JP5273534B2 - Dry cleaning apparatus, cleaning method, and cleaned items - Google Patents

Dry cleaning apparatus, cleaning method, and cleaned items Download PDF

Info

Publication number
JP5273534B2
JP5273534B2 JP2008237257A JP2008237257A JP5273534B2 JP 5273534 B2 JP5273534 B2 JP 5273534B2 JP 2008237257 A JP2008237257 A JP 2008237257A JP 2008237257 A JP2008237257 A JP 2008237257A JP 5273534 B2 JP5273534 B2 JP 5273534B2
Authority
JP
Japan
Prior art keywords
cleaning
cleaning medium
opening
medium
cleaned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2008237257A
Other languages
Japanese (ja)
Other versions
JP2010069368A (en
Inventor
明弘 渕上
洋一 岡本
達哉 佐藤
裕介 種子田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP2008237257A priority Critical patent/JP5273534B2/en
Publication of JP2010069368A publication Critical patent/JP2010069368A/en
Application granted granted Critical
Publication of JP5273534B2 publication Critical patent/JP5273534B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/06Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for producing matt surfaces, e.g. on plastic materials, on glass

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently removing powder dust and foreign matter adhering or firmly stuck to various kinds of objects to be cleaned having aperture parts by cleaning. <P>SOLUTION: High speed air current is generated by a cleaning medium accelerating nozzle 11 in a state that air in a cleaning tank 7 is suctioned: and a flaky cleaning medium 6 is made to fly and the flying direction of the cleaning medium 6 flown to the aperture parts 24 of objects to be cleaned 5 is changed by cleaning medium flying direction control means 25 to hit the cleaning medium 6 against sides of the aperture parts 24 of the objects to be cleaned 5 and thus reliably clean the inner faces of the aperture parts 24 of the objects to be cleaned 5. A jetting port 26 for jetting an air current toward the inner faces of the aperture parts 24 of the objects to be cleaned 5 is formed in the cleaning medium flying direction control means 25 to accelerate the flying cleaning medium 6 in the direction to the inner faces of the aperture parts 24. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

この発明は、例えば各種電気機器等に使用する電子部品をプリント配線板に実装するハンダ付け工程で用いられるマスク治具に付着したフラックスや各種の開口部を有する洗浄対象物に付着あるいは固着した粉塵や異物を除去する乾式洗浄装置と洗浄方法及び洗浄された洗浄物、特に洗浄対象物の開口部内面に付着したフラックス等の除去効率の向上に関するものである。   The present invention relates to, for example, flux adhered to a mask jig used in a soldering process for mounting electronic parts used in various electric devices or the like on a printed wiring board, and dust adhered to or fixed to an object to be cleaned having various openings. The present invention relates to a dry cleaning apparatus and a cleaning method for removing odors and foreign matters, and improvement in removal efficiency of a cleaned object to be cleaned, particularly flux adhered to an inner surface of an opening of an object to be cleaned.

近年、プリント基板製造におけるフローはんだ槽によるハンダ付け工程において、ハンダ付け処理する領域以外をマスクするディップパレット、キャリアパレット等と呼称されるマスク治具が多く用いられている。このようなマスク治具は、繰り返し使用されるうちに、表面にフラックスが堆積して固着しマスクの精度を下げるため、定期的に洗浄する必要があった。   In recent years, a mask jig called a dip pallet, a carrier pallet, or the like that masks a region other than a region to be soldered is frequently used in a soldering process using a flow solder bath in printed circuit board manufacturing. Such a mask jig needs to be periodically cleaned in order to reduce the accuracy of the mask by depositing and fixing flux on the surface as it is repeatedly used.

このようにフラックスや粘着材、接着剤等が付着した治具等の洗浄対象物を洗浄するため、特許文献1に示された洗浄装置は、溶剤洗浄槽で洗浄対象物の上下両面に溶剤を噴射させて洗浄した後、水洗洗浄槽で洗浄対象物に付着した溶剤を水洗いし、乾燥槽で洗浄対象物に温風を吹き当てて乾燥している。   Thus, in order to clean the cleaning object such as a jig to which a flux, an adhesive material, an adhesive or the like adheres, the cleaning device disclosed in Patent Document 1 uses a solvent cleaning tank to apply a solvent to the upper and lower surfaces of the cleaning object. After spraying and cleaning, the solvent adhering to the object to be cleaned is washed with water in the water washing and washing tank, and hot air is blown against the object to be washed in the drying tank and dried.

このような溶剤を使用した洗浄装置を、フラックス等が付着した洗浄対象物の洗浄に使用すると、溶剤を大量に使用するとともにフラックス等を含んだ廃液の処理及び洗浄後の乾燥処理におけるエネルギ消費や環境負荷が大きく、高コストになるという問題がある。また、作業者に対する負荷が極めて大きかった。   When a cleaning device using such a solvent is used for cleaning an object to be cleaned, on which flux or the like is adhered, a large amount of solvent is used and energy consumption in the treatment of waste liquid containing flux and the drying process after cleaning is reduced. There is a problem that the environmental load is large and the cost is high. In addition, the load on the worker was extremely large.

これらの問題を解消するため、特許文献2に示された乾式洗浄方法では、洗浄槽内に高速気流を流動させ、軽量で飛翔しやすい固体からなる洗浄媒体を洗浄槽内で高速に飛翔させて、洗浄媒体を洗浄対象物に連続して接触させて洗浄対象物に付着した塵や粉体を分離している。特に可撓性を有する薄片状の洗浄媒体を用いることにより、洗浄媒体の少量の使用量で超音波洗浄と同等以上の洗浄能力を発揮することができる。   In order to solve these problems, in the dry cleaning method disclosed in Patent Document 2, a high-speed air flow is caused to flow in the cleaning tank, and a cleaning medium made of a lightweight and easy-to-fly solid is allowed to fly at high speed in the cleaning tank. The cleaning medium is continuously brought into contact with the object to be cleaned to separate dust and powder adhering to the object to be cleaned. In particular, by using a flaky cleaning medium having flexibility, a cleaning ability equivalent to or higher than that of ultrasonic cleaning can be exhibited with a small amount of the cleaning medium used.

例えば特許文献2に示された乾式洗浄方法を用い、洗浄槽より大きい洗浄対象物を洗浄する洗浄装置において、例えば図10に示すように、多くの開口部24を有する洗浄対象物5の開口部24を封止部材40で覆って洗浄槽7の開口部に配置し、洗浄槽7の洗浄媒体加速ノズル11から噴射する高速気流により洗浄媒体6を飛翔させて洗浄対象物5に接触させて洗浄すると、洗浄媒体6は開口部24の方向に加速されるため、開口部24内面には衝突しにくく、開口部24内面の洗浄速度が遅く洗浄ムラが生じてしまう。このように洗浄ムラが生じると、例えば、ハンダ付け工程で多くの開口部を有するマスク治具を洗浄した場合、洗浄が不十分で開口部付近に固着汚れが残留し、その結果マスク治具の密着度が低下してハンダやフラックスがプリント配線版側に漏れ出てしまう。   For example, in a cleaning apparatus that cleans an object to be cleaned that is larger than the cleaning tank using the dry cleaning method disclosed in Patent Document 2, for example, as shown in FIG. 10, the openings of the object to be cleaned 5 having many openings 24. 24 is covered with a sealing member 40 and disposed in the opening of the cleaning tank 7, and the cleaning medium 6 is made to fly by the high-speed air current sprayed from the cleaning medium acceleration nozzle 11 of the cleaning tank 7 to come into contact with the cleaning object 5 and cleaned. Then, since the cleaning medium 6 is accelerated in the direction of the opening 24, it does not easily collide with the inner surface of the opening 24, the cleaning speed of the inner surface of the opening 24 is slow, and cleaning unevenness occurs. When cleaning unevenness occurs in this way, for example, when a mask jig having many openings is cleaned in the soldering process, the cleaning is insufficient and sticking dirt remains in the vicinity of the openings. The degree of adhesion decreases and solder and flux leak to the printed wiring board side.

このような問題を解消するため、特許文献3に示された洗浄装置は、気体により粒体からなる洗浄媒体を噴流化して洗浄対象物を洗浄するとき、洗浄槽に噴出する気体の噴流方向を揺動させている。この気体の噴流方向を揺動させるために、主噴流ノズルの近傍に2個の制御用噴流ノズルを設け、各制御用噴流ノズルから交互に気体を噴流させて噴流の方向を制御していることにより、複雑な形状の洗浄対象物をムラなく洗浄している。
特開平5−299821号公報 特開2007−29945号公報 特許第4049290号公報
In order to solve such a problem, the cleaning apparatus shown in Patent Document 3 changes the jet direction of the gas jetted into the cleaning tank when the cleaning medium is jetted with the gas to clean the cleaning object. It is rocking. In order to oscillate the gas jet direction, two control jet nozzles are provided in the vicinity of the main jet nozzle, and the jet direction is controlled by jetting gas alternately from each control jet nozzle. Thus, the object to be cleaned having a complicated shape is cleaned evenly.
JP-A-5-299821 JP 2007-29945 A Japanese Patent No. 4049290

しかしながら、図10に示すように、洗浄媒体を加速する洗浄媒体加速ノズル11の近傍に制御用ノズル41を設けて気体の噴流方向を揺動させても、洗浄媒体6は洗浄媒体加速ノズル11から直ちに左右に振られながら上方向に飛翔し、洗浄対象物5の開口部24の深さによっては洗浄媒体6が衝突しない領域が生じ、洗浄能力も限定されるものであった。また、開口部24以外の領域においては、その領域に対する洗浄媒体6の入射角度が大きくなり、洗浄媒体6が衝突するエネルギが小さくなって洗浄性能が低下する可能性が高いという問題があった。   However, as shown in FIG. 10, even if the control nozzle 41 is provided in the vicinity of the cleaning medium acceleration nozzle 11 for accelerating the cleaning medium and the jet direction of the gas is swung, the cleaning medium 6 is removed from the cleaning medium acceleration nozzle 11. Immediately, it flew upward while being swung left and right, and depending on the depth of the opening 24 of the object 5 to be cleaned, there was a region where the cleaning medium 6 did not collide, and the cleaning ability was limited. Further, in the area other than the opening 24, there is a problem that the incident angle of the cleaning medium 6 with respect to the area becomes large, the energy with which the cleaning medium 6 collides becomes small, and the cleaning performance is likely to deteriorate.

この発明は、このような問題を解消し、各種の開口部を有する洗浄対象物に付着あるいは固着した粉塵や異物を効率よく洗浄することができる乾式洗浄装置と洗浄方法及びそれを使用して洗浄された洗浄物を提供することを目的とするものである。   The present invention solves such a problem, and is capable of efficiently cleaning dust and foreign matters adhering or adhering to an object to be cleaned having various openings, and a cleaning method and a cleaning method using the same. The object is to provide a cleaned product.

この発明の乾式洗浄装置は、高速気流により流動する薄片状の洗浄媒体を1又は複数の開口部を有する洗浄対象物に衝突させて洗浄する乾式洗浄装置であって、前記洗浄対象物に固定されて開口部を封止する開口封止部材と洗浄槽と洗浄対象物保持手段と洗浄媒体戻し手段を有し、前記洗浄槽は、一方に開口部を有し、壁面には気体や粉塵を通過させるが洗浄媒体が通り抜けられない洗浄媒体分離手段を有し、前記開口部方向に洗浄媒体を加速する洗浄媒体加速手段を有し、前記洗浄媒体戻し手段は、前記洗浄媒体分離手段を介して接続された吸引装置と、前記洗浄槽の開口部の外縁に設けられ、前記洗浄対象物保持手段を保持して一定間隔の気体流入路を形成する洗浄媒体減速手段を有し、前記開口部封止部材は、洗浄媒体の飛翔方向を切り替える洗浄媒体飛翔方向制御手段を有し、前記洗浄対象物保持手段は、前記開口部封止部材を固定した洗浄対象物を保持し、前記洗浄媒体減速手段に沿って移動自在であることを特徴とする。 Dry cleaning apparatus of this invention is a dry type cleaning apparatus for cleaning by colliding the cleaning object having one or more openings flaky cleaning medium flowing by high-speed air stream, fixed to the object to be cleaned by having a return means opening the sealing member and the cleaning tank and the cleaning target object holding means and the cleaning medium to seal the opening, the cleaning tank, while having an opening, the gas on the wall surface and dust A cleaning medium separating means that allows the cleaning medium to pass through, but has a cleaning medium accelerating means that accelerates the cleaning medium in the direction of the opening, and the cleaning medium returning means passes through the cleaning medium separating means. A suction device connected to the cleaning tank, and a cleaning medium decelerating unit that is provided on an outer edge of the opening of the cleaning tank and that holds the cleaning object holding unit to form a gas inflow passage at a predetermined interval. The sealing member determines the flight direction of the cleaning medium. A cleaning medium flying direction control means for switching, wherein the cleaning object holding means holds the cleaning object to which the opening sealing member is fixed, and is movable along the cleaning medium deceleration means. Features.

前記洗浄媒体飛翔方向制御手段は、前記開口部内面に向かう気流を噴射する噴射口を有することを特徴とする。   The cleaning medium flying direction control means has an injection port for injecting an air flow toward the inner surface of the opening.

また、前記洗浄媒体飛翔方向制御手段は、前記開口部内面に対して所定角度傾けた気流を噴射する噴射口を有することを特徴とする。この洗浄媒体飛翔方向制御手段は、回転自在であることが望ましい。   Further, the cleaning medium flying direction control means has an injection port for injecting an airflow inclined at a predetermined angle with respect to the inner surface of the opening. The cleaning medium flying direction control means is preferably rotatable.

さらに、前記洗浄媒体飛翔方向制御手段に加圧空気を供給して前記噴射口から気流を噴射させると良い。   Further, it is preferable that pressurized air is supplied to the cleaning medium flying direction control means so that an air flow is ejected from the ejection port.

また、前記洗浄媒体飛翔方向制御手段は、前記洗浄媒体加速手段で発生した気流の方向を前記開口部内面に向かう方向に補正する流れ制御板を有することを特徴とする。   Further, the cleaning medium flying direction control means includes a flow control plate that corrects the direction of the air flow generated by the cleaning medium acceleration means in a direction toward the inner surface of the opening.

この発明の洗浄方法は、前記いずれかに記載の乾式洗浄装置を使用した洗浄方法であって、洗浄槽内の空気を吸引している状態で洗浄媒体加速手段により高速気流を発生し、薄片の洗浄媒体を飛翔させて洗浄対象物の開口部に飛翔した洗浄媒体の飛翔方向を洗浄媒体飛翔方向制御手段により切り替えて洗浄対象物の開口部内面を洗浄することを特徴とする。   The cleaning method of the present invention is a cleaning method using any one of the dry cleaning apparatuses described above, wherein a high-speed air current is generated by the cleaning medium accelerating means in a state where the air in the cleaning tank is sucked, and The cleaning medium flying direction control means is used to switch the flying direction of the cleaning medium, which has been ejected by the cleaning medium, and washed to the opening of the cleaning object, thereby cleaning the inner surface of the opening of the cleaning object.

この発明の洗浄物は、前記いずれかに記載の乾式洗浄装置を使用して洗浄されたことを特徴とする。   The washed product of the present invention is characterized by being cleaned using any of the dry cleaning apparatuses described above.

この発明は、洗浄槽内の空気を吸引している状態で高速気流を発生し、薄片の洗浄媒体を飛翔させて洗浄対象物の開口部に飛翔した洗浄媒体の飛翔方向を切り替えて洗浄媒体を洗浄対象物の開口部側面に衝突させて洗浄することにより、洗浄対象物の開口部内面を確実に洗浄することができる。   This invention generates a high-speed air flow while sucking the air in the cleaning tank, and causes the cleaning medium to fly by switching the flying direction of the cleaning medium that has jumped to the opening of the object to be cleaned. By colliding with the side surface of the opening of the object to be cleaned and cleaning, the inner surface of the opening of the object to be cleaned can be reliably cleaned.

また、洗浄媒体飛翔方向制御手段に洗浄対象物の開口部内面に向かう気流を噴射する噴射口を設けることにより、飛翔した洗浄媒体を開口部内面方向に加速することができ、開口部内面に洗浄媒体が衝突して汚れを除去することができる。また、非接触で洗浄媒体を加速できるから、洗浄媒体が破損することを防ぐことができる。   Also, by providing the cleaning medium flying direction control means with an injection port for injecting an air flow toward the inner surface of the opening of the object to be cleaned, the flying cleaning medium can be accelerated toward the inner surface of the opening, and the inner surface of the opening is cleaned. The medium can collide to remove the dirt. In addition, since the cleaning medium can be accelerated without contact, the cleaning medium can be prevented from being damaged.

さらに、洗浄媒体飛翔方向制御手段に開口部内面に対して所定角度傾けた気流を噴射する噴射口を設けることにより、洗浄媒体飛翔方向制御手段を回転させる推力を生むことができるため、駆動手段を設けることなく、洗浄対象物の開口部内面の全面を洗浄することができる。   Further, since the cleaning medium flying direction control means is provided with an injection port for injecting an airflow inclined at a predetermined angle with respect to the inner surface of the opening, a thrust for rotating the cleaning medium flying direction control means can be generated. Without providing, the entire inner surface of the opening of the object to be cleaned can be cleaned.

さらに、洗浄対象物の開口部内面に向かう気流を噴射する噴射口を有する浄媒体飛翔方向制御手段を回転自在にすることにより、洗浄媒体で開口部内面の全周をより確実に洗浄することができる。   Furthermore, by making the cleaning medium flying direction control means having an injection port for injecting an airflow directed toward the inner surface of the opening of the object to be cleaned, the entire circumference of the inner surface of the opening can be more reliably cleaned with the cleaning medium. it can.

また、洗浄媒体飛翔方向制御手段に洗浄媒体加速手段で発生した気流の方向を開口部内面に向かう方向に補正する流れ制御板を設けることにより、簡易な構成で洗浄媒体の飛翔方向を開口部内面に向けることができ、開口部内面を効率よく洗浄することができる。   Further, the cleaning medium flying direction control means is provided with a flow control plate that corrects the direction of the air flow generated by the cleaning medium acceleration means to the direction toward the inner surface of the opening. And the inner surface of the opening can be efficiently cleaned.

この発明の乾式洗浄装置で洗浄した洗浄物は、開口部内面も確実に洗浄されているから、マスク部材等として使用してもその性能を確実に維持して繰り返して再使用することができ、資源を有効に利用することができる。   Since the cleaning object cleaned with the dry cleaning apparatus of the present invention is also cleaned reliably on the inner surface of the opening, it can be reused repeatedly while maintaining its performance reliably even if used as a mask member, etc. Resources can be used effectively.

図1は、この発明の乾式洗浄装置の機構構成を示し、(a)は正面断面図、(b)は(a)のA−A断面図、(c)は上面図である。乾式洗浄装置1は洗浄槽ユニット2と洗浄対象物保持手段3と開口部封止部材4を有し、図2の部分拡大断面図に示すように、洗浄対象物保持手段3で保持した洗浄対象物5に付着した粉塵等を高速気流により飛翔する洗浄媒体6により除去するものである。   1A and 1B show a mechanical configuration of a dry cleaning apparatus according to the present invention, in which FIG. 1A is a front sectional view, FIG. 1B is a sectional view taken on line AA of FIG. 1A, and FIG. The dry cleaning apparatus 1 includes a cleaning tank unit 2, a cleaning object holding means 3, and an opening sealing member 4, and the cleaning object held by the cleaning object holding means 3 as shown in the partial enlarged sectional view of FIG. The dust adhering to the object 5 is removed by the cleaning medium 6 flying by the high-speed air current.

この乾式洗浄装置1で使用する洗浄媒体6は、例えばポリカーボネイトやPETなどの硬くて、かつ衝撃に対して耐久性のある素材で厚さが例えば0.1〜0.2mmで1辺のサイズが5〜10mmの正方形形状の薄片で形成している。この洗浄媒体6は洗浄対象物5によってはサイズや材質を変えることが効果的な場合もあり、前記条件にとらわれず洗浄対象物5に応じて適切な条件を選択する。   The cleaning medium 6 used in the dry cleaning apparatus 1 is a hard and durable material such as polycarbonate or PET and has a thickness of, for example, 0.1 to 0.2 mm and a side size of 5 to 10 mm. It is formed with a square-shaped flake. Depending on the cleaning object 5, it may be effective to change the size and material of the cleaning medium 6, and an appropriate condition is selected according to the cleaning object 5 without being limited by the above conditions.

このように薄片状の洗浄媒体6は投影面積が大きい方向に気流の力が作用した場合、空気抵抗力に対する質量が非常に小さいため気流によって容易に加速されて高速飛翔する。また、投影面積が小さい方向には空気抵抗が小さく、その方向へ飛翔した場合、高速運動が長距離維持される。このため洗浄媒体6の持つエネルギが大きく、洗浄対象物5に接触したときに作用する力が大きくなって付着した付着物を有効に除去することができるとともに洗浄媒体6を繰返し循環して洗浄対象物5に接触する頻度を増すことができ洗浄効率を高めることができる。   Thus, when the force of the airflow acts in the direction where the projected area is large, the flaky cleaning medium 6 is easily accelerated by the airflow and flies at high speed because the mass against the air resistance force is very small. In addition, the air resistance is small in the direction in which the projected area is small, and high speed movement is maintained for a long distance when flying in that direction. For this reason, the energy of the cleaning medium 6 is large, the force acting when the cleaning medium 5 comes into contact with the cleaning medium 5 is increased, and the adhered deposits can be effectively removed and the cleaning medium 6 is repeatedly circulated to be cleaned. The frequency of contact with the object 5 can be increased, and the cleaning efficiency can be increased.

また、薄片状の洗浄媒体6は、姿勢によって空気抵抗が大きく変化するため、気流に沿って動くだけでなく急に方向を変えるなど複雑な運動をして洗浄対象物5に繰返し接触するので比較的複雑な形状の洗浄対象物5の洗浄効率を高めることができる。   In addition, since the air resistance of the flake-like cleaning medium 6 varies greatly depending on the posture, the cleaning medium 6 not only moves along the airflow but also suddenly changes its direction and repeatedly contacts the object 5 to be cleaned. The cleaning efficiency of the cleaning object 5 having a complicated shape can be increased.

洗浄槽ユニット2は洗浄槽7と洗浄媒体戻し手段9を有する。洗浄槽7は、例えば両側が封止された半円筒形や長方形や角錐形状に形成され、上部に開口部を有し、例えば半円筒形の壁面には気体や粉塵を通過させるが洗浄媒体6が通り抜けられない小孔やスリットを多数有する洗浄媒体分離手段10を有し、開口部方向に洗浄媒体6を加速する洗浄媒体加速手段8を有する。   The cleaning tank unit 2 has a cleaning tank 7 and a cleaning medium return means 9. The cleaning tank 7 is formed in, for example, a semi-cylindrical shape, a rectangular shape, or a pyramid shape that is sealed on both sides, and has an opening in the upper part. The cleaning medium separating means 10 has a large number of small holes and slits through which the cleaning medium cannot pass, and the cleaning medium acceleration means 8 for accelerating the cleaning medium 6 in the direction of the opening.

洗浄媒体加速手段8は複数の噴出し口を有する洗浄媒体加速ノズル11と例えばコンプレッサからなる圧縮空気供給装置12を有する。洗浄媒体加速ノズル11は複数の噴出し口を洗浄槽7の底面中心に沿って一直線に配置して洗浄槽7を貫通して設けられている。圧縮空気供給装置12は制御弁13を有する送気管14を介して洗浄媒体加速ノズル11に圧縮空気を供給して噴射させ、洗浄媒体6を高速飛翔させる。   The cleaning medium accelerating means 8 includes a cleaning medium accelerating nozzle 11 having a plurality of ejection ports and a compressed air supply device 12 made of, for example, a compressor. The cleaning medium accelerating nozzle 11 is provided through the cleaning tank 7 with a plurality of ejection openings arranged in a straight line along the center of the bottom surface of the cleaning tank 7. The compressed air supply device 12 supplies compressed air to the cleaning medium accelerating nozzle 11 via an air supply pipe 14 having a control valve 13 and causes the cleaning medium 6 to fly at high speed.

洗浄媒体戻し手段9は洗浄槽7の洗浄媒体分離手段10に接続された吸引ダクト15と吸引装置16及び洗浄媒体減速部材17を有する。吸引装置16は吸引管18を介して洗浄媒体分離手段10の小孔やスリットを通って吸引ダクト15に吸引される空気や粉塵などを搬送する。この吸引装置16は洗浄媒体加速ノズル11から流れ出す圧縮空気の流量に比べて十分な流量を吸引し、洗浄槽7内を負圧にするだけの性能を有する。洗浄媒体減速部材17は一定長さを有し凹形状に形成され、洗浄槽7の両側に設けられている。この洗浄媒体減速部材17の水平な層流形成面19の上面の角部には厚さが例えば約5mmの角柱形状のリニアガイド20を有する。このリニアガイド20は表面が滑らかな材質、例えばフッ素樹脂で形成され、洗浄対象物保持手段3を保持し、洗浄媒体減速部材17の平行な側面ガイド21とともに洗浄対象物保持手段3の移動を案内する。このリニアガイド20で形成する層流形成面19の水平な上面と洗浄対象物保持手段3との間隙22は洗浄媒体6が挟まらず、かつ流入する気流が十分高速になる大きさであれば良く、前記条件にとらわれず洗浄媒体6のサイズに応じて適切な条件を選択する。   The cleaning medium return means 9 includes a suction duct 15 connected to the cleaning medium separation means 10 of the cleaning tank 7, a suction device 16, and a cleaning medium speed reduction member 17. The suction device 16 conveys air, dust, and the like sucked into the suction duct 15 through the small holes and slits of the cleaning medium separating means 10 through the suction pipe 18. The suction device 16 has a performance that sucks a sufficient flow rate compared to the flow rate of the compressed air flowing out from the cleaning medium acceleration nozzle 11 and makes the inside of the cleaning tank 7 have a negative pressure. The cleaning medium deceleration member 17 has a fixed length and is formed in a concave shape, and is provided on both sides of the cleaning tank 7. A square columnar linear guide 20 having a thickness of, for example, about 5 mm is provided at the corner of the upper surface of the horizontal laminar flow forming surface 19 of the cleaning medium deceleration member 17. This linear guide 20 is formed of a material having a smooth surface, for example, a fluororesin, holds the cleaning object holding means 3, and guides the movement of the cleaning object holding means 3 together with the parallel side guides 21 of the cleaning medium reduction member 17. To do. The gap 22 between the horizontal upper surface of the laminar flow forming surface 19 formed by the linear guide 20 and the cleaning object holding means 3 is not squeezed by the cleaning medium 6 and the inflowing air flow is sufficiently large. Well, an appropriate condition is selected according to the size of the cleaning medium 6 regardless of the above condition.

洗浄対象物保持手段3は、洗浄対象物5の長さより大きい長さを有する板形状をしており、中央部に開口部封止部材4を固定した洗浄対象物5の形状に合わせた凹形状の洗浄対象物保持部を有する。洗浄対象物保持部の側面はウレタンゴムや発泡樹脂などの弾性のある部材で構成されており洗浄対象物5を固定する。なお、洗浄対象物保持部は、気流が漏れず、洗浄媒体6が詰まってしまうような間隙が存在しないように洗浄対象物5を保持する構成であればどのように保持しても良い。この洗浄対象物保持手段3の洗浄対象物保持部近傍には、例えばパンチングメタルやスリットの開いた樹脂製の板、柔軟なフィルムやゴム板、ブラシなどの通気性を有するスクレーパーからなる洗浄媒体堰き止め手段23を有する。また、洗浄対象物保持手段3は、図3(a)の平面図と(b)のA−A断面図に示すように、洗浄対象物5の形状に合わせた開口部を備える構成でも良い。洗浄対象物保持部の弾性部材39が洗浄対象物5に密接し、さらに開口部封止部材4が洗浄対象物5に固定されているため、洗浄媒体6や洗浄対象物から除去された付着物は洗浄槽の外に漏れない。   The cleaning object holding means 3 has a plate shape having a length larger than the length of the cleaning object 5 and has a concave shape that matches the shape of the cleaning object 5 with the opening sealing member 4 fixed at the center. The cleaning object holding part. The side surface of the cleaning object holding part is made of an elastic member such as urethane rubber or foamed resin, and fixes the cleaning object 5. The cleaning object holding unit may hold the cleaning object 5 in any way as long as the cleaning object 5 is held so that there is no gap in which the airflow does not leak and the cleaning medium 6 is clogged. In the vicinity of the cleaning object holding portion of the cleaning object holding means 3, for example, a cleaning medium dam composed of a punching metal, a resin plate having slits, a flexible film, a rubber plate, a brush or the like and a breathable scraper. Stop means 23 is provided. Further, the cleaning object holding means 3 may be configured to include an opening that matches the shape of the cleaning object 5 as shown in the plan view of FIG. 3A and the AA cross-sectional view of FIG. Since the elastic member 39 of the cleaning object holding part is in close contact with the cleaning object 5 and the opening sealing member 4 is fixed to the cleaning object 5, the adhered matter removed from the cleaning medium 6 and the cleaning object Does not leak out of the washing tank.

この洗浄対象物保持手段3は、例えば直動モータやエアシリンダ、ワイヤー駆動手段等の不図示の駆動手段に着脱自在となっており、制御装置からの制御信号により駆動手段を駆動して洗浄槽ユニット2の動作と並行して層流形成部19に沿って移動する。   The cleaning object holding means 3 is detachably attached to a driving means (not shown) such as a linear motor, an air cylinder, or a wire driving means, and the driving means is driven by a control signal from a control device to wash the cleaning tank. It moves along the laminar flow forming part 19 in parallel with the operation of the unit 2.

この乾式洗浄装置1で洗浄する洗浄対象物5は、図4の斜視図に示すように、複数の開口部24を有するマスク治具等である。この洗浄対象物5の開口部24から洗浄媒体6や除去された固着汚れが漏れることを防ぐため、開口部封止部材4は洗浄対象物5の洗浄対象面と反対側の開口部24を有する部分に固定される。開口部封止部材4の洗浄対象物5の開口部24に対応する部分には、図5の斜視図に示すように、洗浄媒体飛翔方向制御手段25が固定されている。洗浄媒体飛翔方向制御手段25は4つの傾斜面を有する角錐状または角錐台状に形成され、各傾斜面に噴射口26を有する。この噴射口26は、図6の断面図に示すように、洗浄対象物5に固定される面と反対側の大気開放口27に連通し、洗浄槽7内が負圧にすることにより洗浄対象物保持手段3に設けた貫通孔26から開口部24に流入気流を生じさせる。   The cleaning object 5 to be cleaned by the dry cleaning apparatus 1 is a mask jig or the like having a plurality of openings 24 as shown in the perspective view of FIG. In order to prevent the cleaning medium 6 and the removed fixed dirt from leaking from the opening 24 of the object 5 to be cleaned, the opening sealing member 4 has an opening 24 opposite to the surface to be cleaned of the object 5 to be cleaned. Fixed to the part. As shown in the perspective view of FIG. 5, the cleaning medium flying direction control means 25 is fixed to the portion of the opening sealing member 4 corresponding to the opening 24 of the cleaning object 5. The cleaning medium flying direction control means 25 is formed in a pyramid shape or a truncated pyramid shape having four inclined surfaces, and has an injection port 26 on each inclined surface. As shown in the cross-sectional view of FIG. 6, the injection port 26 communicates with the atmosphere opening 27 on the side opposite to the surface fixed to the cleaning object 5, and the cleaning tank 7 is made to have a negative pressure so as to be cleaned. An inflow air current is generated from the through hole 26 provided in the object holding means 3 to the opening 24.

この乾式洗浄装置1で開口部24を有する洗浄対象物5に付着したフラックス等の汚れや粉塵を除去する動作を説明する。   An operation of removing dirt and dust such as flux attached to the cleaning object 5 having the opening 24 in the dry cleaning apparatus 1 will be described.

まず、洗浄槽7に適量の洗浄媒体6を投入し、図2に示すように、開口部封止部材4の洗浄媒体飛翔方向制御手段25を洗浄対象物5の開口部24に位置合わせして洗浄対象物5の上に開口部封止部材4を固定する。この開口部封止部材4を固定した洗浄対象物5を洗浄対象物保持手段3で保持し、洗浄対象物5を洗浄槽ユニット2側にして洗浄対象物保持手段3を洗浄槽ユニット2に載置し、不図示の駆動手段に連結し、図1に示すように、洗浄対象物5を洗浄槽7の上に移動する。この状態で図示していない制御装置を稼働させると、制御装置は、まず吸引装置16を駆動させて洗浄槽7内の空気を吸引する。この洗浄槽7内の空気の吸引により外気との差圧が生じ、リニアガイド20により形成された層流形成部19と洗浄対象物保持手段4の間の間隙22が流路となり、洗浄槽7内に向かう気流が発生する。この気流は層流形成部19の平坦な面を通過して層流化され、外気を洗浄槽7内に流入させる。次に制御装置は圧縮空気供給装置12を駆動して制御弁13を開いて洗浄媒体加速ノズル11に圧縮空気を供給して洗浄媒体加速ノズル11から洗浄槽7内に垂直上方向の高速気流を発生させる。この高速気流により、図2に示すように、洗浄媒体6が高速で飛翔して洗浄対象物5に衝突して洗浄対象物5表面に付着している汚れや粉塵等を効率良く除去する。洗浄対象物5に衝突した洗浄媒体6は気流の流れと重力によって落下し、洗浄媒体分離手段10上を吸引されながら洗浄媒体加速ノズル11の近傍に滑り落ちる。このとき、同時に、洗浄媒体6に付着した汚れが分離・吸引される。洗浄媒体分離手段10で分離した汚れや粉塵等は吸気ダクト15と吸引管18を通って吸引装置16により回収される。また、洗浄媒体加速ノズル11の近傍に落下した洗浄媒体6は再び洗浄媒体加速ノズル11により噴射する高速気流によって垂直上方向に飛翔する。この動作を繰り返すことにより、洗浄対象物5の表面の汚れや粉塵や付着物等が除去される。   First, an appropriate amount of the cleaning medium 6 is put into the cleaning tank 7, and the cleaning medium flying direction control means 25 of the opening sealing member 4 is aligned with the opening 24 of the cleaning object 5 as shown in FIG. The opening sealing member 4 is fixed on the cleaning object 5. The cleaning target object 5 to which the opening sealing member 4 is fixed is held by the cleaning target object holding means 3, and the cleaning target object holding means 3 is mounted on the cleaning tank unit 2 with the cleaning target object 5 facing the cleaning tank unit 2. Then, it is connected to a driving means (not shown), and the object to be cleaned 5 is moved onto the cleaning tank 7 as shown in FIG. When a control device (not shown) is operated in this state, the control device first drives the suction device 16 to suck the air in the cleaning tank 7. The suction of the air in the cleaning tank 7 generates a differential pressure with the outside air, and the gap 22 between the laminar flow forming portion 19 formed by the linear guide 20 and the cleaning object holding means 4 serves as a flow path. Inward airflow is generated. This airflow passes through the flat surface of the laminar flow forming portion 19 and is made into a laminar flow, and the outside air flows into the cleaning tank 7. Next, the control device drives the compressed air supply device 12 to open the control valve 13 to supply compressed air to the cleaning medium acceleration nozzle 11 and to generate a high-speed air flow in the vertical upward direction from the cleaning medium acceleration nozzle 11 into the cleaning tank 7. generate. As shown in FIG. 2, the cleaning medium 6 flies at a high speed and collides with the cleaning target object 5 and efficiently removes dirt, dust and the like adhering to the surface of the cleaning target object 5. The cleaning medium 6 that has collided with the cleaning object 5 falls due to the flow of air and gravity, and slides down in the vicinity of the cleaning medium acceleration nozzle 11 while being sucked on the cleaning medium separating means 10. At the same time, the dirt adhering to the cleaning medium 6 is separated and sucked. Dirt, dust and the like separated by the cleaning medium separating means 10 are collected by the suction device 16 through the intake duct 15 and the suction pipe 18. In addition, the cleaning medium 6 that has fallen in the vicinity of the cleaning medium acceleration nozzle 11 flies vertically upward by a high-speed air flow ejected by the cleaning medium acceleration nozzle 11 again. By repeating this operation, dirt, dust, deposits and the like on the surface of the cleaning object 5 are removed.

この洗浄媒体加速ノズル11により噴射する高速気流のなかで洗浄対象物5の開口部24に向かって吹き付ける気流は、図6に示すように、洗浄媒体飛翔方向制御手段25の傾斜面に沿って流れる。この洗浄媒体飛翔方向制御手段25の傾斜面に設けられた噴射口26からは、洗浄槽7内の負圧と大気圧との差圧により気流が流入しているから、この流入気流により水平方向に向かう気流がより強化される。このため洗浄対象物5の開口部24内に飛翔した洗浄媒体6は形成された気流に乗って飛翔方向を変え、洗浄対象物5の開口部24の内面に垂直に衝突して汚れや粉塵等を除去する。   Among the high-speed air flow ejected by the cleaning medium acceleration nozzle 11, the air flow blown toward the opening 24 of the cleaning object 5 flows along the inclined surface of the cleaning medium flying direction control means 25 as shown in FIG. 6. . An airflow flows from the injection port 26 provided on the inclined surface of the cleaning medium flight direction control means 25 due to the differential pressure between the negative pressure in the cleaning tank 7 and the atmospheric pressure. The airflow toward is further strengthened. For this reason, the cleaning medium 6 that has jumped into the opening 24 of the cleaning object 5 changes the flight direction by riding on the formed air current, and collides perpendicularly with the inner surface of the opening 24 of the cleaning object 5 to cause dirt, dust, etc. Remove.

この飛翔する洗浄媒体6により洗浄対象物5を洗浄しているとき、層流形成部19と洗浄対象物保持手段3との間隙22からは層流された強い気流が流れ込んでくる。したがって間隙22に入り込もうとする洗浄媒体6は押し戻されて洗浄槽7外には排出されないで最終的には洗浄媒体堰き止め手段23により阻止されて洗浄槽7の外縁上に落下して停止する。   When the cleaning target 5 is cleaned by the flying cleaning medium 6, a strong laminar airflow flows from the gap 22 between the laminar flow forming unit 19 and the cleaning target holding means 3. Accordingly, the cleaning medium 6 that is about to enter the gap 22 is pushed back and is not discharged out of the cleaning tank 7, but is finally blocked by the cleaning medium damming means 23 and falls onto the outer edge of the cleaning tank 7 and stops.

この洗浄媒体6を洗浄媒体加速ノズル11により飛翔させて洗浄対象物5を洗浄するとき、制御弁13を間欠駆動して洗浄媒体加速ノズル11からの高速気流の噴射と停止を繰り返す。この高速気流の噴射と停止を繰り返すことにより、洗浄槽7の内外の差圧が大きくなるタイミングが発生し、より確実に洗浄媒体6を洗浄槽7内に引き戻す力を得ることができるとともに洗浄媒体飛翔方向制御手段25の傾斜面に設けられた噴射口26からの流入気流の流速を大きくすることができる。   When the cleaning medium 6 is caused to fly by the cleaning medium acceleration nozzle 11 to clean the object 5 to be cleaned, the control valve 13 is intermittently driven to repeatedly eject and stop the high-speed air flow from the cleaning medium acceleration nozzle 11. By repeating the jetting and stopping of the high-speed air flow, a timing at which the pressure difference between the inside and outside of the cleaning tank 7 increases, and the cleaning medium 6 can be more reliably pulled back into the cleaning tank 7 and the cleaning medium can be obtained. It is possible to increase the flow velocity of the inflow air current from the injection port 26 provided on the inclined surface of the flight direction control means 25.

制御装置は制御弁13の間欠駆動と平行して洗浄対象物保持手段3を洗浄槽ユニット2の層流形成部19の側面ガイド21とリニアガイド20に沿って洗浄槽7の前後に往復移動して洗浄対象物5の全面を洗浄する。この洗浄対象物保持手段3を少なくとも1往復、必要ならば数回往復させたあとに、制御装置は圧縮空気供給装置12と吸引装置16の駆動を停止して一連の洗浄動作を完了させる。   In parallel with the intermittent drive of the control valve 13, the control device reciprocates the cleaning object holding means 3 along the side guide 21 and the linear guide 20 of the laminar flow forming portion 19 of the cleaning tank unit 2 and back and forth of the cleaning tank 7. To clean the entire surface of the object 5 to be cleaned. After the cleaning object holding means 3 is reciprocated at least once, and several times if necessary, the controller stops driving the compressed air supply device 12 and the suction device 16 to complete a series of cleaning operations.

このように洗浄対象物保持手段3を洗浄槽7に対して前後に移動して洗浄対象物5を洗浄することにより、洗浄対象物5の開口部24を含む全面を確実に洗浄することができる。また、洗浄対象物保持手段3を洗浄槽6に対して前後に間欠移動するとき洗浄媒体堰き止め手段23により層流形成部19と洗浄対象物保持手段3の間の間隙22に残留した洗浄媒体6を掃き取って洗浄槽7内に確実に回収することができる。   Thus, by cleaning the cleaning object 5 by moving the cleaning object holding means 3 back and forth with respect to the cleaning tank 7, the entire surface including the opening 24 of the cleaning object 5 can be reliably cleaned. . Further, when the cleaning object holding means 3 is intermittently moved back and forth with respect to the cleaning tank 6, the cleaning medium remaining in the gap 22 between the laminar flow forming portion 19 and the cleaning object holding means 3 by the cleaning medium damming means 23. 6 can be swept out and reliably recovered in the washing tank 7.

前記説明では洗浄媒体飛翔方向制御手段25の噴射口26から洗浄槽7内の負圧と大気圧との差圧により気流を流入させる場合について示したが、外部の加圧空気供給源から加圧空気を洗浄媒体飛翔方向制御手段25に供給して噴射口26から噴射させても良い。   In the above description, the case where the airflow is caused to flow from the jet port 26 of the cleaning medium flying direction control means 25 by the differential pressure between the negative pressure in the cleaning tank 7 and the atmospheric pressure is shown. Air may be supplied to the cleaning medium flight direction control means 25 and ejected from the ejection port 26.

また、前記説明では洗浄媒体飛翔方向制御手段25の傾斜面に噴射口26を設けた場合について示したが、図7(a)の平面図と(b)の側面図に示すように、円筒状のノズルヘッドに加圧空気を外周面の法線に対して所定角度傾けて噴射する噴射ノズル30を例えば3個有し、開口部封止部材4に外部から供給される加圧空気を3方から噴射して回転する回転ノズル31を有する洗浄媒体飛翔方向制御手段25を設けても良い。   Further, in the above description, the case where the injection port 26 is provided on the inclined surface of the cleaning medium flying direction control means 25 has been described. However, as shown in the plan view of FIG. 7A and the side view of FIG. For example, the nozzle head has three injection nozzles 30 that inject pressurized air at a predetermined angle with respect to the normal line of the outer peripheral surface, and the pressurized air supplied from the outside to the opening sealing member 4 is provided in three directions. A cleaning medium flying direction control means 25 having a rotating nozzle 31 that is jetted from and rotated may be provided.

この洗浄媒体飛翔方向制御手段25を構成する回転ノズル31を回転自在に取付けた開口部封止部材4は、図8に示すように、上部に複数のガイドピン32と固定ばね33を有し、ガイドピン32と固定ばね33により洗浄対象物保持手段3に位置決めして取り付け、回転ノズル31の空気供給部を洗浄対象物保持手段3に設けた空気供給継手34にそれぞれ連結する。洗浄対象物保持手段3の各空気供給継手34は電磁弁35を介して加圧空気供給チューブ36に連結されている。この開口部封止部4を洗浄対象物5に固定して洗浄対象物保持手段3に取付けたとき、開口部封止部材4を固定ばね33により洗浄対象物3に押し付けて洗浄対象物3の開口部24周囲に隙間が生じることを防ぐ。   The opening sealing member 4 to which the rotary nozzle 31 constituting the cleaning medium flying direction control means 25 is rotatably attached has a plurality of guide pins 32 and a fixing spring 33 on the upper portion as shown in FIG. The guide pin 32 and the fixed spring 33 are positioned and attached to the cleaning object holding means 3, and the air supply portion of the rotary nozzle 31 is connected to an air supply joint 34 provided on the cleaning object holding means 3. Each air supply joint 34 of the cleaning object holding means 3 is connected to a pressurized air supply tube 36 via an electromagnetic valve 35. When the opening sealing portion 4 is fixed to the cleaning object 5 and attached to the cleaning object holding means 3, the opening sealing member 4 is pressed against the cleaning object 3 by the fixing spring 33 and the cleaning object 3 A gap is prevented from being generated around the opening 24.

この回転ノズル31を有する洗浄媒体飛翔方向制御手段25が設けられた開口部封止部4の洗浄媒体飛翔方向制御手段25を洗浄対象物5の開口部24に位置合わせして洗浄対象物5の上に開口部封止部材4を固定して、開口部封止部材4を固定した洗浄対象物5を洗浄対象物保持手段3で保持した状態で洗浄対象物5を洗浄槽7の上に移動して洗浄媒体6を飛翔させて洗浄対象物5を洗浄しているとき、加圧空気供給チューブ36から電磁弁34を介して洗浄媒体飛翔方向制御手段25の回転ノズル31に加圧空気を供給する。回転ノズル31に供給された加圧空気は各噴射ノズル30から噴射され、回転ノズル31を回転するとともに洗浄対象物5の開口部24の内面方向に気流を噴射する。この回転ノズル31から噴射する気流により開口部24内に飛翔した洗浄媒体6は飛翔方向を変え、洗浄対象物5の開口部24の内面に垂直に衝突して汚れや粉塵等を除去する。   The cleaning medium flying direction control means 25 of the opening sealing portion 4 provided with the cleaning medium flying direction control means 25 having the rotating nozzle 31 is aligned with the opening 24 of the cleaning object 5 to adjust the cleaning object 5. The cleaning object 5 is moved onto the cleaning tank 7 in a state where the opening sealing member 4 is fixed on the top and the cleaning object 5 holding the opening sealing member 4 is held by the cleaning object holding means 3. Then, when the cleaning medium 6 is made to fly and the object 5 to be cleaned is cleaned, pressurized air is supplied from the pressurized air supply tube 36 to the rotating nozzle 31 of the cleaning medium flight direction control means 25 via the electromagnetic valve 34. To do. The pressurized air supplied to the rotary nozzle 31 is jetted from each jet nozzle 30 and rotates the rotary nozzle 31 and jets an air flow toward the inner surface of the opening 24 of the cleaning object 5. The cleaning medium 6 flying into the opening 24 by the air flow ejected from the rotating nozzle 31 changes the flight direction and collides perpendicularly with the inner surface of the opening 24 of the cleaning object 5 to remove dirt, dust and the like.

このように回転ノズル31の各噴射ノズル30から加圧空気を外周面の法線に対して所定角度傾けて噴射することにより洗浄媒体6の飛翔方向を非接触で変えられるため、洗浄媒体6に加えられるダメージをより少なくするとともに、薄片状の洗浄媒体6を遠心方向に容易に加速することができる。また、各噴射ノズル30から間欠的に気流を噴射することにより、加圧空気の消費量を低減することができる。   In this way, the jet direction of the cleaning medium 6 can be changed in a non-contact manner by injecting the pressurized air from each injection nozzle 30 of the rotary nozzle 31 at a predetermined angle with respect to the normal line of the outer peripheral surface. The damage applied can be reduced, and the lamellar cleaning medium 6 can be easily accelerated in the centrifugal direction. Moreover, the consumption of pressurized air can be reduced by injecting airflow intermittently from each injection nozzle 30.

前記説明では回転ノズル31を各噴射ノズル30から噴出する気流で回転させる場合について示したが、回転ノズル31を回転させずに固定しておいても、開口部24内に飛翔した洗浄媒体6を遠心方向に飛翔させることができる。   In the above description, the rotating nozzle 31 is rotated by the air flow ejected from each of the injection nozzles 30. However, the cleaning medium 6 that has jumped into the opening 24 can be fixed even if the rotating nozzle 31 is fixed without rotating. It can fly in the centrifugal direction.

また、前記説明では回転ノズル31の各噴射ノズル30から洗浄対象物5の開口部24の内面に対して所定角度傾けた気流により洗浄媒体6を衝突させる場合について説明したが、回転ノズル31の代わりに、図8に示すように、複数例えば3枚の回転羽根37を有する羽根車38を回転させて、衝突した洗浄媒体6を遠心方向に投射しても良い。この羽根車38はモータにより外部から回転駆動しても良い。また、回転羽根37の適切にして洗浄媒体加速手段8の洗浄媒体加速ノズル11から噴射する高速気流により回転しても良い。   Further, in the above description, the case where the cleaning medium 6 is caused to collide with each jet nozzle 30 of the rotary nozzle 31 by the airflow inclined by a predetermined angle with respect to the inner surface of the opening 24 of the cleaning target 5 is described. In addition, as shown in FIG. 8, the impeller 38 having a plurality of, for example, three rotating blades 37 may be rotated to project the collided cleaning medium 6 in the centrifugal direction. The impeller 38 may be rotationally driven from the outside by a motor. Further, the rotation blade 37 may be appropriately rotated by a high-speed air current ejected from the cleaning medium acceleration nozzle 11 of the cleaning medium acceleration unit 8.

この乾式洗浄装置1を使用して多くの開口部を有する洗浄対象物5を洗浄することにより、洗浄対象物5を繰り返して利用することができ、資源を有効に利用することができる。また、洗浄対象物5の開口部の位置や数が異なっても、それに応じた開口部封止部材4を使用すれば良いから、各種の洗浄対象物5の洗浄に適用することができる。   By using the dry cleaning apparatus 1 to clean the cleaning object 5 having many openings, the cleaning object 5 can be used repeatedly and resources can be used effectively. Moreover, even if the position and number of the openings of the cleaning object 5 are different, it is only necessary to use the opening sealing member 4 according to the position and number, so that the cleaning object 5 can be applied to various cleaning objects 5.

この発明の乾式洗浄装置の機構構成図である。It is a mechanism block diagram of the dry-type cleaning apparatus of this invention. 乾式洗浄装置の要部を示す部分拡大断面図である。It is a partial expanded sectional view which shows the principal part of a dry-type cleaning apparatus. 洗浄対象物保持手段の他の構成図である。It is another block diagram of a washing | cleaning target object holding means. 洗浄対象物の構成を示す斜視図である。It is a perspective view which shows the structure of a washing | cleaning target object. 開口部封止部材の構成を示す斜視図である。It is a perspective view which shows the structure of an opening part sealing member. 開口部封止部材の洗浄媒体飛翔方向制御手段の構成を示す断面図である。It is sectional drawing which shows the structure of the cleaning medium flight direction control means of an opening part sealing member. 回転ノズルが設けられた洗浄媒体飛翔方向制御手段を有する開口部封止部材の構成図である。It is a block diagram of the opening part sealing member which has a cleaning medium flight direction control means provided with the rotation nozzle. 回転ノズルを有する開口部封止部材を洗浄対象物保持手段に取付けた状態を示す断面図である。It is sectional drawing which shows the state which attached the opening part sealing member which has a rotating nozzle to the washing | cleaning target object holding means. 洗浄媒体飛翔方向制御手段の羽根車を示す斜視図である。It is a perspective view which shows the impeller of a washing | cleaning medium flight direction control means. 従来の乾式洗浄措置の概略構成図である。It is a schematic block diagram of the conventional dry-type washing | cleaning measure.

符号の説明Explanation of symbols

1;乾式洗浄装置、2;洗浄槽ユニット、3;洗浄対象物保持手段、
4;開口部封止部材、5;洗浄対象物、6;洗浄媒体、7;洗浄槽、
8;洗浄媒体加速手段、9;洗浄媒体戻し手段、10;洗浄媒体分離手段、
11;洗浄媒体加速ノズル、12;圧縮空気供給装置、13;制御弁、
14;送気管、15;吸引ダクト、16;吸引装置、17洗浄媒体減速部材、
18;吸引管、19;層流形成面、20;リニアガイド、21;側面ガイド、
22;間隙、23;洗浄媒体堰き止め手段、24;開口部、
25;洗浄媒体飛翔方向制御手段、26;噴射口、27;大気開放口、
30;噴射ノズル、31;回転ノズル、32;ガイドピン、33;固定ばね、
34;空気供給継手、35;電磁弁、36;加圧空気供給チューブ、
37;回転羽根、38;羽根車、39;弾性部材。
1; dry cleaning device, 2; cleaning tank unit, 3;
4; Opening sealing member, 5; Cleaning object, 6; Cleaning medium, 7; Cleaning tank,
8; Cleaning medium acceleration means, 9; Cleaning medium return means, 10; Cleaning medium separation means,
11; Cleaning medium acceleration nozzle, 12; Compressed air supply device, 13; Control valve,
14; air pipe, 15; suction duct, 16; suction device, 17 cleaning medium moderator,
18; suction pipe, 19; laminar flow forming surface, 20; linear guide, 21; side guide,
22; gap, 23; cleaning medium damming means, 24; opening,
25; cleaning medium flying direction control means, 26; injection port, 27; atmosphere opening port,
30; injection nozzle, 31; rotating nozzle, 32; guide pin, 33; fixed spring,
34; air supply joint, 35; solenoid valve, 36; pressurized air supply tube,
37; Rotating blade, 38; Impeller, 39; Elastic member.

Claims (8)

速気流により流動する薄片状の洗浄媒体を1又は複数の開口部を有する洗浄対象物に衝突させて洗浄する乾式洗浄装置であって、
前記洗浄対象物に固定されて開口部を封止する開口封止部材と洗浄槽と洗浄対象物保持手段と洗浄媒体戻し手段を有し、
前記洗浄槽は、一方に開口部を有し、壁面には気体や粉塵を通過させるが洗浄媒体が通り抜けられない洗浄媒体分離手段を有し、前記開口部方向に洗浄媒体を加速する洗浄媒体加速手段を有し、
前記洗浄媒体戻し手段は、前記洗浄媒体分離手段を介して接続された吸引装置と、前記洗浄槽の開口部の外縁に設けられ、前記洗浄対象物保持手段を保持して一定間隔の気体流入路を形成する洗浄媒体減速手段を有し、
前記開口部封止部材は、洗浄媒体の飛翔方向を切り替える洗浄媒体飛翔方向制御手段を有し、
前記洗浄対象物保持手段は、前記開口部封止部材を固定した洗浄対象物を保持し、前記洗浄媒体減速手段に沿って移動自在であることを特徴とする乾式洗浄装置。
A dry cleaning apparatus for cleaning by colliding the cleaning object having one or more openings flaky cleaning medium flowing through the high-speed air stream,
Fixed to said cleaned object has a return means cleaning medium with the opening sealing member and the cleaning tank and the cleaning target object holding means for sealing the opening,
The cleaning tank has an opening on one side, and has cleaning medium separating means that allows gas and dust to pass through the wall surface but cannot pass through the cleaning medium, and accelerates the cleaning medium in the direction of the opening. Having means,
The cleaning medium return means is provided at an outer edge of the suction device connected via the cleaning medium separation means and the opening of the cleaning tank, and holds the cleaning object holding means, and has a gas inflow passage at regular intervals. Having a cleaning medium deceleration means for forming
The opening sealing member has cleaning medium flying direction control means for switching the flying direction of the cleaning medium,
The dry cleaning apparatus, wherein the cleaning object holding means holds a cleaning object to which the opening sealing member is fixed and is movable along the cleaning medium speed reducing means.
前記洗浄媒体飛翔方向制御手段は、前記開口部の内面に向かう気流を噴射する噴射口を有することを特徴とする請求項1記載の乾式洗浄装置。 The cleaning medium flying direction control means, the dry cleaning apparatus according to claim 1 Symbol mounting and having an injection port for injecting an air flow toward the inner surface of the opening. 前記洗浄媒体飛翔方向制御手段は、前記開口部の内面に対して所定角度傾けた気流を噴射する噴射口を有することを特徴とする請求項1記載の乾式洗浄装置。 The cleaning medium flying direction control means, the dry cleaning apparatus according to claim 1 Symbol mounting and having an injection port for injecting a predetermined angle inclined airflow to the inner surface of the opening. 前記洗浄媒体飛翔方向制御手段は、回転自在であることを特徴とする請求項記載の乾式洗浄装置。 The dry cleaning apparatus according to claim 3, wherein the cleaning medium flying direction control means is rotatable. 前記洗浄媒体飛翔方向制御手段に加圧空気を供給して前記噴射口から気流を噴射させる請求項乃至のいずれかに記載の乾式洗浄装置。 The dry cleaning apparatus according to any one of claims 2 to 4 , wherein compressed air is supplied to the cleaning medium flight direction control means to inject an air flow from the injection port. 前記洗浄媒体飛翔方向制御手段は、前記洗浄媒体加速手段で発生した気流の方向を前記開口部内面に向かう方向に補正する流れ制御板を有することを特徴とする請求項1記載の乾式洗浄装置。 The cleaning medium flying direction control means, according to claim 1 Symbol placement dry cleaning apparatus characterized by having a flow control plate for correcting the direction of the airflow generated by the cleaning medium accelerating unit in a direction toward the opening interior surface . 請求項1乃至のいずれかに記載の乾式洗浄装置を使用した洗浄方法であって、
洗浄槽内の空気を吸引している状態で洗浄媒体加速手段により高速気流を発生し、薄片の洗浄媒体を飛翔させて洗浄対象物の開口部に飛翔した洗浄媒体の飛翔方向を洗浄媒体飛翔方向制御手段により切り替えて洗浄対象物の開口部内面を洗浄することを特徴とする洗浄方法。
A cleaning method using the dry cleaning apparatus according to any one of claims 1 to 6 ,
While the air in the cleaning tank is being sucked in, the cleaning medium accelerating means generates a high-speed air current, and the cleaning medium flying direction is defined as the cleaning medium flying direction by flying the thin cleaning medium and flying to the opening of the object to be cleaned A cleaning method characterized by cleaning the inner surface of the opening of the object to be cleaned by switching by a control means.
請求項1乃至のいずれかに記載の乾式洗浄装置を使用して洗浄されたことを特徴とする洗浄物。 A cleaning object, which is cleaned using the dry cleaning apparatus according to any one of claims 1 to 6 .
JP2008237257A 2008-09-17 2008-09-17 Dry cleaning apparatus, cleaning method, and cleaned items Active JP5273534B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008237257A JP5273534B2 (en) 2008-09-17 2008-09-17 Dry cleaning apparatus, cleaning method, and cleaned items

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008237257A JP5273534B2 (en) 2008-09-17 2008-09-17 Dry cleaning apparatus, cleaning method, and cleaned items

Publications (2)

Publication Number Publication Date
JP2010069368A JP2010069368A (en) 2010-04-02
JP5273534B2 true JP5273534B2 (en) 2013-08-28

Family

ID=42201647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008237257A Active JP5273534B2 (en) 2008-09-17 2008-09-17 Dry cleaning apparatus, cleaning method, and cleaned items

Country Status (1)

Country Link
JP (1) JP5273534B2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5793980B2 (en) 2010-11-10 2015-10-14 株式会社リコー Dry cleaning housing and dry cleaning device
JP5712826B2 (en) 2010-11-17 2015-05-07 株式会社リコー Dry cleaning housing and dry cleaning device
JP5879903B2 (en) 2011-02-25 2016-03-08 株式会社リコー Dry cleaning housing, dry cleaning device and dry cleaning system
JP5845796B2 (en) * 2011-02-25 2016-01-20 株式会社リコー Dry cleaning device
JP5541297B2 (en) * 2011-05-11 2014-07-09 株式会社リコー Cleaning medium, method for manufacturing cleaning medium, and dry cleaning apparatus
JP5953975B2 (en) * 2011-10-26 2016-07-20 株式会社リコー Cleaning medium splash prevention member, cleaning object holder and dry cleaning device
JP6287130B2 (en) * 2013-11-29 2018-03-07 富士通株式会社 Cleaning device
CN109692846A (en) * 2018-12-29 2019-04-30 深圳市富诺依科技有限公司 A kind of dry cleaning device
CN109759390A (en) * 2018-12-29 2019-05-17 深圳市富诺依科技有限公司 A kind of the packaging container component and dry cleaning device of dry cleaning device
CN109701958A (en) * 2018-12-29 2019-05-03 深圳市富诺依科技有限公司 A kind of dry cleaning device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05177811A (en) * 1992-01-06 1993-07-20 Furukawa Electric Co Ltd:The Cleaning method and its device of printing mask
JP2007245079A (en) * 2006-03-17 2007-09-27 Ricoh Co Ltd Dry washing method and dry washing device

Also Published As

Publication number Publication date
JP2010069368A (en) 2010-04-02

Similar Documents

Publication Publication Date Title
JP5273534B2 (en) Dry cleaning apparatus, cleaning method, and cleaned items
JP4531841B2 (en) Cleaning device and cleaning method
JP4860764B2 (en) Cleaning device and cleaning method
EP2135687B1 (en) Cleaning apparatus and cleaning method
JP5879903B2 (en) Dry cleaning housing, dry cleaning device and dry cleaning system
JP2010279850A (en) Cleaning device and cleaning method
JP2017070904A (en) Dust removing nozzle and dust removing device
JP5061053B2 (en) Dry cleaning apparatus, dry cleaning method, cleaning product cleaned by the dry cleaning apparatus, and method of manufacturing the regenerator
JP5953975B2 (en) Cleaning medium splash prevention member, cleaning object holder and dry cleaning device
JP2011050960A (en) Cleaning medium and cleaning apparatus
WO2016169372A1 (en) Sprayer cleaning device
KR100673396B1 (en) Apparatus and method for processing substrate and removing particles thereon using aerial current
JP2007059417A (en) Substrate treatment device
JP2014039921A (en) Dry cleaning housing, dry cleaning device, and dry cleaning method
JP4954030B2 (en) Cleaning medium and dry cleaning apparatus using the same
TWI612864B (en) Washing device and washing method
JP2014024063A (en) Dry cleaning device
JP2005046721A (en) Duct interior cleaning device and duct interior cleaning method
JP3131258U (en) Substrate cleaning device
JP2012035193A (en) Cleaning device and cleaning method
WO2020073192A1 (en) Ultrasonic cleaning machine
JP6069917B2 (en) Dry cleaning housing and dry cleaning device
JP2012210617A (en) Washing apparatus
JP2000176337A (en) Device for cleaning wall surface of booth for electrostatic powder coating
JP2014140805A (en) Dry cleaning body and dry cleaning device

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20100115

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110805

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20121030

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121102

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121226

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130419

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130502

R151 Written notification of patent or utility model registration

Ref document number: 5273534

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151