CN106563667A - Dust-removing nozzle and dust-removing apparatus - Google Patents
Dust-removing nozzle and dust-removing apparatus Download PDFInfo
- Publication number
- CN106563667A CN106563667A CN201610014288.7A CN201610014288A CN106563667A CN 106563667 A CN106563667 A CN 106563667A CN 201610014288 A CN201610014288 A CN 201610014288A CN 106563667 A CN106563667 A CN 106563667A
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- Prior art keywords
- mentioned
- gas
- dedusting
- spray
- nozzle
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
- B08B5/023—Cleaning travelling work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0278—Arrangement or mounting of spray heads
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
- B08B5/043—Cleaning travelling work
Abstract
It is possible to clean and clean a small area such as a sensor that requires a particularly high degree of cleanliness in the electronic component. (1) for discharging the gas toward the outer surface (L) of the dust removing small face portion in the dust removing nozzle which is cleaned by the gas to the electronic component which requires a high degree of cleanliness of the dust discharge hole (3) and a gas suction hole (4) which is arranged so as to surround the gas discharge hole (3) and attract the discharged gas from the outside of the contour of the dust removing small face.
Description
Technical field
The present invention relates to Spray-nozzle for removing dust and dust arrester.
Background technology
For example, possesses the little face of CMOS image sensor or CCD image sensor etc.（Small-sized）Electronic component is arranged with being arranged in multiple row on printed circuit board (PCB) or boxlike pallet, and is flowed on a production line.
（Small-sized）Above-mentioned little face in electronic component is the position for especially requiring ultra-high purity.In the past, it is known to by the ejection of gas, the dust arrester for attracting and will be attached to the foreign matter removings such as dust or particulate on above-mentioned little face（With reference to patent document 1）.
Patent document 1：Japanese Laid-Open 2014-100622 publication.
But, conventional dust arrester is by considering the cleaning head grown crosswise corresponding with the whole width of printed circuit board (PCB) or boxlike pallet（Dust removal head）Position to beyond above-mentioned facet portion also blows and sprays gas to carry out dedusting, cleaning.Because the position beyond little face consumes unnecessary gas, there is that the cleaning efficiency for needing most the important little face of dedusting is reduced.Additionally, in general there is the superfine distribution of a diameter of some tens of pm mostly in the foreign side position of the little face, superfine distribution has the possibility for breaking, damaging because of high pressure, the blowing and spraying for gas of high speed.
The content of the invention
For this purpose, it is an object of the invention to provide a kind of Spray-nozzle for removing dust and dust arrester, can concentrate and expeditiously the part to requiring the small area of the above-mentioned sensor etc. of extra high cleanliness factor in electronic component is cleaned.
Spray-nozzle for removing dust involved in the present invention is want the Spray-nozzle for removing dust that the little facial electronic component of dedusting is cleaned by what gas possessed requirement ultra-high purity to local, wherein, possess the gas squit hole for making gas spray towards in the above-mentioned profile for wanting the little face of dedusting, and to surround the gas inlet hole that above-mentioned gas spray poroid the gas for arranging and being attracted ejection by the foreign side of the above-mentioned above-mentioned profile for want the little face of dedusting.
In addition, on above-mentioned electronic component along the above-mentioned above-mentioned profile for wanting the little face of dedusting foreign side part or throughout complete cycle be equipped with superfine distribution, gas is aimed at being directly sprayed onto above-mentioned superfine distribution and above-mentioned want the little face of dedusting from above-mentioned gas squit hole ejection gas.
Additionally, above-mentioned want the little face of dedusting to be sensor.
In addition，Dust arrester involved in the present invention possesses electric component group is arranged in many column-shaped being parallel to each other and the conveyer for being fed off and on，The width orthogonal with the direction of the above-mentioned feeding of above-mentioned conveyer and multiple Spray-nozzle for removing dust for setting with edge，What each electronic component local of above-mentioned electric component group possessed requirement ultra-high purity wants the little face of dedusting，Above-mentioned each Spray-nozzle for removing dust possesses the gas squit hole for making gas spray towards in the above-mentioned profile for wanting the little face of dedusting，With surrounding the gas inlet hole that above-mentioned gas spray poroid the gas for arranging and being attracted ejection by the foreign side of the above-mentioned above-mentioned profile for want the little face of dedusting，Further，Multiple Spray-nozzle for removing dust are accordingly equipped with each row of above-mentioned electric component group，Relative to being conveyed by above-mentioned conveyer and become the above-mentioned electronic component of halted state off and on，Gas is sprayed towards in the above-mentioned profile for wanting the little face of dedusting，And want the foreign side of the little facial above-mentioned profile of dedusting to attract the gas for spraying by above-mentioned.
Spray-nozzle for removing dust of the invention, gas squit hole and gas inlet hole are accordingly arranged with the area and shape of the little face of dedusting is wanted, hardly there is gas leakage, only gas can be blowed and sprayed to the little face of dedusting of wanting for needing cleaning, expeditiously to wanting the little face of dedusting to be cleaned.Additionally, unnecessary gas will not be consumed, consumed cabin air amount can be mitigated.Foreign matter can not be made to be removed with dispersing to surrounding.The gas sprayed from gas squit hole can instantaneously reach the pressure and wind speed of regulation, be released by the gas of short time, i.e., can reliably remove the foreign matter wanted on the little face of dedusting, improve cleaning efficiency.
Dust arrester of the invention, with each row of electric component group multiple Spray-nozzle for removing dust are accordingly arranged, and the little face of dedusting of wanting that can be expeditiously to being located on each electronic component is cleaned.In addition, gas squit hole and gas inlet hole are accordingly arranged on each Spray-nozzle for removing dust with the area and shape of the little face of dedusting is wanted, hardly there is gas leakage, only gas can be blowed and sprayed to the little face of dedusting of wanting for needing cleaning, expeditiously to wanting the little face of dedusting to be cleaned.Additionally, unnecessary gas will not be consumed, consumed cabin air amount can be mitigated.Foreign matter can not be made to be removed with dispersing to surrounding.The gas sprayed from gas squit hole can instantaneously reach the pressure and wind speed of regulation, be released by the gas of short time, i.e., can reliably will be on the little face of dedusting foreign matter remove, improve cleaning efficiency.Arrange quantity and convey the number identical Spray-nozzle for removing dust of the electronic component for coming simultaneously, it is possible to increase cleaning efficiency.
Description of the drawings
Fig. 1 is the amplification inclinating view of an embodiment of the Spray-nozzle for removing dust for representing involved in the present invention；
Fig. 2 is the sectional view of Fig. 1, Fig. 2（A）It is D-D to sectional view, Fig. 2（B）It is E-E to sectional view；
Fig. 3 is amplification plan view, Fig. 3（A）It is the amplification plan view for representing electronic component, Fig. 3（B）It is the amplification plan view for illustrating Spray-nozzle for removing dust and the corresponding relation of electronic component；
Fig. 4 is the accompanying drawing for wanting portion of an embodiment of the dust arrester for representing involved in the present invention, Fig. 4（A）It is top view, Fig. 4（B）It is stereogram；
Fig. 5 is the upward view of the other embodiment for representing Spray-nozzle for removing dust, Fig. 5（A）It is the upward view for representing one example, Fig. 5（B）It is the upward view for representing other examples；
Fig. 6 is the upward view of the other embodiment for representing Spray-nozzle for removing dust, Fig. 6（C）It is the upward view for representing one example, Fig. 6（D）It is the upward view for representing other examples, Fig. 6（E）It is the upward view for representing other example；
Fig. 7 is the upward view of another embodiment for representing Spray-nozzle for removing dust, Fig. 7（F）It is the upward view for representing one example, Fig. 7（G）It is the upward view for representing other examples, Fig. 7（H）It is the upward view for representing other example.
Description of reference numerals
1：Spray-nozzle for removing dust, 2：Want the little face of dedusting, 3：Gas squit hole, 4：Gas inlet hole, 6：Electronic component, 8：Superfine distribution, 10：Electric component group, 20：Conveyer, L：Profile.
Specific embodiment
Hereinafter, the present invention is described in detail based on the accompanying drawing for representing embodiment.
Fig. 4 represents an embodiment of the dust arrester with Spray-nozzle for removing dust involved in the present invention, and the device is used to possess relative to local to be wanted little facial 2 electronic component 6 of dedusting to blow and spray gas and carry out dedusting, cleaning.Electronic component 6 is for example arranged with being arranged in clathrate or zigzag on printed circuit board (PCB) or boxlike pallet, accordingly be provided with Spray-nozzle for removing dust 1 with each row of electronic component 6, be arranged to a Spray-nozzle for removing dust 1 relative to want on each electronic component 6 dedusting little facial 2 be opposed shape.
As shown in figure 3, wanting dedusting little facial 2 to be for example made up of sensors such as CMOS image sensor or CCD image sensors.On electronic component 6 along the profile L for wanting dedusting little facial 2 foreign side part or be equipped with throughout complete cycle superfine distribution 8.Dedusting little facial 2 is wanted to be formed as overlooking substantially rectangular in legend, minimum is set to the size of 4.4mm × 3.3mm, and maximum is set to the size of 36mm × 24mm.Dedusting little facial 2 is wanted to need most dedusting in electronic component 6, it is desirable to extra high cleanliness factor.Specifically, per unit area（mm2）The size of attachment is 1 μm of foreign matter less than 5.If superfine distribution 8 refers to sectional area for circle, its a diameter of 10 μm～20 μ.
In addition, the profile L for wanting dedusting little facial 2 is not limited to rectangle, it is free to change circular or ellipticity, or rectangular minor face is formed as shape of arc-shaped etc..In addition, although eliminate diagram, but dedusting little facial 2, or crystal element, MEMS are wanted as other（Small Electro Mechanical System）, semiconductor wafer, optical element etc..
As depicted in figs. 1 and 2, Spray-nozzle for removing dust 1 with want to possess in little facial 2 opposed faces 1A of dedusting multiple gas squit holes 3 for spraying gas, and the multiple gas inlet holes 4 for attracting gas.
Such as Fig. 3（B）It is shown, Spray-nozzle for removing dust 1 with want dedusting little facial 2 to configuration state under, gas squit hole 3 is disposed in the region P in the profile L for wanting dedusting little facial 2, from gas squit hole 3 towards the profile L for wanting dedusting little facial 2 in spray gas.I.e., the ground of superfine distribution 8 aiming that Spray-nozzle for removing dust 1 is configured to not make gas be directly sprayed onto the foreign side for being disposed in the profile L for wanting dedusting little facial 2 wants dedusting little facial 2 to spray gas from gas squit hole 3.Gas inlet hole 4 is with encirclement（It is multiple）The shape of gas squit hole 3 ground is arranged, the gas for attracting to spray by the region V of the foreign side of the profile L for wanting dedusting little facial 2.Hereinafter, region P that will be in the profile L of dedusting little facial 2 blows and sprays region as gas, will dedusting little facial 2 profile L foreign side region V as gas distributing area.
In fig. 1 and 2, Spray-nozzle for removing dust 1 is formed as overlooking the nozzle body 13 linked for substantially rectangular short cylinder, the gas pipe connection plug with supply, exhaust, and the cap portion 14 for offering multiple gas squit holes 3 and multiple gas inlet holes 4.Have in Spray-nozzle for removing dust 1 and the gas discharge stream 11 for linking is connected with multiple gas squit holes 3, and the gas attraction stream 12 for linking is connected with multiple gas inlet holes 4, in the gas discharge stream 11 in cap portion 14 supersonic generator 7 is equipped.Supersonic generator 7 is constituted by quantity is provided with multiple blocks 15 of the identical through hole of gas squit hole 3, the block 15 possess the first block 15A and the second block 15B both, first block 15A has the diameter expanded hole 16 bigger than gas squit hole 3, second block 15B has the diameter undergauge hole 17 less than expanded hole 16, and two kinds of blocks 15A, 15B are alternately arranged.By gas squit hole 3 and expanded hole 16,16 and undergauge hole 17, the ultrasonic wave generation hole that sectional area repeats expansion, the sequential like of diminution is defined.There is hole with the continuous ultrasonic wave of gas squit hole 3 alternatively, it is also possible to be integrally formed in the bottom in cap portion 14.
As shown in figure 1, gas squit hole 3 is preferably the smaller circular port of diameter, its diameter D0It is set to 0.45mm～0.75mm.On the other hand, gas inlet hole 4 be diameter than larger circular port, its diameter D1For the diameter D of gas squit hole 303 times～5 times, be preferably specifically set to 1.5mm～3.5mm.
If the diameter D of gas squit hole 30Less than above-mentioned lower limit, then the processing bored a hole is difficult to, if exceeding above-mentioned higher limit, the wind speed of the gas for spraying is reduced.If additionally, the diameter D of gas inlet hole 41Less than above-mentioned lower limit, then having can not remove the situation of foreign matter, if exceeding above-mentioned higher limit, the size of Spray-nozzle for removing dust 1 is excessive.
Then, the dust arrester of the present invention is illustrated.
As shown in Figure 4, the dust arrester of the present invention possesses the conveyer 20 that electric component group 10 is arranged in many column-shaped being parallel to each other and is fed off and on, with on the orthogonal widths of the carriage direction C with conveyer 20 and multiple Spray-nozzle for removing dust 1 for setting, multiple Spray-nozzle for removing dust 1 are accordingly arranged with each row of electric component group 10.
The endless belt that conveyer 20 is for example linked by length direction both ends, from the roller of medial support band, the motor of driven roller, and speed changer etc. are constituted.
What the local of each electronic component 6 of electric component group 10 possessed requirement ultra-high purity wants dedusting little by facial 2.Dedusting little facial 2 is wanted to be the part that dedusting is needed most in electronic component 6.
Such as Fig. 1 and Fig. 4（B）It is shown, Spray-nozzle for removing dust 1 is relative to being conveyed off and on by conveyer 20 and become the electronic component 6 of halted state, gas is sprayed from gas squit hole 3 towards in the profile L for wanting dedusting little facial 2, and is attracted the gas of ejection to gas inlet hole 4 from the foreign side of the profile L for wanting dedusting little facial 2.
The quantity of Spray-nozzle for removing dust 4 and the electronic component 6 for coming to the cleaning position W conveyings of crosscutting carriage direction C simultaneously accordingly edge（It is orthogonal with carriage direction C）Width is simultaneously provided with identical number, be arranged to a Spray-nozzle for removing dust 1 relative to want on electronic component 6 dedusting little facial 2 be opposed shape.Alternatively, it is also possible to being configured to Spray-nozzle for removing dust 1 and setting multiple row, it is cleaned simultaneously in multiple cleaning position W, it is corresponding with more electronic components 6.
Using method to the Spray-nozzle for removing dust of the invention described above（Effect）Illustrate.
Such as Fig. 2（A）It is shown, the gas of regulation high pressure is supplied with stream 11 to the gas discharge of Spray-nozzle for removing dust 1 from the gas pipe of supply.The gas of gas discharge stream 11 is supplied to by supersonic generator 7, becomes the air-flow of the ultrasonic wave of the frequency for being loaded with 20kHz～100kHz（Ultrasonic gas）F, blows out from gas squit hole 3.Gas discharge is very little with the volume of stream 11, and gas discharge stream instantaneously reaches at short notice the pressure of regulation, and air-flow F is from the high speed of gas squit hole 3（140m～200m/ seconds）Spray.
In Fig. 3（B）In, Spray-nozzle for removing dust 1 by the gas in the profile L for wanting dedusting little facial 2 blow and spray region P from gas squit hole 3 towards want dedusting it is little it is facial 2 spray gas.Spray-nozzle for removing dust 1 makes foreign matter from wanting little facial 2 sur-face peeling of dedusting only to wanting dedusting little facial 2 to blow and spray gas.I.e., Spray-nozzle for removing dust 1 is aimed at the ground of superfine distribution 8 of the foreign side for being directly sprayed onto gas and being disposed in the profile L for wanting dedusting little facial 2 and wants dedusting little facial 2 to spray gas from gas squit hole 3.Foreign side of the Spray-nozzle for removing dust 1 not to the profile L for wanting dedusting little facial 2 blows and sprays gas, and useless air leakage will not occur（Gas leakage）.Therefore, unnecessary gas will not be consumed, with few consumed cabin air amount expeditiously to wanting the little face of dedusting to be cleaned.
From wanting the foreign matter of little facial 2 sur-face peeling of dedusting to be sucked to gas inlet hole 4 from the gas distributing area V of the foreign side of the profile L for wanting dedusting little facial 2, gas pipe of the foreign matter from gas attraction stream 12 to exhaust is discharged.Spray-nozzle for removing dust 1 is blowed and sprayed the gas that the gas distributing area V of the foreign side of region P attracts to be sprayed from gas squit hole 3 by encirclement gas, foreign matter is removed with dispersing to surrounding.
In addition, the present invention can be designed change, for example, Spray-nozzle for removing dust 1 can also be such as Fig. 5（A）Shown, gas inlet hole 4 is formed as slit-shaped.The gas inlet hole 4 of slit-shaped clips gas and is disposed in blowing and spraying region P at the two of the foreign side of the profile L for wanting dedusting little facial 2.In addition it is also possible to such as Fig. 5（B）Shown, gas inlet hole 4 is formed as loop-like, and encirclement wants the foreign side ground of the profile L of dedusting little facial 2 to arrange.
In the case of as shown in fig. 6, wanting dedusting little facial 2 for circle, preferably Spray-nozzle for removing dust 1 is formed as to overlook as circle.In Fig. 6（C）In, Spray-nozzle for removing dust 1 is radially disposed in multiple gas squit holes 3 in the profile L for wanting dedusting little facial 2, and encirclement is equipped with multiple gas inlet holes 4 with wanting the foreign side of the profile L of dedusting little facial 2.In Fig. 6（D）In, gas inlet hole 4 is the slit-shaped formation as the shape for bending to arc-shaped, in Fig. 6（E）In, gas inlet hole 4 is formed as circular, and encirclement wants the foreign side ground of the profile L of dedusting little facial 2 to arrange.
Additionally, as shown in fig. 7, wanting little facial 2 area of dedusting（Size）In the case of increase, increase the number of gas squit hole 3 and gas inlet hole 4, or the area of increase gas inlet hole 4.In Fig. 7（F）In, gas squit holes 3 more more than legend shown in Fig. 1 are disposed in the profile L for wanting dedusting little by facial 2, encirclement is equipped with multiple gas inlet holes 4 with wanting the foreign side of the profile L of dedusting little facial 2.In Fig. 7（G）In, make gas inlet hole 4 be slit-shaped, in Fig. 7（H）In, gas inlet hole 4 is formed as U-shaped, and encirclement wants the foreign side ground of the profile L of dedusting little facial 2 to arrange.
As mentioned above, because Spray-nozzle for removing dust involved in the present invention want the Spray-nozzle for removing dust that the little facial electronic component 6 of dedusting is cleaned possessed requirement ultra-high purity to local by gas, possesses the gas squit hole 3 for making gas spray towards in the above-mentioned profile L for wanting dedusting little facial 2, with to arrange with surrounding the shape of above-mentioned gas squit hole 3 and attracted by the foreign side of the above-mentioned above-mentioned profile L for want dedusting little facial 2 ejection gas gas inlet hole 4, it is possible to accordingly arranging gas squit hole 3 and gas inlet hole 4 with little facial 2 area of dedusting and shape is wanted, hardly there is gas leakage, only blow and spray gas to the dedusting little facial 2 of wanting for needing cleaning, efficiently and reliably to wanting dedusting little facial 2 to be cleaned.Additionally, unnecessary gas will not be consumed, consumed cabin air amount can be mitigated.Foreign matter can not be made to be removed with dispersing to surrounding.The gas sprayed from gas squit hole 3 can instantaneously reach the pressure and wind speed of regulation, be released by the gas of short time, i.e., can reliably remove the foreign matter wanted in dedusting little facial 2, improve cleaning efficiency.
In addition, due on above-mentioned electronic component 6 along the above-mentioned above-mentioned profile L for wanting dedusting little facial 2 foreign side part or throughout complete cycle be equipped with superfine distribution 8, the above-mentioned ground of superfine distribution 8 aiming is above-mentioned to want dedusting little facial 2 to spray gas from above-mentioned gas squit hole 3 to be directly sprayed onto gas, so superfine distribution broken string will not be made, damaged, can only to wanting dedusting little facial 2 to blow and spray gas, efficiently and reliably to wanting dedusting little facial 2 to be cleaned.
Further, since above-mentioned want dedusting little facial 2 to be sensor, it is possible to dedusting is intensively needed most in electronic component 6, requires that the dedusting little facial 2 of wanting of extra high cleanliness factor blows and sprays gas, can efficiently and reliably to wanting dedusting little facial 2 to be cleaned.
In addition，Because dust arrester involved in the present invention possesses the conveyer 20 that electric component group 10 is arranged in the multiple row being parallel to each other and is fed off and on，The width orthogonal with the direction of the above-mentioned feeding of above-mentioned conveyer 20 and multiple Spray-nozzle for removing dust 1 for setting with edge，What the local of each electronic component 6 of above-mentioned electric component group 10 possessed requirement ultra-high purity wants dedusting little by facial 2，Above-mentioned each Spray-nozzle for removing dust 1 possesses the gas squit hole 3 for making gas spray towards in the above-mentioned profile L for wanting dedusting little facial 2，With to arrange with surrounding the shape of above-mentioned gas squit hole 3 and attracted by the foreign side of the above-mentioned above-mentioned profile L for want dedusting little facial 2 ejection gas gas inlet hole 4，Further，Multiple Spray-nozzle for removing dust 1 are accordingly equipped with each row of above-mentioned electric component group 10，Relative to being conveyed by above-mentioned conveyer 20 and become the above-mentioned electronic component 6 of halted state off and on，Gas is sprayed towards in the above-mentioned profile L for wanting dedusting little facial 2，And the gas for attracting to spray by the foreign side of the above-mentioned above-mentioned profile L for wanting dedusting little facial 2，It is possible to accordingly arranging multiple Spray-nozzle for removing dust 1 with each row of electric component group 10，The expeditiously dedusting little facial 2 of wanting to being located on each electronic component 6 is cleaned.In addition, gas squit hole 3 and gas inlet hole 4 are accordingly arranged on each Spray-nozzle for removing dust 1 with little facial 2 area of dedusting and shape is wanted, hardly there is gas leakage, only gas can be blowed and sprayed to the dedusting little facial 2 of wanting for needing cleaning, expeditiously to wanting dedusting little facial 2 to be cleaned.Additionally, unnecessary gas will not be consumed, consumed cabin air amount can be mitigated.Foreign matter can not be made to being removed that surrounding is dispersed.The gas sprayed from gas squit hole 3 can reach the pressure and wind speed of regulation moment, be released by the gas of short time, i.e., can reliably remove the foreign matter wanted in dedusting little facial 2, improve cleaning efficiency.Quantity can be arranged and the quantity identical Spray-nozzle for removing dust 1 of the electronic component 6 for coming is conveyed simultaneously, cleaning efficiency is improved.
Claims (4)
1. a kind of Spray-nozzle for removing dust, by what gas possessed requirement ultra-high purity to local the little face of dedusting is wanted（2）Electronic component（6）It is cleaned, it is characterised in that
Possess for making gas want the little face of dedusting towards above-mentioned（2）Profile（L）The gas squit hole of interior ejection（3）, and to surround above-mentioned gas squit hole（3）Shape ground is arranged and wants the little face of dedusting by above-mentioned（2）Above-mentioned profile（L）Foreign side attract spray gas gas inlet hole（4）.
2. Spray-nozzle for removing dust as claimed in claim 1, it is characterised in that
In above-mentioned electronic component（6）On want the little face of dedusting along above-mentioned（2）Above-mentioned profile（L）Foreign side part or superfine distribution is equipped throughout complete cycle（8）,
Gas is not set to be directly sprayed onto above-mentioned superfine distribution（8）Ground aiming is above-mentioned to want the little face of dedusting（2）From above-mentioned gas squit hole（3）Spray gas.
3. Spray-nozzle for removing dust as claimed in claim 1 or 2, it is characterised in that
It is above-mentioned to want the little face of dedusting（2）It is sensor.
4. a kind of dust arrester, it is characterised in that
Possess electric component group（10）It is arranged in many column-shaped being parallel to each other and the conveyer for being fed off and on（20）, and edge and above-mentioned conveyer（20）Above-mentioned feeding the orthogonal width in direction and multiple Spray-nozzle for removing dust for setting（1）,
Above-mentioned electric component group（10）Each electronic component（6）Locally possess requirement ultra-high purity wants the little face of dedusting（2）,
Above-mentioned each Spray-nozzle for removing dust（1）Possess for making gas want the little face of dedusting towards above-mentioned（2）Profile（L）The gas squit hole of interior ejection（3）, and to surround above-mentioned gas squit hole（3）Shape ground is arranged and wants the little face of dedusting by above-mentioned（2）Above-mentioned profile（L）Foreign side attract spray gas gas inlet hole（4）,
Further, with above-mentioned electric component group（10）Each row be accordingly equipped with multiple Spray-nozzle for removing dust（1）,
Relative to by above-mentioned conveyer（20）The above-mentioned electronic component of halted state is conveyed and become off and on（6）, towards above-mentioned the little face of dedusting is wanted（2）Profile（L）Interior ejection gas, and want the little face of dedusting by above-mentioned（2）Above-mentioned profile（L）Foreign side attract spray gas.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-199582 | 2015-10-07 | ||
| JP2015199582A JP6173404B2 (en) | 2015-10-07 | 2015-10-07 | Dust removal nozzle and dust removal device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106563667A true CN106563667A (en) | 2017-04-19 |
| CN106563667B CN106563667B (en) | 2019-06-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610014288.7A Active CN106563667B (en) | 2015-10-07 | 2016-01-11 | Spray-nozzle for removing dust and dust-extraction unit |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6173404B2 (en) |
| KR (1) | KR102063172B1 (en) |
| CN (1) | CN106563667B (en) |
| TW (1) | TWI568510B (en) |
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| CN106937496A (en) * | 2017-03-01 | 2017-07-07 | 烽火通信科技股份有限公司 | Communication equipment is with from dedusting wall hanging cabinet and dust collection method |
| CN107666800A (en) * | 2017-09-29 | 2018-02-06 | 歌尔股份有限公司 | A kind of electronic equipment |
| CN107824554A (en) * | 2017-12-11 | 2018-03-23 | 大竹县第二小学 | A kind of efficiently crevice cleaning device |
| CN110369395A (en) * | 2018-04-12 | 2019-10-25 | 宁波舜宇光电信息有限公司 | Cleaner for motor lens assembly |
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| KR102053583B1 (en) * | 2019-06-10 | 2019-12-06 | 김석태 | Cleaning apparatus for a camera module |
| CN110883015A (en) * | 2019-12-09 | 2020-03-17 | Oppo（重庆）智能科技有限公司 | Dirty adsorption equipment |
| CN113680743B (en) * | 2021-08-20 | 2022-05-24 | 张卓莹 | Circuit test PCB board surface cleaning equipment for electronic information |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106937496A (en) * | 2017-03-01 | 2017-07-07 | 烽火通信科技股份有限公司 | Communication equipment is with from dedusting wall hanging cabinet and dust collection method |
| CN106937496B (en) * | 2017-03-01 | 2019-08-06 | 烽火通信科技股份有限公司 | Communication equipment is with from dedusting wall hanging cabinet and dust removal method |
| CN107666800A (en) * | 2017-09-29 | 2018-02-06 | 歌尔股份有限公司 | A kind of electronic equipment |
| CN107824554A (en) * | 2017-12-11 | 2018-03-23 | 大竹县第二小学 | A kind of efficiently crevice cleaning device |
| CN110369395A (en) * | 2018-04-12 | 2019-10-25 | 宁波舜宇光电信息有限公司 | Cleaner for motor lens assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106563667B (en) | 2019-06-14 |
| KR102063172B1 (en) | 2020-01-07 |
| TWI568510B (en) | 2017-02-01 |
| KR20170041603A (en) | 2017-04-17 |
| JP2017070904A (en) | 2017-04-13 |
| JP6173404B2 (en) | 2017-08-02 |
| TW201713419A (en) | 2017-04-16 |
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