TWI568510B - Dust-removing nozzle and dust-removing apparatus - Google Patents

Description

Dust removal nozzle and dust removal device

The present invention relates to a dust removing nozzle and a dust removing device.

A (small) electronic component having a small area such as a CMOS image sensor or a CCD image sensor is arranged in a plurality of columns on a printed circuit board or a card tray, and is moved on a production line. The small-area portion of the (small) electronic component is a part that is particularly required for ultra-high cleanliness. Conventionally, there has been known a dust removing device that removes foreign matter such as dust or fine particles adhering to the small-area portion by ejecting and sucking air. For an example of the dust removing device, please refer to Japanese Laid-Open Patent Publication No. 2014-100622.

However, in the conventional dust removing device, by taking into consideration the long cleaning head (dusting head) corresponding to the entire length of the printed circuit board or the card tray, the portion other than the small area portion is also sprayed with air for dust removal and washing. The disadvantage that the excess air is consumed in a portion other than the small-area portion causes a decrease in the cleaning efficiency of the small-area portion which is the most important point of dust removal. Further, there are generally many fine circuits having a diameter of several tens of micrometers around the small-area portion, and the high-pressure, high-speed air that is ejected may cause the ultrafine circuit to be broken or damaged.

Here, an object of the present invention is to provide a dust removing nozzle and a dust removing device which can clean a portion which is small in size, such as a sensor, which is particularly required to have high cleanliness in an electronic component, and which is concentrated and efficiently.

The dust removing nozzle of the invention is used for washing with air and has the requirement of ultra-high cleanliness An electronic component for a small area of the dust to be removed, the dust removing nozzle comprising: an air ejection hole for discharging air into a contour of the small area to be dusted; and an air suction hole surrounding the air ejection hole It is assumed that the discharged air is sucked around the contour of the small area portion to be dusted. Further, the electronic component is provided with a very fine circuit which is along a part of the outline of the small area to be dusted to the entire circumference, and the dust removing nozzle is configured not to directly discharge air to the pole. The micro-circuit is directed by the air ejection hole to aim the air to be ejected in a small area to be dusted.

Moreover, the small area portion to be dusted is a sensor.

Moreover, the dust removing device of the present invention includes: a conveying means for arranging the electronic component groups in a plurality of rows parallel to each other and intermittently conveying; and a plurality of dust removing nozzles arranged in an orthogonal manner to the conveying means In the width direction of the direction, a part of each electronic component of the electronic component group is provided with a small area portion requiring dust removal requiring ultra-high cleanliness, and each of the dust removing nozzles has an air ejection hole and an air suction hole, and the air ejection hole is directed to the Air is blown out from the outline of the small-area portion to be dusted, and the air suction hole is disposed to surround the air ejection hole, and the air to be ejected is sucked around the contour of the small-area portion to be dust-removed, and further, the plurality of dust-removing The nozzles are arranged corresponding to the respective rows of the electronic component group, and the electronic component is provided with a very fine circuit which is along a part of the contour of the small area portion to be dusted to the entire circumference, the dust removing nozzle The electronic component that is intermittently transported to the transport means and is in a stopped state does not directly discharge air to the micro-fine circuit, but is required to Discharging air in the small area contour portion of the dust, and to the peripheral contour of the small area portion of the dust discharge the required intake air.

According to the dust removing nozzle of the present invention, in accordance with the area and shape of the small-area portion to be dust-removed, the air-discharging hole and the air-suction hole are disposed in each of the dust-removing nozzles, so that the air leakage is hardly generated, and only the air is sprayed out to be washed. The small area that needs to be dusted can clean the small area that needs to be dusted efficiently. Moreover, it is possible to reduce the amount of air consumption without consuming excess air. And it can be removed without causing foreign matter to fly around. The air ejected from the air ejection hole reaches the prescribed pressure in an instant and The wind speed, the air released in a short time, can surely remove the foreign matter in the small area where dust is to be removed, and improve the cleaning efficiency.

According to the dust removing device of the present invention, a plurality of dust removing nozzles are disposed corresponding to the respective rows of the electronic component group, and the small-area portion to be dust-removed provided for each electronic component can be efficiently cleaned. Further, in accordance with the area and shape of the small-area portion to be dust-removed, the air-discharging hole and the air-suction hole are disposed in each of the dust-removing nozzles, so that there is almost no leakage of air, and only the air is ejected to a small area to be cleaned. The department can clean the small area that needs to be dusted efficiently. Moreover, it is possible to reduce the amount of air consumption without consuming excess air. And it can be removed without causing foreign matter to fly around. The air ejected from the air ejection hole reaches a predetermined pressure and a wind speed in an instant, and the air released in a short time can surely remove foreign matter in a small area to be dusted, thereby improving the cleaning efficiency. A dust removal nozzle can be provided corresponding to the number of electronic components that are simultaneously conveyed to improve the cleaning efficiency.

1‧‧‧dust removal nozzle

11‧‧‧Air spout pipe

12‧‧‧Air intake pipe

13‧‧‧Nozzle body

14‧‧‧ 盖部

15‧‧ ‧stop

15A‧‧‧First stop

15B‧‧‧second stop

16‧‧‧Enlarged hole

17‧‧‧Reduced holes

1A‧‧‧ opposite

2‧‧‧Small area requiring dust removal

3‧‧‧Air venting holes

4‧‧‧Air suction hole

6‧‧‧Electronic parts

7‧‧‧Supersonic generator

8‧‧‧ extremely fine circuit

10‧‧‧Electronic parts group

20‧‧‧ means of transport

C‧‧‧Transport direction

F‧‧‧Airflow

L‧‧‧ contour

P‧‧‧Air blasting area

V‧‧‧Air intake area

W‧‧‧Clean area

Fig. 1 is an enlarged bottom plan view showing an embodiment of a dust removing nozzle of the present invention.

Fig. 2 is a cross-sectional view of Fig. 1, (A) is a D-D cross-sectional view, and (B) is an E-E cross-sectional view.

Fig. 3 is an enlarged plan view, (A) is an enlarged plan view showing an electronic component, and (B) is an enlarged plan view showing a correspondence relationship between a dust removing nozzle and an electronic component.

Fig. 4 is a partial view showing an embodiment of the dust removing device of the present invention, wherein (A) is a plan view and (B) is a perspective view.

Fig. 5 is a bottom view showing another embodiment of the dust removing nozzle, wherein (A) is a bottom view showing an example thereof, and (B) is a bottom view showing another example.

Fig. 6 is a bottom view showing another embodiment of the dust removing nozzle, (C) is a bottom view showing an example thereof, (D) is a bottom view showing another example, and (E) is a bottom view showing another example.

Fig. 7 is a bottom view showing another embodiment of the dust removing nozzle, wherein (F) is a bottom view showing an example thereof, (G) is a bottom view showing another example, and (H) is a bottom view showing another example.

The above and other objects, features and advantages of the present invention will become more <RTIgt;

Fig. 4 shows an embodiment of a dust removing device having a dust removing nozzle of the present invention which ejects air to the electronic component 6 for dusting and washing, and a part of the electronic component 6 has a small area portion 2 to be dusted. The electronic components 6 are arranged in a lattice or staggered arrangement, for example, on a printed circuit board or a card tray, and the dust removing nozzles 1 are provided corresponding to the respective rows of the electronic components 6, and one of the electronic components 6 is required to be dust-removed. In the area portion 2, one dust removing nozzle 1 is disposed to face each other.

As shown in Fig. 3, the small area 2 to be dusted is formed by a sensor such as a CMOS image sensor or a CCD image sensor. The electronic component 6 is provided with an extremely fine circuit 8 which is along a part of the outline L of the small-area portion 2 to be dusted to the entire periphery. The small-area portion 2 to be dust-removed is formed in a rectangular shape in plan view, and the minimum size is set to 4.4 mm × 3.3 mm, and the maximum size is set to 36 mm × 24 mm. The small-area portion 2 to be dust-removed is most necessary for dust removal in the electronic component 6, and particularly requires high cleanliness. Specifically, the foreign matter attached per unit area (mm ² ) is less than five in size 1 μm. The ultrafine circuit 8 has a diameter of 10 μm to 20 μm in terms of a circular cross section. Further, the outline L of the small-area portion 2 to be dust-removed is not limited to a rectangular shape, and can be freely changed into a circular shape, an elliptical shape, or a short side in which a rectangular shape is formed into an arc shape. Further, the other small-area portion 2 to be dust-removed may be a crystal element, a MEMS (Micro Electro Mechanical System), a semiconductor wafer, an optical component, or the like, and is omitted in the drawings.

As shown in Fig. 1 and Fig. 2, the dust removing nozzle 1 is provided with a plurality of air ejection holes 3 for ejecting air and a plurality of suction air on the surface 1A opposed to the small-area portion 2 to be dust-removed. The air is sucked into the hole 4. As shown in Fig. 3(B), the dust removing nozzle 1 is in a state opposed to the small-area portion 2 to be dust-removed, and the air ejection hole 3 is disposed in the region P in the outline L of the small-area portion 2 to be dust-removed. The air ejection hole 3 ejects air into the outline L of the small-area portion 2 to be dusted. In other words, the dust removing nozzle 1 is configured such that the air is not directly ejected to the extremely fine circuit 8 disposed around the contour L of the small-area portion 2 to be dust-removed, and the air ejection hole 3 is aimed at the small-area portion 2 to be dust-removed. Air is ejected. The air suction hole 4 is provided to surround (a plurality of) air ejection holes 3 so as to suck in the discharged air in the peripheral region V of the outline L of the small-area portion 2 to be dusted. Hereinafter, the region P in the outline L of the small-area portion 2 to be dusted is used as the air ejection region, and the peripheral region V of the outline L of the small-area portion 2 to be dusted is taken as the air suction region.

In the first and second figures, the dust removing nozzle 1 is formed in a short rectangular column shape in plan view, and has a nozzle body portion 13 and a lid portion 14, and the nozzle body portion 13 is connected to supply and exhaust. The air pipe connector has a plurality of air ejection holes 3 and a plurality of air suction holes 4. The dust removing nozzle 1 has an air blowing pipe 11 that communicates with and is connected to the plurality of air blowing holes 3, and an air suction pipe 12 that communicates with the plurality of air suction holes 4, and an air discharge pipe in the cover portion 14. The road 11 is provided with an ultrasonic generator 7. The ultrasonic generator 7 is formed by an air ejection hole 3 and a plurality of stoppers 15, which are provided with the same number of through holes as the air ejection holes 3, and the stopper 15 is provided with the first stopper 15A and the first There are two types of two stoppers 15B. The first stopper 15A has an enlarged hole 16 having a larger diameter than the air ejection hole 3, and the second stopper 15B has a reduction hole 17 having a smaller diameter than the enlarged hole 16, and two kinds of stoppers 15A, 15B is an interactive configuration. The air ejection hole 3, the enlarged hole 16 and the reduced hole 17 form a continuous ultrasonic wave generating hole whose cross-sectional area is repeatedly enlarged and reduced. Further, the air ejection hole 3 and the continuous ultrasonic wave generating hole may be integrally formed at the bottom of the lid portion 14.

As shown in Fig. 1, the air ejection hole 3 is a circular hole having a small diameter, and the diameter D _{0 is} preferably set to 0.45 mm to 0.75 mm. On the other hand, the air suction hole 4 may be a circular hole having a large diameter, and the diameter D ₁ is 3 to 5 times the diameter D ₀ of the air ejection hole 3, and specifically, it is preferably set to 1.5 mm. ~3.5mm. When the diameter D _{0 of the} air ejection hole 3 is less than the above lower limit, the piercing process is difficult, and if it exceeds the above upper limit, the air velocity of the discharged air is lowered. Further, if the diameter D _{1 of the} air suction hole 4 is less than the above lower limit value, foreign matter may not be removed, and if it exceeds the above upper limit value, the size of the dust removing nozzle 1 is excessively large.

Next, the dust removing device of the present invention will be described. As shown in Fig. 4, the dust removing device of the present invention includes a conveying means 20 and a plurality of dust removing nozzles 1, and the conveying means 20 arranges the electronic component groups 10 in a plurality of rows parallel to each other and intermittently conveys the dust. The nozzles 1 are arranged in the width direction orthogonal to the transport direction C of the transport means 20, and a plurality of dust removing nozzles 1 are disposed corresponding to the respective rows of the electronic component group 10. The transport means 20 can be constituted, for example, by an endless conveyor belt that connects both end portions in the longitudinal direction, a drum supported by the inside of the conveyor belt, a motor that drives the drum, a conveyor, and the like. A part of each of the electronic components 6 of the electronic component group 10 is provided with a small-area portion 2 requiring dust removal requiring ultra-high cleanliness. The portion of the 2 series electronic parts 6 that needs to be dust-removed is most in need of dust removal.

As shown in Fig. 1 and Fig. 4(B), the dust removing nozzle 1 is configured such that the electronic component 6 that is intermittently conveyed to the transporting means 20 and is in a stopped state is placed in the outline L of the small-area portion 2 to be dust-removed. The air ejection hole 3 ejects air, and sucks the ejected air around the contour L of the small-area portion 2 to be dusted to the air suction hole 4. The dust removing nozzle 1 is disposed at a washing position W across the conveying direction C corresponding to the number of electronic parts 6 that are simultaneously conveyed, and is arranged in the lateral direction (orthogonal to the conveying direction C) by the same number, for one on the electronic part 6. A small area portion 2 for dust removal is required, and one dust removing nozzle 1 is disposed opposite to the ground. Further, the dust removing nozzles 1 may be configured to be arranged in a plurality of rows, and simultaneously washed at a plurality of cleaning positions W to correspond to more electronic components 6.

The method (operation) of the above-described dust removing nozzle of the present invention will be described below. As shown in FIG. 2(A), the predetermined high-pressure air is supplied to the air discharge line 11 of the dust removing nozzle 1 by the supply air pipe. The air supplied to the air discharge pipe 11 is generated by ultrasonic waves. The airflow (ultrasonic air) F having a supersonic wave having a frequency of 20 kHz to 100 kHz is ejected from the air ejection hole 3. The air ejection line 11 has a small positive volume, and the air ejection line 11 reaches a predetermined pressure in a short time, and a high-speed (140 m to 200 m/sec) air flow F is ejected from the air ejection hole 3.

In Fig. 3(B), the dust removing nozzle 1 is in the air ejection region P in the outline L of the small-area portion 2 to be dust-removed, and the air ejection hole 3 ejects air to the small-area portion 2 to be dust-removed. The dust removing nozzle 1 ejects air only to the small-area portion 2 to be dust-removed, and the foreign matter is peeled off from the surface of the small-area portion 2 to be dust-removed. In other words, the dust removing nozzle 1 is directed to the small-sized circuit 8 disposed around the contour L of the small-area portion 2 to be dust-removed by the air ejection hole 3 aiming at the small-area portion 2 to be dust-removed. The dust removing nozzle 1 does not spray air around the contour L of the small-area portion 2 to be dust-removed, and does not generate an excessive air leak. Therefore, the excess air is not consumed, and the small-area portion to be dust-removed is efficiently washed with a small amount of air consumption.

The foreign matter peeled off from the surface of the small-area portion 2 to be dust-removed is sucked into the air suction hole V around the contour L of the small-area portion 2 to be dust-removed, and the foreign matter is supplied from the air suction pipe 12 to the exhaust gas. It is discharged by air piping. The dust removing nozzle 1 is in the air suction region V surrounding the air ejection region P, and sucks the air ejected from the air ejection hole 3 so that foreign matter does not fly around and is removed.

Further, the present invention can be modified. For example, the dust removing nozzle 1 can be formed in a slit shape as shown in Fig. 5(A). The air suction hole 4 of the slit shape is disposed at two places around the contour L of the small-area portion 2 to be dusted so as to sandwich the air ejection region P. Further, as shown in Fig. 5(B), the air suction hole 4 is formed in a closed loop shape so as to surround the contour L of the small-area portion 2 to be dust-removed.

As shown in Fig. 6, in the case where the small-area portion 2 to be dust-removed has a circular shape, the dust-removing nozzle 1 is preferably formed in a circular shape in plan view. In Fig. 6(C), the dust removing nozzle 1 is attached to A plurality of air ejection holes 3 are radially disposed in the outline L of the small-area portion 2 to be dust-removed, and a plurality of air suction holes 4 are disposed so as to surround the contour L of the small-area portion 2 to be dust-removed. In Fig. 6(D), the air suction hole 4 is formed as a slit that is curved in an arc shape, and in Fig. 6(E), the air suction hole 4 is formed in an annular shape to surround a small area to be dusted. The contour of the portion 2 is arranged around the contour L. Further, as shown in Fig. 7, when the area (size) of the small-area portion 2 to be dusted is increased, the number of the air ejection holes 3 and the air suction holes 4 is increased, or the area of the air suction holes 4 is increased. In Fig. 7(F), more air ejection holes 3 than the illustrations shown in Fig. 1 are disposed in the outline L of the small-area portion 2 to be dust-removed, and the contour L of the small-area portion 2 to be dust-removed is surrounded. A plurality of air suction holes 4 are provided in the surrounding manner. In Fig. 7(G), the air suction hole 4 has a slit shape, and in Fig. 7(H), the air suction hole 4 has a U-shape, and surrounds the contour L of the small-area portion 2 to be dust-removed. Assume.

As described above, the dust removing nozzle of the present invention is for cleaning the electronic component 6 having the small-area portion 2 requiring dust removal requiring high cleanliness, and the dust removing nozzle includes the air ejection hole 3 for the dust to be removed. Air is ejected from the outline L of the small-area portion 2, and the air suction hole 4 is disposed so as to surround the air ejection hole 3, and the air to be ejected is sucked around the contour L of the small-area portion 2 to be dust-removed. The air ejection hole 3 and the air suction hole 4 can be disposed corresponding to the area and shape of the small-area portion 2 to be dust-removed, and the air leakage can be hardly generated, and the air can be ejected only to the small-area portion 2 to be cleaned. The small-area portion 2 to be dust-removed can be cleaned efficiently and surely. Moreover, it is possible to reduce the amount of air consumption without consuming excess air. And it can be removed without causing foreign matter to fly around. The air ejected from the air ejection hole 3 reaches a predetermined pressure and a wind speed in an instant, and the air released in a short time can surely remove the foreign matter of the small-area portion 2 to be dusted, thereby improving the washing efficiency.

Further, the electronic component 6 is provided with a micro-fine circuit 8 which is along a part of the outline L of the small-area portion 2 to be dust-removed to the entire circumference, and the dust-removing nozzle is configured not to make air. Directly ejected to the micro-fine circuit 8 by the air ejection hole 3 Aiming at the small-area portion 2 to be dust-removed, the air can be ejected only to the small-area portion 2 to be dust-removed, and the small-area portion 2 to be dust-removed is efficiently and surely cleaned. .

Moreover, the small-area portion 2 to be dust-removed is a sensor, so that the dust is most needed in the electronic component 6, and the air can be concentratedly discharged only to the small-area portion 2 requiring dust removal, which is particularly required for high cleanliness, and is efficient. And cleanly clean the small area portion 2 to be dusted.

Further, the dust removing device of the present invention includes a conveying means 20 and a plurality of dust removing nozzles 1 which arrange the electronic component groups 10 in a plurality of rows which are parallel to each other and are intermittently conveyed, and the dust removing nozzles 1 are arranged and arranged. A part of each of the electronic components 6 of the electronic component group 10 is provided with a small-area portion 2 requiring dust removal requiring ultra-high cleanliness, which is orthogonal to the width direction of the transporting means 20, and the dust-removing nozzle 1 is provided with air. a discharge hole 3 and an air suction hole 4 for discharging air into a contour L of the small-area portion to be dust-removed, the air suction hole 4 being disposed to surround the air ejection hole 3, and the dust is required to be removed The air to be ejected is sucked around the outline L of the small-area portion 2, and the plurality of dust-removing nozzles 1 are arranged to be arranged corresponding to the respective rows of the electronic component group 10, and the transport means 20 is intermittently transported and stopped. In the electronic component 6 of the state, air is ejected into the outline L of the small-area portion 2 to be dust-removed, and the air to be ejected is sucked around the contour L of the small-area portion 2 to be dust-removed, so that the plurality of dust-removing nozzles 1 correspond to the electrons. zero The respective rows of the group 10 are disposed, and the small-area portion 2 to be dust-removed provided in each of the electronic components 6 can be efficiently cleaned. Further, in accordance with the area and shape of the small-area portion 2 to be dust-removed, the air-discharging holes 3 and the air-suction holes 4 are disposed in the respective dust-removing nozzles, so that there is almost no leakage of air, and only air is discharged to the dust to be cleaned. The small area portion 2 can efficiently clean the small area portion 2 to be dusted. Moreover, it is possible to reduce the amount of air consumption without consuming excess air. And it can be removed without causing foreign matter to fly around. The air ejected from the air ejection hole 3 reaches a predetermined pressure and a wind speed in an instant, and the air released in a short time can surely remove the foreign matter of the small-area portion 2 to be dusted, thereby improving the washing efficiency. Dedusting spray can be provided according to the number of electronic parts 6 that are simultaneously transported Mouth 1, improve cleaning efficiency.

While the present invention has been disclosed in the above embodiments, it is not intended to limit the scope of the present invention. The scope of protection of the invention is therefore defined by the scope of the appended claims.

1‧‧‧dust removal nozzle

1A‧‧‧ opposite

3‧‧‧Air venting holes

4‧‧‧Air suction hole

L‧‧‧ contour

P‧‧‧Air blasting area

V‧‧‧Air intake area

D ₀ ‧‧‧Air ejection hole diameter

D ₁ ‧‧‧Air suction hole diameter

Claims (3)

A dust removing nozzle for cleaning an electronic component having a small area requiring dust removal requiring ultra-high cleanliness, the dust removing nozzle comprising: an air ejection hole facing the outline of the small area to be dusted Ejecting air; and an air suction hole is disposed to surround the air ejection hole, and the air to be ejected is sucked around the contour of the small area portion to be dusted, wherein the electronic component is provided with a micro-fine circuit. The ultra-fine circuit is along a part of the contour of the small-area portion to be dusted to the entire circumference, and the dust-removing nozzle is configured not to directly discharge air to the micro-fine circuit, but the air ejection hole is aimed at the need The small area of the dust is sprayed with air. The dust removing nozzle according to claim 1, wherein the small area portion to be dusted is a sensor. A dust removing device comprising: a conveying means for arranging an electronic component group into a plurality of columns parallel to each other and intermittently conveying; and a plurality of dust removing nozzles arranged in a width orthogonal to a conveying direction of the conveying means In the direction, a part of each electronic component of the electronic component group is provided with a small area portion requiring dust removal requiring ultra-high cleanliness, and each of the dust removing nozzles has an air ejection hole and an air suction hole, and the air ejection hole is directed to the dust removal Air is blown out from the outline of the small-area portion, and the air suction hole is disposed to surround the air ejection hole, and the air to be ejected is sucked around the contour of the small-area portion to be dust-removed, and further, the plurality of dust-removing nozzles are paired Each of the electronic component groups is disposed, and the electronic component is provided with a very fine circuit which is formed along a part of the outline of the small area portion to be dusted to the entire circumference, and the dust removing nozzle is configured as The electronic component that is intermittently conveyed by the conveying means and is in a stopped state does not directly discharge air to the micro-fine circuit, but is directed to the dust-removing device. The small area around the contour portion of the inner contour of the area of the air ejection portion, and the need to discharge the dust of the air intake.