phenomenon that the target product 18 sticks to the suction port 12 on the rear side occurs. Therefore, the production line must be temporarily stopped to eliminate this trouble.
The occurrence of chattering (abnormal phenomenon) is also present when the rear end of the target product 18 passes directly below the jet outlet 11 as shown in FIG. Need to be resolved.
For this reason, it may affect the stabilization of the production line, and may affect the reduction of the collection efficiency of fine dust and the selection of the blower capacity.

  Accordingly, there is a demand for stable operation that eliminates chattering (moving vibration) of the target product 18 and does not reduce the collection efficiency of the scattered fine dust 16.

Means to solve the problem

As shown in FIG. 6, the present invention provides a new upper stage in which the jet angle (θ ₁ ) of the jet outlet 11 of the conventional upper and lower air cleaner heads 1 and 2 is processed to 60 ± 5 degrees with respect to the horizontal. In addition, by providing the inclined jet nozzles 21 of the lower air cleaner heads 19 and 20, as shown in FIG. Since it can be well ejected, the separation efficiency of the attached fine dust 15 is further improved.

  In addition, the suction ports 12 of the upper and lower air cleaner heads 1 and 2 of the conventional art are provided one before and after the ejection port 11, respectively. There is a case in which the dust 16 fluctuates, and the scattered fine dust 16 cannot be sufficiently collected at each of the suction ports 12, and the collection efficiency is limited.

Therefore, as shown in FIG. 6, according to the present invention, the _first suction port (1) 22 is disposed at an appropriate distance L1 along the flow of the jet pressurized air from the inclined jet port 21, and there. further, by providing the second suction mouth (2) 23 to a suitable distance _{L 2,} 7-8% of scattered fine dust 16, first one of the inlet (1) and collected in 22, The remaining scattered fine dust 16 that could not be collected here is collected at the second suction port (2) 23, thereby providing a double collection effect and further improving the collection efficiency.

Here, in order to make it easier to suck, the suction angle (θ ₂ ) is set to 30 ± 5 degrees with respect to the horizontal, and the fine dust 16 scattered by the first suction port (1) 22 is further dispersed. In order to collect 70 to 80%, it is necessary to make the suction speed 20 to 30% faster than the second suction port (2) 23. Therefore, the groove width W2 of the _second suction port (2) 23 should be set slightly wider (20-30%) than the groove width W1 of the _first suction port (1) 22. Correspond with.

  As described above, with respect to the occurrence of chattering (abnormal vibration) at the two inclined suction ports (1) 22 and (2) 23 in parallel with the newly set inclined jet port 21, the target product 18 is inclined to the inclined jet port 21. When it reaches the vicinity, the pressurized air is pressed from the upper side or turns downward to generate eddy currents and disturb the air balance, as shown in the previous figure. As shown in the figure, the same amount of pressurized air hits the upper and lower sides of the target product 18 and turns around, resulting in a gentler hit than before, better air balance, and chattering (abnormal vibration). In addition to contributing to the stable operation of the production line, the suction port angle has become more horizontal, which improves the separation efficiency of the attached fine dust 15 and the collection efficiency of the scattered fine dust 16. Can contribute.

The invention's effect

  One of the effects according to the present invention is that the separation efficiency of the attached fine dust 15 on the target product 18 and the collection efficiency of the scattered fine dust 16 are improved by 20% or more compared to the prior art, thereby improving the retention and the target product. By improving the quality of 18 and reducing unnecessary pressurized air, it can contribute to cost reduction.

  Also, two of the effects are that the flow 13 of pressurized air becomes gentle and the balance of the flow around the target product 18 improves, so that chattering (abnormal vibration) does not occur at all. The product 18 sticks to the inlet 12 and the production line can solve troubles such as a temporary stop, thereby contributing to the maintenance of a stable production process.

  Although the drawings so far show the target product 18 moving from the right side to the left side with respect to the air cleaner device, the same effect can be expected even if this moving direction is reversed.

In the best mode for carrying out the invention, as shown in FIG. 6, the pressure chamber 8 on the left side of the dust collecting surface 10 of each of the upper and lower air cleaner heads 19 and 20 has 60 ± 5 relative to the horizontal plane. provided an inclined spout 21 degrees at the groove width W _1, the vacuum chamber 9, the first one of the groove width W ₂ from the outlet position of the inclined spout 21 to a position suitable distance L ₁ to the right, the horizontal plane 30 ± 5 degrees inclined inlet to (1) 22 provided for, further to the position of the appropriate distance L ₂ to the right from its position, the second groove width W _3, 30 ± with respect to the horizontal plane 5 It is set as the shape which has the cross-sectional structure which provided the inclination suction inlet (2) 23 of the degree.
However, in this case, the groove width _{W 3,} it is assumed that the 20% to 30% wider than the groove width _{W 2.}

Therefore, in order to determine appropriate dimensions, an experimental device is created, an experiment is performed, and the experimental result is verified.
As shown in FIG. 11, the cleaner head of the new experimental air cleaner device has three types of experimental devices (A) and (B) in which the inclination angle θ ₁ of the jet port is changed, and a conventional device, with a line speed ν ₁ . Instead, the following two evaluation experiments were performed.

1. Evaluation items (1) Chattering (visual)
(2) Fine dust collection ability (particle counter)

2. Test conditions (1) Base material: PET film (2) Fine dust: Environmental dust (PSL)
(3) Blowing air pressure: 15 kpa, (4) Suction port angle: θ ₂ = 30 °
(5) Base material and gap: H ₁ = about _{1 to} 2.5 mm
(6) Line speed: υ _L = 20 m / min

3. Types of experimental apparatus (1) Experimental apparatus (A): ejection groove width: W ₁ = 1.0 mm, ejection angle: θ ₁ = 45 °
Suction port groove width: W ₂ = 2.0 mm, Suction port groove width: W ₃ = 2.5 mm
(2) Experimental apparatus (B): Outlet groove width: W ₁ = 1.0 mm, Outlet angle: θ ₁ = 60 °
Suction port groove width: W ₂ = 2.0 mm, Suction port groove width: W ₃ = 2.5 mm
(3) Experimental apparatus (C): ejection port width: W ₁ = 1.0 mm, ejection port angle: θ ₁ = 90 °
Suction port groove width: W ₂ = W ₃ = 2.0 mm,
* Experimental equipment (C) is a conventional equipment.

Experimental result

From the experimental results, the device of the present invention can further improve the separation efficiency of the attached fine dust and the collection efficiency of the scattered fine dust, and eliminate chattering (abnormal vibration) compared with the conventional device. Judge that.
In particular, the experimental apparatus (B) having a jet nozzle angle of 60 degrees obtained better results than the experimental apparatus (A). This effect can contribute to the stabilization of the manufacturing process and the improvement of operation efficiency, and further to cost reduction.

Industrial applicability is considered to be optimal for a cleaning apparatus for fine dust adhered on the surface of a semiconductor substrate, a high value-added film, a glass plate, a thin plate or the like.
In particular, demand for these thin glass plates is expected to increase due to an increase in capital investment accompanying the ever-increasing size of liquid crystal televisions and plasma televisions.

The new air cleaner apparatus according to the present invention can easily cope with the width of the glass plate as the target product in consideration of a method in which pressurized air is uniformly ejected even when the width is 2 to 3 m.
At present, the glass plate is in operation until the width of the glass plate reaches about 1.5 m, and the possibility of being used for future enlargement is expected to increase more and more.

  As other fields, application to photographic paper, high-quality paper, pharmaceuticals, nanotech products, and components is also in view.

  Configuration diagram of push-pull type air cleaner   Cross section of a conventional air cleaner head   Explanatory drawing of air flow on dust collecting surface of conventional air cleaner head   Explanatory diagram of air flow to initial target product of conventional air cleaner head   Explanatory diagram of air flow to the target product of the conventional air cleaner head   Sectional view of the air cleaner head of the present invention   Peeling state diagram of adhering fine dust   Air flow explanatory diagram of dust collecting surface of air cleaner head of the present invention   Air flow explanatory diagram of the initial product of the air cleaner head of the present invention   Air flow explanatory diagram to the final product of the air cleaner head of the present invention   Dimensional symbol for experiment of air cleaner head of the present invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Upper air cleaner head 2 Lower air cleaner head 3 Blower 4 HEPA filter 5 Pre filter 6 Air volume adjustment valve 7 Hose pipe 8 Pressure chamber 9 Vacuum chamber 10 Dust collection surface 11 Outlet 12 Suction port 13 Air flow 14 Vortex 15 Dust 16 Scattered fine dust 17 Adhered surface 18 Target product 19 (New) Upper air cleaner head 20 (New) Lower air cleaner head 21 Inclined outlet 22 Suction inlet (1)
23 Suction port (2)
24 Transport roller

Claims (3)

  An air cleaner device in which the jet angle of the inclined jet port of the pressurized air of the air cleaner head is set to 60 ± 5 degrees with respect to the horizontal plane.   An air cleaner device in which the suction angle of the fine dust suction port of the air cleaner head is set to 30 ± 5 degrees with respect to the horizontal plane.   An air cleaner device in which two air inlets of the air cleaner head are arranged in parallel at an appropriate distance in the jet direction of the inclined jet port.

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