TWI612864B - Washing device and washing method - Google Patents

Abstract

A cleaning device includes: a spray port member that sprays a cleaning agent from a spray port to a cleaning object having a through hole; and a suction port member that is opposite to the spray port from the cleaning object The side suction port sucks the aforementioned detergent.

Description

Washing device and washing method Field of invention

The present invention relates to a cleaning device and a cleaning method.

Background of the invention

A deburring device and a deburring method are known in which a cleaning medium containing frozen particles is sprayed from a nozzle of an ice maker onto a resin substrate to clean the resin substrate.

Prior art literature

Patent Document 1 Japanese Patent Application Publication No. 2008-307624

In a cleaning object having a through-hole formed there may be an adhered substance in the through-hole.

Summary of invention

In one aspect, the present invention aims to improve the ability to remove adherents to a cleaning target having a through-hole formed therein.

In one aspect, the cleaning agent is sprayed from the spray port to the cleaning object having the through hole, and the cleaning agent is sucked by the suction port provided to the cleaning object on the side opposite to the spray port.

12‧‧‧washing device

14‧‧‧ chamber

14A‧‧‧Upper space

14B‧‧‧Lower Space

14C‧‧‧Sidewall

14D‧‧‧Upper Wall

14E‧‧‧ lower wall

16‧‧‧ metal mask

16A‧‧‧Mask body

16B‧‧‧ Reinforcing member

18‧‧‧through hole

18S‧‧‧ inside

20‧‧‧Solder Paste

20A‧‧‧Flux

20B‧‧‧Solder particles

22‧‧‧ holding member

24‧‧‧ Detergent nozzle

26‧‧‧jet port

28‧‧‧ suction nozzle

30‧‧‧ Attraction

32‧‧‧shell

34‧‧‧Gas jet nozzle

34A‧‧‧first pose

34B‧‧‧ 2nd posture

36‧‧‧ shaft

38‧‧‧control device

40‧‧‧ detergent supply device

42‧‧‧Gas supply device

44‧‧‧Return to component

46‧‧‧ supply port

48‧‧‧The first pump

50‧‧‧ buffer tank

52‧‧‧Pump 2

54‧‧‧ Granular body generating device

56‧‧‧3rd pump

58‧‧‧Filter

60‧‧‧Storage tank

62‧‧‧The first valve

64A‧‧‧The first piping

64A1‧‧‧The first piping (divergent part)

64B‧‧‧ 2nd piping

66‧‧‧ Recovery device

68‧‧‧ Recovery device

70‧‧‧ discharge pipe

72‧‧‧ 2nd valve

74‧‧‧ sprayer

76‧‧‧Cooler

78‧‧‧ Freezing point sensor

80‧‧‧ discharge piping

82‧‧‧ opposite side suction nozzle

84‧‧‧ opposite side suction mouth

86‧‧‧Exhaust piping

88‧‧‧4th pump

90‧‧‧ settling tank

92‧‧‧ Filter

94‧‧‧3rd valve

96‧‧‧Reflecting member

98‧‧‧ inclined surface

102‧‧‧ Attachments

104‧‧‧ Detergent

106‧‧‧ Vortex

108‧‧‧ Vortex

M1‧‧‧moving direction

M2‧‧‧ direction of movement

P‧‧‧ Arrow

P1‧‧‧arrow

θ1‧‧‧ angle

θ2‧‧‧ angle

Fig. 1 is a front view showing a cleaning apparatus according to a first embodiment.

Fig. 2 is an enlarged front view showing a cleaning apparatus according to the first embodiment.

Fig. 3 is an enlarged front view showing a cleaning apparatus according to the first embodiment.

Fig. 4 is an enlarged front view showing a cleaning device according to the first embodiment.

Fig. 5 is a plan view showing a suction nozzle of the cleaning device of the first embodiment.

FIG. 6 is a perspective view showing a metal mask.

Fig. 7 is a block diagram of a cleaning device according to the first embodiment.

FIG. 8A is a longitudinal sectional view showing an enlarged vicinity of a through hole of a metal mask. FIG.

FIG. 8B is a cross-sectional view enlarging and displaying the vicinity of the through hole of the metal mask.

Fig. 9 is a timing chart showing an example of a cleaning procedure of the cleaning device according to the first embodiment.

Fig. 10 is a front view of a cleaning device in which a gas injection nozzle is provided in a chamber.

Detailed description of the preferred embodiment

The first embodiment will be described in detail based on the drawings.

FIG. 1 shows a cleaning device 12 according to the first embodiment.

The cleaning device 12 includes a chamber 14. As shown in Figure 2 ~ 4, The chamber 14 is a closed container. A metal shield 16 is housed and held inside the chamber 14.

The metal mask 16 is, for example, a plate-like member used as a mask when the solder paste 20 (see FIG. 6) is printed on the base material of a printed circuit board. In the examples shown in FIGS. 1 to 4, the metal mask 16 includes a plate-shaped mask body 16A and a frame-shaped reinforcing member 16B attached to the periphery of the mask body 16A.

A plurality of through holes 18 are also formed in the metal mask 16 as shown in FIG. 6. In order to print and apply the solder paste 20 on the base material of the printed circuit board, a part of the solder paste 20 may be attached to the through-hole 18 as an attachment 102 after the metal mask 16 is used. The solder paste 20 is, for example, a state where the flux 20A and the solder particles 20B are mixed at a predetermined volume ratio. That is, the solder paste 20 has the solder particles 20B dispersed in the flux 20A, and the solder paste 20 may remain in the through hole 18 after the metal mask 16 is used. In this embodiment, the metal mask 16 is an example of an object to be cleaned, and the solder paste 20 is an example of an attachment.

As shown in detail in FIGS. 2 to 4, a holding member 22 for holding the metal shield 16 is provided in the chamber 14. In this embodiment, the holding member 22 holds the mask body 16A and the reinforcing member 16B from the outside, and is provided at a predetermined position in the chamber 14. The holding member 22 is an example of the installation portion.

The holding member 22 holds the metal shield 16 in the cavity 14, but does not block the through hole 18 of the metal shield 16. In the chamber 14, a lower space 14B is generated below the metal shield 16, and an upper space 14A is generated above the metal shield 16.

One or a plurality of detergent nozzles 24 are installed on the side wall 14C of the chamber 14 (two in each of the left and right side walls 14C in the example shown in FIGS. 2 to 4, a total of four). The detergent nozzle 24 is an example of an injection port member. As shown in FIG. 3, the detergent nozzle 24 sprays the detergent 104 supplied from the detergent supply device 40 (shown in FIG. 1) into the chamber 14 through the injection port 26.

One or a plurality of suction nozzles 28 are attached to the upper wall 14D of the chamber 14 (in the example shown in FIGS. 2 to 4, there is one in the center of the upper wall 14D). The suction nozzle 28 is an example of a suction port member, and the inside of the suction nozzle 28 is a suction port 30. The suction nozzle 28 includes a plurality of cylindrical casings 32 that gradually increase in diameter as they leave the chamber 14. The suction nozzle 28 shown in FIG. 2 to FIG. 4 includes four housings 32 that gradually increase in diameter as they go upward.

As shown in detail in FIG. 5, one or a plurality of gas (in the example of FIG. 5, there are 4 each) are installed inside the suction port 30, that is, each of the casings 32. Spray nozzle 34. Each of the gas injection nozzles 34 is rotatably mounted to the housing 32 by a shaft 36.

Each of the gas injection nozzles 34 rotates with the shaft 36 as the center, and changes its posture between the first posture 34A shown by a solid line in FIG. 5 and the second posture 34B shown by a two-dot chain line. The gas injection nozzle 34 is inclined at a certain angle θ1 with respect to the direction toward the center of the housing 32 in the first posture 34A, and is inclined with a certain angle θ2 toward the opposite side of the first posture 34A in the second posture 34B. The angle θ1 and the angle θ2 may be equal or different. As shown in FIG. 7, the attitude of the gas injection nozzle 34 is controlled by the control device 38.

The gas injection nozzle 34 is a nozzle that injects a gas supplied from a gas supply device 42 (shown in FIG. 1) into the housing 32, and is an example of a gas injection member. The gas injection nozzle 34 is an example of an inclined member that inclines the moving direction of the detergent 104 in the chamber 14 with respect to the penetrating direction of the through hole 18.

In a state where each of the gas injection nozzles 34 is inclined at the predetermined angle θ1 or θ2 described above, a vortex 106 is generated in the housing 32 and the chamber 14. Further, in this embodiment, for convenience, the direction of the vortex generated in the chamber 14 when the gas injection nozzle 34 is positioned at the first posture 34A (angle θ1) is the right direction (the direction shown in FIG. 5). Therefore, the direction of the eddy current generated in the chamber 14 when the second posture 34B (angle θ2) is in the left direction (the direction opposite to the direction shown in FIG. 5).

The moving direction of the cleaning agent 104 in the chamber 14 is changed by the eddy current 106 generated in the chamber 14. In particular, as shown in FIG. 8A, the moving direction M1 of the cleaning agent 104 is inclined with respect to the penetration direction of the through-hole 18 of the metal mask 16 (the normal direction of the metal mask 16).

As shown in FIG. 8B, when the metal mask 16 is viewed in plan, a vortex 108 is also generated inside the through hole 18. By this eddy current 108, the moving direction M2 of the cleaning agent 104 inside the through-hole 18 can take various directions.

As shown in FIG. 1, the cleaning device 12 includes a detergent supply device 40 and a recovery device 66. The detergent supply device 40 includes a first pipe 64A branched from the supply port 46 through the first pump 48 and the buffer tank 50 at the second pump 52 to the detergent injection nozzle 24. A granular body generating device 54 is provided at the branch portion 64A1 where the first pipe 64A branches. The first piping 64A is an example of a supply piping.

In contrast, the recovery device 66 includes a return member 44. The return member 44 includes a second pipe 64B from the suction nozzle 28 to the buffer tank 50 through the third pump 56, the filter 58, the storage tank 60, and the first valve 62. Among the first pipes 64A and 64A1, the portion from the buffer tank 50 to the detergent injection nozzle 24 and the second pipe 64B are return members 44. That is, in the first piping 64A, 64A1, the portion from the buffer tank 50 to the detergent injection nozzle 24 serves as both a supply piping and a return piping.

The recovery device 66 can be driven by the third pump 56 to the cleaning agent 104 in the recovery chamber 14 through the second pipe 64B and sent to the storage tank 60.

The storage tank 60 is connected to a discharge pipe 70 opened and closed by a second valve 72.

The cleaning medium (water in the example of this embodiment) is supplied from the supply port 46 at one end of the first pipe 64A and is temporarily stored in the buffer tank 50. The cleaning medium in the buffer tank 50 is sent to the granular material generating device 54 when the second pump 52 is driven.

In the present embodiment, the granular material generating device 54 includes a sprayer 74 and a cooler 76 provided in the first pipe 64A1. The liquid cleaning medium is sent to the cleaning agent spray nozzle 24 after being atomized by the atomizer 74 and cooled by the cooler 76. Part or all of the liquid water is solidified by atomization and cooling, and becomes ice particles. Then, as shown in FIG. 3, the ice particles are sprayed into the chamber 14 from the detergent nozzle 24 as the detergent 104. Ice particles are an example of granular bodies.

In the cooler 76, a gas other than oxygen (for example, carbon dioxide or nitrogen) may be mixed with the mist water. Sending gas other than oxygen into the chamber 14, Thereby, the amount of oxygen in the chamber 14 is reduced. By reducing the amount of oxygen in the chamber 14, the flux 20A contained in the solder paste 20 is inhibited from being oxidized to increase the viscosity.

A part of the cleaning agent 104 in the chamber 14 is sucked by the suction nozzle 28 by driving the third pump 56 provided in the second pipe 64B. The detergent 104 sucked by the suction nozzle 28 passes through the filter 58 and is sent to the storage tank 60.

The filter 58 separates a part of the adhered matter (the solder paste 20 and the like removed from the metal mask 16) contained in the detergent 104 from the detergent 104. The cleaning agent 104 separated from the deposits is temporarily stored in the storage tank 60.

The storage tank 60 is provided with a freezing point sensor 78. When a lot of deposits remain in the detergent 104, the freezing point of the detergent 104 becomes low. That is, the freezing point of the detergent 104 is measured by the freezing point sensor 78, and thereby it can be judged whether the detergent 104 contains many attachments. As shown in FIG. 7, the measurement data measured by the freezing point sensor 78 is sent to the control device 38.

When there is a lot of adhered matter remaining in the detergent 104 and the like, when the detergent 104 is not reused, the control device 38 opens the second valve 72 of the discharge pipe 70. The detergent 104 in the storage tank 60 can be discharged from the discharge pipe 80.

On the other hand, when the cleaning agent 104 is reused for reasons such as a small amount of deposits remaining on the cleaning agent 104, the control device 38 opens the first valve 62 to allow the cleaning agent in the storage tank 60 to be opened. 104 moves to the buffer tank 50. The cleaning agent 104 returned to the buffer tank 50 is reused for cleaning the metal mask 16 in the chamber 14.

In addition, a filter may be provided at a portion between the storage tank 60 and the buffer tank 50 of the second pipe 64B, and the cleaning agent 104 may further be used to attach the filter. The objects are separated.

As shown in FIGS. 1 to 4, the lower wall 14E of the chamber 14 is provided with one or a plurality of suction nozzles 82 (opposite to the center of the lower wall 14E in the example shown in FIGS. 1 to 4). The opposite-side suction nozzle 82 is formed in a cylindrical shape, and the inside of the opposite-side suction nozzle 82 is an opposite-side suction port 84. The suction nozzle 82 on the opposite side is located on the opposite side from the suction nozzle 28 with respect to the metal mask 16. In addition, the opposite-side suction port 84 is also located on the side opposite to the suction port 30 with respect to the metal shield 16.

The opposite side suction nozzle 82 is provided with a recovery device 68. The recovery device 68 includes a discharge pipe 86 connected to the suction nozzle 82 on the opposite side.

The discharge pipe 86 is provided with a fourth pump 88, a sedimentation tank 90, a filter 92, and a third valve 94. The recovery device 68 can drive the fourth pump 88 to recover the cleaning agent 104 in the chamber 14 through the discharge pipe 86 and send it to the sedimentation tank 90.

In the sedimentation tank 90, the deposits 102 in the detergent 104 are precipitated. The deposits (precipitates) accumulated in the sedimentation tank 90 can be discarded from the sedimentation tank 90 under predetermined conditions (for example, periodically). In addition, the control device 38 can open the third valve 94 and discharge the clarified part of the cleaning agent 104 in the sedimentation tank 90 from the discharge port of the discharge pipe 86.

As shown in FIGS. 1 to 4, a plurality of reflecting members 96 are formed under the upper wall 14D of the chamber 14. The reflecting member 96 is an example of an inclined member.

Each of the reflecting members 96 has one or a plurality of inclined surfaces 98 (two in the example of FIGS. 1 to 4) inclined with respect to the penetrating direction (the direction of the arrow P1) of the metal shield housed in the chamber 14. In the examples shown in FIGS. 1 to 4, the adjacent inclined surfaces 98 are inclined in opposite directions to each other. Hit the inclined surface The cleaning agent 104 of 98 reflects at a reflection angle different from the incident angle to the upper wall 14D.

The shape of the reflecting member 96 is not limited, and for example, a conical shape or a pyramidal shape may be mentioned (the bottom surface faces upward). There may be gaps between the plurality of reflection members 96. However, as shown in FIGS. 1 to 4, when the plurality of reflection members 96 are formed without a gap, the number of reflection members 96 that can be formed per predetermined area increases.

In this embodiment, the inclined surface 98 is formed as a part of the inner surface of the chamber 14. That is, the reflection member 96 and the cavity 14 are integrated in the cavity 14.

As shown in FIG. 7, the measurement data of the freezing point sensor 78 is sent to the control device 38. The control device 38 controls the first to fourth pumps 48, 52, 56, 88, the first to third valves 62, 72, and 94, and the gas injection nozzle 34. The control device 38 may be a computer that controls the driving of the first to fourth pumps 48, 52, 56, 88, the first to third valves 62, 72, 94, and the gas injection nozzle 34, or a control device that performs sequence control.

Next, the function and cleaning method of this embodiment will be described.

In order to wash the metal mask 16 with the cleaning device 12, as shown in FIG. 2, the metal mask 16 is held on the holding member 22 in the chamber 14. Thereby, since the metal mask 16 is provided in the state hold | maintained at a predetermined position, the position shift of the metal mask 16 at the time of washing can be suppressed.

If necessary, the inside of the chamber 14 is decompressed using a pump or the like. As the pump used at this time, for example, a pump provided for decompression in the chamber 14 can be used.

FIG. 9 shows an example of the timing of driving and stopping the second pump 52, driving and stopping the third pump 56, changing the posture of the gas injection nozzle 34, and driving and stopping the fourth pump 88. The timings (T1 to T10) shown in FIG. 9 are examples for convenience of explanation. For example, although the time intervals between T1 and T10 in FIG. 9 are constant, the time intervals between them may not be constant.

When the metal mask 16 provided in the chamber 14 is cleaned, the second pump 52 is driven to supply the detergent 104 into the chamber 14 (T1 to T2). As a result, as shown in FIG. 3, the detergent 104 is sprayed from the detergent spray nozzle 24 toward the metal mask 16. At this time, the third pump 56 is also driven, and while the vortex 106 is generated in the chamber 14, the suction port 30 is sucked into the chamber 14. In addition, the gas is ejected from the gas injection nozzle 34 (located in the first posture 34A). Thereby, the eddy current 106 occurs in the chamber 14. At this time, since the fourth pump 88 is stopped, the detergent 104 is not sucked from the suction port 84 on the opposite side.

When the detergent 104 passes through the through hole 18, it collides with the solder paste 20 to remove the solder paste 20 from the metal mask 16.

In the present embodiment, the ejection port 26 and the suction port 30 are positioned opposite to each other on the metal mask 16. Therefore, the cleaning agent 104 sprayed from the spray port 26 is easier to pass through the metal cover from the lower space 14B than the structure without the suction port 30 or the structure in which the suction port 30 is located on the same side as the spray port 26 relative to the metal mask 16. Through hole 18 of the cover 16. Therefore, the ability to remove the adherend 102 in the through-hole 18 is high.

In particular, as shown in FIG. 6, although the solder paste 20 remains in the through hole 18, in the cleaning device 12 of this embodiment, the solder paste 20 is removed. High capacity. In addition, even in the metal mask 16 other than the through hole 18, the cleaning agent 104 is strongly touched by being attracted by the suction port 30. The cleaning agent 104 is strongly touched, and even in a place other than the through hole 18, the cleaning device 12 of this embodiment has a high cleaning ability.

In this embodiment, a vortex 106 is generated in the chamber 14 by injecting gas from the gas injection nozzle 34 into the suction port 30. In this state, since the gas injection nozzle 34 is in the first posture 34A, the vortex 106 is rotated to the right.

By this eddy current 106, as shown by an arrow M1 in FIG. 8A, the cleaning agent 104 is inclined with respect to the inner surface 18S of the through-hole 18 of the metal shield 16 to remove the attached matter 102. Further, as shown by an arrow M2 in FIG. 8B, the detergent 104 rotates in the through hole 18 and is inclined with respect to the inner surface 18S of the through hole 18 in a direction different from the arrow M2 to remove the adhered matter 102. Therefore, compared with the structure which does not generate | occur | produce the eddy current 106 in the chamber 14, the cleaning effect on the metal mask 16 is high.

The gas injection nozzle 34 may be provided in the chamber 14 in order to generate the vortex 106 in the chamber 14. As shown in FIGS. 1 to 4, when the gas injection nozzle 34 is provided inside the suction port 30, a space for providing a plurality of gas injection nozzles 34 in the chamber 14 is not required, and the size of the chamber 14 can be reduced. .

In contrast, as shown in FIG. 10, a structure in which the gas injection nozzle 34 is provided in the chamber 14 may be adopted. In the structure shown in FIG. 10, although it is difficult to provide a plurality of gas injection nozzles 34, a vortex can be generated at a position close to the metal shield 16.

From the lower space 14B in the chamber 14 through the through hole 18 upward The detergent 104 rising in the partial space 14A hits the inclined surface 98 and is reflected. Then, as shown in FIG. 4, the through hole 18 is passed again. The inclined surface 98 is inclined with respect to the penetrating direction of the through-hole 18, and the reflected detergent 104 is lowered at an angle different from that when it is raised. That is, there is a high possibility that the detergent 104 passes through the through-hole 18 at an angle different from that when the detergent 104 is raised. Therefore, compared with the structure without the inclined surface 98, the cleaning ability with respect to the metal mask 16 is high.

Furthermore, in this embodiment, the adjacent inclined surfaces 98 have different directions of inclination. Therefore, the angles of all the inclined surfaces 98 are the same, and the detergent 104 can be reflected randomly. That is, since the cleaning agent 104 is highly likely to touch the metal mask 16 at various angles, the cleaning ability of the metal mask 16 is high.

Further, in the examples shown in FIGS. 1 to 4, although the inclined surfaces 98 having symmetrical shapes appearing on both sides of each reflection member 96 are listed, the angles of the inclined surfaces 98 may be random.

The reflecting member 96 having the inclined surface 98 is formed on the inner surface of the cavity 14 in the above-mentioned embodiment. The reflecting member 96 having the inclined surface 98 may be a different object from the cavity 14. However, when the reflecting member 96 is formed on the inner surface of the cavity 14 as described above, the inclined surface 98 and the cavity 14 are integrated, so the number of parts is small. Moreover, a member for attaching the inclined surface (reflection member) to the chamber 14 is also unnecessary.

As shown in FIG. 9, the second pump 52 and the third pump 56 are stopped after being driven for a certain time (T2). The gas injection nozzle 34 is also stopped.

Next, the control device 38 drives the fourth pump 88 (T2 to T3). As a result, the detergent 104 in the chamber 14 is attracted to the suction port 84 on the opposite side. That is, by using the reflection caused by the inclined surface 98, or in addition to the gravity acting on the detergent 104 and attracting it with the suction port 84 on the opposite side, the detergent 104 can be actively moved downward and passed through the through hole 18 .

Furthermore, since the suction timing at the suction port 30 and the suction timing at the opposite side suction port 84 are different, the up and down movements of the detergent 104 in the chamber 14 can be performed interactively.

After the fourth pump 88 is driven for a certain period of time, the control device 38 sets the gas injection nozzle 34 in the second posture 34B (T3). Then, the second pump 52 and the third pump 56 are driven (T3 to T4). As a result, the cleaning agent 104 rises in the chamber 14 and passes through the through hole 18 of the metal mask 16. At this time, since the gas injection nozzle 34 is in the second posture 34B, a leftward vortex occurs in the chamber 14. That is, eddy currents of different orientations occur in the chamber 14 at times T1 to T2 and times T3 to T4. Therefore, compared with a structure in which eddy currents are generated in only one direction, the cleaning agent 104 is passed through the through-holes 18 at different angles, and thus the cleaning effect on the metal mask 16 is high.

After that, the control device 38 will alternately drive the detergent 104 (suction from above) in the chamber 14 by the driving of the second pump 52 and the third pump 56 to attract the cleaning agent 104 in the chamber 14. Detergent 104 (suction from below) (T5 to T9). In the example shown in FIG. 9, the driving of the second pump 52 and the driving of the third pump 56 are repeated four times at times T1 to T9. Thereby, the upward movement and the downward movement of the cleaning agent 104 can occur alternately in the chamber 14, and the cleaning agent 104 can pass through the through-hole 18 multiple times.

In addition, each time the control device 38 drives the second pump 52, the posture of the gas injection nozzle 34 is alternately switched to the first posture 34A (T1 to T2, T5). ~ T6) and the second posture 34B (T3 ~ T4, T7 ~ T8). Thereby, a rightward vortex and a leftward vortex are alternately generated in the chamber 14, and the detergent 104 touches the metal shield 16 at various angles.

After the control device 38 has driven the second pump 52 and the third pump 56 repeatedly for a predetermined number of times, the control device 38 drives the second pump 52 and the third pump 56 together (T9 to T10). When the second pump 52 is driven, a new detergent 104 is injected into the chamber 14 from the injection port 26. In particular, after the detergent 104 is sucked from the injection port 84 on the opposite side for a plurality of times, the detergent in the chamber 14 is reduced, but the detergent 104 is supplied to the chamber 14 by the drive of the second pump 52 Inside, the cleaning ability of the metal mask 16 can be maintained. Then, the detergent 104 in the chamber 14 is sucked upward by the suction port 30 by being driven by the second pump 52.

As described above, when the cleaning operation of the metal mask 16 is performed in the chamber 14, a part of the detergent 104 in the chamber 14 enters the suction port 30 or the suction port 84 on the opposite side.

As described above, in this embodiment, since the cleaning agent 104 in the chamber 14 can be recovered from both the suction port 84 and the suction port 30 on the opposite sides, it is possible to prevent the cleaning agent 104 to which the solder paste 20 adheres from staying in the chamber 14. Inside.

Recovery of the detergent 104 from the inside of the chamber 14 may be performed from only one of the suction port 84 and the suction port 30 on the opposite side. In particular, since the cleaning agent 104 to which a large amount of solder paste is attached has a large specific gravity, it is easier to enter the suction port 84 on the opposite side than the suction port 30. In other words, the suction port 84 on the opposite side is lower than the suction port 30, so the cleaning agent 104 with a lot of solder paste and unsuitable for reuse is easier to enter than the suction port 30 located above the metal shield 16. Side suction port 84.

Further, by providing the opposite-side suction nozzle 82 to the opposite-side suction port 84, the detergent 104 sucked by the opposite-side suction nozzle 82 can be efficiently recovered.

In this way, the detergent 104 that has entered the suction port 84 on the opposite side is recovered to the sedimentation tank 90.

In the sedimentation tank 90, the solder particles 20B having a larger specific gravity than the detergent 104 and the flux 20A are precipitated from the detergent 104. Then, the control device 38 opens the third valve 94 at a predetermined timing or when a certain amount of solder particles are accumulated in the sedimentation tank 90. When the first valve 62 is opened, the clarified component in the upper portion of the detergent 104 can be discarded from the suction port 84 on the opposite side.

The solder particles 20B deposited in the precipitation tank 90 are periodically collected by, for example, an operator.

In contrast, a part of the solder paste 20 can be separated from the cleaning agent 104 sucked by the suction port 30 by the filter 58.

Furthermore, a part of the solder paste 20 in the detergent 104 may be deposited and separated by storing the cleaning agent 104 sucked by the suction port 30 in the storage tank 60.

Most of the detergent 104 attracted by the suction port 30 has a smaller specific gravity than the detergent 104 attracted by the suction port 84 on the opposite side. The cleaning agent 104 attracted by the suction port 30 is recovered by the storage tank 60.

In the detergent 104 from which a part of the solder paste 20 has been removed, it is determined from the measurement result of the freezing point sensor 78 that the reusable detergent 104 passes through the second pipe 64B and passes through a part of the first pipe 64A. Return to the buffer tank 50. That is, the detergent 104 can be reused.

On the other hand, when the cleaning agent 104 determines that it can be reused based on the measurement result of the freezing point sensor 78, the control device 38 opens the second valve 72. The detergent 104 in the storage tank 60 is discharged through a discharge pipe 70.

In the present embodiment, the detergent 104 includes granular bodies (ice particles). The granular body touches the adherend of the object to be washed, and the adherend is removed from the object to be washed off. Therefore, compared with the structure which used the detergent which does not contain a granular body, the washing | cleaning target object has a high cleaning effect.

Moreover, since the detergent 104 contains ice particles, it is easy to maintain the inside of the chamber 14 at a low temperature. By keeping the inside of the chamber 14 at a low temperature, the adhesiveness of the solder paste 20 is reduced, and therefore, it becomes easy to remove the metal mask 16.

In addition, the cleaning device 12 of this embodiment uses ice particles instead of a volatile organic solvent when removing the solder paste 20 (attachment). Compared with a volatile organic solvent, ice particles (water) are easier to handle and reuse, and the object to be cleaned can be washed at a lower cost. By reusing water as the cleaning agent 104, it is also possible to reduce the amount of waste of the cleaning agent.

In addition, by not using an organic solvent as a cleaning agent, the influence on the adhesive or the like for bonding the mask body 16A and the reinforcing member 16B is small.

When ice particles are used as the cleaning agent 104, the degree of freedom of the shape and particle size of the ice particles is large. Therefore, according to the size of the metal mask 16, the size of the through-hole 18, and the physical properties of the solder paste 20, the cleaning effect can be improved while shortening the cleaning time.

The object to be cleaned in this embodiment is not limited to the metal mask 16 described above. In short, as long as it is a member with a through hole, it is possible to improve the cleaning The permeability of the agent to the through-holes improves the ability to remove the adhered matter attached to the object to be cleaned.

In addition, the object to be cleaned in this embodiment is not limited to a solder paste, and can be applied to a case where a conductive paste paint or a polishing paste is removed from the object to be cleaned. For example, conductive paste coatings have properties similar to solder paste. In addition, there are those containing a hard abrasive (such as diamond powder) in the polishing paste. When such a conductive paste paint, a polishing paste, or the like is removed from the object to be cleaned, the object to be cleaned in the present embodiment has a high ability to remove the adhered matter from the through hole.

In the foregoing, the embodiments of the technology disclosed in this case have been described. However, the technology disclosed in this case is not limited to the above, and of course, various modifications can be implemented within the scope that does not escape the gist of the invention.

According to the technology disclosed in this case, the removal ability of the adherend to the object to be cleaned having the through-holes formed is high.

All documents, patent applications, and technical specifications described in this specification are incorporated by reference, and each document, patent application, and technical specification is taken to the same extent as the specific or individual recorded case by reference Taken into this manual.

12‧‧‧washing device

14‧‧‧ chamber

14D‧‧‧Upper Wall

14E‧‧‧ lower wall

16‧‧‧ metal mask

16A‧‧‧Mask body

16B‧‧‧ Reinforcing member

18‧‧‧through hole

24‧‧‧ Detergent nozzle

26‧‧‧jet port

28‧‧‧ suction nozzle

30‧‧‧ Attraction

34‧‧‧Gas jet nozzle

38‧‧‧control device

40‧‧‧ detergent supply device

42‧‧‧Gas supply device

44‧‧‧Return to component

46‧‧‧ supply port

48‧‧‧The first pump

50‧‧‧ buffer tank

52‧‧‧Pump 2

54‧‧‧ Granular body generating device

56‧‧‧3rd pump

58‧‧‧Filter

60‧‧‧Storage tank

62‧‧‧The first valve

64A‧‧‧The first piping

64A1‧‧‧The first piping (divergent part)

64B‧‧‧ 2nd piping

66‧‧‧ Recovery device

68‧‧‧ Recovery device

70‧‧‧ discharge pipe

72‧‧‧ 2nd valve

74‧‧‧ sprayer

76‧‧‧Cooler

78‧‧‧ Freezing point sensor

82‧‧‧ opposite side suction nozzle

84‧‧‧ opposite side suction mouth

86‧‧‧Exhaust piping

88‧‧‧4th pump

90‧‧‧ settling tank

92‧‧‧ Filter

94‧‧‧3rd valve

96‧‧‧Reflecting member

P‧‧‧ Arrow

Claims (16)

A cleaning device includes a spray port member that sprays a cleaning agent from a spray port that is provided on a lower side with respect to a cleaning object having a through hole, and a suction port member that uses the spray port member to be on the upper side with respect to the cleaning object. The suction port provided on the side opposite to the spray port sucks the detergent; and the suction port member on the opposite side is provided on the opposite side to the suction port on the lower side with respect to the object to be cleaned. The suction port sucks the aforementioned detergent. The cleaning device according to claim 1, further comprising a granular body generating device for allowing the aforementioned detergent to contain granular bodies. The cleaning device according to claim 1 or 2 includes a chamber in which the cleaning object can be installed, and the injection port member and the suction port member are installed. The cleaning device according to claim 3 includes an inclined member that inclines the moving direction of the cleaning agent with respect to the penetrating direction of the through hole. The cleaning device according to claim 4, wherein the inclined member includes a gas injection member that injects a gas to the detergent to generate a vortex. The cleaning device according to claim 5, wherein the gas injection member is provided inside the suction port. The cleaning device according to claim 4, wherein the inclined member is provided in the cavity. The cleaning device according to claim 4, wherein the inclined member has an inclined surface that is inclined with respect to a penetration direction of the through-hole. The cleaning device according to claim 8, wherein a part of the inner surface of the chamber is used as the inclined surface. According to the cleaning device of claim 8, wherein the aforementioned inclined surfaces are formed in plural, the inclined directions of the adjacent inclined surfaces are different. The cleaning device according to claim 1, wherein the suction timing is different between the suction port and the suction port on the opposite side. The cleaning device according to claim 1, further comprising a recovery device for recovering the cleaning agent sucked from at least one of the suction port and the suction port on the opposite side. The cleaning device according to claim 1, wherein the recovery device recovers the cleaning agent sucked by the suction member on the opposite side. The cleaning device according to claim 12 or claim 13 includes a separating member that separates at least a part of the attached matter removed from the object to be cleaned from the cleaning agent recovered by the recovery device. The cleaning device according to claim 14, further comprising a returning means for returning the cleaning agent separated from the attachment member to at least a part of the attachment to the ejection port. A cleaning method in which a cleaning agent is sprayed from an injection port provided on a lower side with respect to a cleaning object having a through hole, and the cleaning agent is provided on an opposite side to the spray port from an upper side with respect to the cleaning object. The suction port sucks the cleaning agent, and sucks the cleaning agent by using a suction port provided on a side opposite to the suction port and opposite to the cleaning object. Detergent.